CN113866887A - Optical device and manufacturing method thereof - Google Patents

Optical device and manufacturing method thereof Download PDF

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Publication number
CN113866887A
CN113866887A CN202111173183.3A CN202111173183A CN113866887A CN 113866887 A CN113866887 A CN 113866887A CN 202111173183 A CN202111173183 A CN 202111173183A CN 113866887 A CN113866887 A CN 113866887A
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optical
face
optical fiber
film
output port
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徐秋霜
潘晓晓
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Shenzhen Dongyan Communication Technology Co ltd
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Shenzhen Dongyan Communication Technology Co ltd
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Priority to CN202111173183.3A priority Critical patent/CN113866887A/en
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    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/25Preparing the ends of light guides for coupling, e.g. cutting
    • GPHYSICS
    • G02OPTICS
    • G02BOPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B6/00Light guides; Structural details of arrangements comprising light guides and other optical elements, e.g. couplings
    • G02B6/24Coupling light guides
    • G02B6/26Optical coupling means

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Optical Couplings Of Light Guides (AREA)

Abstract

The invention discloses an optical device and a manufacturing method thereof. The optical device includes an optical waveguide member on which a first optical input/output port and a second optical input/output port are provided, the first optical input/output port including a first connection portion; the optical fiber connector also comprises a first optical fiber in contact connection with the first connecting part; an optical film is arranged on the end face of the first connecting part connected with the first optical fiber, and an optical film is arranged on the end face of the first optical fiber connected with the first connecting part; the optical film adjusts the energy of the passing light, or selects a light beam with a preset wavelength from the passing light, or selects a light beam with a preset polarization direction from the passing light. The optical film realizes the functions of anti-reflection, anti-transmission, filtering or polarized light selection, and the seamless optical coupling and butt joint technology of the optical fiber and the optical waveguide component is adopted, so that the problem that the optical device fails due to the performance reduction of the ultraviolet curing medium under the irradiation of high-power light for a long time is solved, and the optical film can be used for a high-power system.

Description

Optical device and manufacturing method thereof
Technical Field
The invention relates to the technical field of optical communication, in particular to an optical device and a manufacturing method thereof.
Background
In an optical device based on an optical waveguide chip and input and/or output through an optical fiber, an ultraviolet curable medium (glue) is usually disposed at a connection gap between the optical fiber and the optical waveguide chip, and the medium is an organic substance to realize connection or other optical functions. For example, when the optical device is an optical power distribution device, the medium also has the function of reducing emission and light scattering at the gap. However, in practical use of these optical devices, it is found that when the optical power of the passing light exceeds a certain value (about 500 mW), the medium at the joint seam is shrunk or the light transmittance is reduced after being irradiated with high-power light for a long time, so that the optical device fails and high-power transmission cannot be realized.
For example, a planar lightwave circuit optical splitter is one of the optical devices, and is a kind of optical power distribution device commonly used in optical fiber communication systems at present, and is characterized by integration, miniaturization and high reliability. Its working principle is that in the circuit the light transmission power in one optical fibre is divided into several channels by means of guide of optical waveguide, and respectively outputted into several optical fibres. In the structural design, the optical coupling and optical transmission between the optical waveguide component and the optical fiber require almost 100% of coupling efficiency, so that a medium (glue) which has a certain refractive index and can be cured by ultraviolet light is required to be coated in a connecting seam between the optical fiber and the optical waveguide component, and the aim is to eliminate the end surface reflection and light scattering generated after an air gap is formed at a butt joint part after the end surface of the optical waveguide and the end surface of the optical fiber are ground and polished, avoid the optical power attenuation caused by the reflection and scattering, increase stray light signals for an optical path, reduce the coupling efficiency of the optical path and the like.
Disclosure of Invention
The present invention is directed to at least solve the problems of the prior art, and more particularly to an optical device and a method for manufacturing the same.
In order to achieve the above object of the present invention, according to a first aspect of the present invention, there is provided an optical device including an optical waveguide member on which a first optical input/output port and a second optical input/output port are provided, the first optical input/output port including at least one first connection portion; the first optical fiber is in contact connection with the first connecting part; an optical film is arranged on the end face of the first connecting part connected with the first optical fiber, and/or an optical film is arranged on the end face of the first optical fiber connected with the first connecting part; the end face of the first connecting part, which is connected with the first optical fiber, is a flat and smooth end face, and the end face of the first optical fiber, which is connected with the first connecting part, is a flat and smooth end face; the optical film adjusts the energy of the passing light, or selects a light beam with a preset wavelength from the passing light, or selects a light beam with a preset polarization direction from the passing light.
The technical scheme is as follows: the optical fiber and optical waveguide component seamless optical coupling butt joint technology is adopted, after the optical film is plated on the first optical fiber end face and/or the first connecting part end face, optical coupling is achieved in a seamless contact connection mode of the two end faces, and an ultraviolet curing medium with performance reduced under the irradiation of long-term high optical power is abandoned. In addition, the energy of the transmitted light of the optical film, the wavelength of the output light beam or the polarization direction of the output beam can be adjusted through the optical film, the functions of reflection and reflection increasing, reflection and transmission increasing, filtering or polarized light selecting are achieved, compared with the situation that the same function is achieved through other optical functional devices, the space can be reduced, and the whole volume of the optical device can be smaller. When the optical film has antireflection action, the reflected light and the scattered light at the joint can be further reduced, and the light loss at the joint and the temperature at the joint can be further reduced.
In order to achieve the above object of the present invention, according to a second aspect of the present invention, there is provided an optical device manufacturing method for manufacturing the optical device according to the first aspect of the present invention, comprising steps S1 and/or S2, and steps S3; step S1, clamping the first optical fiber by the first clamping component, grinding and polishing the end face of the first optical fiber together with the end face of the first clamping component, and plating an optical film on at least the end face of the first optical fiber after grinding and polishing; step S2, grinding and polishing the fiber output end face of the optical waveguide component where the first optical input/output port is located, and plating an optical film at least on the first connection end face of the first optical input/output port after grinding and polishing; step S3 is to contact and connect the first fiber end face with the first connector end face.
The technical scheme is as follows: the end face to be coated is subjected to advanced grinding and polishing, so that the diffuse reflection of the end face and the coverage uniformity of the optical film can be reduced. The optical coupling is realized by seamless contact connection of the two end surfaces, the seamless optical coupling butt joint technology of the optical fiber and the optical waveguide component is adopted, after the optical film is plated on the first optical fiber end surface and/or the first connecting part end surface, the optical coupling is realized by seamless contact connection of the two end surfaces, and an ultraviolet curing medium with performance reduced under the irradiation of long-term high optical power is abandoned. In addition, the energy of the transmitted light of the optical film, the wavelength of the output light beam or the polarization direction of the output beam can be adjusted through the optical film, the functions of reflection and reflection increasing, reflection and transmission increasing, filtering or polarized light selecting are achieved, compared with the situation that the same function is achieved through other optical functional devices, the space can be reduced, and the whole volume of the optical device can be smaller. When the optical film has antireflection action, the reflected light and the scattered light at the joint can be further reduced, and the light loss at the joint and the temperature at the joint can be further reduced.
Drawings
FIG. 1 is a schematic diagram of an optical device according to an embodiment of the present invention.
Reference numerals:
1 a first optical fiber; 2 a first clamping member; 3 an optical waveguide member; 4 a second clamping member; 5 a second optical fiber; 6 an optical film.
Detailed Description
Reference will now be made in detail to embodiments of the present invention, examples of which are illustrated in the accompanying drawings, wherein like or similar reference numerals refer to the same or similar elements or elements having the same or similar function throughout. The embodiments described below with reference to the accompanying drawings are illustrative only for the purpose of explaining the present invention, and are not to be construed as limiting the present invention.
In the description of the present invention, it is to be understood that the terms "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate orientations or positional relationships based on those shown in the drawings, and are used merely for convenience in describing the present invention and for simplicity in description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present invention.
In the description of the present invention, unless otherwise specified and limited, it is to be noted that the terms "mounted," "connected," and "connected" are to be interpreted broadly, and may be, for example, a mechanical connection or an electrical connection, a communication between two elements, a direct connection, or an indirect connection via an intermediate medium, and specific meanings of the terms may be understood by those skilled in the art according to specific situations.
The invention discloses an optical device, which comprises an optical waveguide component 3, wherein a first optical input/output port and a second optical input/output port are arranged on the optical waveguide component 3, and the first optical input/output port comprises at least one first connecting part; the optical fiber connector also comprises a first optical fiber 1 in contact connection with the first connecting part; an optical film 6 is arranged on the end face of the first connecting part connected with the first optical fiber 1, and/or an optical film 6 is arranged on the end face of the first optical fiber 1 connected with the first connecting part; the optical film 6 adjusts the energy of the passing light, or selects a light beam of a predetermined wavelength from the passing light, or selects a light beam of a predetermined polarization direction from the passing light. The passing light refers to light passing through the optical film 6.
In the present embodiment, the optical waveguide member 3 is preferably, but not limited to, a planar optical waveguide device. The first optical input/output port is a first optical fiber connection port, and preferably, the number of the first connection portions is 1 or more than 1, as shown in fig. 1, the number of the first connection portions is 1, and the number of the first optical fibers 1 is also 1. Of course, if the number of the first connecting portions is greater than 1 and the number of the first optical fibers 1 is greater than 1, the plurality of first optical fibers 1 may constitute an optical fiber array type input.
In the present embodiment, the first optical input/output port and the second optical input/output port may be on the same end surface of the optical waveguide member 3, or may be on different end surfaces as shown in fig. 1. The second optical input/output port may be a port connected to an optical fiber (as shown in fig. 1) or a port directly outputting light to the outside.
In the present embodiment, for convenience of description, the end surface of the first connection portion connected to the first optical fiber 1 is referred to as a first connection portion end surface, and the end surface of the first optical fiber 1 connected to the first connection portion is referred to as a first optical fiber 1 end surface. The terminal surface of being connected with first optic fibre 1 of first connecting portion is for leveling smooth terminal surface, and the terminal surface of being connected with first connecting portion of first optic fibre 1 is for leveling smooth terminal surface, and is concrete, and first connecting portion terminal surface and 1 terminal surface of first optic fibre are leveling smooth terminal surface, can grind the polishing to two terminal surfaces before plating optical film 6 and handle in order to obtain leveling smooth terminal surface, the gap between two terminal surfaces when being favorable to reducing the contact connection. In order to reduce transmission loss, it is further preferable that the optical axes of the end face of the first connecting portion and the end face of the first optical fiber 1 are on the same straight line to achieve optical path alignment with less optical energy path loss.
In this embodiment, the optical film 6 is preferably an antireflection film, a reflection/reflection increasing film, a light filter film, or a polarizing film. The end face of the first connecting part is in seamless contact connection with the end face of the first optical fiber 1, so that scattering of the end faces can be reduced, the temperature of the connecting part can be reduced, and meanwhile, the optical film 6 is stable and unaffected under long-time high-power light irradiation, so that the optical device provided by the invention can be applied to the field of high power. When the optical film 6 is an antireflection film or an antireflection film, light energy with different sizes can be obtained at the transmission end of the optical film 6 by arranging the optical film 6 with different ratios of transmitted light to reflected light. When the optical film 6 is a filter film, light having the same wavelength as the preset filtering wavelength of the filter film 6 can be filtered from the incident light of the optical film 6, so as to achieve the purpose of adjusting the wavelength of the output light. When the optical film 6 is a polarizing film, light rays with the same output polarization direction as the preset output polarization direction of the optical film 6 can be selected from the incident light rays of the optical film 6, so that the purpose of screening the output light polarization direction is achieved.
In the present embodiment, the optical film 6 may be provided only at the first-connection-portion end face, or may be provided only at the first optical fiber 1 end face, or may be provided at both the first-connection-portion end face and the first optical fiber 1 end face. When the optical films 6 are disposed on the end faces of the first connecting portion and the first optical fiber 1, the two optical films 6 may have the same function, for example, both of the optical films may be an anti-reflection film, a transmission film, a light filter film, or a polarizing film, so as to enhance the light function of the optical films 6. The two functions can also be different, for example, the optical film 6 on the end face of the first connection part is a filter film, and the optical film 6 on the end face of the first optical fiber 1 is an anti-reflection and anti-reflection film, so that the light rays filtered by the optical film 6 on the end face of the first connection part can enter the optical waveguide component 3 as completely as possible; for another example, the optical film 6 on the end face of the first connection portion is a polarizing film, and the optical film 6 on the end face of the first optical fiber 1 is an antireflection film, so as to ensure that all the light rays in the polarization direction selected by the optical film 6 on the end face of the first connection portion enter the optical waveguide component 3 as far as possible.
In the present embodiment, as shown in fig. 1, the optical waveguide member 3 is preferably provided with optical waveguide microstrip lines connected to the first optical input/output port and the second optical input/output port, respectively, and the optical waveguide microstrip lines function to split or couple light or to transmit only light (i.e., neither split nor couple light).
In the present embodiment, it is preferable that the optical fiber connector further includes a first clamping member 2 for clamping the first optical fiber 1. The first clamping member 2 is preferably, but not limited to, a capillary tube.
In a preferred embodiment, when the second optical input/output port is connected with an optical fiber, the second optical input/output port is applicable to a large optical power scene, and comprises at least one second connecting part and a second optical fiber 5 in contact connection with the second connecting part; an optical film 6 is provided on the end face of the second connection portion connected to the second optical fiber 5, and/or an optical film 6 is provided on the end face of the second optical fiber 5 connected to the second connection portion. The optical film 6 adjusts the energy of the passing light, or selects a light beam of a predetermined wavelength from the passing light, or selects a light beam of a predetermined polarization direction from the passing light. The passing light refers to light passing through the optical film 6. The function of the optical film 6 is the same as that of the previous optical film 6 (the optical film 6 on the end face of the first connection portion and/or the end face of the first optical fiber 1), and will not be described in detail.
In the present embodiment, the number of the second connection portions may be plural or 1, and similarly, the number of the second optical fibers 5 may be one or plural, and as shown in fig. 1, the number of the second connection portions and the number of the second optical fibers 5 are plural. The second optical fibers 5 are plural and constitute an optical fiber array. For the sake of convenience of description, the end surface of the second connection portion connected to the second optical fiber 5 is named a second connection portion end surface, and the end surface of the second optical fiber 5 connected to the second connection portion is named a second optical fiber 5 end surface. Further preferably, the end faces of the second connecting portion and the second optical fiber 5 are flat and smooth end faces, and both end faces may be subjected to grinding and polishing treatment before plating the optical film 6 to obtain flat and smooth end faces, so as to reduce a gap existing at the time of contact connection. In order to reduce transmission loss, it is further preferable that the optical axes of the end faces of the second connecting portion and the second optical fiber 5 are aligned on the same straight line, and optical path alignment is performed.
In the present embodiment, the optical film 6 is provided only on the second connecting portion end face, the optical film 6 is provided only on the second optical fiber 5 end face, or the optical film 6 is provided on both the second connecting portion end face and the second optical fiber 5 end face.
In the present embodiment, the optical film 6 provided at the end face of the first connecting portion and/or the end face of the first optical fiber 1 may or may not have the same function as the optical film 6 provided at the end face of the second connecting portion or the end face of the second optical fiber 5, and may be specifically provided as needed.
In the present embodiment, it is preferable that the optical fiber connector further includes a second clamping member 4 for clamping the second optical fiber 5. Preferably, the second holding member 4 is a fiber array substrate.
In a preferred embodiment, the optical device further comprises a substrate, and the substrate is used for fixing the optical device and can be fixed by gluing or thermal curing.
The present invention also discloses an optical device manufacturing method for manufacturing the above optical device, which in a preferred embodiment includes step S1 and/or step S2, and step S3;
step S1, the first optical fiber 1 is clamped by the first clamping member 2, the end face of the first optical fiber 1 together with the end face of the first clamping member 2 is ground and polished, and after grinding and polishing, the optical film 6 is plated at least on the end face of the first optical fiber 1, so as to save the optical film liquid. Specifically, the entire end face of the entire first clamping member 2 may be coated to ensure that the end face of the first optical fiber 1 is coated with the optical film 6 for implementation. The optical film 6 is preferably, but not limited to, applied by existing vacuum coating techniques.
Step S2, the fiber output end face of the first optical input/output port on the optical waveguide component 3 is ground and polished, and after grinding and polishing, the optical film 6 is plated at least on the first connection end face of the first optical input/output port, so as to save the optical film liquid. Specifically, the entire fiber exit end face where the first optical input/output port is located may be plated to ensure that the first connection end face is plated with the optical film 6 for implementation.
Step S3, the end face of the first optical fiber 1 is connected to the end face of the first connecting portion in a contact manner, preferably, the end face of the first optical fiber 1 is connected to the end face of the first connecting portion in a seamless contact manner after being optically aligned, where alignment refers to optical axis alignment, and the alignment can be performed by using an existing optical device.
In a preferred embodiment, the manufacturing method further comprises step a and/or step B, and step C;
step A, clamping a second optical fiber 5 through a second clamping part 4, grinding and polishing the end face of the second optical fiber 5 together with the end face of the second clamping part 4, and plating an optical film 6 on at least the end face of the second optical fiber 5 or the whole end face of the second clamping part 4 with the optical film 6 after grinding and polishing;
step B, grinding and polishing the fiber outlet end face of the second optical input/output port on the optical waveguide component 3, and plating an optical film 6 on at least the second connecting part end face of the second optical input/output port or the whole fiber outlet end face of the second optical input/output port after grinding and polishing;
and step C, connecting the end face of the second optical fiber 5 with the end face of the second connecting part in a contact manner.
In the present embodiment, it is preferable that the end face of the second optical fiber 5 and the end face of the second connecting portion are optically aligned and then connected without contact.
In a preferred embodiment, after the optical device is manufactured according to the above steps, the optical device may be fixed on the substrate by means of bonding, thermal bonding, or the like, so as to reinforce the optical device and prevent external disturbances such as vibrations from affecting the performance of the optical device.
In an application scenario of the present invention, an optical waveguide splitter is provided, which may refer to fig. 1, and includes a first optical fiber 1 and a first clamping member 2 that clamps the first optical fiber 1, where a first optical input/output port and a second optical input/output port that belong to different fiber output surfaces are disposed on an optical waveguide member 3, the first optical input/output port includes only one first connection portion and is in seamless contact connection with one first optical fiber 1, the second optical input/output port includes a plurality of second connection portions, and the second connection portions are in one-to-one seamless contact connection with a plurality of second optical fibers 5. The optical fiber array substrate is used for clamping a second optical fiber 5, the first clamping component 2 is a capillary tube, the optical waveguide component 3 is a planar optical waveguide chip, and an optical waveguide microstrip line on the planar optical waveguide chip is tree-shaped and has optical branching and optical coupling functions. And optical films 6 are plated on the end faces of the first connecting part, the first optical fiber 1, the second connecting end face and the second optical fiber 5, and the optical films 6 are anti-reflection films.
In the application scene, the optical waveguide is directly and seamlessly butted with the optical fiber, and ultraviolet curing glue is not needed, so that the reflection and scattering of the interface are eliminated, and the optical waveguide optical splitter can be used in an optical fiber transmission system with optical power exceeding the watt level. The optical waveguide splitter provided by the scene is already used in a high-power optical fiber transmission system in batches, and the performance of the optical waveguide splitter is proved to be capable of completely meeting the requirements of the high-power optical transmission system.
In this application scenario, the manufacturing process of the optical waveguide optical splitter is as follows: after the first optical fiber 1 is clamped by the capillary, the end face of the first optical fiber 1 is ground and polished together with the end face of the capillary, and then an optical film is coated on the end face, wherein the optical film is an anti-reflection and anti-reflection film so as to reduce reflection and scattering of light emitted by the first optical fiber 1. And the optical films are also plated on the two fiber outlet end surfaces of the planar optical waveguide chip and the front end surface of the optical fiber array substrate formed by the second optical fibers 5 after grinding and polishing. And then, the capillary tube, the planar optical waveguide chip and the optical fiber array are seamlessly and fixedly connected by using special optical equipment to form an optical distribution channel.
In the description herein, reference to the description of the terms "one embodiment," "a preferred embodiment," "some embodiments," "an example," "a specific example," or "some examples" or the like means that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above do not necessarily refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples.
While embodiments of the invention have been shown and described, it will be understood by those of ordinary skill in the art that: various changes, modifications, substitutions and alterations can be made to the embodiments without departing from the principles and spirit of the invention, the scope of which is defined by the claims and their equivalents.

Claims (10)

1. An optical device characterized by comprising an optical waveguide member on which a first optical input/output port and a second optical input/output port are provided, the first optical input/output port including at least one first connection portion;
the first optical fiber is in contact connection with the first connecting part;
an optical film is arranged on the end face of the first connecting part connected with the first optical fiber, and/or an optical film is arranged on the end face of the first optical fiber connected with the first connecting part; the end face of the first connecting part, which is connected with the first optical fiber, is a flat and smooth end face, and the end face of the first optical fiber, which is connected with the first connecting part, is a flat and smooth end face;
the optical film adjusts energy of the passing light, or selects a light beam with a preset wavelength from the passing light, or selects a light beam with a preset polarization direction from the passing light.
2. The optical device of claim 1, wherein the second optical input/output port comprises at least one second connection portion, further comprising a second optical fiber in contact connection with the second connection portion;
and an optical film is arranged on the end face of the second connecting part connected with the second optical fiber, and/or an optical film is arranged on the end face of the second optical fiber connected with the second connecting part.
3. The optical device according to claim 1 or 2, wherein the optical film is an antireflection film or a reflection-increasing and antireflection film or a filter film or a polarizing film.
4. An optical device as claimed in claim 3, further comprising a first clamping member for clamping the first optical fibre, and/or further comprising a second clamping member for clamping the second optical fibre.
5. The optical device according to claim 1, 2 or 4, wherein the optical waveguide member is provided with optical waveguide microstrip lines connected to the first optical input/output port and the second optical input/output port, respectively, the optical waveguide microstrip lines having a light splitting or light coupling action.
6. The optical device according to claim 3, wherein the optical waveguide member is provided with optical waveguide microstrip lines connected to the first optical input/output port and the second optical input/output port, respectively, the optical waveguide microstrip lines having a light splitting or light coupling action.
7. An optical device manufacturing method for manufacturing an optical device according to any one of claims 1 to 6, comprising step S1 and/or step S2, and step S3;
step S1, clamping the first optical fiber by the first clamping component, grinding and polishing the end face of the first optical fiber together with the end face of the first clamping component, and plating an optical film on at least the end face of the first optical fiber after grinding and polishing;
step S2, grinding and polishing the fiber output end face of the optical waveguide component where the first optical input/output port is located, and plating an optical film at least on the first connection end face of the first optical input/output port after grinding and polishing;
step S3 is to contact and connect the first fiber end face with the first connector end face.
8. The optical device manufacturing method according to claim 7, further comprising step a and/or step B, and step C;
a, clamping a second optical fiber through a second clamping part, grinding and polishing the end face of the second optical fiber together with the end face of the second clamping part, and plating an optical film on at least the end face of the second optical fiber after grinding and polishing;
step B, grinding and polishing the fiber outlet end face of the optical waveguide component where the second optical input/output port is located, and plating an optical film on at least the end face of the second connecting part of the second optical input/output port after grinding and polishing;
and step C, contacting and connecting the end face of the second optical fiber with the end face of the second connecting part.
9. The method of manufacturing an optical device according to claim 8, wherein the first fiber end face is contact-connected after being optically aligned with the first connector end face;
and/or the presence of a gas in the gas,
and the end face of the second optical fiber is in optical alignment with the end face of the second connecting part and then is in contact connection.
10. The optical device manufacturing method according to claim 7 or 8, wherein the optical device manufactured by the optical device manufacturing method according to one of claims 7 to 9 is fixed on a substrate.
CN202111173183.3A 2021-10-08 2021-10-08 Optical device and manufacturing method thereof Pending CN113866887A (en)

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CN201397404Y (en) * 2009-04-24 2010-02-03 光库通讯(珠海)有限公司 Turnable fiber filter
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