CN113191017B - 虚拟量测模型构建方法、虚拟量测方法、系统、电子设备及计算机可读存储介质 - Google Patents
虚拟量测模型构建方法、虚拟量测方法、系统、电子设备及计算机可读存储介质 Download PDFInfo
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- CN113191017B CN113191017B CN202110559957.XA CN202110559957A CN113191017B CN 113191017 B CN113191017 B CN 113191017B CN 202110559957 A CN202110559957 A CN 202110559957A CN 113191017 B CN113191017 B CN 113191017B
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- G—PHYSICS
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- G06F—ELECTRIC DIGITAL DATA PROCESSING
- G06F18/00—Pattern recognition
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- G06F18/21—Design or setup of recognition systems or techniques; Extraction of features in feature space; Blind source separation
- G06F18/214—Generating training patterns; Bootstrap methods, e.g. bagging or boosting
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- G06F2119/00—Details relating to the type or aim of the analysis or the optimisation
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TW201205440A (en) * | 2010-07-16 | 2012-02-01 | Nat Univ Tsing Hua | Virtual measuring system and method thereof for predicting the quality of thin film transistor liquid crystal display processes |
CN101976045B (zh) * | 2010-08-25 | 2012-05-23 | 江苏大学 | 用于tft-lcd蚀刻制程的面板品质虚拟量测方法与系统 |
CN101963802B (zh) * | 2010-08-25 | 2012-08-15 | 江苏大学 | 批次制程的虚拟量测方法与系统 |
US11144701B2 (en) * | 2017-06-18 | 2021-10-12 | Coventor, Inc. | System and method for key parameter identification, process model calibration and variability analysis in a virtual semiconductor device fabrication environment |
CN108387495B (zh) * | 2018-01-22 | 2020-03-31 | 青岛理工大学 | 一种多孔混凝土孔隙率计算和孔隙参数表征方法 |
CN109919097A (zh) * | 2019-03-08 | 2019-06-21 | 中国科学院自动化研究所 | 基于多任务学习的人脸和关键点联合检测系统、方法 |
CN110782546A (zh) * | 2019-09-25 | 2020-02-11 | 上海众壹云计算科技有限公司 | 基于组合树模型的半导体pvd制程的电阻率虚拟量测方法 |
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Address after: 610000 No. 270, floor 2, No. 8, Jinxiu street, Wuhou District, Chengdu, Sichuan Applicant after: Chengdu shuzhilian Technology Co.,Ltd. Address before: 610000 No.2, 4th floor, building 1, Jule Road intersection, West 1st section of 1st ring road, Wuhou District, Chengdu City, Sichuan Province Applicant before: CHENGDU SHUZHILIAN TECHNOLOGY Co.,Ltd. |
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Application publication date: 20210730 Assignee: Chengdu Shuzhi Innovation Lean Technology Co.,Ltd. Assignor: Chengdu shuzhilian Technology Co.,Ltd. Contract record no.: X2024510000014 Denomination of invention: Virtual measurement model construction method, virtual measurement method, system, electronic device, and computer-readable storage medium Granted publication date: 20221227 License type: Common License Record date: 20240723 |