CN113310309A - Vertical furnace and furnace body temperature control method thereof - Google Patents
Vertical furnace and furnace body temperature control method thereof Download PDFInfo
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- CN113310309A CN113310309A CN202110609788.6A CN202110609788A CN113310309A CN 113310309 A CN113310309 A CN 113310309A CN 202110609788 A CN202110609788 A CN 202110609788A CN 113310309 A CN113310309 A CN 113310309A
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- 238000000034 method Methods 0.000 title claims abstract description 47
- 230000036760 body temperature Effects 0.000 title claims abstract description 15
- 230000001105 regulatory effect Effects 0.000 claims abstract description 63
- 238000001816 cooling Methods 0.000 claims abstract description 22
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- 238000009529 body temperature measurement Methods 0.000 claims description 15
- 239000000112 cooling gas Substances 0.000 claims description 15
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- 230000008569 process Effects 0.000 description 22
- 239000004065 semiconductor Substances 0.000 description 10
- 230000000694 effects Effects 0.000 description 7
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- 230000033228 biological regulation Effects 0.000 description 5
- 238000004891 communication Methods 0.000 description 4
- 230000017525 heat dissipation Effects 0.000 description 4
- 239000007789 gas Substances 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 230000009123 feedback regulation Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
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- 230000004913 activation Effects 0.000 description 1
- 238000005275 alloying Methods 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 238000005229 chemical vapour deposition Methods 0.000 description 1
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B1/00—Shaft or like vertical or substantially vertical furnaces
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B1/00—Shaft or like vertical or substantially vertical furnaces
- F27B1/10—Details, accessories, or equipment peculiar to furnaces of these types
- F27B1/24—Cooling arrangements
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B1/00—Shaft or like vertical or substantially vertical furnaces
- F27B1/10—Details, accessories, or equipment peculiar to furnaces of these types
- F27B1/26—Arrangements of controlling devices
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F27—FURNACES; KILNS; OVENS; RETORTS
- F27B—FURNACES, KILNS, OVENS, OR RETORTS IN GENERAL; OPEN SINTERING OR LIKE APPARATUS
- F27B1/00—Shaft or like vertical or substantially vertical furnaces
- F27B1/10—Details, accessories, or equipment peculiar to furnaces of these types
- F27B1/28—Arrangements of monitoring devices, of indicators, of alarm devices
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- H—ELECTRICITY
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- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
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Abstract
The invention provides a vertical furnace, which comprises a furnace body, a temperature control assembly, an air supply pipeline, a temperature acquisition device and a control device, wherein the temperature control assembly, the air supply pipeline, the temperature acquisition device and the control device are arranged around the furnace body, an annular air channel is arranged between the temperature control assembly and the furnace body, the temperature control assembly is communicated with the air supply pipeline, the air supply pipeline is used for conveying cooling air to the annular air channel, and an adjusting valve is arranged on the air supply pipeline. The temperature acquisition device is used for acquiring the actual temperature of the furnace body, and the control device is used for controlling the opening of the regulating valve according to the difference value between the actual temperature and the target temperature of the furnace body so as to realize temperature control on the furnace body at a preset variable temperature rate. In the invention, the control device can automatically adjust the opening of the regulating valve in real time according to the actual temperature so as to reduce the difference between the actual temperature and the target temperature of the furnace body and realize automatic control of the temperature of the furnace body, thereby improving the control efficiency and the control precision of the temperature of the furnace body. The invention also provides a furnace body temperature control method of the vertical furnace.
Description
Technical Field
The invention relates to the field of semiconductor process equipment, in particular to a vertical furnace and a furnace body temperature control method of the vertical furnace.
Background
With the rapid development of the semiconductor industry, the demand of the semiconductor market is increasing day by day, and higher requirements are put forward on the production efficiency, the yield and other performances of semiconductor process equipment. The vertical furnace equipment relates to various processes such as thermal oxidation, chemical vapor deposition, thermal diffusion, metal alloying, impurity activation, dielectric film densification and the like. In the process flow, the temperature control effect is an important index for evaluating the process quality.
In terms of temperature rise capability, the difference between semiconductor process equipment produced by equipment manufacturers is not large, the temperature rise efficiency and the temperature rise uniformity of the semiconductor process equipment of each manufacturer can meet the normal process requirements, however, the temperature rise capability of the semiconductor process equipment has great difference in the temperature rise rate related to the temperature rise capability and the consistency of each temperature zone (for example, the zones corresponding to different heights of the vertical furnace), and the temperature rise capability becomes an important influence factor of the temperature control capability of the semiconductor process equipment.
In the existing semiconductor process equipment, the most common cooling mode is water-cooling natural cooling, the cooling rate is slow, and the cooling effect of each temperature zone is different due to the inconsistent heat preservation performance of each temperature zone. The novel furnace body structure designed aiming at the problem of cooling effect at the present stage adopts the air channel surrounding the furnace body to cool the furnace body, the air channel is opened and the air blower is used to accelerate the air flow of the air channel to take away heat when the temperature is required to be cooled, the cooling speed of each three-dimensional temperature zone in the air channel is greatly improved, the problem of inconsistency still exists in the cooling speed of each three-dimensional temperature zone, an operator is required to measure and calculate the temperature difference of each temperature zone of the furnace body in a large quantity, and manual multiple regulation and control are carried out on mechanical butterfly valves for controlling the wind speed of each temperature zone, the regulation efficiency is low, and an error which is difficult to avoid exists between the effect in practical application and theoretical calculation.
Therefore, how to provide an efficient and accurate furnace body temperature control scheme becomes a technical problem to be solved urgently in the field.
Disclosure of Invention
The invention aims to provide a vertical furnace and a furnace body temperature control method of the vertical furnace, which can improve the control efficiency and control precision of the furnace body temperature.
In order to achieve the above object, one aspect of the present invention provides a vertical furnace, including a furnace body, a temperature control assembly surrounding the furnace body, and an air supply pipeline, wherein an annular air duct is provided between the temperature control assembly and the furnace body, the temperature control assembly is communicated with the air supply pipeline, the air supply pipeline is used for supplying cooling air to the annular air duct, and an adjusting valve is provided on the air supply pipeline; the vertical furnace also comprises a temperature acquisition device and a control device, wherein the temperature acquisition device is used for acquiring the actual temperature of the furnace body, and the control device is used for controlling the opening of the regulating valve according to the difference value between the actual temperature and the target temperature of the furnace body so as to realize temperature control of the furnace body according to a preset variable temperature rate.
Optionally, the regulating valve comprises an electric butterfly valve.
Optionally, the control means comprises a programmable logic controller.
Optionally, the furnace body comprises an inner pipe and an outer pipe sleeved outside the inner pipe, and the temperature acquisition device is arranged between the inner wall of the outer pipe and the outer wall of the inner pipe.
Optionally, the annular air duct includes a plurality of temperature zones distributed along a height direction, the air supply pipelines are multiple, the plurality of air supply pipelines are used for conveying cooling gas to the plurality of temperature zones in a one-to-one correspondence manner, the temperature acquisition device includes temperature measurement points arranged in a one-to-one correspondence manner with the plurality of temperature zones, each temperature measurement point is used for detecting an actual temperature of each zone of the furnace body corresponding to each temperature zone, and the control device is further used for controlling an opening degree of the regulating valve on the corresponding air supply pipeline according to a difference value between the actual temperature of each temperature zone and a target temperature, so as to control the temperature of each zone of the furnace body according to a preset temperature change rate.
As a second aspect of the present invention, there is provided a furnace body temperature control method for a vertical furnace, the vertical furnace being the vertical furnace described above, the control method being implemented by a control device for the vertical furnace, the control method comprising:
and controlling the opening of the regulating valve according to the difference value between the actual temperature and the target temperature of the furnace body so as to realize temperature control of the furnace body at a preset variable temperature rate.
Optionally, the controlling the opening degree of the regulating valve according to the difference between the actual temperature and the target temperature of the furnace body includes:
periodically acquiring the actual temperature of the furnace body;
determining the opening degree regulating quantity according to the difference value between the actual temperature and the target temperature of the furnace body in the current period and the previous two periods;
and adjusting the opening of the adjusting valve according to the opening adjusting quantity.
Optionally, determining the opening degree adjustment amount of the adjusting valve according to the temperature difference value of the current cycle and the temperature difference values of the previous two cycles includes:
obtaining an opening degree adjusting parameter corresponding to the current period according to the following calculation formula:
△u(k)＝KP[e(k)-e(k-1)]+KIe(k)+KD[e(k)-2e(k-1)+e(k-2)]wherein Δ u (K) is the opening degree adjustment parameter, KP、KI、KDFor a fixed parameter, e (k) is a temperature difference value corresponding to the current period, e (k-1) is a temperature difference value corresponding to the previous period, and e (k-2) is a temperature difference value corresponding to the previous second period;
and multiplying the opening degree adjusting parameter by a preset proportion of the maximum adjusting quantity of the opening degree of the adjusting valve to obtain the opening degree adjusting quantity.
Alternatively, the KPHas a value of 2, said KIHas a value of 0.1, said KDThe value of (A) is 3, and the preset proportion is 10%。
Optionally, the annular air duct includes a plurality of temperature zones distributed in a height direction, the air supply pipelines are multiple, the air supply pipelines are used for conveying cooling gas to the temperature zones in a one-to-one correspondence manner, the temperature acquisition device includes temperature measurement points arranged in a one-to-one correspondence manner with the temperature zones, each temperature measurement point is used for detecting an actual temperature of each zone of the furnace body corresponding to each temperature zone, and the opening degree of the regulating valve is controlled according to a difference value between the actual temperature of the furnace body and a target temperature, including:
and controlling the opening of the regulating valve on the corresponding air supply pipeline according to the difference value between the actual temperature and the target temperature of each temperature zone so as to realize the temperature control of each zone of the furnace body according to a preset variable temperature rate.
In the vertical furnace and the furnace body temperature control method of the vertical furnace provided by the embodiment of the invention, the control device can automatically adjust the opening of the regulating valve in real time according to the actual temperature so as to reduce the difference between the actual temperature and the target temperature of the furnace body or enable the temperature change rate of the furnace body to be close to the temperature change rate of the target temperature, thereby realizing automatic control of the temperature of the furnace body, and further improving the control efficiency and the control precision of the temperature of the furnace body.
Drawings
The accompanying drawings, which are included to provide a further understanding of the invention and are incorporated in and constitute a part of this specification, illustrate embodiments of the invention and together with the description serve to explain the principles of the invention and not to limit the invention. In the drawings:
FIG. 1 is a schematic structural diagram of a vertical furnace according to an embodiment of the present invention;
FIG. 2 is an enlarged partial schematic view of region A of the vertical furnace of FIG. 1;
FIG. 3 is a schematic diagram of the communication connection between the control device and other devices in the vertical furnace according to the embodiment of the present invention;
FIG. 4 is a flowchart of a method for controlling the temperature of a vertical furnace body according to an embodiment of the present invention.
Detailed Description
The following detailed description of embodiments of the invention refers to the accompanying drawings. It should be understood that the detailed description and specific examples, while indicating the present invention, are given by way of illustration and explanation only, not limitation.
In order to solve the above technical problems, as an aspect of the present invention, a vertical furnace is provided, as shown in fig. 1 to 3, the vertical furnace includes a furnace body (the furnace body includes an outer tube 4 and an inner tube 5), a temperature control assembly disposed around the furnace body, and an air supply pipeline, wherein an annular air duct 16 is disposed between the temperature control assembly and the furnace body, the temperature control assembly is communicated with the air supply pipeline, the air supply pipeline is used for supplying cooling air to the annular air duct 16, and an adjusting valve 1 is disposed on the air supply pipeline. The vertical furnace also comprises a temperature acquisition device and a control device, wherein the temperature acquisition device is used for acquiring the actual temperature of the furnace body, and the control device is used for controlling the opening degree of the regulating valve 1 according to the difference value between the actual temperature and the target temperature of the furnace body so as to realize temperature control on the furnace body according to the preset variable temperature rate.
It should be noted that the opening degree of the regulating valve 1 can directly affect the flow rate of the cooling gas in the air supply pipeline, so that when the opening degree of the regulating valve 1 changes, the air speed of the cooling gas in the annular air duct 16 corresponding to the position of the air supply pipeline can be directly changed, and the heat exchange rate between the cooling gas and the furnace body is further affected. Specifically, when the opening of the regulating valve 1 is increased, the flow of the cooling gas in the air supply pipeline is increased, the air speed of the cooling gas in the annular air duct 16 is accelerated, and the heat dissipation rate of the furnace body is increased; the opening of the regulating valve 1 is reduced, the flow of the cooling gas in the air supply pipeline is reduced, the air speed of the cooling gas in the annular air duct 16 is reduced, and the heat dissipation rate of the furnace body is reduced.
In the invention, the control device can automatically adjust the opening of the regulating valve 1 according to the difference between the actual temperature and the target temperature of the furnace body so as to reduce the difference between the actual temperature and the target temperature of the furnace body. When the actual temperature is higher than the target temperature, the opening degree of the regulating valve 1 is increased, the heat dissipation rate of the furnace body is increased, the actual temperature is reduced to be close to the target temperature, or the reduction rate of the actual temperature is increased, and the cooling rate of the furnace body is close to the reduction rate of the target temperature; when the actual temperature is lower than the target temperature, the opening degree of the regulating valve 1 is reduced, and the heat dissipation rate of the furnace body is reduced, so that the actual temperature is increased to be close to the target temperature, or the reduction rate of the actual temperature is slowed down, and the cooling rate of the furnace body is close to the reduction rate of the target temperature.
In the vertical furnace provided by the invention, the control device can automatically adjust the opening of the regulating valve 1 in real time according to the actual temperature so as to reduce the difference between the actual temperature and the target temperature of the furnace body (or make the temperature change rate of the furnace body approach the temperature change rate of the target temperature), thereby realizing automatic control of the temperature of the furnace body and further improving the control efficiency and the control precision of the temperature of the furnace body.
The position of the temperature acquisition device in the vertical furnace is not particularly limited in the embodiments of the present invention, for example, preferably, as shown in fig. 1, the furnace body of the vertical furnace may include an inner tube 5 for accommodating the boat 6 and an outer tube 4 sleeved outside the inner tube 5, and the temperature acquisition device is disposed between the inner wall of the outer tube 4 and the outer wall of the inner tube 5, so as to avoid contact with the cooling gas while not affecting the gas environment inside the inner tube 5, and ensure the temperature measurement accuracy of the temperature acquisition device.
The remaining structure of the vertical furnace is not particularly limited in the embodiments of the present invention, for example, as shown in fig. 1, the temperature control assembly includes a furnace wire 7 for heating the furnace body and a housing sleeved outside the furnace wire 7, the surface of one side of the housing is formed with at least one air inlet 2, and the other side is formed with an air outlet. The air inlet pipeline is connected with the corresponding air inlet 2 on the shell, cooling gas enters the air inlet pipeline from an air source, flows to the air inlet 2 along the air inlet pipeline and enters the sectional air inlet structure 11 formed in the shell (each sectional air inlet structure 11 corresponds to one temperature zone), then enters the annular air duct 16 through the air hole 3 on the furnace wire 7, exchanges heat with the furnace body, and is discharged to the sectional exhaust structure 12 formed in the shell through the exhaust hole 13 formed in the other side of the furnace wire 7, tail gas in each exhaust structure 12 extends along the height direction formed in the shell and is collected through the exhaust channel 8 of each temperature zone and then is discharged out of the temperature control assembly from the air outlet on the shell, and finally the tail gas absorbs waste heat by the heat exchanger 9 and flows into the plant heat discharge pipeline through the fan 10.
In order to improve the uniformity of the furnace body temperature of the vertical furnace along the height direction, preferably, as shown in fig. 1 and fig. 2, the annular air duct 16 includes a plurality of temperature zones distributed along the height direction, the plurality of air supply pipelines are used for conveying cooling gas to the plurality of temperature zones in a one-to-one correspondence manner, the temperature collecting device includes temperature measuring points arranged in one-to-one correspondence manner with the plurality of temperature zones, each temperature measuring point is used for detecting the actual temperature of each region of the furnace body corresponding to each temperature zone, and the control device is further used for:
and controlling the opening of the regulating valve 1 on the corresponding blast pipeline according to the difference value between the actual temperature and the target temperature of each temperature zone so as to realize the temperature control of each zone of the furnace body according to the preset variable temperature rate.
As an alternative embodiment of the present invention, as shown in fig. 1, the temperature acquisition device may be a temperature measurement thermocouple 14, the temperature measurement thermocouple 14 has temperature measurement points 15 arranged in one-to-one correspondence with the plurality of temperature zones, and the control device obtains the actual temperature of each temperature zone through the temperature measurement thermocouple 14.
In the embodiment of the invention, the control device respectively controls the opening degrees of the regulating valves 1 corresponding to the plurality of temperature zones according to the actual temperatures of the plurality of temperature zones, so that the temperatures (or the temperature changing rates) of the furnace body at the plurality of temperatures are respectively and independently regulated, and the uniformity of controlling the temperature rising and reducing rates of each temperature zone of the furnace body is improved.
The structure of the regulating valve 1 is not particularly limited in the embodiment of the present invention, as long as automatic control can be achieved. For example, as an alternative embodiment of the present invention, the regulating valve 1 may include an electric butterfly valve, and the control device controls the opening degree of the electric butterfly valve by an electric signal. In the case where the control valve 1 is an electric butterfly valve, the opening of the control valve 1 means a rotation angle of a butterfly plate in the electric butterfly valve.
For example, as an optional implementation manner of the present invention, the control device may include a Programmable Logic Controller (PLC) control circuit, and the PLC control circuit is configured to implement the control method provided by the embodiment of the present invention. The PLC control circuit preferably includes a PID controller (proportional-integral-derivative controller) by which the adjustment amount of the opening degree of the control valve 1 is efficiently calculated.
The embodiment of the invention does not specifically limit how the control device is in communication connection with the electric butterfly valve, for example, optionally, the control device may control the rotation angle of the raft of the electric butterfly valve through a Devicenet network.
Specifically, as shown in fig. 3, the control device is connected to the regulating valve 1 (electric butterfly valve) through a communication cable to form a communication network (Devicenet network) between the devices, the control device determines the opening degree adjustment amount of the regulating valve 1 after acquiring the furnace body temperature by the temperature acquisition device, and sends a corresponding control signal to the regulating valve 1 through a Devicenet control unit (interface of the control device for converting and transmitting a control signal) and the Devicenet network according to the opening degree adjustment amount to change the opening degree of the regulating valve 1.
To better address the temperature change control requirement, the step of determining the opening value of the regulating valve 1 according to the temperature difference between the actual temperature and the target temperature preferably comprises:
periodically acquiring the actual temperature of the furnace body;
determining the opening degree regulating quantity according to the difference value between the actual temperature and the target temperature of the furnace body in the current period and the two previous periods;
and adjusting the opening of the adjusting valve according to the opening adjusting amount.
In the embodiment of the invention, the control device periodically acquires the temperature difference, and determines the opening degree regulating quantity according to the temperature difference of the current period, but determines the opening degree regulating quantity of each regulating valve 1 according to the temperature difference of the last three periods, thereby realizing the control of the temperature changing rate of the furnace body (each temperature zone) through incremental feedback regulation, reducing the difference between the actual temperature changing rate of the furnace body (each temperature zone) and the target temperature changing rate, and improving the temperature control effect of the temperature changing process.
For example, as an optional implementation manner of the present invention, the step of determining the opening degree adjustment amount of the regulating valve 1 according to the temperature difference value of the current cycle and the temperature difference values of the two previous cycles may include:
obtaining an opening degree adjusting parameter corresponding to the current period according to the following calculation formula:
△u(k)＝KP[e(k)-e(k-1)]+KIe(k)+KD[e(k)-2e(k-1)+e(k-2)]wherein Δ u (K) is an opening degree adjustment amount, KP、KI、KDFor a fixed parameter, e (k) is a temperature difference value corresponding to the current period, e (k-1) is a temperature difference value corresponding to the previous period, and e (k-2) is a temperature difference value corresponding to the previous second period;
and multiplying the opening degree adjusting parameter delta u (k) by a preset proportion of the maximum adjusting quantity of the opening degree of the adjusting valve to obtain the opening degree adjusting quantity.
The embodiment of the invention is used for setting the fixed parameter KP、KI、KDAnd the numerical value of the predetermined ratio is not particularly limited, e.g., optionally, KPMay have a value of 2, KIMay have a value of 0.1, KDThe value of (b) may be 3 and the preset ratio may be 10%.
Specifically, the opening degree adjustment parameter Δ u (k) corresponding to the current adjustment period (corresponding to each temperature zone) is calculated by Δ u (k) ═ 2[ e (k) — e (k-1) ] +0.1e (k) +3[ e (k) — 2e (k-1) + e (k-2) ], and the opening degree of the adjustment valve 1 is controlled to be changed by 10 Δ u (k)%.
It should be noted that there is a control limit for the opening degree of the regulator valve 1, that is, after the opening degree of the regulator valve 1 is fully opened (100%), even if the opening degree adjustment amount is a positive value, the opening degree of the regulator valve 1 cannot be continuously increased, and similarly, after the opening degree of the regulator valve 1 is fully closed (0%), even if the opening degree adjustment amount is a negative value, the opening degree of the regulator valve 1 cannot be continuously decreased.
The inventor of the present invention conducted repeated tests on a vertical furnace having the structure provided in the examples of the present invention to obtain the above KP、KI、KDAnd the value of the predetermined ratio, i.e. at KPIs 2, KIIs 0.1, K D3 and the preset proportion is 10 percent, the actual temperature change curve of the vertical furnace in the PID regulation process can be close to the target curve (namely the PID regulation efficiency is almost the highest). When adopting the structure and the sizeOptimum K for different vertical furnacesP、KI、KDAnd the value of the predetermined ratio is changed, and K is determined by experimentP、KI、KDAnd a new value of the preset ratio.
In the embodiment of the present invention, the opening degree adjustment parameter Δ u (k) is calculated first, and then the opening degree adjustment parameter Δ u (k) is multiplied by a fixed preset ratio to obtain the opening degree adjustment amount, which is only an implementation manner convenient for visually checking the size of the opening degree change amount, for example, when the preset ratio is 10%, a worker can visually judge that the opening degree of the adjusting valve 1 changes by several tens of percent according to the value of Δ u (k) (for example, when the opening degree adjustment parameter Δ u (k) obtained by calculation is 6.15, the worker can visually judge that the opening degree of the adjusting valve 1 will change by more than 60%).
In some embodiments of the present invention, the predetermined ratio may also be 100%, i.e., KPTake 0.2, KITake 0.01, KDTaking 0.3, the multiplication is not needed to be carried out later, the obtained opening degree adjusting parameter delta u (k) is directly used as the opening degree adjusting quantity, and the actual adjusting effect is not changed.
In order to facilitate the initial value setting of the opening degree of each regulating valve 1 and the temperature requirement in the temperature raising and reducing process by the operator, the control method preferably further comprises receiving process setting information before the semiconductor process is started, and adjusting the opening degree of the regulating valve 1 according to the process setting information. The process setting information may include information such as the temperature rise and the temperature fall speed (i.e., how much the temperature rise and fall are performed per unit time) in the temperature rise and fall process, in addition to the initial opening degree of the regulating valve 1.
As a second aspect of the present invention, there is provided a furnace body temperature control method for a vertical furnace, the vertical furnace being the vertical furnace provided in the embodiment of the present invention, and the control method being implemented by a control device for the vertical furnace, the control method including:
the opening degree of the regulating valve 1 is controlled according to the difference value of the actual temperature and the target temperature of the furnace body, so that the temperature of the furnace body is controlled according to the preset variable temperature rate.
In order to better meet the temperature change control requirement, preferably, the control device realizes the control of the temperature change rate of the furnace body through incremental feedback regulation, and controls the opening degree of the regulating valve 1 according to the difference value between the actual temperature and the target temperature of the furnace body, and the control device comprises:
periodically acquiring the actual temperature of the furnace body;
determining the opening degree regulating quantity according to the difference value between the actual temperature and the target temperature of the furnace body in the current period and the two previous periods;
the opening degree of the regulating valve 1 is regulated according to the opening degree regulating quantity.
For example, as an optional implementation manner of the present invention, the determining the opening degree adjustment amount of the regulating valve according to the temperature difference value of the current cycle and the temperature difference values of the two previous cycles includes:
obtaining an opening degree adjusting parameter corresponding to the current period according to the following calculation formula:
△u(k)＝KP[e(k)-e(k-1)]+KIe(k)+KD[e(k)-2e(k-1)+e(k-2)]wherein Δ u (K) is an opening degree adjustment amount, KP、KI、KDFor a fixed parameter, e (k) is a temperature difference value corresponding to the current period, e (k-1) is a temperature difference value corresponding to the previous period, and e (k-2) is a temperature difference value corresponding to the previous second period;
and multiplying the opening degree adjusting parameter delta u (k) by a preset proportion of the maximum adjusting quantity of the opening degree of the adjusting valve to obtain the opening degree adjusting quantity.
The embodiment of the invention is used for setting the fixed parameter KP、KI、KDAnd the numerical value of the predetermined ratio is not particularly limited, e.g., optionally, KPMay have a value of 2, KIMay have a value of 0.1, KDThe value of (b) may be 3 and the preset ratio may be 10%.
Referring to fig. 4, which is a flow chart of an embodiment of the method for controlling the furnace body temperature of the vertical furnace provided by the present invention, in this embodiment, the target temperature is a determined value, and the program is terminated when the control device adjusts the actual temperature of the furnace body to the target temperature through PID adjustment (i.e., when the opening adjustment amount is zero). As shown in fig. 4, at the beginning of the program, the initial opening degree and the target temperature of the regulating valve 1 are set, then the control device periodically calculates the temperature difference e (k-1), calculates the opening degree regulating parameter Δ u (k) by the calculation formula, and calculates the opening degree regulating quantity. When the opening adjustment quantity is not zero, the control device determines the new opening of the adjusting valve 1 according to the opening adjustment quantity and adjusts the new opening to the new opening, and when the opening adjustment quantity is zero, the actual temperature of the furnace body reaches the target temperature, and the program is terminated.
Specifically, when the regulating valve 1 is an electric butterfly valve, the opening degree refers to the rotation angle of a butterfly plate in the electric butterfly valve, and when the program starts, the initial opening degree of the regulating valve 1 is set to B, the control device calculates an angle adjustment amount C (i.e., an opening degree adjustment amount) at each cycle, and assigns a value of B + C to B (i.e., B + C), and then adjusts the rotation angle of the butterfly plate of the regulating valve 1 to a new angle B. When C is 0 (i.e., the opening adjustment amount is zero), the actual furnace temperature has reached the target temperature, and the routine ends.
In order to improve the uniformity of the furnace body temperature of the vertical furnace along the height direction, preferably, as shown in fig. 1 and fig. 2, the annular air duct 16 includes a plurality of temperature zones distributed along the height direction, the plurality of air supply pipelines are used for conveying cooling gas to the plurality of temperature zones in a one-to-one correspondence manner, the temperature acquisition device includes temperature measurement points arranged in a one-to-one correspondence manner with the plurality of temperature zones, and each temperature measurement point is used for detecting the actual temperature of each area of the furnace body corresponding to each temperature zone. The step of controlling the opening degree of the regulating valve 1 according to the difference value between the actual temperature and the target temperature of the furnace body specifically comprises the following steps:
and controlling the opening of the regulating valve 1 on the corresponding blast pipeline according to the difference value between the actual temperature and the target temperature of each temperature zone so as to realize the temperature control of each zone of the furnace body according to the preset variable temperature rate.
In order to facilitate the understanding of the actual effect of the method for controlling the temperature of the furnace body of the vertical furnace provided by the invention, the invention also provides an embodiment of the method applied to the cooling process, which comprises the following steps:
in the present embodiment, the control device acquires the actual temperature, calculates the opening adjustment amount, and adjusts the sampling period of the opening of the regulator valve 1The period is 10s, the initial set opening degree of the regulating valve 1 is adjusted to be 0 percent, KPHas a value of 2, KIHas a value of 0.1, KDThe value of (a) is 3, the initial temperature is 600 ℃, and the target cooling rate is 3 ℃/min (i.e., the target temperature reduction rate is 3 ℃/min).
TABLE 1-1
Table 1-1 is a record table of the actual temperature of the furnace body, the opening angle of the electric butterfly valve, and other calculation and control information in the cooling process of this embodiment. As can be seen from Table 1-1, in the first four periods numbered from 1 to 4, the actual temperature decrease rate is lower than the set value by 3 ℃/min, the control device judges that the opening angle of the electric butterfly valve needs to be increased, and the air intake is increased to take away more heat, so that the control device controls the opening angle of the electric butterfly valve to be gradually increased; in three periods numbered from 4 to 6, the actual reduction rate of the temperature is equal to or higher than a set value, the control device judges that the opening angle of the electric butterfly valve needs to be reduced, the air intake is reduced, and the control device controls the opening angle of the electric butterfly valve to be gradually reduced; in two periods with the serial numbers of 6 to 8, the temperature rises, the control device judges that the opening angle of the electric butterfly valve needs to be increased, the air inlet amount is increased to take away more heat, and therefore the opening angle of the electric butterfly valve is controlled to be gradually increased to achieve full opening (100%); in two periods with the numbers of 8 and 9, the temperature falls back again, and the cooling rate is increased, so that the control device judges that the opening angle of the electric butterfly valve needs to be reduced through logical operation, reduces the air intake and controls the opening angle of the electric butterfly valve to be gradually reduced. According to the change of the temperature, when the cooling rate is lower than a set value, the opening angle of the electric butterfly valve is increased, so that the air inlet amount is increased to take away more heat to accelerate the reduction of the temperature, and when the cooling rate is higher than the set value, the opening angle of the electric butterfly valve is reduced, and the loss of the heat is reduced. The whole cooling process does not need artificial interference, and the control device automatically adjusts the opening angle of the electric butterfly valve so as to realize stable regulation and control of the cooling rate.
It will be understood that the above embodiments are merely exemplary embodiments taken to illustrate the principles of the present invention, which is not limited thereto. It will be apparent to those skilled in the art that various modifications and improvements can be made without departing from the spirit and substance of the invention, and these modifications and improvements are also considered to be within the scope of the invention.
Claims (10)
1. A vertical furnace is characterized by comprising a furnace body, a temperature control assembly and an air supply pipeline, wherein the temperature control assembly and the air supply pipeline are arranged around the furnace body, an annular air channel is arranged between the temperature control assembly and the furnace body, the temperature control assembly is communicated with the air supply pipeline, the air supply pipeline is used for conveying cooling air to the annular air channel, and an adjusting valve is arranged on the air supply pipeline; the vertical furnace also comprises a temperature acquisition device and a control device, wherein the temperature acquisition device is used for acquiring the actual temperature of the furnace body, and the control device is used for controlling the opening of the regulating valve according to the difference value between the actual temperature and the target temperature of the furnace body so as to realize temperature control of the furnace body according to a preset variable temperature rate.
2. The vertical furnace according to claim 1, wherein the regulating valve comprises an electrically operated butterfly valve.
3. The vertical furnace of claim 2, wherein the control device comprises a programmable logic controller.
4. The vertical furnace according to claim 1, wherein the furnace body comprises an inner tube and an outer tube sleeved outside the inner tube, and the temperature acquisition device is arranged between the inner wall of the outer tube and the outer wall of the inner tube.
5. The vertical furnace according to claim 4, wherein the annular air duct comprises a plurality of temperature zones distributed along the height direction, the air supply pipelines are a plurality of air supply pipelines, the air supply pipelines are used for conveying cooling gas to the temperature zones in a one-to-one correspondence manner, the temperature acquisition device comprises temperature measurement points which are arranged in a one-to-one correspondence manner with the temperature zones, each temperature measurement point is used for detecting the actual temperature of each zone of the furnace body corresponding to each temperature zone, and the control device is further used for controlling the opening degree of the regulating valve on the corresponding air supply pipeline according to the difference value between the actual temperature of each temperature zone and the target temperature, so as to realize that each zone of the furnace body is subjected to temperature control at a preset temperature change rate.
6. A furnace body temperature control method of a vertical furnace, characterized in that the vertical furnace is the vertical furnace according to any one of claims 1 to 5, and the control method is realized by a control device of the vertical furnace, and the control method comprises:
and controlling the opening of the regulating valve according to the difference value between the actual temperature and the target temperature of the furnace body so as to realize temperature control of the furnace body at a preset variable temperature rate.
7. The control method according to claim 6, wherein the controlling the opening degree of the regulating valve according to the difference between the actual temperature of the furnace body and the target temperature includes:
periodically acquiring the actual temperature of the furnace body;
determining the opening degree regulating quantity according to the difference value between the actual temperature and the target temperature of the furnace body in the current period and the previous two periods;
and adjusting the opening of the adjusting valve according to the opening adjusting quantity.
8. The control method of claim 7, wherein determining the opening degree adjustment amount of the regulating valve according to the temperature difference value of the current cycle and the temperature difference values of the previous two cycles comprises:
obtaining an opening degree adjusting parameter corresponding to the current period according to the following calculation formula:
△u(k)＝KP[e(k)-e(k-1)]+KIe(k)+KD[e(k)-2e(k-1)+e(k-2)]wherein Δ u (K) is the opening degree adjustment parameter, KP、KI、KDFor a fixed parameter, e (k) is a temperature difference value corresponding to the current period, e (k-1) is a temperature difference value corresponding to the previous period, and e (k-2) is a temperature difference value corresponding to the previous second period;
and multiplying the opening degree adjusting parameter by a preset proportion of the maximum adjusting quantity of the opening degree of the adjusting valve to obtain the opening degree adjusting quantity.
9. The control method according to claim 8, wherein K isPHas a value of 2, said KIHas a value of 0.1, said KDIs 3, said preset proportion being 10%.
10. The control method according to any one of claims 6 to 9, wherein the annular air duct includes a plurality of temperature zones distributed in a height direction, the air supply lines are provided in plural, the air supply lines are used for supplying cooling gas to the temperature zones in a one-to-one correspondence, the temperature acquisition device includes temperature measurement points provided in a one-to-one correspondence with the temperature zones, each of the temperature measurement points is used for detecting an actual temperature of each of the furnace bodies corresponding to each of the temperature zones, and the controlling of the opening degree of the regulating valve according to a difference between the actual temperature of the furnace body and a target temperature includes:
and controlling the opening of the regulating valve on the corresponding air supply pipeline according to the difference value between the actual temperature and the target temperature of each temperature zone so as to realize the temperature control of each zone of the furnace body according to a preset variable temperature rate.
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| CN114279210A (en) * | 2022-01-07 | 2022-04-05 | 中冶沈勘秦皇岛工程设计研究总院有限公司 | Novel automatic control method for air supply of vertical cooling kiln |
| CN114980677A (en) * | 2022-05-30 | 2022-08-30 | 北京北方华创微电子装备有限公司 | Radio frequency power supply and cooling control method thereof |
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Application publication date: 20210827 |