CN113990786A - Single-rail silicon wafer basket collecting machine - Google Patents
Single-rail silicon wafer basket collecting machine Download PDFInfo
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- CN113990786A CN113990786A CN202111345713.8A CN202111345713A CN113990786A CN 113990786 A CN113990786 A CN 113990786A CN 202111345713 A CN202111345713 A CN 202111345713A CN 113990786 A CN113990786 A CN 113990786A
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- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title claims abstract description 15
- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 15
- 239000010703 silicon Substances 0.000 title claims abstract description 15
- 235000012431 wafers Nutrition 0.000 claims abstract description 67
- 230000007246 mechanism Effects 0.000 claims abstract description 55
- 230000005540 biological transmission Effects 0.000 claims abstract description 19
- 239000000463 material Substances 0.000 claims description 58
- 230000000903 blocking effect Effects 0.000 claims description 20
- 238000001179 sorption measurement Methods 0.000 claims description 6
- 238000009434 installation Methods 0.000 claims description 4
- 230000001681 protective effect Effects 0.000 claims description 3
- 230000000712 assembly Effects 0.000 claims 4
- 238000000429 assembly Methods 0.000 claims 4
- 230000007723 transport mechanism Effects 0.000 claims 1
- 238000007599 discharging Methods 0.000 abstract description 15
- 238000003475 lamination Methods 0.000 abstract description 3
- 238000013467 fragmentation Methods 0.000 abstract 1
- 238000006062 fragmentation reaction Methods 0.000 abstract 1
- 238000000034 method Methods 0.000 description 4
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 2
- 239000012634 fragment Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007423 decrease Effects 0.000 description 1
- 238000000151 deposition Methods 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 229910052742 iron Inorganic materials 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012797 qualification Methods 0.000 description 1
- 230000007115 recruitment Effects 0.000 description 1
- 238000012857 repacking Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67778—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading involving loading and unloading of wafers
- H01L21/67781—Batch transfer of wafers
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67271—Sorting devices
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67763—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations the wafers being stored in a carrier, involving loading and unloading
- H01L21/67766—Mechanical parts of transfer devices
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- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Robotics (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
本发明公开了一种带打标的硅片收篮机，其包括机架，机架的上方设置有放料机构、输送机构、搬运机构和装篮组件，放料机构用于储放晶圆，其设置在传输机传输起点的一侧，搬运机构用于将晶圆从放料机构搬运到传输机的传输起点上，传输机将晶圆输送到传输终点并通过推料气缸、推料块以及篮具顶升模组将晶圆放入装篮组件内。本发明通过放料机构、输送机构、搬运机构、装篮组件和篮具顶升模组的设置实现了自动对晶圆的分片收篮，降低了用工数量，节约了用工成本，大大的提高工作效率，晶圆收篮产能达到了1000‑1200Pcs/H，装篮操作省时省力，同时叠片率小于1％，碎片率小于3‰，也保证了收篮质量，适于推广应用。
The invention discloses a silicon wafer basket receiving machine with marking, which comprises a frame, a discharging mechanism, a conveying mechanism, a conveying mechanism and a basket loading assembly are arranged above the frame, and the discharging mechanism is used for storing wafers, It is arranged on one side of the transmission starting point of the conveyor. The conveying mechanism is used to transport the wafers from the unloading mechanism to the transmission starting point of the conveyor. The basket lift module puts the wafers into the basket loading assembly. The invention realizes the automatic slicing and receiving of the wafers through the setting of the discharging mechanism, the conveying mechanism, the conveying mechanism, the basket loading assembly and the basket lifting module, which reduces the labor quantity, saves the labor cost, and greatly improves the Work efficiency, the wafer receiving capacity reaches 1000‑1200Pcs/H, and the basket loading operation saves time and labor. At the same time, the lamination rate is less than 1%, and the fragmentation rate is less than 3‰, which also ensures the quality of the basket, which is suitable for promotion and application.
Description
Technical Field
The invention relates to the technical field of wafer collection baskets, in particular to a single-track silicon wafer collection basket machine.
Background
In the prior art, the slicing and the basket collecting of the wafer are manually carried out, and the wafer is easy to collide with a tool and the wafer during the manual carrying, slicing and basket collecting processes of the wafer, so that the wafer is subjected to corner missing or wafer breaking, the slicing rate is increased, and the production yield of the semiconductor wafer is influenced; in-process of repacking is carried out in the manual work, and not only the recruitment is in large quantity, and the cost of labor is high, and the dress basket operation is wasted time and energy moreover, and long-time letter sorting operation easily causes the operating personnel fatigue, also waste time simultaneously, dress basket inefficiency causes the production efficiency and the qualification rate decline of silicon chip.
Disclosure of Invention
The invention aims to provide a single-rail silicon wafer basket collecting machine to solve the problems in the background technology.
In order to achieve the purpose, the invention provides the following technical scheme:
a single-rail silicon wafer basket collecting machine comprises a rack, wherein a material discharging mechanism, a conveying mechanism, a carrying mechanism and a basket charging assembly are arranged above the rack, the conveying mechanism comprises a conveyor, a supporting leg, a material collecting box, a material blocking rod, a material blocking cylinder, a first motor, a material pushing cylinder and a material pushing block, the conveyor is fixed on the supporting leg and driven by the first motor, the material collecting box is obliquely arranged on the outer side of the middle section of the conveyor, the material blocking rod is connected with the material blocking cylinder, the material blocking cylinder is fixed on the supporting leg and opposite to the material collecting box, the material pushing cylinder and the material pushing block are arranged above a conveying terminal of the conveyor, and the material pushing block is fixed on a piston rod of the material pushing cylinder;
the basket assembly comprises a circular rotating table, basket assembly components, adjusting grooves and an index plate, the circle center of the lower end of the rotating table is fixed at the output end of the index plate, a plurality of basket assembly components distributed in a circular array are placed at the upper end of the rotating table, the rotating table is also provided with the adjusting grooves with the same number as the basket assembly components, and the adjusting grooves are arranged below the basket assembly components;
a basket jacking module is arranged below the rotating table and used for adjusting the height of the basket assembly;
the discharging mechanism is used for storing wafers and arranged on one side of the transmission starting point of the transmission machine, the carrying mechanism is used for carrying the wafers to the transmission starting point of the transmission machine from the discharging mechanism, the transmission machine is used for conveying the wafers to the transmission end point, and the wafers are placed into the basket tool assembly through the material pushing cylinder, the material pushing block and the basket tool jacking module.
Preferably, basket utensil jacking module includes first mounting panel, the second mounting panel, the dead lever, the second motor, the screw rod, the screw thread seat, the jacking pole, jacking piece and electro-magnet, parallel arrangement about second mounting panel and the first mounting panel, be connected through the dead lever between it, the lower extreme fixed mounting of first mounting panel has the second motor, the motor shaft of second motor stretch out first mounting panel and with screw rod fixed connection, install the screw thread seat on the screw rod, install two jacking poles on the screw thread seat, the upper end of two jacking poles stretches out the second mounting panel and installs the lower extreme at the jacking piece, the electro-magnet is installed to the upper end of jacking piece.
Preferably, the discharging mechanism comprises an electric push rod, a fixed plate, positioning rods and a top plate, the electric push rod is installed below the fixed plate, the output end of the electric push rod penetrates through the fixed plate from bottom to top and is fixedly connected with the top plate, the fixed plate is fixed on the rack, the upper end of the fixed plate is fixedly provided with the positioning rods distributed in a circular array, the fixed plate is further symmetrically fixed with two installation rods, and air nozzles are fixed above the installation rods.
Preferably, the first carrying mechanism comprises a mounting box, a guide rail, a first air cylinder, a second air cylinder and a sucker, the mounting box is fixed at the upper end of the support leg, the support leg is fixed on the rack, the guide rail is arranged in the mounting box, the first air cylinder is fixed at the outer side of the mounting box, a piston rod of the first air cylinder extends into the mounting box and is fixedly connected with a sliding block, the sliding block is arranged on the guide rail in a left-right sliding mode, the second air cylinder is fixed at the outer side of the sliding block, a buffer is arranged on a motion path of the sliding block, and the sucker for adsorbing wafers is fixedly mounted on the piston rod of the second air cylinder.
Preferably, the basket tool assembly comprises a basket tool, a basket tool base and an adsorption block, a plurality of placing grooves used for storing wafers are formed in the basket tool, the lower end of the basket tool assembly is detachably fixed on the basket tool base, and the adsorption block capable of attracting the electromagnet is arranged at the lower end of the basket tool base.
Preferably, a protection seat is arranged on the outer side of the rotating platform, and a circular groove with the same outer diameter as the rotating platform is formed in the center of the protection seat.
Preferably, the lower end of the basket tool base is further provided with a positioning hole, and the jacking block is provided with a positioning bulge matched with the positioning hole.
Compared with the prior art, the invention has the beneficial effects that:
1. according to the automatic wafer separating and collecting device, the discharging mechanism, the conveying mechanism, the carrying mechanism, the basket loading assembly and the basket jacking module are arranged, so that the wafer separating and collecting basket is automatically separated and collected, the labor amount is reduced, the labor cost is saved, the working efficiency is greatly improved, the yield of the wafer collecting basket can reach 1000 plus one 1200Pcs/H, the basket loading operation is time-saving and labor-saving, meanwhile, the stacking rate is less than 1%, meanwhile, the conveying mechanism and the carrying mechanism are adopted for carrying and collecting the basket, the errors caused by manpower are reduced, the collision probability is reduced, the fragment rate is less than 3 per thousand, the basket collecting quality is also ensured, and the automatic wafer separating and collecting device is suitable for popularization and application.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic top view of the overall structure of the present invention;
FIG. 3 is a rear side structural view of the overall structure of the present invention;
FIG. 4 is a schematic structural view of a discharging mechanism of the present invention;
FIG. 5 is a schematic view of the conveying mechanism of the present invention;
FIG. 6 is a rear side view of the conveying mechanism of the present invention;
FIG. 7 is a schematic structural view of a carrying mechanism according to the present invention;
FIG. 8 is a schematic structural view of a basket loading assembly and a basket lifting module according to the present invention;
FIG. 9 is a schematic view of the basket assembly of the present invention;
FIG. 10 is a schematic view of the basket assembly of the present invention;
FIG. 11 is a schematic view of a basket jacking module according to the present invention.
In the figure: the device comprises a machine frame 1, a discharging mechanism 2, an electric push rod 21, a fixing plate 22, a positioning rod 23, a mounting rod 24, an air nozzle 25, a top plate 26, a conveying mechanism 3, a conveyor 31, a support leg 32, a material receiving box 33, a material blocking rod 34, a material blocking cylinder 35, a first motor 36, a material pushing cylinder 37, a material pushing block 38, a carrying mechanism 4, a mounting box 41, a guide rail 42, a first cylinder 43, a second cylinder 44, a suction cup 45, a support leg 46, a buffer 47, a basket assembly 5, a rotating platform 51, a basket assembly 52, a basket tool 521, a placing groove 522, a basket tool base 523, an adsorption block 524, a positioning hole 525, an adjusting groove 53, a dividing plate 54, a protective seat 6, a wafer 7, a basket tool jacking module 8, a first mounting plate 81, a second mounting plate 82, a fixing rod 83, a second motor 84, a screw rod 85, a threaded seat 86, a jacking rod 87, a jacking block 88, an electromagnet 89 and a positioning bulge 810.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-11, the present invention provides a technical solution:
a single-rail silicon wafer basket collecting machine comprises a rack 1, wherein a discharging mechanism 2, a conveying mechanism 3, a carrying mechanism 4 and a basket loading assembly 5 are arranged above the rack 1.
The discharging mechanism 2 is used for storing the wafer 7, and is arranged on one side of a transmission starting point of the transmission machine 31, the discharging mechanism 2 comprises an electric push rod 21, a fixing plate 22, a positioning rod 23 and a top plate 26, the electric push rod 21 is arranged below the fixing plate 22, an output end of the electric push rod 21 penetrates through the fixing plate 22 from bottom to top and is fixedly connected with the top plate 26, the fixing plate 22 is fixed on the rack 1, a plurality of positioning rods 23 distributed in a circular array are fixedly arranged at the upper end of the fixing plate 21, two mounting rods 24 are symmetrically fixed on the fixing plate 22, and an air nozzle 25 is fixed above the mounting rods 24. The wafer 7 is placed on the top plate 26, the position of the wafer 7 is restrained by the four positioning rods 23, air is blown to the uppermost wafer 7 through the air nozzle 25, the sucking disc 45 only sucks one wafer 7 at a time, the top plate 26 is pushed to ascend through the electric push rod 21, the uppermost wafer 7 is always at the same height, and the carrying mechanism 4 is convenient to carry.
The carrying mechanism 4 is used for carrying the wafer 7 from the discharging mechanism 2 to a transmission starting point of the conveyor 31, the first carrying mechanism 4 comprises a mounting box 41, a guide rail 42, a first air cylinder 43, a second air cylinder 44 and a suction cup 45, the mounting box 41 is fixed at the upper end of the supporting leg 46, the supporting leg 46 is fixed on the rack 1, the guide rail 42 is arranged in the mounting box 41, the first air cylinder 43 is fixed at the outer side of the mounting box 41, a piston rod of the first air cylinder extends into the mounting box 41 and is fixedly connected with a sliding block, the sliding block is slidably mounted on the guide rail 42 left and right, the second air cylinder 44 is fixed at the outer side of the sliding block, a buffer 47 is arranged on a moving path of the sliding block, and the suction cup 45 used for adsorbing the wafer 7 is fixedly mounted on the piston rod of the second air cylinder 44.
The conveying mechanism 3 comprises a conveyor 31, supporting legs 32, a material receiving box 33, a material blocking rod 34, a material blocking cylinder 35, a first motor 36, a material pushing cylinder 37 and a material pushing block 38, the conveyor 31 is fixed on the supporting legs 32 and driven by the first motor 36, the material receiving box 33 is obliquely arranged on the outer side of the middle section of the conveyor 31, the material blocking rod 34 is connected with the material blocking cylinder 35, the material blocking cylinder 35 is fixed on the supporting legs 32 and is opposite to the material receiving box 33, the material pushing cylinder 37 and the material pushing block 38 are arranged above a transmission terminal of the conveyor 31, and the material pushing block 38 is fixed on a piston rod of the material pushing cylinder 37.
The wafer 7 carrying mechanism 4 carries the wafer 7 to the starting point of the conveyor 31, during the process of conveying the wafer 7 from the starting point to the end point, whether the wafer 7 is single or double is detected through a sensor, if the wafer 7 is double or multiple, the material blocking cylinder 35 extends out to drive the material blocking rod 34 to ascend, the lower wafer 7 is blocked, two or more than two wafers 7 which are overlapped together are separated, redundant wafers enter the material receiving box 33, the uppermost wafer 7 is continuously conveyed, and only one wafer 7 is transferred to the right end of the conveyor 31 at each time.
The basket assembly 5 comprises a circular rotating platform 51, basket assembly 52, adjusting grooves 53 and an indexing disc 54, the circle center of the lower end of the rotating platform 51 is fixed at the output end of the indexing disc 54, a plurality of basket assembly 52 distributed in a circular array are placed at the upper end of the rotating platform 51, the rotating platform 51 is also provided with the adjusting grooves 53 with the same number as the basket assembly 52, and the adjusting grooves 53 are arranged below the basket assembly 52, in the embodiment, the basket assembly 52 is provided with 6.
The lower part of the rotating platform 51 is further provided with a basket jacking module 8, and the basket jacking module 8 is used for adjusting the height of the basket assembly 52.
Basket utensil jacking module 8 includes first mounting panel 81, second mounting panel 82, dead lever 83, second motor 84, screw rod 85, screw thread seat 86, jacking rod 87, jacking piece 88 and electro-magnet 89, parallel arrangement about second mounting panel 82 and the first mounting panel 81, be connected through dead lever 83 between it, the lower extreme fixed mounting of first mounting panel 81 has second motor 84, the motor shaft of second motor 84 stretch out first mounting panel 81 and with screw rod 85 fixed connection, install screw thread seat 86 on the screw rod 85, install two jacking rods 87 on the screw thread seat 86, the upper end of two jacking rods 87 stretches out second mounting panel 82 and installs the lower extreme at jacking piece 88, electro-magnet 89 is installed to the upper end of jacking piece 88.
The conveyor 31 conveys the wafer 7 to a conveying end point, a part of the wafer 7 enters the placing groove 522 of the basket 521, then the second motor 84 is started, the second motor 84 rotates to drive the screw 85 to rotate, so that the jacking block 88 is driven to ascend through the threaded seat 86 and the two jacking rods 87, the jacking block 88 ascends to drive the basket 521 to ascend for a distance, the distance is the distance between the two placing grooves 522, then the material pushing cylinder 37 is started, and the piston rod of the material pushing cylinder 37 stretches out to drive the material pushing block 38 to push the wafer 7 into the basket 521; when a basket 521 is full of wafers 7, the second motor 84 of the basket jacking module 8 rotates reversely to drive the basket 521 to reset, after the basket 521 resets, the electromagnet 89 is closed, the jacking block 88 is separated from the basket base 523, the index plate 54 is started to drive the rotating table 51 to rotate by 60 degrees, so that the next empty basket 521 is opposite to the conveyor 31, and then the basket is collected through the emptying mechanism 2, the conveying mechanism 3, the carrying mechanism 4 and the basket jacking module 8; the basket collecting machine stops until all the baskets 521 are full.
The outer side of the rotating platform 51 is provided with a protection seat 6, a circular groove with the same outer diameter as the rotating platform 51 is formed in the center of the protection seat 6, and the protection seat 6 protects parts below the rotating platform 51 from water, dust and the like and restricts the rotation of the rotating platform 51.
The lower end of the basket tool base 523 is further provided with a positioning hole 525, and the jacking block 88 is provided with a positioning bulge 810 matched with the positioning hole 525, so that positioning is facilitated.
The working principle of the invention is as follows:
according to the invention, the automatic slicing and basket collection of the wafer 7 is realized through the arrangement of the discharging mechanism 2, the conveying mechanism 3, the carrying mechanism 4, the basket loading assembly 5 and the basket jacking module 8, the labor amount is reduced, the labor cost is saved, the working efficiency is greatly improved, the basket collection capacity of the wafer 7 reaches 1000 plus 1200Pcs/H, and the basket loading operation is time-saving and labor-saving. The lamination rate is reduced by arranging the air nozzle 25 and the material blocking rod 34, the lamination rate is less than 1 percent, the fragment rate is less than 3 thousandths, the basket collecting quality is also ensured, and the method is suitable for popularization and application.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (7)
1. The utility model provides a single track silicon chip receipts basket machine which includes frame (1), its characterized in that:
a material placing mechanism (2), a conveying mechanism (3), a carrying mechanism (4) and a basket loading assembly (5) are arranged above the frame (1), the conveying mechanism (3) comprises a conveyor (31), supporting legs (32), a material receiving box (33), a material blocking rod (34), a material blocking cylinder (35), a first motor (36), a material pushing cylinder (37) and a material pushing block (38), the conveyor (31) is fixed on the supporting legs (32) and driven by the first motor (36), the material receiving box (33) is obliquely arranged on the outer side of the middle section of the conveyor (31), the material blocking rod (34) is connected with the material blocking cylinder (35), the material blocking cylinder (35) is fixed on the supporting leg (32) and is opposite to the material receiving box (33), the material pushing cylinder (37) and the material pushing block (38) are arranged above the transmission terminal point of the conveyor (31), the pushing block (38) is fixed on a piston rod of the pushing cylinder (37);
the basket containing assembly (5) comprises a circular rotating table (51), basket tool assemblies (52), adjusting grooves (53) and an index plate (54), the circle center of the lower end of the rotating table (51) is fixed at the output end of the index plate (54), a plurality of basket tool assemblies (52) distributed in a circular array are placed at the upper end of the rotating table, the rotating table (51) is further provided with the adjusting grooves (53) with the same number as the basket tool assemblies (52), and the adjusting grooves (53) are arranged below the basket tool assemblies (52);
a basket tool jacking module (8) is further arranged below the rotating table (51), and the basket tool jacking module (8) is used for adjusting the height of the basket tool assembly (52);
the emptying mechanism (2) is used for storing wafers (7) and arranged on one side of a transmission starting point of the transmission machine (31), the carrying mechanism (4) is used for carrying the wafers (7) from the emptying mechanism (2) to the transmission starting point of the transmission machine (31), the transmission machine (31) is used for conveying the wafers (7) to a transmission end point, and the wafers (7) are placed into the basket tool assembly (52) through the material pushing cylinder (37), the material pushing block (38) and the basket tool jacking module (8).
2. The single-rail silicon wafer basket collecting machine as claimed in claim 1, wherein: the basket jacking module (8) comprises a first mounting plate (81), a second mounting plate (82), a fixed rod (83), a second motor (84), a screw rod (85), a threaded seat (86), a jacking rod (87), a jacking block (88) and an electromagnet (89), wherein the second mounting plate (82) and the first mounting plate (81) are arranged in parallel up and down, the two are connected through a fixed rod (83), the lower end of the first mounting plate (81) is fixedly provided with a second motor (84), a motor shaft of the second motor (84) extends out of the first mounting plate (81) and is fixedly connected with the screw rod (85), install screw thread seat (86) on screw rod (85), install two jacking rods (87) on screw thread seat (86), two the upper end of jacking rod (87) stretches out second mounting panel (82) and installs the lower extreme at jacking piece (88), electro-magnet (89) are installed to the upper end of jacking piece (88).
3. The single-rail silicon wafer basket collecting machine as claimed in claim 1, wherein: drop feed mechanism (2) include electric putter (21), fixed plate (22), locating lever (23) and top dish (26), electric putter (21) are installed in the below of fixed plate (22), and its output from the bottom up passes fixed plate (22) and links to each other with top dish (26) is fixed, fixed plate (22) are fixed in frame (1), and its upper end fixed mounting has locating lever (23) that a plurality of root become circular array and distribute, it is fixed with two installation poles (24) still to the symmetry on fixed plate (22), the top of installation pole (24) is fixed with air cock (25).
4. The single-rail silicon wafer basket collecting machine as claimed in claim 1, wherein: first transport mechanism (4) are including mounting box (41), guide rail (42), first cylinder (43), second cylinder (44) and sucking disc (45), the upper end at supporting legs (46) is fixed in mounting box (41), supporting legs (46) are fixed on frame (1), guide rail (42) set up in mounting box (41), first cylinder (43) are fixed in the outside of mounting box (41), and its piston rod stretches into in mounting box (41) and links to each other with the slider is fixed, slider side to side slidable mounting be in on guide rail (42), the outside of slider is fixed with second cylinder (44), be provided with buffer (47) on the motion path of slider, fixed mounting has sucking disc (45) that are used for adsorbing wafer (7) on the piston rod of second cylinder (44).
5. The single-rail silicon wafer basket collecting machine as claimed in claim 2, wherein: the basket tool component (52) comprises a basket tool (521), a basket tool base (523) and an adsorption block (524), wherein a plurality of placing grooves (522) used for storing wafers (7) are formed in the basket tool (521), the lower end of the basket tool is detachably fixed on the basket tool base (523), and the adsorption block (524) capable of being adsorbed with the electromagnet (89) is arranged at the lower end of the basket tool base (523).
6. The single-rail silicon wafer basket collecting machine as claimed in claim 1, wherein: the outer side of the rotating platform (51) is provided with a protective seat (6), and a circular groove with the same outer diameter as the rotating platform (51) is formed in the center of the protective seat (6).
7. The single-rail silicon wafer basket collecting machine as claimed in claim 5, wherein: the lower end of the basket tool base (523) is further provided with a positioning hole (525), and the jacking block (88) is provided with a positioning bulge (810) matched with the positioning hole (525).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111345713.8A CN113990786A (en) | 2021-11-15 | 2021-11-15 | Single-rail silicon wafer basket collecting machine |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202111345713.8A CN113990786A (en) | 2021-11-15 | 2021-11-15 | Single-rail silicon wafer basket collecting machine |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN113990786A true CN113990786A (en) | 2022-01-28 |
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ID=79748454
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202111345713.8A Pending CN113990786A (en) | 2021-11-15 | 2021-11-15 | Single-rail silicon wafer basket collecting machine |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN115303796A (en) * | 2022-08-17 | 2022-11-08 | 深圳市鹏乐智能系统有限公司 | A pick-and-place mechanism for wafer-bearing iron original sheets in a basket |
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