CN114152385A - Gas-electric converter based on Fabry-Perot differential pressure type sensor - Google Patents

Gas-electric converter based on Fabry-Perot differential pressure type sensor Download PDF

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Publication number
CN114152385A
CN114152385A CN202111468431.7A CN202111468431A CN114152385A CN 114152385 A CN114152385 A CN 114152385A CN 202111468431 A CN202111468431 A CN 202111468431A CN 114152385 A CN114152385 A CN 114152385A
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gas
fabry
perot
measuring
differential pressure
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CN114152385B (en
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李兵
李鹏飞
侯颖
兰梦辉
陈磊
韦学勇
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Xian Jiaotong University
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Xian Jiaotong University
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    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L13/00—Devices or apparatus for measuring differences of two or more fluid pressure values
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B13/00—Measuring arrangements characterised by the use of fluids
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L11/00—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00
    • G01L11/02—Measuring steady or quasi-steady pressure of a fluid or a fluent solid material by means not provided for in group G01L7/00 or G01L9/00 by optical means
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02T—CLIMATE CHANGE MITIGATION TECHNOLOGIES RELATED TO TRANSPORTATION
    • Y02T10/00—Road transport of goods or passengers
    • Y02T10/10—Internal combustion engine [ICE] based vehicles
    • Y02T10/30—Use of alternative fuels, e.g. biofuels

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
  • Measuring Volume Flow (AREA)

Abstract

The invention discloses a gas-electric converter based on a Fabry-Perot differential pressure type sensor, which mainly comprises a gas circuit structure module, the Fabry-Perot differential pressure type sensor, a middle shell, an upper shell and a gas-electric conversion control instrument. The gas circuit structure module is based on the principle of a differential pressure type gas-electric converter, namely, stable compressed air enters a gas circuit structure of the gas-electric converter, and a rear gas circuit is divided into two paths: one path is a zero setting gas path, and the other path is a measuring gas path. In the zero setting gas path, compressed gas flows into the atmosphere along the gas path through the replaceable orifice and the zero setting valve; in the measuring gas circuit, compressed gas flows through the replaceable orifice and then flows into the atmosphere through the measuring gap between the measuring head and the workpiece to be measured. The invention adopts a high-stability gas path structure and a Fabry-Perot differential pressure type sensor manufactured based on an MEMS process, greatly improves the precision, stability, resolution and response speed of a pneumatic measurement system, and can be matched with a numerical control system in a digital quantity output form.

Description

Gas-electric converter based on Fabry-Perot differential pressure type sensor
Technical Field
The invention belongs to the technical field of pneumatic measurement, relates to a converter, and particularly relates to a Fabry-Perot differential pressure type sensor-based pneumoelectric converter.
Background
The pneumatic measurement technology takes compressed air as a measurement medium, and converts the measured size or displacement into the variable quantity of flow or pressure by utilizing the characteristic that the flow or pressure of the air in a pipeline changes along with the change of the geometric dimension of a cross section, thereby realizing measurement. The pneumatic measurement is a relative measurement technology, has the characteristics of high measurement precision, non-contact measurement, small measurement force, long service life, self-cleaning capability, good stability and repeatability, simple equipment structure and low cost, and is widely applied to the field of manufacturing high-end equipment such as aerospace, automobile manufacturing, medical instruments and the like.
The gas-electric converter which is a key component of the pneumatic measurement technology can convert the variable quantity of the compressed gas parameter into a continuously variable voltage signal. The existing gas-electric converter is complex in structure and low in measurement precision, only has an analog quantity data interface, and is difficult to be matched with a domestic numerical control system for use; and most of the gas pressure sensors adopt silicon strain gauges, but the core technology and components of the gas pressure sensors are heavily dependent on import.
Disclosure of Invention
In order to overcome the defects of the prior art, the invention aims to provide the gas-electric converter based on the Fabry-Perot differential pressure type sensor, which adopts the Fabry-Perot differential pressure type sensor manufactured based on the MEMS process and a high-stability gas circuit structure so as to ensure the precision, the stability and the response speed of a pneumatic measurement system.
In order to achieve the purpose, the invention adopts the technical scheme that:
a gas-electric converter based on a Fabry-Perot differential pressure type sensor comprises a gas circuit structure module, the Fabry-Perot differential pressure type sensor and a gas-electric conversion control instrument;
the gas circuit structure module comprises a zero setting gas circuit and a measuring gas circuit which are connected in parallel, and the measuring head is connected to the tail end of the measuring gas circuit;
the Fabry-Perot differential pressure type sensor comprises two independent measuring cavities, a Fabry-Perot pressure sensor is arranged in each measuring cavity, the output ends of the two Fabry-Perot pressure sensors are connected with a signal conditioning circuit, the air inlet of the first measuring cavity is communicated with a measuring air passage, the air inlet of the second measuring cavity is communicated with a zero adjusting air passage, the two Fabry-Perot pressure sensors respectively acquire the pressure of the measuring air passage and the zero adjusting air passage, and the signal conditioning circuit acquires the pressure difference value of the measuring air passage and the zero adjusting air passage and outputs the pressure difference value in the form of a voltage signal;
and the gas-electric conversion controller receives the voltage signal and obtains a measurement result.
In one embodiment, the gas path structure module comprises a gas inlet path, the tail end of the gas inlet path is divided into two paths, and the two paths are respectively connected with a zero setting gas path and a measuring gas path, wherein the zero setting gas path is provided with a replaceable orifice II, the tail end of the zero setting gas path is provided with a zero setting valve, the zero setting valve is used for adjusting the gas pressure in the zero setting gas path, so that the Fabry-Perot differential pressure type sensor is in the optimal linear range, and the gas in the zero setting gas path flows into the atmosphere from the zero setting valve; the first replaceable orifice is arranged on the measuring air path, and the air inlet of the first measuring cavity is connected behind the first replaceable orifice and the air inlet of the second measuring cavity is connected behind the second replaceable orifice along the air flow direction.
In one embodiment, the air inlet pipeline is provided with a plug type air inlet joint at the initial end, the plug type air outlet joint is arranged at the tail end of the measuring air channel, the plug type air outlet joint is connected with the measuring head through a hose, and the air in the measuring air channel finally flows into the atmosphere in the gap between the measuring head and the workpiece to be measured.
In one embodiment, in the gas path structure module, the gas path sealing is performed on the gas inlet pipeline through the inner hexagonal plug, and the gas path sealing is performed on the zero adjustment gas path through the cylindrical plug.
In one embodiment, the outer wall of the first replaceable orifice and the inner wall of the measurement air passage are sealed through a first sealing ring, and the outer wall of the second replaceable orifice and the inner wall of the zeroing air passage are sealed through a second sealing ring, so that a throttling function is achieved.
In one embodiment, the gas-electric converter further comprises a middle housing, the gas circuit structure module is arranged below the middle housing, and the fabry-perot differential pressure type sensor is arranged in the middle housing.
In one embodiment, the fabry-perot pressure sensor is manufactured based on an MEMS process, a thin film type pressure sensing element and a fabry-perot optical pressure conversion element are used, compressed gas enters different measurement cavities of the sensor through a first measurement cavity gas inlet and a second measurement cavity gas inlet, the first measurement cavity gas inlet is sealed by a third O-ring seal, and the second measurement cavity gas inlet is sealed by a fourth O-ring seal.
In one embodiment, a DB9 connector is installed on the middle shell, and the DB9 connector is connected with the signal conditioning circuit and the gas-electric conversion controller so as to complete data transmission and communication functions.
In one embodiment, the gas-electric conversion controller comprises an A/D converter, an ARM single chip microcomputer and an LCD display screen which are sequentially connected, and after analog-digital conversion and data processing are carried out on the voltage signals, the measurement results are displayed on the LCD display screen.
In one embodiment, the ARM single chip microcomputer is connected with a numerical control system, and real-time measurement data are transmitted to the numerical control system in a digital quantity mode.
Compared with the prior art, the pneumatic measurement system adopts a high-stability gas path structure, and ensures the precision, stability, resolution and response speed of the pneumatic measurement system. In addition, the Fabry-Perot differential pressure type sensor manufactured based on the MEMS process has the advantages of simple structure, strong stability, high resolution, high sensitivity and the like, and the performance of the pneumatic measurement system is further improved. Finally, the invention can also output the measurement data in the form of digital quantity, and can be used in cooperation with a domestic numerical control system, thereby greatly expanding the application range.
Drawings
Fig. 1 is a schematic view of the overall structure of the preferred embodiment of the present invention.
Fig. 2 is a schematic view of the internal structure of the preferred embodiment of the present invention.
Fig. 3 is a schematic side view of a preferred embodiment of the invention.
Fig. 4 is a schematic cross-sectional view a-a of a preferred embodiment of the present invention.
Fig. 5 is a schematic diagram of an air path structure module of the preferred embodiment of the present invention.
Fig. 6 is a block diagram of the fabry-perot differential pressure sensor, the sensor signal conditioning circuit, and the gas-electric conversion controller according to the preferred embodiment of the present invention.
Detailed Description
The embodiments of the present invention will be described in detail below with reference to the drawings and examples.
As shown in fig. 1, 2, 3, 4 and 5, the present invention is an electro-pneumatic transducer based on a fabry-perot differential pressure sensor, and its functional parts mainly include a gas circuit structure module 1, a fabry-perot differential pressure sensor 2 and an electro-pneumatic transducer controller 12. In order to realize packaging, the gas-electric converter further comprises a middle shell 3 and an upper shell 5, wherein the gas circuit structure module 1 is arranged below the middle shell 3, the Fabry-Perot differential pressure type sensor 2 is arranged in the middle shell 3, and the upper shell 5 is arranged above the middle shell 3 and used for top sealing.
The gas circuit structure module 1 adopts the gas circuit structure principle of a differential pressure type gas-electric converter, and comprises a zero setting gas circuit and a measuring gas circuit which are connected in parallel, and a measuring head is connected to the tail end of the measuring gas circuit.
The fabry-perot differential pressure type sensor 2 comprises two independent measuring cavities, each measuring cavity is internally provided with a fabry-perot pressure sensor, referring to fig. 6, the output ends of the two fabry-perot pressure sensors are connected with a signal conditioning circuit, a first measuring cavity air inlet 201 is communicated with a measuring air passage, a second measuring cavity air inlet 202 is communicated with a zeroing air passage, the two fabry-perot pressure sensors respectively acquire the pressures of the measuring air passage and the zeroing air passage, and a signal conditioning circuit 203 acquires the pressure difference value of the measuring air passage and the zeroing air passage and outputs the pressure difference value in the form of a voltage signal.
The data processing and display module 12 receives the voltage signal and obtains a measurement result.
With reference to fig. 4 and 5, in an embodiment, the gas circuit structure module 1 includes a gas inlet circuit, and the tail end of the gas inlet circuit is divided into two paths, which are respectively connected to the zero setting gas circuit and the measurement gas circuit. A second replaceable orifice 104 is arranged on the zeroing gas path, a zeroing valve 105 is installed at the tail end of the zeroing gas path, and the zeroing valve 105 is used for adjusting gas pressure in the zeroing gas path so that the Fabry-Perot differential pressure type sensor 2 is in an optimal linear range; and a first replaceable orifice 103 is arranged on the measuring gas path. Illustratively, the air inlet pipeline is provided with a plug-type air inlet joint 102 at the initial end, and the measuring air channel is provided with a plug-type air outlet joint 101 at the tail end.
The filtered and pressure-stabilized compressed air enters the gas-electric converter through the plug-type air inlet joint 102 connected with the hose.
In the zero setting air passage of the air passage structure module 1, the compressed air passes through the second replaceable orifice 104 and the zero setting valve 105 along the air passage and finally flows into the atmosphere.
In the measuring gas circuit of the gas circuit structure module 1, after passing through the replaceable orifice one 103, the compressed gas flows out of the gas-electric converter along the plug type gas outlet joint 101, the plug type gas outlet joint 101 and the measuring head are connected through the PU hose, and finally the compressed gas flows into the atmosphere in the gap between the measuring head and the workpiece to be measured.
The first replaceable orifice 103 and the second replaceable orifice 104 in the air path structure module 1 can be replaced by orifices with different sizes according to the actual requirement of automatic measurement so as to adapt to the use requirement. In order to play a throttling role and realize air passage sealing, the outer wall of the replaceable throttling hole I103 and the inner wall of the measuring air passage are sealed through a first sealing ring 10, and the outer wall of the replaceable throttling hole II 104 and the inner wall of the zeroing air passage are sealed through a second sealing ring 11, so that the gas leakage amount is reduced, and the throttling function is realized.
The gas circuit in the gas circuit structure module 1 can produce the hole of unnecessary degree of depth because of the processing needs, consequently, carries out the gas circuit to the air inlet pipe way through hexagon socket cap plug 106 and seals through the cylinder end cap 107 gas circuit to the gas circuit of adjusting zero.
The Fabry-Perot pressure sensor is designed based on the Fabry-Perot interference principle and manufactured based on an MEMS (micro-electromechanical systems) process, light generated by a light source meets two reflectors to respectively generate two beams of reflected light, the two beams of reflected light meet in space to generate interference, and the interference light intensity is related to the phase difference of the two beams of light. When the pressure of the gas to be detected changes, the cavity length of the interference cavity changes, the phase difference of the two beams of reflected light changes, and the output electric signal changes. Referring to fig. 6, the present invention employs a thin film type pressure sensitive element and a fabry-perot optical pressure conversion element, and has the advantages of simple structure, strong stability, high resolution, high sensitivity, insensitivity to sensing signal fading, and the like, thereby greatly improving the accuracy, stability, and response speed of the gas-electric converter. The weak current signal output by the Fabry-Perot optical pressure conversion element is amplified and converted into a voltage signal by a primary amplifier in the signal conditioning circuit, and then is continuously amplified by a secondary amplifier, and then noise is filtered by an active filter.
In one embodiment, in the direction of airflow, a first measurement chamber inlet 201 is connected behind a first interchangeable orifice 103 and a second measurement chamber inlet 202 is connected behind a second interchangeable orifice 104. Compressed gas respectively enters different measurement cavities of the sensor from a first measurement cavity gas inlet 201 and a second measurement cavity gas inlet 202, so that the Fabry-Perot differential pressure type sensor 2 can obtain the pressure difference between a measurement gas circuit and a zero setting gas circuit.
The position of the first measuring cavity air inlet 201 can be sealed by an O-shaped sealing ring III 8, and the position of the second measuring cavity air inlet 202 can be sealed by an O-shaped sealing ring IV 9, so that the sealing performance of the air path is ensured.
In one embodiment, the middle shell 3 is provided with a DB9 connector mounting hole, and is connected with a DB9 connector 4 through a bolt, and the DB9 connector 4 is connected with a signal conditioning circuit and the gas-electric conversion controller 12 so as to complete data transmission and communication functions.
In one embodiment, the fabry-perot differential pressure sensor is fixed with the air channel structure module 1 by six screws one 7, and the screws one 7 can be M3 cross recessed pan head screws.
The middle shell 3 is connected with the air channel structure module 1 through four screws 14, and is connected with the upper shell 5 through four screws 6. The second screw 14 can be an M3.5 cross-recessed countersunk head screw, and the third screw 6 can be an M3 cross-recessed countersunk head screw.
The gas-electricity conversion controller has the functions of nominal size setting, upper and lower limit size touch screen/key calibration, K coefficient automatic calculation, panel display and the like. As shown in fig. 6, the gas-electric conversion controller includes an a/D converter, an ARM single chip microcomputer and an LCD display screen, which are connected in sequence, wherein the ARM single chip microcomputer is also connected to the numerical control system 13.
The working process of the gas-electricity conversion control instrument is as follows: the continuous voltage signal output by the Fabry-Perot differential pressure type sensor 2 through the signal conditioning circuit is converted into digital quantity by the A/D converter, and then the ARM single chip microcomputer processes data, so that the voltage variation can be converted into the variation of the measured size. Finally, the measurement result is displayed on an LCD display screen; so as to know the processing state of the workpiece on the production line in real time and adjust the processing state in time. Meanwhile, the pneumatic measuring system can be used independently, and the application range is expanded.
At the same time, the real-time measurement data will be transmitted to the numerical control system 13 in the form of digital quantities. The numerical control system 13 can compensate the position of the machining tool according to the position, finally realize full-automatic on-machine measurement, realize real-time feedback of the size of the machined part, and improve the machining precision and efficiency.
The complete measurement process of the invention comprises the following steps: the compressed gas generated by the gas source sequentially passes through the filter and the voltage stabilizer to output stable compressed gas, then enters the gas-electric converter to be divided into a measurement gas circuit and a zero setting gas circuit, the gas in the zero setting gas circuit enters the atmosphere through the zero setting valve, and the gas in the measurement gas circuit flows into the atmosphere through a measurement gap between the measuring head and the workpiece to be measured. The differential pressure type sensor can measure the pressure difference between the two gas paths. The gas-electric converter realizes the conversion of pressure and voltage in the gas circuit.
The measurement principle of the invention is as follows: pneumatic measurement generally uses compressed air as a measurement medium, and utilizes the characteristic that the flow rate or pressure of air in a pipeline changes along with the change of the geometric dimension of a cross section to convert the dimension or displacement into the change of the flow rate or pressure, thereby realizing measurement. The measuring head for pneumatic measurement converts the change of the size of a workpiece into the change of gas pressure or flow by using the principle of a nozzle baffle mechanism, and converts the change of the size of the workpiece into a voltage signal through a gas-electricity converter, so that the measured physical quantity is obtained. In the measuring range, the voltage value and the measured physical quantity value are in one-to-one correspondence linear relation.
The invention adopts a high-stability gas circuit structure, and ensures the precision, stability, resolution and response speed of the pneumatic measurement system. The Fabry-Perot differential pressure type sensor manufactured based on the MEMS process has the advantages of simple structure, strong stability, high resolution, high sensitivity and the like, and the performance of a pneumatic measurement system is further improved. The invention can also output the measurement data in the form of digital quantity, and can be used in cooperation with a domestic numerical control system, thereby greatly expanding the application range.

Claims (10)

1. A gas-electric converter based on a Fabry-Perot differential pressure type sensor is characterized by comprising a gas circuit structure module (1), a Fabry-Perot differential pressure type sensor (2) and a gas-electric conversion control instrument (12);
the gas circuit structure module (1) comprises a zero setting gas circuit and a measuring gas circuit which are connected in parallel, and a measuring head is connected to the tail end of the measuring gas circuit;
the Fabry-Perot differential pressure type sensor (2) comprises two independent measuring cavities, a Fabry-Perot pressure sensor is arranged in each measuring cavity, the output ends of the two Fabry-Perot pressure sensors are connected with a signal conditioning circuit, a first measuring cavity air inlet (201) is communicated with a measuring air passage, a second measuring cavity air inlet (202) is communicated with a zero setting air passage, the two Fabry-Perot pressure sensors respectively acquire the pressure of the measuring air passage and the zero setting air passage, and the signal conditioning circuit acquires the pressure difference value of the measuring air passage and the zero setting air passage and outputs the pressure difference value in the form of a voltage signal;
and the gas-electric conversion control instrument (12) receives the voltage signal and acquires a measurement result.
2. The gas-electric converter based on the Fabry-Perot differential pressure sensor according to claim 1, wherein the gas circuit structure module (1) comprises a gas inlet pipeline, the tail end of the gas inlet pipeline is divided into two paths, and the two paths are respectively connected to a zero adjustment gas circuit and a measurement gas circuit, wherein a second replaceable orifice (104) is arranged on the zero adjustment gas circuit, a zero adjustment valve (105) is mounted at the tail end of the zero adjustment gas circuit, the zero adjustment valve (105) is used for adjusting the gas pressure in the zero adjustment gas circuit, so that the Fabry-Perot differential pressure sensor (2) is in an optimal linear range, and the gas in the zero adjustment gas circuit flows into the atmosphere from the zero adjustment valve (105); a first replaceable orifice (103) is arranged on the measuring air path, and a first measuring cavity air inlet (201) is connected behind the first replaceable orifice (103) and a second measuring cavity air inlet (202) is connected behind a second replaceable orifice (104) along the air flow direction.
3. The gas-electric converter based on the fabry-perot differential pressure sensor as claimed in claim 2, wherein the inlet pipe is provided with a plug-type inlet connector (102) at the beginning, a plug-type outlet connector (101) is arranged at the end of the measuring gas path, the plug-type outlet connector (101) is connected with the measuring head through a hose, and the gas in the measuring gas path finally flows into the atmosphere in the gap between the measuring head and the workpiece to be measured.
4. The gas-electric converter based on the Fabry-Perot differential pressure sensor according to claim 2 or 3, characterized in that in the gas circuit structure module (1), the gas circuit of the gas inlet pipeline is sealed by a hexagon socket plug (106), and the gas circuit of the zeroing gas circuit is sealed by a cylindrical plug (107).
5. The gas-electric converter based on the Fabry-Perot differential pressure type sensor according to claim 1, characterized in that the outer wall of the replaceable orifice I (103) is sealed with the inner wall of the measurement gas path through a sealing ring I (10), and the outer wall of the replaceable orifice II (104) is sealed with the inner wall of the zeroing gas path through a sealing ring II (11) to realize the throttling function.
6. The gas-electric converter based on a fabry-perot differential pressure sensor according to claim 1, characterized in that it further comprises a middle housing (3), the gas circuit structure module (1) being arranged below the middle housing (3), the fabry-perot differential pressure sensor (2) being arranged in the middle housing (3).
7. The gas-electric converter based on the fabry-perot differential pressure type sensor as claimed in claim 1, wherein the fabry-perot pressure sensor is manufactured based on MEMS technology, a thin film type pressure sensitive element and a fabry-perot optical pressure conversion element are adopted, compressed gas respectively enters different measurement cavities of the sensor from a first measurement cavity gas inlet (201) and a second measurement cavity gas inlet (202), the first measurement cavity gas inlet (201) is sealed by a third O-ring (8), and the second measurement cavity gas inlet (202) is sealed by a fourth O-ring (9).
8. The gas-electric converter based on the fabry-perot differential pressure type sensor according to claim 1, characterized in that a DB9 connector (4) is installed on the middle housing (3), and the DB9 connector (4) is connected with the signal conditioning circuit (203) and the gas-electric converter controller (12) to complete data transmission and communication functions.
9. The gas-electric converter based on the fabry-perot differential pressure type sensor as recited in claim 1, wherein the gas-electric conversion controller (12) comprises an a/D converter, an ARM single chip microcomputer and an LCD display screen which are connected in sequence, and after the voltage signal is subjected to analog-to-digital conversion and data processing, the measurement result is displayed on the LCD display screen.
10. The gas-electric converter based on the fabry-perot differential pressure type sensor according to claim 9, wherein the ARM single chip microcomputer is connected with a numerical control system (13), and real-time measurement data is transmitted to the numerical control system (13) in the form of digital quantity.
CN202111468431.7A 2021-12-03 2021-12-03 Gas-electric converter based on Fabry-Perot differential pressure type sensor Active CN114152385B (en)

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Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5128537A (en) * 1990-06-08 1992-07-07 Landis & Gyr Betriebs Ag Device for optically measuring a pressure differential
JP2003166890A (en) * 2001-09-21 2003-06-13 Yamatake Corp Physical quantity measuring method and its device
US20070089522A1 (en) * 2005-10-03 2007-04-26 Yamatake Corporation Differential pressure measuring system and differential pressure measuring method
CN103528490A (en) * 2013-11-05 2014-01-22 无锡市迈日机器制造有限公司 High-measurement-range submicron-level high-precision pneumatic electric converter
CN206832206U (en) * 2017-05-09 2018-01-02 亿莱瑞德机电科技（苏州）有限公司 Single channel air-gauge
CN206832205U (en) * 2017-05-09 2018-01-02 亿莱瑞德机电科技（苏州）有限公司 Applied to the pneumatic-to-current converter in air-gauge
CN207636093U (en) * 2017-11-16 2018-07-20 惠州东精测控设备有限公司 A kind of pneumatic-to-current converter

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5128537A (en) * 1990-06-08 1992-07-07 Landis & Gyr Betriebs Ag Device for optically measuring a pressure differential
JP2003166890A (en) * 2001-09-21 2003-06-13 Yamatake Corp Physical quantity measuring method and its device
US20070089522A1 (en) * 2005-10-03 2007-04-26 Yamatake Corporation Differential pressure measuring system and differential pressure measuring method
CN103528490A (en) * 2013-11-05 2014-01-22 无锡市迈日机器制造有限公司 High-measurement-range submicron-level high-precision pneumatic electric converter
CN206832206U (en) * 2017-05-09 2018-01-02 亿莱瑞德机电科技（苏州）有限公司 Single channel air-gauge
CN206832205U (en) * 2017-05-09 2018-01-02 亿莱瑞德机电科技（苏州）有限公司 Applied to the pneumatic-to-current converter in air-gauge
CN207636093U (en) * 2017-11-16 2018-07-20 惠州东精测控设备有限公司 A kind of pneumatic-to-current converter

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