CN112904663B - Bearing device of mask plate - Google Patents
Bearing device of mask plate Download PDFInfo
- Publication number
- CN112904663B CN112904663B CN202110159598.9A CN202110159598A CN112904663B CN 112904663 B CN112904663 B CN 112904663B CN 202110159598 A CN202110159598 A CN 202110159598A CN 112904663 B CN112904663 B CN 112904663B
- Authority
- CN
- China
- Prior art keywords
- plate
- shaped protection
- type guard
- guard plate
- inner cavity
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
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Links
- 239000000428 dust Substances 0.000 claims description 35
- 238000000034 method Methods 0.000 claims description 9
- 238000005201 scrubbing Methods 0.000 claims description 7
- 230000008878 coupling Effects 0.000 abstract description 2
- 238000010168 coupling process Methods 0.000 abstract description 2
- 238000005859 coupling reaction Methods 0.000 abstract description 2
- 230000000694 effects Effects 0.000 description 7
- 238000003860 storage Methods 0.000 description 5
- 230000009471 action Effects 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 238000001259 photo etching Methods 0.000 description 3
- 229920002120 photoresistant polymer Polymers 0.000 description 3
- VYZAMTAEIAYCRO-UHFFFAOYSA-N Chromium Chemical compound [Cr] VYZAMTAEIAYCRO-UHFFFAOYSA-N 0.000 description 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 239000011651 chromium Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- 230000004075 alteration Effects 0.000 description 1
- 230000004888 barrier function Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Classifications
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/38—Masks having auxiliary features, e.g. special coatings or marks for alignment or testing; Preparation thereof
-
- G—PHYSICS
- G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
- G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
- G03F1/00—Originals for photomechanical production of textured or patterned surfaces, e.g., masks, photo-masks, reticles; Mask blanks or pellicles therefor; Containers specially adapted therefor; Preparation thereof
- G03F1/68—Preparation processes not covered by groups G03F1/20 - G03F1/50
- G03F1/82—Auxiliary processes, e.g. cleaning or inspecting
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Respiratory Apparatuses And Protective Means (AREA)
- Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)
Abstract
The invention relates to the technical field of masks, and discloses a bearing device of a mask, which comprises a first L-shaped protection plate, the inner side of the first L-shaped protection plate is provided with a placing groove, and an inner cavity of the placing groove is movably connected with an ultrathin mask body. This mask's carrier is equipped with first L type guard plate and second L type guard plate respectively through the outside of ultra-thin mask body, because the shape characteristics of first L type guard plate and the shape characteristics of second L type guard plate, be convenient for protect the four sides of ultra-thin mask body, utilize first telescopic link between first L type guard plate and the second L type guard plate, baffle and first spring coupling, be convenient for with one side card of second L type guard plate on the rear side of first L type guard plate, make the second L type guard plate can be connected with first L type guard plate under the circumstances that does not receive external force, the stability to ultra-thin mask body four sides protection has been improved.
Description
Technical Field
The invention relates to the technical field of ultrathin masks, in particular to a bearing device of a mask.
Background
The ultra-thin mask is also called photomask and mask in the industry, and is made of the following materials: the product is made of quartz glass as a substrate, a layer of metal chromium and photoresist are plated on the quartz glass to form a photosensitive material, a designed circuit pattern is exposed on the photoresist through electronic laser equipment, an exposed area is developed, a circuit pattern is formed on the metal chromium to form a photomask which is similar to an exposed negative film, then the photomask is applied to projection positioning of an integrated circuit, and the projected circuit is subjected to photoetching through an integrated circuit photoetching machine, and the production and processing procedures are as follows: exposing, developing, removing photoresist, and finally applying to photo etching.
The existing ultrathin mask table top is provided with four fixing pins, the ultrathin mask can not be directly fixed when being placed, the correct position can be reached through movement, so that when the ultrathin mask moves, the four sides of the ultrathin mask can be scratched to generate a plurality of defects, the product is exposed, the quality is poor, the time is wasted, the cost is increased, two fixing pins are added on the ultrathin mask table top, the movement is prevented when the mask is placed, the mask can be placed at the correct position only through vertical placement, meanwhile, the surface of the existing ultrathin mask is easy to be stained with dust, and the existing treatment method is very troublesome and easy to cause the condition that the cleaning is not clean and not thorough when a worker holds a towel to clean the ultrathin mask.
Disclosure of Invention
The invention provides a carrying device of a mask plate, which has the advantages of being convenient for protecting four sides of the ultrathin mask plate, avoiding the ultrathin mask plate from being damaged during moving, and being convenient for cleaning dust on the ultrathin mask plate, and solves the problems in the background art.
The invention provides the following technical scheme: the utility model provides a bear device of mask, includes first L type guard plate, the standing groove has been seted up to the inboard of first L type guard plate, the inner chamber swing joint of standing groove has ultra-thin mask body, one side of first L type guard plate rear side has cup jointed second L type guard plate through the axle activity, the front side fixed mounting of second L type guard plate one side has the handle, storage tank has been seted up to one side of standing groove inner chamber, the front side fixed mounting of storage tank inner chamber has first telescopic link, the rear end fixed mounting of first telescopic link has the baffle that is located second L type guard plate one side, first spring has been cup jointed in the activity of the outside of first telescopic link, the both ends of first spring are fixed mounting respectively on the front side of storage tank inner chamber and the front side of baffle.
Preferably, the movable groove has all been seted up to the upside of first L type guard plate one side, movable plate has been cup jointed to the inner chamber activity in movable groove, movable plate's top fixed mounting has the connecting plate, the bottom fixed mounting of connecting plate has the second telescopic link, the bottom fixed mounting of second telescopic link has the dust to wipe the board, the outside activity of second telescopic link has cup jointed the second spring, the both ends of second spring are fixed mounting respectively on the bottom of connecting plate and the top of dust to wipe the board, the length size of dust to wipe the board equals with the width size of ultra-thin mask body, all is equipped with connecting plate 12, second spring 15, second telescopic link 13 and dust to wipe board 14 through the upside of first L type guard plate 1, makes it remove in movable groove 10's inner chamber through pulling movable plate 11 to drive dust to wipe board 14 and remove at ultra-thin mask body 3's top, be convenient for wipe down ultra-thin mask body 3 dust on the top, because ultra-thin mask body 3's upside all is equipped with dust to wipe board 14, can clean up the dust to ultra-thin mask body 3 on the upside can be equal to the dust that the length of ultra-thin mask body 3 is big enough to clean up the dust mask body is big enough with ultra-thin mask body 14.
Preferably, the whole of movable plate is T shape, the whole cross section of movable groove inner chamber is T shape, through the whole of movable plate 11 be T shape, the whole cross section of movable groove 10 inner chamber is T shape for movable plate 11 can remove in the inner chamber of movable groove 10, and can not drop in the inner chamber of movable groove 10, the convenience of customers uses movable plate 11.
Preferably, the front side fixed mounting of movable plate has the front link board, the jack has been seted up to the front side of front link board, the inner chamber activity of jack has cup jointed the bolt, all is equipped with front link board 16 and jack 17 through the front side of two movable plates 11, is convenient for link together two movable plates 11, can drive two movable plates 11 simultaneously through pulling bolt 18 and remove, and the user of being convenient for can clear up the dust to the upper and lower side of ultra-thin mask body 3 simultaneously.
Preferably, the front side of baffle evenly is equipped with three first telescopic link and three first spring, the first spring contacts with one side of second L type guard plate in one side of baffle under the free state, evenly is equipped with three first telescopic link 7 and three first spring 9 through the front side of baffle 8, and the first spring 9 contacts with one side of second L type guard plate 4 in one side of baffle 8 under the free state, and be convenient for when not having external force to pull second L type guard plate 4, second L type guard plate 4 can be steadily be connected with first L type guard plate 1, has improved the stability to the protection of ultra-thin mask body 3.
Preferably, the rear side of second L type guard plate opposite side wholly is L font form, the rear side of second L type guard plate opposite side cup joints in the inner chamber of standing groove through the axle activity, wholly is L shape through the rear side of second L type guard plate 4 opposite side, and the rear side of second L type guard plate 4 opposite side cup joints in the inner chamber of standing groove 2 through the axle activity for second L type guard plate 4 can remove in the inner chamber of standing groove 2, and first L type guard plate 1 can not restrict the rotation of second L type guard plate 4.
The invention has the following beneficial effects:
1. This mask's carrier is equipped with first L type guard plate and second L type guard plate respectively through the outside of ultra-thin mask body, because the shape characteristics of first L type guard plate and the shape characteristics of second L type guard plate, be convenient for protect the four sides of ultra-thin mask body, utilize first telescopic link between first L type guard plate and the second L type guard plate, baffle and first spring coupling, be convenient for with one side card of second L type guard plate on the rear side of first L type guard plate, make the second L type guard plate can be connected with first L type guard plate under the circumstances that does not receive external force, the stability to ultra-thin mask body four sides protection has been improved.
2. This bear device of mask all is equipped with connecting plate, second spring, second telescopic link and dust through the upside of first L type guard plate and rubs the board, makes its removal in the inner chamber of removal groove through pulling movable plate to drive the dust and wipe the board and remove at the top of ultra-thin mask body, be convenient for clear up the dust on the ultra-thin mask body top, because the upside of ultra-thin mask body all is equipped with the dust and wipes the board, can all clear up the dust to the upside of ultra-thin mask body.
3. This loading attachment of mask all is equipped with preceding even board and jack through the front side of two movable plates, is convenient for link together two movable plates, can drive two movable plates simultaneously through the pulling bolt and remove, and convenient to use person can clear up the dust to the upper and lower side of ultra-thin mask body simultaneously, has improved the clearance to the efficiency of ultra-thin mask body, makes things convenient for the staff to use.
Drawings
FIG. 1 is a schematic view of the overall structure of the present invention;
FIG. 2 is a schematic side view of the present invention;
FIG. 3 is a schematic perspective view of a placement tank according to the present invention;
FIG. 4 is a schematic perspective view of a connecting plate according to the present invention;
FIG. 5 is an enlarged perspective view of the present invention;
FIG. 6 is a schematic view of an exploded perspective view of the first telescopic link and the barrier of the present invention;
fig. 7 is a schematic view of an exploded perspective structure between the connecting plate and the second telescopic rod of the present invention.
In the figure: 1. a first L-shaped protection plate; 2. a placement groove; 3. an ultrathin mask body; 4. a second L-shaped protection plate; 5. a handle; 6. a storage groove; 7. a first telescopic rod; 8. a baffle; 9. a first spring; 10. a moving groove; 11. a moving plate; 12. a connecting plate; 13. a second telescopic rod; 14. a dust scrubbing plate; 15. a second spring; 16. a front connecting plate; 17. a jack; 18. a bolt.
Detailed Description
The following description of the embodiments of the present invention will be made clearly and completely with reference to the accompanying drawings, in which it is apparent that the embodiments described are only some embodiments of the present invention, but not all embodiments. All other embodiments, which can be made by those skilled in the art based on the embodiments of the invention without making any inventive effort, are intended to be within the scope of the invention.
Referring to fig. 1-7, a carrying device for a mask plate comprises a first L-shaped protection plate 1, wherein a movable groove 10 is formed on the upper side and the lower side of one side of the first L-shaped protection plate 1, a movable plate 11 is movably sleeved in an inner cavity of the movable groove 10, a connecting plate 12 is fixedly arranged at the top of the movable plate 11, a second telescopic rod 13 is fixedly arranged at the bottom of the connecting plate 12, a dust scrubbing plate 14 is fixedly arranged at the bottom of the second telescopic rod 13, a second spring 15 is movably sleeved at the outer side of the second telescopic rod 13, two ends of the second spring 15 are respectively fixedly arranged at the bottom of the connecting plate 12 and the top of the dust scrubbing plate 14, the length of the dust scrubbing plate 14 is equal to the width of an ultrathin mask plate body 3, The upper side and the lower side of the first L-shaped protection plate 1 are respectively provided with the connecting plate 12, the second spring 15, the second telescopic rod 13 and the dust wiping plate 14, the moving plate 11 is pulled to move in the inner cavity of the moving groove 10, so that the dust wiping plate 14 is driven to move at the top of the ultrathin mask body 3, dust on the top of the ultrathin mask body 3 is conveniently cleaned, the upper side and the lower side of the ultrathin mask body 3 can be cleaned by the dust wiping plate 14 because the upper side and the lower side of the ultrathin mask body 3 are respectively provided with the dust wiping plate 14, the length of the dust wiping plate 14 is equal to the width of the ultrathin mask body 3, the dust wiping plate 14 can completely clean the dust on the upper side and the lower side of the ultrathin mask body 3, The whole of the movable plate 11 is in a T shape, the section of the inner cavity of the movable groove 10 is in a T shape, so that the movable plate 11 can move in the inner cavity of the movable groove 10 and can not fall from the inner cavity of the movable groove 10, a user can conveniently use the movable plate 11, the front side of the movable plate 11 is fixedly provided with a front connecting plate 16, the front side of the front connecting plate 16 is provided with a jack 17, the inner cavity of the jack 17 is movably sleeved with a bolt 18, the front connecting plate 16 and the jack 17 are respectively arranged on the front sides of the two movable plates 11, the two movable plates 11 are conveniently connected together, The two movable plates 11 can be driven to move simultaneously by pulling the bolt 18, so that a user can clean dust on the upper side and the lower side of the ultrathin mask body 3 simultaneously, the efficiency of cleaning the ultrathin mask body 3 is improved, the ultrathin mask body 3 is convenient for workers to use, the inner side of the first L-shaped protection plate 1 is provided with the placing groove 2, the inner cavity of the placing groove 2 is movably connected with the ultrathin mask body 3, one side of the rear side of the first L-shaped protection plate 1 is movably sleeved with the second L-shaped protection plate 4 through a shaft, the rear side of the other side of the second L-shaped protection plate 4 is integrally L-shaped, the rear side of the other side of the second L-shaped protection plate 4 is movably sleeved in the inner cavity of the placing groove 2 through a shaft, The rear side of the other side of the second L-shaped protection plate 4 is integrally L-shaped, the rear side of the other side of the second L-shaped protection plate 4 is movably sleeved in the inner cavity of the placing groove 2 through a shaft, so that the second L-shaped protection plate 4 can move in the inner cavity of the placing groove 2, the first L-shaped protection plate 1 can not limit the rotation of the second L-shaped protection plate 4, the handle 5 is fixedly arranged at the front side of one side of the second L-shaped protection plate 4, the handle 5 is arranged at the front side of one side of the second L-shaped protection plate 4, a user can conveniently detach and connect the second L-shaped protection plate 4 and the first L-shaped protection plate 1 by using the handle 5, a worker can conveniently control the second L-shaped protection plate 4 to rotate by using the handle 5, One side of the inner cavity of the placing groove 2 is provided with a containing groove 6, the placing groove 2 is connected with a baffle plate 8, a first telescopic rod 7 and a first spring 9 by utilizing the containing groove 6, when the second L-shaped protection plate 4 and the first L-shaped protection plate 1 need to be disassembled, the baffle plate 8, the first telescopic rod 7 and the first spring 9 are extruded, the baffle plate 8, the first telescopic rod 7 and the first spring 9 are received into the containing groove 6, the second L-shaped protection plate 4 and the first L-shaped protection plate 1 are conveniently disassembled, the second L-shaped protection plate 4 and the first L-shaped protection plate 1 can be disassembled under the condition of external force when the position of the second L-shaped protection plate 4 is limited, The front side of the inner cavity of the accommodating groove 6 is fixedly provided with a first telescopic rod 7, the rear end of the first telescopic rod 7 is fixedly provided with a baffle plate 8 positioned at one side of the second L-shaped protection plate 4, the front side of the baffle plate 8 is uniformly provided with three first telescopic rods 7 and three first springs 9, one side of the baffle plate 8 contacts with one side of the second L-shaped protection plate 4 in a free state, so that the second L-shaped protection plate 4 can be stably connected with the first L-shaped protection plate 1 when no external force pulls the second L-shaped protection plate 4, The protection stability of the ultra-thin mask body 3 is improved, the outer side of the first telescopic rod 7 is movably sleeved with the first spring 9, two ends of the first spring 9 are respectively fixedly arranged on the front side of the inner cavity of the storage groove 6 and the front side of the baffle 8, a first L-shaped protection plate and a second L-shaped protection plate are respectively arranged on the outer side of the ultra-thin mask body, the four sides of the ultra-thin mask body are conveniently protected due to the shape characteristics of the first L-shaped protection plate and the shape characteristics of the second L-shaped protection plate, the first telescopic rod, the baffle and the first spring are connected between the first L-shaped protection plate and the second L-shaped protection plate, one side of the second L-shaped protection plate is conveniently clamped on the rear side of the first L-shaped protection plate, Make second L type guard plate can be connected with first L type guard plate under the condition that does not receive external force, improved the stability to four sides protection of ultra-thin mask body.
It is noted that relational terms such as first and second, and the like are used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Moreover, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus.
Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, substitutions and alterations can be made therein without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (4)
1. The utility model provides a bear device of mask, includes first L type guard plate (1), its characterized in that: the novel mask is characterized in that a placing groove (2) is formed in the inner side of the first L-shaped protection plate (1), an ultrathin mask body (3) is movably connected to the inner cavity of the placing groove (2), a second L-shaped protection plate (4) is movably sleeved on one side of the rear side of the first L-shaped protection plate (1) through a shaft, a handle (5) is fixedly arranged on the front side of one side of the second L-shaped protection plate (4), a containing groove (6) is formed in one side of the inner cavity of the placing groove (2), a first telescopic rod (7) is fixedly arranged on the front side of the inner cavity of the containing groove (6), a baffle (8) positioned on one side of the second L-shaped protection plate (4) is fixedly arranged at the rear end of the first telescopic rod (7), a first spring (9) is movably sleeved on the outer side of the first telescopic rod (7), and two ends of the first spring (9) are fixedly arranged on the front side of the inner cavity of the containing groove (6) and the front side of the baffle (8) respectively;
The upper side and the lower side of one side of the first L-shaped protection plate (1) are respectively provided with a movable groove (10), an inner cavity of the movable groove (10) is movably sleeved with a movable plate (11), the top of the movable plate (11) is fixedly provided with a connecting plate (12), the bottom of the connecting plate (12) is fixedly provided with a second telescopic rod (13), the bottom of the second telescopic rod (13) is fixedly provided with a dust scrubbing plate (14), the outer side of the second telescopic rod (13) is movably sleeved with a second spring (15), two ends of the second spring (15) are respectively and fixedly arranged at the bottom of the connecting plate (12) and the top of the dust scrubbing plate (14), and the length of the dust scrubbing plate (14) is equal to the width of the ultrathin mask body (3);
the front side of the movable plate (11) is fixedly provided with a front connecting plate (16), the front side of the front connecting plate (16) is provided with a jack (17), and the inner cavity of the jack (17) is movably sleeved with a plug pin (18).
2. A according to claim 1a bearing device for a seed mask plate, the method is characterized in that: the whole moving plate (11) is in a T-shaped form, and the section of the inner cavity of the moving groove (10) is in a T-shaped form.
3. A according to claim 1a bearing device for a seed mask plate, the method is characterized in that: the front side of the baffle plate (8) is uniformly provided with three first telescopic rods (7) and three first springs (9), and one side of the baffle plate (8) is contacted with one side of the second L-shaped protection plate (4) in a free state by the first springs (9).
4. A according to claim 1 a bearing device for a seed mask plate, the method is characterized in that: the rear side of the other side of the second L-shaped protection plate (4) is integrally L-shaped, and the rear side of the other side of the second L-shaped protection plate (4) is movably sleeved in the inner cavity of the placement groove (2) through a shaft.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110159598.9A CN112904663B (en) | 2021-02-05 | 2021-02-05 | Bearing device of mask plate |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202110159598.9A CN112904663B (en) | 2021-02-05 | 2021-02-05 | Bearing device of mask plate |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112904663A CN112904663A (en) | 2021-06-04 |
| CN112904663B true CN112904663B (en) | 2024-10-01 |
Family
ID=76122639
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202110159598.9A Active CN112904663B (en) | 2021-02-05 | 2021-02-05 | Bearing device of mask plate |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112904663B (en) |
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Also Published As
| Publication number | Publication date |
|---|---|
| CN112904663A (en) | 2021-06-04 |
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