CN114142706A - Motion module and motion device with same - Google Patents
Motion module and motion device with same Download PDFInfo
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- CN114142706A CN114142706A CN202111473900.4A CN202111473900A CN114142706A CN 114142706 A CN114142706 A CN 114142706A CN 202111473900 A CN202111473900 A CN 202111473900A CN 114142706 A CN114142706 A CN 114142706A
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K41/00—Propulsion systems in which a rigid body is moved along a path due to dynamo-electric interaction between the body and a magnetic field travelling along the path
- H02K41/02—Linear motors; Sectional motors
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K1/00—Details of the magnetic circuit
- H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
- H02K1/34—Reciprocating, oscillating or vibrating parts of the magnetic circuit
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- H—ELECTRICITY
- H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
- H02K—DYNAMO-ELECTRIC MACHINES
- H02K3/00—Details of windings
- H02K3/46—Fastening of windings on the stator or rotor structure
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Abstract
The invention provides a motion module and a motion device with the same, comprising: a first moving assembly including a first stator part and a first rotor part; the first rotor part is connected with the first stator part in a sliding way, and the first rotor part can move in the horizontal direction relative to the first stator part; a second moving assembly including a second stator portion and a second rotor portion; the second stator part is fixed on the first rotor part, the second rotor part is connected with the first rotor part in a sliding mode, and the second rotor part can move in the vertical direction relative to the first rotor part; the first rotor part can drive the second moving component to move along the horizontal direction relative to the first stator part; and the gravity compensation component is connected with the second moving component and applies acting force opposite to the gravity direction to the second moving component so as to counteract partial gravity of the second moving component. The invention solves the problems of unstable power source and lower processing precision of the motion module in the prior art.
Description
Technical Field
The invention relates to the technical field of miniature motion platforms, in particular to a motion module and a motion device with the same.
Background
At present, the development and innovation of related industrial chains are driven and promoted by the high-speed development of electronic information technology, wherein the important factor restricting the development of chips is that equipment for manufacturing the chips is incomplete, and a high-precision micro motion platform is taken as an example, and can ensure the precision requirement in the chip manufacturing process and improve the quality of the chips.
Most of the existing micro-motion platforms rely on a linear motor as a power source, a coil can generate a large amount of heat in the motion process of the motor, the working performance of the coil can be reduced for a long time, and the insulation and stability of the coil and the wiring position of the coil can also directly influence the quality of the motor; in addition, the gravity of the motion platform itself may also affect the processing precision, and further may result in reducing the processing precision of the chip.
Disclosure of Invention
The invention mainly aims to provide a motion module and a motion device with the same, so as to solve the problems of unstable power source and low machining precision of the motion module in the prior art.
In order to achieve the above object, according to one aspect of the present invention, there is provided a motion module including: a first moving assembly including a first stator part and a first rotor part; the first rotor part is connected with the first stator part in a sliding way, and the first rotor part can move in the horizontal direction relative to the first stator part; a second moving assembly including a second stator portion and a second rotor portion; the second stator part is fixed on the first rotor part, the second rotor part is connected with the first rotor part in a sliding mode, and the second rotor part can move in the vertical direction relative to the first rotor part; the first rotor part can drive the second moving component to move along the horizontal direction relative to the first stator part; and the gravity compensation component is connected with the second moving component and applies acting force opposite to the gravity direction to the second moving component so as to counteract partial gravity of the second moving component.
Further, the first mover part includes a horizontal moving plate movably disposed in a horizontal direction with respect to the first stator part; the second stator portion includes: the second coil assembly is arranged on the horizontal moving plate; the second mover includes: the vertical moving plate is connected to the horizontal moving plate in a sliding manner along the vertical direction; a second magnetic steel group is arranged on the vertical moving plate and is arranged opposite to the second coil assembly, so that the second magnetic steel group drives the vertical moving plate to move along the vertical direction relative to the horizontal moving plate under the action of the magnetic force of the second coil assembly; the gravity compensation assembly is connected with the vertical moving plate.
Further, the second coil assembly includes: a second circuit board; the second coil group is arranged on the circuit connection end face of the second circuit board and is electrically connected with the second circuit board; and the second insulating layer is covered on the second coil group and is connected with the second circuit board.
Further, the second coil assembly further comprises a second back plate, the second circuit board is arranged on the second back plate, a step structure is arranged on the edge of the second back plate, and the second back plate is fixedly connected to the horizontal moving plate.
Further, the second moving assembly further comprises: the second sliding rail is arranged on the horizontal moving plate, extends along the vertical direction, and is connected to the vertical moving plate; the second coil assembly is arranged on the side of the second sliding rail.
Furthermore, the number of the second slide rails is two, the two second slide rails are arranged at intervals in the horizontal direction, and the vertical moving plate is connected with the two second slide rail assemblies; the second coil assembly is arranged between the two second sliding rails.
Further, the first rotor portion further includes: the first magnetic steel group is arranged on the horizontal moving plate and is positioned above the second coil assembly; the first stator part comprises a first coil assembly and a fixed plate; the first coil assembly is arranged on the fixed plate and is opposite to the first magnetic steel group, so that the first magnetic steel group drives the horizontal moving plate to move along the horizontal direction relative to the fixed plate under the action of the magnetic force of the first coil assembly.
Further, the first moving assembly further comprises: the first sliding rail is arranged on the fixing plate and extends along the horizontal direction; the two first sliding rails are arranged at intervals in the vertical direction, and the horizontal moving plate is connected to the two first sliding rails; the first coil assembly is arranged between the two first sliding rails.
Further, the horizontal moving plate is in an L-shaped structure and comprises: the first plate body and the second plate body are connected with each other; the first magnetic steel group is arranged on the first plate body, and the second coil assembly is arranged on the second plate body.
Further, the motion module still includes: and the buffer component is arranged on the horizontal moving plate and is opposite to the vertical moving plate, and the buffer component is provided with a blocking end face.
Further, the gravity compensation assembly includes a fixed component and a moving component: the fixed component comprises a third magnetic steel part, the third magnetic steel part is fixed on the horizontal moving plate, and the third magnetic steel part extends along the vertical direction; the moving component comprises a fourth magnetic steel part, the fourth magnetic steel part is sleeved on the third magnetic steel part and connected with the vertical moving plate, and the magnetic field direction of the fourth magnetic steel part is perpendicular to the magnetic field direction of the third magnetic steel part.
Furthermore, the fixed component also comprises a stator back iron, the third magnetic steel part comprises two groups of columnar third magnetic steel groups which are arranged at intervals along the vertical direction, the magnetizing directions of the two groups of third magnetic steel groups are opposite, the stator back iron is arranged between the two groups of third magnetic steel groups, and the two groups of third magnetic steel groups are symmetrically arranged relative to the stator back iron; the fourth magnetic steel part comprises a group of annular fourth magnetic steel groups, and the fourth magnetic steel groups are sleeved on the fixed part.
Furthermore, the fixed part also comprises an installation cylinder, the installation cylinder is fixedly connected to the horizontal moving plate, and the third magnetic steel group is arranged in the installation cylinder; the moving part further comprises an installation sleeve, the installation sleeve is sleeved on the installation barrel, the fourth magnetic steel group is arranged in the installation sleeve, and a gap is formed between the fourth magnetic steel group and the installation barrel.
Furthermore, an interlayer space is arranged on the sleeve body of the mounting sleeve, the interlayer space extends along the vertical direction, and the fourth magnetic steel group is arranged in the interlayer space.
According to another aspect of the present invention, there is provided a motion device, which includes a plurality of motion modules and a plurality of load components, wherein the plurality of load components are mounted on the plurality of motion modules in a one-to-one correspondence, and the load components are driven to move by the motion modules, and the motion modules are the motion modules.
By applying the technical scheme of the invention, the motion module comprises a first moving assembly, a second moving assembly and a gravity compensation assembly, wherein the first moving assembly comprises a first stator part and a first rotor part; the first rotor part is connected with the first stator part in a sliding way, and the first rotor part can move in the horizontal direction relative to the first stator part; the second moving assembly comprises a second stator part and a second rotor part; the second stator part is fixed on the first rotor part, the second rotor part is connected with the first rotor part in a sliding mode, and the second rotor part can move in the vertical direction relative to the first rotor part; the first rotor part can drive the second moving component to move along the horizontal direction relative to the first stator part; the gravity compensation assembly is connected with the second moving assembly and applies acting force opposite to the gravity direction to the second moving assembly so as to counteract partial gravity of the second moving assembly. Specifically, gravity compensation subassembly and second active cell portion among the second removal subassembly are connected, drive the second stator portion through first active cell portion like this and remove along the horizontal direction, move along vertical direction through second stator portion drive second active cell portion, at the in-process of second active cell portion reciprocating motion in vertical direction, can influence the removal precision of second active cell portion under the action of gravity, therefore, the gravity compensation subassembly has been set up, compensate the partial gravity that second active cell portion received, with the removal precision that improves the second active cell portion, and then improve the holistic machining precision of motion module.
Drawings
The accompanying drawings, which are incorporated in and constitute a part of this application, illustrate embodiments of the invention and, together with the description, serve to explain the invention and not to limit the invention. In the drawings:
FIG. 1 is a schematic diagram of a kinematic module according to an embodiment of the present invention;
FIG. 2 illustrates an exploded view of a motion module in accordance with an embodiment of the present invention;
FIG. 3 illustrates an exploded view of a second coil assembly of a motion module in accordance with an embodiment of the present invention;
FIG. 4 is a schematic diagram illustrating a gravity compensation assembly of a motion module according to an embodiment of the present invention;
FIG. 5 is a schematic view illustrating a magnetizing direction of a gravity compensation assembly of a motion module according to an embodiment of the present invention;
FIG. 6 illustrates an exploded view of the gravity compensation component of a motion module, in accordance with an embodiment of the present invention;
fig. 7 shows a schematic structural diagram of a sports apparatus according to an embodiment of the present invention.
Wherein the figures include the following reference numerals:
1. a first moving assembly; 1001. a first stator portion; 1002. a first rotor portion; 10. horizontally moving the plate; 101. a connecting portion; 102. a first plate body; 103. a second plate body; 11. a first magnetic steel group; 12. a first coil assembly; 13. a wire slot; 14. a first grating scale; 15. a first read head;
2. a second moving assembly; 2001. a second stator portion; 2002. a second rotor portion; 20. a second coil assembly; 201. a second circuit board; 202. a second coil group; 203. a second insulating layer; 204. a second back plate; 21. vertically moving the plate; 22. a second magnetic steel group; 23. a second slide rail; 24. a second grating scale; 25. a second read head;
3. a gravity compensation component; 30. a third magnetic steel part; 301. a third magnetic steel group; 3010. a third magnetic steel; 31. a fourth magnetic steel part; 310. a fourth magnetic steel group; 3101. a fourth magnetic steel; 32. mounting the cylinder; 33. installing a sleeve; 330. an interlayer space; 331. a connecting projection; 34. connecting blocks; 35. stator back iron;
4. a buffer member; 41. a limiting plate; 42. a buffer block;
5. a fixing plate;
100. a motion module; 200. a support frame; 300. a load member; 400. and (5) processing the workpiece.
Detailed Description
The technical solution in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. It is to be understood that the described embodiments are merely exemplary of the invention, and not restrictive of the full scope of the invention. The following description of at least one exemplary embodiment is merely illustrative in nature and is in no way intended to limit the invention, its application, or uses. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
In the description of the present invention, unless expressly stated or limited otherwise, the terms "connected," "connected," and "fixed" are to be construed broadly, e.g., as meaning permanently connected, removably connected, or integral to one another; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meanings of the above terms in the present invention can be understood in specific cases to those skilled in the art.
In the present invention, unless otherwise expressly stated or limited, "above" or "below" a first feature means that the first and second features are in direct contact, or that the first and second features are not in direct contact but are in contact with each other via another feature therebetween. Also, the first feature being "on," "above" and "over" the second feature includes the first feature being directly on and obliquely above the second feature, or merely indicating that the first feature is at a higher level than the second feature. A first feature being "under," "below," and "beneath" a second feature includes the first feature being directly under and obliquely below the second feature, or simply meaning that the first feature is at a lesser elevation than the second feature.
In the description of the present embodiment, the terms "upper", "lower", "left", "right", and the like are used based on the orientations and positional relationships shown in the drawings only for convenience of description and simplification of operation, and do not indicate or imply that the referred device or element must have a specific orientation, be configured and operated in a specific orientation, and thus, should not be construed as limiting the present invention. Furthermore, the terms "first" and "second" are used only for descriptive purposes and are not intended to have a special meaning.
Referring to fig. 1 to 6, the present embodiment discloses a motion module, including: a first moving assembly 1 including a first stator part 1001 and a first mover part 1002, wherein the first mover part 1002 is slidably connected to the first stator part 1001, and the first mover part 1002 is movable in a horizontal direction with respect to the first stator part 1001; a second moving assembly 2 comprising a second stator portion 2001 and a second mover portion 2002, wherein the second stator portion 2001 is fixed on the first mover portion 1002, the second mover portion 2002 is slidably connected to the first mover portion 1002, and the second mover portion 2002 is movable in a vertical direction with respect to the first mover portion 1002; the first mover 1002 can drive the second moving assembly 2 to move horizontally relative to the first stator 1001; and the gravity compensation component 3 is connected with the second moving component 2, and the gravity compensation component 3 applies an acting force opposite to the gravity direction to the second moving component 2 so as to counteract partial gravity of the second moving component 2.
The motion module provided according to the present embodiment includes a first moving assembly 1, a second moving assembly 2, and a gravity compensation assembly 3, wherein the first moving assembly 1 includes a first stator portion 1001 and a first stator portion 1002; the first mover 1002 is slidably coupled to the first stator 1001, and the first mover 1002 is movable in a horizontal direction with respect to the first stator 1001; the second moving assembly 2 includes a second stator portion 2001 and a second mover portion 2002; the second stator portion 2001 is fixed on the first mover portion 1002, the second mover portion 2002 is slidably coupled to the first mover portion 1002, and the second mover portion 2002 is movable in a vertical direction with respect to the first mover portion 1002; the first mover 1002 can drive the second moving assembly 2 to move horizontally relative to the first stator 1001; the gravity compensation component 3 is connected with the second moving component 2, and the gravity compensation component 3 applies an acting force opposite to the gravity direction to the second moving component 2 so as to counteract partial gravity of the second moving component 2. Specifically, the gravity compensation assembly 3 is connected to the second mover portion 2002 in the second moving assembly 2, so that the first mover portion 1002 drives the second stator portion 2001 to move in the horizontal direction, the second stator portion 2001 drives the second mover portion 2002 to move in the vertical direction, and in the process that the second mover portion 2002 reciprocates in the vertical direction, the movement accuracy of the second mover portion 2002 is affected under the action of gravity, and therefore, the gravity compensation assembly 3 is provided to compensate for a part of gravity applied to the second mover portion 2002, so as to improve the movement accuracy of the second mover portion 2002, and further improve the processing accuracy of the whole moving module.
In the embodiment, a chip is processed, the size of the chip is small, the requirement on the processing precision is high, in the process of processing the chip through the motion module, the gravity compensation assembly 3 is used for compensating the influence of the gravity exerted by the second mover part 2002 on the driving motor, and the motor output is stable, so that the fluctuation of the motor output can be reduced, the heat productivity of a motor coil is reduced, the performance of the motor is optimized, the positioning precision of the second mover part 2002 is improved, and the processing precision and the processing quality of the chip are improved.
In a specific implementation process, as shown in fig. 2, the first mover portion 1002 includes a horizontal moving plate 10, and the horizontal moving plate 10 is movably disposed in a horizontal direction with respect to the first stator portion 1001; the second stator portion 2001 includes: a second coil assembly 20, the second coil assembly 20 being disposed on the horizontal moving plate 10; the second mover 2002 includes: a vertical moving plate 21 slidably connected to the horizontal moving plate 10 in a vertical direction; a second magnetic steel group 22 is arranged on the vertical moving plate 21, and the second magnetic steel group 22 is arranged opposite to the second coil assembly 20, so that the second magnetic steel group 22 drives the vertical moving plate 21 to move in the vertical direction relative to the horizontal moving plate 10 under the magnetic force action of the second coil assembly 20; the gravity compensation assembly 3 is connected to the vertical moving plate 21. Mutually support as the power supply and drive vertical moving plate 21 and remove between second coil pack 20 and the second magnet steel group 22, make vertical moving plate 21 can realize the micro-motion of vertical direction, satisfy the processing demand to the higher spare part of machining precision requirement, simultaneously, utilize gravity compensation subassembly 3 to compensate vertical moving plate 21's self gravity to reduce the drive power of second coil pack 20 to second magnet steel group 22, prolonged the life of device.
Specifically, as shown in fig. 3, the second coil component 20 includes: a second circuit board 201; a second coil group 202 provided on a circuit connection end surface of the second circuit board 201 and electrically connected to the second circuit board 201; and a second insulating layer 203 covering the second coil assembly 202 and connected to the second circuit board 201. Through directly setting up second coil group 202 on the circuit connection terminal surface of second circuit board 201, the internal line of second coil group 202 can be directly with the wiring spot welding on the second circuit board 201, later through second circuit board 201 external power supply, link to each other through second circuit board 201 internal circuit like this and reduced external cable quantity, avoided the unstable problem of joint shedding circuit, help improving the motor performance, and then improve the motion precision. The body of the second circuit board 201 is made of an insulating material, and when the second coil assembly 202 is connected to the circuit on the second circuit board 201, the phenomenon that the second coil assembly 202 is in contact with the body of the second circuit board 201 to generate a short circuit is avoided. In the practical application process, after the wiring of the second coil assembly 202 and the second circuit board 201 is completed, the second coil assembly 202 is subjected to glue filling through the corresponding glue filling tool to form a second insulating layer 203, and the second insulating layer 203 is taken out and polished after being cured, so that the second coil assembly 202 and the second circuit board 201 are combined into a whole.
In order to facilitate mounting the second coil assembly 20 on the horizontal moving plate 10, the second coil assembly 20 further includes a second back plate 204, the second circuit board 201 is disposed on the second back plate 204, and the second back plate 204 is fixedly connected to the horizontal moving plate 10. As shown in fig. 2, the second moving assembly 2 further includes: the second slide rail 23 is arranged on the horizontal moving plate 10, the second slide rail 23 extends along the vertical direction, and the vertical moving plate 21 is connected to the second slide rail 23; the second coil component 20 is disposed at a side of the second slide rail 23. Thus, while a certain distance is kept between the second coil assembly 20 and the second magnetic steel group 22, the friction force between the vertical moving plate 21 and the horizontal moving plate 10 is reduced by the second slide rail 23, so that the vertical moving plate 21 moves smoothly.
Preferably, in order to keep the vertical moving plate 21 stable during the moving process, there are two second slide rails 23, the two second slide rails 23 are arranged at intervals in the horizontal direction (i.e. along the width direction of the horizontal moving plate 10 in fig. 2), and two sides of the vertical moving plate 21 are respectively connected to the two second slide rails 23; the second coil component 20 is disposed between the two second slide rails 23. At least two sliding blocks are arranged on one second sliding rail 23, and the at least two sliding blocks are connected with the vertical moving plate 21.
The second moving assembly 2 further comprises vertical displacement detection means for detecting a displacement of the second mover part 2002. Specifically, the vertical displacement detecting device includes: the second grating ruler 24 is arranged on the vertical moving plate 21, and the second grating ruler 24 is arranged along the vertical direction; and a second reading head 25, which is arranged on the horizontal moving plate 10, and reads the scale information on the second grating scale 24 through the second reading head 25 to feed back the movement position of the vertical moving plate 21. The arrangement facilitates real-time detection of the position of the vertical moving plate 21 so as to control the moving stroke of the vertical moving plate 21. In the present embodiment, the second grating 24 is disposed on the side of the vertical moving plate 21 facing the second coil assembly 20, and the second reading head 25 is disposed on the horizontal moving plate 10 and corresponds to the second grating 24. It will be appreciated that in some alternative embodiments, the second grating scale 24 and the second read head 25 may be disposed in other manners, such as disposing the second grating scale 24 on the side of the vertical moving plate 21 facing away from the second coil assembly 20.
In an embodiment provided by this embodiment, the first rotor portion further includes: the first magnetic steel group 11 is arranged on the horizontal moving plate 10 and is positioned above the second coil assembly 20; the first stator part includes the first coil assembly 12 and the fixed plate 5; the first coil assembly 12 is disposed on the fixed plate 5, and the first coil assembly 12 is disposed opposite to the first magnetic steel set 11, so that the first magnetic steel set 11 drives the horizontal moving plate 10 to move along the horizontal direction relative to the fixed plate 5 under the magnetic action of the first coil assembly 12. Like this through the ampere force that produces between first coil pack 12 and the first magnet steel group 11, drive first active cell portion 1002 and realize the micro-displacement, mutually support with the second active cell portion, more be applicable to the part processing of the higher precision of processing. Specifically, first coil pack 12 includes first coil assembly and first circuit board, the internal line of first coil assembly is direct with the wiring spot welding on the first circuit board, later through the external power of first circuit board, be provided with wire casing 13 on fixed plate 5, the cable card of being connected with first circuit board is in wire casing 13, fix the cable, internal circuit through first circuit board links to each other and has reduced external cable quantity, the problem of having avoided attach fitting to drop and cause the circuit unstable has been avoided, wherein, the body of first circuit board is made by insulating material, first coil assembly when with the circuit connection on the first circuit board, can avoid the body that first coil assembly contacted first circuit board to produce the phenomenon of opening circuit.
Specifically, the first moving assembly 1 further comprises: a first slide rail (not shown) provided on the fixed plate 5, the first slide rail extending in a horizontal direction; the number of the first slide rails is two, the two first slide rails are arranged at intervals in the vertical direction, and the horizontal moving plate 10 is connected to the two first slide rails; the first coil assembly 12 is disposed between the two first slide rails. Through setting up two first slide rails, make horizontal moving plate 10 more smooth and easy that removes on the horizontal direction, set up first coil pack 12 between two first slide rails simultaneously, it is more reasonable to arrange, makes the interact power between first coil pack 12 and the first magnet steel group 11 reach optimum effect. Wherein the vertical direction is the width direction of the fixing plate 5 in fig. 2.
In a specific implementation, the horizontal movement plate 10 comprises: the first plate body 102 and the second plate body 103 are connected with each other, and the first plate body 102 and the second plate body 103 are connected to form the horizontal moving plate 10 with an L-shaped structure; the first magnetic steel set 11 is disposed on a first plate 102 extending in the horizontal direction, and the second coil assembly 20 is disposed on a second plate 103 extending in the vertical direction. The structure that sets up like this is simpler, and horizontal moving plate 10 can drive vertical moving plate 21 and remove along the horizontal direction promptly, and horizontal moving plate 10 still provides the installation for second coil pack 20 simultaneously, makes the overall structure of whole device compacter.
The motion module further includes a buffer member 4 disposed on the horizontal moving plate 10 and opposite to the vertical moving plate 21, the buffer member 4 having a blocking end surface, and when the vertical moving plate 21 moves upward to a predetermined position, at least a portion of the vertical moving plate 21 contacts the blocking end surface to block the vertical moving plate 21 through the buffer member 4. Therefore, the moving stroke of the vertical moving plate 21 can be limited, and the vertical moving plate 21 is prevented from interfering with the fixed plate 5 in the moving process.
In specific implementation, the number of the buffer components 4 is two, the two buffer components 4 are arranged on the second plate body 103 at intervals along the vertical direction, the second coil assembly 20 and the vertical moving plate 21 are arranged between the two buffer components 4, the two buffer components 4 can limit and buffer the movement stroke of the vertical moving plate 21, and the vertical moving plate 21 is prevented from moving beyond a preset stroke.
Meanwhile, the two buffer parts 4 can further fix the second coil assembly 20, and prevent the second coil assembly 20 from falling off. Specifically, as shown in fig. 2, the buffering component 4 includes a limiting plate 41 and a buffering block 42, the buffering block 42 is disposed on the surface of the limiting plate 41 facing the second coil component 20 and the vertical moving plate 21, the limiting plate 41 is fixed to the second plate body 103, wherein the buffering block 42 is made of a material with a good buffering effect such as foam, threaded holes are disposed on the second back plate 204 and the second plate body 103, the second back plate 204 and the second plate body 103 are fixedly connected through a connecting screw, the buffering block 42 presses the fixed second back plate 204 onto the second plate body 103, the second back plate 204 can be prevented from dropping after the connecting screw is loosened, and meanwhile, a pre-positioning effect can be achieved in the installation process of the second back plate 204. The first moving assembly 1 further includes a horizontal displacement detecting means for detecting the displacement of the first mover part 1002 (the horizontal moving plate 10). Specifically, as shown in fig. 2, the horizontal displacement detecting device includes: the first grating ruler 14 is installed at the end part of the horizontal moving plate 10, and the first grating ruler 14 is arranged along the horizontal direction; and a first reading head 15 installed on the fixed plate 5, and reading scale information on the first grating 14 through the first reading head 15 to feed back the movement position of the horizontal moving plate 10. This arrangement facilitates real-time monitoring of the moving position of the horizontal moving plate 10 so as to control the moving stroke of the horizontal moving plate 10.
As shown in fig. 4 to 6, the gravity compensation assembly 3 shown in fig. 1 includes a fixed component and a moving component: the fixed component comprises a third magnetic steel part 30, the third magnetic steel part 30 is fixed on the horizontal moving plate 10, and the third magnetic steel part 30 extends along the vertical direction; the moving component comprises a fourth magnetic steel part 31, the fourth magnetic steel part 31 is sleeved on the third magnetic steel part 30 and is connected with the vertical moving plate 21, and the magnetic field direction of the fourth magnetic steel part 31 is perpendicular to the magnetic field direction of the third magnetic steel part 30, so that an acting force opposite to the gravity direction is applied to the vertical moving plate 21 through the fourth magnetic steel part 31. The fixing component further comprises a stator back iron 35, the third magnetic steel part 30 comprises two groups of columnar third magnetic steel groups 301 arranged at intervals in the vertical direction, the stator back iron 35 is arranged between the two groups of third magnetic steel groups 301, and the two groups of third magnetic steel groups 301 are symmetrically arranged relative to the stator back iron 35; at least part of the fourth magnetic steel portion 31 is disposed opposite to the stator back iron 35. Stator back iron 35 has the magnetic conduction effect, and the magnetic induction line of two sets of third magnet steel group 301 is passed through by stator back iron 35, later keeps perpendicular with the magnetic induction line of fourth magnet steel portion 31, and then makes the two magnetic field force mutually perpendicular to the effect of realization to vertical movable plate 21 gravity compensation.
Specifically, the fourth magnetic steel portion 31 includes a group of fourth magnetic steel group 310, the fourth magnetic steel group 310 is annular, wherein the fourth magnetic steel group 310 includes one or more annular fourth magnetic steels 3101, the plurality of fourth magnetic steels 3101 are arranged along the vertical direction, two adjacent fourth magnetic steels 3101 are bonded to each other, the third magnetic steel group 301 includes a plurality of columnar third magnetic steels 3010, preferably, each group of third magnetic steel group 301 includes two third magnetic steels 3010, between the two third magnetic steels 3010, the third magnetic steels 3010 are bonded to the stator back iron 35, it needs to be explained here that the number of the third magnetic steels 3010 in each group of third magnetic steel group 301 may be one or more, and it only needs to keep the two groups of third magnetic steel groups 301 symmetrical with respect to the stator back iron 35 and the magnetizing directions of the two groups of third magnetic steel groups 301 are opposite. As shown in fig. 5, the magnetizing directions of the two sets of third magnetic steel sets 301 are opposite, wherein the magnetizing direction of the set of third magnetic steel set 301 above the stator back iron 35 is vertical upward, the magnetizing direction of the set of third magnetic steel set 301 below the stator back iron 35 is vertical downward, and the magnetizing direction of the fourth magnetic steel set 310 is vertical downward. In specific implementation, each of the third magnetic steel group 301 and the fourth magnetic steel group 310 may also be respectively provided with only one magnetic steel, in this embodiment, a plurality of small magnetic steels are used to form the magnetic steel group, so that the cost can be reduced.
The magnetic levitation force principle is utilized in the arrangement, magnetic levitation force generated between two mutually perpendicular magnetic fields, namely, the magnetic field force of the third magnetic steel part 30 is perpendicular to the magnetic field force of the fourth magnetic steel part 31, the magnetic field force and the magnetic field force interact with each other, upward magnetic levitation force (opposite to the gravity direction) is finally generated on the fourth magnetic steel part 31, and the influence of the gravity of the vertical moving plate 21 on the machining precision is reduced by the fourth magnetic steel part 31.
Wherein, fixed part still includes: the mounting cylinder 32, the mounting cylinder 32 is fixedly connected to the horizontal moving plate 10, and the third magnetic steel part 30 and the stator back iron 35 are arranged in the mounting cylinder 32; the moving part further comprises an installation sleeve 33, the installation sleeve 33 is sleeved on the installation barrel 32, the fourth magnetic steel part 31 is arranged in the installation sleeve 33, and a gap is formed between the fourth magnetic steel part 31 and the installation barrel 32. Thus, the third magnetic steel part 30 is conveniently and fixedly installed by utilizing the installation barrel 32, and meanwhile, the fourth magnetic steel part 31 is conveniently installed by arranging the installation sleeve 33. Preferably, an interlayer space 330 is provided on the sleeve body of the mounting sleeve 33, the interlayer space 330 extends in a vertical direction, and the fourth magnetic steel part 31 is disposed in the interlayer space 330.
Specifically, as shown in fig. 4, the mounting sleeve 33 is provided with a coupling protrusion 331, the coupling protrusion 331 protrudes with respect to an outer wall surface of the mounting sleeve 33, and the coupling protrusion 331 is coupled to the vertical moving plate 21. Through setting up connecting protrusion 331, be convenient for the installation cover 33 to be connected with vertical moving plate 21 to on transmitting the power that fourth magnet steel portion 31 received to vertical moving plate 21, realize the gravity compensation to vertical moving plate 21.
One side of the horizontal moving plate 10 is provided with two connecting parts 101, the connecting parts 101 extend from the horizontal moving plate 10 to the direction far away from the horizontal moving plate 10, and the two connecting parts 101 are arranged at intervals along the vertical direction; the fixing member further includes: two connecting blocks 34, two connecting blocks 34 are respectively arranged at two ends of the mounting cylinder 32, and two connecting blocks 34 are respectively fixedly connected to the connecting part 101. By providing two connecting portions 101 and two connecting pieces 34, the two ends of the mounting cylinder 32 are respectively fixed to maintain the mounting stability of the mounting cylinder 32.
The present embodiment further provides a motion device, as shown in fig. 7, which includes a plurality of motion modules 100 and a plurality of load components 300, wherein the load components 300 are installed on the motion modules 100 in a one-to-one correspondence manner, and the motion modules 100 drive the load components 300 to move, and the motion modules 100 are the motion modules of the above embodiments.
In practical applications, the motion module 100 is mounted on the support frame 200, the load component 300 is mounted on the second mover part 2002 in the motion module 100, the load component 300 is driven by the motion module 100 to move in a horizontal direction or a vertical direction, the load component 300 is a component such as a tool for processing a workpiece, and the workpiece 400 to be processed is placed below the second mover part 2002 to process the workpiece 400 to be processed. Can be according to the demand, carry out the aggregate erection to a plurality of support frames 200 and a plurality of motion module 100, conveniently process a plurality of work pieces 400 of treating simultaneously, satisfy different production efficiency demands.
From the above description, it can be seen that the above-described embodiments of the present invention achieve the following technical effects:
the motion module provided according to the present embodiment includes a first moving assembly 1, a second moving assembly 2, and a gravity compensation assembly 3, wherein the first moving assembly 1 includes a first stator portion 1001 and a first stator portion 1002; the first mover 1002 is slidably coupled to the first stator 1001, and the first mover 1002 is movable in a horizontal direction with respect to the first stator 1001; the second moving assembly 2 includes a second stator portion 2001 and a second mover portion 2002; the second stator portion 2001 is fixed on the first mover portion 1002, the second mover portion 2002 is slidably coupled to the first mover portion 1002, and the second mover portion 2002 is movable in a vertical direction with respect to the first mover portion 1002; the first mover 1002 can drive the second moving assembly 2 to move horizontally relative to the first stator 1001; the gravity compensation component 3 is connected with the second moving component 2, and the gravity compensation component 3 applies an acting force opposite to the gravity direction to the second moving component 2 so as to counteract partial gravity of the second moving component 2. Specifically, the gravity compensation assembly 3 is connected to the second mover portion 2002 in the second moving assembly 2, so that the first mover portion 1002 drives the second stator portion 2001 to move in the horizontal direction, the second stator portion 2001 drives the second mover portion 2002 to move in the vertical direction, and in the process that the second mover portion 2002 reciprocates in the vertical direction, the movement accuracy of the second mover portion 2002 is affected under the action of gravity, and therefore, the gravity compensation assembly 3 is provided to compensate for a part of gravity applied to the second mover portion 2002, so as to improve the movement accuracy of the second mover portion 2002, and further improve the processing accuracy of the whole moving module.
The above description is only a preferred embodiment of the present invention and is not intended to limit the present invention, and various modifications and changes may be made by those skilled in the art. Any modification, equivalent replacement, or improvement made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (15)
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| US20030034696A1 (en) * | 2001-08-18 | 2003-02-20 | Stephan Bundschu | Machine tool with a linear drive for machining element |
| CN1665015A (en) * | 2004-03-03 | 2005-09-07 | 先进自动器材有限公司 | Separation of actuators for positioning objects |
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| CN114142706B (en) | 2025-09-05 |
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Address after: 201206 Shanghai Pudong New Area Free Trade Zone, No. 1000 Jinhai Road, Building 47, 1st Floor Patentee after: Shanghai Yinguan Semiconductor Technology Co.,Ltd. Country or region after: China Address before: 201206 Shanghai Pudong New Area Free Trade Zone, No. 1000 Jinhai Road, Building 47, 1st Floor Patentee before: Shanghai Yinguan Semiconductor Technology Co.,Ltd. Country or region before: China |