CN113189100A - Visual detection device - Google Patents
Visual detection device Download PDFInfo
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- CN113189100A CN113189100A CN202110456027.1A CN202110456027A CN113189100A CN 113189100 A CN113189100 A CN 113189100A CN 202110456027 A CN202110456027 A CN 202110456027A CN 113189100 A CN113189100 A CN 113189100A
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/84—Systems specially adapted for particular applications
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
- G01N21/01—Arrangements or apparatus for facilitating the optical investigation
- G01N21/13—Moving of cuvettes or solid samples to or from the investigating station
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Abstract
The application relates to the field of semiconductor chip detection equipment, in particular to a visual detection device, which comprises a machine table, wherein the machine table is provided with a fixed-point conveying module, a visual detection module, a feeding module and a discharging module, the fixed-point conveying module is connected to one end of the machine table, the fixed end of the visual detection module is connected to one end, deviating from the fixed-point conveying module, of the machine table, and the detection end of the visual detection module is positioned above the fixed-point conveying module; the discharging end of the feeding module is spliced at the feeding end of the fixed-point conveying module, and the feeding end of the discharging module is spliced at the discharging end of the fixed-point conveying module. The application has the effect of efficiently detecting the appearance of the semiconductor chip.
Description
Technical Field
The application relates to the field of semiconductor chip detection equipment, in particular to a visual detection device.
Background
Etching and wiring are performed on the semiconductor wafer to obtain a semiconductor chip capable of realizing a certain function. In order to meet the mass production requirements, the electrical properties of the semiconductor chip must be predictable and stable, and thus the quality of the semiconductor chip must be strictly required.
The appearance detection of the semiconductor chip mainly comprises typing, year, country of origin, recoating, state of pins, re-polishing marks, unclear residues and the like of the chip, and the appearance detection is mainly carried out by a manual detection mode or a semi-manual detection mode at present.
In view of the above-mentioned related art, the inventors found that there is a defect that the appearance inspection efficiency of the semiconductor chip is low.
Disclosure of Invention
In order to improve the lower problem of semiconductor chip outward appearance detection efficiency, this application provides a visual inspection device, has the effect of high-efficient detection semiconductor chip outward appearance.
The application provides a visual detection device adopts following technical scheme:
a visual detection device comprises a machine table, wherein the machine table is provided with a fixed-point conveying module, a visual detection module, a feeding module and a discharging module,
the fixed-point conveying module is connected to one end of the machine table, the fixed end of the vision detection module is connected to one end, away from the fixed-point conveying module, of the machine table, and the detection end of the vision detection module is located above the fixed-point conveying module;
the discharging end of the feeding module is spliced at the feeding end of the fixed-point conveying module, and the feeding end of the discharging module is spliced at the discharging end of the fixed-point conveying module.
By adopting the technical scheme, the appearance of the chip is detected mechanically, the detection efficiency is improved, and the labor cost is reduced.
Preferably, the feeding module comprises a feeding frame and a discharging box for placing the undetected chip, one end of the feeding frame is arranged on the machine table, and the other end of the feeding frame is spliced to the feeding end of the fixed-point conveying module;
the two ends of the material placing box are opened, and a plurality of first placing clamping grooves penetrating through the two ends of the material placing box are formed in the inner wall of the material placing box along the opening direction of the two ends;
the feeding frame is provided with a first lifting mechanism for conveying the material placing box to lift and a feeding mechanism for feeding the undetected chip from the material placing box into the feeding end of the fixed-point conveying module;
the first lifting mechanism comprises a first lifting driver and a first lifting frame, the fixed end of the first lifting driver is connected with the feeding frame, the output end of the first lifting driver is connected with the fixed end of the first lifting frame, and the first lifting driver drives the free end of the first lifting frame to drive the feeding box to ascend to be close to or descend to be far away from the feeding end of the fixed-point conveying module;
the feeding mechanism comprises a shell, the shell is fixed at one end, away from the fixed-point conveying module, of the feeding mechanism, a first opening and a second opening are formed in the two ends of the shell respectively, the first opening and the second opening are coaxially arranged, the second opening faces towards the feeding end of the fixed-point conveying module, a friction wheel, a feeding strip and a guide wheel are arranged in the shell, the feeding strip is abutted to the friction wheel and between the guide wheels, and the friction wheel drives the feeding strip to slide between the first opening and the second opening.
Through adopting above-mentioned technical scheme, place at the blowing box through not detecting the chip, the free end of first hoisting frame of first promotion driver drive puts the magazine by horizontal promotion, and when the bottom surface of not detecting the chip was leveled with the terminal surface of material loading strip orientation board, the friction pulley drove the material loading strip and slides towards second opening direction along first opening, realizes being carried the material loading end of fixed point transport module with not detecting the chip propelling movement.
Preferably, the blanking module comprises a blanking frame and a receiving box for placing the detected chip, one end of the blanking frame is arranged on the machine table, and the other end of the blanking frame is spliced at the blanking end of the fixed-point conveying module;
the two ends of the material receiving box are opened, and a plurality of second placing clamping grooves penetrating through the two ends of the material receiving box are formed in the inner wall of the material receiving box along the opening directions of the two ends;
the unloading frame is equipped with and is used for carrying the second hoist mechanism that the receipts material box goes up and down, second hoist mechanism includes second lifting drive ware and second hoisting frame, the stiff end that the second promoted the drive ware with the unloading frame is connected, the output that the second promoted the drive ware with the stiff end of second hoisting frame is connected, the drive of second lifting drive ware the free end of second hoisting frame drives the receipts material box rises to be close to or descends and keeps away from the unloading end of fixed point transport module.
Through adopting above-mentioned technical scheme, the inner wall that the draw-in groove is close to the board is placed to the second and the unloading end of fixed point conveying module flushes towards the terminal surface horizontal plane of visual detection module, fixed point conveying module will detect during the chip carries the second of bisymmetry setting and places the draw-in groove, the second in the material receiving box is placed the draw-in groove and is filled in proper order the back, the free end drive second hoisting accessory drive of second hoisting frame material receiving box descends and keeps away from fixed point conveying module's unloading end, be convenient for retrieve the chip that has detected.
Preferably, the feeding frame and the discharging frame respectively comprise a frame body, a first assembly, a second assembly and a third assembly, the frame body is fixed on the machine table, the first assembly is fixed on the frame body, the second assembly is in sliding connection with the frame body, and the third assembly is in sliding connection with the frame body;
the first component is provided with a first protruding edge used for limiting the material discharging box or the material receiving box to slide to the fixed point conveying module, the second component is provided with a second protruding edge used for limiting the material discharging box or the material receiving box between the second component and the first component, and the first protruding edge and the second protruding edge are arranged oppositely.
Through adopting above-mentioned technical scheme, be fixed in the support body through first subassembly, second subassembly and support body sliding connection, third subassembly and support body sliding connection are convenient for adjust the interval between first subassembly, second subassembly and the third subassembly.
Preferably, the material loading frame and the material unloading frame all still include the material storage groove, the one end of material storage groove with the free end concatenation of first hoisting frame or with the free end concatenation of second hoisting frame, the material storage inslot is equipped with pushing equipment, pushing equipment is including pushing away material driver and material pushing frame, the stiff end that pushes away the material driver with the material storage groove is connected, the material pushing frame connect in push away the output of material driver, material unloading box 42 or material receiving box 52 slide in the material storage groove, push away the material driver drive the material pushing frame promotes the material unloading box is close to material loading frame or material pushing driver drive the material pushing frame promotes material receiving box keeps away from the material unloading frame.
By adopting the technical scheme, the material storage groove is spliced with the free end of the first lifting frame or spliced with the free end of the second lifting frame, so that the material pushing driver drives the material pushing frame to push the material discharging box to be close to the material feeding frame or drives the material pushing frame to push the material receiving box to be far away from the material discharging frame, and mechanical feeding or material returning is realized.
Preferably, the fixed-point conveying module comprises a support, a sliding rail and a conveying mechanism, the support is connected with the machine table, the sliding rail is fixed at one end of the support, which faces the visual detection module, and the fixed end of the conveying mechanism is connected with one end of the support, which is far away from the sliding rail;
the inner side of each sliding rail is provided with a sliding chute, the two sliding rails are arranged oppositely, the detection chip slides between the two sliding chutes, each sliding rail comprises a feeding section, a detection section and a discharging section, the feeding section is spliced at the discharging end of the feeding module, the detection section is positioned right below the detection end of the visual detection module, and the discharging section is spliced at the feeding end of the discharging module;
and the output end of the conveying mechanism conveys the detection chip among the feeding section, the detection section and the discharging section.
By adopting the technical scheme, the detection chips are conveyed among the feeding section, the detection section and the discharging section through the output end of the conveying mechanism, the product appearance detection work is completed, the detected chips are finally ejected into the discharging module one by one, and the detection chips are conveyed among the feeding module, the visual detection module and the discharging module in a mechanized mode.
Preferably, guide pulleys are arranged on the inner side of the sliding rail, and the sliding groove is positioned between the two guide pulleys;
and a supporting piece for supporting the detection chip is arranged between the two sliding rails, one end of the supporting piece is connected with the bracket, and the other end of the supporting piece is abutted against the bottom of the detection chip.
Through adopting above-mentioned technical scheme, slide in the spout through the guide pulley guide detection chip, reduce the friction that detects chip and spout, prevent through support piece that the detection chip from the smooth material rail that drops.
Preferably, the conveying mechanism comprises a material clamping device for clamping the detection chip and a traverse driver for driving the material clamping device to slide, the fixed end of the material clamping device is connected with the input end of the traverse driver, the fixed end of the traverse driver is connected with the bracket,
the clamping device comprises a first clamping jaw and a second clamping jaw, the first clamping jaw is hinged to the fixed end of the second clamping jaw, the free end of the first clamping jaw is located at one end, facing the visual detection module, of the detection end of the sliding rail, and the free end of the second clamping jaw is located at one end, facing the machine table, of the sliding rail.
By adopting the technical scheme, the material clamping device is driven to slide by the transverse moving driver, so that the conveying mechanism clamps and detects the chip to transversely move.
Preferably, the visual detection module includes visual detection device and is used for adjusting visual detection device's numerical control platform, numerical control platform is including being used for visual detection device follows the first adjustment platform of board X axle adjustment, be used for visual detection device follows the second adjustment platform of board Z axle adjustment with be used for visual detection device follows the third adjustment platform of board Y axle adjustment, first adjustment platform with board fixed connection, first adjustment platform with second adjustment platform screw drive is connected, second adjustment platform with third adjustment platform screw drive is connected, third adjustment platform with visual detection device's stiff end screw drive is connected.
Through adopting above-mentioned technical scheme, through the X axle removal of second regulation platform along first regulation platform, the Z axle removal of second regulation platform is followed to the third regulation platform, and visual detection device's stiff end is transferred along the Y axle of third regulation platform and is removed, makes the adjustment of visual detection device along X, Y and the Z axle of board.
In summary, the present application includes at least one of the following beneficial technical effects:
1. the fixed-point conveying module 2, the visual detection module 3, the feeding module 4 and the discharging module 5 are matched with each other to finish the mechanical detection of the appearance of the semiconductor chip, so that the appearance detection work of the semiconductor chip is finished efficiently;
2. the material storage groove 7 is combined with the material loading frame 41 or the material unloading frame 51, so that the material loading operation of the material loading module 4 and the material unloading operation of the material unloading module 5 are more convenient;
3. the semiconductor chip is clamped by the output end of the conveying mechanism 23 and slides on the feeding section 222, the detection section 223 and the discharging section 224 of the sliding rail 22, so that the appearance detection work of the semiconductor chip can be efficiently finished;
4. the second adjusting platform moves along the X axis of the first adjusting platform, the third adjusting platform moves along the Z axis of the second adjusting platform, and the fixed end of the visual detection device moves along the Y axis of the third adjusting platform, so that the visual detection device is adjusted along the X, Y and Z axes of the machine platform.
Drawings
Fig. 1 is a schematic structural diagram of a visual inspection apparatus according to an embodiment of the present application.
Fig. 2 is an exploded view of a feeding module of the visual inspection apparatus according to an embodiment of the present disclosure.
Fig. 3 is a schematic structural diagram of a feeding mechanism of a visual inspection device according to an embodiment of the present application.
Fig. 4 is an exploded view of a blanking module of the visual inspection device according to the embodiment of the present application.
Fig. 5 is a schematic structural diagram of a loading module and a material storage tank of the visual inspection device according to the embodiment of the present application.
Fig. 6 is a schematic structural diagram of a blanking module and a material storage tank of the visual inspection device according to the embodiment of the present application.
Fig. 7 is a schematic structural diagram of a fixed-point conveying module and a visual inspection module of the visual inspection apparatus according to the embodiment of the present application.
Fig. 8 is an enlarged schematic view of a portion a of fig. 7.
Description of reference numerals: 1. a machine platform; 2. a fixed-point conveying module; 21. a support; 22. sliding the material rail; 221. a chute; 222. a feeding section; 223. a detection section; 224. a discharging section; 225. a guide pulley; 23. a conveying mechanism; 24. a material clamping device; 241. a first jaw; 242. a second jaw; 243. a jaw actuator; 25. a traverse actuator; 26. a support member; 3. a visual detection module; 31. a visual inspection device; 32. a numerical control platform; 321. a first adjustment platform; 322. a second adjustment platform; 323. a third adjustment platform; 4. a feeding module; 41. a feeding frame; 42. placing a material box; 421. a first placing slot; 43. a first lifting mechanism; 431. a first lift drive; 432. a first lifting frame; 44. a feeding mechanism; 441. a housing; 442. a first opening; 443. a second opening; 444. a friction wheel; 445. feeding strips; 446. a guide wheel; 5. a blanking module; 51. a blanking frame; 52. a material receiving box; 521. a second placing slot; 53. a second lifting mechanism; 531. a second lift drive; 532. a second lifting frame; 60. a frame body; 61. a first component; 611. a first flange; 62. a second component; 621. a second projecting edge; 63. a third component; 64. 7, a material storage groove; 71. a material pushing mechanism; 72. a pusher driver; 73. a material pushing frame; 74. a storage tank body; 75. a first side wall; 76. a second side wall.
Detailed Description
The present application is described in further detail below with reference to figures 1-8.
The embodiment of the application discloses a visual detection device.
Referring to fig. 1, a machine table 1 is provided with a fixed point conveying module 2, a visual detection module 3, a feeding module 4 and a discharging module 5, the fixed point conveying module 2 is connected to one end of the machine table 1, the visual detection module 3 is used for detecting the appearance of chips, the fixed end of the visual detection module 3 is connected to one end of the machine table 1, which is far away from the fixed point conveying module 2, the detection end of the visual detection module 3 is positioned above the fixed point conveying module 2, the discharge end of the feeding module 4 is spliced to the feeding end of the fixed point conveying module 2, the feeding end of the discharging module 5 is spliced to the discharging end of the fixed point conveying module 2, undetected chips are conveyed to the feeding end of the fixed point conveying module 2 through the feeding module 4, the fixed point conveying module 2 conveys undetected chips to a position right below the detection end of the visual detection module 3, after the detection is finished, the fixed point conveying module 2 conveys the detected chips to the discharging module 5, the detected chip can be taken down from the blanking module 5, the appearance of the chip is detected mechanically, the appearance efficiency of the semiconductor chip is improved, and the labor cost is reduced.
Referring to fig. 2 and 3, the feeding module 4 includes a feeding frame 41 and a placing box 42 for placing an undetected chip, and one end of the feeding frame 41 is fixedly connected to the machine table 1 by a bolt, so that the feeding frame 41 is fixed to the machine table 1.
The other end of the feeding frame 41 is spliced at the feeding end of the fixed point conveying module 2, so that undetected chips on the feeding frame 41 can be conveniently conveyed to the feeding end of the fixed point conveying module 2.
The two ends of the material placing box 42 are open, the openings at the two ends of the material placing box 42 are coaxially arranged, a plurality of first placing clamping grooves 421 penetrating through the two ends of the material placing box 42 are arranged on the inner wall of the material placing box 42 along the opening directions at the two ends, and the undetected chips are placed in the first placing clamping grooves 421 which are symmetrically arranged.
The feeding frame 41 is provided with a first lifting mechanism 43 for conveying the discharging box 42 to ascend and descend and a feeding mechanism 44 for feeding an undetected chip into the feeding end of the fixed-point conveying module 2 from the discharging box 42, the first lifting mechanism 43 comprises a first lifting driver 431 and a first lifting frame 432, the first lifting driver 431 is a pneumatic cylinder or a hydraulic cylinder, the fixed end of the first lifting driver 431 is connected with the feeding frame 41 through a bolt, the output end of the first lifting driver 431 is connected with the fixed end of the first lifting frame 432 through a bolt, the first lifting frame 432 comprises two lifting frames in the embodiment, the first lifting frame 432 is in an L shape, and the first lifting driver 431 drives the free end of the first lifting frame 432 to drive the discharging box 42 to ascend close to or descend away from the feeding end of the fixed-point conveying module 2.
The feeding mechanism 44 includes a housing 441, the housing 441 is fixed at one end of the feeding mechanism 44 away from the fixed point conveying module 2, the housing 441 is square, two ends of the housing 441 are respectively provided with a first opening 442 and a second opening 443, the first opening 442 and the second opening 443 are coaxially arranged, the second opening 443 faces the feeding end of the fixed point conveying module 2, the housing 441 is provided with a friction wheel 444, a feeding bar 445 and a plurality of guide wheels 446, in this embodiment, the feeding bar 445 is a thin cuboid, the friction wheel 444 is driven by a motor, the feeding bar 445 is abutted between the friction wheel 444 and the guide wheels 446, in this embodiment, the friction wheel 444 can be driven by the motor to rotate, the friction wheel 444 drives the feeding bar 445 to slide between the first opening 442 and the second opening 443, the horizontal height of the feeding bar 445 facing the end surface of the machine platform 1 is higher than the horizontal plane of the feeding end of the fixed point conveying module 2 facing the end surface of the visual detection module 3, the feeding bar 445 is convenient to push the undetected chips to the feeding end of the fixed-point conveying module 2.
One end of the feeding bar 445, which is far away from the first opening 442, is provided with a limiting column, and when the limiting column abuts against the outer side wall of the housing 441, the feeding bar 445 can be limited to continue sliding.
During operation, the undetected chip is placed in the first placing clamping grooves 421, the material placing box 42 is transversely placed at the free end of the first lifting frame 432, an opening at one end of the material placing box 42 faces the feeding end of the fixed-point conveying module 2, the first lifting driver 431 drives the free end of the first lifting frame 432 to drive the material placing box 42 to ascend to be close to the feeding end of the fixed-point conveying module 2, when the end face of the undetected chip facing the feeding bar 445 and the end face of the feeding bar 445 facing the machine table 1 are flush, the first lifting driver 431 stops ascending, the motor drives the friction wheel 444 to drive the feeding bar 445 to slide along the first opening 442 towards the second opening 443 direction, and the undetected chip is pushed to the feeding end of the fixed-point conveying module 2.
After all the undetected chips in the discharging box 42 are sequentially pushed to the feeding end of the fixed-point conveying module 2, the first lifting driver 431 drives the free end of the first lifting frame 432 to drive the discharging box 42 to descend and be away from the feeding end of the fixed-point conveying module 2, so that the undetected chips are conveniently placed in the first placing clamping groove 421 again.
Referring to fig. 4, the blanking module 5 includes a blanking frame 51 and a receiving box 52 for placing the detected chips, one end of the blanking frame 51 is disposed on the machine platform 1, and the other end of the blanking frame 51 is spliced to the blanking end of the fixed point conveying module 2;
openings are formed in two ends of the receiving box 52, the openings in the two ends of the receiving box 52 are coaxially arranged, a plurality of second placing clamping grooves 521 which penetrate through the two ends of the receiving box 52 are formed in the inner wall of the receiving box 52 along the direction of the openings in the two ends, and the detected chips are placed in the two symmetrically arranged second placing clamping grooves 521;
the blanking frame 51 is provided with a second lifting mechanism 53 for conveying the material receiving box 52 to lift, the second lifting mechanism 53 comprises a second lifting driver 531 and a second lifting frame 532, the second lifting driver 531 can be a pneumatic cylinder or a hydraulic cylinder, the second lifting frame 532 is L-shaped, in the implementation, the second lifting frame 532 comprises two lifting drivers, the fixed end of the second lifting driver 531 is connected with the blanking frame 51 through bolts, the output end of the second lifting driver 531 is connected with the fixed end of the second lifting frame 532 through bolts, and the free end of the second lifting frame 532 is driven by the second lifting driver 531 to drive the material receiving box 52 to ascend close to or descend away from the blanking end of the fixed-point conveying module 2.
During operation, transversely place the receiving box 52 at the free end of second hoisting frame 532, make receiving box 52 one end opening towards the unloading end of fixed point conveying module 2, second promotes driver 531 and drives the free end of second hoisting frame 532 and drives receiving box 52 and rise and be close to the unloading end of fixed point conveying module 2, when the second is placed the horizontal plane of the one end inner wall that draw-in groove 521 is close to the board and the unloading end of fixed point conveying module 2 towards the terminal surface of visual detection module 3 at the same time, second promotes driver 531 and stops rising, fixed point conveying module 2 will detect the chip and carry the second that the bisymmetry set up to place the draw-in groove 521 in.
When the second placing slot 521 in the material receiving box 52 is sequentially filled, the second lifting driver 531 drives the free end of the second lifting frame 532 to drive the material receiving box 52 to descend away from the material discharging end of the fixed-point conveying module 2, so that the detected chips can be conveniently recovered.
Referring to fig. 2 and 4, the feeding frame 41 and the discharging frame 51 each include a frame body 60, a first assembly 61, a second assembly 62 and a third assembly 63, the frame body 60 is L-shaped, one end of the frame body 60 is fixed to the machine table 1 through a bolt, one end of the frame body 60 departing from the machine table 1 is connected with the first assembly 61 through a bolt, the first assembly 61 is vertically arranged, and the first assembly 61 is arranged at the feeding end of the frame body 60 facing the fixed point conveying module 2.
The first assembly 61 is provided with a first protruding edge 611 for limiting the material placing box 42 or the material receiving box 52 from sliding to the fixed point conveying module 2, so that the first assembly 61 is L-shaped, the second assembly 62 is provided with a second protruding edge 621 for limiting the material placing box 42 or the material receiving box 52 between the second assembly 62 and the first assembly 61, so that the second assembly 62 is L-shaped, and the first protruding edge 611 and the second protruding edge 621 are oppositely arranged, so that the material placing box 42 or the material receiving box 52 is limited between the second assembly 62 and the first assembly 61.
The third component 63 and the frame body 60 are slidably connected through a slide rail and a slide block, a locking handle for locking the slide block to slide can be arranged on the slide rail, so that the distance between the third component 63 and the frame body 60 is conveniently fixed, and the first component 61, the second component 62 and the third component 63 surround and can prevent the material placing box 42 or the material receiving box 52 from sliding off the free end of the first lifting frame 432 or the free end of the second lifting frame 532.
The third component 63 is in a shape like a Chinese character jing, and a guide wheel is arranged at one end of the third component 63 facing the first component 61, and the guide wheel is abutted against the material discharging box 42 or the material receiving box 52, so that the friction force between the material discharging box 42 or the material receiving box 52 and the third component 63 is reduced.
In other embodiments, a tightening driver 64 for making the discharging box 42 or the receiving box 52 tightly abut against the first component 61 is disposed at one end of the second protruding edge 621 away from the first component 61, the tightening driver 64 is a pneumatic cylinder or a hydraulic cylinder, a fixed end of the tightening driver 64 is fixedly connected with the third component 63, an output end of the tightening driver 64 tightly abuts against the discharging box 42 or the receiving box 52 against the first protruding edge 611, so that the discharging box 42 or the receiving box 52 is fixed on the feeding frame 41 and the discharging frame 51.
Referring to fig. 5 and 6, each of the feeding frame 41 and the discharging frame 51 further includes a material storage groove 7, the bottom of the material storage groove 7 is fixedly connected to the machine table 1 through a bolt, one end of the material storage groove 7 is spliced to the free end of the first lifting frame 432 or spliced to the free end of the second lifting frame 532, a material pushing mechanism 71 is disposed in the material storage groove 7, the material pushing mechanism 71 includes a material pushing driver 72 and a material pushing frame 73, the material pushing driver 72 may be a pneumatic cylinder or a hydraulic cylinder, the fixed end of the material pushing driver 72 is connected to the material storage groove 7 through a bolt, the material pushing frame 73 is connected to the output end of the material pushing driver 72 through a bolt, the material discharging box 42 or the material receiving box 52 slides in the material storage groove 7, and the material pushing driver 72 drives the material pushing frame 73 to push the material discharging box 42 to be close to the feeding frame 41 or the material pushing frame 72 drives the material pushing frame 73 to push the material receiving box 52 to be far away from the discharging frame 51.
When the automatic feeding device works, one end of the material storage groove 7 is spliced with the free end of the first lifting frame 432, and when the first lifting driver 431 drives the free end of the first lifting frame 432 to be close to the machine table 1, the output end of the material pushing driver 72 extends out to drive the material pushing frame 73 to push the material discharging box 42 to be close to the first lifting driver 431, so that the material discharging box 42 is placed at the free end of the first lifting frame 432, and mechanical feeding is realized.
One end of the material storage groove 7 is spliced with the free end of the second lifting frame 532, the output end of the material pushing driver 72 extends out to push the material pushing frame 73 to the second lifting driver 531, after the second lifting frame 532 descends, the output end of the material pushing driver 72 retracts to drive the material pushing frame 73 to push the material receiving box 52 to be far away from the material discharging frame 51, so that the material receiving box 52 enters the material storage groove 7 from the free end of the second lifting frame 532, and mechanical discharging is achieved.
In other embodiments, the fixed end of the pushing driver 72 is transversely connected to the material storage slot 7 through a slide rail slider, so that the pushing driver 72 can be adjusted to the position in the material storage slot 7.
In other embodiments, the storage tank 7 further includes a storage tank body 74, a first side wall 75 and a second side wall 76, the first side wall 75 is fixed on a side of the storage tank body 74 facing the fixed point conveying module 2, the second side wall 76 is slidably connected to a side of the storage tank body 74 facing away from the first side wall 75, the second side wall 76 is slidably connected to the storage tank body 74 through a slide rail slider, and a distance between the second side wall 76 and the storage tank body 74 can be changed by a position of the slider on the slide rail.
Referring to fig. 7 and 8, the fixed point conveying module 2 includes a support 21, a sliding rail 22 and a conveying mechanism 23, the support 21 is connected to the machine table 1 through a bolt, the sliding rail 22 is fixed at one end of the support 21 facing the visual detection module 3, a fixed end of the conveying mechanism 23 is connected to one end of the support 21 away from the sliding rail 22 through a bolt, a sliding groove 221 is formed in the inner side of the sliding rail 22, the two sliding rails 22 are arranged oppositely, a detection chip slides between the two sliding grooves 221, the sliding rail 22 includes a feeding section 222, a detection section 223 and a discharging section 224, the feeding section 222 is spliced at a discharging end of the feeding module 4, the detection section 223 is located right below the detection end of the visual detection module 3, the discharging section 224 is spliced at a feeding end of the discharging module 5, and the output end of the conveying mechanism 23 conveys the detection chip among the feeding section 222, the detection section 223 and the discharging section 224.
During operation, the undetected chips are conveyed to the feeding section 222 by the feeding module 4, the undetected chips are clamped by the output end of the conveying mechanism 23 and slide between the two sliding grooves 221, when the chip slides to the detection section 223, the output end of the conveying mechanism 23 releases the undetected chip, after the detection of the visual detection module 3 is completed, the output end of the conveying mechanism 23 further holds the detected chip to continuously slide between the two sliding grooves 221, and when the detected chip reaches the discharging section 224, the output end of the conveying mechanism 23 releases the detected chip to clamp a new undetected chip again, after the new undetected chip is detected and becomes a new detected chip, the output end of the conveying mechanism 23 holds the new detected chip to slide between the two sliding grooves 221, and when the new detected chip reaches the discharging section 224, the new detected chip pushes the detected chip previously placed on the discharging section 224 into the discharging module 5.
Referring to fig. 8, the guide pulleys 225 are disposed inside the slide rail 22, the slide groove 221 is located between the two guide pulleys 225, and the detection chip is guided by the guide pulleys 225 to slide in the slide groove 221, thereby reducing friction between the detection chip and the slide groove 221.
In other embodiments, a height limiting member is disposed between the sliding rail 22 and the detection end of the visual detection module 3, and the height limiting member prevents the detection chip from colliding with the detection end of the visual detection module 3.
Referring to fig. 7 and 8, the conveying mechanism 23 includes a material clamping device 24 for clamping the detection chip and a traverse actuator 25 for driving the material clamping device 24 to slide, the traverse actuator 25 may be a pneumatic cylinder, in this embodiment, the traverse actuator 25 includes a motor, a screw rod and a nut, the material clamping device 24 includes two material clamping devices, a fixed end of the material clamping device 24 is connected to the nut of the traverse actuator 25 through a connecting plate, a fixed end of the motor of the traverse actuator 25 is connected to the bracket 21, an output end of the motor drives the screw rod to rotate, and the screw rod drives the nut to move laterally, so that the material clamping device 24 realizes traverse.
The two material clamping devices 24 are respectively arranged at two ends of the connecting plate, the transverse moving driver 25 drives the two material clamping devices 24 to work simultaneously, so that the working efficiency can be improved, a sliding rail and a sliding block are arranged between the connecting plate and the machine table 1, the connecting plate is in sliding connection with the machine table 1, and the transverse moving driver 25 drives the material clamping devices 24 to move transversely more stably.
The material clamping device 24 comprises a first clamping jaw 241, a second clamping jaw 242 and a clamping jaw driver 243, wherein the first clamping jaw 241 and the second clamping jaw 242 are made of iron materials, longitudinal sections of the first clamping jaw 241 and the second clamping jaw 242 are both in an L shape, fixed ends of the first clamping jaw 241 and the second clamping jaw 242 are hinged, a free end of the first clamping jaw 241 is located at one end, facing a detection end of the visual detection module 3, of the sliding rail 22, a free end of the second clamping jaw 242 is located at one end, facing the machine table 1, of the sliding rail 22, the clamping jaw driver 243 is an electromagnet, one end of the clamping jaw driver 243 is fixedly connected with the free end of the first clamping jaw 241, the other end of one end of the clamping jaw driver 243 faces the free end of the second clamping jaw 242, and the free ends of the first clamping jaw 241 and the second clamping jaw 242 are closed through magnetic force to clamp the detection chip.
In other embodiments, the clamping jaw driver 243 may also be an electric cylinder, and a fixed end and an output end of the electric cylinder are connected to the free ends of the first clamping jaw 241 and the second clamping jaw 242, so that the free ends of the first clamping jaw 241 and the second clamping jaw 242 can be closed.
Referring to fig. 7, the vision inspection module 3 includes a vision inspection device 31 and a numerical control platform 32 for adjusting the vision inspection device 31, and the vision inspection device 31 is an image pickup device for inspecting the appearance of the chip.
The numerical control platform 32 comprises a first adjusting platform 321 for adjusting the visual detection device 31 along the X axis of the machine 1, a second adjusting platform 322 for adjusting the visual detection device 31 along the Z axis of the machine 1, and a third adjusting platform 323 for adjusting the visual detection device 31 along the Y axis of the machine 1, the first adjusting platform 321 is fixedly connected with the machine 1 through bolts, the first adjusting platform 321 is provided with a motor, the output end of the motor is connected with a lead screw, one end of the second adjusting platform 322 facing the first adjusting platform 321 is provided with a nut, the motor drives the lead screw to rotate, the lead screw is in threaded transmission connection with the nut, so that the first adjusting platform 321 is in threaded transmission connection with the second adjusting platform 322, and the second adjusting platform 322 moves along the X axis of the first adjusting platform 321, in order to make the second adjusting platform 322 move more smoothly along the X-axis of the first adjusting platform 321, a sliding rail slider is disposed between the first adjusting platform 321 and the second adjusting platform 322.
The second adjusting platform 322 is provided with a motor, the output end of the motor is connected with a screw rod, one end of the third adjusting platform 323 facing the first adjusting platform 321 is provided with a nut, the motor drives the screw rod to rotate, the screw rod is in threaded transmission connection with the nut, so that the second adjusting platform 322 is in threaded transmission connection with the third adjusting platform 323, the third adjusting platform 323 moves along the Z axis of the second adjusting platform 322, and in order to enable the third adjusting platform 323 to move more smoothly along the Z axis of the second adjusting platform 322, a sliding rail sliding block is arranged between the second adjusting platform 322 and the third adjusting platform 323.
The third adjustment platform 323 is provided with a motor, the output end of the motor is connected with a synchronous pulley set and a screw rod, nuts are arranged on two sides of the fixed end of the visual detection device 31, the motor drives the synchronous pulley set, the synchronous pulley set drives the screw rod to be in threaded transmission connection with the nuts, the third adjustment platform 323 is in threaded transmission connection with the fixed end of the visual detection device 31, the fixed end of the visual detection device 31 is adjusted along the Y axis of the third adjustment platform 323 to move more smoothly for making, and a slide rail slider is arranged between the fixed end of the visual detection device 31 and the third adjustment platform 323.
The implementation principle of the visual inspection device in the embodiment of the application is as follows: the feeding end of the fixed point conveying module 2 is conveyed to the undetected chip through the feeding module 4, the fixed point conveying module 2 conveys the undetected chip to a position right below the detection end of the visual detection module 3, after the detection is finished, the fixed point conveying module 2 conveys the detected chip to the discharging module 5, the detected chip can be taken down from the discharging module 5, and the product appearance detection work is efficiently finished.
The above embodiments are preferred embodiments of the present application, and the protection scope of the present application is not limited by the above embodiments, so: all equivalent changes made according to the structure, shape and principle of the present application shall be covered by the protection scope of the present application.
Claims (9)
1. The utility model provides a visual detection device, includes board (1), its characterized in that: the machine table (1) is provided with a fixed-point conveying module (2), a visual detection module (3), a feeding module (4) and a discharging module (5),
the fixed-point conveying module (2) is connected to one end of the machine table (1), the fixed end of the visual detection module (3) is connected to one end, deviating from the fixed-point conveying module (2), of the machine table (1), and the detection end of the visual detection module (3) is located above the fixed-point conveying module (2);
the discharging end of the feeding module (4) is spliced at the feeding end of the fixed-point conveying module (2), and the feeding end of the discharging module (5) is spliced at the discharging end of the fixed-point conveying module (2).
2. A visual inspection device according to claim 1, wherein: the feeding module (4) comprises a feeding frame (41) and a discharging box (42) for placing undetected chips, one end of the feeding frame (41) is arranged on the machine table (1), and the other end of the feeding frame (41) is spliced at the feeding end of the fixed-point conveying module (2);
the two ends of the material placing box (42) are opened, and a plurality of first placing clamping grooves (421) penetrating through the two ends of the material placing box (42) are formed in the inner wall of the material placing box (42) along the opening directions of the two ends;
the feeding frame (41) is provided with a first lifting mechanism (43) for conveying the material discharging box (42) to lift and a feeding mechanism (44) for feeding the undetected chips from the material discharging box (42) to the feeding end of the fixed-point conveying module (2);
the first lifting mechanism (43) comprises a first lifting driver (431) and a first lifting frame (432), a fixed end of the first lifting driver (431) is connected with the feeding frame (41), an output end of the first lifting driver (431) is connected with a fixed end of the first lifting frame (432), and the first lifting driver (431) drives a free end of the first lifting frame (432) to drive the discharging box (42) to ascend to be close to or descend to be far away from the feeding end of the fixed-point conveying module (2);
the feeding mechanism (44) comprises a shell (441), the shell (441) is fixed at one end of the feeding mechanism (44) far away from the fixed-point conveying module (2), two ends of the shell (441) are respectively provided with a first opening (442) and a second opening (443), the first opening (442) and the second opening (443) are coaxially arranged, the second opening (443) faces the feeding end of the fixed-point conveying module (2), a friction wheel (444), a feeding bar (445) and a guide wheel (446) are arranged in the shell (441), the feeding bar (445) abuts against between the friction wheel (444) and the guide wheel (446), and the friction wheel (444) drives the feeding bar (445) to slide between the first opening (442) and the second opening (443).
3. A visual inspection apparatus according to claim 2, wherein: the blanking module (5) comprises a blanking frame (51) and a material receiving box (52) for placing the detected chip, one end of the blanking frame (51) is arranged on the machine table (1), and the other end of the blanking frame (51) is spliced at the blanking end of the fixed-point conveying module (2);
the two ends of the material receiving box (52) are opened, and a plurality of second placing clamping grooves (521) penetrating through the two ends of the material receiving box (52) are formed in the inner wall of the material receiving box (52) along the opening directions of the two ends;
lower work or material rest (51) are equipped with and are used for carrying second hoist mechanism (53) that receipts material box (52) go up and down, second hoist mechanism (53) include second lifting drive ware (531) and second lifting frame (532), the second lifting drive ware (531) the stiff end with lower work or material rest (51) are connected, the second lifting drive ware (531) the output with the stiff end of second lifting frame (532) is connected, second lifting drive ware (531) drive the free end of second lifting frame (532) drives receipts material box (52) rise to be close to or descend to keep away from the unloading end of fixed point conveying module (2).
4. A visual inspection device according to claim 3, wherein: the feeding frame (41) and the discharging frame (51) both comprise a frame body (60), a first assembly (61), a second assembly (62) and a third assembly (63), the frame body (60) is fixed on the machine table (1),
the first assembly (61) is fixed on the frame body (60), the second assembly (62) is connected with the frame body (60) in a sliding mode, and the third assembly (63) is connected with the frame body (60) in a sliding mode;
the first component (61) is provided with a first protruding edge (611) used for limiting the material placing box (42) or the material receiving box (52) to slide to the fixed-point conveying module (2), the second component (62) is provided with a second protruding edge (621) used for limiting the material placing box (42) or the material receiving box (52) between the second component (62) and the first component (61), and the first protruding edge (611) and the second protruding edge (621) are oppositely arranged.
5. A visual inspection device according to claim 3, wherein: the feeding frame (41) and the discharging frame (51) both comprise a material storage groove (7), one end of the material storage groove (7) is spliced with the free end of the first lifting frame (432) or spliced with the free end of the second lifting frame (532), a material pushing mechanism (71) is arranged in the material storage groove (7), the material pushing mechanism (71) comprises a material pushing driver (72) and a material pushing frame (73), the fixed end of the pushing driver (72) is connected with the material storage groove (7), the material pushing frame (73) is connected with the output end of the material pushing driver (72), the material discharge box 42 or the material receiving box 52 slides in the material storage groove (7), the pushing driver (72) drives the pushing frame (73) to push the material discharging box (42) to be close to the material loading frame (41) or the pushing driver (72) drives the pushing frame (73) to push the material collecting box (52) to be far away from the material unloading frame (51).
6. A visual inspection device according to claim 1, wherein: the fixed point conveying module (2) comprises a support (21), a sliding rail (22) and a conveying mechanism (23), the support (21) is connected with the machine table (1), the sliding rail (22) is fixed at one end, facing the visual detection module (3), of the support (21), and the fixed end of the conveying mechanism (23) is connected with one end, facing away from the sliding rail (22), of the support (21);
the inner side of each sliding rail (22) is provided with sliding grooves (221), the two sliding rails (22) are arranged oppositely, a detection chip slides between the two sliding grooves (221), each sliding rail (22) comprises a feeding section (222), a detection section (223) and a discharging section (224), the feeding section (222) is spliced at the discharging end of the feeding module (4), the detection section (223) is located right below the detection end of the visual detection module (3), and the discharging section (224) is spliced at the feeding end of the discharging module (5);
the output end of the conveying mechanism (23) conveys the detection chip among the feeding section (222), the detection section (223) and the discharging section (224).
7. A visual inspection device according to claim 6, wherein: a guide pulley (225) is arranged on the inner side of the sliding rail (22), and the sliding groove (221) is positioned between the two guide pulleys (225);
a supporting piece (26) used for supporting the detection chip is arranged between the two sliding rails (22), one end of the supporting piece (26) is connected with the bracket (21), and the other end of the supporting piece (26) is abutted to the bottom of the detection chip.
8. A visual inspection device according to claim 6, wherein: the conveying mechanism (23) comprises a material clamping device (24) for clamping a detection chip and a transverse moving driver (25) for driving the material clamping device (24) to slide, the fixed end of the material clamping device (24) is connected with the input end of the transverse moving driver (25), the fixed end of the transverse moving driver (25) is connected with the bracket (21),
the clamping device (24) comprises a first clamping jaw (241), a second clamping jaw (242) and a clamping jaw driver (243), the fixed end of the first clamping jaw (241) is hinged to the fixed end of the second clamping jaw (242), the free end of the first clamping jaw (241) is located towards the sliding rail (22) at one end of the detection end of the visual detection module (3), and the free end of the second clamping jaw (242) is located towards the sliding rail (22) at one end of the machine table (1).
9. A visual inspection device according to claim 1, wherein: the visual detection module (3) comprises a visual detection device (31) and a numerical control platform (32) for adjusting the visual detection device (31), the numerical control platform (32) comprises a first adjusting platform (321) used for adjusting the visual detection device (31) along the X axis of the machine table (1), a second adjusting platform (322) used for adjusting the visual detection device (31) along the Z axis of the machine table (1) and a third adjusting platform (323) used for adjusting the visual detection device (31) along the Y axis of the machine table (1), the first adjusting platform (321) is fixedly connected with the machine table (1), the first adjusting platform (321) is in threaded transmission connection with the second adjusting platform (322), the second adjusting platform (322) is in threaded transmission connection with the third adjusting platform (323), and the third adjusting platform (323) is in threaded transmission connection with the fixed end of the visual detection device (31).
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| CN202110456027.1A CN113189100A (en) | 2021-04-26 | 2021-04-26 | Visual detection device |
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| Application Number | Priority Date | Filing Date | Title |
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| CN202110456027.1A CN113189100A (en) | 2021-04-26 | 2021-04-26 | Visual detection device |
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| CN113189100A true CN113189100A (en) | 2021-07-30 |
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Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
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| CN118376617A (en) * | 2024-06-21 | 2024-07-23 | 志豪微电子(惠州)有限公司 | IPM module detection device and IPM module detection method |
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| CN110596138A (en) * | 2019-08-14 | 2019-12-20 | 深圳格兰达智能装备股份有限公司 | IC material strip visual detection and ink dot marking equipment |
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Application publication date: 20210730 |