CN113932024B - Valve core structure of vacuum valve - Google Patents

Valve core structure of vacuum valve Download PDF

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Publication number
CN113932024B
CN113932024B CN202111117813.5A CN202111117813A CN113932024B CN 113932024 B CN113932024 B CN 113932024B CN 202111117813 A CN202111117813 A CN 202111117813A CN 113932024 B CN113932024 B CN 113932024B
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CN
China
Prior art keywords
water
sealing
plate
water inlet
sealing plate
Prior art date
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Application number
CN202111117813.5A
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Chinese (zh)
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CN113932024A (en
Inventor
赵红斌
魏琼林
郑文才
冉从军
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Chengdu Zhongke Wish Instruments Co ltd
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Chengdu Zhongke Wish Instruments Co ltd
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Priority to CN202111117813.5A priority Critical patent/CN113932024B/en
Publication of CN113932024A publication Critical patent/CN113932024A/en
Application granted granted Critical
Publication of CN113932024B publication Critical patent/CN113932024B/en
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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0227Packings
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/02Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor
    • F16K3/0254Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing with flat sealing faces; Packings therefor being operated by particular means
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K3/00Gate valves or sliding valves, i.e. cut-off apparatus with closing members having a sliding movement along the seat for opening and closing
    • F16K3/30Details
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00Actuating devices; Operating means; Releasing devices
    • F16K31/12Actuating devices; Operating means; Releasing devices actuated by fluid
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16KVALVES; TAPS; COCKS; ACTUATING-FLOATS; DEVICES FOR VENTING OR AERATING
    • F16K31/00Actuating devices; Operating means; Releasing devices
    • F16K31/44Mechanical actuating means

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Details Of Valves (AREA)

Abstract

The invention discloses a valve core structure of a vacuum valve, which relates to the technical field of valve core structures and is used for solving the problem that a valve core of the vacuum valve in the prior art does not have an automatic cooling function, so that a fluororubber ring is invalid or a sealing plate is deformed, thereby influencing the sealing effect of the vacuum valve; the support plate is provided with a first water inlet and a first water outlet, the side surface of the support plate is provided with a bent extension water channel, and the support plate is provided with a sealing plate capable of sealing the bent extension water channel; the sealing plate is provided with a second water inlet and a second water outlet, the side surface of the sealing plate is provided with an annular water channel along the circumferential direction of the sealing plate, and the sealing plate is provided with a sealing ring capable of sealing the annular water channel. According to the technical scheme, the possibility of failure of the fluorine rubber ring or deformation of the sealing plate caused by high temperature can be reduced.

Description

Valve core structure of vacuum valve
Technical Field
The invention relates to the technical field of valve core structures, in particular to the technical field of valve core structures of vacuum valves.
Background
The vacuum valve is a vacuum system element used for changing the air flow direction, adjusting the air flow and cutting off or connecting a pipeline in a vacuum system, the vacuum valve is closed mainly through a valve core, and a fluororubber ring is arranged on the side surface of a sealing plate in the valve core.
The valve core structure of the vacuum valve in the prior art comprises a valve body, wherein a valve port is formed in the valve body, a driving plate is installed in the valve body, the driving plate is connected with an adapter plate through a cam component, the adapter plate is connected with a closing plate capable of closing the valve port through a tensioning piece and a propping piece, the tensioning piece is a tensioning screw, the propping piece is a propping screw, when the sealing force of the closing plate is insufficient, the tensioning screw can be adjusted to a just loosening position, then the propping screw is adjusted to a maximum propping force position, and then the tensioning screw is screwed down, so that the sealing plate can be tightly propped against the inner wall of the valve body to the maximum extent, the adjustment of the sealing force of the valve core structure can be completed, the equipment is not required to be unloaded, and the valve core is not required to be disassembled, so that the operation is simpler and more convenient.
However, the valve core of the vacuum valve does not have a self-cooling function, and when the valve core is used in a vacuum system, a vacuum chamber needs to be heated to a high temperature, heat is conducted to the valve core, so that a fluororubber ring is invalid or a sealing plate is deformed, and the sealing effect of the vacuum valve is affected. Therefore, there is a strong need for a valve core structure of a vacuum valve that can reduce the failure of a fluorine rubber ring or the deformation of a sealing plate.
Disclosure of Invention
The invention aims at: in order to solve the problem that in the prior art, a valve core of a vacuum valve does not have an automatic cooling function, so that a fluorine rubber ring is invalid or a sealing plate is deformed, and the sealing effect of the vacuum valve is affected, the invention provides a valve core structure of the vacuum valve.
The invention adopts the following technical scheme for realizing the purposes:
The valve core structure of the vacuum valve comprises a valve body, wherein a connecting plate is arranged in the valve body, a driving mechanism is connected to the connecting plate, a supporting plate is arranged on the top surface of the connecting plate, and a sealing plate is arranged on the bottom surface of the connecting plate; the support plate is provided with a first water inlet and a first water outlet, the side surface of the support plate is provided with a bent extension water channel communicated with the first water inlet and the first water outlet, and the support plate is provided with a sealing plate capable of sealing the bent extension water channel; the sealing plate is provided with a second water inlet and a second water outlet, the side surface of the sealing plate is provided with an annular water channel communicated with the second water inlet and the second water outlet along the circumferential direction, and the sealing plate is provided with a sealing ring capable of sealing the annular water channel; the first water inlet and the second water inlet are both connected with a water supply device.
Preferably, the first water inlet, the first water outlet, the second water inlet and the second water outlet are all provided with water nozzles, the valve body is connected with an upper cover, and the upper cover is provided with an inlet.
The preferred structure of the driving mechanism is as follows: the driving mechanism comprises a hinge assembly connected with the connecting plate, and a cylinder parallel to the valve body is connected to the hinge assembly.
Preferably, the hinge assembly comprises a driving rod hinged with the connecting plate, an intermediate rod is hinged at the end part of the driving rod, a pushing rod is hinged at the end part of the intermediate rod, and a connecting rod connected with a piston rod of the air cylinder is hinged at the end part of the pushing rod.
Preferably, a plurality of rollers are mounted on two sides of the connecting plate.
The beneficial effects of the invention are as follows:
(1) According to the invention, the water supply device is used for injecting cooling water into the bent extending water channel and the annular water channel, the cooling water entering the bent extending water channel can cool the whole supporting plate, the cooling water entering the annular water channel can reduce the heat transferred to the fluororubber ring, and meanwhile, the temperature of the sealing plate is reduced, so that the possibility of failure of the fluororubber ring or deformation of the sealing plate caused by high temperature can be reduced.
(2) According to the invention, when the water nozzle is arranged, the water supply device is more convenient to connect with the first water inlet, the first water outlet, the second water inlet and the second water outlet, and the water pipe of the water supply device can pass through more positions of the valve core structure by opening the inlet on the upper cover, so that the cooling effect of the whole valve core structure is better.
(3) The air cylinder and the connecting plate are connected through the hinge assembly, and the air cylinder is arranged on the side face of the valve body, preferably parallel to the valve body, so that the overall height of the vacuum valve can be reduced.
(4) The two sides of the connecting plate are provided with the plurality of rollers, and when the air cylinder drives the connecting plate to move in the valve body, the rollers can roll in the valve body, so that the connecting plate is more convenient to drive the sealing plate and the supporting plate to move.
Drawings
FIG. 1 is a schematic perspective view of the present invention;
FIG. 2 is a schematic perspective view of the invention with the valve body removed;
FIG. 3 is a schematic view of the front perspective view of the invention with the valve body and upper cover removed;
FIG. 4 is a schematic view of the rear perspective view of the present invention with the valve body and upper housing removed;
FIG. 5 is a schematic top perspective view of the invention with the valve body and upper cover removed;
FIG. 6 is a schematic view of a partial perspective view of a curved conduit enclosed by a closure plate embodying the present invention;
FIG. 7 is a schematic view of a partial perspective view of a ring-shaped waterway closed by a seal embodying the present invention;
FIG. 8 is a schematic perspective view of a seal ring of the present invention;
FIG. 9 is a schematic view of a perspective view of a curved water channel of the present invention formed in a support plate;
FIG. 10 is a schematic view of the annular waterway of the present invention shown in a three-dimensional configuration on a seal plate;
Reference numerals: the valve comprises a valve body 1, an upper cover 2, an inlet 3, a driving mechanism 4, a driving rod 41, a middle rod 42, a pushing rod 43, a connecting rod 44, a 45 cylinder, a connecting plate 5, a supporting plate 6, a bent extension water channel 61, a first water inlet 62, a first water outlet 63, a water nozzle 7, a sealing plate 8, an annular water channel 81, a second water inlet 82, a second water outlet 83, a sealing plate 9, a roller 10 and a sealing ring 11.
Detailed Description
For the purpose of making the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention, and it is apparent that the described embodiments are some embodiments of the present invention, but not all embodiments of the present invention.
Example 1
As shown in fig. 1-10, the present embodiment provides a valve core structure of a vacuum valve, which comprises a valve body 1, wherein a connecting plate 5 is installed in the valve body 1, a driving mechanism 4 is connected on the connecting plate 5, a supporting plate 6 is installed on the top surface of the connecting plate 5, and a sealing plate 8 is installed on the bottom surface of the connecting plate; the support plate 6 is provided with a first water inlet 62 and a first water outlet 63, the side surface of the support plate 6 is provided with a bent extension water channel 61 communicated with the first water inlet 62 and the first water outlet 63, and the support plate 6 is provided with a closing plate 9 capable of closing the bent extension water channel 61; the sealing plate 8 is provided with a second water inlet 82 and a second water outlet 83, the side surface of the sealing plate 8 is provided with an annular water channel 81 communicated with the second water inlet 82 and the second water outlet 83 along the circumferential direction, and the sealing plate 8 is provided with a sealing ring 11 capable of sealing the annular water channel 81; the first water inlet 62 and the second water inlet 82 are connected with a water supply device.
Preferably, the water nozzle 7 is installed on the first water inlet 62, the first water outlet 63, the second water inlet 82 and the second water outlet 83, the upper cover 2 is connected to the valve body 1, and the inlet 3 is opened on the upper cover 2. Through setting up the water pipe and the first water inlet 62 in the water supply installation of being convenient for more of water nozzle 7, first delivery port 63, second water inlet 82 and the connection of second delivery port 83, through opening on last cover 2 has entry 3, water supply installation's water pipe can follow the mouth of a river business turn over to can pass more positions of this case structure, and then it is better to the cooling effect of whole case structure.
Working principle: the sealing plate 9 is fully welded on the supporting plate 6, the sealing ring 11 is fully welded on the sealing plate 8, and positive pressure leakage detection is carried out, so that cooling water can be prevented from leaking into the valve core structure from the bent water channel 61 and the annular water channel 81, a fluororubber ring for sealing is arranged on the side surface of the sealing plate 8, when the vacuum chamber needs to be heated to 1000 ℃, the optimal use temperature of the sealing ring 11 is less than or equal to 260 ℃, when the temperature is higher than 300 ℃, the fluororubber ring fails at high temperature, and the gate valve is positioned between the vacuum chambers to play a role of partition, so that the sealing plate is influenced by heat radiation, and the area with the highest temperature is the center of the supporting plate 6 and the sealing plate 8;
Therefore, when the temperature of the valve core structure is increased, cooling water can be injected into the first water inlet 62 and the second water inlet 82 through the water supply device, wherein the water supply device can comprise a conventional water chiller, a water pipe and the like, the water pipe is respectively connected with the first water inlet 62, the first water outlet 63, the second water inlet 82 and the second water outlet 83, so that water in the water chiller enters the first water inlet 62 through the water pipe and then enters the curved water-extending channel 61 again, and the cooling water flows out of the first water outlet 63 after flowing through the curved water-extending channel 61, so that the cooling water can circularly cool the supporting plate 6; likewise, cooling water entering the annular water channel 81 through the second water inlet 82 cools the sealing plate 8 and the fluororubber ring, and then flows out through the second water outlet 83, the annular water channel 81 can cool the sealing ring 11 on the sealing plate 8, and the annular water channel 81 can isolate the sealing ring 11 from the heating surface in the center of the sealing plate 8; the support plate 6 is opposite to the heating chamber, so that the bent extension water channel 61 of the support plate 6 is distributed as close to the center of the support plate 6 as possible, and the bent extension water channel 61 is wider than the annular water channel 81 to facilitate heat dissipation, thereby reducing the possibility that the fluorine rubber ring fails or the support plate 6 fails or the sealing plate 8 deforms due to high temperature.
Example 2
As shown in fig. 3 to 5, on the basis of embodiment 1, the present embodiment gives a preferable structure of the driving mechanism 4 as follows: the driving mechanism 4 comprises a hinge assembly connected with the connecting plate 5, an air cylinder 45 parallel to the valve body 1 is connected to the hinge assembly, the hinge assembly comprises a driving rod 41 hinged with the connecting plate 5, the end part of the driving rod 41 is hinged with a middle rod 42, the end part of the middle rod 42 is hinged with a pushing rod 43, the end part of the pushing rod 43 is hinged with a connecting rod 44 connected with a piston rod of the air cylinder 45, and a plurality of rollers 10 are arranged on two sides of the connecting plate 5.
In this embodiment: when the piston rod of the conventional cylinder 45 stretches out or contracts, the connecting rod 44, the pushing rod 43, the middle rod 42 and the driving rod 41 are sequentially driven to move, the driving rod 41 drives the connecting plate 5 to move in the valve body 1, and the connecting plate 5 drives the roller 10 to roll in the valve body 1, so that the connecting plate 5 is more convenient for driving the sealing plate 8 and the supporting plate 6 to move; the cylinder 45 and the connecting plate 5 are connected through the hinge assembly, so that the cylinder 45 is arranged on the side surface of the valve body 1, preferably parallel to the valve body 1, and the overall height of the vacuum valve can be reduced.

Claims (1)

1. The utility model provides a case structure of vacuum valve, includes valve body (1), its characterized in that: a connecting plate (5) is arranged in the valve body (1), a driving mechanism (4) is connected to the connecting plate (5), a supporting plate (6) is arranged on the top surface of the connecting plate (5), and a sealing plate (8) is arranged on the bottom surface of the connecting plate;
The support plate (6) is provided with a first water inlet (62) and a first water outlet (63), the side surface of the support plate (6) is provided with a bent extension water channel (61) communicated with the first water inlet (62) and the first water outlet (63), and the support plate (6) is provided with a sealing plate (9) capable of sealing the bent extension water channel (61);
The sealing plate (8) is provided with a second water inlet (82) and a second water outlet (83), the side surface of the sealing plate (8) is provided with an annular water channel (81) communicated with the second water inlet (82) and the second water outlet (83) along the circumferential direction, and the sealing plate (8) is provided with a sealing ring (11) capable of sealing the annular water channel (81);
the first water inlet (62) and the second water inlet (82) are connected with a water supply device;
The water faucet (7) is arranged on the first water inlet (62), the first water outlet (63), the second water inlet (82) and the second water outlet (83), the valve body (1) is connected with an upper cover (2), and the upper cover (2) is provided with an inlet (3);
The driving mechanism (4) comprises a hinge assembly connected with the connecting plate (5), and an air cylinder (45) arranged in parallel with the valve body (1) is connected to the hinge assembly;
The hinge assembly comprises a driving rod (41) hinged with the connecting plate (5), an intermediate rod (42) is hinged at the end part of the driving rod (41), a pushing rod (43) is hinged at the end part of the intermediate rod (42), and a connecting rod (44) connected with a piston rod of the air cylinder (45) is hinged at the end part of the pushing rod (43);
A plurality of rollers (10) are arranged on two sides of the connecting plate (5).
CN202111117813.5A 2021-09-23 2021-09-23 Valve core structure of vacuum valve Active CN113932024B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202111117813.5A CN113932024B (en) 2021-09-23 2021-09-23 Valve core structure of vacuum valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202111117813.5A CN113932024B (en) 2021-09-23 2021-09-23 Valve core structure of vacuum valve

Publications (2)

Publication Number Publication Date
CN113932024A CN113932024A (en) 2022-01-14
CN113932024B true CN113932024B (en) 2024-06-14

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CN202111117813.5A Active CN113932024B (en) 2021-09-23 2021-09-23 Valve core structure of vacuum valve

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* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119572807A (en) * 2024-11-29 2025-03-07 浙江晶泰半导体有限公司 Water-cooled gate valve for single crystal furnace

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CN205689875U (en) * 2016-06-13 2016-11-16 浙江迎日阀门制造有限公司 Lever Pneumatic stop valve
CN208845766U (en) * 2018-09-21 2019-05-10 沈阳爱科斯科技有限公司 High temperature gate valve and continuous vacuum coating device
CN212672431U (en) * 2020-05-29 2021-03-09 成都中科唯实仪器有限责任公司 Vacuum gate valve

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Publication number Priority date Publication date Assignee Title
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CN205689875U (en) * 2016-06-13 2016-11-16 浙江迎日阀门制造有限公司 Lever Pneumatic stop valve
CN208845766U (en) * 2018-09-21 2019-05-10 沈阳爱科斯科技有限公司 High temperature gate valve and continuous vacuum coating device
CN212672431U (en) * 2020-05-29 2021-03-09 成都中科唯实仪器有限责任公司 Vacuum gate valve

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