CN113493301A - Molding plate, apparatus for manufacturing silica glass crucible, and method for manufacturing silica glass crucible - Google Patents
Molding plate, apparatus for manufacturing silica glass crucible, and method for manufacturing silica glass crucible Download PDFInfo
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- CN113493301A CN113493301A CN202110350161.3A CN202110350161A CN113493301A CN 113493301 A CN113493301 A CN 113493301A CN 202110350161 A CN202110350161 A CN 202110350161A CN 113493301 A CN113493301 A CN 113493301A
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- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 title claims abstract description 129
- 238000000465 moulding Methods 0.000 title claims abstract description 124
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 95
- 238000000034 method Methods 0.000 title claims description 30
- 239000000843 powder Substances 0.000 claims abstract description 203
- 239000002994 raw material Substances 0.000 claims abstract description 20
- 239000000155 melt Substances 0.000 claims abstract description 6
- 238000002844 melting Methods 0.000 claims description 25
- 230000008018 melting Effects 0.000 claims description 25
- 238000002360 preparation method Methods 0.000 claims description 7
- 230000008859 change Effects 0.000 abstract description 14
- 239000002699 waste material Substances 0.000 abstract description 4
- 239000000463 material Substances 0.000 description 10
- 239000013078 crystal Substances 0.000 description 8
- 238000010438 heat treatment Methods 0.000 description 7
- 239000010453 quartz Substances 0.000 description 7
- 230000000052 comparative effect Effects 0.000 description 6
- 230000009467 reduction Effects 0.000 description 6
- 230000004888 barrier function Effects 0.000 description 5
- 230000000153 supplemental effect Effects 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 239000012535 impurity Substances 0.000 description 4
- 239000000377 silicon dioxide Substances 0.000 description 4
- 229910052799 carbon Inorganic materials 0.000 description 3
- 238000002156 mixing Methods 0.000 description 3
- 239000012778 molding material Substances 0.000 description 3
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 3
- 238000007493 shaping process Methods 0.000 description 3
- 238000004513 sizing Methods 0.000 description 3
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 2
- 230000002542 deteriorative effect Effects 0.000 description 2
- 238000010891 electric arc Methods 0.000 description 2
- 230000006872 improvement Effects 0.000 description 2
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 229910052581 Si3N4 Inorganic materials 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- -1 for example Substances 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 239000007788 liquid Substances 0.000 description 1
- 238000010309 melting process Methods 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 229910021420 polycrystalline silicon Inorganic materials 0.000 description 1
- 230000008569 process Effects 0.000 description 1
- 238000000790 scattering method Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 description 1
- 229910010271 silicon carbide Inorganic materials 0.000 description 1
- HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 description 1
- 229910001220 stainless steel Inorganic materials 0.000 description 1
- 239000010935 stainless steel Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
Images
Classifications
-
- C—CHEMISTRY; METALLURGY
- C03—GLASS; MINERAL OR SLAG WOOL
- C03B—MANUFACTURE, SHAPING, OR SUPPLEMENTARY PROCESSES
- C03B20/00—Processes specially adapted for the production of quartz or fused silica articles, not otherwise provided for
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B29/00—Single crystals or homogeneous polycrystalline material with defined structure characterised by the material or by their shape
- C30B29/02—Elements
- C30B29/06—Silicon
-
- C—CHEMISTRY; METALLURGY
- C30—CRYSTAL GROWTH
- C30B—SINGLE-CRYSTAL GROWTH; UNIDIRECTIONAL SOLIDIFICATION OF EUTECTIC MATERIAL OR UNIDIRECTIONAL DEMIXING OF EUTECTOID MATERIAL; REFINING BY ZONE-MELTING OF MATERIAL; PRODUCTION OF A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; SINGLE CRYSTALS OR HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; AFTER-TREATMENT OF SINGLE CRYSTALS OR A HOMOGENEOUS POLYCRYSTALLINE MATERIAL WITH DEFINED STRUCTURE; APPARATUS THEREFOR
- C30B35/00—Apparatus not otherwise provided for, specially adapted for the growth, production or after-treatment of single crystals or of a homogeneous polycrystalline material with defined structure
- C30B35/002—Crucibles or containers
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Organic Chemistry (AREA)
- Crystallography & Structural Chemistry (AREA)
- Metallurgy (AREA)
- Glass Melting And Manufacturing (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Abstract
The invention provides a molding plate, which can flexibly change the shape of a raw material powder molding in a mold in order to meet various user requirements, improve the productivity, save raw materials and reduce wastes. The molding plate is used for molding a raw powder molded body in an apparatus for manufacturing a quartz glass crucible, wherein the apparatus for manufacturing a quartz glass crucible comprises a mold and a raw powder supply unit, and molds and melts the raw powder supplied to the inner side of the mold into the raw powder molded body in a crucible shape, the molding plate comprises a molding plate main body and an edge plate which is detachable relative to the molding plate main body, and the edge plate has a shape corresponding to the shape of the surface of the upper end of the raw powder molded body at a position which is opposite to the upper end of the raw powder molded body when the molding plate is arranged at the inner side of the mold.
Description
Technical Field
The present invention relates to a forming plate used in a quartz glass crucible manufacturing apparatus, and a quartz glass crucible manufacturing method.
Background
Conventionally, a method called the czochralski method (CZ method) has been widely used for producing a single crystal substance such as a single crystal semiconductor material. In this method, when a single crystal silicon ingot is produced, polycrystalline silicon is melted in a vessel, and a seed crystal is pulled while an end portion thereof is immersed in the molten bath (molten liquid) and rotated. In this method, single crystals having the same crystal orientation are grown under a seed crystal. In the case of pulling up single crystal silicon, a quartz glass crucible is generally used for the single crystal pulling vessel. A quartz glass crucible used for performing such a CZ method generally includes: an outer layer made of opaque quartz glass containing bubbles; and an inner layer made of transparent quartz glass substantially free of bubbles.
As a method for producing such a silica glass crucible, the following methods are known: a molded body (raw material powder molded body) of silica powder (raw material powder) is formed by centrifugal force in a mold (box-shaped frame), and then melted by a heat source such as an electric arc. Further, a manufacturing method is also known: in this melting process, silica powder is further supplied into the mold, and the silica powder is sprayed onto the inner surface of the outer layer while being melted by the arc. As a method for producing such a quartz glass crucible, for example, there are techniques disclosed in patent documents 1 to 7.
Patent document 1 describes a structure in which: a cylindrical ring-shaped (Japanese: リム) piece is engaged and supported via hooks on the inside of the upper opening of a mold. Patent document 2 describes the following: the method includes the steps of loading a core inside a rotating mold, filling quartz powder between the core and an inner surface of the mold, and performing a heating process after pulling up the core after filling the quartz powder. Patent document 3 describes the following: the inner frame is used when the raw material powder of quartz glass is supplied, and the raw material powder of quartz glass is supplied between the outer frame and the inner frame. Patent document 4 describes a method for producing a silica glass container provided with a flat plate-shaped molding plate for molding a raw material powder supplied into a mold. Patent document 5 describes the following: the silica glass raw material powder is sprayed into a crucible molding mold which rotates without heating and without melting, thereby forming a silica glass molded body.
Patent document 6 describes a mold for producing a quartz crucible, in which a ring-shaped heat insulating barrier material (made of quartz, carbon, silicon carbide, or silicon nitride) having an inner diameter smaller than the inner diameter of the mold and larger than the inner diameter of the quartz crucible is provided on the inner peripheral wall of an upper opening of the mold corresponding to an upper region of the quartz crucible. Patent document 6 describes the following effects: this can reduce the cut and removed portion by reducing the diameter of the crucible, and as a result, can reduce the raw material cost and hence the product cost.
Patent document 7 describes the following: when the silica particles supplied into the mold are shaped into the shape of the crucible, a "doctor blade" (an object that shapes the particles into a desired shape) is abutted against the silica particles.
Documents of the prior art
Patent document
Patent document 1: japanese patent laid-open publication No. 2010-163312
Patent document 2: japanese laid-open patent publication No. H06-279167
Patent document 3: japanese patent laid-open No. 2000-169164
Patent document 4: japanese patent laid-open publication No. 2005-289710
Patent document 5: japanese patent laid-open publication No. 2017-149603
Patent document 6: japanese laid-open patent publication No. 2010-105890
Patent document 7: japanese laid-open patent publication No. 2009-040680
Disclosure of Invention
Technical problem to be solved
In the production of the above-described silica glass crucible by heating and melting the raw material silica powder, in consideration of recent increase in the amount of large-sized crucible manufacturing facilities for large-diameter wafer manufacturing and the production of various crucible sizes and structures corresponding to various wafer qualities, it is necessary to improve productivity represented by high speed of the production facility changeover (japanese: paragraph り instead of え). Meanwhile, the importance of saving raw materials as natural resources and reducing basic requirements for the manufacturing industry such as waste reduction is increasing.
The present invention has been made in view of the above circumstances, and an object of the present invention is to provide a molding plate which can flexibly change the shape of a raw material powder molded body in a mold in order to satisfy various user demands and to achieve both improvement in productivity, material saving, and waste reduction. Another object of the present invention is to provide a method for manufacturing a quartz glass crucible, in which the shape of the upper part of the molded body can be freely changed when the raw powder molded body supplied into the mold is heated and melted.
(II) technical scheme
The present invention has been made to solve the above-mentioned problems, and provides a molding plate for molding a raw powder molded body in an apparatus for manufacturing a quartz glass crucible, the apparatus for manufacturing a quartz glass crucible including a rotatable mold and a raw powder supply unit for supplying a raw powder to the mold, the raw powder supplied to the inside of the mold by the raw powder supply unit being molded into the raw powder molded body in a crucible shape, and the raw powder molded body being melted, the molding plate having a shape corresponding to the shape of the inner surface of the raw powder molded body, the molding plate being disposed inside the mold and being rotated relative to the molding plate to mold the raw powder supplied to the inside of the mold into the crucible shape, the molding plate including a molding plate main body, And an edge plate that is detachable from the molding plate main body, the edge plate having a shape corresponding to a surface shape of an upper end portion of the raw powder molded body at a position facing the upper end portion of the raw powder molded body when the molding plate is disposed inside the mold.
The molding plate having such an edge plate can mold the raw powder in advance at the time of molding the raw powder molded body so as to be compatible with various dimensional specifications and to achieve both reduction of the replacement time and reduction of the raw powder.
In this case, it is preferable that the edge plate has a slit inclined with respect to the wall thickness direction of the raw powder compact.
In this way, the edge plate has the inclined notch, and thus the shape of the upper portion of the raw powder compact can be molded as a more stable structure.
Preferably, at least the portion of the molding plate main body and the edge plate that contacts the raw powder molded body is made of quartz glass.
Thus, the molding plate made of quartz glass at the portion in contact with the raw powder compact can more effectively suppress the mixing of impurities into the raw powder compact.
In addition, in the molding plate according to the present invention, the edge plate is provided with a supplementary plate that is detachable from the molding plate main body, and the supplementary plate is a member that can change the shape of the inner surface of the raw powder molded body.
By providing the molding plate with such a supplemental plate, the shape of the raw powder molded body can be finely changed in accordance with the specification.
In this case, it is preferable that the additional plate is located in a straight tube portion of the raw powder molded body in a crucible shape when the molding plate is disposed inside the mold.
By positioning the additional plate in this manner, the shape of the raw powder compact can be changed in the straight cylindrical portion of the crucible shape of the raw powder compact.
The present invention also provides an apparatus for manufacturing a quartz glass crucible, comprising the mold, the raw powder supply unit, and the forming plate.
In such a manufacturing apparatus for a silica glass crucible, by using a molding plate having an edge plate, it is possible to mold a raw powder in advance when heating and melting a raw powder molded body in a mold, and to control the heat distribution in the mold.
In this case, the apparatus for manufacturing a silica glass crucible of the present invention can change the shape of the upper end portion of the raw powder compact by replacing the edge plate or by changing the attachment position of the edge plate.
In this way, the shape of the raw powder compact can be easily and finely adjusted in accordance with the specification of the quartz glass crucible to be produced, in the apparatus for producing a quartz glass crucible in which the shape of the upper end portion of the raw powder compact can be changed by replacing the edge plate or changing the position.
In this case, the height of the quartz glass crucible produced by melting the raw powder compact can be changed by changing the shape of the upper end portion of the raw powder compact by replacing the edge plate or changing the attachment position of the edge plate.
According to the manufacturing device of the quartz glass crucible, the height of the quartz glass crucible can be changed simply and at low cost according to the specification.
Further, the present invention provides a method for producing a quartz glass crucible, comprising the steps of supplying a raw powder to the inside of a rotatable mold, disposing a molding plate on the inside of the mold, and rotating the mold relative to the molding plate to mold the raw powder into a raw powder molded body having a crucible shape corresponding to the shapes of the molding plate and the mold; and melting the raw powder compact, wherein the raw powder compact is molded by using a member provided with an edge plate on a molding plate main body as the molding plate, wherein the edge plate has a shape corresponding to a surface shape of an upper end portion of the raw powder compact at a position facing the upper end portion of the raw powder compact when the molding plate is disposed inside the mold.
The method for manufacturing a silica glass crucible by molding a raw powder molded body using a molding plate provided with such an edge plate and heating and melting the molded body can flexibly control the shape of the upper part of the raw powder molded body, and therefore can meet various sizes and can simultaneously achieve reduction of the replacement time and reduction of the raw powder.
In this case, it is preferable to use a member having a slit inclined with respect to the wall thickness direction of the raw material powder compact as the edge plate.
In this way, by using the edge plate having the inclined notch, the shape of the upper portion of the raw powder compact can be molded as a more stable structure.
In addition, it is preferable that at least a portion of the raw powder compact that is in contact with the raw powder compact is made of quartz glass.
By using such a molding plate made of quartz glass as the portion in contact with the raw powder molded body, it is possible to more effectively suppress the mixing of impurities into the raw powder molded body.
Further, by providing the molding plate with a supplemental plate in addition to the edge plate, the shape of the inner surface of the raw powder molded body can be changed by the supplemental plate.
By using the molding plate having the additional plate in this manner, the shape of the raw powder molded body can be finely changed in accordance with the specification.
In this case, when the molding plate is disposed inside the mold, the additional plate can be positioned in the crucible-shaped straight tube portion of the raw powder molded body.
By positioning the additional plate in this manner, the shape of the raw powder compact can be changed in the straight cylindrical portion of the crucible shape of the raw powder compact.
In the method for producing a silica glass crucible of the present invention, the shape of the upper end portion of the raw powder compact can be changed by replacing the edge plate or by changing the attachment position of the edge plate.
In the method for producing a silica glass crucible in which the shape of the upper end portion of the raw powder compact can be changed by replacing the edge plate or changing the position, the shape of the raw powder compact can be easily and finely adjusted in accordance with the specification of the silica glass crucible to be produced.
In this case, the height of the quartz glass crucible produced by melting the raw powder compact can be changed by changing the shape of the upper end portion of the raw powder compact by replacing the edge plate or changing the attachment position of the edge plate.
Such a method for manufacturing a silica glass crucible can easily change the height of the silica glass crucible at low cost according to the specification.
(III) advantageous effects
The present invention uses the forming plate having the forming plate main body and the edge plate detachable from the forming plate main body, and therefore, the shape of the upper end portion of the raw powder compact can be changed by replacing the edge plate or changing the position without replacing the entire forming plate, and therefore, the shape of the raw powder compact can be finely adjusted in accordance with the specification of the quartz glass crucible to be manufactured. Further, since the edge plate can be replaced or the position can be changed to correspond to the specification of the shape of the silica glass crucible, the productivity of the silica glass crucible can be improved and the manufacturing cost can be reduced. Further, since the edge plate is present, when the raw powder compact on the upper portion of the mold is formed, the raw powder can be prevented from scattering to the outside of the mold, and therefore, the waste of the raw powder can be reduced.
Drawings
FIG. 1 is a schematic view showing an example of an apparatus for producing a silica glass crucible including a forming plate according to the present invention.
Fig. 2 is a schematic view of a positional relationship between the molding plate of the present invention and the raw powder molded body as viewed from the upper side in the vertical direction.
FIG. 3 is a schematic view showing an example of an apparatus for manufacturing a silica glass crucible including the forming plate of the present invention, in which the position of the edge plate is changed with respect to FIG. 1.
FIG. 4 is a schematic view showing another example of an apparatus for producing a silica glass crucible having a forming plate of the present invention.
FIG. 5 is a schematic view showing an example of an apparatus for producing a silica glass crucible including a conventional forming plate.
Detailed Description
As described above, in the conventional production of a silica glass crucible, the height of the silica glass crucible differs depending on the specification required by each user. In order to satisfy the specification with one mold, it is necessary to cut the upper end portion of the silica glass crucible for each specification to correspond thereto, and the amount of the cut portion needs to be changed. Therefore, when the number of cut portions is large, the yield is also reduced. Therefore, it is necessary to have a mold for molding a raw powder molded body conforming to the specification of each user. In addition, the number of steps for replacing the mold is also required, which is a factor of deteriorating productivity.
In addition to the method of preparing a plurality of molds, a method of preparing a plurality of molding plates at a low cost is also being increasingly used. However, the time required for replacement, adjustment, and test melting of large molding plates has a great influence on productivity. Further, in recent years, in the trial production of a crucible for test, which is increasing by users, only once, further improvement is required in terms of lead time for preparing a large-sized molding plate and cost thereof.
In contrast, the present inventors have conceived of using, as a molding plate, a molding plate that can change the shape of the molding plate at the upper portion of the mold and has an edge plate that is detachable from the molding plate main body, and have completed the present invention.
The present invention provides a molding plate for molding a raw powder molded body in an apparatus for manufacturing a quartz glass crucible, wherein the apparatus for manufacturing a quartz glass crucible includes a rotatable mold and a raw powder supply unit for supplying a raw powder to the mold, and molds the raw powder supplied to an inner side of the mold by the raw powder supply unit into a crucible-shaped raw powder molded body, and melts the raw powder molded body, the molding plate having a shape corresponding to an inner surface shape of the raw powder molded body, and the raw powder supplied into the mold is molded into the crucible-shaped raw powder by being disposed inside the mold and being rotated relative to the molding plate, the molding plate including a molding plate main body and an edge plate that is attachable to and detachable from the molding plate main body, the edge plate has a shape corresponding to a shape of a surface of an upper end portion of the raw powder compact at a position facing the upper end portion of the raw powder compact when the molding plate is disposed inside the mold.
The present invention will be described more specifically below with reference to the accompanying drawings.
FIG. 1 shows an apparatus 50 for manufacturing a silica glass crucible having a forming plate 10 according to the present invention. Fig. 2 is a schematic view showing a positional relationship of the molding plate of the present invention with respect to the raw powder molded body, as viewed from the upper side in the vertical direction. In fig. 2, the mold is not shown for easy observation. As shown in fig. 1 and 2, the apparatus 50 for manufacturing a silica glass crucible includes a rotatable mold 20 and a raw powder supply unit 30 for supplying a raw powder to the mold 20. The apparatus 50 for manufacturing a silica glass crucible molds a raw powder supplied to the inside of the mold 20 by the raw powder supply unit 30 into a raw powder molded body 44 in a crucible shape, and melts the raw powder molded body 44 to manufacture the silica glass crucible. Fig. 1 and 2 show a case where the raw powder 42 is supplied from the raw powder supply unit 30.
The forming plate 10 of the present invention is used for forming a raw material powder formed body in the apparatus 50 for manufacturing a quartz glass crucible. The molding plate 10 has a shape corresponding to the shape of the inner surface of the raw powder molded body 44, is disposed inside the mold 20, and is rotated relative to the molding plate 10 by the mold 20, thereby molding the raw powder 42 supplied into the mold 20 into a crucible shape. The molding plate 10 of the present invention includes a molding plate body 12 and an edge plate 14 that is detachable from the molding plate body. The edge plate 14 has a shape corresponding to the shape of the surface of the upper end portion of the raw powder molded body 44 at a position facing the upper end portion of the raw powder molded body 44 when the shaping plate 10 is disposed inside the die 20.
The apparatus 50 for manufacturing a silica glass crucible of the present invention is characterized by comprising a mold 20, a raw powder supply unit 30, and a molding plate 10.
By using the forming plate 10 provided with the edge plate 14, a desired shape of the raw powder can be prepared when the raw powder forming body 44 in the mold 20 of the apparatus 50 for producing a silica glass crucible is heated and melted. The method of installing the edge plate 14 to the forming plate body 12 is not particularly limited, and fastening with screws or the like is possible.
The apparatus 50 for manufacturing a silica glass crucible of the present invention can change the shape of the upper end portion of the raw powder compact 44 by replacing the edge plate 14 or by changing the attachment position of the edge plate 14. This makes it possible to easily and finely adjust the shape of the raw powder compact 44 in accordance with the quartz glass crucible to be produced.
In particular, the apparatus 50 for manufacturing a silica glass crucible of the present invention can change the height of the silica glass crucible manufactured by melting the raw powder compact 44 by changing the shape of the upper end portion of the raw powder compact 44 by replacing the edge plate 14 or changing the attachment position of the edge plate 14. The apparatus 50 for manufacturing a silica glass crucible can easily change the height of the silica glass crucible according to the specification.
Fig. 3 shows an example in which the position of edge plate 14 is changed with respect to fig. 1. By changing the position of the edge plate 14 in this manner, the shape of the upper end portion of the raw powder compact 44 can be changed. In particular, the height of the raw powder molded body 44 can be changed. Such a change in shape and a change in height can also be performed by replacing the edge plate 14. That is, it is possible to prepare a plurality of edge plates 14 having different shapes and replace the edge plates 14 as necessary.
As shown in fig. 1 and 3, in the molded plate 10 of the present invention, the edge plate 14 preferably has a notch inclined with respect to the thickness direction of the raw material powder molded body 44. In this way, the edge plate has the inclined notch, and thus the shape of the upper portion of the raw powder compact can be molded as a stable structure.
The shape of the upper portion of the raw powder molded body 44 can be controlled by the molding plate 10 and the apparatus 50 for manufacturing a silica glass crucible, each including the edge plate 14 of the present invention, and thus the shape can be formed into a regular shape. In addition, according to the present invention, a quartz glass crucible of a desired height can be obtained only by changing the height of edge plate 14 in accordance with each specification. That is, it is not necessary to replace the mold 20 for each user specification of the silica glass crucible, and productivity is improved. Thus, there is no need to stock multiple molds. In addition, when the raw powder molded body 44 is molded on the inner surface of the mold 20, the amount of the raw powder 42 that splashes out of the mold 20 at the upper portion of the mold 20 can be reduced. Therefore, the manufacturing cost of the silica glass crucible can also be reduced. The amount of raw powder saved is also influenced by the specifications (diameter/height of the quartz glass crucible) of the user, and can be reduced to about 3% in a crucible having a diameter of 22 inches (about 56cm) and about 5% in a crucible having a diameter of 32 inches (about 81 cm).
In the molding plate 10 of the present invention, at least the portions of the molding plate main body 12 and the edge plate 14 that contact the raw powder molded body 44 are preferably made of quartz glass. The molding plate 10 made of quartz glass at the portion in contact with the raw-material-powder molded body 44 can suppress the mixing of impurities into the raw-material-powder molded body 44. The portions of the molding plate main body 12 and the edge plate 14 that do not contact the raw powder molded body 44 may be made of other materials, for example, stainless steel. This can improve the shape accuracy and strength, and can be configured at low cost.
As shown in fig. 4, the molding plate 10 of the present invention may include a supplemental plate 16 that is detachable from the molding plate body 12, in addition to the edge plate 14. In this case, the additional plate 16 may be a member capable of changing the shape of the inner surface of the raw powder molded body 44. By providing the molding plate 10 with such a supplemental plate 16, the shape of the raw-material powder molded body 44 can be finely changed in accordance with the specification. As with the molding plate main body 12 and the edge plate 14, the additional plate 16 is preferably made of quartz glass at least in the portion that contacts the raw powder molded body 44.
Further, as shown in fig. 4, when the shaping plate 10 is disposed inside the mold 20, the additional plate 16 is preferably positioned in a straight cylindrical portion of the raw powder molded body 44 in the shape of a crucible. This allows the shape of the raw powder molded body 44 to be changed in the straight cylindrical portion of the crucible shape of the raw powder molded body 44. In particular, when the produced quartz glass crucible is used for producing silicon single crystal by the czochralski method, the thickness of the layer at a specific portion can be changed in the straight tube portion of the quartz glass crucible. For example, if the groove 46 is formed in the raw powder compact 44 by the top-up plate 16, the opaque silica glass layer can be thinned only in the vicinity of the melt surface of the silicon melt before starting pulling up the single crystal silicon, and the transparent silica glass layer as the inner layer can be formed to be thicker.
Further, the present invention provides a method for manufacturing a quartz glass crucible. This method can be performed using the apparatus 50 for manufacturing a silica glass crucible shown in fig. 1 to 4, and therefore, the method will be described with reference to fig. 1 to 4. The method for manufacturing a silica glass crucible of the present invention comprises the steps of: a raw powder forming body 44 in which a raw powder 42 is supplied to the inside of a rotatable mold 20, a molding plate 10 is disposed inside the mold 20, and the mold 20 is rotated relative to the molding plate 10, whereby the raw powder 42 is formed into a crucible shape corresponding to the shapes of the molding plate 10 and the mold 20 (step a); and melting the raw material powder molded body 44 (step b). In the method of the present invention, the raw powder compact 44 is molded by using, as the molding plate 10, a member in which the edge plate 14 is provided on the molding plate main body 12, wherein the edge plate 14 has a shape corresponding to the shape of the surface of the upper end portion of the raw powder compact 44 at a position facing the upper end portion of the raw powder compact 44 when the molding plate 10 is disposed inside the mold.
In the method for manufacturing a silica glass crucible of the present invention, the shape of the upper end portion of the raw powder compact 44 can be changed by replacing the edge plate 14 or by changing the attachment position of the edge plate 14. In particular, the height of the quartz glass crucible produced by melting the raw powder compact 44 can be changed by changing the shape of the upper end portion of the raw powder compact 44 by replacing the edge plate 14 or changing the attachment position of the edge plate 14.
In order to suppress the contamination of impurities into the raw powder compact as described above, it is preferable to use, as the forming plate main body 12 and the edge plate 14, members made of quartz glass at least in the portions that come into contact with the raw powder compact 44.
Further, by using a member having a notch inclined with respect to the thickness direction of the raw powder compact 44 as the edge plate 14, the shape of the upper portion of the raw powder compact 44 can be molded as a stable structure.
The melting method in the step b is not particularly limited, and a known method can be used. Specifically, after the molding plate 10 and the raw powder supply unit 30 are removed from the inside of the mold 20, the raw powder molded body 44 can be heated and melted by inserting a carbon electrode into the mold 20 and performing arc discharge. By using a mold capable of sucking outward as the mold 20, the mold can be heated and melted while sucking. When these are heated and melted, the synthetic quartz powder is simultaneously supplied into the mold 20, whereby the inner layer made of transparent silica glass can be formed.
In the method of manufacturing a silica glass crucible of the present invention, as shown in fig. 4, the additional plate 16 may be provided on the forming plate 10 in addition to the edge plate 14 to form the raw powder compact 44. The shape of the inner surface of the raw powder molded body 44 can be changed by the additional plate 16. In particular, when the shaping plate 10 is disposed inside the mold 20, the additional plate 16 can be positioned in a straight cylindrical portion of the raw powder molded body 44 in the shape of a crucible.
As described above, in the method for manufacturing a silica glass crucible of the present invention, when the raw powder molded body 44 in the mold 20 is heated and melted, the raw powder can be molded in advance in the upper portion of the mold 20 so as to obtain a desired shape after melting.
In order to obtain the same effect as the present invention, if the molding plate itself is replaced, it is necessary to set a molding thickness corresponding to a user specification (wall thickness) by the molding plate itself. When such an integrated molding plate is replaced, the molding thickness needs to be adjusted in addition to the installation time, and accordingly, productivity is inferior compared to the present invention. The present invention can replace only the edge plate 14, and can be replaced in a short time. The reason why it takes time to use the integrated molding plate is that the number of clamps for fixing the plate is large and it is necessary to perform positioning for optimizing the gap between the mold and the molding plate. Further, a plurality of integrated molding plates need to be prepared in advance in accordance with the user specification (particularly, height), and the manufacturing cost is estimated to be several times as high as that in the case of only the edge plate.
In addition, when an integral molding plate is used and the same mold is used, the barrier material described in patent document 6 needs to be manufactured in a plurality of numbers according to the user specification (height), and varies depending on the material and size, but is generally considered to be very expensive. Further, patent document 6 describes that the barrier material is consumed through a plurality of uses, and a cost is incurred for each replacement. The reason for this is that the barrier material is heated while being set in the mold. In addition, the heating method of the raw powder compact may be changed due to consumption of the barrier material. On the other hand, although the edge plate 14 of the present invention is used only when the raw powder compact 44 is molded and there is wear and tear associated with the raw powder, the shape of the raw powder compact can be kept constant by adjusting the position and setting the molding thickness each time, and the heating pattern when melting the raw powder compact 44 can be made uniform.
[ examples ] A method for producing a compound
The present invention will be described more specifically with reference to examples and comparative examples, but the present invention is not limited to the examples.
[ example 1]
The raw powder compact 44 was molded using the apparatus 50 for manufacturing a silica glass crucible provided with the molding plate 10 having the edge plate 14 shown in fig. 1 to 3, and was heated and melted to manufacture a silica glass crucible having a diameter of 32 inches (about 81 cm).
As for the crucible having an aperture of 32 inches, there are at least three crucibles having different heights. In comparison with the highest crucible size A, size B is 50mm less in height than size A and size C is 80mm less in height than size A. When manufacturing the crucibles of specification a, the forming plate a without the edge plate is used, and when manufacturing the crucibles of specification B and specification C, the edge plate B and the edge plate C corresponding to the respective heights are attached to the forming plate a, and the flow of melting tens of crucibles respectively is repeated three times. In this case, the difference in weight of the molding material, the time for the setup between the respective specifications, and the number of crucible test melts for sizing after the setup are summarized in table 1. The production change adjusting time is as follows: the time until the production melting of the specification B is started after the production melting of the specification a is finished; after the completion of the manufacturing melting of specification B, the time until the start of the manufacturing melting of specification C.
[ TABLE 1]
Comparative example 1
The raw powder compact 144 is molded by using the conventional apparatus 150 for manufacturing a silica glass crucible provided with the molding plate 110 shown in fig. 5, and is heated and melted to manufacture the silica glass crucible. The forming plate 110 uses an existing part without an edge plate. The mold 120 and the raw powder supply unit 130 for supplying the raw powder 142 have the same configuration as that of the apparatus 50 for producing silica glass shown in fig. 1 to 4.
Similarly to example 1, when manufacturing three types of crucibles of a to C, by repeating a process of melting tens of crucibles each three times, only the molding plate a having no edge plate corresponding to the specification a was used, and manufacturing was performed while changing the end cutting position so as to correspond to the specifications a to C. This is the existing manufacturing method. Further, the forming plates B and C, in which only the upper portions of the forming plates protrude in the outer circumferential direction of the crucible, were used in accordance with the specifications B and C. The difference in the weight of the molding material, the time for the replacement adjustment, and the number of crucibles having a predetermined size in each molding plate at that time are shown in tables 2 and 3.
[ TABLE 2]
[ TABLE 3 ]
[ result 1]
As is clear from example 1 (table 1) and comparative example 1 (tables 2 and 3), when the melting apparatus and the manufacturing method using the edge plate were used, the molding material could be reduced without significantly deteriorating the setup time and the test melt number of the crucible after the setup. Since it is necessary to use several tens Kg or more of raw material to manufacture a 32-inch crucible, it is important to reduce the amount of raw material by 3% for each crucible.
[ example 2]
The crucible of the specification B of example 1 was requested to be trial-produced in accordance with the user's request, and after the molding layer was retreated by 3mm in the outer circumferential direction at a position of 30mm to 60mm from the upper end and the concave portion was formed on the powder molding layer, the transparent layer produced by melting the crucible was thickened by a so-called scattering method. Therefore, the edge plate B and the convex edge plate for trial production for forming the concave portion described above were attached to the molding plate a described in example 1, and trial production was performed. In this case, table 4 shows the lead time (number of days) from the acceptance of the trial production request to the availability of the test preparation, the time for the setup change from the normal production, and the number of crucibles melted in the fixed size.
[ TABLE 4 ]
| Specification B ═>Specification B/trial production | |
| Days from preparation of edge plate to trial production | 1 day |
| Setup time for setup | 0.8 hour |
| Number of crucibles melted for sizing | 0 number of |
Comparative example 2
Table 5 shows the lead time (number of days) from the acceptance of the trial production request to the availability of the test preparation, the time for the setup change from the normal production, and the number of crucibles with the determined size in the case of trial production of the trial crucible of example 2 using a molding plate without an edge plate.
[ TABLE 5 ]
| Specification B ═>Specification B/trial production | |
| Days from preparation of molded plate to trial production | About 2 weeks |
| Setup time for setup | 1.5 hours |
| Number of crucibles melted for sizing | 1 is provided with |
[ result 2]
The following results were obtained from example 2 (table 4) and comparative example 2 (table 5): when the edge plate is used, trial preparation can be performed in a short period of time, and the burden of replacement adjustment is smaller than that in the case of replacing the entire molded plate. As for the trial preparation cost, in the case of using the edge plate of example 2, the cost of opening the fixing holes and the fixing bolts in the molding plate a plus the cost of the material and the processing of the edge plate amounted to several ten thousand yen, whereas in the case of preparing the molding plate of comparative example 2, the cost of preparing the metal material and the quartz glass plate and processing thereof required 20 ten thousand yen or more.
The present invention is not limited to the above embodiments. The above embodiments are merely examples, and any configuration having substantially the same configuration as the technical idea described in the claims of the present invention and producing the same operation and effect is included in the technical scope of the present invention.
Claims (15)
1. A molding plate for molding a raw powder molded body in an apparatus for manufacturing a quartz glass crucible, wherein the apparatus for manufacturing a quartz glass crucible comprises a rotatable mold and a raw powder supply unit for supplying a raw powder to the mold, and molds the raw powder supplied to the inside of the mold by the raw powder supply unit into a crucible-shaped raw powder molded body and melts the raw powder molded body,
the molding plate has a shape corresponding to an inner surface shape of the raw powder molded body, and the raw powder supplied into the mold is molded into the shape of the crucible by being arranged inside the mold and rotating the mold relative to the molding plate,
the molding plate comprises a molding plate main body and an edge plate which is detachable relative to the molding plate main body,
the edge plate has a shape corresponding to a shape of a surface of an upper end portion of the raw powder compact at a position facing the upper end portion of the raw powder compact when the molding plate is disposed inside the mold.
2. A forming plate according to claim 1,
the edge plate has a notch inclined with respect to the wall thickness direction of the raw powder compact.
3. A forming plate according to claim 1,
at least the portions of the molding plate main body and the edge plate that contact the raw powder molded body are made of quartz glass.
4. A forming plate according to claim 1,
the molding plate is provided with a supplementary plate which is detachable relative to the molding plate main body besides the edge plate,
the additional plate is a member capable of changing the shape of the inner surface of the raw powder molded body.
5. A forming plate according to claim 4,
when the molding plate is disposed inside the mold, the additional plate is located in a straight tube portion of the raw powder molded body in the shape of a crucible.
6. A quartz glass crucible manufacturing apparatus is characterized by comprising:
the mold;
the raw powder supply unit; and
the molding plate of any of claims 1 to 5.
7. The manufacturing apparatus of a silica glass crucible according to claim 6,
the shape of the upper end portion of the raw powder compact can be changed by replacing the edge plate or by changing the attachment position of the edge plate.
8. The manufacturing apparatus of a silica glass crucible according to claim 7,
the height of the quartz glass crucible manufactured by melting the raw powder compact can be changed by changing the shape of the upper end portion of the raw powder compact by replacing the edge plate or changing the attachment position of the edge plate.
9. A method for manufacturing a quartz glass crucible, comprising the steps of manufacturing a quartz glass crucible,
forming a raw powder into a raw powder molded body having a crucible shape corresponding to the shapes of a mold plate and a rotatable mold by supplying a raw powder to the inside of the mold, arranging a mold plate on the inside of the mold, and rotating the mold relative to the mold plate; and
melting the raw material powder molded body, and then,
it is characterized in that the preparation method is characterized in that,
and molding a raw powder molded body using, as the molding plate, a member provided with an edge plate on a molding plate main body, wherein the edge plate has a shape corresponding to a surface shape of an upper end portion of the raw powder molded body at a position facing the upper end portion of the raw powder molded body when the molding plate is disposed inside the mold.
10. The method of manufacturing a silica glass crucible according to claim 9,
a member having a slit inclined with respect to the thickness direction of the raw powder compact is used as the edge plate.
11. The method of manufacturing a silica glass crucible according to claim 9,
a member made of quartz glass at least in a portion in contact with the raw powder molded body is used as the molding plate main body and the edge plate.
12. The method of manufacturing a silica glass crucible according to claim 9,
an additional plate is arranged on the forming plate besides the edge plate,
the shape of the inner surface of the raw powder compact is changed by the additional plate.
13. The method of manufacturing a silica glass crucible according to claim 12,
when the molding plate is disposed inside the mold, the additional plate is positioned in a crucible-shaped straight tube portion of the raw powder molded body.
14. The method of manufacturing a silica glass crucible according to any one of claims 9 to 13,
the shape of the upper end portion of the raw powder compact is changed by replacing the edge plate or changing the attachment position of the edge plate.
15. The method of manufacturing a silica glass crucible according to claim 14,
the height of the quartz glass crucible produced by melting the raw powder compact is changed by changing the shape of the upper end of the raw powder compact by replacing the edge plate or changing the attachment position of the edge plate.
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| JP2020068379A JP7359734B2 (en) | 2020-04-06 | 2020-04-06 | Molded plate, quartz glass crucible manufacturing device, and quartz glass crucible manufacturing method |
| JP2020-068379 | 2020-04-06 |
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| KR20210124054A (en) | 2021-10-14 |
| CN113493301B (en) | 2024-07-30 |
| JP2021165213A (en) | 2021-10-14 |
| JP7359734B2 (en) | 2023-10-11 |
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