CN114311352A - Silicon rod cutting and grinding system and silicon rod cutting and grinding method - Google Patents

Silicon rod cutting and grinding system and silicon rod cutting and grinding method Download PDF

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CN114311352A
CN114311352A CN202111568655.5A CN202111568655A CN114311352A CN 114311352 A CN114311352 A CN 114311352A CN 202111568655 A CN202111568655 A CN 202111568655A CN 114311352 A CN114311352 A CN 114311352A
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cutting
silicon rod
rod
grinding
flaw
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孙鹏
范国强
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Qingdao Gaoce Technology Co Ltd
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Leshan Gaoce New Energy Technology Co ltd
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Abstract

The embodiment of the application provides a silicon rod cutting and grinding system and a silicon rod cutting and grinding method thereof. Silicon rod cutting grinding system includes: a machine base; the rotary platform is rotatably arranged on the base; the fixing device is fixed on the rotating platform and used for fixing the vertically placed silicon rod; the first cutting device, the second cutting device and the grinding device sequentially surround the outer side of the rotating platform and are fixed on the machine base; the rotating platform is used for rotating the silicon rods fixed by the fixing device to the first cutting device, the second cutting device and the grinding device in sequence for operation. According to the silicon rod cutting and grinding system, on one hand, the overall structure of the silicon rod cutting and grinding system is compact in layout, and on the other hand, the silicon rods can be rapidly and stably taken to each processing device by the rotating platform to perform corresponding processing operation.

Description

硅棒切割磨削系统及其硅棒切割磨削方法Silicon rod cutting and grinding system and silicon rod cutting and grinding method

技术领域technical field

本申请涉及硅棒切割技术领域,具体地,涉及一种硅棒切割磨削系统及其硅棒切割磨削方法。The present application relates to the technical field of silicon rod cutting, and in particular, to a silicon rod cutting and grinding system and a silicon rod cutting and grinding method.

背景技术Background technique

目前,随着社会对绿色可再生能源利用的重视和开放,光伏太阳能发电领域越来越得到重视和发展。光伏发电领域中,通常的晶体硅太阳能电池是在高质量硅片上制成的,这种硅片从提拉或浇铸的硅棒后通过线锯切割而成,即线切割技术。At present, with the attention and opening of the society to the utilization of green and renewable energy, the field of photovoltaic solar power generation has received more and more attention and development. In the field of photovoltaic power generation, the usual crystalline silicon solar cells are made on high-quality silicon wafers, which are cut by wire saws from pulled or cast silicon rods, that is, wire cutting technology.

线切割技术是目前世界上比较先进的开方加工技术,它的原理是通过高速运动的金刚线对待加工工件(例如:硅棒、蓝宝石、或其他半导体硬脆材料)进行摩擦,切出方棒,从而达到切割目的。线切割技术与传统的刀锯片、砂轮片及内圆切割相比具有效率高、产能高、精度高等优点。Wire cutting technology is a relatively advanced square root processing technology in the world. Its principle is to rub the workpiece (such as silicon rod, sapphire, or other semiconductor hard and brittle materials) with high-speed moving diamond wire to cut out square rods. , so as to achieve the purpose of cutting. Compared with traditional saw blade, grinding wheel and inner circle cutting, wire cutting technology has the advantages of high efficiency, high productivity and high precision.

现有的硅棒切割磨削系统已经无法满足光伏行业对硅片的要求。The existing silicon rod cutting and grinding system can no longer meet the requirements of the photovoltaic industry for silicon wafers.

在背景技术中公开的上述信息仅用于加强对本申请的背景的理解,因此其可能包含没有形成为本领域普通技术人员所知晓的现有技术的信息。The above information disclosed in this Background section is only for enhancement of understanding of the background of the application and therefore it may contain information that does not form the prior art that is already known to a person of ordinary skill in the art.

发明内容SUMMARY OF THE INVENTION

本申请实施例提供了一种新结构的硅棒切割磨削系统及其硅棒切割磨削方法。The embodiments of the present application provide a new structure of a silicon rod cutting and grinding system and a silicon rod cutting and grinding method thereof.

本申请实施例提供了一种硅棒切割磨削系统,包括:The embodiment of the present application provides a silicon rod cutting and grinding system, including:

机座;Machine base;

旋转平台,转动安装在所述机座之上;a rotating platform, which is rotatably mounted on the base;

固定装置,固定在所述旋转平台之上,用于固定立式放置的硅棒;a fixing device, fixed on the rotating platform, for fixing the vertically placed silicon rod;

第一切割装置、第二切割装置和磨削装置,所述第一切割装置、第二切割装置和磨削装置依次围绕在所述旋转平台的外侧且固定在所述机座之上;a first cutting device, a second cutting device and a grinding device, the first cutting device, the second cutting device and the grinding device are sequentially surrounded on the outside of the rotating platform and fixed on the machine base;

其中,所述旋转平台用于旋转将所述固定装置固定的硅棒依次转动到第一切割装置、第二切割装置和磨削装置进行作业。Wherein, the rotating platform is used to rotate the silicon rod fixed by the fixing device to rotate to the first cutting device, the second cutting device and the grinding device in turn for operation.

实施中,所述第一切割装置和所述磨削装置相对设置;In implementation, the first cutting device and the grinding device are arranged opposite to each other;

所述硅棒切割磨削系统还包括转运装置,所述转运装置活动连接在所述机座之上中与所述第二切割装置相对的一侧;The silicon rod cutting and grinding system further includes a transfer device, the transfer device is movably connected on the side of the machine base opposite to the second cutting device;

所述固定装置包括固定柱和至少三个硅棒纵向固定机构,各个所述硅棒纵向固定机构间隔安装在所述固定柱的侧面处。The fixing device includes a fixing column and at least three longitudinal fixing mechanisms for silicon rods, and each longitudinal fixing mechanism for the silicon rods is installed at the side of the fixing column at intervals.

本申请实施例还提供了一种硅棒切割磨削方法,包括如下步骤:The embodiment of the present application also provides a method for cutting and grinding a silicon rod, comprising the following steps:

转动旋转平台,将第一硅棒转动到第一切割装置处;Rotate the rotating platform to rotate the first silicon rod to the first cutting device;

第一切割装置的两个切割机头机构自上而下运动,对第一硅棒进行第一次切割,形成第一中间棒和两个相背的边皮;The two cutting head mechanisms of the first cutting device move from top to bottom, and the first silicon rod is cut for the first time to form a first middle rod and two opposite side skins;

将两个边皮取走,第一切割装置的两个切割机头机构向上复位;Remove the two side skins, and reset the two cutting head mechanisms of the first cutting device upwards;

继续转动旋转平台,将第一中间棒转动到第二切割装置处,同时,第二硅棒转动到第一切割装置处;Continue to rotate the rotating platform, rotate the first intermediate rod to the second cutting device, and at the same time, rotate the second silicon rod to the first cutting device;

第二切割装置的两个切割机头机构自上而下运动,对第一中间棒进行第二次切割,形成第一方棒和两个相背的边皮;同时,第一切割装置的两个切割机头机构自上而下运动,对第二硅棒进行第一次切割;The two cutting head mechanisms of the second cutting device move from top to bottom to cut the first middle bar for the second time to form a first square bar and two opposite side skins; at the same time, the two cutting devices of the first cutting device A cutting head mechanism moves from top to bottom, and cuts the second silicon rod for the first time;

将边皮取走,第一切割装置的两个切割机头机构和第二切割装置的两个切割机头机构向上复位。The side skin is removed, and the two cutting head mechanisms of the first cutting device and the two cutting head mechanisms of the second cutting device are reset upward.

本申请实施例由于采用以上技术方案,具有以下技术效果:Due to the adoption of the above technical solutions, the embodiments of the present application have the following technical effects:

本申请实施例的硅棒切割磨削系统,固定装置固定在旋转平台之上,即旋转平台和固定装置固定为一个整体,转动安装在机座之上。固定装置用于固定立式放置的硅棒,这样,旋转平台转动,就能带动固定装置固定的立式放置的硅棒转动。第一切割装置、第二切割装置和磨削装置依次围绕在旋转平台的外侧且固定在机座之上。这样,旋转平台旋转带动固定装置固定的立式放置的硅棒依次转动到第一切割装置、第二切割装置和磨削装置,分别由第一切割装置、第二切割装置和磨削装置进行对应的加工作业。本申请实施例的硅棒切割磨削系统,将三个加工装置-第一切割装置、第二切割装置和磨削装置以环绕的方式设置在旋转平台的周围,一方面使得硅棒切割磨削系统整体结构的布局紧凑,另一方面,旋转平台能够快速平稳的将硅棒带到各个加工装置进行对应的加工作业。In the silicon rod cutting and grinding system of the embodiment of the present application, the fixing device is fixed on the rotating platform, that is, the rotating platform and the fixing device are fixed as a whole, and are rotatably installed on the machine base. The fixing device is used to fix the vertically placed silicon rod, so that the rotation of the rotating platform can drive the vertically placed silicon rod fixed by the fixing device to rotate. The first cutting device, the second cutting device and the grinding device are sequentially surrounded on the outer side of the rotating platform and fixed on the machine base. In this way, the rotating platform rotates and drives the vertically placed silicon rods fixed by the fixing device to rotate to the first cutting device, the second cutting device and the grinding device in turn, and the first cutting device, the second cutting device and the grinding device correspond respectively. processing operations. In the silicon rod cutting and grinding system of the embodiment of the present application, three processing devices—a first cutting device, a second cutting device and a grinding device are arranged around the rotating platform in a surrounding manner, on the one hand, the silicon rod is cut and ground. The overall structure of the system has a compact layout. On the other hand, the rotating platform can quickly and smoothly bring the silicon rods to each processing device for corresponding processing operations.

附图说明Description of drawings

图1为本申请实施例的硅棒切割磨削系统的切割流程示意图;1 is a schematic diagram of a cutting process of a silicon rod cutting and grinding system according to an embodiment of the application;

图1A为本申请实施例的硅棒切割磨削系统的示意图;1A is a schematic diagram of a silicon rod cutting and grinding system according to an embodiment of the application;

图1B为图1A所示的硅棒切割磨削系统的旋转平台和固定装置的示意图;1B is a schematic diagram of a rotating platform and a fixing device of the silicon rod cutting and grinding system shown in FIG. 1A;

图1C为图1A所示的硅棒切割磨削系统的固定装置的示意图;FIG. 1C is a schematic diagram of the fixing device of the silicon rod cutting and grinding system shown in FIG. 1A;

图1D为图1A所示的硅棒切割磨削系统的切割装置切割的示意图;FIG. 1D is a schematic diagram of cutting by a cutting device of the silicon rod cutting and grinding system shown in FIG. 1A;

图1E为图1D所示的切割装置的局部示意图;Fig. 1E is a partial schematic view of the cutting device shown in Fig. 1D;

图1F为图1A所示的硅棒切割磨削系统的磨削装置的示意图;1F is a schematic diagram of a grinding device of the silicon rod cutting and grinding system shown in FIG. 1A;

图2A为本申请实施例的硅棒切割磨削系统的上下料装置的示意图;2A is a schematic diagram of a loading and unloading device of a silicon rod cutting and grinding system according to an embodiment of the application;

图2B为图2A另一角度的示意图;FIG. 2B is a schematic diagram of another angle of FIG. 2A;

图2C是图2B的局部放大图;Fig. 2C is a partial enlarged view of Fig. 2B;

图3A、图3B和图3C为本申请实施例硅棒切割磨削系统的转运装置的示意图;3A, FIG. 3B and FIG. 3C are schematic diagrams of the transfer device of the silicon rod cutting and grinding system according to the embodiment of the present application;

图3D和图3E为图3A的转运装置的上夹爪组件和下夹爪组件的示意图;3D and 3E are schematic views of the upper jaw assembly and the lower jaw assembly of the transfer device of FIG. 3A;

图4A为本申请实施例硅棒切割磨削系统切割装置的切割机头机构的示意图;4A is a schematic diagram of a cutting head mechanism of a cutting device of a silicon rod cutting and grinding system according to an embodiment of the present application;

图4B为本申请实施例的硅棒切割磨削系统的同一切割装置的两个切割机头机构自上而下对硅棒切割完成的示意图;4B is a schematic diagram illustrating the completion of cutting the silicon rod from top to bottom by two cutting head mechanisms of the same cutting device of the silicon rod cutting and grinding system according to the embodiment of the application;

图4C和图4D为将图4B中一次切割形成的两个边皮从机头通孔中移走的示意图;4C and 4D are schematic diagrams of removing the two edge skins formed by one cut in FIG. 4B from the through hole of the machine head;

图4E为图1A所示切割装置的支撑框架、横向进给机构和垂向进给机构的示意图;4E is a schematic diagram of a support frame, a transverse feed mechanism and a vertical feed mechanism of the cutting device shown in FIG. 1A ;

图4F为图1A所示硅棒切割磨削系统的硅棒纵向固定机构夹紧硅棒的示意图;4F is a schematic diagram of the silicon rod longitudinal fixing mechanism of the silicon rod cutting and grinding system shown in FIG. 1A clamping the silicon rod;

图4G为图4F所示的硅棒纵向固定机构的示意图。FIG. 4G is a schematic diagram of the longitudinal fixing mechanism of the silicon rod shown in FIG. 4F .

附图标记说明:Description of reference numbers:

机座1,base 1,

上下料装置2,圆棒上料架211,圆棒支撑机构212,圆棒夹紧块213,圆棒夹紧气缸214,夹紧块位移测量装置215,上下料支撑框架23,上料翻转油缸216,减速接近开关217,方棒下料组件22,Loading and unloading device 2, round bar feeding rack 211, round bar supporting mechanism 212, round bar clamping block 213, round bar clamping cylinder 214, clamping block displacement measuring device 215, loading and unloading support frame 23, feeding and turning cylinder 216, deceleration proximity switch 217, square bar blanking assembly 22,

转运装置3,上下料夹爪框架31,转运气液缸321,气液转换器322,转运气缸323,转运夹爪固定板331,左夹爪332-1,右夹爪332-2,硅棒检测探针333,竖向导轨341,转运夹爪气缸351,连接板352,齿条353,同步齿轮354,回转座361,Transfer device 3, loading and unloading gripper frame 31, transfer hydraulic cylinder 321, gas-liquid converter 322, transfer cylinder 323, transfer gripper fixing plate 331, left gripper 332-1, right gripper 332-2, silicon rod Detection probe 333, vertical guide rail 341, transfer gripper cylinder 351, connecting plate 352, rack 353, synchronizing gear 354, rotary seat 361,

第一切割装置4-1,第二切割装置4-2,磨削装置4-3,The first cutting device 4-1, the second cutting device 4-2, the grinding device 4-3,

复合磨削本体4-31,磨削支撑框架4-32,Composite grinding body 4-31, grinding support frame 4-32,

切割机头机构41,线锯安装架411,机头通孔411-1,主动轮组件412-1,下过渡轮412-2,张力轮组件412-3,上过渡轮412-4,Cutting head mechanism 41, wire saw mounting frame 411, head through hole 411-1, driving wheel assembly 412-1, lower transition wheel 412-2, tension wheel assembly 412-3, upper transition wheel 412-4,

硅棒纵向固定机构42,夹头架421,上浮动头422,扶边皮支架安装件423-1,扶杆固定件423-2,边皮扶杆423-3,扶边皮驱动气缸423-4,夹头架竖向运动导轨424,Silicon rod longitudinal fixing mechanism 42, chuck frame 421, upper floating head 422, edge support bracket mounting piece 423-1, support rod fixing piece 423-2, edge skin support rod 423-3, edge support drive cylinder 423- 4. The vertical movement guide rail 424 of the collet frame,

硅棒支撑安装座431,下浮动头432,下浮动头支撑头432-1,边皮支撑头433-1,边皮支撑用气缸433-2,硅棒转动轴434-1,硅棒驱动电机434-2,Silicon rod support mount 431, lower floating head 432, lower floating head support head 432-1, edge skin support head 433-1, edge skin support cylinder 433-2, silicon rod rotating shaft 434-1, silicon rod drive motor 434-2,

支撑框架44,support frame 44,

横向进给机构451,线锯横向滑板451-1,垂向进给机构452,线锯垂向滑板452-1,阻挡插销461,阻挡条462,Transverse feeding mechanism 451, jigsaw transverse sliding plate 451-1, vertical feeding mechanism 452, jigsaw vertical sliding plate 452-1, blocking latch 461, blocking strip 462,

边皮夹持机构47,夹持固定座471,一级臂472-1,二级臂472-2,边皮夹持爪473,边皮夹爪安装板473-1,底夹爪473-2,顶夹爪473-3,Side leather clamping mechanism 47, clamping fixed seat 471, primary arm 472-1, secondary arm 472-2, side leather clamping claw 473, side leather clamping claw mounting plate 473-1, bottom clamping claw 473-2 , top jaw 473-3,

边皮收集组件48,Side skin collection assembly 48,

旋转平台5,Rotating platform 5,

固定装置6。Fixture 6.

具体实施方式Detailed ways

以下结合附图对本申请的示例性实施例进行进一步详细的说明。The exemplary embodiments of the present application will be described in further detail below with reference to the accompanying drawings.

本申请实施例的硅棒切割磨削系统,用于对竖向放置的圆形的硅棒进行竖向切割和磨削。对硅棒进行切割的过程如图1所示,对圆形的硅棒进行两次切割,形成一个方棒和四个边皮。之后,对方棒进行磨削。竖向放置的圆形的硅棒又称为立式放置的圆形的硅棒。The silicon rod cutting and grinding system of the embodiment of the present application is used to vertically cut and grind a circular silicon rod placed vertically. The process of cutting the silicon rod is shown in Figure 1. The round silicon rod is cut twice to form a square rod and four edge skins. After that, the opposing rod is ground. Vertically placed round silicon rods are also called vertically placed round silicon rods.

如图1A,图1B,图1C,图1D和图1E所示,本申请实施例的硅棒切割磨削系统,包括:As shown in FIG. 1A , FIG. 1B , FIG. 1C , FIG. 1D and FIG. 1E , the silicon rod cutting and grinding system according to the embodiment of the present application includes:

机座1;base 1;

旋转平台5,转动安装在所述机座1之上;The rotating platform 5 is rotatably mounted on the base 1;

固定装置6,固定在所述旋转平台5之上,用于固定立式放置的硅棒;A fixing device 6, fixed on the rotating platform 5, is used for fixing the silicon rod placed vertically;

第一切割装置4-1、第二切割装置4-2和磨削装置4-3,所述第一切割装置4-1、第二切割装置4-2和磨削装置4-3依次围绕在所述旋转平台的外侧且固定在所述机座之上;The first cutting device 4-1, the second cutting device 4-2 and the grinding device 4-3, the first cutting device 4-1, the second cutting device 4-2 and the grinding device 4-3 are sequentially surrounded by the The outer side of the rotating platform is fixed on the base;

其中,所述旋转平台5用于旋转将所述固定装置6固定的硅棒依次转动到第一切割装置4-1、第二切割装置4-2和磨削装置4-3进行作业。Wherein, the rotating platform 5 is used to rotate the silicon rods fixed by the fixing device 6 to the first cutting device 4-1, the second cutting device 4-2 and the grinding device 4-3 for operation in sequence.

本申请实施例的硅棒切割磨削系统,固定装置固定在旋转平台之上,即旋转平台和固定装置固定为一个整体,转动安装在机座之上。固定装置用于固定立式放置的硅棒,这样,旋转平台转动,就能带动固定装置固定的立式放置的硅棒转动。第一切割装置、第二切割装置和磨削装置依次围绕在旋转平台的外侧且固定在机座之上。这样,旋转平台旋转带动固定装置固定的立式放置的硅棒依次转动到第一切割装置、第二切割装置和磨削装置,分别由第一切割装置、第二切割装置和磨削装置进行对应的加工作业。本申请实施例的硅棒切割磨削系统,将三个加工装置-第一切割装置、第二切割装置和磨削装置以环绕的方式设置在旋转平台的周围,一方面使得硅棒切割磨削系统整体结构的布局紧凑,另一方面,旋转平台能够快速平稳的将硅棒带到各个加工装置进行对应的加工作业。In the silicon rod cutting and grinding system of the embodiment of the present application, the fixing device is fixed on the rotating platform, that is, the rotating platform and the fixing device are fixed as a whole, and are rotatably installed on the machine base. The fixing device is used to fix the vertically placed silicon rod, so that the rotation of the rotating platform can drive the vertically placed silicon rod fixed by the fixing device to rotate. The first cutting device, the second cutting device and the grinding device are sequentially surrounded on the outer side of the rotating platform and fixed on the machine base. In this way, the rotating platform rotates and drives the vertically placed silicon rods fixed by the fixing device to rotate to the first cutting device, the second cutting device and the grinding device in turn, and the first cutting device, the second cutting device and the grinding device correspond respectively. processing operations. In the silicon rod cutting and grinding system of the embodiment of the present application, three processing devices—a first cutting device, a second cutting device and a grinding device are arranged around the rotating platform in a surrounding manner, on the one hand, the silicon rod is cut and ground. The overall structure of the system has a compact layout. On the other hand, the rotating platform can quickly and smoothly bring the silicon rods to each processing device for corresponding processing operations.

作为一种可选的方式,所述第一切割装置和所述磨削装置相对设置;As an optional manner, the first cutting device and the grinding device are disposed opposite to each other;

所述硅棒切割磨削系统还包括转运装置,所述转运装置活动连接在所述机座之上中与所述第二切割装置相对的一侧;The silicon rod cutting and grinding system further includes a transfer device, the transfer device is movably connected on the side of the machine base opposite to the second cutting device;

所述固定装置包括固定柱和至少三个硅棒纵向固定机构,各个所述硅棒纵向固定机构间隔安装在所述固定柱的侧面处。The fixing device includes a fixing column and at least three longitudinal fixing mechanisms for silicon rods, and each longitudinal fixing mechanism for the silicon rods is installed at the side of the fixing column at intervals.

硅棒纵向固定机构至少三个,这样,与三个加工装置配合,使得三个加工装置能够同时工作。There are at least three longitudinal fixing mechanisms for the silicon rods, so that the three processing devices can work simultaneously in cooperation with the three processing devices.

实施中,如图1A所示,所述第一切割装置4-1和所述磨削装置4-3相对设置;In implementation, as shown in FIG. 1A , the first cutting device 4-1 and the grinding device 4-3 are disposed opposite to each other;

所述硅棒切割磨削系统还包括转运装置3,所述转运装置3活动连接在所述机座1之上中与所述第二切割装置4-2相对的一侧;The silicon rod cutting and grinding system further includes a transfer device 3, and the transfer device 3 is movably connected on the side of the machine base 1 opposite to the second cutting device 4-2;

所述固定装置包括固定柱和四个硅棒纵向固定机构42,四个所述硅棒纵向固定机构42以两两相背的方式安装在所述固定柱的侧面处。The fixing device includes a fixing column and four longitudinal fixing mechanisms 42 for silicon rods, and the four longitudinal fixing mechanisms 42 for silicon rods are installed at the side surfaces of the fixing column in a manner of facing each other.

这样,固定装置的四个硅棒纵向固定机构能够分别与第一切割装置、第二切割装置、磨削装置和转运装置设置的一侧相对设置。与转运装置位于同一侧的硅棒纵向固定机构,转运装置能够将硅棒转运到同侧的硅棒纵向固定机构的位置进行固定。旋转平台转动90度,硅棒被转动到第一切割装置进行第一次切割,形成中间棒和相背排列的两个边皮;将两个边皮取走后;旋转平台再次转动90度,中间棒被转动到第二切割装置,且中间棒被转动90度后进行第二次切割,形成方棒和相背排列的两个边皮;将两个边皮取走后;旋转平台再一次转动90度,方棒被转动到磨削装置进行磨削;磨削完成后,旋转平台又一次转动90度,方棒被转动到转运装置处,转运装置将磨削后的方棒带走。为了描述方便,这里进描述了一个硅棒被加工的过程,本申请实施例的硅棒切割磨削系统,可以按顺序对三个硅棒进行加工,三个硅棒加工的部分时间有重合。In this way, the four longitudinal fixing mechanisms of the silicon rods of the fixing device can be respectively arranged opposite to the side where the first cutting device, the second cutting device, the grinding device and the transfer device are arranged. The longitudinal fixing mechanism of the silicon rod is located on the same side as the transfer device, and the transfer device can transfer the silicon rod to the position of the longitudinal fixing mechanism of the silicon rod on the same side for fixing. The rotating platform is rotated 90 degrees, and the silicon rod is rotated to the first cutting device for the first cutting, forming a middle rod and two side skins arranged opposite to each other; after removing the two edge skins; the rotating platform is rotated 90 degrees again, The middle bar is rotated to the second cutting device, and the middle bar is rotated 90 degrees and then the second cutting is performed to form a square bar and two side skins arranged opposite to each other; after the two side skins are removed; the rotating platform is again After turning 90 degrees, the square bar is rotated to the grinding device for grinding; after the grinding is completed, the rotating platform is rotated 90 degrees again, and the square bar is rotated to the transfer device, and the transfer device takes the ground square bar away. For the convenience of description, a process of processing a silicon rod is described here. The silicon rod cutting and grinding system of the embodiment of the present application can process three silicon rods in sequence, and part of the processing time of the three silicon rods overlaps.

具体的,固定柱和旋转平台的轴心重合。这样,固定柱和旋转平台在转动时,不会发生偏心的现象,磨损较小。Specifically, the axes of the fixed column and the rotating platform are coincident. In this way, when the fixed column and the rotating platform rotate, the phenomenon of eccentricity will not occur, and the wear and tear is small.

具体的,固定柱为方柱,四个硅棒纵向固定机构以两两相背的方式安装在方柱的四个侧面处。Specifically, the fixing column is a square column, and the four longitudinal fixing mechanisms of the silicon rods are installed on the four sides of the square column in a two-by-two manner.

这样,方柱和四个硅棒纵向固定机构形成十字形的排列结构。方柱能够方便将硅棒纵向固定机构进行安装。In this way, the square column and the longitudinal fixing mechanism of the four silicon rods form a cross-shaped arrangement structure. The square column can facilitate the installation of the longitudinal fixing mechanism of the silicon rod.

实施中,如图1A所示,所述硅棒切割磨削系统还包括:In implementation, as shown in FIG. 1A , the silicon rod cutting and grinding system further includes:

上下料装置2,转运装置安装在所述固定装置和上下料装置之间;其中,所述上下料装置2用于圆形的硅棒的上料和切割形成的方棒的下料;Loading and unloading device 2, the transfer device is installed between the fixing device and the loading and unloading device; wherein, the loading and unloading device 2 is used for the feeding of circular silicon rods and the unloading of square rods formed by cutting;

所述转运装置3用于将所述上下料装置2上料的硅棒转运至所述固定装置处,且用于磨削后的方棒转运至所述上下料装置2。即转运装置用于实现硅棒和方棒在上下料装置2和固定装置之间的转运;The transfer device 3 is used for transferring the silicon rods loaded by the loading and unloading device 2 to the fixing device, and for transferring the ground square rods to the loading and unloading device 2 . That is, the transfer device is used to realize the transfer of silicon rods and square rods between the loading and unloading device 2 and the fixing device;

其中,所述转运装置能够旋转以朝向所述上下料装置和所述固定装置,所述转运装置还能够自所述上下料装置和所述固定装置之间的第一方向,以及在机座之上且与第一方向相垂直的第二方向运动,以实现硅棒在上下料装置2和固定装置之间的精准转运。Wherein, the transfer device can be rotated to face the loading and unloading device and the fixing device, and the transfer device can also be rotated from the first direction between the loading and unloading device and the fixing device, and between the machine base It moves in a second direction that is up and perpendicular to the first direction, so as to realize the precise transfer of the silicon rods between the loading and unloading device 2 and the fixing device.

第一切割装置、第二切割装置和磨削装置共用一套上下料装置2、转运装置3,使得硅棒切割磨削系统的部件较少,占用的空间也较小。The first cutting device, the second cutting device and the grinding device share a set of loading and unloading device 2 and transfer device 3, so that the silicon rod cutting and grinding system has fewer components and occupies less space.

具体的,所述第一切割装置和所述第二切割装置为结构相同的切割装置。Specifically, the first cutting device and the second cutting device are cutting devices with the same structure.

硅棒切割磨削系统的磨削装置的结构Structure of Grinding Device of Silicon Rod Cutting Grinding System

实施中,如图1F所示,所述磨削装置包括:In practice, as shown in Figure 1F, the grinding device includes:

磨削支撑框架4-32,固定在所述机座之上;Grinding the supporting frame 4-32 and fixing it on the machine base;

对方棒进行粗磨和细磨的复合磨削本体4-31,安装在所述磨削支撑框架4-32的正侧且所述复合磨削本体能够自上而下运动对竖向放置的方棒进行磨削。The composite grinding body 4-31 for rough grinding and fine grinding of the opposite bar is installed on the positive side of the grinding support frame 4-32, and the composite grinding body can move from top to bottom to the vertically placed side. The rod is ground.

磨削支撑框架是磨削装置的安装基础。复合磨削本体能够实现自上而下运动,对切割后且竖向放置的方棒进行粗磨和细磨。The grinding support frame is the installation base of the grinding device. The composite grinding body can move from top to bottom, and perform rough grinding and fine grinding on the square bar after cutting and placed vertically.

硅棒切割磨削系统的切割装置的结构The structure of the cutting device of the silicon rod cutting and grinding system

实施中,如图1A,图1D和图1E所示,所述切割装置包括:In implementation, as shown in FIG. 1A , FIG. 1D and FIG. 1E , the cutting device includes:

支撑框架44,固定在所述机座之上;a support frame 44, fixed on the base;

两个切割机头机构41,安装在所述支撑框架44的正侧,两个所述切割机头机构41能够同步上下运动对硅棒进行切割且形成两个相背的边皮;Two cutting head mechanisms 41 are installed on the front side of the support frame 44, and the two cutting head mechanisms 41 can move up and down synchronously to cut the silicon rod and form two opposite edges;

两个边皮夹持机构47,分别固定安装在所述支撑框架44的两个边侧;Two edge skin clamping mechanisms 47 are respectively fixed and installed on two sides of the support frame 44;

边皮收集组件48,固定安装在所述支撑框架44的背侧;The side skin collecting assembly 48 is fixedly installed on the back side of the supporting frame 44;

其中,两个所述边皮夹持机构47用于边皮夹持机构47的开放端相向运动进入到两个所述切割机头机构41之间夹持住两个边皮,且相背运动退出两个所述切割机头机构41之间,并将边皮放置到所述边皮收集组件48内。Wherein, the two edge skin clamping mechanisms 47 are used for the open ends of the edge skin clamping mechanisms 47 to move toward each other and enter between the two cutting machine head mechanisms 41 to clamp the two edge skins and move opposite to each other. Exit between the two cutting head mechanisms 41 , and place the edge skin into the edge skin collection assembly 48 .

这样,支撑框架的正侧安装的两个切割机头机构同步上下运动,对硅棒进行切割,形成两个相背的边皮,支撑框架的两个边侧分别固定安装的两个边皮夹持机构能够夹持住两个边皮,且将两个边皮放置到支撑框架的背侧固定的边皮收集组件内。由此可以看出,切割装置以支撑框架为基础,实现了切割、边皮夹持后取出以及边皮的收集。一方面使得切割装置集成了多个功能,且布局紧凑,另一方面切割装置能够快速收集边皮。In this way, the two cutting head mechanisms installed on the front side of the support frame move up and down synchronously to cut the silicon rod to form two opposite side skins, and the two sides of the support frame are respectively fixed and installed two side wallets The holding mechanism can hold the two side skins and place the two side skins into the side skin collecting assembly fixed on the back side of the support frame. It can be seen from this that the cutting device is based on the support frame, and realizes cutting, removal of the edge skin after clamping and collection of the edge skin. On the one hand, the cutting device integrates multiple functions and has a compact layout, and on the other hand, the cutting device can quickly collect the edge skins.

实施中,如图1A、图1D和图1E所示,所述边皮夹持机构47包括:In implementation, as shown in FIG. 1A , FIG. 1D and FIG. 1E , the edge skin clamping mechanism 47 includes:

夹持固定座471,固定在所述支撑框架的边侧;Clamping and fixing base 471, fixed on the side of the support frame;

一级臂472-1和二级臂472-2,所述一级臂472-1的两端分别与所述夹持固定座471和二级臂472-2的一端铰接连接;A primary arm 472-1 and a secondary arm 472-2, two ends of the primary arm 472-1 are hingedly connected to the clamping fixing base 471 and one end of the secondary arm 472-2;

边皮夹持爪473,铰接在所述二级臂472-2远离所述一级臂472-1的一侧;The edge skin clamping claw 473 is hinged on the side of the secondary arm 472-2 away from the primary arm 472-1;

夹持控制单元,用于控制所述一级臂、所述二级臂和所述边皮夹持爪的转动。The clamping control unit is used for controlling the rotation of the primary arm, the secondary arm and the edge skin clamping claw.

这样,夹持固定座和一级臂的铰接处,一级臂和二级臂的铰接处,二级臂和边皮夹持爪的铰接处,各自通过转动轴和轴孔连接实现。夹持控制单元控制一级臂、二级臂和边皮夹持爪的转动,使得边皮夹持机构能够灵活的活动,实现从支撑框架的正侧夹持边皮后取出,放置到支撑框架的背侧的边皮收集组件内。In this way, the hinged joint between the clamping fixed seat and the primary arm, the hinged joint between the primary arm and the secondary arm, and the hinged joint between the secondary arm and the edge skin clamping claw are connected by the rotating shaft and the shaft hole respectively. The clamping control unit controls the rotation of the primary arm, the secondary arm and the edge skin clamping claw, so that the edge skin clamping mechanism can move flexibly, and the edge skin can be clamped from the front side of the support frame and taken out and placed on the support frame. The back side of the leather collection assembly inside.

实施中,如图1E所示,所述边皮夹持爪473包括:In practice, as shown in FIG. 1E , the edge skin clamping claw 473 includes:

边皮夹爪安装板473-1;Side leather gripper mounting plate 473-1;

底夹爪473-2,固定在所述边皮夹爪安装板473-1的正侧的底端,所述底夹爪473-2用于承载竖向设置的硅棒的下端面;The bottom clamping jaw 473-2 is fixed on the bottom end of the front side of the side leather clamping jaw mounting plate 473-1, and the bottom clamping jaw 473-2 is used to carry the lower end surface of the vertically arranged silicon rod;

顶夹爪473-3,滑动连接在所述边皮夹爪安装板473-1的正侧的上端,且所述顶夹爪473-3能够上下运动。The top jaw 473-3 is slidably connected to the upper end of the front side of the side leather jaw mounting plate 473-1, and the top jaw 473-3 can move up and down.

顶夹爪能够上下运动,这样,顶夹爪和底夹爪之间的距离能够调整。底夹爪能够承载竖向设置的硅棒的下端面,顶夹爪能够向下运动压在硅棒的上端面,从而实现边皮的夹持。The top jaw can move up and down so that the distance between the top and bottom jaws can be adjusted. The bottom clamping jaw can carry the lower end face of the vertically arranged silicon rod, and the top clamping jaw can move downward to press on the upper end face of the silicon rod, so as to realize the clamping of the edge skin.

为了在切割后,能够方便的取出边皮,对切割装置的切割机头机构进行了结构上的改进。In order to conveniently take out the edge skin after cutting, the structure of the cutting head mechanism of the cutting device is improved.

实施中,所述切割机头机构41用于形成横向设置的切割段对竖向放置的硅棒进行切割。如图4A,图4B,图4C和图4D所示,所述切割机头机构41包括:In practice, the cutting head mechanism 41 is used to form transversely arranged cutting segments to cut the vertically arranged silicon rods. As shown in FIG. 4A , FIG. 4B , FIG. 4C and FIG. 4D , the cutting head mechanism 41 includes:

线锯安装架411,所述线锯安装架411具有竖向的机头通孔411-1;A wire saw mounting frame 411, the wire saw mounting frame 411 has a vertical head through hole 411-1;

环形金刚线,设置在线锯安装架411的正侧,且所述环形金刚线的切割段和机头通孔411-1错开设置,即互不干涉;其中,所述切割段为环形金刚线在运动中用于对硅棒进行切割的部分;The annular diamond wire is arranged on the positive side of the wire saw mounting frame 411, and the cutting section of the annular diamond wire and the head through hole 411-1 are staggered, that is, do not interfere with each other; wherein, the cutting section is the annular diamond wire in The part of the movement used to cut the silicon rod;

其中,两个所述边皮夹持爪473用于相向运动从所述机头通孔411-1通过进入到两个所述切割机头机构41之间夹持住边皮,且相背运动从所述机头通孔411-1处退出两个切割机头机构41之间,将边皮从两个所述切割机头机构41之间取出。Wherein, the two edge skin clamping claws 473 are used to move toward each other from the through hole 411-1 of the machine head to enter between the two cutting machine head mechanisms 41 to clamp the edge skin, and move in opposite directions. Exit between the two cutting head mechanisms 41 from the head through hole 411 - 1 , and take out the edge skin from between the two cutting head mechanisms 41 .

边皮夹持爪向前穿过机头通孔,边皮夹持机构夹持住边皮;之后,带着边皮向后穿过机头通孔411-1,从而将边皮移走。在此过程中,线锯安装架本身不需要移动。切割装置,由于线锯安装架设置有机头通孔,实现了将边皮移走的过程中,不需要移动线锯安装架,节约了时间,提高了取边皮的效率,使得将边皮移走的工序较为简单,进而使得硅棒切割磨削系统的效率较高。The edge skin clamping claw passes forward through the machine head through hole, and the edge skin clamping mechanism holds the edge skin; after that, the edge skin is passed through the machine head through hole 411-1 backward with the edge skin, so as to remove the edge skin. The jigsaw mount itself does not need to move during this process. For the cutting device, since the wire saw mounting frame is provided with a through hole for the machine head, the wire saw mounting frame does not need to be moved during the process of removing the edge skin, which saves time and improves the efficiency of removing the edge skin. The process is relatively simple, which makes the silicon rod cutting and grinding system more efficient.

具体的,机头通孔411-1是竖向设置的长条形的机头通孔。Specifically, the head through hole 411-1 is a vertically elongated head through hole.

具体的,所述线锯安装架是刚性的线锯安装架。Specifically, the wire saw mount is a rigid wire saw mount.

实施中,如图4A,图4B,图4C和图4D所示,所述切割段为横向设置的切割段且低于所述机头通孔411-1。In implementation, as shown in FIG. 4A , FIG. 4B , FIG. 4C and FIG. 4D , the cutting section is a laterally arranged cutting section and is lower than the head through hole 411 - 1 .

切割机头机构能够自上而下运动对硅棒进行切割。在切割机头机构自上而下运动的过程中,横向设置的切割段对竖向设置的硅棒自上而下进行切割。在切割完成后,切割段低于硅棒的下端面。此时,边皮通过机头通孔被移走的过程,由于切割段低于机头通孔,切割段不会与移动的边皮产生干涉。The cutting head mechanism can move from top to bottom to cut the silicon rod. During the top-down movement of the cutting head mechanism, the horizontally arranged cutting sections cut the vertically arranged silicon rods from top to bottom. After the cutting is completed, the cutting section is lower than the lower end face of the silicon rod. At this time, in the process that the edge skin is removed through the through hole of the machine head, since the cutting section is lower than the through hole of the machine head, the cutting section will not interfere with the moving edge skin.

实施中,如图4A所示,所述切割机头机构还包括:In implementation, as shown in Figure 4A, the cutting head mechanism further includes:

主动轮组件412-1和下过渡轮412-2,分别设置在所述线锯安装架411的正侧;The driving wheel assembly 412-1 and the lower transition wheel 412-2 are respectively arranged on the positive side of the wire saw mounting frame 411;

张力轮组件412-3和上过渡轮412-4,分别设置在所述线锯安装架411的正侧;The tension wheel assembly 412-3 and the upper transition wheel 412-4 are respectively arranged on the positive side of the wire saw mounting frame 411;

所述环形金刚线绕在所述主动轮组件412-1的主动轮、下过渡轮412-2、所述张力轮组件412-3的张力轮和上过渡轮412-4的外周面,在所述主动轮和所述下过渡轮的底端形成所述切割段,所述金刚线与所述机头通孔互不干涉。The endless diamond wire is wound around the driving pulley of the driving pulley assembly 412-1, the lower transfer pulley 412-2, the tension pulley of the tension pulley assembly 412-3, and the outer peripheral surface of the upper transfer pulley 412-4. The bottom ends of the driving wheel and the lower transition wheel form the cutting section, and the diamond wire and the through hole of the machine head do not interfere with each other.

主动轮组件设置在线锯安装架的正侧下部。张力轮组件对环形金刚线施加张力,使得环形金刚线保持一定的张力以对硅棒进行有效的切割。下过渡轮和上过渡轮对环形金刚线的走向进行调整。The drive wheel assembly is provided on the lower portion of the positive side of the wire saw mount. The tension wheel assembly applies tension to the ring diamond wire, so that the ring diamond wire maintains a certain tension to effectively cut the silicon rod. The lower transition wheel and the upper transition wheel adjust the direction of the annular diamond wire.

实施中,如图4E所示,切割装置4还包括:In implementation, as shown in FIG. 4E, the cutting device 4 further includes:

与所述切割机头机构41一一对应的横向进给机构451,所述切割机头机构和与之对应的横向进给机构451固定且两个所述切割段相对设置,所述横向进给机构451与所述支撑框架相对滑动连接以带动两个所述切割段靠近和远离。其中,所述横向进给机构451用于带动两个所述切割机头机构41靠近和远离运动且调整同一切割装置的两个切割机头机构的切割段之间的距离。A transverse feeding mechanism 451 corresponding to the cutting head mechanism 41 one-to-one, the cutting head mechanism and the corresponding transverse feeding mechanism 451 are fixed and the two cutting segments are arranged oppositely, the transverse feeding The mechanism 451 is relatively slidably connected with the support frame to drive the two cutting segments to approach and move away. Wherein, the transverse feeding mechanism 451 is used to drive the two cutting head mechanisms 41 to move toward and away from each other and to adjust the distance between the cutting sections of the two cutting head mechanisms of the same cutting device.

这样,在两个横向进给机构的带动下,同一个切割装置的两个切割机头机构能够靠近和远离,使得同一切割装置的两个切割机头机构的切割段之间的距离能够调整。即同一切割机头机构的两个切割段平行设置且两个切割段之间的距离可调。带来的有益效果是切割装置能够适用于对多种直径的硅棒的切割,使得切割装置的通用性很强。In this way, driven by the two transverse feed mechanisms, the two cutting head mechanisms of the same cutting device can approach and move away, so that the distance between the cutting segments of the two cutting head mechanisms of the same cutting device can be adjusted. That is, the two cutting sections of the same cutting head mechanism are arranged in parallel and the distance between the two cutting sections is adjustable. The beneficial effect is that the cutting device can be suitable for cutting silicon rods of various diameters, so that the cutting device has strong versatility.

横向进给机构和垂向进给机构组成形成进给机构。The transverse feeding mechanism and the vertical feeding mechanism are formed to form a feeding mechanism.

实施中,如图4E所示,切割装置还包括:In implementation, as shown in Figure 4E, the cutting device further includes:

与所述横向进给机构一一对应的垂向进给机构452,分别竖直固定在所述支撑框架44的同一侧,所述垂向进给机构452和与之对应的横向进给机构451固定以带动所述切割机头机构在垂向方向运动;The vertical feeding mechanisms 452 corresponding to the transverse feeding mechanisms are respectively vertically fixed on the same side of the support frame 44, and the vertical feeding mechanisms 452 and the corresponding transverse feeding mechanisms 451 fixed to drive the cutting head mechanism to move in the vertical direction;

其中,两个所述垂向进给机构452用于带动两个所述横向进给机构垂向方向运动,进而带动所述切割机头机构在垂向方向运动。Wherein, the two vertical feeding mechanisms 452 are used to drive the two transverse feeding mechanisms to move in the vertical direction, thereby driving the cutting head mechanism to move in the vertical direction.

这样,垂向进给机构能够带动与之对应的横向进给机构在垂向方向运动,进而带动切割机头机构及其切割段在垂向方向运动,从而实现对竖向放置的硅棒在自上而下进行切割,并在每次切割完成后带动切割机头机构及其切割段复位。In this way, the vertical feeding mechanism can drive the corresponding lateral feeding mechanism to move in the vertical direction, thereby driving the cutting head mechanism and its cutting section to move in the vertical direction, so as to realize the automatic movement of the vertically placed silicon rods in the vertical direction. It cuts from top to bottom, and drives the cutting head mechanism and its cutting section to reset after each cutting is completed.

实施中,如图4E所示,所述横向进给机构包括:In implementation, as shown in Figure 4E, the transverse feed mechanism includes:

线锯横向导轨丝杠,所述线锯横向导轨丝杠的丝母固定在所述垂向进给机构处;其中,所述线锯横向导轨丝杠的导轨的导向方向为两个所述切割段靠近和远离的方向;A wire saw lateral guide screw, the nut of the wire saw lateral guide screw is fixed at the vertical feeding mechanism; wherein, the guide direction of the guide rail of the wire saw lateral guide screw is two of the cutting the direction in which the segment approaches and moves away;

线锯横向滑板451-1,与所述线锯横向导轨丝杠的滑块固定且与所述切割机头机构固定;The wire saw transverse slide plate 451-1 is fixed with the slider of the wire saw transverse guide screw and with the cutting head mechanism;

线锯横向驱动电机和线锯横向减速机,所述线锯横向驱动电机和线锯横向减速机连接以输出旋转运动至所述线锯横向导轨丝杠;a wire saw transverse drive motor and a wire saw transverse reducer, the wire saw transverse drive motor and the wire saw transverse reducer are connected to output rotational motion to the wire saw transverse guide screw;

其中,所述线锯横向导轨丝杠用于将接收到的旋转运动转化为沿所述线锯横向导轨丝杠的导轨的直线运动,并通过所述线锯横向导轨丝杠的滑块和线锯横向滑板带动所述切割机头机构在横向方向运动。Wherein, the wire saw lateral guide screw is used to convert the received rotary motion into linear motion along the guide rail of the wire saw lateral guide screw, and the slider and the wire of the wire saw lateral guide screw pass through the wire saw. The transverse sliding plate of the saw drives the cutting head mechanism to move in the transverse direction.

线锯横向导轨丝杠和线锯横向滑板,通过简单的结构实现了横向进给机构。The wire saw transverse guide screw and the wire saw transverse slide plate realize the transverse feeding mechanism through a simple structure.

实施中,如图4E所示,所述垂向进给机构包括:In implementation, as shown in Figure 4E, the vertical feeding mechanism includes:

线锯垂向导轨丝杠,所述线锯垂向导轨丝杠的丝母固定在所述支撑框架处;其中,所述线锯垂向导轨丝杠的导轨的导向方向为上下的垂向方向;The wire saw vertical guide screw, the nut of the wire saw vertical guide screw is fixed at the support frame; wherein, the guide direction of the guide rail of the wire saw vertical guide screw is the vertical direction of up and down ;

线锯垂向滑板452-1,与所述线锯垂向导轨丝杠的滑块固定且与所述线锯横向导轨丝杠的丝母固定;The vertical sliding plate 452-1 of the wire saw is fixed with the slider of the vertical guide screw of the wire saw and fixed with the screw nut of the horizontal guide screw of the wire saw;

线锯垂向驱动电机和线锯垂向减速机,所述线锯垂向驱动电机和线锯垂向减速机以输出旋转运动至所述线锯垂向导轨丝杠;A wire saw vertical drive motor and a wire saw vertical reducer, the wire saw vertical drive motor and the wire saw vertical reducer output rotational motion to the wire saw vertical guide screw;

其中,所述线锯垂向导轨丝杠用于将接收到的旋转运动转化为沿所述线锯垂向导轨丝杠的导轨的直线运动,并通过所述线锯垂向导轨丝杠的滑块带动所述横向进给机构和所述切割机头机构在垂向方向运动。Wherein, the wire saw vertical guide screw is used to convert the received rotational motion into linear motion along the guide rail of the wire saw vertical guide screw, and through the sliding movement of the wire saw vertical guide screw The block drives the transverse feed mechanism and the cutting head mechanism to move in the vertical direction.

线锯垂向导轨丝杠的丝母和支撑框架固定为一个整体,相对于机座固定。线锯垂向导轨丝杠的滑块和线锯横向导轨丝杠的丝母固定为一个整体。线锯垂向导轨丝杠的滑块、线锯垂向滑板和线锯横向导轨丝杠的丝母作为一个整体能够沿垂向方向运动,进而带动横向进给机构沿垂向方向运动,从而带动切割机头机构及其切割段在垂向方向运动。The nut and the support frame of the vertical guide screw of the wire saw are fixed as a whole and are fixed relative to the machine base. The slider of the vertical guide screw of the wire saw and the screw nut of the horizontal guide screw of the wire saw are fixed as a whole. The slider of the vertical guide screw of the wire saw, the vertical sliding plate of the wire saw and the nut of the horizontal guide screw of the wire saw can move in the vertical direction as a whole, and then drive the transverse feed mechanism to move in the vertical direction, thereby driving The cutting head mechanism and its cutting segments move in the vertical direction.

实施中,切割装置还包括:In implementation, the cutting device also includes:

进给控制单元,分别与同一切割装置的两个线锯横向驱动电机和两个线锯垂向驱动电机连接,用于控制两个所述切割机头机构的切割段之间的距离,还用于控制两个所述切割机头机构在垂向方向的运动。The feed control unit is respectively connected with the two wire saw transverse drive motors and the two wire saw vertical drive motors of the same cutting device, and is used for controlling the distance between the cutting segments of the two cutting head mechanisms, and also uses It is used to control the movement of the two cutting head mechanisms in the vertical direction.

进给控制单元,线锯横向驱动电机和线锯垂向驱动电机配合,实现了两个切割机头机构的切割段之间在横向方向的距离能够方便的控制,也实现了两个切割机头机构的切割段在垂向方向的运动进行切割,即切割是能够进行控制的。The feed control unit, the horizontal drive motor of the wire saw and the vertical drive motor of the wire saw cooperate to realize the convenient control of the distance between the cutting sections of the two cutting head mechanisms in the lateral direction, and also realize the two cutting heads. The movement of the cutting section of the mechanism in the vertical direction cuts, that is, the cutting can be controlled.

实施中,如图4E所示,所述垂向进给机构还包括:In implementation, as shown in FIG. 4E , the vertical feeding mechanism further includes:

阻挡插销461,所述阻挡插销461的插座固定在所述支撑框架44的侧面的上部;Blocking plugs 461, the sockets of the blocking plugs 461 are fixed on the upper part of the side surface of the support frame 44;

阻挡条462,横向固定在所述线锯垂向滑板452-1处;The blocking strip 462 is laterally fixed at the vertical sliding plate 452-1 of the wire saw;

其中,所述阻挡插销用于在所述切割机头机构运动到最高位置时,所述阻挡插销的插头能够伸出阻挡所述阻挡条向下运动,进而阻止所述线锯垂向滑板和切割机头机构向下运动。Wherein, when the cutting head mechanism moves to the highest position, the blocking pin is used to extend the plug of the blocking pin to block the downward movement of the blocking bar, thereby preventing the vertical sliding plate and cutting of the jigsaw. The nose mechanism moves downward.

通过阻挡插销和阻挡条的配合,通过机械结构实现线锯垂向滑板向下运动。当切割机头机构运动到最高位置时,人员有进入切割机头机构下方维护设备的需求,切割机头机构有可能意外下坠,造成人员伤害。通过阻挡插销和阻挡条的配合的机械阻挡来保证切割机头机构不会意外坠落。Through the cooperation of the blocking latch and the blocking strip, the vertical sliding plate movement of the wire saw is realized through the mechanical structure. When the cutting head mechanism moves to the highest position, personnel need to enter under the cutting head mechanism to maintain the equipment, and the cutting head mechanism may fall down accidentally, causing personal injury. It is ensured that the cutting head mechanism does not fall accidentally by means of a mechanical block blocking the engagement of the latch and the blocking strip.

硅棒切割磨削系统的固定装置的结构The structure of the fixing device of the silicon rod cutting and grinding system

实施中,如图1C和图4F所示,硅棒纵向固定机构42包括:In implementation, as shown in FIG. 1C and FIG. 4F , the longitudinal fixing mechanism 42 of the silicon rod includes:

夹头架竖向运动导轨424,固定在所述固定柱的侧面;The vertical movement guide rail 424 of the collet frame is fixed on the side surface of the fixed column;

夹头架421,所述夹头架与所述夹头架竖向运动导轨滑动连接;A collet frame 421, the collet frame is slidably connected to the vertical motion guide rail of the collet frame;

上浮动头422,安装在所述夹头架421处;所述夹头架能够沿所述夹头架竖向方向运动导轨上下运动,以带动上浮动头压在竖向放置的硅棒的上端面和离开被磨削后的方棒的上端面;The upper floating head 422 is installed at the chuck frame 421; the chuck frame can move the guide rail up and down along the vertical direction of the chuck frame, so as to drive the upper floating head to press on the vertically placed silicon rod. The end face and the upper end face leaving the ground bar;

扶边皮支架,与所述夹头架421连接且能够向下伸出及向上复位,所述扶边皮支架用于向下伸出且扶在硅棒的外周面,所述扶边皮支架还用于向上复位离开硅棒的外周面。The edge support bracket is connected to the chuck frame 421 and can be extended downward and reset upward. The edge support bracket is used to extend downward and rest on the outer peripheral surface of the silicon rod. The edge support bracket Also used to reset the outer perimeter of the silicon rod upwards.

夹头架是安装基础。上浮动头用于压在竖向放置的硅棒的上表面,实现硅棒的竖向方向的夹持。在硅棒被切割和磨削的过程中,上浮动头本身能够进行预设角度的倾斜将切割产生的应力减小或抵充掉。为了切割后的硅棒形成的边皮不会发生倾倒,设置了扶边皮支架。扶边皮支架与夹头架连接且扶边皮支架能够向下伸出及向上复位。这样,在切割段置于硅棒的上端面之后,将扶边皮支架向下伸出且扶在硅棒的外周面,使得在切割段切割硅棒形成方棒和边皮,扶边皮支架在上端外侧扶住边皮,避免边皮可能发生倾倒的可能性。在需要将边皮取走时,将扶边皮支架向上复位,不再与边皮发生接触,能够将边皮取走。The collet holder is the mounting base. The upper floating head is used to press the upper surface of the vertically placed silicon rod to realize the vertical clamping of the silicon rod. During the process of cutting and grinding the silicon rod, the upper floating head itself can be inclined at a preset angle to reduce or offset the stress generated by the cutting. In order to prevent the edge skin formed by the cut silicon rod from falling over, a support edge skin support is provided. The edge support bracket is connected with the chuck frame, and the edge support bracket can be extended downward and reset upward. In this way, after the cutting section is placed on the upper end surface of the silicon rod, the edge support bracket is extended downward and supported on the outer peripheral surface of the silicon rod, so that the silicon rod is cut in the cutting section to form a square rod and edge skin, and the edge support bracket Hold the edge skin on the outside of the upper end to avoid the possibility of the edge skin falling. When the side skin needs to be taken off, the side support bracket is reset upward and no longer contacts with the side skin, so that the side skin can be removed.

具体的,夹头架为刚性的夹头架。Specifically, the collet holder is a rigid collet holder.

具体的,所述夹头架能够上下运动且所述上浮动头用于压在竖向放置的硅棒的上端面。Specifically, the chuck frame can move up and down, and the upper floating head is used to press the upper end face of the vertically placed silicon rod.

具体的,所述上浮动头安装在所述夹头架的朝下的端面。Specifically, the upper floating head is installed on the downward end face of the collet frame.

这样,上浮动头能够方便的压在竖向放置的硅棒的上端面,也能够方便的离开被切割后的硅棒的上端面。In this way, the upper floating head can be conveniently pressed against the upper end face of the vertically placed silicon rod, and can also be conveniently separated from the upper end face of the cut silicon rod.

实施中,如图4F所示,所述扶边皮支架包括:In implementation, as shown in Figure 4F, the edge support bracket includes:

扶边皮支架安装件423-1,与所述夹头架固定;The edge support bracket mounting piece 423-1 is fixed with the chuck frame;

扶杆固定件423-2和边皮扶杆423-3,所述边皮扶杆423-3固定在所述扶杆固定件423-2远离所述上浮动头的一侧且向下伸出;The support rod fixing member 423-2 and the edge skin support rod 423-3, the edge skin support rod 423-3 is fixed on the side of the support rod fixing member 423-2 away from the upper floating head and protrudes downwards ;

扶边皮驱动装置,分别与所述扶边皮支架安装件和所述扶杆固定件连接,用于带动所述扶杆固定件和所述边皮扶杆向下伸出及向上复位。The edge cover driving device is respectively connected with the edge support bracket mounting part and the support rod fixing part, and is used to drive the support rod fixing part and the edge skin support rod to extend downward and reset upward.

具体的,如图4F所示,所述扶边皮驱动装置为扶边皮驱动气缸423-4,所述扶边皮驱动气缸的缸体与所述扶边皮支架安装件423-1固定,所述扶边皮驱动气缸的导向杆与所述扶杆固定件423-2固定,所述扶边皮驱动气缸的导向杆伸缩带动所述扶杆固定件423-2和所述边皮扶杆423-3向下伸出及向上复位。Specifically, as shown in FIG. 4F, the edge support driving device is a edge support driving cylinder 423-4, and the cylinder body of the edge support driving cylinder is fixed to the edge support bracket mounting member 423-1, The guide rod of the edge support driving cylinder is fixed with the support rod fixing member 423-2, and the guide rod of the edge support driving cylinder is extended and retracted to drive the support rod fixing member 423-2 and the edge skin support rod 423-3 extends down and resets up.

扶杆固定件和边皮扶杆固定为一个整体,与扶边皮支架安装件之间,通过扶边皮驱动气缸连接。扶边皮驱动气缸的导向杆伸长,扶杆固定件和边皮扶杆作为一个整体向下伸出,边皮扶杆扶在硅棒的外周面。扶边皮驱动气缸的导向杆缩回,扶杆固定件和边皮扶杆作为一个整体向上缩回,带动边皮扶杆向上缩回离开硅棒。The support rod fixing piece and the edge skin support rod are fixed as a whole, and are connected with the edge support skin bracket mounting piece through the edge support skin driving cylinder. The guide rod of the edge skin driving cylinder is extended, the support rod fixing part and the edge skin support rod extend downward as a whole, and the edge skin support rod is supported on the outer peripheral surface of the silicon rod. The guide rod of the edge skin driving cylinder is retracted, the support rod fixing part and the edge skin support rod are retracted upward as a whole, which drives the edge skin support rod to retract upward and leave the silicon rod.

实施中,如图4F所示,一个所述扶杆固定件423-2的四周固定四个所述边皮扶杆423-3。In implementation, as shown in FIG. 4F , four edge leather support rods 423 - 3 are fixed around one support rod fixing member 423 - 2 .

这样,两个边皮被一个扶杆固定件的四个边皮扶杆扶在硅棒的外周面处,每一个边皮被两个边皮扶杆扶住。In this way, the two edge skins are supported on the outer peripheral surface of the silicon rod by the four edge skin support bars of a support rod fixing part, and each edge skin is supported by two edge skin support bars.

在切割段置于竖向放置的硅棒的上端面后,边皮扶杆向下伸出扶在硅棒的外周面处。单次切割完成后,边皮扶杆向上缩回,将两个边皮移走。After the cutting section is placed on the upper end face of the vertically placed silicon rod, the edge skin support bar extends downward and supports the outer peripheral surface of the silicon rod. After a single cut is completed, the edge bar is retracted upward to remove the two edges.

实施中,如图4G所示,所述硅棒纵向固定机构还包括:In implementation, as shown in FIG. 4G , the longitudinal fixing mechanism of the silicon rod further includes:

硅棒支撑安装座431,所述硅棒支撑安装座431固定在旋转平台之上;The silicon rod support mount 431, the silicon rod support mount 431 is fixed on the rotating platform;

用于支撑竖向硅棒下端面的下浮动头432,所述下浮动头安装在所述硅棒支撑安装座431的上方。The lower floating head 432 used to support the lower end face of the vertical silicon rod, the lower floating head is installed above the silicon rod supporting seat 431 .

这样,在硅棒被切割的过程中,下浮动头本身能够进行预设角度的倾斜以将切割产生的应力减小或抵充掉。在切割机头机构的切割段自上而下进行切割时,切割产生的应力会被下浮动头的倾斜减小或抵充掉,从而防止切割到硅棒下部时产生崩边。In this way, during the cutting process of the silicon rod, the lower flying head itself can be inclined at a preset angle to reduce or offset the stress generated by the cutting. When the cutting section of the cutting head mechanism is cut from top to bottom, the stress generated by cutting will be reduced or offset by the inclination of the lower floating head, thereby preventing edge chipping when cutting to the lower part of the silicon rod.

实施中,如图4G所示,所述硅棒纵向固定机构还包括边皮支撑组件,所述边皮支撑组件包括:In implementation, as shown in FIG. 4G , the longitudinal fixing mechanism of the silicon rod further includes an edge skin supporting component, and the edge skin supporting component includes:

边皮支撑用驱动装置,固定在所述硅棒支撑安装座431之上且与所述下浮动头间隔设置;The drive device for edge skin support is fixed on the silicon rod support mounting seat 431 and is spaced from the lower floating head;

用于支撑硅棒下端面中被切割后形成边皮位置的边皮支撑头433-1,所述边皮支撑头433-1固定在所述边皮支撑用驱动装置的顶端;其中,所述边皮支撑用驱动装置用于在硅棒被切割成方棒和边皮时,锁紧以使得所述边皮支撑头保持高度,对边皮进行支撑。The edge skin support head 433-1 used to support the edge skin position after being cut in the lower end surface of the silicon rod, the edge skin support head 433-1 is fixed on the top of the drive device for edge skin support; wherein, the edge skin support head 433-1 The driving device for edge skin support is used for locking the edge skin support head when the silicon rod is cut into square rods and edge skins so as to keep the edge skin support head high to support the edge skin.

硅棒由硅棒纵向固定机构固定的过程如下:The process of fixing the silicon rod by the longitudinal fixing mechanism of the silicon rod is as follows:

首先,边皮支撑头位于初始位置,处于初始位置的边皮支撑头的顶端低于下浮动头支撑头的顶端;First, the side skin support head is at the initial position, and the top of the side skin support head in the initial position is lower than the top of the lower floating head support head;

之后,将硅棒置于下浮动头之上,在下浮动头支撑头均与硅棒的下端面支撑后;After that, place the silicon rod on the lower floating head, after the supporting head of the lower floating head is supported with the lower end face of the silicon rod;

然后,边皮支撑头向上顶紧,边皮支撑用驱动装置锁紧边皮支撑头的高度;Then, the side skin support head is pushed upward and the height of the side skin support head is locked by the driving device for the side skin support;

最后,上浮动头压在硅棒的上端面。Finally, the upper floating head is pressed against the upper end face of the silicon rod.

在切割机头机构的切割段自上而下进行切割时,切割产生的应力带动下浮动头发生少许的倾斜,边皮支撑头始终保持对边皮的支撑;这样,下浮动头和边皮支撑头配合,将切割产生的应力减小或抵充掉,从而防止切割到硅棒下部时产生崩边。When the cutting section of the cutting machine head mechanism is cut from top to bottom, the stress generated by the cutting drives the lower floating head to tilt slightly, and the edge skin support head always keeps supporting the edge skin; in this way, the lower floating head and the edge skin support The head is matched to reduce or offset the stress generated by cutting, thereby preventing edge chipping when cutting to the lower part of the silicon rod.

实施中,如图4G所示,所述边皮支撑用驱动装置为边皮支撑用气缸433-2;In implementation, as shown in FIG. 4G , the driving device for supporting the side skin is a cylinder 433-2 for supporting the side skin;

所述边皮支撑用气缸433-2的缸体与所述硅棒支撑安装座431固定,所述边皮支撑用气缸433-2的导向杆与所述边皮支撑头433-1固定。The cylinder body of the edge skin supporting cylinder 433-2 is fixed to the silicon rod support mounting seat 431, and the guide rod of the edge skin supporting cylinder 433-2 is fixed to the edge skin supporting head 433-1.

实施中,如图4G所示,所述下浮动头具有向上凸起的三个下浮动头支撑头432-1,且三个下浮动头支撑头432-1位于一个三角形的三个顶点处。三个下浮动头支撑头能够确定一个平面,使得三个下浮动头支撑头的每一个都支撑硅棒的下端面。In implementation, as shown in FIG. 4G , the lower floating head has three lower floating head supporting heads 432-1 protruding upward, and the three lower floating head supporting heads 432-1 are located at three vertices of a triangle. The three lower flying head support heads can define a plane such that each of the three lower flying head support heads supports the lower end face of the silicon rod.

实施中,所述上浮动头具有向下凸起的三个上浮动头压紧头,且三个上浮动头压紧头位于一个三角形的三个顶点处。三个上浮动头压紧头能够确定一个平面,使得三个上浮动头压紧头的每一个都压紧在硅棒下端面。In implementation, the upper floating head has three downwardly protruding upper floating head pressing heads, and the three upper floating head pressing heads are located at three vertices of a triangle. The three upper floating head pressing heads can define a plane, so that each of the three upper floating head pressing heads is pressed against the lower end face of the silicon rod.

在切割机头机构的切割段自上而下进行切割时,下浮动头在切割产生的应力带动下浮动头发生少许的倾斜,上浮动头能够进行补偿,使得硅棒能够稳定的夹持在下浮动头和上浮动头之间。When the cutting section of the cutting machine head mechanism is cut from top to bottom, the lower floating head is slightly inclined by the stress generated by the cutting, and the upper floating head can compensate, so that the silicon rod can be stably clamped in the lower floating head between the head and the upper floating head.

实施中,所述边皮支撑组件为四个,且四个边皮支撑组件位于一个长方形的四个顶点处;两个所述边皮支撑组件用于支撑一个硅棒切割形成的一个边皮。In implementation, there are four edge skin support components, and the four edge skin support components are located at four vertices of a rectangle; two edge skin support components are used to support one edge skin formed by cutting a silicon rod.

一对边皮支撑组件能够对一个边皮进行有效的支撑。A pair of side skin supporting components can effectively support one side skin.

实施中,如图4G所示,所述硅棒纵向固定机构还包括硅棒转动组件,所述硅棒转动组件包括:In implementation, as shown in FIG. 4G , the longitudinal fixing mechanism of the silicon rod further includes a silicon rod rotating assembly, and the silicon rod rotating assembly includes:

硅棒转动轴434-1,所述下浮动头固定在所述硅棒转动轴434-1之上,所述硅棒转动轴434-1转动连接在所述硅棒支撑安装座431之上;The silicon rod rotating shaft 434-1, the lower floating head is fixed on the silicon rod rotating shaft 434-1, and the silicon rod rotating shaft 434-1 is rotatably connected on the silicon rod supporting mount 431;

硅棒驱动电机434-2,固定在所述硅棒支撑安装座431之下,与所述硅棒转动轴434-1连接以驱动所述硅棒转动轴434转动。A silicon rod driving motor 434-2 is fixed under the silicon rod supporting seat 431, and is connected with the silicon rod rotating shaft 434-1 to drive the silicon rod rotating shaft 434 to rotate.

在硅棒的第一次切割,形成中间棒和两个边皮且将两个边皮移走之后。通过旋转平台的转动,将中间棒移动的第二切割装置相对的位置,此时,将边皮支撑头向下运动复位。硅棒驱动电机驱动硅棒转动轴转动90度,带动下浮动头以及夹在下浮动头和上浮动头之间的硅棒转动90度。为了实现硅棒转动90度,硅棒驱动电机能够主动驱动硅棒转动轴转动90度,硅棒被动转动90度,为第二切割装置的第二次切割进行准备。After the first cut of the silicon rod, the middle rod and the two edge skins are formed and the two edge skins are removed. Through the rotation of the rotating platform, move the middle rod to the relative position of the second cutting device, and at this time, move the side skin support head downward to reset. The silicon rod driving motor drives the silicon rod rotating shaft to rotate 90 degrees, and drives the lower floating head and the silicon rod sandwiched between the lower floating head and the upper floating head to rotate 90 degrees. In order to realize the 90-degree rotation of the silicon rod, the silicon rod driving motor can actively drive the silicon rod rotating shaft to rotate 90 degrees, and the silicon rod passively rotates 90 degrees to prepare for the second cutting of the second cutting device.

硅棒切割磨削系统的转运装置的结构The structure of the transfer device of the silicon rod cutting and grinding system

如图1A,图3A,图3B和图3C所示,硅棒切割磨削系统的转运装置3包括:As shown in Figure 1A, Figure 3A, Figure 3B and Figure 3C, the transfer device 3 of the silicon rod cutting and grinding system includes:

上下料夹爪框架31;Loading and unloading jaw frame 31;

上夹爪组件和下夹爪组件,上下间隔平行安装在所述上下料夹爪框架31的同一侧;The upper jaw assembly and the lower jaw assembly are installed on the same side of the upper and lower clamping jaw frame 31 in parallel with the upper and lower intervals;

转运驱动组件,用于驱动所述上夹爪组件相对于所述下夹爪组件在垂向方向上下运动,还用于驱动所述上夹爪组件和所述下夹爪组件同步上下运动。其中,上夹爪组件和下夹爪组件上下运动的方向为垂向方向。The transfer driving assembly is used for driving the upper clamping jaw assembly to move up and down relative to the lower clamping jaw assembly in the vertical direction, and also for driving the upper clamping jaw assembly and the lower clamping jaw assembly to move up and down synchronously. Wherein, the direction of up and down movement of the upper jaw assembly and the lower jaw assembly is the vertical direction.

具体的,转运驱动组件包括上夹爪转运驱动装置,分别与所述下夹爪组件和所述上夹爪组件固定且带动所述上夹爪组件相对于下夹爪组件上下运动;Specifically, the transfer driving assembly includes an upper jaw transfer driving device, which is respectively fixed to the lower jaw assembly and the upper jaw assembly and drives the upper jaw assembly to move up and down relative to the lower jaw assembly;

下夹爪转运驱动装置,分别与所述上下料夹爪框架和所述下夹爪组件固定且带动所述下夹爪组件、上夹爪组件和所述上夹爪转运驱动装置同步上下运动。The lower jaw transfer driving device is respectively fixed to the upper and lower jaw frame and the lower jaw assembly and drives the lower jaw assembly, the upper jaw assembly and the upper jaw transfer drive device to move up and down synchronously.

通过转运驱动组件,实现了两个功能,一是上夹爪组件能够单独向上运动使得上夹爪组件和下夹爪组件之间的距离能够变大,还能够单独向下运动使得上夹爪组件和下夹爪组件之间的距离复位和变小。这样,在硅棒或方棒较短时,上夹爪组件和下夹爪组件之间的距离可能不需要调整,仅需要用下夹爪组件进行夹持;在硅棒或方棒较长时,上夹爪组件和下夹爪组件之间的距离可以保持不变且上夹爪组件和下夹爪组件同时进行夹持;在硅棒或方棒特长时,可以增加增大上夹爪组件和下夹爪组件之间的距离在转运时对硅棒或方棒进行稳定夹持。二是转运装置夹持住硅棒或方棒,需要抬起进行转动时,上夹爪组件和所述下夹爪组件之间的距离保持不变,同步向上运动,即将夹持住的硅棒或方棒抬起,进行硅棒或方棒转运;硅棒或方棒转运到位后,上夹爪组件和下夹爪组件之间的距离保持不变,同步向下运动,即将夹持的方棒或方棒放下。By transferring the drive assembly, two functions are realized, one is that the upper jaw assembly can move upward independently to increase the distance between the upper and lower jaw assemblies, and it can move downward independently to make the upper jaw assembly The distance between the lower jaw assembly and the lower jaw assembly is reset and reduced. In this way, when the silicon rod or square rod is short, the distance between the upper jaw assembly and the lower jaw assembly may not need to be adjusted, and only the lower jaw assembly needs to be clamped; when the silicon rod or square rod is long , the distance between the upper jaw assembly and the lower jaw assembly can remain unchanged, and the upper jaw assembly and the lower jaw assembly can be clamped at the same time; when the silicon rod or square rod is special, the upper jaw assembly can be increased The distance between the lower jaw assembly and the lower jaw assembly can hold the silicon rod or square rod stably during transportation. The second is that the transfer device holds the silicon rod or square rod. When it needs to be lifted and rotated, the distance between the upper jaw assembly and the lower jaw assembly remains unchanged and moves upward synchronously. The silicon rod that is about to be clamped Or the square rod is lifted to transfer the silicon rod or square rod; after the silicon rod or square rod is transported in place, the distance between the upper gripper assembly and the lower gripper assembly remains unchanged, and the The stick or square stick is put down.

实施中,如图3C所示,所述转运驱动组件包括:In implementation, as shown in Figure 3C, the transport drive assembly includes:

转运气液缸321,所述转运气液缸321的缸体固定在所述上下料夹爪框架31的底部,所述转运气液缸321的导向杆上端与所述下夹爪组件固定;Rotating the hydraulic cylinder 321, the cylinder body of the rotating hydraulic cylinder 321 is fixed on the bottom of the upper and lower material clamping jaw frame 31, and the upper end of the guide rod of the rotating hydraulic cylinder 321 is fixed with the lower jaw assembly;

气液转换器322,与所述转运气液缸321连接;其中,进入所述气液转换器322的气体把液压油挤压进入所述转运气液缸321,带动所述转运气液缸321的导向杆将所述下夹爪组件顶起;即上夹爪转运驱动装置包括转运气液缸321和气液转换器322;The gas-liquid converter 322 is connected with the rotation hydraulic cylinder 321; wherein, the gas entering the gas-liquid converter 322 squeezes the hydraulic oil into the rotation hydraulic cylinder 321, and drives the rotation hydraulic cylinder 321 The guide rod pushes up the lower jaw assembly; that is, the upper jaw transfer drive device includes a rotary hydraulic cylinder 321 and a gas-liquid converter 322;

转运气缸323,所述转运气缸323的缸体与所述下夹爪组件固定,所述转运气缸323的导向杆上端与所述上夹爪组件固定;其中,气源进入所述转运气缸323的气体,带动所述转运气缸323的导向杆将所述上夹爪组件顶起;即下夹爪转运驱动装置包括转运气缸323。The transfer cylinder 323, the cylinder body of the transfer cylinder 323 is fixed with the lower jaw assembly, and the upper end of the guide rod of the transfer cylinder 323 is fixed with the upper jaw assembly; wherein, the air source enters the transfer cylinder 323. The gas drives the guide rod of the transfer cylinder 323 to push up the upper jaw assembly; that is, the lower jaw transfer drive device includes a transfer cylinder 323 .

转运气液缸和转运气缸的组合方式,使得转运驱动组件的结构较小,能够使得转运装置的整体结构较小。The combination of the transfer hydraulic cylinder and the transfer cylinder makes the structure of the transfer drive assembly smaller, and can make the overall structure of the transfer device smaller.

具体的,当夹持较短的硅棒时,转运气缸复位缩回且转运气液缸伸出;当夹持较短的硅棒时,转运气缸和转运气液缸同时伸出。Specifically, when the short silicon rod is clamped, the transfer cylinder is reset and retracted and the transfer hydraulic cylinder is extended; when the short silicon rod is clamped, the transfer cylinder and the transfer hydraulic cylinder are extended simultaneously.

如当硅棒长度是大于等于150mm小于等于400mm时,此时只有下夹爪组件夹紧切割前的圆形的硅棒或切割后的方棒,然后转运气液缸动作抬起硅棒或方棒进行转运。For example, when the length of the silicon rod is greater than or equal to 150mm and less than or equal to 400mm, only the lower jaw assembly clamps the round silicon rod before cutting or the square rod after cutting, and then turns the hydraulic cylinder to lift the silicon rod or square rod. rod for transport.

当硅棒长度大于400mm小于等于850mm时,上夹爪组件和下夹爪组件之间的距离保持不变,共同参与夹紧切割前的圆形的硅棒或切割后的方棒。When the length of the silicon rod is greater than 400mm and less than or equal to 850mm, the distance between the upper gripper jaw assembly and the lower gripper jaw assembly remains unchanged, and they jointly participate in clamping the round silicon rod before cutting or the square rod after cutting.

当硅棒长度大于850mm时,上夹爪组件和下夹爪组件共同参与夹紧切割前的圆形的硅棒或切割后的方棒,其中,上夹爪组件因为转运气缸的作用可以在上下料夹爪框架的垂向方向上下运动,适应不同长度的切割前的圆形的硅棒或切割后的方棒进行夹紧动作。When the length of the silicon rod is greater than 850mm, the upper jaw assembly and the lower jaw assembly jointly participate in clamping the round silicon rod before cutting or the square rod after cutting, wherein the upper jaw assembly can move up and down due to the function of the transfer cylinder. The vertical direction of the jaw frame moves up and down, adapting to the clamping action of different lengths of round silicon rods before cutting or square rods after cutting.

实施中,如图3A,图3D和图3E所示,所述上夹爪组件和所述下夹爪组件各自包括:In practice, as shown in FIGS. 3A , 3D and 3E, the upper jaw assembly and the lower jaw assembly each include:

转运夹爪固定板331;Transfer gripper fixing plate 331;

左夹爪332-1和右夹爪332-2,固定在所述转运夹爪固定板331的正侧且相对设置,所述左夹爪332-1和右夹爪332-2能够靠近和远离,以实现夹持和松开;其中,所述转运夹爪固定板固定左夹爪和右夹爪的一侧为转运夹爪固定板的正侧;The left gripper 332-1 and the right gripper 332-2 are fixed on the front side of the transfer gripper fixing plate 331 and are oppositely arranged, and the left gripper 332-1 and the right gripper 332-2 can approach and move away from , to realize clamping and loosening; wherein, the side of the transfer jaw fixing plate that fixes the left jaw and the right jaw is the positive side of the transfer jaw fixing plate;

硅棒检测组件,固定在所述转运夹爪固定板331的正侧,且所述硅棒检测组件的硅棒检测探针333位于所述左夹爪332-1和所述右夹爪332-2之间;The silicon rod detection assembly is fixed on the positive side of the transfer gripper fixing plate 331, and the silicon rod detection probes 333 of the silicon rod detection assembly are located on the left gripper 332-1 and the right gripper 332- between 2;

所述转运装置还包括硅棒检测处理单元,与所述硅棒检测组件333连接;其中:The transfer device also includes a silicon rod detection processing unit, which is connected to the silicon rod detection assembly 333; wherein:

所述硅棒检测组件用于在所述左夹爪332-1和右夹爪332-2相对远离与硅棒之间保持间隙即不对硅棒进行夹持,且硅棒的底部置于下浮动头之上进行旋转时,所述硅棒检测组件的硅棒检测探针333-1保持压在硅棒的外周面;The silicon rod detection assembly is used to maintain a gap between the left gripper 332-1 and the right gripper 332-2 relatively far away from the silicon rod, that is, the silicon rod is not clamped, and the bottom of the silicon rod is placed to float downward. When rotating above the head, the silicon rod detection probe 333-1 of the silicon rod detection assembly keeps pressing on the outer peripheral surface of the silicon rod;

所述硅棒检测处理单元用于根据所述硅棒检测组件的硅棒检测探针的信号得到硅棒的晶线的位置,判断硅棒是否满足预设的硅棒标准。The silicon rod detection processing unit is configured to obtain the position of the crystal line of the silicon rod according to the signal of the silicon rod detection probe of the silicon rod detection component, and determine whether the silicon rod meets the preset silicon rod standard.

实施中,如图3A,图3B和图3C所示,转运装置还包括:In implementation, as shown in Figure 3A, Figure 3B and Figure 3C, the transport device further comprises:

两个竖向导轨341,竖向平行设置在所述转运夹爪固定板331的一侧;Two vertical guide rails 341 are vertically arranged on one side of the transfer jaw fixing plate 331 in parallel;

两个转运夹爪滑块,固定在所述转运夹爪固定板331的背侧,所述转运夹爪滑块和所述竖向导轨341滑动连接;Two transfer jaw sliders are fixed on the back side of the transfer jaw fixing plate 331, and the transfer jaw sliders are slidably connected to the vertical guide rail 341;

其中,所述转运气液缸321的导向杆上端与所述下夹爪组件的转运夹爪固定板固定,所述转运气缸323的导向杆上端与所述上夹爪组件的转运夹爪固定板固定。The upper end of the guide rod of the transfer hydraulic cylinder 321 is fixed to the transfer jaw fixing plate of the lower jaw assembly, and the upper end of the guide rod of the transfer cylinder 323 is fixed to the transfer jaw fixing plate of the upper jaw assembly. fixed.

所述转运气液缸能够带动下夹爪组件整体能够相对于上下料夹爪框架在上下料夹爪框架的高度方向上下运动。转运气缸能够带动上夹爪组件整体相对于下夹爪组件在垂向方向上下运动。The rotating hydraulic cylinder can drive the entire lower jaw assembly to move up and down relative to the upper and lower material clamping jaw frame in the height direction of the upper and lower material clamping jaw frame. The transfer cylinder can drive the entire upper jaw assembly to move up and down in the vertical direction relative to the lower jaw assembly.

实施中,所述上夹爪组件和所述下夹爪组件各自还包括:In practice, each of the upper jaw assembly and the lower jaw assembly further comprises:

夹爪同步反向运动组件,所述左夹爪和所述右夹爪通过所述夹爪同步反向运动组件与所述转运夹爪固定板安装;a clamping jaw synchronous reverse movement assembly, the left clamping jaw and the right clamping jaw are installed with the transfer clamping jaw fixing plate through the clamping jaw synchronous reverse movement assembly;

其中,所述夹爪同步反向运动组件用于带动所述左夹爪和所述右夹爪同步反向运动以相互靠近和远离。Wherein, the synchronous and reverse movement assembly of the clamping jaws is used to drive the left clamping jaw and the right clamping jaw to move synchronously and reversely so as to approach and move away from each other.

这样,能够方便的实现左夹爪和右夹爪同时夹持住硅棒,同时松开硅棒。In this way, the left gripper and the right gripper can easily hold the silicon rod and simultaneously release the silicon rod.

具体的,如图3D和图3E所示,夹爪同步反向运动组件包括:Specifically, as shown in FIG. 3D and FIG. 3E , the synchronous and reverse motion components of the jaws include:

转运夹爪气缸351,所述转运夹爪气缸351的缸体与转运夹爪固定板331固定;The transfer gripper cylinder 351, the cylinder body of the transfer gripper cylinder 351 is fixed with the transfer gripper fixing plate 331;

两个连接板352,所述转运夹爪气缸351的导向杆的上端与其中一个连接板固定;Two connecting plates 352, the upper end of the guide rod of the transfer gripper cylinder 351 is fixed with one of the connecting plates;

两个齿条353,两个连接板352相对的一侧分别固定齿条353;two racks 353, the racks 353 are respectively fixed on the opposite sides of the two connecting plates 352;

同步齿轮354,与两个所述齿条353啮合。The synchronizing gear 354 meshes with the two racks 353 .

这样,能够方便的实现左夹爪和右夹爪同时夹持住硅棒或方棒。In this way, the left gripper and the right gripper can easily hold the silicon rod or the square rod at the same time.

实施中,转运装置还包括:In implementation, the transfer device also includes:

转运旋转机构,所述上下料夹爪框架固定在所述转运旋转机构之上,所述转运旋转机构安装在硅棒切割磨削系统的机座之上;A transfer rotation mechanism, the upper and lower material clamping jaw frames are fixed on the transfer rotation mechanism, and the transfer rotation mechanism is installed on the machine base of the silicon rod cutting and grinding system;

其中,所述转运旋转机构用于带动所述上下料夹爪框架旋转,还用于在机座的上表面运动。Wherein, the transfer and rotation mechanism is used to drive the frame of the loading and unloading jaws to rotate, and is also used to move on the upper surface of the machine base.

转运旋转机构能够带动上下料夹爪框架旋转且能在上下料装置和固定装置之间运动,且能够带动上下料夹爪框架靠近和远离上下料装置。这样,就能实现将硅棒转运至固定装置的过程和将切割形成的方棒从固定装置转运走的两个过程。将硅棒转运至固定装置的过程具体包括:The transfer rotation mechanism can drive the frame of the loading and unloading jaws to rotate and move between the loading and unloading device and the fixing device, and can drive the frame of the loading and unloading jaws to approach and move away from the loading and unloading device. In this way, two processes of transporting the silicon rods to the fixture and transporting the cut square rods away from the fixture can be realized. The process of transferring the silicon rods to the fixture includes:

将上夹爪组件和下夹爪组件转向上下料装置,并靠近上下料装置竖向承载的硅棒,夹持住硅棒并将硅棒抬起;Turn the upper jaw assembly and the lower jaw assembly to the loading and unloading device, and approach the silicon rod vertically carried by the loading and unloading device, hold the silicon rod and lift the silicon rod;

退回并旋转,使得硅棒朝向固定装置;Retract and rotate so that the silicon rod faces the fixture;

在一个硅棒纵向固定机构,将硅棒放下并松开不再夹持;完成一个硅棒的转运。In a longitudinal fixing mechanism of a silicon rod, the silicon rod is put down and released and no longer clamped; the transfer of one silicon rod is completed.

将切割形成的方棒从固定装置转运走的过程,具体包括:The process of transferring the square bar formed by cutting away from the fixture, including:

将上夹爪组件和下夹爪组件转向磨削完的方棒,夹持住切割形成的方棒且将方棒抬起;Turn the upper jaw assembly and the lower jaw assembly to the ground square bar, hold the square bar formed by cutting and lift the square bar;

靠近上下料装置,并转向上下料装置的方棒下料组件,将方棒置于方棒下料组件,完成一个方棒的转运,后续由方棒下料组件完成下料。Approach the loading and unloading device, and turn to the square bar blanking component of the loading and unloading device, place the square bar on the square bar blanking component, and complete the transfer of a square bar, and then the square bar blanking component completes the blanking.

具体的,如图3A所示,转运旋转机构主要由转运电机、转运谐波减速器和回转座361组成。回转座361上同时安装着谐波减速器的柔轮,谐波减速器的钢轮安装在上下料夹爪框架上,这样转运电机通过转运谐波减速器使上下料夹爪框架在回转座上做稳定的旋转运动,由于转运谐波减速机可以消除反向间隙,使得硅棒转运上料精度大大提高。在回转座上同时安装有一条回转拖链,用于回转运动的走线走管。转运谐波减速机极大程度上提高了硅棒的转运精度。Specifically, as shown in FIG. 3A , the transfer rotation mechanism is mainly composed of a transfer motor, a transfer harmonic reducer and a rotary base 361 . The flexible wheel of the harmonic reducer is installed on the rotary seat 361 at the same time, and the steel wheel of the harmonic reducer is installed on the frame of the loading and unloading jaws, so that the transfer motor makes the frame of the loading and unloading jaws on the rotary seat by transferring the harmonic reducer. For stable rotating motion, because the transfer harmonic reducer can eliminate the backlash, the accuracy of the silicon rod transfer and feeding is greatly improved. At the same time, a rotary drag chain is installed on the rotary seat, which is used for the routing of rotary motion. The transfer harmonic reducer greatly improves the transfer accuracy of the silicon rod.

硅棒切割磨削系统的上下料装置的结构The structure of the loading and unloading device of the silicon rod cutting and grinding system

实施中,如图1A,图2A,图2B和图2C所示,硅棒切割磨削系统的上下料装置2,包括圆棒上料组件,所述圆棒上料组件包括:In implementation, as shown in Fig. 1A, Fig. 2A, Fig. 2B and Fig. 2C, the loading and unloading device 2 of the silicon rod cutting and grinding system includes a round rod feeding assembly, and the round rod feeding assembly includes:

L形的圆棒上料架211;L-shaped round bar feeding rack 211;

所述上下料装置还包括:The loading and unloading device also includes:

上下料支撑框架23,所述圆棒上料架211和所述上下料支撑框架23转动连接;The loading and unloading support frame 23, the round bar loading frame 211 and the loading and unloading support frame 23 are rotatably connected;

上料翻转驱动装置,分别与上下料支撑框架的底部和所述圆棒上料架的外底固定,所述上料翻转驱动装置用于带动所述圆棒上料架自所述圆棒上料架的初始位置翻转90度;The feeding and turning drive device is respectively fixed with the bottom of the loading and unloading support frame and the outer bottom of the round bar feeding rack, and the feeding turning driving device is used to drive the round bar feeding frame from the round bar. The initial position of the material rack is turned 90 degrees;

上料处理单元,用于控制上料翻转驱动装置以控制所述圆棒上料架先加速翻转,在所述圆棒上料架翻转到达预设角度时,降低所述圆棒上料架的翻转速度直至翻转到90度。The feeding processing unit is used to control the feeding and turning drive device to control the round bar feeding frame to accelerate the turning first, and when the round bar feeding frame is turned to reach a preset angle, lower the rotation of the round bar feeding frame. Flip speed until flip to 90 degrees.

具体的,所述预设角度的取值范围为大于等于60度小于等于85度。Specifically, the value range of the preset angle is greater than or equal to 60 degrees and less than or equal to 85 degrees.

实施中,上料翻转驱动装置采用上料翻转油缸216;In the implementation, the feeding and turning drive device adopts the feeding turning cylinder 216;

所述上料翻转油缸216的缸体固定在所述上下料支撑框架的底部,所述上料翻转油缸216的导向杆的上端与所述圆棒上料架211的外底固定,所述上料翻转油缸216用于带动所述圆棒上料架211自所述圆棒上料架的初始位置翻转90度;The cylinder body of the feeding and turning cylinder 216 is fixed at the bottom of the loading and unloading support frame, and the upper end of the guide rod of the feeding turning cylinder 216 is fixed with the outer bottom of the round bar feeding rack 211 . The material turning cylinder 216 is used to drive the round bar feeding rack 211 to turn 90 degrees from the initial position of the round bar feeding rack;

所述上料处理单元具体用于在所述圆棒上料架211翻转到达预设角度时,降低所述上料翻转油缸211的伸长速度从而降低所述圆棒上料架211的翻转速度。The feeding processing unit is specifically used to reduce the elongation speed of the feeding turning cylinder 211 when the round bar feeding frame 211 is turned over to a preset angle, thereby reducing the turning speed of the round bar feeding frame 211 .

实施中,如图2A和图2B所示,所述上下料装置还包括:In implementation, as shown in Figure 2A and Figure 2B, the loading and unloading device further includes:

减速接近开关217,与所述上料处理单元连接,固定在圆棒上料架的长臂翻转到预设角度的位置;The deceleration proximity switch 217 is connected to the feeding processing unit, and is fixed to the position where the long arm of the round bar feeding rack is flipped to a preset angle;

其中,所述上料处理单元具体用于在接收到所述减速接近开关的到位信号后,调节所述上料翻转油缸的进油口流量以降低翻转速度,直至翻转到90度。The feeding processing unit is specifically configured to adjust the flow rate of the oil inlet of the feeding and turning cylinder to reduce the turning speed until the turning reaches 90 degrees after receiving the in-position signal of the deceleration proximity switch.

减速接近开关和上料处理单元的配合,通过简单的结构,实现了圆棒上料架在翻转接近90度时,即硅棒翻转接近90度时,翻转速度的降低,使得硅棒翻转至90度时的速度较低,对硅棒的冲击较小,起到了保护硅棒的作用。The cooperation of the deceleration proximity switch and the feeding processing unit, through a simple structure, realizes the reduction of the turning speed when the round bar feeding rack is turned close to 90 degrees, that is, when the silicon rod is turned close to 90 degrees, so that the silicon rod is turned to 90 degrees. When the speed is low, the impact on the silicon rod is small, which plays a role in protecting the silicon rod.

实施中,如图2A和图2B所示,所述圆棒上料架211的短臂内侧为长度测量基准面211-1;In implementation, as shown in FIG. 2A and FIG. 2B , the inner side of the short arm of the round bar feeding rack 211 is the length measurement reference plane 211-1;

所述圆棒上料组件还包括:The round bar feeding assembly also includes:

圆棒支撑机构212,固定在所述圆棒上料架211的长臂内侧,用于在所述圆棒上料架211的长臂横向放置时支撑卧式放置的圆形的硅棒;The round bar support mechanism 212 is fixed on the inner side of the long arm of the round bar feeding rack 211, and is used to support the horizontally placed circular silicon rod when the long arm of the round bar feeding rack 211 is placed horizontally;

圆棒夹紧块213和圆棒夹紧驱动装置,所述圆棒夹紧驱动装置分别与所述圆棒支撑机构和圆棒夹紧块固定;其中,所述圆棒夹紧块213用于在所述圆棒夹紧驱动装置的带动下,将位于所述圆棒支撑机构之上的圆形的硅棒推动至顶住所述长度测量基准面211-1夹紧固定;The round bar clamping block 213 and the round bar clamping driving device are respectively fixed with the round bar supporting mechanism and the round bar clamping block; wherein, the round bar clamping block 213 is used for Driven by the round rod clamping driving device, push the round silicon rod located on the round rod supporting mechanism to hold against the length measurement reference surface 211-1 for clamping and fixing;

夹紧块位移测量装置215,与所述圆棒上料架211固定,用于测量所述圆棒夹紧块213的位移;A clamping block displacement measuring device 215, which is fixed with the round bar feeding rack 211, is used to measure the displacement of the round bar clamping block 213;

所述上料处理单元还用于根据所述圆棒夹紧块的初始位置到所述长度测量基准面之间的距离以及所述圆棒夹紧块的位移,得到圆形的硅棒的长度;其中,所述圆棒夹紧块的初始位置为所述圆棒夹紧驱动装置伸长到最大长度时所述圆棒夹紧块所处的位置。The feeding processing unit is also used to obtain the length of the round silicon rod according to the distance between the initial position of the round rod clamping block and the length measurement reference plane and the displacement of the round rod clamping block. ; wherein, the initial position of the round bar clamping block is the position where the round bar clamping block is located when the round bar clamping driving device is extended to the maximum length.

在需要将圆形的硅棒进行上料时,首先,L形的圆棒上料架以圆棒上料架的长臂横向放置的方式放置;之后,将圆形的硅棒以卧式放置在圆棒支撑机构之上,进行有料检测。为了后续对硅棒转运及切割的需要,需要测量硅棒的长度。长度测量基准面的位置和圆棒夹紧块的初始位置之间的距离是确定的。在有料检测为有料的情况下,圆棒夹紧块在圆棒夹紧气缸的带动下,从圆棒夹紧块开始移动、到推动硅棒的一侧端面直至顶住长度侧梁基准面,夹紧块位移测量装置测量出了圆棒夹紧块的位移,进而圆棒处理单元计算得出圆形的硅棒的长度。When the round silicon rods need to be loaded, first, the L-shaped round rod feeding rack is placed with the long arm of the round rod feeding rack horizontally placed; then, the round silicon rods are placed horizontally On the round bar support mechanism, the material detection is carried out. The length of the silicon rod needs to be measured for the subsequent transportation and cutting of the silicon rod. The distance between the position of the length measurement reference plane and the initial position of the round bar clamping block is determined. In the case that the material is detected as material, the round rod clamping block is driven by the round rod clamping cylinder to move from the round rod clamping block to pushing the end face of one side of the silicon rod until it resists the datum surface of the length side beam. The clamping block displacement measuring device measures the displacement of the round rod clamping block, and then the round rod processing unit calculates the length of the round silicon rod.

具体的,有料检测通过上下料装置的用于有料检测的光电开关进行。Specifically, the presence of material is detected by a photoelectric switch used for detection of the presence of material in the loading and unloading device.

实施中,圆棒夹紧驱动装置采用圆棒夹紧气缸214,所述圆棒夹紧气缸214的缸体与所述圆棒上料架211固定,所述圆棒夹紧块213固定在所述圆棒夹紧气缸214的导向杆的上端;In implementation, the round bar clamping driving device adopts a round bar clamping cylinder 214, the cylinder body of the round bar clamping cylinder 214 is fixed with the round bar feeding rack 211, and the round bar clamping block 213 is fixed on the The round bar clamps the upper end of the guide rod of the cylinder 214;

其中,所述圆棒夹紧块213用于在所述圆棒夹紧气缸214的带动下,将位于所述圆棒支撑机构之上的圆形的硅棒推动至顶住所述长度测量基准面211-1夹紧固定;所述圆棒夹紧块的初始位置为所述圆棒夹紧气缸的导向杆伸长到最大长度时所述圆棒夹紧块所处的位置。Wherein, the round rod clamping block 213 is used to push the round silicon rod located on the round rod supporting mechanism to stand against the length measurement reference under the driving of the round rod clamping cylinder 214 The surface 211-1 is clamped and fixed; the initial position of the round bar clamping block is the position of the round bar clamping block when the guide rod of the round bar clamping cylinder is extended to the maximum length.

实施中,所述上料处理单元具体用于根据下述关系式,得到圆形的硅棒的长度L:In implementation, the feeding processing unit is specifically used to obtain the length L of the circular silicon rod according to the following relational formula:

L=K-S;L=K-S;

其中,K为所述圆棒夹紧块的初始位置到所述长度测量基准面之间的距离,S为圆棒夹紧块的位移。Wherein, K is the distance from the initial position of the round bar clamping block to the length measurement reference plane, and S is the displacement of the round bar clamping block.

这样,能够快速方便的得到硅棒的长度。In this way, the length of the silicon rod can be obtained quickly and conveniently.

实施中,所述夹紧块位移测量装置为拉伸编码器。In implementation, the clamping block displacement measuring device is a tensile encoder.

拉伸编码器作为夹紧块位移测量装置,结构小巧,便于安装,和上料处理单元配合,能够方便的实现圆形的硅棒的长度测量,且测量的准确性也较高。As a clamping block displacement measurement device, the tensile encoder has a compact structure and is easy to install. In cooperation with the feeding processing unit, the length measurement of the circular silicon rod can be easily realized, and the measurement accuracy is also high.

具体的,如图2A所示,上下料装置还包括:Specifically, as shown in Figure 2A, the loading and unloading device further includes:

两个方棒下料组件22;Two square bar blanking assemblies 22;

其中,圆棒上料组件为两个,两个圆棒上料组件和两个方棒下料组件平行设置。Among them, there are two round bar feeding components, and two round bar feeding components and two square bar feeding components are arranged in parallel.

圆形的硅棒上料的流程如下:The process of feeding round silicon rods is as follows:

①圆棒上料架的长臂横向放置在上下料支撑框架之上,硅棒上料到圆棒支撑机构之上;①The long arm of the round bar feeding rack is placed horizontally on the upper and lower material support frame, and the silicon rod is fed onto the round bar support mechanism;

②固定在圆棒上料架处的光电开关检测,并且发出有料信号,然后圆棒夹紧气缸通气,圆棒夹紧气缸运动时带动圆棒夹紧块旋转弹出;然后,圆棒夹紧气缸继续带动圆棒夹紧块运动,从硅棒的一端面推动硅棒,直至硅棒的另一端面顶住到圆棒夹紧气缸夹紧固定。②The photoelectric switch fixed on the round bar feeding rack detects and sends out a material signal, then the round bar clamping cylinder is ventilated, and when the round bar clamping cylinder moves, the round bar clamping block is driven to rotate and pop out; then, the round bar clamping cylinder Continue to drive the round rod clamping block to move, and push the silicon rod from one end face of the silicon rod until the other end face of the silicon rod bears against the round rod clamping cylinder to clamp and fix.

③上料翻转油缸通过推动圆棒上料架的外底使其绕轴转动,当翻转到减速接近开关位置时,减速接近开关检测到位,通过上料处理单元调节上料翻转油缸进油口流量,使得翻转速度降低,直至翻转90°到位。③ The feeding and turning oil cylinder rotates around the axis by pushing the outer bottom of the round bar feeding frame. When it is turned to the position of the deceleration proximity switch, the deceleration proximity switch detects that it is in place, and the feeding processing unit is used to adjust the oil inlet flow of the feeding and turning cylinder. , so that the turning speed is reduced until the turning is 90° in place.

方棒的下料流程如下:The blanking process of the square bar is as follows:

①方棒下料组件先竖起,将切割形成的方棒竖向放置到方棒下料组件;①The square bar blanking component is erected first, and the square bar formed by cutting is placed vertically on the square bar blanking component;

②方棒下料组件的下料翻转油缸缩回,翻转直至水平位置。②The blanking and turning cylinder of the square bar blanking assembly is retracted and turned until it is horizontal.

本申请实施例的硅棒切割磨削系统的硅棒切割磨削方法,包括如下步骤:The silicon rod cutting and grinding method of the silicon rod cutting and grinding system according to the embodiment of the present application includes the following steps:

步骤S1:转动旋转平台,将第一硅棒转动到第一切割装置处;Step S1: rotating the rotating platform, and rotating the first silicon rod to the first cutting device;

步骤S2:第一切割装置的两个切割机头机构自上而下运动,对第一硅棒进行第一次切割,形成第一中间棒和两个相背的边皮;Step S2: the two cutting head mechanisms of the first cutting device move from top to bottom, and the first silicon rod is cut for the first time to form a first middle rod and two opposite side skins;

步骤S3:将两个边皮取走,第一切割装置的两个切割机头机构向上复位;Step S3: remove the two side skins, and reset the two cutting head mechanisms of the first cutting device upward;

步骤S4:继续转动旋转平台,将第一中间棒转动到第二切割装置处,同时,第二硅棒转动到第一切割装置处;Step S4: continue to rotate the rotating platform, rotate the first intermediate rod to the second cutting device, and at the same time, rotate the second silicon rod to the first cutting device;

步骤S5:第二切割装置的两个切割机头机构自上而下运动,对第一中间棒进行第二次切割,形成第一方棒和两个相背的边皮;同时,第一切割装置的两个切割机头机构自上而下运动,对第二硅棒进行第一次切割;Step S5: The two cutting head mechanisms of the second cutting device move from top to bottom, and the first intermediate rod is cut a second time to form a first square rod and two opposite side skins; at the same time, the first cutting The two cutting head mechanisms of the device move from top to bottom to cut the second silicon rod for the first time;

步骤S6:将边皮取走,第一切割装置的两个切割机头机构和第二切割装置的两个切割机头机构向上复位。Step S6: remove the edge skin, and reset the two cutting head mechanisms of the first cutting device and the two cutting head mechanisms of the second cutting device upwards.

本申请实施例的硅棒切割磨削系统的硅棒切割磨削方法,第一切割装置对硅棒进行第一次切割,形成中间棒和两个相背的边皮;第二切割装置对中间棒进行第二次切割,形成方棒和两个相背的边皮。第二切割装置对中间棒进行第二次切割的同时,第一切割装置对硅棒进行第一次切割,这样,使得切割效率较高。通过旋转平台的转动,实现了硅棒、中间棒的快捷方便的转动。第一切割装置和第二切割装置在进行切割时,都能一次切割形成两个边皮,切割效率较高。In the silicon rod cutting and grinding method of the silicon rod cutting and grinding system of the embodiment of the present application, the first cutting device cuts the silicon rod for the first time to form a middle rod and two opposite side skins; The bar is cut a second time to form a square bar and two opposite side skins. While the second cutting device cuts the middle rod for the second time, the first cutting device cuts the silicon rod for the first time, so that the cutting efficiency is higher. Through the rotation of the rotating platform, the quick and convenient rotation of the silicon rod and the middle rod is realized. When the first cutting device and the second cutting device are cutting, they can both cut to form two side skins at one time, and the cutting efficiency is high.

实施中,硅棒切割磨削方法还包括:In implementation, the silicon rod cutting and grinding method further includes:

步骤S7:继续转动旋转平台,将第一方棒转动到磨削装置处;同时,第二中间棒转动到第二切割装置处,第三硅棒转动到第一切割装置处;Step S7: continue to rotate the rotating platform, and rotate the first square rod to the grinding device; at the same time, the second intermediate rod is rotated to the second cutting device, and the third silicon rod is rotated to the first cutting device;

步骤S8:磨削装置对第一方棒进行磨削,形成磨削后第一方棒;同时,第二切割装置的两个切割机头机构自上而下运动,对第二中间棒进行第二次切割,形成第二方棒和两个相背的边皮;同时,第一切割装置的两个切割机头机构自上而下运动,对第三硅棒进行第一次切割,形成第三中间棒和两个相背的边皮;Step S8: the grinding device grinds the first square bar to form the first square bar after grinding; at the same time, the two cutting head mechanisms of the second cutting device move from top to bottom, and perform the first step on the second intermediate bar. The second cutting is performed to form the second square rod and the two opposite side skins; at the same time, the two cutting head mechanisms of the first cutting device move from top to bottom, and the third silicon rod is cut for the first time to form the first cutting. Three middle rods and two opposite side skins;

步骤S9:将边皮取走;同时,磨削装置复位,第一切割装置的两个切割机头机构和第二切割装置的两个切割机头机构向上复位。Step S9: remove the edge skin; at the same time, the grinding device is reset, and the two cutting head mechanisms of the first cutting device and the two cutting head mechanisms of the second cutting device are reset upward.

这样,磨削装置进行磨削,第二切割装置进行切割,第一切割装置进行切割,是同时进行的,大大提高了硅棒切割和磨削的效率。旋转平台实现了硅棒、中间棒和方棒在第一切割装置、第二切割装置和磨削装置之间位置的转换。In this way, the grinding device performs grinding, the second cutting device performs cutting, and the first cutting device performs cutting simultaneously, which greatly improves the efficiency of silicon rod cutting and grinding. The rotating platform realizes the position conversion of the silicon rod, the middle rod and the square rod among the first cutting device, the second cutting device and the grinding device.

实施中,硅棒切割磨削方法还包括:In implementation, the silicon rod cutting and grinding method further includes:

步骤S10:继续转动旋转平台,将磨削后第一方棒转动到转运装置处,转运装置将磨削后第一方棒转运到上下料装置处进行下料;同时,第二方棒转动到磨削装置处,第三方棒转动到第二切割装置处,将另一个第一硅棒转动到第一切割装置处。Step S10: Continue to rotate the rotating platform, rotate the first square bar after grinding to the transfer device, and the transfer device transfers the first square bar after grinding to the loading and unloading device for unloading; at the same time, the second square bar is rotated to At the grinding device, the third-party rod is rotated to the second cutting device, and the other first silicon rod is rotated to the first cutting device.

磨削后第一方棒,被转运装置转运到上下料装置处,由上下料装置进行下料,实现了第一硅棒→第一中间棒→第一方棒→磨削后第一方棒的切割和磨削过程。即每一个硅棒都能按照硅棒→中间棒→方棒→磨削后方棒的过程进行处理。After grinding, the first square rod is transported by the transfer device to the loading and unloading device, and the loading and unloading device carries out unloading, realizing the first silicon rod → the first intermediate rod → the first square rod → the first square rod after grinding. cutting and grinding process. That is, each silicon rod can be processed according to the process of silicon rod → middle rod → square rod → grinding rear rod.

实施中,将两个边皮取走的步骤,具体包括:In the implementation, the steps of removing the two side skins specifically include:

切割装置的两个边皮夹持机构的边皮夹持爪相向运动通过机头通孔进入到切割装置的两个所述切割机头机构之间夹持住两个边皮,且相背运动通过机头通孔退出切割装置的两个切割机头机构之间,并将边皮放置到边皮收集组件内;The edge skin clamping claws of the two edge skin clamping mechanisms of the cutting device move toward each other and enter between the two cutting machine head mechanisms of the cutting device through the through hole of the machine head to clamp the two edge skins and move opposite to each other. Exit between the two cutting machine head mechanisms of the cutting device through the head through hole, and place the edge skin into the edge skin collection assembly;

其中,所述切割装置包括第一切割装置和第二切割装置。Wherein, the cutting device includes a first cutting device and a second cutting device.

切割装置,由于线锯安装架设置有机头通孔,与切割装置的两个边皮夹持机构的边皮夹持爪相互配合,实现了将边皮移走的过程中,不需要移动线锯安装架,节约了时间,提高了取边皮的效率,使得将边皮移走的工序较为简单,进而使得取边皮的效率较高。The cutting device, because the wire saw mounting frame is provided with a through hole for the machine head, which cooperates with the edge skin clamping claws of the two edge skin clamping mechanisms of the cutting device, so that the wire saw does not need to be moved during the process of removing the edge skin. The installation frame saves time, improves the efficiency of removing the edge skin, and makes the process of removing the edge skin relatively simple, thereby making the edge skin removal efficiency higher.

Claims (17)

1. A silicon rod cutting and grinding system is characterized by comprising:
a machine base;
the rotary platform is rotatably arranged on the base;
the fixing device is fixed on the rotating platform and used for fixing the vertically placed silicon rod;
the first cutting device, the second cutting device and the grinding device sequentially surround the outer side of the rotating platform and are fixed on the machine base;
the rotating platform is used for rotating the silicon rods fixed by the fixing device to the first cutting device, the second cutting device and the grinding device in sequence for operation.
2. The silicon rod cutting and grinding system as set forth in claim 1, wherein the first cutting device and the grinding device are disposed oppositely;
the silicon rod cutting and grinding system further comprises a transfer device, and the transfer device is movably connected to one side, opposite to the second cutting device, of the machine base;
the fixing device comprises a fixing column and at least three silicon rod longitudinal fixing mechanisms, and the silicon rod longitudinal fixing mechanisms are arranged on the side face of the fixing column at intervals.
3. The silicon rod cutting and grinding system as set forth in claim 2, wherein the first cutting device and the second cutting device are cutting devices having the same structure; the cutting device includes:
the supporting frame is fixed on the base;
the two cutting machine head mechanisms are arranged on the front side of the supporting frame and can synchronously move up and down to cut the silicon rod and form two opposite side skins;
the two edge leather clamping mechanisms are respectively and fixedly arranged on two edges of the supporting frame;
the flaw-piece collecting assembly is fixedly arranged on the back side of the supporting frame;
the two flaw-piece clamping mechanisms are used for moving in opposite directions to enter two flaw-pieces and clamping the two flaw-pieces between the cutting machine head mechanisms, and moving in opposite directions to exit from two positions between the cutting machine head mechanisms, and the flaw-pieces are placed in the flaw-piece collecting assembly.
4. The silicon rod cutting and grinding system as set forth in claim 3, wherein the flaw-piece clamping mechanism comprises:
the clamping fixing seat is fixed on the side of the supporting frame;
the two ends of the first-stage arm are respectively hinged with the clamping fixing seat and one end of the second-stage arm;
the flaw-piece clamping claw is hinged to one side of the secondary arm, which is far away from the primary arm;
and the clamping control unit is used for controlling the rotation of the primary arm, the secondary arm and the flaw-piece clamping claw.
5. The silicon rod cutting and grinding system as set forth in claim 4, wherein the flaw-piece clamping jaw comprises:
a mounting plate for a side clamping jaw;
the bottom clamping jaw is fixed at the bottom end of the front side of the flaw-piece clamping jaw mounting plate and is used for bearing the lower end surface of the vertically arranged silicon rod;
and the top clamping jaw is connected to the upper end of the positive side of the side skin clamping jaw mounting plate in a sliding manner, and can move up and down.
6. The silicon rod cutting and grinding system as set forth in claim 5, wherein the cutter head mechanism comprises:
the scroll saw mounting frame is provided with a vertical machine head through hole;
the annular diamond wire is arranged on the positive side of the wire saw mounting frame, and the cutting section of the annular diamond wire is not interfered with the through hole of the machine head; the cutting section is a part of the annular diamond wire used for cutting the silicon rod in motion;
the two flaw-piece clamping claws are used for moving in opposite directions to clamp the flaw-piece between the cutting machine head mechanisms through entering the two machine head through holes, and move in opposite directions to exit from the two machine head through holes between the cutting machine head mechanisms.
7. The silicon rod cutting and grinding system as claimed in any one of claims 2 to 6, wherein the silicon rod longitudinal fixing mechanism comprises:
the chuck frame vertical motion guide rail is fixed on the side surface of the fixed column;
the chuck frame is in sliding connection with the chuck frame vertical movement guide rail;
an upper floating head installed at the clip frame; the clamping head frame can move up and down along the guide rail in the vertical direction of the clamping head frame so as to drive the upper floating head to press the upper end surface of the silicon rod which is vertically placed and the upper end surface of the square rod which leaves the ground square rod;
the supporting device comprises a chuck frame, a flaw-piece supporting frame and a supporting frame, wherein the chuck frame is connected with the chuck frame and can extend downwards and reset upwards, the flaw-piece supporting frame is used for extending downwards and supporting the outer peripheral surface of the silicon rod, and the flaw-piece supporting frame is also used for resetting upwards to leave the outer peripheral surface of the silicon rod.
8. The silicon rod cutting and grinding system of claim 7, wherein the kerb support comprises:
the mounting piece of the edge supporting bracket is fixed with the chuck frame;
the flaw-piece handrail is fixed on one side, far away from the upper floating head, of the handrail fixing part and extends downwards;
and the edge supporting leather driving device is respectively connected with the edge supporting leather bracket mounting part and the supporting rod fixing part and is used for driving the supporting rod fixing part and the edge supporting leather supporting rod to extend downwards and reset upwards.
9. The silicon rod cutting grinding system as set forth in claim 8, wherein the silicon rod longitudinal fixing mechanism further comprises:
a silicon rod support mounting base fixed on the rotary platform;
and the lower floating head is used for supporting the lower end surface of the vertical silicon rod and is arranged above the silicon rod supporting and mounting seat.
10. The silicon rod cutting grinding system as set forth in claim 9, wherein the silicon rod longitudinal fixing mechanism further comprises an edge skin support assembly, the edge skin support assembly comprising:
the driving device for supporting the flaw-piece is fixed on the silicon rod supporting and installing seat and is arranged at intervals with the lower floating head;
the flaw-piece supporting head is used for supporting the position of a flaw-piece formed after the lower end surface of the silicon rod is cut, and the flaw-piece supporting head is fixed at the top end of the driving device for supporting the flaw-piece; the driving device for supporting the flaw-piece is used for locking when the silicon rod is cut into the square rod and the flaw-piece so that the flaw-piece supporting head keeps the height and supports the flaw-piece.
11. The silicon rod cutting and grinding system as set forth in any one of claims 2 to 6, wherein the transfer device comprises:
a loading and unloading clamping jaw frame;
the upper clamping jaw assembly and the lower clamping jaw assembly are arranged on the same side of the upper and lower clamping jaw frames at an interval in parallel;
the upper clamping jaw transferring and driving device is respectively fixed with the lower clamping jaw assembly and the upper clamping jaw assembly and drives the upper clamping jaw assembly to move up and down relative to the lower clamping jaw assembly;
lower clamping jaw transports drive arrangement, respectively with go up unloading clamping jaw frame with lower clamping jaw subassembly is fixed and drives lower clamping jaw subassembly, last clamping jaw subassembly with go up clamping jaw transports drive arrangement and moves from top to bottom in step.
12. The silicon rod cutting grinding system as set forth in claim 11, wherein the upper jaw transfer drive device comprises:
the cylinder body of the transfer gas-liquid cylinder is fixed at the bottom of the feeding and discharging clamping jaw frame, and the upper end of a guide rod of the transfer gas-liquid cylinder is fixed with the lower clamping jaw assembly;
the gas-liquid converter is connected with the transfer gas-liquid cylinder; the gas entering the gas-liquid converter extrudes hydraulic oil into the transfer gas-liquid cylinder to drive a guide rod of the transfer gas-liquid cylinder to jack the lower clamping jaw assembly;
the lower clamping jaw transferring driving device comprises a transferring air cylinder, a cylinder body of the transferring air cylinder is fixed with the lower clamping jaw assembly, and the upper end of a guide rod of the transferring air cylinder is fixed with the upper clamping jaw assembly; wherein, the air supply gets into the gas of transporting the cylinder drives the guide bar of transporting the cylinder will go up clamping jaw subassembly jack-up.
13. The silicon rod cutting and grinding system as set forth in claim 1, wherein the grinding device comprises:
the grinding support frame is fixed on the machine base;
the composite grinding body for coarse grinding and fine grinding of the square rod is installed on the front side of the grinding support frame, and the composite grinding body can move from top to bottom to grind the vertically placed square rod.
14. The silicon rod slicing and grinding method of the silicon rod slicing and grinding system as set forth in any one of claims 1 to 13, comprising the steps of:
rotating the rotating platform to rotate the first silicon rod to the first cutting device;
the two cutting machine head mechanisms of the first cutting device move from top to bottom to cut the first silicon rod for the first time to form a first middle rod and two back-to-back edge skins;
taking the two hems away, and upwards resetting the two cutting machine head mechanisms of the first cutting device;
continuing to rotate the rotating platform, rotating the first intermediate rod to the second cutting device, and simultaneously rotating the second silicon rod to the first cutting device;
the two cutting machine head mechanisms of the second cutting device move from top to bottom to cut the first middle rod for the second time to form a first square rod and two opposite side skins; simultaneously, the two cutting machine head mechanisms of the first cutting device move from top to bottom to cut the second silicon rod for the first time;
take the flaw-piece away, two cutting machine head mechanisms of the first cutting device and two cutting machine head mechanisms of the second cutting device reset upwards.
15. The silicon rod cutting and grinding method as set forth in claim 14, further comprising:
continuing to rotate the rotating platform, and rotating the first square rod to the grinding device; simultaneously, the second intermediate rod rotates to the second cutting device, and the third silicon rod rotates to the first cutting device;
grinding the first square rod by using a grinding device to form a ground first square rod; simultaneously, two cutting machine head mechanisms of the second cutting device move from top to bottom to perform second cutting on the second middle rod to form a second square rod and two opposite side skins; simultaneously, the two cutting machine head mechanisms of the first cutting device move from top to bottom to cut the third silicon rod for the first time to form a third middle rod and two opposite side skins;
taking the flaw-piece away; meanwhile, the grinding device resets, and the two cutting machine head mechanisms of the first cutting device and the two cutting machine head mechanisms of the second cutting device reset upwards.
16. The silicon rod cutting and grinding method as set forth in claim 15, further comprising:
continuing to rotate the rotating platform, rotating the ground first square rod to a transfer device, and transferring the ground first square rod to a feeding and discharging device by the transfer device for discharging; simultaneously, the second square rod is rotated to the grinding device, the third square rod is rotated to the second cutting device, and the other first silicon rod is rotated to the first cutting device.
17. The silicon rod cutting and grinding method as set forth in claim 16, wherein the step of removing the two rims comprises:
the flaw-piece clamping claws of the two flaw-piece clamping mechanisms of the cutting device move oppositely to enter the space between the two cutting machine head mechanisms of the cutting device through the machine head through holes to clamp the two flaw-pieces, and move oppositely to exit the space between the two cutting machine head mechanisms of the cutting device through the machine head through holes, and the flaw-pieces are placed in a flaw-piece collecting assembly;
wherein the cutting device comprises a first cutting device and a second cutting device.
CN202111568655.5A 2021-12-21 2021-12-21 Silicon rod cutting and grinding system and silicon rod cutting and grinding method Pending CN114311352A (en)

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CN115302327A (en) * 2022-07-21 2022-11-08 连智(大连)智能科技有限公司 Silicon rod grinding machine capable of being automatically butted with follow-up fixture
WO2024046438A1 (en) * 2022-08-31 2024-03-07 青岛高测科技股份有限公司 Squaring-milling integrated machine
CN115837716A (en) * 2022-12-22 2023-03-24 浙江晶盛机电股份有限公司 Silicon rod processing system
CN116352900A (en) * 2022-12-22 2023-06-30 浙江晶盛机电股份有限公司 A crystal rod cutting system
CN116141112A (en) * 2022-12-31 2023-05-23 青岛高测科技股份有限公司 Processing equipment and processing method for edge silicon block
CN117087020A (en) * 2023-09-28 2023-11-21 青岛高测科技股份有限公司 Sectioning components, cutting and grinding integrated machine and control method thereof, media, computer equipment

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