CN114019691A - High-spectral imaging system precise adjustment integration process method based on Fery prism - Google Patents

High-spectral imaging system precise adjustment integration process method based on Fery prism Download PDF

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Publication number
CN114019691A
CN114019691A CN202111265292.8A CN202111265292A CN114019691A CN 114019691 A CN114019691 A CN 114019691A CN 202111265292 A CN202111265292 A CN 202111265292A CN 114019691 A CN114019691 A CN 114019691A
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China
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fery
prism
assembly
fery prism
adjusting
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CN202111265292.8A
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CN114019691B (en
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付西红
沈重
张建
李立波
康世发
李华
杨莹
宋兴
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XiAn Institute of Optics and Precision Mechanics of CAS
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XiAn Institute of Optics and Precision Mechanics of CAS
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B27/00—Optical systems or apparatus not provided for by any of the groups G02B1/00 - G02B26/00, G02B30/00
    • G02B27/62—Optical apparatus specially adapted for adjusting optical elements during the assembly of optical systems
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01B—MEASURING LENGTH, THICKNESS OR SIMILAR LINEAR DIMENSIONS; MEASURING ANGLES; MEASURING AREAS; MEASURING IRREGULARITIES OF SURFACES OR CONTOURS
    • G01B21/00—Measuring arrangements or details thereof, where the measuring technique is not covered by the other groups of this subclass, unspecified or not relevant
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01C—MEASURING DISTANCES, LEVELS OR BEARINGS; SURVEYING; NAVIGATION; GYROSCOPIC INSTRUMENTS; PHOTOGRAMMETRY OR VIDEOGRAMMETRY
    • G01C1/00—Measuring angles
    • G01C1/02—Theodolites
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B7/00—Mountings, adjusting means, or light-tight connections, for optical elements
    • G02B7/18—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors
    • G02B7/1805—Mountings, adjusting means, or light-tight connections, for optical elements for prisms; for mirrors for prisms

Abstract

The invention belongs to the technical field of optical precision assembly and debugging, and particularly relates to a precision assembly and debugging integrated process method of a hyperspectral imaging system based on a Fery prism. The method comprises the following specific steps: and establishing a space coordinate system, assembling and adjusting the Fery prism assembly and integrating the system. According to the invention, the three-coordinate measuring machine, the PSM adjusting microscope and the auto-collimation theodolite are used for carrying out high-precision space coordinate positioning, reference transmission and precision measurement on the Fery prism assembly, the comprehensive measurement precision is superior to 6.8 mu m, during the adjusting process of the Fery prism assembly, the three-coordinate measuring machine is used for carrying out precision adjusting on each Fery prism assembly, and then the PSM adjusting microscope and the target ball are combined for carrying out reference transmission and system integration, so that the difficulty of system assembly integration is further reduced.

Description

High-spectral imaging system precise adjustment integration process method based on Fery prism
Technical Field
The invention belongs to the technical field of optical precision assembly and debugging, and particularly relates to a precision assembly and debugging integrated process method of a hyperspectral imaging system based on a Fery prism.
Background
The feray prism is a feray prism proposed based on the principle of the rowland circle, two working surfaces of the prism are spherical surfaces, and the two spherical surfaces have larger surface inclination angles, as shown in fig. 1. When the Fery prism is applied to a spectral imaging system as a light splitting element, the system structure can be simplified due to the self-collimation function and the imaging function, the volume and the quality of the system are reduced, the system aberration is eliminated by selecting the appropriate surface curvature of the prism, and the imaging quality and the overall performance of the system can be further improved.
With the miniaturization development trend of satellite-borne and airborne hyperspectral loads, a hyperspectral imaging system based on a Fery prism is widely applied. An optical schematic diagram of a hyperspectral imaging system based on a Fery prism is shown in FIG. 2, and the hyperspectral imaging system comprises a Fery prism first component 25, a Fery reflecting prism first component 24, a secondary reflecting mirror component 23, a Fery prism second component 27, a Fery reflecting prism second component 26 and a folding axis mirror group 28; the light beam is transmitted by the first Fery prism assembly 25 and then reaches the first Fery reflection prism assembly 24, is reflected by the first Fery reflection prism assembly 24 and then reaches the secondary reflection mirror assembly 23 through the first Fery prism assembly 25, is reflected by the secondary reflection mirror assembly 23 and then reaches the second Fery prism assembly 27, is reflected by the second Fery reflection prism assembly 26 and then reaches the folding axis mirror assembly 28 through the second Fery prism assembly 27 after passing through the second Fery prism assembly 27, and is reflected by the folding axis mirror assembly 28 and then imaged.
The front surface and the rear surface do not have a common optical axis because the Fery prism belongs to a non-concentric Fery prism; meanwhile, the hyperspectral imaging system based on the Fery prism has the advantages of compact space, more degree of freedom variables and higher assembly precision requirement; therefore, the precision assembly and adjustment of the hyperspectral imaging system based on the Fery prism is difficult to realize by using the traditional coaxial optical assembly and adjustment process method. The detection means is limited, the key parameters are difficult to precisely control, the spectral quality of the hyperspectral imaging system is directly influenced by the height of the assembling and adjusting precision, and effective means for precisely assembling and integrating the Fery prism hyperspectral imaging system is still lacked in the prior art.
Disclosure of Invention
The invention provides a precision assembly and debugging integration process method of a hyperspectral imaging system based on a Fery prism, and provides an effective assembly and debugging integration and detection means for the precision assembly and debugging integration of the hyperspectral imaging system based on the Fery prism.
In order to achieve the purpose, the invention adopts the technical scheme that:
the method of the invention carries out high-precision space coordinate positioning and measurement on the Fery prism assembly through a three-Coordinate Measuring Machine (CMM), a PSM adjusting microscope and an auto-collimation theodolite, realizes precision adjustment and integration based on a Fery prism hyperspectral imaging system, and comprises the following specific steps:
step 1, establishing a space coordinate system;
step 1.1, according to the theoretical size of space, combining and installing each probe on a three-coordinate measuring machine, and calibrating each probe one by one;
step 1.2, fixing a base of the hyperspectral imaging system based on the Fery prism, which is only provided with a secondary reflector assembly, on a table top of a three-coordinate measuring machine, respectively acquiring points through probes of the three-coordinate measuring machine, and fitting a side plane of the base, a mounting plane of the base, a second surface of the secondary reflector and a spherical center point O of a first surface of the secondary reflector3；
Step 1.3, calculating the installation position relationship and the angle relationship between the secondary reflector assembly and the base through special software of the three-coordinate measuring machine, judging whether the installation initial position of the secondary reflector assembly meets the design requirement, and if not, adjusting the installation position of the secondary reflector assembly until the installation initial position of the secondary reflector assembly meets the design requirement;
step 1.4, using the sphere center point O of the first surface of the secondary reflector3Establishing a space coordinate system O (X, Y, Z) by taking a coordinate origin, a base side plane as a YZ plane and a base mounting plane as an XY plane;
step 2, adjusting the Fery prism assembly;
step 2.1, installing any one of a first Fery reflecting prism component, a first Fery prism component, a second Fery reflecting prism component and a first Fery prism component on a base; the Fery prism assembly comprises a frame, a Fery prism fixed in the frame, a trimming pad positioned at the bottom of the frame and a cubic prism arranged at the top of the frame; respectively performing point fitting on a spherical center point of the first surface of the Fery prism, a spherical center point of the second surface of the Fery prism and an end plane of the Fery prism by using a probe of a three-coordinate measuring machine;
2.2, calculating the installation position relation among the Fery prism, the base and the secondary reflector assembly through special software of the three-coordinate measuring machine, judging whether the installation initial position of the Fery prism assembly meets the design requirement or not, and if not, adjusting the installation position of the Fery prism through adjusting the trimming pad;
the initial installation position of the Fery prism assembly needs to meet the following requirements:
the verticality between the end plane of the Fery prism and the mounting plane of the base meets the design requirement;
the center heights of the spherical center point of the first surface of the Fery prism and the spherical center point of the second surface of the Fery prism relative to the mounting plane of the base are equal;
the height of the center of the Fery prism is equal to that of the center of the secondary reflector component;
step 2.3, making an installation mark, and integrally disassembling the Fery prism assembly;
2.4, sequentially carrying out single-component precise assembly and adjustment on the other three Fery prism components according to the steps 2.1-2.3;
step 3, system integration;
3.1, resetting and installing any one of the Fery prism assemblies again according to the installation marks, fitting a spherical center point of the first surface of the Fery prism through probe sampling point measurement of a three-coordinate measuring machine, and adjusting the micro angle of the Fery prism assembly to enable the spatial position of the spherical center point of the Fery prism assembly relative to the origin of coordinates to meet the design requirements;
step 3.2, erecting a PSM assembly and adjustment microscope and the target ball, measuring the space coordinate of the target ball through a probe of a three-coordinate measuring machine, and performing micro-displacement adjustment to enable the space coordinate of the target ball to meet the design requirement of a ball center point on the first surface of the Fery prism; then the micro-displacement adjustment PSM adjusting microscope and the target ball are subjected to self-alignment imaging, and the CCD interface displays that the edge of the cross-hair image is sharp and can be distinguished;
3.3, removing the target ball, erecting an auto-collimation theodolite, displaying an auto-collimation cross-hair image of the first surface of the Fery prism on a CCD interface of the PSM adjusting microscope, integrally adjusting the angle and the front-back distance of the Fery prism assembly according to the sharp condition of the image by micro-displacement, monitoring the angle change condition of the cubic prism in real time by the auto-collimation theodolite, ensuring that the edge of the auto-collimation cross-hair image is sharp and recognizable under the condition of meeting the angle requirement, and finishing the precise adjustment of the Fery prism assembly;
3.4, according to the steps 3.1-3.3, precisely determining the spherical center points of the first surfaces of the other three Fery prisms through the PSM adjusting microscope and the target sphere to finish precise adjustment and integration of the first Fery reflecting prism component, the first Fery prism component, the second Fery reflecting prism component and the second Fery prism component;
and 3.5, mounting a folding axis mirror assembly according to design requirements, and carrying out system image quality inspection, so that precision assembly and adjustment and integration based on the Fery prism hyperspectral imaging system are completed.
Further, the specific adjustment of the mounting position of the feray prism by adjusting the trimming pad in step 2.2 is as follows: firstly, repairing, grinding and trimming a pad around an X axis to ensure that the verticality of the end plane of the Fery prism and the mounting plane of the base meets the design requirement; grinding and repairing the cutting pad around the Y axis to ensure that the center points of the first surface of the Fery prism and the second surface of the Fery prism are equal in height relative to the center of the base mounting plane; and finally, integrally repairing and grinding the trimming pad to ensure that the central height of the Fery prism is equal to that of the secondary reflector assembly.
Further, the secondary reflector assembly comprises a mirror frame, a secondary reflector fixed in the mirror frame and a trimming pad located at the bottom of the mirror frame, and the mounting position of the secondary reflector assembly is adjusted by adjusting the trimming pad in step 1.3.
Further, the auto-collimation theodolite monitors the change conditions of the pitching angle and the rotating angle of the secondary reflector assembly in the adjusting process in real time in the step 1.3.
Furthermore, the first surface of the secondary reflector is a spherical surface, and the second surface of the secondary reflector is a plane.
Compared with the prior art, the invention has the following technical effects:
1. the method has high measurement precision;
the invention carries out high-precision space coordinate positioning, reference transmission and precision measurement on the Fery prism assembly by a three-coordinate measuring machine (with the precision of 1.8 mu m), a PSM adjusting microscope (with the precision of 2 mu m) and an auto-collimation theodolite (0.5'), and the comprehensive measurement precision is superior to 6.8 mu m.
2. The method has strong operability;
according to the invention, the single-component precision assembly and adjustment of each Fery prism component are firstly carried out by the three-coordinate measuring machine, and then each component is subjected to reference transmission and system integration by establishing a unified space coordinate system and combining the PSM assembly and adjustment microscope and the target ball, so that the difficulty of system assembly and integration is further reduced.
3. According to the invention, the cubic prism is arranged above each Fery prism assembly, and the space angle and the position attitude of each assembly in the assembly and adjustment process are monitored in real time by matching with the auto-collimation theodolite, so that micro-attitude adjustment is facilitated.
4. According to the invention, a trimming pad is arranged between each Fery prism assembly and the base, and the trimming direction and the trimming amount of the trimming pad are calculated according to the measurement result of the three-coordinate measuring machine. The trimming and grinding direction and the trimming and grinding amount of the trimming and cutting pad are guided through data feedback of the three-coordinate measuring machine, so that the trimming and grinding can be successfully carried out once, and the repeated disassembly and the trimming and grinding are avoided.
5. In the direction sequence of the repairing, grinding and trimming pad, firstly angle repairing and grinding is carried out around the X-axis direction to ensure that the verticality between the end plane of the Fery prism and the base mounting plane meets the design requirement, then angle repairing and grinding is carried out around the Y-axis to ensure that the central heights of the spherical center point of the first surface and the spherical center point of the second surface of the Fery prism relative to the base mounting plane are equal, and finally the integral thickness repairing and grinding ensures that the central height of the Fery prism is equal to the central height of the secondary reflector assembly. Through the sequential direction repairing and grinding of the repairing and cutting pad, the mutual interference of the X direction, the Y direction and the Z direction can be avoided, and the accurate repairing and grinding is achieved.
Drawings
FIG. 1 is a schematic view of a Fery prism structure;
FIG. 2 is an optical schematic diagram of a hyperspectral imaging system based on a Fery prism according to the invention;
FIG. 3 is a schematic structural diagram of a Fery prism assembly according to the present invention;
FIG. 4 is a schematic diagram of a system for implementing the precision adjustment method of the hyperspectral imaging system based on the Fery prism;
description of reference numerals:
1-Fery prism, 11-Fery prism first surface, 12-Fery prism second surface, 13-Fery prism end plane, O1-Fery prism first surface sphere center, O2-a Fery prism second surface sphere center, 21-trim pad, 22-cube prism, 23-secondary mirror assembly, 231-secondary mirror first surface, 232-secondary mirror second surface, 24-Fery prism assembly, 25-Fery prism assembly, 26-Fery prism assembly, 27-Fery prism assembly, 28-fold axis mirror assembly, 3-three coordinate measuring machine, 31-probe, 32-table, 4-base, 41-base side plane, 42-base mounting plane, 5-PSM fitting microscope, 6-target sphere, 7-autocollimation theodolite, O-cube prism, 23-secondary mirror assembly, 231-secondary mirror first surface, 232-secondary mirror second surface, 24-Fery prism assembly, 25-Fery prism assembly, 26-Fery prism assembly, 27-Fery prism assembly, 28-fold axis mirror assembly, 3-coordinate measuring machine, 31-probe, 32-table, 4-base, 41-base side plane, 42-base mounting plane, 5-PSM fitting microscope, 6-target sphere, 7-autocollimation theodolite, O-PSM3First surface sphere center of secondary mirror, O4-a first surface sphere center, O, of the Fery reflecting prism5-a first surface sphere center of the Fery prism, O6-the center of the second first surface of the Fery reflecting prism, O7-a Fery prism second first surface sphere center.
Detailed Description
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, specific embodiments accompanied with figures are described in detail below, and it is apparent that the described embodiments are a part of the embodiments of the present invention, not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without making creative efforts based on the embodiments of the present invention, shall fall within the protection scope of the present invention.
In the following description, numerous specific details are set forth in order to provide a thorough understanding of the present invention, but the present invention may be practiced in other ways than those specifically described and will be readily apparent to those of ordinary skill in the art without departing from the spirit of the present invention, and therefore the present invention is not limited to the specific embodiments disclosed below.
Furthermore, reference herein to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one implementation of the invention. The appearances of the phrase "in other embodiments" in various places in the specification are not necessarily all referring to the same embodiment, nor are separate or alternative embodiments mutually exclusive of other embodiments.
Furthermore, the present invention is described in detail with reference to the drawings, and in the detailed description of the embodiments of the present invention, the cross-sectional view illustrating the structure of the device is not enlarged partially according to the general scale for convenience of illustration, and the drawings are only exemplary and should not be construed as limiting the scope of the present invention. In addition, the three-dimensional dimensions of length, width and depth should be included in the actual fabrication.
Also in the description of the present invention, the terms "a", "an", "two", "three", and "four" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance.
As shown in fig. 1, the first surface 11 and the second surface 12 of the feray prism in the feray prism are both spherical surfaces, and the two surfaces do not have a common optical axis, and the spherical center of the first surface of the feray prism is O1The second surface sphere center of the Fery prism is O2The Fery prism end plane 13 is a plane.
As shown in fig. 2, the hyperspectral imaging system based on the feray prism of the present embodiment includes a first feray prism component 25, a first feray reflection prism component 24, a secondary reflection mirror component 23, a second feray prism component 27, a second feray reflection prism component 26, and an axicon group 28; the first surface 231 of the sub-mirror is spherical and the second surface 232 of the sub-mirror is flat. The light beam is transmitted by the first Fery prism assembly 25 and then reaches the first Fery reflection prism assembly 24, is reflected by the first Fery reflection prism assembly 24 and then reaches the secondary reflection mirror assembly 23 through the first Fery prism assembly 25, is reflected by the secondary reflection mirror assembly 23 and then reaches the second Fery prism assembly 27, is reflected by the second Fery reflection prism assembly 26 and then reaches the folding axis mirror assembly 28 through the second Fery prism assembly 27 after passing through the second Fery prism assembly 27, and is reflected by the folding axis mirror assembly 28 and then imaged.
As shown in fig. 3, the feray prism assembly of the present embodiment includes a frame, a feray prism 1 fixed in the frame, a trimming pad 21 located at the bottom of the frame, and a cubic prism 22 mounted on the top of the frame. It should be noted that the term "feray prism assembly" as used herein refers to any one of the first feray prism assembly 25, the first feray reflective prism assembly 24, the second feray prism assembly 27, and the second feray reflective prism assembly 26.
The following describes a specific tuning and integration method of this embodiment with reference to fig. 4:
the embodiment carries out high-precision space coordinate positioning and measurement on the Fery prism assembly through a three-Coordinate Measuring Machine (CMM), a PSM adjusting microscope and an auto-collimation theodolite, and realizes precision adjustment and integration based on the Fery prism hyperspectral imaging system. The method comprises the following specific steps:
1. establishing a space coordinate system;
(1) according to the theoretical size of space, the probes 31 on the coordinate measuring machine 3 are assembled and installed, and the calibration of the probes 31 is performed one by one.
(2) Fixing a base 4 of a hyperspectral imaging system based on a Fery prism, which is provided with a secondary reflector component 23, on a marble table top 32, respectively performing point fitting on a side plane 41 of the base, a mounting plane 42 of the base, a second surface 232 of the secondary reflector and a spherical center point O of a first surface 231 of the secondary reflector by using a probe 31 of a three-coordinate measuring machine 33。
(3) Calculating the mounting position relation and the angle relation between the secondary reflector assembly 23 and the base 4 through special software of the three-coordinate measuring machine 3, judging whether the mounting initial position of the secondary reflector assembly 23 meets the design requirement, if not, adjusting the mounting position of the secondary reflector assembly 23 until the mounting initial position of the secondary reflector assembly 23 meets the design requirement; the changes of the pitching and the rotating angles of the secondary reflector assembly 32 in the adjusting process are monitored in real time by using the auto-collimation theodolite 7.
(4) With the base side plane 41, the base mounting plane 42 and the sphere center point O of the secondary reflector first surface 2313A spatial coordinate system O (X, Y, Z) is established for three elements of the origin of coordinates, i.e. with the sphere center point O of the first surface of the secondary mirror3A space coordinate system O (X, Y, Z) is established with the origin of coordinates, the base-side plane 41 being a YZ plane, and the base-mount plane 42 being an XY plane.
2. Adjusting the Fery prism assembly;
(5) any one of a first Fery prism component 24, a first Fery prism component 25, a second Fery prism component 26 and a first Fery prism component 27 is mounted on the base 4; and respectively point-fitting a spherical center point of the first surface 11 of the Fery prism, a spherical center point of the second surface 12 of the Fery prism and an end plane 13 of the Fery prism by using a probe 31 of the three-coordinate measuring machine 3.
(6) According to the actual measurement result, the installation position relation among the Fery prism, the base 4 and the secondary reflector assembly 23 is calculated through special software of the three-coordinate measuring machine 3, whether the installation initial position of the Fery prism assembly meets the design requirement or not is judged, and if not, the installation position of the Fery prism is adjusted through adjusting the trimming pad 21; firstly, the grinding and trimming pad 21 is repaired around the X axis (from the orientation shown in FIG. 3, it can be understood that the grinding and trimming pad 21 around the X axis, the front and back sides) to ensure that the verticality between the end plane 13 of the Fery prism and the mounting plane of the base 4 meets the design requirement, then the grinding and trimming pad 21 around the Y axis (from the orientation shown in FIG. 3, it can be understood that the grinding and trimming pad 21 around the Y axis, the left and right sides) to ensure that the center point of the first surface 11 of the Fery prism and the center point of the second surface 12 of the Fery prism are equal to the central height of the mounting plane 42 of the base, and finally the whole grinding and trimming pad 21 to ensure that the central height of the Fery prism 1 is equal to the central height of the secondary reflector assembly 23.
(7) And (5) making an installation mark, and integrally disassembling the Fery prism assembly.
(8) And (5) sequentially carrying out single-component precise assembly and adjustment on the other three Fery prism components according to the steps (5) to (7).
3. System integration;
(9) resetting and installing any one of the Fery prism assemblies again according to the installation mark, adopting point measurement by a probe 31 of the three-coordinate measuring machine 3 to fit a spherical center point of the first surface 11 of the Fery prism, and adjusting the micro angle of the Fery prism assembly to enable the spatial position of the spherical center point relative to the origin of coordinates to meet the design requirement.
(10) Erecting a PSM adjusting microscope 5 and a target ball 6, measuring the space coordinate of the target ball 6 through a probe 31 of a three-coordinate measuring machine, and performing micro-displacement adjustment to enable the space coordinate of the target ball 6 to meet the sphere center point O of the first surface 11 of the Fery prism1The design requirements of (a); and then the micro-displacement adjustment PSM adjusting microscope 5 and the target ball 6 are imaged in a self-alignment mode, and the cross-hair image displayed on the CCD interface is sharp and distinguishable in edge.
(11) The target ball 6 is removed, the autocollimation theodolite 7 is erected, the autocollimation cross-hair image of the first surface 11 of the Fery prism is displayed on the CCD interface of the PSM adjusting microscope 5, the angle and the front-back distance of the Fery prism assembly are integrally adjusted according to the sharp condition of the image, the autocollimation theodolite 7 monitors the change condition of the angle in real time, the sharp edge of the autocollimation cross-hair image is ensured to be identified, and the precise adjustment of the Fery prism assembly is finished.
(12) According to the steps (9) - (11), accurately determining the spherical center points of the first surfaces of the other three Fery prisms through the PSM adjusting microscope 5 and the target sphere 6 in sequence, and completing the component-level accurate adjustment and integration of the first component 24, the first component 25, the second component 26 and the second component 27 of the Fery reflecting prism;
(13) and (3) installing a folding axis mirror assembly 28 according to the design requirement, and carrying out system image quality inspection, thus finishing the precise adjustment and integration of the hyperspectral imaging system based on the Fery prism.
The above description is only for the purpose of describing the preferred embodiments of the present invention and is not intended to limit the technical solutions of the present invention, and any known modifications made by those skilled in the art based on the main technical concepts of the present invention are within the technical scope of the present invention.

Claims (5)

1. A precision assembly and adjustment integrated process method of a hyperspectral imaging system based on a Fery prism is characterized by comprising the following steps:
step 1, establishing a space coordinate system;
step 1.1, combining and installing all probes (31) on a three-coordinate measuring machine (3) according to the theoretical size of space, and calibrating all probes (31) one by one;
step 1.2, fixing a Fery prism-based hyperspectral imaging system base (4) only provided with a secondary reflector component (23) on a table top (32) of a three-coordinate measuring machine (3); respectively sampling points through the probes (31), and fitting out a base side plane (41), a base mounting plane (42), a secondary reflector second surface (232) and a secondary reflector first surface spherical center point O3；
Step 1.3, calculating the installation position relation and the angle relation between the secondary reflector assembly (23) and the base (4) through special software of the three-coordinate measuring machine (3), judging whether the installation initial position of the secondary reflector assembly (23) meets the design requirement, and if not, adjusting the installation position of the secondary reflector assembly (23) until the installation initial position of the secondary reflector assembly (23) meets the design requirement;
step 1.4, using the sphere center point O of the first surface of the secondary reflector3Establishing a space coordinate system O (X, Y, Z) by taking a coordinate origin, taking a base side plane (41) as a YZ plane and taking a base mounting plane (42) as an XY plane;
step 2, adjusting the Fery prism assembly;
step 2.1, mounting any one of a first Fery prism component (24), a first Fery prism component (25), a second Fery prism component (26) and a second Fery prism component (27) on a base (4); the Fery prism assembly comprises a frame, a Fery prism fixed in the frame, a trimming pad (21) positioned at the bottom of the frame and a cubic prism (22) arranged at the top of the frame; respectively point-fitting a spherical center point of a first surface (11) of the Fery prism, a spherical center point of a second surface (12) of the Fery prism and an end plane (13) of the Fery prism by a probe (31) of a three-coordinate measuring machine (3);
2.2, calculating the installation position relation among the Fery prism, the base (4) and the secondary reflector assembly (23) through special software of the three-coordinate measuring machine (3), judging whether the installation initial position of the Fery prism assembly meets the design requirement or not, and if not, adjusting the installation position of the Fery prism through adjusting the trimming pad (21);
the initial installation position of the Fery prism assembly needs to meet the following requirements:
the verticality between the Fery prism end plane (13) and the base mounting plane (42) meets the design requirement;
the center height of the sphere center point of the first surface (11) of the Fery prism and the center height of the sphere center point of the second surface (12) of the Fery prism relative to the base mounting plane (42) are equal;
the height of the center of the Fery prism is equal to that of the center of the secondary reflector component (23);
step 2.3, making an installation mark, and integrally disassembling the Fery prism assembly;
2.4, sequentially carrying out single-component precise assembly and adjustment on the other three Fery prism components according to the steps 2.1-2.3;
step 3, system integration;
3.1, resetting and installing any one of the Fery prism assemblies again according to the installation marks, measuring and fitting a sphere center point of the first surface (11) of the Fery prism through a probe (31) of the three-coordinate measuring machine (3), and slightly adjusting the angle of the Fery prism assembly to enable the space positions of the sphere center point of the first surface (11) of the Fery prism and the sphere center point of the second surface (12) of the Fery prism relative to the origin of coordinates to meet the design requirements;
step 3.2, erecting a PSM adjusting microscope (5) and a target ball (6), measuring the space coordinate of the target ball (6) through a probe (31) of a three-coordinate measuring machine (3), and adjusting micro displacement to enable the space coordinate of the target ball (6) to meet the design requirement of the sphere center point of the first surface (11) of the Fery prism; then the micro-displacement adjustment PSM adjusting microscope (5) and the target ball (6) are imaged automatically, and the CCD interface displays that the edge of the cross-hair image is sharp and distinguishable;
3.3, removing the target ball (6), erecting an auto-collimation theodolite (7), displaying an auto-collimation cross-hair image of the first surface (11) of the Fery prism on a CCD interface of the PSM adjusting microscope (5), integrally adjusting the angle and the front-back distance of the Fery prism assembly according to the sharp condition of the image by micro-displacement, monitoring the angle change condition of the cubic prism (22) by the auto-collimation theodolite (7) in real time, ensuring that the edge of the auto-collimation cross-hair image is sharp and identifiable under the condition of meeting the angle requirement, and finishing the precise adjustment of the Fery prism assembly;
3.4, according to the steps 3.1-3.3, precisely determining the spherical center points of the first surfaces (11) of the remaining three Fery prisms through the PSM adjusting microscope (5) and the target sphere (6) in sequence, and completing precise adjustment and integration of the first Fery reflecting prism component (24), the first Fery prism component (25), the second Fery reflecting prism component (26) and the second Fery prism component (27);
and 3.5, mounting a folding axis mirror assembly (28) according to design requirements, carrying out system image quality inspection, and finishing precise adjustment and integration based on the Fery prism hyperspectral imaging system.
2. The precision assembly and adjustment integrated process method for the hyperspectral imaging system based on the Fery prism as claimed in claim 1, wherein the specific adjustment of the installation position of the Fery prism by adjusting the trimming pad (21) in step 2.2 is as follows: firstly, a trimming pad (21) is repaired and ground around an X axis to ensure that the verticality of a Fery prism end plane (13) and a base mounting plane (42) meets the design requirement; then, a Y-axis lapping and trimming pad (21) is used for ensuring that the center height of the sphere point of the first surface (11) of the Fery prism and the center height of the sphere point of the second surface (12) of the Fery prism relative to the base mounting plane (42) are equal; finally, the overall grinding and trimming pad (21) ensures that the height of the center of the Fery prism is equal to that of the center of the secondary reflector assembly (23).
3. The precision assembly and adjustment integrated process method of the hyperspectral imaging system based on the Fery prism as claimed in claim 2, which is characterized in that: the secondary reflector assembly (23) comprises a mirror frame, a secondary reflector fixed in the mirror frame and a trimming pad positioned at the bottom of the mirror frame, and the mounting position of the secondary reflector assembly (23) is adjusted by adjusting the trimming pad in step 1.3.
4. The precision adjusting and integrating process method of the hyperspectral imaging system based on the Fery prism as claimed in claim 3, wherein in step 1.3, the changes of the pitching and the rotating angles of the secondary reflector assembly (23) in the adjusting process are monitored in real time by using the auto-collimation theodolite (7).
5. The precision assembly and adjustment integrated process method of the hyperspectral imaging system based on the Fery prism as claimed in claim 4, which is characterized in that: the first surface (231) of the secondary mirror is spherical and the second surface (232) of the secondary mirror is planar.
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CN111830724A (en) * 2020-07-27 2020-10-27 中国科学院西安光学精密机械研究所 Method and system for precise adjustment and detection of Fery prism assembly
CN112013954A (en) * 2020-09-08 2020-12-01 中国科学院西安光学精密机械研究所 Offner hyperspectral imaging system based on curved surface prism
CN112433337A (en) * 2020-11-23 2021-03-02 中国科学院西安光学精密机械研究所 Precise optical machine assembling method of trapezoidal prism optical system

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN104034354A (en) * 2014-06-24 2014-09-10 中国船舶重工集团公司第七一七研究所 Alignment process for IMU (Inertial Measurement Unit) position and azimuth determining system
CN111830724A (en) * 2020-07-27 2020-10-27 中国科学院西安光学精密机械研究所 Method and system for precise adjustment and detection of Fery prism assembly
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