CN1141415C - 一种碳基薄膜合成方法 - Google Patents
一种碳基薄膜合成方法 Download PDFInfo
- Publication number
- CN1141415C CN1141415C CNB98111833XA CN98111833A CN1141415C CN 1141415 C CN1141415 C CN 1141415C CN B98111833X A CNB98111833X A CN B98111833XA CN 98111833 A CN98111833 A CN 98111833A CN 1141415 C CN1141415 C CN 1141415C
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- CN
- China
- Prior art keywords
- carbon
- voltage
- plasma
- film
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
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- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 title claims abstract description 62
- 229910052799 carbon Inorganic materials 0.000 title claims abstract description 54
- 238000001308 synthesis method Methods 0.000 title 1
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims abstract description 42
- 229910052757 nitrogen Inorganic materials 0.000 claims abstract description 21
- 238000007654 immersion Methods 0.000 claims abstract description 6
- 239000002184 metal Substances 0.000 claims abstract description 4
- 239000010408 film Substances 0.000 claims description 48
- 238000000151 deposition Methods 0.000 claims description 29
- 229910003460 diamond Inorganic materials 0.000 claims description 12
- 239000010432 diamond Substances 0.000 claims description 12
- 229910002804 graphite Inorganic materials 0.000 claims description 10
- 239000010439 graphite Substances 0.000 claims description 10
- 238000010849 ion bombardment Methods 0.000 claims description 9
- 239000010409 thin film Substances 0.000 claims description 9
- 239000000428 dust Substances 0.000 claims description 8
- 230000015572 biosynthetic process Effects 0.000 claims description 6
- 239000002245 particle Substances 0.000 claims description 5
- 238000003786 synthesis reaction Methods 0.000 claims description 5
- 239000010406 cathode material Substances 0.000 claims description 4
- 230000007935 neutral effect Effects 0.000 claims description 4
- 238000002347 injection Methods 0.000 claims description 3
- 239000007924 injection Substances 0.000 claims description 3
- 238000010189 synthetic method Methods 0.000 claims 1
- 238000000034 method Methods 0.000 abstract description 11
- 239000007789 gas Substances 0.000 abstract description 3
- 238000001771 vacuum deposition Methods 0.000 abstract description 3
- 238000005260 corrosion Methods 0.000 abstract 1
- 230000007797 corrosion Effects 0.000 abstract 1
- 238000005468 ion implantation Methods 0.000 abstract 1
- 238000012986 modification Methods 0.000 abstract 1
- 230000004048 modification Effects 0.000 abstract 1
- 210000000056 organ Anatomy 0.000 abstract 1
- JMANVNJQNLATNU-UHFFFAOYSA-N oxalonitrile Chemical compound N#CC#N JMANVNJQNLATNU-UHFFFAOYSA-N 0.000 abstract 1
- 230000008021 deposition Effects 0.000 description 18
- 238000003672 processing method Methods 0.000 description 8
- 239000000463 material Substances 0.000 description 5
- 239000011159 matrix material Substances 0.000 description 5
- 125000004429 atom Chemical group 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 238000000605 extraction Methods 0.000 description 3
- HSFWRNGVRCDJHI-UHFFFAOYSA-N alpha-acetylene Natural products C#C HSFWRNGVRCDJHI-UHFFFAOYSA-N 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 125000002534 ethynyl group Chemical group [H]C#C* 0.000 description 2
- 238000010884 ion-beam technique Methods 0.000 description 2
- UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 1
- ZALMZWWJQXBYQA-UHFFFAOYSA-N [N].[Cl] Chemical compound [N].[Cl] ZALMZWWJQXBYQA-UHFFFAOYSA-N 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
- 238000005137 deposition process Methods 0.000 description 1
- 238000011161 development Methods 0.000 description 1
- 230000005611 electricity Effects 0.000 description 1
- 239000012530 fluid Substances 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 238000012856 packing Methods 0.000 description 1
- 238000005268 plasma chemical vapour deposition Methods 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000001105 regulatory effect Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Images
Landscapes
- Carbon And Carbon Compounds (AREA)
- Chemical Vapour Deposition (AREA)
- Physical Vapour Deposition (AREA)
Abstract
Description
Claims (4)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB98111833XA CN1141415C (zh) | 1998-01-24 | 1998-01-24 | 一种碳基薄膜合成方法 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
CNB98111833XA CN1141415C (zh) | 1998-01-24 | 1998-01-24 | 一种碳基薄膜合成方法 |
Publications (2)
Publication Number | Publication Date |
---|---|
CN1224772A CN1224772A (zh) | 1999-08-04 |
CN1141415C true CN1141415C (zh) | 2004-03-10 |
Family
ID=5221721
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
CNB98111833XA Expired - Lifetime CN1141415C (zh) | 1998-01-24 | 1998-01-24 | 一种碳基薄膜合成方法 |
Country Status (1)
Country | Link |
---|---|
CN (1) | CN1141415C (zh) |
Families Citing this family (8)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN100410418C (zh) * | 2006-05-19 | 2008-08-13 | 哈尔滨工业大学 | 轴承外圈滚道离子注入与沉积复合处理方法 |
CN102291922B (zh) * | 2011-07-22 | 2013-03-20 | 中国科学院空间科学与应用研究中心 | 一种离子产生装置 |
CN104945652B (zh) * | 2015-07-23 | 2018-06-26 | 中国科学院理化技术研究所 | 一种表面高硬耐磨尼龙及其制备方法 |
CN105895071A (zh) * | 2016-05-27 | 2016-08-24 | 西南交通大学 | 一种缺陷态结构声学超材料板 |
CN111041430A (zh) * | 2020-01-10 | 2020-04-21 | 安徽纯源镀膜科技有限公司 | 一种耐高温类金刚石膜层的生产工艺 |
CN112376031B (zh) * | 2020-11-27 | 2021-07-13 | 中国科学院兰州化学物理研究所 | 低温电子束激发等离子体注入碳纳米团簇制备低摩擦高耐磨硅橡胶表面的方法 |
CN113293351A (zh) * | 2021-06-01 | 2021-08-24 | 南京邮电大学 | 一种铜纳米线表面镀碳方法 |
CN113549902A (zh) * | 2021-07-13 | 2021-10-26 | 南京邮电大学 | 一种C/TiC/TiN/TiAlN复合涂层的制备装置及其制备方法 |
-
1998
- 1998-01-24 CN CNB98111833XA patent/CN1141415C/zh not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
CN1224772A (zh) | 1999-08-04 |
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C06 | Publication | ||
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C14 | Grant of patent or utility model | ||
GR01 | Patent grant | ||
ASS | Succession or assignment of patent right |
Owner name: CHENGDU TRAFFIC UNIVERSITY MAIDIKE TECHNOLOGY CO. Free format text: FORMER OWNER: XI-NAN JIATOONG UNIV. Effective date: 20060106 |
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C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20060106 Address after: 308 room 610031, modern industrial center, Southwest Jiao Tong University, 111 north section of two ring road, Sichuan, Chengdu Patentee after: Chengdu Jiaoda Maidike Technology Co., Ltd. Address before: 610031 Chengdu City, Sichuan Province Patentee before: Southwest Jiaotong University |
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C41 | Transfer of patent application or patent right or utility model | ||
TR01 | Transfer of patent right |
Effective date of registration: 20151218 Address after: 610225 Sichuan Province, Chengdu City Industrial Shuangliu southwest Port Economic Development Zone District (Xihang Hong Kong Science and technology business incubator center) Patentee after: Chengdu Baeyer MultiCam medical science and technology company limited Address before: 308 room 610031, modern industrial center, Southwest Jiao Tong University, 111 north section of two ring road, Sichuan, Chengdu Patentee before: Chengdu Jiaoda Maidike Technology Co., Ltd. |
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CX01 | Expiry of patent term |
Granted publication date: 20040310 |
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CX01 | Expiry of patent term |