CN113994585A - 静电致动器 - Google Patents

静电致动器 Download PDF

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Publication number
CN113994585A
CN113994585A CN202080044236.9A CN202080044236A CN113994585A CN 113994585 A CN113994585 A CN 113994585A CN 202080044236 A CN202080044236 A CN 202080044236A CN 113994585 A CN113994585 A CN 113994585A
Authority
CN
China
Prior art keywords
electrode film
electrodes
electrostatic actuator
electrode
electrostatic
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202080044236.9A
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English (en)
Chinese (zh)
Inventor
实吉敬二
奥田一雄
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Institute of Technology NUC
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Tokyo Institute of Technology NUC
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Institute of Technology NUC filed Critical Tokyo Institute of Technology NUC
Publication of CN113994585A publication Critical patent/CN113994585A/zh
Pending legal-status Critical Current

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    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/002—Electrostatic motors
    • H02N1/006—Electrostatic motors of the gap-closing type
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02N—ELECTRIC MACHINES NOT OTHERWISE PROVIDED FOR
    • H02N1/00—Electrostatic generators or motors using a solid moving electrostatic charge carrier
    • H02N1/06—Influence generators
    • H02N1/08—Influence generators with conductive charge carrier, i.e. capacitor machines

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  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Micromachines (AREA)
CN202080044236.9A 2019-06-18 2020-06-17 静电致动器 Pending CN113994585A (zh)

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP2019112669 2019-06-18
JP2019-112669 2019-06-18
PCT/JP2020/023659 WO2020255977A1 (ja) 2019-06-18 2020-06-17 静電アクチュエータ

Publications (1)

Publication Number Publication Date
CN113994585A true CN113994585A (zh) 2022-01-28

Family

ID=74037151

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202080044236.9A Pending CN113994585A (zh) 2019-06-18 2020-06-17 静电致动器

Country Status (7)

Country Link
US (1) US11848625B2 (https=)
EP (1) EP3989430A4 (https=)
JP (1) JP7566337B2 (https=)
KR (1) KR20220020836A (https=)
CN (1) CN113994585A (https=)
TW (1) TW202130109A (https=)
WO (1) WO2020255977A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11888412B2 (en) * 2017-07-14 2024-01-30 Pixart Imaging Inc. Stackable actuating element with profiled insulated electrode structures

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4127860A1 (de) * 1991-08-22 1993-02-25 Deutsche Aerospace Pumpensystem zur foerderung von fluessigen oder gasfoermigen medien
JP2010057321A (ja) * 2008-08-29 2010-03-11 Tokyo Institute Of Technology 静電アクチュエータおよびその製造方法
CN102674231A (zh) * 2011-03-16 2012-09-19 株式会社东芝 静电致动器
CN107710590A (zh) * 2015-07-14 2018-02-16 Ｓｔｒａｗｂ股份有限公司 静电驱动器以及静电驱动器的制造方法

Family Cites Families (12)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US4330730A (en) * 1980-03-27 1982-05-18 Eastman Kodak Company Wound piezoelectric polymer flexure devices
JP2001268948A (ja) * 2000-03-21 2001-09-28 Keiji Saneyoshi 静電アクチュエータおよびそれを用いた動作機構
JP3832338B2 (ja) * 2001-12-25 2006-10-11 松下電工株式会社 電歪ポリマーアクチュエータ
ITPI20050095A1 (it) * 2005-09-05 2005-12-05 Federico Carpi Attuatore, sensore e generator a polimeri elettroattivi in configurazione ripiegata
JP2008211922A (ja) 2007-02-27 2008-09-11 Yamaha Corp 高分子静電型アクチュエータ
DE102008002495A1 (de) * 2008-06-18 2009-12-24 Robert Bosch Gmbh Vielschichtaktor
DE102008002492A1 (de) * 2008-06-18 2009-12-24 Robert Bosch Gmbh Faltaktor oder Faltsensor sowie Herstellungsverfahren für einen Faltaktor oder Faltsensor
JP5161006B2 (ja) * 2008-08-29 2013-03-13 国立大学法人東京工業大学 静電アクチュエータの製造方法
US10903762B2 (en) * 2015-09-02 2021-01-26 Koninklijke Philips N.V. Actuator device based on an electroactive or photoactive polymer
JP2017158366A (ja) 2016-03-03 2017-09-07 トヨタ自動車株式会社 アクチュエータ
WO2018207707A1 (ja) 2017-05-10 2018-11-15 ソニー株式会社 アクチュエータ、駆動部材、触覚提示装置および駆動装置
JP7408149B2 (ja) * 2020-06-11 2024-01-05 ストローブ株式会社 積層型静電アクチュエータ

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE4127860A1 (de) * 1991-08-22 1993-02-25 Deutsche Aerospace Pumpensystem zur foerderung von fluessigen oder gasfoermigen medien
JP2010057321A (ja) * 2008-08-29 2010-03-11 Tokyo Institute Of Technology 静電アクチュエータおよびその製造方法
CN102674231A (zh) * 2011-03-16 2012-09-19 株式会社东芝 静电致动器
CN107710590A (zh) * 2015-07-14 2018-02-16 Ｓｔｒａｗｂ股份有限公司 静电驱动器以及静电驱动器的制造方法

Also Published As

Publication number Publication date
EP3989430A1 (en) 2022-04-27
WO2020255977A1 (ja) 2020-12-24
JP7566337B2 (ja) 2024-10-15
TW202130109A (zh) 2021-08-01
JPWO2020255977A1 (https=) 2020-12-24
US11848625B2 (en) 2023-12-19
KR20220020836A (ko) 2022-02-21
US20220368248A1 (en) 2022-11-17
EP3989430A4 (en) 2023-07-19

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Application publication date: 20220128

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