CN113099218B - Method for testing performance of video image measuring instrument - Google Patents
Method for testing performance of video image measuring instrument Download PDFInfo
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- CN113099218B CN113099218B CN202110379985.3A CN202110379985A CN113099218B CN 113099218 B CN113099218 B CN 113099218B CN 202110379985 A CN202110379985 A CN 202110379985A CN 113099218 B CN113099218 B CN 113099218B
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Abstract
The invention provides a method for testing the performance of a video image measuring instrument, which comprises the following steps: operation 1, placing a standard device on a video image measuring instrument workbench; operation 2, moving the detection system of the video image measuring instrument, placing the first plane of the standard device in a window of the video image measuring instrument, and acquiring the position information of the first characteristic point of the first plane of the standard device; operation 3, moving the detection system along the Z-axis direction of the video image measuring instrument, placing the second plane of the standard in the window of the video image measuring instrument, and obtaining the position information of the second characteristic point of the second plane of the standard; operation 4, obtaining the concentricity of the first plane and the second plane by using the position information of the first feature point and the position information of the second feature point; operation 5, after rotating the standard device at fixed angles, repeating operation 2-4; and 6, repeating the operation 5 for multiple times to obtain concentricity measurement data of the multiple first planes and the multiple second planes, and analyzing the perpendicularity of the Z axis of the video image measuring instrument and the XY platform and the stability of the Z axis.
Description
Technical Field
The invention relates to the technical field of equipment acceptance, measurement and calibration, in particular to a method for testing the 3D performance of a video image measuring instrument.
Background
The detection equipment is the core for judging whether the product is qualified or not, and the accuracy and the stability of the detection equipment are the guarantee for the correctness of the judgment result. The video image measuring instrument is a detecting instrument widely applied to the manufacturing industry. The method has the advantages that large-scale application is achieved in two-dimensional plane measurement in the fields of aviation, aerospace, consumer electronics and the like, but the 3D performance of the method does not have an industrial standard at present, and the acceptance, measurement and calibration of a new product do not include 3D performance test, so that hidden dangers are buried for the application of the method in some industries.
Disclosure of Invention
In view of this, in order to detect the 3D performance of the video image measuring instrument, the invention provides a method for testing the performance of the video image measuring instrument, so as to solve the problem that the current performance test does not include the blank of the 3D performance test, and reduce the operation difficulty of the performance test.
In order to achieve the above object, the present invention provides a method for testing the performance of a video image measuring instrument, which can test the 3D performance of the video image measuring instrument, and comprises: operation 1, placing a standard device on a workbench of a video image measuring instrument; operation 2, moving the detection system of the video image measuring instrument, placing the first plane of the standard in a window of the video image measuring instrument, and acquiring the position information of the first characteristic point of the first plane of the standard; operation 3, moving the detection system along the Z-axis direction of the video image measuring instrument, placing the second plane of the standard in the window of the video image measuring instrument, and obtaining the position information of the second characteristic point of the second plane of the standard; operation 4, obtaining the concentricity of the first plane and the second plane by using the position information of the first feature point and the position information of the second feature point; operation 5, after rotating the standard device at fixed angles, repeating operation 2-operation 4; operation 6, repeating operation 5 for multiple times to obtain concentricity measurement data of the multiple first planes and the multiple second planes, and analyzing the perpendicularity between the Z axis and the XY platform of the video image measuring instrument and the stability of the Z axis according to the change of the concentricity measurement data; the etalon is a coaxial etalon and comprises a first plane and a second plane, and the first plane and the second plane have a height difference.
According to an embodiment of the present invention, wherein the first plane comprises a ring shape composed of a plurality of circles, the test method further comprises: acquiring position information of any circular third characteristic point in the ring except for the circular corresponding to the first characteristic point; obtaining the concentricity of any one of a circle corresponding to the first characteristic point and a plurality of circles corresponding to the third characteristic point in the first plane by using the position information of the first characteristic point and the position information of the third characteristic point; repeating the operation after rotating the standard device at fixed angles; after the rotating standard device is operated for multiple times, concentricity measurement data of any one of a plurality of circles corresponding to the first characteristic point and the third characteristic point in the first plane corresponding to the rotating angle are obtained, and 2D measurement stability of the video image measuring instrument in horizontal planes with different heights is analyzed according to the change of the concentricity measurement data.
According to the embodiment of the invention, the 2D measurement stability of the video image measuring instrument in the horizontal plane at different heights is analyzed to be the concentricity data of any one of a plurality of circles corresponding to the circle corresponding to the first characteristic point and the third characteristic point in the measuring standard at different heights by taking the workbench of the video image measuring instrument as a reference position.
According to an embodiment of the present invention, the acquiring the position information of the first feature point, the second feature point, and the third feature point includes: placing the standard device on a workbench, and adjusting the video image measuring instrument to enable the image in a window under the video image measurement to be clear; respectively sampling N measuring points on the circumference corresponding to the first characteristic point, the second characteristic point and the third characteristic point, and measuring the N measuring points one by one to obtain N measuring point data, wherein N is an integer greater than or equal to 3; and performing data fitting on the N measurement point data to obtain the position information of the corresponding first characteristic point, the second characteristic point and the third characteristic point.
According to an embodiment of the invention, the test method further comprises: acquiring circular roundness measurement data corresponding to a first characteristic point on a first plane; and analyzing the measurement precision of the video image measuring instrument according to the change of the roundness measurement data.
According to the embodiment of the present invention, acquiring roundness measurement data of a circle corresponding to the first feature point on the first plane includes: respectively measuring the distances from the N measuring points on the circle corresponding to the first characteristic point to obtain the distance values from the N measuring points on the circle to the first characteristic point, and acquiring the maximum distance value and the minimum distance value in the N distance values; obtaining circular roundness measurement data corresponding to the first characteristic point by using the difference value between the maximum distance value and the minimum distance value; after rotating the standard device at fixed angles, repeating the operation; and after the rotating standard device is operated for multiple times, roundness measurement data of the circle corresponding to the first characteristic point of the corresponding rotating angle is obtained.
According to an embodiment of the present invention, the analyzing the perpendicularity of the Z-axis and the XY-stage and the stability of the Z-axis of the video image measuring instrument according to the change of the concentricity measurement data includes: if the change of the concentricity measurement data is periodic, representing that the perpendicularity of the Z axis of the video image measuring instrument and the XY platform has a problem; if the change of the concentricity measurement data does not have periodicity, representing that the Z axis of the video image measuring instrument has the stability problem in the motion process; if the concentricity measurement data change to be a fixed value or within a preset range, representing the perpendicularity of the Z axis and the XY platform of the video image measuring instrument and the stability of the Z axis to meet the requirements.
According to an embodiment of the invention, wherein the second planar shape is the same as the first planar shape.
According to an embodiment of the present invention, wherein the first plane further comprises a ring shape formed by one of the following shapes: square, oval, gear-shaped.
According to the embodiment of the invention, the first plane comprises a ring formed by a plurality of squares, and the position information of the first characteristic point and the third characteristic point on the first plane is obtained by respectively adopting the intersection point of the middle lines of opposite sides of the squares; the first plane includes a ring shape formed by a plurality of ellipses or gear shapes, and the ellipses or gear shapes are placed between two circles to obtain the position information of the first characteristic point and the third characteristic point on the first plane.
According to the technical scheme, the method for testing the performance of the video image measuring instrument has the following beneficial effects:
(1) the method for testing the performance of the video image measuring instrument reduces the operation difficulty, does not need to modify the video image measuring instrument into a three-coordinate measuring instrument, does not need to be equipped with an external instrument, and can directly realize the precision measurement of the perpendicularity of the Z axis of the video image measuring instrument and an XY platform and the stability of the Z axis.
(2) The method for testing the performance of the video image measuring instrument can realize the 2D measurement stability in the horizontal planes with different heights, and can realize the measurement of the linear precision of the equipment in the Z-axis direction by utilizing the accuracy of the measured height difference.
(3) The method for testing the performance of the video image measuring instrument provided by the invention has the advantages that the used assembly mold is simple and reliable, the processing, the manufacturing and the purchasing are easy, the adopted equipment and the measuring device have higher technical maturity, and the popularization and the application of the testing method are facilitated.
Drawings
FIG. 1 is a flow chart of a method for testing performance of a video image measuring instrument according to an embodiment of the invention;
fig. 2(a) schematically illustrates an isometric view of a coaxial etalon according to an embodiment of the present invention;
FIG. 2(b) is a cross-sectional view of FIG. 2 (a);
FIG. 3 schematically illustrates a schematic view of a parallel spacer block according to an embodiment of the invention;
fig. 4 is a flow chart schematically illustrating a method for testing performance of a video image measuring instrument according to an embodiment of the invention.
Detailed Description
In the related art, when the video image measuring apparatus adopts a conventional measurement and calibration method, EXY generally uses a linear ruler as a standard, and measures the specified linear intervals sequentially at 4 positions along two diagonal directions and the other two directions parallel to the X axis and the Y axis respectively in the measuring range on a worktable perpendicular to the optical axis of the video image measuring apparatus. The difference value between the measured value and the actual value of the standard device is a size measurement error; in the EZ, a gauge block or a step gauge is generally selected as a standard, an image detection system is lifted along a Z axis, the upper surfaces of the standard devices with different sizes are clearly imaged and read, and the difference value between the measured value and the actual value of the standard interval is the measurement error of the vertical size.
EXY and EZ measurement and calibration, neglecting the verticality of the Z axis and the XY platform, the stability of the Z axis in the motion process, if considering the verticality of the Z axis and the XY platform, the influence of the stability of the Z axis in the motion process on the precision measurement needs to be supplemented by the following two points:
firstly, a touch probe or a laser auxiliary focusing system is additionally arranged on a Z axis, a video image measuring instrument is upgraded to be a three-coordinate measuring instrument, and the Z coordinate of each area of the XY platform is directly measured, so that the perpendicularity of the Z axis and the XY platform can be obtained;
and secondly, placing a marble or ceramic vertical surface standard device in the XY platform area with the calibrated verticality, fixing a digital display or pointer type dial indicator (or a scanning probe for three coordinates or a laser range finder) on the Z axis, adjusting the contact of a gauge tip (probe and laser conjugate position) and the vertical surface, driving the Z axis to move up and down, observing gauge head data, and respectively doing once in an XZ plane and a YZ plane to obtain the stability index of the Z axis in the motion process.
Based on the concept of the invention, the invention provides a method for testing the performance of a video image measuring instrument, which is used for directly utilizing the method to realize the perpendicularity between a Z axis and an XY platform and the precision measurement of the stability of the Z axis in the motion process on the video image measuring instrument without modifying the video image measuring instrument into a three-coordinate measuring instrument or equipping an expensive marble or vertical surface standard device and assisting the perpendicularity between the Z axis and the XY platform by externally hanging a probe on a measuring head, and testing the stability of the Z axis in the motion process, wherein the measurement indexes are 3D performance test indexes of the video image measuring instrument.
In order that the objects, technical solutions and advantages of the present invention will become more apparent, the present invention will be further described in detail with reference to the accompanying drawings in conjunction with the following specific embodiments.
Fig. 1 is a flow chart schematically illustrating a method for testing performance of a video image measuring instrument according to an embodiment of the invention.
As shown in fig. 1, the test method includes operations S1 to S6.
In operation S1, the standard is placed on the work table of the video image measuring instrument.
According to an embodiment of the invention, the etalon is a coaxial etalon comprising a first planar surface and a second planar surface, the first planar surface and the second planar surface having a height difference. Placing the standard device on a workbench of a video image measuring instrument, wherein the first plane can be a plane far away from the workbench, and the second plane can be a plane close to the workbench; alternatively, the first plane may be a plane close to the table and the second plane may be a plane of the principle table. In any case, the test method is the same. In the embodiment of the present invention, the first plane may be a plane far from the worktable, and the second plane may be a plane close to the worktable.
According to an embodiment of the present invention, the first plane includes a ring shape composed of a plurality of circular shapes, and may further include a ring shape composed of one of the following shapes: square, oval, gear-shaped. The second planar shape is the same as the first planar shape.
For example, taking as an example a coaxial etalon having a first plane comprising a plurality of rings formed into circles, fig. 2(a) is an isometric view of the coaxial etalon; fig. 2(b) is a cross-sectional view of fig. 2 (a).
It should be noted that the coaxial etalon shown in fig. 2(a) is only an example of a specific embodiment, and the positions of the specific tolerance requirements shown in fig. 2(b) are only an example, and the protection scope of the present patent is not limited by the specific data or the specific shape and number of the first plane.
According to the embodiment of the invention, taking the annular coaxial standard with the first plane composed of a plurality of circles as an example, the ridge fillets of the circles, which can be measured by the video image measuring instrument, are all smaller than R0.2 and can not be blunted, so that the circle boundaries can be clearly captured under the detection system of the video image measuring instrument.
In operation S2, the video image measuring instrument detection system is moved to place the first plane of the etalon in the window of the video image measuring instrument, and position information of the first feature point of the first plane of the etalon is obtained.
According to an embodiment of the present invention, taking the coaxial etalon in which the first plane is an annular shape including a plurality of circular shapes, the plurality of circular shapes includes an annular shape including at least two circular shapes. The position and position information of the first feature point may be position information of a center of any one circle in the first plane.
According to an embodiment of the present invention, acquiring the position information of the first feature point of the first plane of the etalon includes: placing the standard device on a workbench, and adjusting the light source, the magnification and the focal length of the video image measuring instrument to enable the influence in a lower window of the video image measuring instrument to be clear;
sampling N measuring points on any circular circumference in the first plane, and measuring the N measuring points one by one to obtain N measuring point data, wherein N is an integer greater than or equal to 3, and for more accuracy of measurement, N can be 25, for example;
and performing least square data fitting on the N pieces of measurement point data to obtain the position information of the first characteristic point of any circle in the first plane.
In operation S3, the detection system is moved along the Z-axis direction of the video image measuring instrument to place the second plane of the etalon in the window of the video image measuring instrument, and position information of the second feature point of the second plane of the etalon is obtained.
According to an embodiment of the invention the second plane of the etalon is shaped the same as the first plane. The position information of the second feature point may be position information of a center of a circle in the second plane.
According to an embodiment of the present invention, acquiring the position information of the second feature point of the second plane of the etalon includes: moving the detection system along the Z-axis direction of the video image measuring instrument, and adjusting the light source, the magnification and the focal length of the video image measuring instrument to enable the influence in a lower window of the video image measuring instrument to be clear;
sampling N measuring points on the circumference of the circle in the second plane, and measuring the N measuring points one by one to obtain N measuring point data, wherein N is an integer greater than or equal to 3, and for more accuracy of measurement, for example, N can be 25;
and performing least square data fitting on the N pieces of measurement point data to obtain the position information of the second characteristic point of the circle of the second plane.
In operation S4, the concentricity of the first plane and the second plane is obtained using the position information of the first feature point and the position information of the second feature point.
In operation S5, after rotating the etalon every fixed angle, operations S2 through S4 are repeated.
According to an embodiment of the present invention, after the operation S4 is completed, the etalon is rotated by a fixed angle in the coaxial direction, and the operations S2 to S4 are repeated again, so that the concentricity data of the first plane and the second plane corresponding to the angle are obtained. The measurement can be carried out for 2 times at fixed angles, the rotation of the fixed angle can be carried out for 1 time at 45 degrees, the rotation is carried out for two circles, and the operations S2-S4 are repeated for 16 times; alternatively, the measurement may be performed 1 time every 90 degrees, and the operations S2 to S4 may be repeated 8 times with two rotations. That is, 2 measurements are made at every 45 degrees or every 90 degrees position.
In operation S6, operation 5 is repeated multiple times to obtain concentricity measurement data of the plurality of first planes and the plurality of second planes, and the perpendicularity between the Z axis and the XY platform of the video image measurement instrument and the stability of the Z axis are analyzed according to a change of the concentricity measurement data.
According to an embodiment of the present invention, the above operations S2 to S5 are repeatedly measured, and a plurality of concentricity measurement data of any one circle in the first plane and a circle in the second plane are obtained. And analyzing the verticality between the Z axis of the video image measuring instrument and the XY platform and the stability of the Z axis according to the change of the plurality of concentricity measuring data.
According to the embodiment of the invention, if the change of the concentricity measurement data is periodic, the perpendicularity between the Z axis of the video image measuring instrument and the XY platform is represented; if the change of the concentricity measurement data does not have periodicity, representing that the Z axis of the video image measuring instrument has the stability problem in the motion process; if the concentricity measurement data change to a fixed value or within a preset range, representing that the verticality of the Z axis and the XY platform of the video image measuring instrument and the stability of the Z axis meet the requirements, and the performance is the 3D performance of the video image measuring instrument.
According to the embodiment of the invention, by utilizing the testing method of the performance of the video image measuring instrument, the equipment is routinely metered and calibrated by utilizing a measuring device with two planes with height difference as a standard device thereof, the coaxial standard device is rotated in the same area, the verticality of the Z axis of the video image measuring instrument and an XY platform can be directly analyzed by utilizing the change of a plurality of concentricity measurement data of any one circle in the first plane and the circle in the second plane of the standard device, the stability of the Z axis in the motion process can be directly analyzed without modifying the video image measuring instrument into a three-coordinate measuring instrument or equipping an expensive marble or vertical surface standard device, the verticality of the Z axis and the XY platform can be tested by the aid of an externally-hung probe on a measuring head, the stability of the Z axis in the motion process can be tested, because the XY platform and the Z axis of the video image measuring instrument are generally controlled independently, the test results of the Z-axis motion stability are generally not changed from measurement area to measurement area.
In an embodiment of the present invention, the testing method further includes: position information of a third feature point of the first plane of the etalon is acquired.
According to the embodiment of the present invention, the circle corresponding to the third feature point is any one of the circles on the first plane except the circle corresponding to the first feature point. The measurement method for obtaining the position information of the third feature point is the same as the method for obtaining the position information of the first feature point and the second feature point, and N measurement points are sampled on the circumference of any circle corresponding to the third feature point for data fitting to obtain the position information of the third feature point, wherein N is an integer greater than or equal to 3.
According to the embodiment of the invention, the position information of the first characteristic point and the third characteristic point on the first plane is utilized to obtain the concentricity data of the circle corresponding to the first characteristic point and the circle corresponding to the third characteristic point in the first plane.
According to the embodiment of the present invention, the etalon is rotated at every fixed angle, the concentricity of the circle corresponding to the first feature point and the circle corresponding to the third feature point in the first plane is measured, the etalon is rotated by the fixed angle for a plurality of times, and the rotation method is the same as operation S5, thereby obtaining a plurality of concentricity measurement data of the circle corresponding to the first feature point and the circle corresponding to the third feature point in the first plane.
According to the embodiment of the invention, through the change analysis of a plurality of concentricity measurement data of the circle corresponding to the first characteristic point and the circle corresponding to the third characteristic point in the first plane, the 2D measurement stability of the video image measuring instrument in the horizontal planes with different heights can be measured.
According to the embodiment of the invention, the first plane and the second plane of the standard have a height difference, and by the testing method, the stability of 2D measurement of the video image measuring instrument in the horizontal planes with different heights can be analyzed as follows: and taking a workbench of the video imager as a reference position, and measuring the concentricity data of any one of a plurality of circles corresponding to the circle corresponding to the first characteristic point and the third characteristic point in the standard device at different heights.
According to the embodiment of the invention, the 2D stability of the video image measuring instrument can be measured in the horizontal planes with different heights by placing a high parallel pad (as shown in FIG. 3) with higher parallelism at the bottom of the coaxial standard, the parallel pad has a through hole in the middle, the diameter of the through hole is larger than that of the coaxial standard, the area is also large enough to stably place the coaxial standard thereon, and the coaxial standard and the parallel pad are fixed by a fixing device, such as plasticine and the like, so that the coaxial standard and the parallel pad are prevented from moving in the measuring process.
According to the embodiment of the invention, the 2D stability of the video image measuring instrument is measured in the horizontal planes with different heights, and the measurement of the 2D stability in the horizontal planes with different heights can also be realized by increasing the height of the second plane of the standard.
In the embodiment of the present invention, returning to operations S2 to S3, in operation S2, the initial height of the first plane may be further acquired, and in operation S3, the height of the second plane may be further acquired by moving the detection system along the Z-axis direction of the video image measuring instrument.
According to the embodiment of the invention, the height difference between the first plane and the second plane is obtained by using the initial height of the first plane and the height data of the second plane; the etalon is rotated by a fixed angle for a plurality of times, and the rotation method is the same as operation S5, so as to obtain a plurality of height difference measurement data of the first plane and the second plane.
According to the embodiment of the invention, through the change analysis of the plurality of height difference measurement data of the first plane and the second plane, the linear precision of the video image measuring instrument in the Z-axis direction can be measured.
In the embodiment of the present invention, returning to operation S2 again, after the circle corresponding to the first feature point takes N measurement points to obtain the position of the first feature point, obtaining the roundness of the circle corresponding to the first feature point by using the N measurement points includes:
measuring the distances from N measuring points sampled on the circumference of the circle corresponding to the first characteristic point to the position of the first characteristic point to obtain N distance values, namely the radius value of the circle corresponding to the first characteristic point, and acquiring a maximum distance value and a minimum distance value;
obtaining roundness measurement data of a circle corresponding to the first characteristic point by using a difference value between the maximum distance value and the minimum distance value; rotating the standard device for a fixed angle for multiple times, wherein the rotating method is the same as operation S5, and obtaining multiple circular degree measurement data corresponding to the first characteristic point of the corresponding rotating angle;
and analyzing the measurement precision of the video image measuring instrument according to the plurality of roundness measurement data.
It should be noted that, the method for measuring the roundness of the circle corresponding to the second feature point and the third feature point is the same as the method for measuring the roundness data of the circle corresponding to the first feature point, and is not described herein again, and similarly, the measurement accuracy of the video image measuring instrument may also be analyzed according to the obtained multiple measurement data of the roundness of the circle corresponding to the second feature point and the third feature point.
According to the embodiment of the invention, the first plane of the coaxial etalon comprises a ring formed by a plurality of squares, and the position information of the first characteristic point and the third characteristic point on the first plane is obtained by respectively adopting the intersection points of the middle lines of the opposite sides of the squares;
according to an embodiment of the present invention, the first plane of the coaxial etalon comprises a ring shape formed by a plurality of elliptical shapes or gear shapes, and the elliptical shapes or the gear shapes are placed between two circles to obtain the position information of the first characteristic point and the third characteristic point on the first plane.
According to the embodiment of the invention, the performance testing method of the video image measuring instrument provided by the invention has the advantages that the video image measuring instrument is not required to be modified into a three-coordinate measuring instrument, an expensive marble or vertical surface standard device is not required to be arranged, the perpendicularity between the Z axis and the XY platform and the stability of the Z axis in the motion process are not required to be completed by externally hanging a probe on a measuring head, and the perpendicularity between the Z axis and the XY platform and the stability of the Z axis in the motion process are directly measured by utilizing the method; meanwhile, the measurement of the 2D stability of the video image measuring instrument in the horizontal planes with different heights and the measurement of the repeatability and the accuracy of the video image measuring instrument at different heights are realized, and the measurement of the linear precision of the video image measuring instrument in the Z-axis direction is realized.
The following describes the testing method specifically with a specific embodiment, and the coaxial standard used for implementing the measurement of the 3D performance of the video image measuring instrument and the other performance measurements by using the testing method is exemplified by the coaxial standard shown in fig. 2, it should be noted that the specific tolerance value represented by the coaxial standard is only a distance description, and all the real object standards capable of implementing the measurement by using the testing method are within the protection scope of the present invention.
As shown in fig. 2, the coaxial etalon is a step axis, and 3 circular profiles which can be measured are provided under a detection system of the video image measuring instrument, wherein 2 of the circular profiles have the same height, the other circular profile has a height different from the 2 height, and the plane where the 2 circular profiles are located and the plane where the other circular profile is located have a certain height difference, wherein the radii of the 2 circular profiles are Φ 10 and Φ 20 respectively; the other circular profile has a radius phi 30.
Fig. 4 is a flow chart schematically illustrating a method for testing performance of a video image measuring instrument according to an embodiment of the invention.
As shown in fig. 4, the method for testing the performance of the video image measuring instrument by using the coaxial etalon includes operations S11 to S61:
in operation S11, placing the coaxial etalon on a table of the video image measuring instrument;
in operation S21, the detection system of the video imager is moved to adjust the light source, the magnification, and the focal length, so that three circles of the coaxial etalon are sequentially located in the window of the video imager to measure Φ 10, Φ 20, Φ 30, and a height difference of 45mm, and the diameter and the roundness of the three circles, and the data of concentricity and height difference between two circles are output.
In operation S31, the coaxial etalon is rotated every 90 degrees, two rotations are performed, the above measurements are repeated 8 times, and data of the diameters, the circularities, and the concentricity and the height difference between each two of the three circles are output 8 times, respectively.
In operation S41, the placement position of the coaxial etalon is changed to other areas, and the above measurement is repeated. It should be noted that, under the conditions allowed by the equipment or actual conditions, the measurement can be directly performed without partitioning; the worktable can be divided into a plurality of areas according to actual conditions, and in the embodiment, the XY worktable is divided into 9 areas of 3 × 3.
In operation S51, the above measurements of S11 to S41 are repeated using the parallel spacer block elevating coaxial etalon to output data of diameters, roundness of three circles, and concentricity and height difference between each two circles, respectively.
In operation S61, the output data of the diameters and the circularities of the three circles and the concentricity and the height difference between each two circles are analyzed to obtain an analysis measurement result.
For example, the concentricity indexes of phi 10mm and phi 30mm, and phi 20mm and phi 30mm represent the Z-axis stability of the equipment and the perpendicularity of the Z-axis and the XY platform. If the coaxial standard device is rotated in the same area, the change of concentricity measurement data is brought, and the change has periodicity, the problem of the perpendicularity of the Z axis and the XY platform is shown, and if the change does not have periodicity, the problem of the motion stability of the Z axis is shown; the concentricity indexes of phi 10mm and phi 20mm represent the 2D measurement stability of the equipment in horizontal planes with different heights; the repeatability and the accuracy of the height difference of 45mm represent the linear precision of the equipment in the Z-axis direction; and the repeatability and the accuracy of phi 10mm, phi 20mm and phi 30mm represent the measurement accuracy of the equipment at different positions and different heights.
It should be noted that, in order to allow an intuitive and rapid analysis of the measurement results, the analysis of the measurement results may also be performed by means of a curve generated by the data processing software.
The above-mentioned embodiments are intended to illustrate the objects, technical solutions and advantages of the present invention in further detail, and it should be understood that the above-mentioned embodiments are only exemplary embodiments of the present invention and are not intended to limit the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the protection scope of the present invention.
Claims (10)
1. A method for testing the performance of a video image measuring instrument comprises the following steps:
operation 1, placing a standard device on a workbench of a video image measuring instrument;
operation 2, moving the detection system of the video image measuring instrument, placing the first plane of the standard device in a window of the video image measuring instrument, and acquiring position information of a first characteristic point of the first plane of the standard device;
operation 3, moving the detection system along the Z-axis direction of the video image measuring instrument, placing the second plane of the standard in the window of the video image measuring instrument, and obtaining position information of a second feature point of the second plane of the standard;
operation 4, obtaining the concentricity of the first plane and the second plane by using the position information of the first feature point and the position information of the second feature point;
operation 5, repeating operation 2-operation 4 after rotating the standard device at fixed angles;
operation 6, repeating operation 5 for multiple times to obtain concentricity measurement data of the first plane and the second plane, and analyzing the perpendicularity between the Z axis of the video image measuring instrument and the XY platform and the stability of the Z axis according to the change of the concentricity measurement data;
the etalon is a coaxial etalon and comprises the first plane and the second plane, and the first plane and the second plane have a height difference.
2. The testing method of claim 1, wherein the first plane comprises a ring shape made up of a plurality of circles, the testing method further comprising:
acquiring the position information of a third feature point of any circle in the ring except the circle corresponding to the first feature point;
obtaining the concentricity of any one of the circle corresponding to the first characteristic point and the circles corresponding to the third characteristic point in the first plane by using the position information of the first characteristic point and the position information of the third characteristic point;
repeating the operation after rotating the standard device at fixed angles;
and after the standard device is rotated for multiple times, obtaining the concentricity measurement data of any one of the circle corresponding to the first characteristic point and the circle corresponding to the third characteristic point in the first plane corresponding to the rotation angle, and analyzing the 2D measurement stability of the video image measuring instrument in the horizontal planes with different heights according to the change of the concentricity measurement data.
3. The testing method of claim 2, wherein the analyzing the 2D measurement stability of the video image measuring instrument in the horizontal planes of different heights is: and measuring the concentricity data of any one of the circle corresponding to the first characteristic point and the circles corresponding to the third characteristic points in the standard at different heights by taking a workbench of the video image measuring instrument as a reference position.
4. The test method according to claim 2, wherein the obtaining of the position information of the first feature point, the second feature point, and the third feature point each includes:
placing the standard device on a workbench, and adjusting the video image measuring instrument to enable the image in a lower window of the video image measuring instrument to be clear;
respectively sampling N measuring points on the circumference corresponding to the first characteristic point, the second characteristic point and the third characteristic point, and measuring the N measuring points one by one to obtain N measuring point data, wherein N is an integer greater than or equal to 3;
and performing data fitting on the N pieces of measurement point data to obtain the corresponding position information of the first characteristic point, the second characteristic point and the third characteristic point.
5. The testing method of claim 4, further comprising:
acquiring circular roundness measurement data corresponding to the first characteristic point on the first plane;
and analyzing the measurement precision of the video image measuring instrument according to the change of the roundness measurement data.
6. The testing method according to claim 5, wherein the obtaining roundness measurement data of the circle corresponding to the first feature point on the first plane comprises:
respectively measuring the distances from N measuring points on the circle corresponding to the first characteristic point to obtain the distance values from the N measuring points to the first characteristic point, and obtaining the maximum distance value and the minimum distance value in the N distance values;
obtaining circular roundness measurement data corresponding to the first characteristic point by using the difference value between the maximum distance value and the minimum distance value;
repeating the operation after rotating the standard device at fixed angles;
and after the standard device is rotated for multiple times, circular roundness measurement data corresponding to the first characteristic point of the corresponding rotation angle is obtained.
7. The testing method of claim 1, wherein the analyzing the perpendicularity of the video image measuring instrument Z axis to an XY platform and the stability of the Z axis according to the change of the concentricity measurement data comprises:
if the change of the concentricity measurement data is periodic, representing that the verticality between the Z axis of the video image measuring instrument and the XY platform is problematic;
if the change of the concentricity measurement data does not have periodicity, representing that the Z axis of the video image measuring instrument has a stability problem in the motion process;
and if the concentricity measurement data change to a fixed value or within a preset range, representing that the verticality of the Z axis of the video image measuring instrument and the XY platform and the stability of the Z axis meet the requirements.
8. The testing method of claim 1, wherein the second planar shape is the same as the first planar shape.
9. The testing method of claim 1, wherein the first plane further comprises a ring shape consisting of one of: square, oval, gear-shaped.
10. The test method of claim 9,
the first plane comprises a ring formed by a plurality of squares, and the intersection points of the middle lines of the opposite sides of the squares are respectively adopted to obtain the position information of the first characteristic point and the third characteristic point on the first plane;
the first plane comprises a ring formed by a plurality of ellipses or gear shapes, the ellipses or the gear shapes are arranged between two circles, and the position information of the first characteristic point and the third characteristic point on the first plane is obtained.
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