CN113795675B - 真空泵及磁轴承一体型马达 - Google Patents

真空泵及磁轴承一体型马达 Download PDF

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Publication number
CN113795675B
CN113795675B CN201980096218.2A CN201980096218A CN113795675B CN 113795675 B CN113795675 B CN 113795675B CN 201980096218 A CN201980096218 A CN 201980096218A CN 113795675 B CN113795675 B CN 113795675B
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CN
China
Prior art keywords
axial direction
support member
pair
magnetic bearing
rotor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Active
Application number
CN201980096218.2A
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English (en)
Chinese (zh)
Other versions
CN113795675A (zh
Inventor
森隆弘
井上统宏
太田知男
竹本真绍
付裕
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Shimadzu Corp
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Shimadzu Corp
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Publication date
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Publication of CN113795675A publication Critical patent/CN113795675A/zh
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Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D19/00—Axial-flow pumps
    • F04D19/02—Multi-stage pumps
    • F04D19/04—Multi-stage pumps specially adapted to the production of a high vacuum, e.g. molecular pumps
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K7/00—Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/08—Structural association with bearings
    • H02K7/09—Structural association with bearings with magnetic bearings
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D25/00—Pumping installations or systems
    • F04D25/02—Units comprising pumps and their driving means
    • F04D25/06—Units comprising pumps and their driving means the pump being electrically driven
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/053—Shafts
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
    • F04D—NON-POSITIVE-DISPLACEMENT PUMPS
    • F04D29/00—Details, component parts, or accessories
    • F04D29/05—Shafts or bearings, or assemblies thereof, specially adapted for elastic fluid pumps
    • F04D29/056—Bearings
    • F04D29/058—Bearings magnetic; electromagnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0474—Active magnetic bearings for rotary movement
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C32/00—Bearings not otherwise provided for
    • F16C32/04—Bearings not otherwise provided for using magnetic or electric supporting means
    • F16C32/0406—Magnetic bearings
    • F16C32/044—Active magnetic bearings
    • F16C32/0474—Active magnetic bearings for rotary movement
    • F16C32/0493—Active magnetic bearings for rotary movement integrated in an electrodynamic machine, e.g. self-bearing motor
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C33/00—Parts of bearings; Special methods for making bearings or parts thereof
    • F16C33/72—Sealings
    • F16C33/74—Sealings of sliding-contact bearings
    • F16C33/741—Sealings of sliding-contact bearings by means of a fluid
    • F16C33/748—Sealings of sliding-contact bearings by means of a fluid flowing to or from the sealing gap, e.g. vacuum seals with differential exhaust
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K1/00—Details of the magnetic circuit
    • H02K1/06—Details of the magnetic circuit characterised by the shape, form or construction
    • H02K1/22—Rotating parts of the magnetic circuit
    • H02K1/27—Rotor cores with permanent magnets
    • H02K1/2706—Inner rotors
    • H02K1/272—Inner rotors the magnetisation axis of the magnets being perpendicular to the rotor axis
    • H02K1/274—Inner rotors the magnetisation axis of the magnets being perpendicular to the rotor axis the rotor consisting of two or more circumferentially positioned magnets
    • H02K1/2753—Inner rotors the magnetisation axis of the magnets being perpendicular to the rotor axis the rotor consisting of two or more circumferentially positioned magnets the rotor consisting of magnets or groups of magnets arranged with alternating polarity
    • H02K1/278—Surface mounted magnets; Inset magnets
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K21/00—Synchronous motors having permanent magnets; Synchronous generators having permanent magnets
    • H02K21/12—Synchronous motors having permanent magnets; Synchronous generators having permanent magnets with stationary armatures and rotating magnets
    • H02K21/14—Synchronous motors having permanent magnets; Synchronous generators having permanent magnets with stationary armatures and rotating magnets with magnets rotating within the armatures
    • H02K21/20—Synchronous motors having permanent magnets; Synchronous generators having permanent magnets with stationary armatures and rotating magnets with magnets rotating within the armatures having windings each turn of which co-operates only with poles of one polarity, e.g. homopolar machine
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2240/00—Components
    • F05D2240/50—Bearings
    • F05D2240/51—Magnetic
    • F05D2240/511—Magnetic with permanent magnets
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
    • F05D—INDEXING SCHEME FOR ASPECTS RELATING TO NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES, GAS-TURBINES OR JET-PROPULSION PLANTS
    • F05D2240/00—Components
    • F05D2240/50—Bearings
    • F05D2240/51—Magnetic
    • F05D2240/515—Electromagnetic
    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16C—SHAFTS; FLEXIBLE SHAFTS; ELEMENTS OR CRANKSHAFT MECHANISMS; ROTARY BODIES OTHER THAN GEARING ELEMENTS; BEARINGS
    • F16C2360/00—Engines or pumps
    • H—ELECTRICITY
    • H02—GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02K—DYNAMO-ELECTRIC MACHINES
    • H02K2213/00—Specific aspects, not otherwise provided for and not covered by codes H02K2201/00 - H02K2211/00
    • H02K2213/03—Machines characterised by numerical values, ranges, mathematical expressions or similar information

Landscapes

  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Power Engineering (AREA)
  • Physics & Mathematics (AREA)
  • Electromagnetism (AREA)
  • Magnetic Bearings And Hydrostatic Bearings (AREA)
  • Non-Positive Displacement Air Blowers (AREA)
CN201980096218.2A 2019-05-24 2019-05-24 真空泵及磁轴承一体型马达 Active CN113795675B (zh)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
PCT/JP2019/020688 WO2020240621A1 (ja) 2019-05-24 2019-05-24 真空ポンプおよび磁気軸受一体型モータ

Publications (2)

Publication Number Publication Date
CN113795675A CN113795675A (zh) 2021-12-14
CN113795675B true CN113795675B (zh) 2024-01-09

Family

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Family Applications (1)

Application Number Title Priority Date Filing Date
CN201980096218.2A Active CN113795675B (zh) 2019-05-24 2019-05-24 真空泵及磁轴承一体型马达

Country Status (4)

Country Link
US (1) US12009726B2 (https=)
JP (1) JP7147976B2 (https=)
CN (1) CN113795675B (https=)
WO (1) WO2020240621A1 (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN121336056A (zh) * 2023-06-07 2026-01-13 松下知识产权经营株式会社 无轴承马达

Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0413851A1 (de) * 1989-08-25 1991-02-27 Leybold Aktiengesellschaft Lagerring für Magnetlager
JP2000205183A (ja) * 1999-01-13 2000-07-25 Mitsubishi Heavy Ind Ltd タ―ボ分子ポンプ
US6350109B1 (en) * 1997-09-12 2002-02-26 Societe De Mecanique Magnetique Rotary pump with immersed rotor
JP2004336968A (ja) * 2003-05-12 2004-11-25 Rikogaku Shinkokai ベアリングレスモータならびにその回転子位置制御回路および回転子位置制御方法
CN101076936A (zh) * 2004-12-10 2007-11-21 胜达因公司 用于磁驱动泵的内驱动器
CN204597667U (zh) * 2015-05-28 2015-08-26 湘电莱特电气有限公司 一种永磁电机用转子及包括这种转子的电机
JP2016192877A (ja) * 2015-03-31 2016-11-10 株式会社豊田自動織機 回転電機および圧縮機

Family Cites Families (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0749039Y2 (ja) * 1987-08-13 1995-11-13 三菱重工業株式会社 ターボ分子ポンプ
EP0989656B1 (de) 1998-09-24 2009-03-11 Levitronix LLC Permanentmagnetisch erregter elektrischer Drehantrieb
DE59914974D1 (de) 1998-09-24 2009-04-23 Levitronix Llc Permanentmagnetisch erregter elektrischer Drehantrieb
EP1063753B1 (de) 1999-06-22 2009-07-22 Levitronix LLC Elektrischer Drehantrieb mit einem magnetisch gelagerten Rotor
DE10215251A1 (de) * 2002-04-06 2003-10-16 Bosch Gmbh Robert Elektrische Maschine, insbesondere Permanentmagnet erregte Motore
EP2234243A1 (en) 2008-01-24 2010-09-29 Tokyo University Of Science Educational Foundation Administrative Organization Bearing-less motor
JP5732695B2 (ja) 2010-03-15 2015-06-10 学校法人東京理科大学 ベアリングレスモータ

Patent Citations (7)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0413851A1 (de) * 1989-08-25 1991-02-27 Leybold Aktiengesellschaft Lagerring für Magnetlager
US6350109B1 (en) * 1997-09-12 2002-02-26 Societe De Mecanique Magnetique Rotary pump with immersed rotor
JP2000205183A (ja) * 1999-01-13 2000-07-25 Mitsubishi Heavy Ind Ltd タ―ボ分子ポンプ
JP2004336968A (ja) * 2003-05-12 2004-11-25 Rikogaku Shinkokai ベアリングレスモータならびにその回転子位置制御回路および回転子位置制御方法
CN101076936A (zh) * 2004-12-10 2007-11-21 胜达因公司 用于磁驱动泵的内驱动器
JP2016192877A (ja) * 2015-03-31 2016-11-10 株式会社豊田自動織機 回転電機および圧縮機
CN204597667U (zh) * 2015-05-28 2015-08-26 湘电莱特电气有限公司 一种永磁电机用转子及包括这种转子的电机

Also Published As

Publication number Publication date
US20220216767A1 (en) 2022-07-07
WO2020240621A1 (ja) 2020-12-03
JP7147976B2 (ja) 2022-10-05
US12009726B2 (en) 2024-06-11
CN113795675A (zh) 2021-12-14
JPWO2020240621A1 (https=) 2020-12-03

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