CN113203784B - Variable frequency oxygen sensor - Google Patents
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- CN113203784B CN113203784B CN202110555297.8A CN202110555297A CN113203784B CN 113203784 B CN113203784 B CN 113203784B CN 202110555297 A CN202110555297 A CN 202110555297A CN 113203784 B CN113203784 B CN 113203784B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/4067—Means for heating or controlling the temperature of the solid electrolyte
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
- G01N27/4077—Means for protecting the electrolyte or the electrodes
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
- G01N27/26—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
- G01N27/403—Cells and electrode assemblies
- G01N27/406—Cells and probes with solid electrolytes
- G01N27/407—Cells and probes with solid electrolytes for investigating or analysing gases
- G01N27/409—Oxygen concentration cells
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Abstract
The invention discloses a variable-frequency oxygen sensor, wherein a first solid electrolyte layer and a cavity layer enclose to form a first closed cavity, a second solid electrolyte layer and the cavity layer enclose to form a second closed cavity, the cavity layer is provided with a closed inner cavity positioned between the first closed cavity and the second closed cavity, the closed inner cavity is isolated from an atmosphere to be measured through the first solid electrolyte layer, the cavity layer and the second solid electrolyte layer, one side of the first solid electrolyte layer, facing a sensitive electrode pin layer, is provided with an outer electrode, one side of the first solid electrolyte layer, facing the cavity layer, is provided with a first common electrode, the first common electrode is contained in the first closed cavity, one side of the second solid electrolyte layer, facing the cavity layer, is provided with a second common electrode, one side of the second solid electrolyte layer, facing a blocking layer, is provided with an inner electrode, and the second common electrode is contained in the second closed cavity. The variable-frequency oxygen sensor shortens cold start time and can avoid the condition that the closed inner chamber is cracked due to high-low temperature circulation.
Description
Technical Field
The invention relates to the technical field of gas sensors, in particular to a variable-frequency oxygen sensor.
Background
The existing variable-frequency oxygen sensor generally adopts a platinum ring and high-temperature glass glaze to seal and form a closed chamber so as to remove the environmental limitation and the measurement error caused by a reference gas chamber. Because present frequency conversion oxygen sensor needs external heater to surround to heat frequency conversion oxygen sensor at the during operation, the preheating time that gets into operating condition reaches more than 100 seconds usually, and the used high temperature glass glaze of current frequency conversion oxygen sensor is easy the fracture in long-term high low temperature recycling use in addition, thereby leads to the airtight cavity in the frequency conversion oxygen sensor to become invalid, and the sensor can't normally work, and very big degree has reduced frequency conversion oxygen sensor's life.
Disclosure of Invention
The invention mainly aims to provide a variable-frequency oxygen sensor, and aims to solve the technical problems that in the prior art, the variable-frequency oxygen sensor is slow in starting and easy to crack.
In order to achieve the purpose, the variable-frequency oxygen sensor provided by the invention comprises a sensitive electrode pin layer, a first solid electrolyte layer, a chamber layer, a second solid electrolyte layer, a barrier layer and a heating layer which are sequentially sintered, wherein the first solid electrolyte layer and the chamber layer enclose a first closed chamber, the second solid electrolyte layer and the chamber layer enclose a second closed chamber, the chamber layer is provided with a closed inner chamber located between the first closed chamber and the second closed chamber, the closed inner chamber is isolated from an atmosphere to be measured through the first solid electrolyte layer, the chamber layer and the second solid electrolyte layer, one side of the first solid electrolyte layer facing the sensitive electrode pin layer is provided with an outer electrode, one side of the first solid electrolyte layer facing the chamber layer is provided with a first common electrode, the first common electrode is accommodated in the first closed chamber, one side of the second solid electrolyte layer facing the chamber layer is provided with a second common electrode, one side of the second solid electrolyte layer facing the barrier layer is provided with an inner electrode, the second common electrode is accommodated in the first closed chamber, and the second common electrode is provided with the heating layer and the heating layer.
Optionally, the sensitive electrode pin layer is towards one side of first solid electrolyte layer is equipped with first gas passage, the barrier layer is towards one side of second solid electrolyte layer is equipped with second gas passage, first gas passage with second gas passage all is used for supplying the atmosphere that awaits measuring to pass through, just first gas passage with outer electrode at least part overlaps, second gas passage with inner electrode at least part overlaps.
Optionally, the variable-frequency oxygen sensor further includes a first protective layer for covering the outer electrode and a second protective layer for covering the inner electrode, the first protective layer is disposed between the first gas channel and the outer electrode, the second protective layer is disposed between the second gas channel and the inner electrode, a third protective layer covers one side of the first common electrode facing the chamber layer, the third protective layer is accommodated in the first sealed chamber, a fourth protective layer covers one side of the second common electrode facing the chamber layer, and the fourth protective layer is accommodated in the second sealed chamber.
Optionally, the first protective layer, the second protective layer, the third protective layer, and the fourth protective layer are porous zirconia layers or porous alumina layers.
Optionally, the zone of heating deviates from one side of barrier layer is equipped with anodal heating pin and negative pole heating pin, be connected with anodal heating lead and negative pole heating lead on the heater, anodal heating pin negative pole heating pin respectively correspond with anodal heating lead the negative pole heating pin is connected.
Optionally, frequency conversion oxygen sensor still includes first insulating layer and second insulating layer, first insulating layer set up in the barrier layer orientation zone of heating one side, the second insulating layer is located the zone of heating deviates from anodal heating pin with one side of negative pole heating pin, the heater is located the second insulating layer orientation one side of first insulating layer.
Optionally, the variable frequency oxygen sensor further includes a first pin, a second pin and a third pin, the first pin passes through the sensitive electrode pin layer and the outer electrode is connected through the outer electrode lead, the second pin passes through the sensitive electrode pin layer in sequence, the first solid electrolyte layer, the chamber layer and the second solid electrolyte layer, just the second pin with the inner electrode is connected through the inner electrode lead, the third pin passes through the sensitive electrode pin layer, the first solid electrolyte layer and the chamber layer in sequence, and the first common electrode and the second common electrode correspond respectively through the first common electrode lead and the second common electrode lead and are connected through the third pin.
Optionally, the outer electrode lead, the inner electrode lead, the first common electrode lead and the second common electrode lead are all made of dense platinum, and the thickness of the outer electrode lead, the thickness of the inner electrode lead, the thickness of the first common electrode lead and the thickness of the second common electrode lead are both 5 μm to 50 μm.
Optionally, the first common electrode, the second common electrode, the inner electrode, and the outer electrode are all porous platinum electrodes, and the thickness of the first common electrode, the thickness of the second common electrode, the thickness of the inner electrode, and the thickness of the outer electrode are 5 μm to 50 μm.
Optionally, the sensing electrode pin layer, the first solid electrolyte layer, the chamber layer, the second solid electrolyte layer, the barrier layer and the heating layer are all 3-10% by mol yttria-stabilized zirconia ceramic.
In the technical scheme of the invention, the heater is arranged on the heating layer, the heater can be integrated in the variable-frequency oxygen sensor, so that the situation that the heater is surrounded on the periphery of the variable-frequency oxygen sensor in the prior art is replaced, the distance between the heater and the first common electrode, the distance between the heater and the second common electrode, the distance between the heater and the outer electrode and the distance between the heater and the inner electrode are shortened, the cold start speed of the variable-frequency oxygen sensor can be accelerated, and the situation that the variable-frequency oxygen sensor is cracked due to long-time cold start is avoided. The variable-frequency oxygen sensor shortens cold start time and avoids cracking caused by high-low temperature circulation.
Drawings
In order to more clearly illustrate the embodiments of the present invention or the technical solutions in the prior art, the drawings used in the description of the embodiments or the prior art will be briefly described below, it is obvious that the drawings in the following description are only some embodiments of the present invention, and for those skilled in the art, other drawings can be obtained according to the structures shown in the drawings without creative efforts.
FIG. 1 is a schematic view of an assembly of a variable frequency oxygen sensor according to an embodiment of the present invention;
FIG. 2 is an exploded view of a variable frequency oxygen sensor according to an embodiment of the present invention.
The reference numbers indicate:
| reference numerals | Name (R) | Reference numerals | Name (R) |
| 100 | Variable |
18 | Second |
| 1 | Sensitive |
19 | Third |
| 2 | First solid electrolyte layer | 20 | A fourth |
| 3 | |
21 | Positive electrode heating pin |
| 4 | Second |
22 | Negative |
| 5 | |
23 | Positive |
| 6 | |
24 | Negative |
| 7 | Closed inner chamber | 25 | A first insulating layer |
| 8 | A first closed chamber | 26 | A second insulating layer |
| 9 | Second closed chamber | 27 | |
| 10 | External electrode | 28 | Second pin |
| 11 | A first common electrode | 29 | Third pin |
| 12 | A second |
30 | External |
| 13 | |
31 | First |
| 14 | |
32 | Second |
| 15 | |
33 | |
| 16 | |
34 | Wire through |
| 17 | First protective layer |
The implementation, functional features and advantages of the objects of the present invention will be further explained with reference to the accompanying drawings.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be obtained by a person skilled in the art without inventive step based on the embodiments of the present invention, are within the scope of protection of the present invention.
It should be noted that, if directional indications (such as up, down, left, right, front, back, 8230; etc.) are involved in the embodiment of the present invention, the directional indications are only used for explaining the relative positional relationship between the components, the motion situation, etc. in a specific posture (as shown in the figure), and if the specific posture is changed, the directional indications are correspondingly changed.
In addition, if there is a description relating to "first", "second", etc. in the embodiments of the present invention, the description of "first", "second", etc. is for descriptive purposes only and is not to be construed as indicating or implying relative importance or to implicitly indicate the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include at least one such feature. In addition, technical solutions between the embodiments may be combined with each other, but must be based on the realization of the technical solutions by a person skilled in the art, and when the technical solutions are contradictory to each other or cannot be realized, such a combination should not be considered to exist, and is not within the protection scope of the present invention.
The invention provides a variable-frequency oxygen sensor.
As shown in fig. 1 to fig. 2, in an embodiment of the present invention, a variable frequency oxygen sensor 100 includes a sensitive electrode pin layer 1, a first solid electrolyte layer 2, a chamber layer 3, a second solid electrolyte layer 4, a barrier layer 5, and a heating layer 6, which are sintered in sequence, where the first solid electrolyte layer 2 and the chamber layer 3 enclose a first sealed chamber 8, the second solid electrolyte layer 4 and the chamber layer 3 enclose a second sealed chamber 9, the chamber layer 3 is provided with a sealed inner chamber 7 located between the first sealed chamber 8 and the second sealed chamber 9, and the sealed inner chamber 7 is isolated from an atmosphere to be measured by the first solid electrolyte layer 2, the chamber layer 3, and the second solid electrolyte layer 4; an outer electrode 10 is arranged on one side, facing the sensitive electrode pin layer 1, of the first solid electrolyte layer 2, a first common electrode 11 is arranged on one side, facing the cavity layer 3, of the first solid electrolyte layer 2, the first common electrode 11 is contained in the first closed cavity 8, a second common electrode 12 is arranged on one side, facing the cavity layer 3, of the second solid electrolyte layer 4, an inner electrode 13 is arranged on one side, facing the barrier layer 5, of the second solid electrolyte layer 4, the second common electrode 12 is contained in the second closed cavity 9, a heater 14 is arranged on one side, facing the barrier layer 5, of the heating layer 6, and the heater 14 is used for heating the outer electrode 10, the first common electrode 11, the second common electrode 12 and the inner electrode 13.
The heater 14 in this embodiment is a platinum heating circuit, and the thickness of the heater 14 is 5 μm to 50 μm. The first solid electrolyte layer 2 and the chamber layer 3 are tightly combined, the first common electrode 11 is printed on the first solid electrolyte layer 2, the first common electrode 11 is completely filled in the first closed chamber 8 and matched with the shape of the first closed chamber 8, meanwhile, the second solid electrolyte layer 4 is also tightly combined with the chamber layer 3, the second common electrode 12 is printed on the second solid electrolyte layer 4, and the second common electrode 12 is completely filled in the second closed chamber 9 and matched with the shape of the second closed chamber 9.
In the variable-frequency oxygen sensor 100 of the embodiment, the heater 14 is disposed on the heating layer 6, the heater 14 can be integrated inside the variable-frequency oxygen sensor 100, so as to replace the prior art that the heater 14 surrounds the variable-frequency oxygen sensor 100, shorten the distance between the heater 14 and the first common electrode 11, the second common electrode 12, the outer electrode 10 and the inner electrode 13, and accelerate the cold start speed of the variable-frequency oxygen sensor 100, on this basis, the first common electrode 11 is wrapped in the first sealed chamber 8 between the first solid electrolyte layer 2 and the chamber layer 3, and the second common electrode 12 is wrapped in the second sealed chamber 9 between the chamber layer 3 and the second solid electrolyte layer 4, so that the first common electrode 11, the second common electrode 12 and the sealed inner chamber 7 are completely isolated from the atmosphere to be measured, the first sealed chamber 8, the second sealed chamber 9 and the sealed inner chamber 7 are formed by sintering among the first solid electrolyte layer 2, the chamber layer 3 and the second solid electrolyte layer 4, thereby greatly improving the structural reliability of the sealed inner chamber 7, further avoiding the cracking of the variable-frequency oxygen sensor 100 due to the open cycle of the variable-frequency oxygen sensor 100, and prolonging the service life of the variable-frequency oxygen sensor. The variable frequency oxygen sensor 100 in this embodiment not only shortens the cold start time, but also avoids the cracking due to high and low temperature cycles.
Specifically, one side of the sensitive electrode pin layer 1 facing the first solid electrolyte layer 2 is provided with a first gas channel 15, one side of the barrier layer 5 facing the second solid electrolyte layer 4 is provided with a second gas channel 16, the first gas channel 15 and the second gas channel 16 are both used for allowing the atmosphere to be measured to pass through, the first gas channel 15 and the outer electrode 10 are at least partially overlapped, and the second gas channel 16 and the inner electrode 13 are at least partially overlapped. In this embodiment, the first gas channel 15 and the second gas channel 16 are respectively disposed at the upper and lower sides of the first sealed chamber 8 and the second sealed chamber 9, and the first gas channel 15 and the second gas channel 16 are both disposed at the right end of the variable frequency oxygen sensor 100 and correspond to the heater 14, so that the passing of the atmosphere to be measured can be accelerated, and the response time of the variable frequency oxygen sensor 100 can be shortened.
In an embodiment, the variable frequency oxygen sensor 100 further includes a first protective layer 17 for covering the outer electrode 10 and a second protective layer 18 for covering the inner electrode 13, the first protective layer 17 is disposed between the first gas channel 15 and the outer electrode 10, the second protective layer 18 is disposed between the second gas channel 16 and the inner electrode 13, one side of the first common electrode 11 facing the chamber layer 3 is covered with a third protective layer 19, the third protective layer 19 is accommodated in the first sealed chamber 8, one side of the second common electrode 12 facing the chamber layer 3 is covered with a fourth protective layer 20, and the fourth protective layer 20 is accommodated in the second sealed chamber 9. In the variable frequency oxygen sensor 100 of the present embodiment, the first protective layer 17, the second protective layer 18, the third protective layer 19, and the fourth protective layer 20 are porous zirconia layers or porous alumina layers. The material of the first protection layer 17, the material of the second protection layer 18, the material of the third protection layer 19, and the material of the fourth protection layer 20 may be the same or different, in this embodiment, the first protection layer 17 and the outer electrode 10 are both accommodated in the first closed chamber 8, and the second protection layer 18 and the inner electrode 13 are both accommodated in the second closed chamber 9, so that the outer electrode 10 and the inner electrode 13 can be effectively protected, and the service life of the oxygen sensor 100 is prolonged.
As shown in fig. 1 to 2, a positive electrode heating pin 21 and a negative electrode heating pin 22 are disposed on a side of the heating layer 6 away from the barrier layer 5, a positive electrode heating lead 23 and a negative electrode heating lead 24 are connected to the heater 14, and the positive electrode heating pin 21 and the negative electrode heating pin 22 are respectively connected to the positive electrode heating lead 23 and the negative electrode heating lead 24. The anode heating pins 21 and the cathode heating pins 22 are arranged at the right end of the variable frequency oxygen sensor 100 side by side at intervals, two wire hole groups 34 are formed in the heating layer 6 so that the anode heating lead 23 and the cathode heating lead 24 can pass through the two wire hole groups, and the two wire hole groups 34 are respectively arranged corresponding to the anode heating pins 21 and the cathode heating pins 22. In addition, in the present embodiment, the variable-frequency oxygen sensor 100 further includes a first insulating layer 25 and a second insulating layer 26, the first insulating layer 25 is disposed on the side of the barrier layer 5 facing the heating layer 6, the second insulating layer 26 is disposed on the side of the heating layer 6 away from the positive heating pin 21 and the negative heating pin 22, and the heater 14 is disposed on the side of the second insulating layer 26 facing the first insulating layer 25. The first insulating layer 25 and the second insulating layer 26 are both alumina layers, and the thickness of the first insulating layer 25 and the thickness of the second insulating layer 26 are 10 μm to 100 μm, and in this embodiment, the upper and lower sides of the heater 14 are specifically protected by the first insulating layer 25 and the second insulating layer 26, so that the service life of the heater 14 can be prolonged.
In another embodiment, the variable frequency oxygen sensor 100 further includes a first pin 27, a second pin 28 and a third pin 29, the first pin 27 passes through the sensitive electrode pin layer 1 to be connected with the external electrode 10 through an external electrode lead 30, the second pin 28 sequentially passes through the sensitive electrode pin layer 1, the first solid electrolyte layer 2, the chamber layer 3 and the second solid electrolyte layer 4, the second pin 28 is connected with the internal electrode 13 through an internal electrode lead 33, the third pin 29 sequentially passes through the sensitive electrode pin layer 1, the first solid electrolyte layer 2 and the chamber layer 3, and the first common electrode 11 and the second common electrode 12 are respectively connected with the third pin 29 through a first common electrode lead 31 and a second common electrode lead 32. In order to facilitate the first pin 27, the second pin 28, and the third pin 29 to pass through the variable frequency oxygen sensor 100 in this embodiment, three wire through hole groups 34 are formed in the sensitive electrode pin layer 1, and the three wire through hole groups 34 are arranged in a shape of "pin", where the three wire through hole groups 34 correspond to the first pin 27, the second pin 28, and the third pin 29, respectively, one wire through hole group 34 is located at the left end of the sensitive electrode pin layer 1, and the other two wire through hole groups 34 are located at the right end side by side.
In this embodiment, the outer electrode lead 30, the inner electrode lead 33, the first common electrode lead 31 and the second common electrode lead 32 are all made of dense platinum, and the thickness of the outer electrode lead 30, the thickness of the inner electrode lead 33, the thickness of the first common electrode lead 31 and the thickness of the second common electrode lead 32 are both 5 μm to 50 μm. In this embodiment, the first common electrode 11, the second common electrode 12, the inner electrode 13, and the outer electrode 10 are all porous platinum electrodes, and the thickness of the first common electrode 11, the thickness of the second common electrode 12, the thickness of the inner electrode 13, and the thickness of the outer electrode 10 are 5 μm to 50 μm. The sensing electrode pin layer 1, the first solid electrolyte layer 2, the chamber layer 3, the second solid electrolyte layer 4, the barrier layer 5 and the heating layer 6 of this example were each 3 to 10 mol% of the yttria-stabilized zirconia ceramic. In this embodiment, the outer electrode lead 30, the inner electrode lead 33, the first common electrode lead 31, the second common electrode lead 32, the first common electrode 11, the second common electrode 12, the inner electrode 13, the outer electrode 10, the sensitive electrode pin layer 1, the first solid electrolyte layer 2, the chamber layer 3, the second solid electrolyte layer 4, the barrier layer 5, and the heating layer 6 are matched with each other, so that the thickness of the variable frequency oxygen sensor 100 is not more than 2mm, the heater 14 is integrated in the variable frequency oxygen sensor 100 with the thickness not more than 2mm, the heating efficiency of the heater 14 can be greatly improved, and the cold start time of the variable frequency oxygen sensor 100 is further shortened.
The above description is only a preferred embodiment of the present invention, and not intended to limit the scope of the present invention, and all modifications and equivalents of the present invention, which are made by the contents of the present specification and the accompanying drawings, or directly/indirectly applied to other related technical fields, are included in the scope of the present invention.
Claims (10)
1. The utility model provides a frequency conversion oxygen sensor, its characterized in that, frequency conversion oxygen sensor is including the sensitive electrode pin layer, first solid electrolyte layer, chamber layer, second solid electrolyte layer, barrier layer and the zone of heating that sinter in proper order and form, first solid electrolyte layer with chamber layer encloses into first airtight cavity, second solid electrolyte layer with chamber layer encloses into the airtight cavity of second, just the chamber layer is provided with and is located first airtight cavity with airtight interior chamber between the airtight cavity of second, airtight interior chamber passes through first solid electrolyte layer chamber layer second solid electrolyte layer is isolated with the atmosphere that awaits measuring, first solid electrolyte layer orientation one side on sensitive electrode pin layer is equipped with the outer electrode, first solid electrolyte layer orientation one side on chamber layer is equipped with first common electrode, and first common electrode holding in first airtight cavity, second solid electrolyte layer orientation one side on chamber layer is equipped with second common electrode, second solid electrolyte layer one side on towards the outer electrode is equipped with the inner electrode, just second common electrode holding is equipped with the second common electrode in the airtight cavity, the second common electrode holding is used for the heating one side of heater.
2. The variable frequency oxygen sensor according to claim 1, wherein a side of the sensing electrode pin layer facing the first solid electrolyte layer is provided with a first gas channel, a side of the barrier layer facing the second solid electrolyte layer is provided with a second gas channel, the first gas channel and the second gas channel are both used for passing an atmosphere to be measured, and the first gas channel at least partially overlaps the outer electrode, and the second gas channel at least partially overlaps the inner electrode.
3. The variable frequency oxygen sensor of claim 2, further comprising a first protective layer for covering the outer electrode and a second protective layer for covering the inner electrode, the first protective layer being disposed between the first gas channel and the outer electrode, the second protective layer being disposed between the second gas channel and the inner electrode, a third protective layer covering a side of the first common electrode facing the chamber layer, the third protective layer being received in the first enclosed chamber, a fourth protective layer covering a side of the second common electrode facing the chamber layer, the fourth protective layer being received in the second enclosed chamber.
4. The variable frequency oxygen sensor of claim 3, wherein the first, second, third, and fourth protective layers are porous zirconia layers or porous alumina layers.
5. The variable-frequency oxygen sensor according to claim 1, wherein a positive heating pin and a negative heating pin are disposed on a side of the heating layer facing away from the barrier layer, a positive heating lead and a negative heating lead are connected to the heater, and the positive heating pin and the negative heating pin are respectively connected to the positive heating lead and the negative heating lead.
6. The variable frequency oxygen sensor of claim 5, further comprising a first insulating layer disposed on a side of the barrier layer facing the heating layer, and a second insulating layer disposed on a side of the heating layer facing away from the positive and negative heating pins, wherein the heater is disposed on a side of the second insulating layer facing the first insulating layer.
7. The variable frequency oxygen sensor according to any one of claims 1 to 6, further comprising a first pin, a second pin and a third pin, wherein the first pin passes through the sensitive electrode pin layer and is connected with the outer electrode through an outer electrode lead, the second pin passes through the sensitive electrode pin layer, the first solid electrolyte layer, the chamber layer and the second solid electrolyte layer in sequence, the second pin and the inner electrode are connected through an inner electrode lead, the third pin passes through the sensitive electrode pin layer, the first solid electrolyte layer and the chamber layer in sequence, and the first common electrode and the second common electrode are respectively connected with the third pin through a first common electrode lead and a second common electrode lead.
8. The variable frequency oxygen sensor of claim 7, wherein the outer electrode lead, the inner electrode lead, the first common electrode lead, and the second common electrode lead are all dense platinum pieces, and the thickness of the outer electrode lead, the thickness of the inner electrode lead, the thickness of the first common electrode lead, and the thickness of the second common electrode lead are both 5 μm to 50 μm.
9. The variable frequency oxygen sensor of any one of claims 1 to 6, wherein the first common electrode, the second common electrode, the inner electrode, and the outer electrode are all porous platinum electrodes, and the thickness of the first common electrode, the thickness of the second common electrode, the thickness of the inner electrode, and the thickness of the outer electrode are 5 μm to 50 μm.
10. The variable frequency oxygen sensor of any one of claims 1 to 6, wherein the sensing electrode pin layer, the first solid electrolyte layer, chamber layer, the second solid electrolyte layer, the barrier layer, and the heating layer are each 3-10% mol yttria-stabilized zirconia ceramic.
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