CN112875125A - 半导体晶圆盒仓储运输结构系统 - Google Patents
半导体晶圆盒仓储运输结构系统 Download PDFInfo
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Abstract
本发明公开一种半导体晶圆盒仓储运输结构系统。主要系由晶圆盒升降运输结构体、晶圆盒储架结构体、手臂结构体、手臂抓取晶圆盒结构体及晶圆盒仓储结构体组成,其中晶圆盒储架结构体系悬挂天花板上,利用晶圆盒升降运输结构体将晶圆盒作为升降至入、出料口,并以手臂结构体抓取晶圆盒利用轨道输送至晶圆盒仓储结构体作为精准晶圆盒的取放,由于晶圆盒储放至悬吊在天花板上的晶圆盒仓储结构体,使本发明系统具有节省空间、晶圆盒方便取放的特性。
Description
技术领域
本发明涉及一种半导体晶圆盒仓储运输结构系统,尤指主要包括有晶圆盒升降运输结构体、晶圆盒储放架构体、手臂结构体、手臂抓取晶圆盒结构体及晶圆盒仓储结构体组装成半导体储存晶圆盒结构系统。
背景技术
依据中国台湾省第107131751号「晶圆盒仓储系统」包括有矩形架体10、升降装置30、平面三轴机器人40、操控单元人机接口50,升降装置30在矩型架体10ㄧ侧端面,而平面三轴机器人40装设在矩型架体10的中央处,操控单元人机接口50装设在矩形架体10侧面空间,该发明案虽然解决了储置晶圆盒的空间,但是该发明案仍占据了地面空间面,减少厂内空间的利用性,而且储放晶圆盒的数量少而未达经济效率为其缺失。
发明内容
本发明主要目的,在于提出一种半导体晶圆盒仓储运输结构系统。
为达到上述目的,本发明半导体晶圆盒仓储运输结构系统,包括有晶圆盒升降运输结构体、晶圆盒储架结构体、手臂结构体、手臂抓取晶圆盒结构体及晶圆盒仓储结构体所组成,其中,
-晶圆盒升降运输结构体,系呈长方体梯状结构,主要系由升降结构架、定位装置、滚轮运送装置所组成,升降结构架系由数根支撑杆所组装成的长方框升降结构架,其中一支撑杆的侧端面装设数个定位装置,作为顶住晶圆盒的左侧翼,而晶圆盒系放置滚轮运送装置的上方,利用机器人在入、出料口处搬送晶圆盒,利用滚轮运送装置输送至升降结构架,依入料方向利用滚轮运送装置运送晶圆盒,依出料方向利用滚轮运送装置运送晶圆盒;
-晶圆盒储架结构体,系由轨道框架、悬吊支撑杆、辅助支撑杆、连接杆及储存框架所组成,中央装设轨道框架供作晶圆盒运送行走,两侧悬吊支撑杆悬挂在天花板上,两侧悬吊支撑杆连接辅助支撑杆,并以连接杆作为连接在轨道框架上方装设储存框架作为储放取晶圆盒置放区域;
-手臂结构体,系由手臂结构及手臂底座所组成,手臂结构系呈L型体装设在晶圆盒放置座两侧,晶圆盒放置座内部两侧装设驱动轮带动驱动皮带,而手臂结构内部装设一驱动皮带经过驱动轮为带动驱动皮带,而驱动带动两侧的手臂线轨,而手臂线轨在两侧插向晶圆盒的两侧顶向晶圆盒侧翼,而取出或放置晶圆盒,手臂底座系装设在手臂结构的底部,作为承载手臂结构;
-手臂抓取晶圆盒结构体,晶圆盒经由晶圆盒升降运输结构体升至晶圆盒储架结构体,并由滚轮运送装置运送晶圆盒,由手臂结构的手臂线轨抓取滚轮运送装置上的晶圆盒,并在手臂结构的下方手臂底座的左侧以L型板装设一线轨并以皮带作为带动手臂结构体行走在轨道框架;以及
--晶圆盒仓储结构体,以悬吊支撑杆、辅助支撑杆悬吊在天花板上,并以手臂结构体将晶圆盒放置在储存框架上,在悬吊支撑杆之间中央系手臂结构体抓取晶圆盒后,置放在左侧储存框架上形成晶圆盒群体,置放在右侧储存框架上形成晶圆盒群体,而晶圆盒放置在储存框架上,并有四个角装设有定位块作为固定住晶圆盒的储放;其中晶圆盒系由晶圆盒升降运输结构体运送至悬吊在天花板的晶圆盒储架结构体,并利用手臂结构体以手臂抓取晶圆盒,并仓储在晶圆盒仓储结构体作为晶圆盒的取放。
本发明中晶圆盒储架结构体由轨道杆、支撑杆、连接杆、辅助支撑杆所组成,中央装设两根平行等距轨道杆,两根支撑杆悬挂在天花板上,两侧支撑杆连接辅助支撑杆,并以连接杆作为连接,而两根轨道杆的下方装设数个长方框作为储放取晶圆盒。手臂结构体系由手臂结构及手臂底座所组成,手臂结构内装设驱动皮带驱动两侧的手臂线轨,而手臂线轨插向晶圆盒的两侧顶向晶圆盒侧翼,而取出或放置晶圆盒。手臂抓取晶圆盒结构体以手臂结构体取进晶圆盒,利用轨道输送至晶圆盒仓储结构体,以作为半导体晶圆盒取放作动自动化。
附图说明
图1为本发明半导体晶圆盒仓储运输结构系统的晶圆盒升降运输结构体实施例图。
图2为本发明半导体晶圆盒仓储运输结构系统的晶圆盒升降运输结构体前视图。
图3为本发明半导体晶圆盒仓储运输结构系统的晶圆盒升降运输结构体定位装置示意图。
图4为本发明半导体晶圆盒仓储运输结构系统的晶圆盒升降运输结构体俯视图。
图5为本发明半导体晶圆盒仓储运输结构系统的晶圆盒升降运输结构体右侧视图。
图6为本发明半导体晶圆盒仓储运输结构系统的晶圆盒升降运输结构体后视图。
图7为本发明半导体晶圆盒仓储运输结构系统的晶圆盒升降运输结构体左侧视图。
图8为本发明半导体晶圆盒仓储运输结构系统的晶圆盒储架结构体立体分解图。
图9为本发明半导体晶圆盒仓储运输结构系统的晶圆盒储架结构体部份立体分解图之一。
图10为本发明半导体晶圆盒仓储运输结构系统的晶圆盒储架结构体部份立体分解图之一。
图11为本发明半导体晶圆盒仓储运输结构系统的晶圆盒储架结构体轨道框架部份立体图。
图12为本发明半导体晶圆盒仓储运输结构系统的晶圆盒储架结构体辅助支撑杆系由L型杆及横杆以三角块相互组装示意图。
图13为本发明半导体晶圆盒仓储运输结构系统的晶圆盒储架结构体储存框架与辅助块示意图。
图14为本发明半导体晶圆盒仓储运输结构系统的晶圆盒储架结构体辅助支撑杆与悬吊支撑杆示意图。
图15为本发明半导体晶圆盒仓储运输结构系统的晶圆盒储架结构体立体图之一。
图16为本发明半导体晶圆盒仓储运输结构系统的晶圆盒储架结构体立体图之二。
图17为本发明半导体晶圆盒仓储运输结构系统的手臂结构俯视图。
图18为本发明半导体晶圆盒仓储运输结构系统的手臂结构(A-A)手臂剖面图。
图19为本发明半导体晶圆盒仓储运输系统结构系统的手臂结构(B-B)剖面图。
图20为本发明半导体晶圆盒仓储运输结构系统的手臂结构(C-C)剖面图。
图21为本发明半导体晶圆盒仓储运输结构系统的手臂结构(D-D)剖面图。
图22为本发明半导体晶圆盒仓储运输结构系统的手臂结构仰视图。
图23为本发明半导体晶圆盒仓储运输结构系统的手臂结构抓取晶圆盒示意图。
图24为本发明半导体晶圆盒仓储运输结构系统的手臂结构抓取晶圆盒右侧视图。
图25为本发明半导体晶圆盒仓储运输结构系统的手臂底座俯视图之一。
图26为本发明半导体晶圆盒仓储运输结构系统的手臂底座前视图。
图27为本发明半导体晶圆盒仓储运输结构系统的手臂底座(B-B)剖面图。
图28为本发明半导体晶圆盒仓储运输结构系统的手臂底座(A-A)剖面图。
图29为本发明半导体晶圆盒仓储运输结构系统的手臂底座俯视图之二。
图30为本发明半导体晶圆盒仓储运输结构系统的手臂底座仰视图。
图31为本发明半导体晶圆盒仓储运输结构系统的手臂底座仰视侧视图。
图32为本发明半导体晶圆盒仓储运输结构系统的手臂抓取晶圆盒结构体前视图。
图33为本发明半导体晶圆盒仓储运输结构系统的手臂抓取晶圆盒结构体右侧部份剖面图。
图34为本发明半导体晶圆盒仓储运输结构系统的手臂抓取晶圆盒结构体左侧部份剖面图。
图35为本发明半导体晶圆盒仓储运输结构系统的手臂抓取晶圆盒结构体晶圆盒仓储剖面图。
图36为本发明半导体晶圆盒仓储运输结构系统的手臂抓取晶圆盒结构体晶圆盒仓储右侧部份剖面图。
图37为本发明半导体晶圆盒仓储运输系统结构系统的手臂抓取晶圆盒结构体晶圆盒仓储左侧部份剖面图。
图38为本发明半导体晶圆盒仓储运输结构系统的手臂抓取晶圆盒结构体晶圆盒仓储排列示意图。
图39为本发明半导体晶圆盒仓储运输结构系统的手臂抓取晶圆盒结构体晶圆盒仓储定位示意图。
图40为本发明半导体晶圆盒仓储运输结构系统的手臂抓取晶圆盒结构体晶圆盒仓储排列右侧部份示意图。
图41为本发明半导体晶圆盒仓储运输结构系统的手臂抓取晶圆盒结构体晶圆盒仓储排列左侧部份示意图。
图42为本发明半导体晶圆盒仓储运输结构系统的手臂抓取晶圆盒结构图35侧面剖面图。
图43为本发明半导体晶圆盒仓储运输结构系统的手臂抓取晶圆盒结构图38侧面剖面图。
图44为本发明半导体晶圆盒仓储运输结构系统的手臂抓取晶圆盒结构俯视图。
图45为本发明半导体晶圆盒仓储运输结构系统的手臂抓取晶圆盒结构俯视图的右侧部份示意图。
图46为本发明半导体晶圆盒仓储运输结构系统的手臂抓取晶圆盒结构俯视图的左侧部份示意图。
图47为本发明半导体晶圆盒仓储运输结构系统的晶圆盒仓储结构体为未仓储晶圆盒架构示意图。
图48为本发明半导体晶圆盒仓储运输结构系统的晶圆盒仓储结构体为仓储晶圆盒前视图。
图49为本发明半导体晶圆盒仓储运输结构系统的晶圆盒仓储结构体为仓储晶圆盒右侧部份示意图。
图50为本发明半导体晶圆盒仓储运输结构系统的晶圆盒仓储结构体为仓储晶圆盒右侧部份示意图。
图51为本发明半导体晶圆盒仓储运输结构系统的晶圆盒仓储结构体为仓储晶圆盒俯视图。
图52为本发明半导体晶圆盒仓储运输结构系统的晶圆盒仓储结构体为仓储晶圆盒左侧剖面图。
图53为本发明半导体晶圆盒仓储运输结构系统的晶圆盒仓储结构体为仓储晶圆盒右侧部份示意图。
图54为本发明半导体晶圆盒仓储运输结构系统的晶圆盒仓储结构体为仓储晶圆盒左侧部部份示意图。
图55为本发明半导体晶圆盒仓储运输结构系统的晶圆盒仓储结构体仓储晶圆盒左侧部升降结构体示意图。
图56为本发明半导体晶圆盒仓储运输结构系统的晶圆盒仓储结构体为仓储晶圆盒定位俯视图。
符号说明
A、晶圆盒升降运输结构体;B、晶圆盒储架结构体;C、手臂结构体;C1、手臂结构;C11,C12手臂线轨;C13,C141驱动皮带;C14、晶圆盒放制座;C2、手臂底座;D、手臂抓取晶圆盒结构体;D1、线轨;D11、L型板;E、晶圆盒仓储结构体;F、皮带夹;G、定位传感器;H、升降螺杆;M1,M2、马达;1、升降结构架;2、定位装置;21、挡片;22、活动轮;3,31,32滚轮运送装置;4、轨道框架;41、轨道杆;42、U型连接杆;5、悬吊支撑杆;6、辅助支撑杆;61、L型杆;62、横杆;63、三角块;7、连接杆;8、储存框架;9、辅助块;11,12,13,14,15支撑杆;B1、皮带;P、支撑板;P1、入料方向;P2、出料方向;P3、进料方向;
R1~R6,R7,R8,R9,R10驱动轮;S,S1,S2晶圆盒;S11,S3侧翼;S2、定位块;S’,S’1,S’2晶圆盒群体。
具体实施方式
本发明系为一种半导体晶圆盒仓储运输结构系统,主要系由晶圆盒升降运输结构体A、晶圆盒储架结构体B、手臂结构体C、手臂抓取晶圆盒结构体D及晶圆盒仓储结构体E组成,其中晶圆盒升降运输结构体A系呈长方体梯状结构,主要系由升降结构架1、定位装置2、滚轮运送装置31,32所组成,如图1~7所示升降结构1系由数根支撑杆11,12,13,14,15所组成的长方框升降结构架1,其中支撑杆11的侧端面装设定位装置2其系由挡片21与活动轮22相互组装,并作为顶住晶圆盒S1的侧翼S11,而晶圆盒S1,S2系放置滚轮运送装置31,32的上方,因此,利用机器人在入、出料口处,搬送晶圆盒S1,S2利用滚轮运送装置31,32输送至升降结构架1,依入料方向P1利用滚轮运送装置31运送晶圆盒S1,依出料方向P2利用滚轮运送装置32运送晶圆盒S2,并将晶圆盒S1依进料方向P3进入晶圆盒仓储结构体E。
如图8~16所示晶圆盒储架结构体B系由轨道框架4、悬吊支撑杆5、辅助支撑杆6、连接杆7及储存框架8所组成,中央装设轨道框架4供作晶圆盒S1运送行走,两侧悬吊支撑杆5悬挂在天花板上,两侧悬吊支撑杆5连接辅助支撑杆6,并以连接杆7作为连接在轨道框架4上方装设储存框架8作为储放取晶圆盒置放区域,如图11所示其轨道框架4系由两侧轨道杆41及中央U型连接板42所组装成,如图12所示辅助支撑杆6系由L型杆61及横杆62以三角块63相互组装,图13所示系储存框架8与辅助块9分离示意图,图14所示系指辅助支撑杆6与悬吊支撑杆5示意图。
如图17~24所示手臂结构体C系由手臂结构C1及手臂底座C2所组成,手臂结构C1系呈L型体装设在晶圆盒放置座C14两侧,晶圆盒放置座C14内部两侧装设驱动轮R7,R8带动驱动皮带C141,而手臂结构C1内部装设一驱动皮带C13经过驱动轮R1~R6作为带动驱动皮带C13,而驱动带动两侧的手臂线轨C11,C12,而手臂线轨C11,C12在两侧插向晶圆盒S的两侧顶向晶圆盒S侧翼S3,而取出或放置晶圆盒S,如图19所示手臂结构C1在左下方装设一升降螺杆H。如图25~29所示系手臂底座C2系装设在手臂结构C1的底部,在中央处装设一马达M1,并在马达M1一侧装设一定位传感器G,ㄧ侧端面装设有马达M2与皮带夹F,而皮带夹F夹住皮带带动手臂结构C1。
如图32~46所示手臂抓取晶圆盒结构体D,晶圆盒S经由晶圆盒升降运输结构体A升至晶圆盒储架结构体B,并由滚轮运送装置3运送晶圆盒S,由手臂结构C1的手臂线轨C11,C12抓取滚轮运送装置3上的晶圆盒S,并在手臂结构C1的下方手臂底座C2的左侧,以L型板D11装设一线轨D1作为带动手臂结构体C行走在轨道框架4上如图33,34所示。图35~46所示手臂抓取晶圆盒结构体D的手臂结构体C将晶圆盒S仓储成晶圆盒群体S’,并在轨道内侧装设驱动轮R9,R10以皮带B1作为带动,其中晶圆盒S置放在四个角处装设有定位块S2作为晶圆盒S的定位作用,如图45所示晶圆盒S在滚轮运送装置3上,而在轨道框架4入口处装设有一支撑板P及轨道框架4的U型连接板42。
如图47~56所示晶圆盒仓储结构体E以悬吊支撑杆5、辅助支撑杆6悬吊在天花板上,并以手臂结构体C将晶圆盒S放置在储存框架8上,如图52~56所示在悬吊支撑杆5之间中央系手臂结构体C抓取晶圆盒S后,置放在左侧储存框架8上形成晶圆盒群体S’1,置放在右侧储存框架8上形成晶圆盒群体S’2,而晶圆盒S放置在储存框架8上,并有四个角装设有定位块S2作为固定住晶圆盒S的储放。
Claims (5)
1.一种半导体晶圆盒仓储运输结构系统,其特征在于,包括有晶圆盒升降运输结构体、晶圆盒储架结构体、手臂结构体、手臂抓取晶圆盒结构体及晶圆盒仓储结构体所组成,其中,
-晶圆盒升降运输结构体,系呈长方体梯状结构,主要系由升降结构架、定位装置、滚轮运送装置所组成,升降结构架系由数根支撑杆所组装成的长方框升降结构架,其中一支撑杆的侧端面装设数个定位装置,作为顶住晶圆盒的左侧翼,而晶圆盒系放置滚轮运送装置的上方,利用机器人在入、出料口处搬送晶圆盒,利用滚轮运送装置输送至升降结构架,依入料方向利用滚轮运送装置运送晶圆盒,依出料方向利用滚轮运送装置运送晶圆盒;
-晶圆盒储架结构体,系由轨道框架、悬吊支撑杆、辅助支撑杆、连接杆及储存框架所组成,中央装设轨道框架供作晶圆盒运送行走,两侧悬吊支撑杆悬挂在天花板上,两侧悬吊支撑杆连接辅助支撑杆,并以连接杆作为连接在轨道框架上方装设储存框架作为储放取晶圆盒置放区域;
-手臂结构体,系由手臂结构及手臂底座所组成,手臂结构系呈L型体装设在晶圆盒放置座两侧,晶圆盒放置座内部两侧装设驱动轮带动驱动皮带,而手臂结构内部装设一驱动皮带经过驱动轮为带动驱动皮带,而驱动带动两侧的手臂线轨,而手臂线轨在两侧插向晶圆盒的两侧顶向晶圆盒侧翼,而取出或放置晶圆盒,手臂底座系装设在手臂结构的底部,作为承载手臂结构;
-手臂抓取晶圆盒结构体,晶圆盒经由晶圆盒升降运输结构体升至晶圆盒储架结构体,并由滚轮运送装置运送晶圆盒,由手臂结构的手臂线轨抓取滚轮运送装置上的晶圆盒,并在手臂结构的下方手臂底座的左侧以L型板装设一线轨并以皮带作为带动手臂结构体行走在轨道框架;以及
--晶圆盒仓储结构体,以悬吊支撑杆、辅助支撑杆悬吊在天花板上,并以手臂结构体将晶圆盒放置在储存框架上,在悬吊支撑杆之间中央系手臂结构体抓取晶圆盒后,置放在左侧储存框架上形成晶圆盒群体,置放在右侧储存框架上形成晶圆盒群体,而晶圆盒放置在储存框架上,并有四个角装设有定位块作为固定住晶圆盒的储放;其中晶圆盒系由晶圆盒升降运输结构体运送至悬吊在天花板的晶圆盒储架结构体,并利用手臂结构体以手臂抓取晶圆盒,并仓储在晶圆盒仓储结构体作为晶圆盒的取放。
2.如权利要求项1所述的半导体晶圆盒仓储运输结构系统,其特征在于,定位装置系以挡片与活动轮组装在支撑杆上。
3.如权利要求项1所述的半导体晶圆盒仓储运输结构系统,其特征在于,轨道框架系由两侧轨道杆及中央U型连接板所组装成,辅助支撑杆系由L型杆及横杆以三角块相互组装,储存框架与辅助块组装,辅助支撑杆与悬吊支撑杆相互组装。
4.如权利要求项1所述的半导体晶圆盒仓储运输结构系统,其特征在于,手臂抓取晶圆盒结构体的手臂结构体将晶圆盒仓储形成晶圆盒群体,其晶圆盒置放在四个角处装设有定位块作为晶圆盒的定位作用,晶圆盒在滚轮运送装置上,而在轨道框架入口处装设有一支撑板及轨道框架的U型连接板。
5.如权利要求项1所述的半导体晶圆盒仓储运输结构系统,其特征在于,在手臂底座的中央处装设一马达,并在马达一侧装设一定位传感器,ㄧ侧端面装设有马达与皮带夹,而皮带夹夹住皮带带动手臂结构。
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