CN113009261B - Interface testing device and method - Google Patents
Interface testing device and method Download PDFInfo
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- CN113009261B CN113009261B CN202110242797.6A CN202110242797A CN113009261B CN 113009261 B CN113009261 B CN 113009261B CN 202110242797 A CN202110242797 A CN 202110242797A CN 113009261 B CN113009261 B CN 113009261B
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- G—PHYSICS
- G01—MEASURING; TESTING
- G01R—MEASURING ELECTRIC VARIABLES; MEASURING MAGNETIC VARIABLES
- G01R31/00—Arrangements for testing electric properties; Arrangements for locating electric faults; Arrangements for electrical testing characterised by what is being tested not provided for elsewhere
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- G—PHYSICS
- G08—SIGNALLING
- G08C—TRANSMISSION SYSTEMS FOR MEASURED VALUES, CONTROL OR SIMILAR SIGNALS
- G08C17/00—Arrangements for transmitting signals characterised by the use of a wireless electrical link
- G08C17/02—Arrangements for transmitting signals characterised by the use of a wireless electrical link using a radio link
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Abstract
The invention discloses an interface testing device, which comprises an electric control box, a sensor unit and equipment comprising an interface to be tested, wherein the sensor unit comprises a sensor interface, and the electric control box comprises a control interface; the electric control box comprises a controller, wherein the sensor interface is connected with equipment through the interface to be tested, and the sensor interface is connected with the controller through the control interface; the controller sends an enabling signal to the equipment through the sensor unit, reads a feedback signal of the equipment, and if the feedback signal is normal, the interface to be tested is tested; if the feedback signal is abnormal, outputting error reporting information. The interface testing device and the interface testing method provided by the invention have the advantages of low cost, portability, simplicity in operation and remote control, and do not need to depend on a computer and special software.
Description
Technical Field
The invention belongs to the field of interface testing, and particularly relates to an interface testing device and method.
Background
The E84 interface is widely applied to semiconductor equipment and is a universal communication interface for the automatic wafer box transfer process. The standard interface is usually a 25Pin D-Sub interface, which needs to be matched for use, one side of the standard interface is connected with a transmitting end sensor, the other side of the standard interface is connected with a receiving end sensor, and after the induction heads of the two sensors are in butt joint, non-contact IO signal interaction can be carried out. The data interacted by the two sensors comprises 8 paths of digital quantity input signals and 8 paths of digital quantity output signals, and a normal signal matched with the sensor at the transmitting end and the sensor at the receiving end. All devices containing SEMI E84 interfaces need to test the transceiver functions of the interfaces before leaving the factory.
Conventional testing methods generally require testing software provided by the E84 sensor manufacturer, and special testing tools and special software. The equipment has high cost, needs to be matched with a computer for use, and cannot be used in dust-free rooms which cannot carry the computer.
Disclosure of Invention
The invention aims to provide an interface testing device and method, which have the advantages of low cost, portability, simple operation and remote control, and do not need to depend on a computer and special software.
In order to achieve the above purpose, the present invention adopts the following technical scheme: an interface testing device comprises an electric control box, a sensor unit and equipment comprising an interface to be tested, wherein the sensor unit comprises a sensor interface, and the electric control box comprises a control interface; the electric control box comprises a controller, wherein the sensor interface is connected with equipment through the interface to be tested, and the sensor interface is connected with the controller through the control interface;
the controller sends an enabling signal to the equipment through the sensor unit, reads a feedback signal of the equipment, and if the feedback signal is normal, the interface to be tested is tested; if the feedback signal is abnormal, outputting error reporting information.
Further, the sensor unit comprises a first sensor and a second sensor which are connected with each other, wherein the first sensor is connected with the control interface, and the second sensor is connected with the interface to be tested.
Further, the sensor interface of the first sensor is connected to the control interface, and the sensor interface of the second sensor is connected to the interface to be tested; the first sensor and the second sensor are capable of being matched.
Further, the first sensor and the second sensor are E84 sensors, and the interface to be tested, the control interface and the sensor interface are all E84 interfaces.
Further, the remote control terminal is further included, the electric control box further includes a wireless module, the wireless module is connected to the remote control terminal and the controller, and the remote control terminal is connected to conduct data interaction with the controller through the wireless module.
Further, the wireless module is a Bluetooth or WIFI module.
Further, the electric control box further comprises a power supply, wherein the power supply is connected with the controller and the wireless module at the same time and is used for supplying power to the controller and the wireless module.
Further, the outer side of the electric control box comprises a button and an indicator lamp.
A method for testing by an interface testing device, comprising the steps of:
s01: the first sensor and the second sensor are matched;
s02: the remote control terminal or the button control controller enters a test mode;
s03: the controller sends an enabling signal to the equipment through the sensor unit, reads a feedback signal of the equipment, and if the feedback signal is normal, the interface to be tested is tested; if the feedback signal is abnormal, outputting error reporting information.
Further, in the step S03, if the feedback signal is normal, the indicator light outside the electric control box indicates a normal state, and the test result is transmitted to the remote control terminal through the wireless module;
if the feedback signal is abnormal, the indicator lamp at the outer side of the electric control box indicates an abnormal state, and meanwhile, the test result is transmitted to the remote control terminal through the wireless module.
The invention has the following beneficial effects: the device has simple structure, the electric control box has smaller volume and is convenient to carry, and meanwhile, the remote interface test can be realized through the wireless module and the remote control terminal; the invention can customize the testing flow through the button at the outer side of the electric control box and the remote control terminal, realize the testing of the interfaces to be tested on different devices, greatly expand the application range of the testing device and simplify the testing flow and method of the interfaces to be tested.
Drawings
FIG. 1 is a schematic diagram of a test apparatus according to the present invention;
in the figure: 1 equipment, 2 interfaces to be tested, 3 second sensors, 4 first sensors, 5 control interfaces, 6 electric control boxes, 7 controllers, 8 power supplies, 9 wireless modules and 10 remote control terminals.
Detailed Description
In order to make the objects, technical solutions and advantages of the present invention more apparent, the following detailed description of the specific embodiments of the present invention will be given with reference to the accompanying drawings.
Referring to fig. 1, an interface testing apparatus includes an electrical control box 6, a sensor unit and a device 1 including an interface to be tested, wherein the sensor unit includes a sensor interface, and the electrical control box 6 includes a control interface 5; the sensor interface, the interface to be tested 2 and the control interface 5 are of the same type and are matched with each other. For example, the interface to be tested is an E84 interface, the sensor in the sensor unit is an E84 sensor, and meanwhile, the sensor interface, the interface to be tested and the control interface are all E84 interfaces.
The E84 interface and the corresponding E84 sensor are only illustrative of one embodiment of the present invention, and when the interface to be tested is another type of interface, only the corresponding sensor unit and the control interface need to be configured in a matching way. The following description of the present invention is presented in terms of an E84 interface and its corresponding E84 sensor.
E84 is a standard number of SEMI standard in which the physical type of interface, pin definition, and signal timing are specified. In semiconductor devices, a wafer cassette is required, and the wafer cassette is automatically transported, and signal transmission using the standard is adopted. The E84 interface is a standard interface to connect E84 sensors. When the interface to be tested is an E84 interface, the E84 sensor needs to be matched for use, and the final use effect can be ensured mainly based on the following two aspects. In addition, some devices are provided with E84 sensors at the receiving end, and the function test of the E84 sensors can be simultaneously realized by using the mode for testing. The characteristics of the E84 sensor need to meet the SEMI standard and be SEMI-certified. The sensors need to be matched for use, and IO signal handshaking is conducted in a non-contact mode.
With continued reference to fig. 1, the sensor unit of the present invention includes a first sensor 4 and a second sensor 3 connected to each other, where the first sensor 4 is connected to a control interface 5, and the second sensor 3 is connected to an interface 2 to be tested; the first sensor and the second sensor are closer to each other, and can be matched. For example, the first sensor and the second sensor are E84 sensors, and the interface to be tested, the control interface and the sensor interface are all E84 interfaces. Two E84 sensors in close proximity are capable of signal matching.
The electric control box 6 also comprises a controller 7, a power supply and 8 a wireless module 9. The power supply 8 is connected with the controller 7 and the wireless module 9 at the same time and is used for supplying power to the controller 7 and the wireless module 9. The wireless module 9 is connected to a remote control terminal and a controller, and the remote control terminal 10 is connected to perform data interaction with the controller 7 through the wireless module 9. The wireless mode of the wireless module can be wireless radio frequency technology, and the specific wireless module can be, but not limited to, bluetooth or WIFI module.
The outside of the electric control box also comprises a button and an indicator lamp, wherein the button can be a start test button and the like and is used for outputting a signal for starting the test to the controller. The indicator light may be a status indicator light for reflecting test results of interfaces to be tested in different devices. In particular, the indicator lights may include different status indicator lights, such as different test results being represented in different colors, different test results being represented by different numbers of lights, and so forth.
In the invention, a sensor interface in a second sensor is connected with equipment through an interface to be detected, and a sensor interface in a first sensor is connected with a controller through a control interface; the remote control terminal sends a test instruction through the wireless module phase controller, or the controller of the button box outside the electric control box sends the test instruction; after receiving the instruction, the controller sends an enabling signal to the equipment through the sensor unit, reads a feedback signal of the equipment, and if the feedback signal is normal, the interface to be tested is tested; if the feedback signal is abnormal, outputting error reporting information.
It is worth to say that, the sensor model adopted in the sensor unit, the interface to be tested and the control interface are matched with each other; and two sensors in the sensor unit are the same in type and can be closely matched, so that enabling signals of the controller can smoothly reach the interface to be detected through the control interface, the first sensor and the second sensor, and whether the interface to be detected is normal or not is judged according to different enabling signals. In the application, the first sensor and the second sensor are both standard E84 sensors, and the control interface is normal, in this case, if the interface to be tested is normal, the feedback signal of the enabling signal is necessarily normal; if the feedback signal is abnormal, the problems of the first sensor, the second sensor and the control interface can be eliminated, and then the problem of the interface to be tested can be judged.
The controller comprises a control center, an input end and an output end, wherein the control center, the input end and the output end are all connected to the first sensor through control interfaces, so that output signals of the first sensor are controlled and input signals of the first sensor are read. The control center in the present application may be a CPU. The controller can be programmed through the remote control terminal, so that the flow control of the enabling signals and the control of the independent input and output signals are realized. This also expands the application range of the device of the application further for detecting the respective performance of the interfaces to be tested of different devices.
The invention provides a method for testing an interface testing device, which comprises the following steps:
s01: the first sensor and the second sensor are matched; until the pairing indicator lights on two sides of the first sensor and the second sensor are lightened, namely the matching is successful, at the moment, the sensor unit can normally perform signal connection of the interface to be tested and the control interface.
S02: the remote control terminal or the button control controller enters a test mode; namely determining a jezily test mode through a remote control terminal or an outer side button of an electric control box;
s03: the controller sends an enabling signal to the sensor unit through the control interface, the first sensor receives the enabling signal emitted by the output end of the controller and transmits the enabling signal to the matched second sensor, the second sensor retransmits the enabling signal to the interface to be tested, the interface to be tested feeds back a signal according to the state of the interface to be tested after receiving the enabling signal, the feedback signal sequentially passes through the second sensor, the control interface and the input end of the controller to reach the controller, and the controller judges whether the feedback signal is normal or not.
If the feedback signal is normal, the indicator lamp at the outer side of the electric control box indicates a normal state, and meanwhile, the test result is transmitted to the remote control terminal through the wireless module; if the feedback signal is abnormal, the indicator lamp at the outer side of the electric control box indicates an abnormal state, and meanwhile, the test result is transmitted to the remote control terminal through the wireless module.
The device has simple structure, the electric control box has smaller volume and is convenient to carry, and meanwhile, the remote interface test can be realized through the wireless module and the remote control terminal; the invention can customize the testing flow through the button at the outer side of the electric control box and the remote control terminal, realize the testing of the interfaces to be tested on different devices, greatly expand the application range of the testing device and simplify the testing flow and method of the interfaces to be tested.
The foregoing description is only of the preferred embodiments of the present invention, and the embodiments are not intended to limit the scope of the invention, so that all changes made in the structure and details of the invention which may be regarded as equivalents thereof are intended to be included within the scope of the invention as defined in the following claims.
Claims (6)
1. The interface testing device is characterized by comprising an electric control box, a sensor unit and equipment comprising an interface to be tested, wherein the sensor unit comprises a sensor interface, and the electric control box comprises a control interface; the electric control box comprises a controller, wherein the sensor interface is connected with equipment through the interface to be tested, and the sensor interface is connected with the controller through the control interface; the sensor unit comprises a first sensor and a second sensor which are mutually connected, the first sensor is connected with the control interface, and the second sensor is connected with the interface to be tested; the first sensor and the second sensor are E84 sensors, and the interface to be tested, the control interface and the sensor interface are E84 interfaces;
the controller sends an enabling signal to the equipment through the sensor unit, reads a feedback signal of the equipment, and if the feedback signal is normal, the interface to be tested is tested; if the feedback signal is abnormal, outputting error reporting information.
2. The interface test device of claim 1, wherein the sensor interface of the first sensor is connected to a control interface and the sensor interface of the second sensor is connected to an interface under test; the first sensor and the second sensor are capable of being matched.
3. The interface test device of claim 1, further comprising a remote control terminal, wherein the electronic control box further comprises a wireless module, wherein the wireless module is connected to the remote control terminal and the controller, and wherein the remote control terminal is connected to interact data with the controller through the wireless module.
4. An interface testing device according to claim 3, wherein the wireless module is a bluetooth or WIFI module.
5. An interface testing device according to claim 3, wherein the electrical control box further comprises a power supply, the power supply being connected to both the controller and the wireless module for supplying power to the controller and the wireless module.
6. The interface testing device of claim 5, wherein the exterior of the electrical control box includes buttons and indicator lights.
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