CN113898671B - Air-floating rotary table - Google Patents

Air-floating rotary table Download PDF

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Publication number
CN113898671B
CN113898671B CN202111199212.3A CN202111199212A CN113898671B CN 113898671 B CN113898671 B CN 113898671B CN 202111199212 A CN202111199212 A CN 202111199212A CN 113898671 B CN113898671 B CN 113898671B
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CN
China
Prior art keywords
air
air guide
electric control
main shaft
base
Prior art date
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Application number
CN202111199212.3A
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Chinese (zh)
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CN113898671A (en
Inventor
陈万群
滕翔宇
霍德鸿
陈高强
丁辉
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Jiangsu Jijingkai High End Equipment Technology Co ltd
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Jiangsu Jijingkai High End Equipment Technology Co ltd
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Application filed by Jiangsu Jijingkai High End Equipment Technology Co ltd filed Critical Jiangsu Jijingkai High End Equipment Technology Co ltd
Priority to CN202111199212.3A priority Critical patent/CN113898671B/en
Publication of CN113898671A publication Critical patent/CN113898671A/en
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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00Bearings not otherwise provided for
    • F16C32/06Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0603Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion
    • F16C32/0614Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings supported by a gas cushion, e.g. an air cushion the gas being supplied under pressure, e.g. aerostatic bearings
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00Bearings not otherwise provided for
    • F16C32/06Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0662Details of hydrostatic bearings independent of fluid supply or direction of load
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16CSHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00Bearings not otherwise provided for
    • F16C32/06Bearings not otherwise provided for with moving member supported by a fluid cushion formed, at least to a large extent, otherwise than by movement of the shaft, e.g. hydrostatic air-cushion bearings
    • F16C32/0681Construction or mounting aspects of hydrostatic bearings, for exclusively rotary movement, related to the direction of load
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16FSPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F15/00Suppression of vibrations in systems; Means or arrangements for avoiding or reducing out-of-balance forces, e.g. due to motion
    • F16F15/02Suppression of vibrations of non-rotating, e.g. reciprocating systems; Suppression of vibrations of rotating systems by use of members not moving with the rotating systems
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01DMEASURING NOT SPECIALLY ADAPTED FOR A SPECIFIC VARIABLE; ARRANGEMENTS FOR MEASURING TWO OR MORE VARIABLES NOT COVERED IN A SINGLE OTHER SUBCLASS; TARIFF METERING APPARATUS; MEASURING OR TESTING NOT OTHERWISE PROVIDED FOR
    • G01D11/00Component parts of measuring arrangements not specially adapted for a specific variable

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Acoustics & Sound (AREA)
  • Aviation & Aerospace Engineering (AREA)
  • General Physics & Mathematics (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Machine Tool Units (AREA)

Abstract

The invention discloses an air floatation rotary table, and relates to the field of precision instruments. The device comprises a turntable, an air guide bearing, a main shaft and a base, wherein the top end of the base is fixedly connected with the bottom end of the air guide bearing; the motor is connected inside the base in a sliding way, and the power output end of the motor is connected with the main shaft; the air guide bearing is internally provided with an air guide mechanism which is used for conveying high-pressure air into the cavity. According to the invention, the control panel can control the opening and closing areas of the electric control three-way valve and the electric control air outlet valve according to the pressure value in the air guide mechanism, so that the stable lifting of the rotating shaft is realized, and the precision of the air floating platform is ensured.

Description

Air-floating rotary table
Technical Field
The invention relates to the field of precise instruments, in particular to an air floatation rotary table.
Background
In application scenes such as scientific research, precision measurement of high-end manufacturing industry and the like, a plurality of high-precision rotary tables are often used, and the detected objects are detected or quality controlled by rotating the detected objects by 360 degrees and matching with corresponding detection equipment.
The air-floating rotary table (air rotary table) has the advantages of high precision, high rotating speed, no friction, no lubrication, no noise, excellent speed control performance and the like by introducing air into the bearing cavity and supporting the main shaft by utilizing the impact force of high-pressure air in the bearing cavity; as the technology of the air-float turntable is mature, the air-float turntable is widely applied.
At present, the air flotation turntable in the market stops supplying air to the bearing cavity immediately after the use is finished, so that when the air flotation turntable stops working, the main shaft drops rapidly, the damage to internal parts is easy to occur, the working accuracy of the air flotation turntable is affected, the service lives of air flotation lifting components such as the main shaft are reduced, and therefore, the air flotation turntable capable of stably lifting the main shaft and other components is necessary to be provided, the working accuracy of the air flotation platform is guaranteed, and the service life of the air flotation platform is prolonged.
Disclosure of Invention
In order to solve the technical problems, the invention adopts the following technical scheme:
the air-floating turntable comprises a turntable body, an air guide bearing, a main shaft and a base, wherein the top end of the base is fixedly connected with the bottom end of the air guide bearing, the main shaft is arranged in the air guide bearing, the main shaft and the air guide bearing are in clearance fit to form a cavity, and the top end of the main shaft is fixedly connected with the turntable body;
the motor is connected inside the base in a sliding way, and the power output end of the motor is connected with the main shaft;
the air guide bearing is internally provided with an air guide mechanism which is used for conveying high-pressure air into the cavity.
Further, the air guide mechanism comprises an air guide pipe, an air inlet, an electric control three-way valve, an electric control air outlet valve and an air outlet, wherein the air inlet is arranged on the outer side face of the air guide bearing, the air inlet is connected with the air outlet through the air guide pipe, and the electric control three-way valve is arranged inside the air guide pipe and all through holes of the electric control three-way valve are connected with the air guide pipe.
Further, the device also comprises an air pressure sensor and an electric control panel, wherein the air pressure sensor is arranged in the air duct and used for monitoring air pressure in the air duct, and the electric control panel is respectively and electrically connected with the air pressure sensor, the electric control three-way valve and the electric control air outlet valve.
Further, the electric control panel is provided with a data recording processing module and an electric control module, the data recording processing module is used for recording and processing the pressure value measured by the air pressure sensor, and the electric control module is used for controlling the valve opening and closing areas of the electric control three-way valve and the electric control air outlet valve.
Further, the rotary table comprises a rotary speed sensing mechanism, wherein the rotary speed sensing mechanism comprises a sensing block and a sensing device, the sensing block is arranged at the bottom end of the rotary table, and the sensing device is arranged at the top end of the air guide bearing.
Further, a buffer cushion is further arranged inside the base, and the buffer cushion is installed between the base and the motor.
Further, sliding grooves are formed in two sides of the inside of the base, and the motor is slidably connected in the sliding grooves
The invention has the beneficial effects that:
according to the air-floating turntable, the air guide mechanism is arranged in the air guide bearing, and comprises an air guide pipe, an air inlet, an electric control three-way valve and an electric control air outlet valve, wherein the air inlet is arranged on the outer side face of the air guide bearing, the air inlet is connected with the air outlet through the air guide pipe, the electric control three-way valve is arranged in the air guide pipe, three through holes of the electric control three-way valve are all connected with the air guide pipe, an air pressure sensor is arranged in the air guide pipe, the electric control three-way valve and the electric control air outlet valve are electrically connected with the electric control panel, the electric control panel controls the opening and closing areas of the electric control three-way valve and the electric control air outlet valve according to the air pressure value measured by the air pressure sensor in the air guide mechanism, so that the main shaft can stably ascend and descend, the precision of the air-floating platform is ensured, and the service life of a workpiece is prolonged;
the rotating speed sensing mechanism can monitor the rotating speed and the deviation condition of the turntable in real time, judge the lifting condition of the main shaft of the air floatation turntable, and adjust the lifting speed of the main shaft by controlling the opening and closing areas of the electric control three-way valve and the electric control air outlet valve so as to realize the precise rotation of the air floatation platform.
Drawings
FIG. 1 is a schematic cross-sectional view of an air-floating turntable according to the present invention.
Fig. 2 is an enlarged view of a portion a.
Wherein, in the figure:
1-a turntable; 2-a sensing block; 3-induction means; 4-an air guide bearing; 5-an airway; 6-air inlet; 7-an electric control three-way valve; 8-a main shaft; 9-a base; 10-an electric motor; 11-an electric control air outlet valve; 12-an air outlet; 13-cushion pad.
Detailed Description
The technical solutions of the embodiments of the present invention will be clearly and completely described below with reference to fig. 1-2 of the embodiments of the present invention, and it is obvious that the described embodiments are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Examples
The embodiment provides an air floatation rotary table combining with fig. 1-2, which comprises a rotary table 1, an air guide bearing 4, a main shaft 8 and a base 9, wherein the top end of the base 9 is fixedly connected with the bottom end of the air guide bearing 4, the main shaft 8 is arranged inside the air guide bearing 4, the main shaft 8 and the air guide bearing 4 are in clearance fit to form a cavity, and the top end of the main shaft 8 is fixedly connected with the rotary table 1.
An air guide mechanism is arranged in the air guide bearing 4 and is used for conveying high-pressure air into the cavity; the air guide mechanism comprises an air guide pipe 5, an air inlet 6, an electric control three-way valve 7, an electric control air outlet valve 11 and an air outlet 12, wherein the air inlet 6 is arranged on the outer side face of the air guide bearing 4, the air inlet 6 is connected with the air outlet 12 through the air guide pipe 5, the electric control three-way valve 7 is arranged in the air guide pipe, and each air outlet of the electric control three-way valve 7 is connected with the air guide pipe 5; when the air guide mechanism works, high-pressure air is introduced into the air inlet 6, the high-pressure air respectively enters each air guide branch through the electric control three-way valve 7, the opening and closing sizes of all the openings of the electric control three-way valve 7 are controlled, all the air guide branches are ventilated, the high-pressure air in all the air guide branches acts on the main shaft 8 through the air outlets, the air support to the main shaft 8 is realized through the difference value of the impact force of the high-pressure air of all the air guide branches, and the air outlets at the left side and the right side of the main shaft 8 are used for balancing the load at the two sides of the main shaft 8.
The motor 10 is connected to the inside of the base 9 in a sliding way, sliding grooves are formed in two sides of the inside of the base 9, and the motor 10 is connected to the inside of the sliding grooves in a sliding way; the power output end of the motor 10 is connected with the main shaft 8, the motor 10 is in clearance fit with the top of the base 9, a lifting space of the motor 10 is formed, and the motor 10 can lift along with the main shaft 8.
The air pressure sensor is arranged in the air duct 5 and is used for monitoring air pressure in the air duct 5, and the electric control panel is respectively and electrically connected with the air pressure sensor, the electric control three-way valve 7 and the electric control air outlet valve 11.
The electronic control panel is provided with a data recording processing module and an electronic control module, the data recording processing module is used for recording and processing the pressure value measured by the air pressure sensor, and the electronic control module controls the valve opening and closing areas of the electronic control three-way valve 7 and the electronic control air outlet valve 11 according to the pressure value measured by the air pressure sensor.
Still include rotational speed induction mechanism, rotational speed induction mechanism includes sensing piece 2 and induction system 3, sensing piece 2 install in revolving stage 1 bottom, induction system 3 install in air guide bearing (4) top, rotational speed induction mechanism's theory of operation is, when revolving stage 1 rotates, install in sensing piece 2 of revolving stage 1 bottom follows and rotates, induction system 3 calculates the record between the rotational speed of sensing piece 2 and the two, through automatically controlled panel control the rotational speed of motor 10 power take off end to cooperate automatically controlled panel control automatically controlled three way valve 7 and automatically controlled air outlet valve 11's opening and closing area to change air guide mechanism's high-pressure air injection volume, and then control the elevating height of main shaft 8.
In this embodiment, the main shaft 8 is an i-shaped main shaft, the shaft diameters of two ends of the main shaft are larger than the shaft diameter of the middle part, and the air guide bearings 4 are installed in grooves on two sides of the i-shaped main shaft, so that the air guide mechanism in the air guide bearings 4 can conveniently support the main shaft in air.
As an optimization, a buffer cushion 13 is further arranged inside the base 9, and the buffer cushion is installed between the base 9 and the motor 10, and provides a buffer function to protect the main shaft 8 when the main shaft descends.
As optimization, a plurality of air outlets of the air guide branch can be arranged, so that the air guide mechanism has more action points on the air support of the main shaft 8, and the supporting effect is more stable.
According to the air floating turntable, the opening and closing areas of the electric control three-way valve and the electric control air outlet valve can be controlled by the control electric control panel according to the air pressure value measured by the air pressure sensor in the air guide mechanism, so that stable lifting of the rotating shaft is realized, and the precision of the air floating platform is ensured; the rotating speed sensing mechanism can monitor the rotating speed and the deviation condition of the turntable in real time, judge the lifting condition of the main shaft of the air-float turntable, and adjust the main shaft by controlling the opening and closing areas of the electric control three-way valve and the electric control air outlet valve.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to the embodiments described above will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (4)

1. The air floatation rotary table is characterized by comprising a rotary table (1), an air guide bearing (4), a main shaft (8) and a base (9), wherein the top end of the base (9) is fixedly connected with the bottom end of the air guide bearing (4), the main shaft (8) is arranged in the air guide bearing (4), the main shaft (8) and the air guide bearing (4) are in clearance fit to form a cavity, and the top end of the main shaft (8) is fixedly connected with the rotary table (1);
the motor (10) is connected inside the base (9) in a sliding way, and the power output end of the motor (10) is connected with the main shaft (8);
an air guide mechanism is arranged in the air guide bearing (4) and used for conveying high-pressure air into the cavity;
the air guide mechanism comprises an air guide pipe (5), an air inlet (6), an electric control three-way valve (7), an electric control air outlet valve (11) and an air outlet (12), wherein the air inlet (6) is arranged on the outer side face of the air guide bearing (4), the air inlet (6) is connected with the air outlet (12) through the air guide pipe (5), the electric control three-way valve (7) is arranged in the air guide pipe, and all the through holes of the electric control three-way valve (7) are connected with the air guide pipe (5);
the air pressure sensor is arranged in the air duct (5) and is used for monitoring air pressure in the air duct (5), and the electric control panel is respectively and electrically connected with the air pressure sensor, the electric control three-way valve (7) and the electric control air outlet valve (11);
the electronic control panel is provided with a data recording processing module and an electronic control module, the data recording processing module is used for recording and processing the pressure value measured by the air pressure sensor, and the electronic control module is used for controlling the valve opening and closing areas of the electronic control three-way valve (7) and the electronic control air outlet valve (11).
2. An air flotation turntable as claimed in claim 1, further comprising a rotation speed sensing mechanism electrically connected to the electrical control panel, the rotation speed sensing mechanism comprising a sensing block (2) and a sensing device (3), the sensing block (2) being mounted at the bottom end of the turntable (1), the sensing device (3) being mounted at the top end of the air guide bearing (4).
3. An air bearing turret according to claim 1, characterized in that the base (9) is also internally provided with a cushion (13), said cushion (13) being mounted between the base (9) and the motor (10).
4. An air-floating turntable according to claim 1, characterized in that the two sides of the interior of the base (9) are provided with sliding grooves, and the motor (10) is slidably connected in the sliding grooves.
CN202111199212.3A 2021-10-14 2021-10-14 Air-floating rotary table Active CN113898671B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202111199212.3A CN113898671B (en) 2021-10-14 2021-10-14 Air-floating rotary table

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202111199212.3A CN113898671B (en) 2021-10-14 2021-10-14 Air-floating rotary table

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CN113898671A CN113898671A (en) 2022-01-07
CN113898671B true CN113898671B (en) 2024-01-30

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Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN119222243A (en) * 2024-09-20 2024-12-31 浙江求是半导体设备有限公司 Air spindle

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102172854A (en) * 2011-03-07 2011-09-07 天津大学 Load matching device for ultrasonic machining
CN103542241A (en) * 2013-09-25 2014-01-29 广州市昊志机电股份有限公司 Air flotation type rotary table
CN108279714A (en) * 2018-01-11 2018-07-13 中国机械工业集团有限公司 A kind of distribution line traffic control pressure feedback offset-type air supporting vibration control system
CN110030266A (en) * 2019-03-27 2019-07-19 浙江工业大学 A kind of aerostatic bearing gas film pressure vector control apparatus
CN110449921A (en) * 2019-08-20 2019-11-15 江苏集萃精凯高端装备技术有限公司 A kind of gas-static turntable and its starting protection, locking method
CN113266645A (en) * 2021-04-30 2021-08-17 赵智亮 Electric air-float rotary table

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US11067124B2 (en) * 2018-07-23 2021-07-20 Alio Industries, Inc. Planar rotary air bearing stage

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102172854A (en) * 2011-03-07 2011-09-07 天津大学 Load matching device for ultrasonic machining
CN103542241A (en) * 2013-09-25 2014-01-29 广州市昊志机电股份有限公司 Air flotation type rotary table
CN108279714A (en) * 2018-01-11 2018-07-13 中国机械工业集团有限公司 A kind of distribution line traffic control pressure feedback offset-type air supporting vibration control system
CN110030266A (en) * 2019-03-27 2019-07-19 浙江工业大学 A kind of aerostatic bearing gas film pressure vector control apparatus
CN110449921A (en) * 2019-08-20 2019-11-15 江苏集萃精凯高端装备技术有限公司 A kind of gas-static turntable and its starting protection, locking method
CN113266645A (en) * 2021-04-30 2021-08-17 赵智亮 Electric air-float rotary table

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