CN112811165A - Double-arm type crystal ring replacing mechanism - Google Patents

Double-arm type crystal ring replacing mechanism Download PDF

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Publication number
CN112811165A
CN112811165A CN202110153764.4A CN202110153764A CN112811165A CN 112811165 A CN112811165 A CN 112811165A CN 202110153764 A CN202110153764 A CN 202110153764A CN 112811165 A CN112811165 A CN 112811165A
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CN
China
Prior art keywords
unit
arm
ring
conveying
driving
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Granted
Application number
CN202110153764.4A
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Chinese (zh)
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CN112811165B (en
Inventor
梁志宏
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Shenzhen Xinyichang Technology Co Ltd
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Shenzhen Xinyichang Technology Co Ltd
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Priority to CN202110153764.4A priority Critical patent/CN112811165B/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/90Devices for picking-up and depositing articles or materials
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65GTRANSPORT OR STORAGE DEVICES, e.g. CONVEYORS FOR LOADING OR TIPPING, SHOP CONVEYOR SYSTEMS OR PNEUMATIC TUBE CONVEYORS
    • B65G47/00Article or material-handling devices associated with conveyors; Methods employing such devices
    • B65G47/74Feeding, transfer, or discharging devices of particular kinds or types
    • B65G47/82Rotary or reciprocating members for direct action on articles or materials, e.g. pushers, rakes, shovels

Abstract

The application provides a double-arm type crystal ring changing mechanism which comprises a first carrying arm; a second carrying arm; and the conveying driving unit is respectively connected with the first conveying arm and the second conveying arm and is used for driving the first conveying arm and the second conveying arm to reciprocate between the crystal ring feeding position and the crystal ring discharging position. The wafer ring loading mechanism can move the wafer ring containing the wafer at the wafer ring loading position to the wafer ring unloading position through the first carrying arm, so that the wafer on the wafer ring can be conveniently ejected by the wafer ejecting mechanism; the used wafer ring at the wafer ring discharging position can be taken out through the second carrying arm, so that the first carrying arm can conveniently feed the wafer ring; the first conveying arm and the second conveying arm can be driven to move back and forth between the crystal ring feeding position and the crystal ring discharging position through the conveying driving unit. Therefore, the feeding operation of the crystal ring can be completed by the first carrying arm, and the blanking operation of the crystal ring can be completed by the second carrying arm, so that the feeding and blanking speed of the crystal ring is improved, the waiting time of feeding and blanking of the crystal ring is shortened, and the crystal fixing efficiency is improved.

Description

Double-arm type crystal ring replacing mechanism
Technical Field
The application belongs to the technical field of die bonding, and particularly relates to a double-arm type wafer ring replacing mechanism.
Background
In the die bonding equipment, a wafer ring containing a wafer needs to be moved to a wafer ring rotating platform through a mechanical arm, the wafer is ejected out by a wafer ejecting mechanism, and the ejected wafer is moved to a die bonding position through a suction nozzle to realize die bonding operation with a support.
However, when the wafer ring on the wafer ring rotating platform needs to be replaced, the used wafer ring is usually taken down by the mechanical arm, that is, the wafer ring loading and unloading operations are completed by the same mechanical arm, which results in low loading and unloading efficiency of the wafer ring, and further affects the wafer fixing efficiency.
Disclosure of Invention
An object of the embodiment of the present application is to provide a double-arm type wafer changing ring mechanism, so as to solve the problems existing in the related art: the feeding and discharging operation of the crystal ring is completed by the same mechanical arm, so that the feeding and discharging efficiency of the crystal ring is low, and the crystal fixing efficiency is further influenced.
In order to achieve the above purpose, the embodiment of the present application adopts the following technical solutions:
a dual-arm wafer ring exchanging mechanism is provided, comprising:
a first transfer arm for moving the wafer ring containing the wafer at the wafer ring loading position to the wafer ring unloading position;
the second carrying arm is used for taking out the used wafer ring from the wafer ring feeding position;
the conveying driving unit is respectively connected with the first conveying arm and the second conveying arm and used for driving the first conveying arm and the second conveying arm to reciprocate between the crystal ring feeding position and the crystal ring discharging position;
wherein the first and second transfer arms are synchronously driven by the transfer drive unit and move in the same direction.
In one embodiment, the first carrying arm comprises a first clamping jaw unit for clamping the wafer ring and a first carrying and lifting unit for driving the first clamping jaw unit to lift and lower; the first conveying lifting unit is arranged on the conveying driving unit and connected with the first clamping jaw unit.
In one embodiment, the first carrying lifting unit comprises a first mounting seat mounted on the carrying driving unit, a sliding seat mounted on the first mounting seat and a first carrying lifting piece for driving the sliding seat to lift; the first carrying lifting piece is installed on the first installation seat, the first carrying lifting piece is connected with the sliding seat, and the first clamping jaw unit is installed on the sliding seat.
In one embodiment, the first clamping jaw unit comprises a first fixed clamp mounted on the first carrying lifting unit, a first movable clamp used for clamping the wafer ring in cooperation with the first fixed clamp, a first clamping jaw driving piece used for driving the first movable clamp to be close to or far from the first fixed clamp, and a supporting seat supporting the first clamping jaw driving piece; the supporting seat is installed on the first fixing clamp, and the first clamping jaw driving piece is connected with the first movable clamp.
In one embodiment, the first clamping jaw unit further includes a first guide shaft installed on the first movable clamp, and the support base is correspondingly provided with a first through hole for the first guide shaft to pass through.
In one embodiment, the second carrying arm comprises a second clamping jaw unit for clamping the wafer ring, a second carrying lifting unit for driving the second clamping jaw unit to lift and a carrying rotating unit for driving the second clamping jaw unit to rotate; the conveying rotating unit is arranged on the second conveying lifting unit, the conveying rotating unit is connected with the second clamping jaw unit, and the second conveying lifting unit is arranged on the conveying driving unit.
In one embodiment, the second carrying lifting unit comprises a second mounting seat, a connecting seat hinged with the second mounting seat, and a second carrying lifting piece mounted on the carrying driving unit, wherein the second carrying lifting piece is connected with the second mounting seat; the conveying rotating unit comprises a rotating seat arranged on the connecting seat and a conveying rotating piece arranged on the conveying driving unit, the conveying rotating piece is connected with the rotating seat, and the second clamping jaw unit is arranged on the connecting seat.
In one embodiment, the second clamping jaw unit comprises a fixed seat mounted on the connecting seat, a second fixed clamp connected with the fixed seat, a second movable clamp used for clamping the wafer ring in a matching way with the second fixed clamp, and a second clamping jaw driving piece used for driving the second movable clamp to be close to or far from the second fixed clamp; the second clamping jaw driving piece is installed on the fixed seat and connected with the second movable clamp.
In one embodiment, the second clamping jaw unit further includes a second guide shaft installed on the second movable clamp, and a second through hole for the second guide shaft to pass through is correspondingly formed in the second fixed clamp.
In one embodiment, the conveying driving unit comprises a support frame, a screw rod arranged on the support frame, a sliding block arranged on the screw rod and a conveying driving piece used for driving the screw rod to rotate; the carrying driving piece is installed on the supporting frame and connected with the screw rod, and the first carrying arm and the second carrying arm are installed on the sliding block respectively.
One or more technical solutions in the embodiments of the present application have at least one of the following technical effects: the wafer ring loading mechanism can move the wafer ring containing the wafer at the wafer ring loading position to the wafer ring unloading position through the first carrying arm, so that the wafer on the wafer ring can be conveniently ejected by the wafer ejecting mechanism; the used wafer ring at the wafer ring discharging position can be taken out through the second carrying arm, so that the first carrying arm can conveniently feed the wafer ring; the first conveying arm and the second conveying arm can be driven to move back and forth between the crystal ring feeding position and the crystal ring discharging position through the conveying driving unit. Therefore, the feeding operation of the crystal ring can be completed by the first carrying arm, and the blanking operation of the crystal ring can be completed by the second carrying arm, so that the feeding and blanking speed of the crystal ring is improved, the waiting time of feeding and blanking of the crystal ring is shortened, and the crystal fixing efficiency is improved.
Drawings
In order to more clearly illustrate the technical solutions in the embodiments of the present application, the drawings needed to be used in the embodiments or exemplary technical descriptions will be briefly described below, and it is obvious that the drawings in the following description are only some embodiments of the present application, and it is obvious for those skilled in the art to obtain other drawings without creative efforts.
Fig. 1 is a schematic structural diagram of a dual-arm type wafer changing ring mechanism according to an embodiment of the present disclosure;
fig. 2 is an exploded view of a dual-arm wafer changing ring mechanism according to an embodiment of the present disclosure;
FIG. 3 is a schematic structural view of a first transfer arm according to an embodiment of the present disclosure;
FIG. 4 is an exploded view of FIG. 3;
FIG. 5 is a schematic structural view of a second transfer arm according to an embodiment of the present disclosure;
fig. 6 is an exploded view of fig. 5.
Wherein, in the drawings, the reference numerals are mainly as follows:
1-a first handling arm; 11-a first jaw unit; 111-a first retaining clip; 112-a first movable clip; 113-a first jaw drive; 114-a support base; 1140-a first via; 115-a first guide shaft; 12-a first handling lifting unit; 121-a first mount; 1210-first opening; 1211 — a first chute; 122-a sliding seat; 1221-a first slide rail; 1222-a first stopper; 123-a first handling lift;
2-a second handling arm; 21-a second jaw unit; 211-a fixed seat; 212-a second retaining clip; 2120-a second via; 213-a second movable clip; 214-a second jaw drive; 215-a second guide shaft; 216-a second stopper; 22-a second handling lifting unit; 221-a second mount; 2211-positioning the shaft; 222-a connecting seat; 2220-second opening; 2221-a second slide rail; 223-a second handling lift; 224-positioning blocks; 2240-positioning holes; 23-a transport rotation unit; 231-a rotating seat; 2311-a second runner; 232-a handling swivel;
3-a transport drive unit; 31-a support frame; 32-a screw rod; 33-a slide block; 34-handling drives;
4-crystal ring.
Detailed Description
In order to make the technical problems, technical solutions and advantageous effects to be solved by the present application clearer, the present application is further described in detail below with reference to the accompanying drawings and embodiments. It should be understood that the specific embodiments described herein are merely illustrative of the present application and are not intended to limit the present application.
It will be understood that when an element is referred to as being "secured to" or "disposed on" another element, it can be directly on the other element or be indirectly on the other element. When an element is referred to as being "connected to" another element, it can be directly connected to the other element or be indirectly connected to the other element.
Furthermore, the terms "first", "second" and "first" are used for descriptive purposes only and are not to be construed as indicating or implying relative importance or implicitly indicating the number of technical features indicated. Thus, a feature defined as "first" or "second" may explicitly or implicitly include one or more of that feature. In the description of the present application, "a plurality" means two or more unless specifically limited otherwise. The meaning of "a number" is one or more unless specifically limited otherwise.
In the description of the present application, it is to be understood that the terms "center", "length", "width", "thickness", "upper", "lower", "front", "rear", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", and the like, indicate orientations or positional relationships based on those shown in the drawings, and are used only for convenience in describing the present application and for simplicity in description, and do not indicate or imply that the referenced devices or elements must have a particular orientation, be constructed and operated in a particular orientation, and thus, are not to be construed as limiting the present application.
In the description of the present application, it is to be noted that, unless otherwise explicitly specified or limited, the terms "mounted," "connected," and "connected" are to be construed broadly, e.g., as meaning either a fixed connection, a removable connection, or an integral connection; can be mechanically or electrically connected; either directly or indirectly through intervening media, either internally or in any other relationship. The specific meaning of the above terms in the present application can be understood by those of ordinary skill in the art as appropriate.
Reference throughout this specification to "one embodiment" or "an embodiment" means that a particular feature, structure, or characteristic described in connection with the embodiment is included in at least one embodiment of the present application. Thus, the appearances of the phrases "in one embodiment" or "in some embodiments" in various places throughout this specification are not necessarily all referring to the same embodiment. Furthermore, the particular features, structures, or characteristics may be combined in any suitable manner in one or more embodiments.
Referring to fig. 1 and fig. 2, a dual-arm type wafer changing ring mechanism according to an embodiment of the present application will now be described. The double-arm type wafer ring changing mechanism comprises a first carrying arm 1, a second carrying arm 2 and a carrying driving unit 3, wherein the carrying driving unit 3 is respectively connected with the first carrying arm 1 and the second carrying arm 2. The first transfer arm 1 is used for moving the wafer ring 4 containing the wafer at the wafer ring loading position to the wafer ring unloading position; the second conveying arm 2 is used for taking out the used wafer ring 4 from the wafer ring feeding position; the conveying driving unit 3 is used for driving the first conveying arm 1 and the second conveying arm 2 to reciprocate between the crystal ring loading position and the crystal ring unloading position. Here, the ring loading position is understood to mean the position of the storage mechanism for storing the ring 4, and the ring unloading position is understood to mean the position of the ring rotation platform relative to the ejector mechanism. With the structure, the wafer ring 4 containing the wafer at the wafer ring loading position can be moved to the wafer ring unloading position through the first carrying arm 1, so that the wafer pushing mechanism can push out the wafer on the wafer ring 4 conveniently; the used wafer ring 4 at the wafer ring discharging position can be taken out through the second carrying arm 2, so that the first carrying arm 1 can conveniently feed the wafer ring 4; the first conveying arm 1 and the second conveying arm 2 can be driven to reciprocate between the crystal ring loading position and the crystal ring unloading position through the conveying driving unit 3. Therefore, the feeding operation of the crystal ring 4 can be completed by the first carrying arm 1, and the discharging operation of the crystal ring 4 can be completed by the second carrying arm 2, so that the feeding and discharging speed of the crystal ring 4 is improved, the waiting time of the feeding and discharging of the crystal ring 4 is shortened, and the crystal fixing efficiency is improved.
In one embodiment, referring to fig. 1, the first transfer arm 1 and the second transfer arm 2 can be synchronously driven by the transfer driving unit 3 and move in the same direction, that is, the first transfer arm 1 and the second transfer arm 2 synchronously move from the ring loading position to the ring unloading position, or the first transfer arm 1 and the second transfer arm 2 synchronously move from the ring unloading position to the ring loading position, so that the synchronism of the reciprocating movement of the first transfer arm 1 and the second transfer arm 2 can be ensured. In some embodiments, the first transfer arm 1 and the second transfer arm 2 can be synchronously driven by the transfer driving unit 3 and move towards or relative to each other, that is, when the first transfer arm 1 moves from the ring loading position to the ring unloading position, the second transfer arm 2 moves from the ring unloading position to the ring loading position; alternatively, the second transfer arm 2 may be moved from the ring loading position to the ring unloading position while the first transfer arm 1 is moved from the ring loading position to the ring loading position, which is not limited herein.
In an embodiment, referring to fig. 1 and fig. 2, as a specific implementation manner of the dual-arm type wafer changing mechanism provided in the embodiment of the present application, the carrying driving unit 3 includes a supporting frame 31, a screw rod 32 installed on the supporting frame 31, a slider 33 installed on the screw rod 32, and a carrying driving member 34 for driving the screw rod 32 to rotate; the carrying driving member 34 is mounted on the supporting frame 31, the carrying driving member 34 is connected to the screw rod 32, and the first carrying arm 1 and the second carrying arm 2 are respectively mounted on the sliding blocks 33. According to the structure, the screw rod 32 is driven to rotate by the conveying driving piece 34, the sliding block 33 can be driven to reciprocate between the crystal ring feeding position and the crystal ring discharging position, and then the first conveying arm 1 and the second conveying arm 2 are driven to move, so that the reliability is good. The carrying driving member 34 may be a motor.
In some embodiments, the carrying driving unit 3 may also be a sliding table linear motor, a cylinder pushing mechanism, a hydraulic pushing mechanism, an oil pressure pushing mechanism, etc., which are not limited herein.
In an embodiment, referring to fig. 3 and 4, as a specific implementation of the dual-arm type wafer replacing mechanism provided in the embodiment of the present application, the first transfer arm 1 includes a first clamping jaw unit 11 for clamping the wafer 4 and a first transfer lifting unit 12 for driving the first clamping jaw unit 11 to lift; the first conveyance lifting unit 12 is attached to the conveyance driving unit 3, and the first conveyance lifting unit 12 is connected to the first gripper unit 11. With this structure, when the first chuck jaw unit 11 grips the wafer ring 4, and is driven by the first carrying lifting unit 12 and the carrying driving unit 3, the horizontal movement of the horizontal inner surface and the lifting in the vertical surface can be realized, so that the wafer ring 4 can be moved from the wafer ring loading position to the wafer ring unloading position, and the wafer ring 4 can be loaded.
In an embodiment, referring to fig. 3 and 4, as a specific implementation manner of the dual-arm type wafer changing mechanism provided in the embodiment of the present application, the first carrying lifting unit 12 includes a first mounting seat 121 mounted on the carrying driving unit 3, a sliding seat 122 mounted on the first mounting seat 121, and a first carrying lifting member 123 for driving the sliding seat 122 to lift; the first carrying lifter 123 is mounted on the first mounting base 121, the first carrying lifter 123 is connected to the sliding base 122, and the first jaw unit 11 is mounted on the sliding base 122. Specifically, the first mounting seat 121 is mounted on the slider 33. With this structure, the first carrying lifting/lowering member 123 can drive the sliding seat 122 to lift up and down on the first mounting seat 121, so as to drive the first clamping jaw unit 11 to lift up and down. Wherein, the first carrying lifting member 123 may be a cylinder, an electric cylinder, an oil cylinder, etc.
In an embodiment, referring to fig. 4, a first opening 1210 for the sliding seat 122 to pass through is formed on the first mounting seat 121, a first sliding groove 1211 is installed at a position of the first opening 1210 of the first mounting seat 121, and a first sliding rail 1221 matched with the first sliding groove 1211 is correspondingly installed on the sliding seat 122, so that a directional guiding effect is achieved for the up-and-down movement of the sliding seat 122.
In one embodiment, referring to fig. 3 and 4, a first stopper 1222 is installed at an end of the sliding seat 122 extending out of the first opening 1210, and the first stopper 1222 is capable of being matched with and abutted against the first installation seat 121, so as to perform a limit control on a stroke of the sliding seat 122.
In some embodiments, the first carrying lifting unit 12 may also be a screw driving mechanism, a sliding table linear motor, etc., which are not limited herein.
In an embodiment, referring to fig. 3 and 4, as a specific implementation of the dual-arm type wafer replacing mechanism provided in the embodiment of the present application, the first clamping jaw unit 11 includes a first fixed clamp 111 installed on the first carrying lifting unit 12, a first movable clamp 112 for clamping the wafer ring 4 in cooperation with the first fixed clamp 111, a first clamping jaw driving member 113 for driving the first movable clamp 112 to approach or depart from the first fixed clamp 111, and a supporting seat 114 for supporting the first clamping jaw driving member 113; the supporting base 114 is mounted on the first fixed clamp 111, and the first jaw driving member 113 is connected to the first movable clamp 112. Specifically, the first fixing clip 111 is mounted on the sliding seat 122. With the structure, when the first clamping jaw driving member 113 drives the first movable clamp 112 to approach the first fixed clamp 111, the first movable clamp 112 can cooperate with the first fixed clamp 111 to clamp the wafer ring 4, so as to facilitate picking up the wafer ring 4 at the loading position of the wafer ring; when the first jaw driving member 113 drives the first movable clamp 112 to move away from the first fixed clamp 111, the die ring 4 can be released at the die ring blanking position.
In an embodiment, referring to fig. 4, as a specific implementation manner of the dual-arm type wafer changing mechanism provided in the embodiment of the present application, the first clamping jaw unit 11 further includes a first guiding shaft 115 installed on the first movable clamp 112, and the supporting seat 114 is correspondingly provided with a first through hole 1140 through which the first guiding shaft 115 passes. With the structure, the first guide shaft 115 is aligned with the first through hole 1140, so as to position and guide the reciprocating movement of the first movable clamp 112, thereby improving the reliability of the movement of the first movable clamp 112.
In some embodiments, the first jaw unit 11 may also be a pneumatic clamp, an electric clamp, a hydraulic clamp, etc., and is not limited herein. The first transfer arm 1 may also be a combination of the first jaw unit 11, the lateral movement mechanism, the longitudinal movement mechanism, and the lifting mechanism, so that the first jaw unit 11 can move laterally and longitudinally in the horizontal plane, and can be lifted and lowered in the vertical plane. The transverse moving mechanism, the longitudinal moving mechanism and the lifting mechanism can be screw rod transmission mechanisms, sliding table linear motors, cylinder transmission mechanisms and the like, and are not limited exclusively herein.
In an embodiment, referring to fig. 5 and 6, as a specific implementation of the dual-arm type wafer replacing mechanism provided in the embodiment of the present application, the second transfer arm 2 includes a second gripper unit 21 for gripping a wafer ring 4, a second transfer lifting unit 22 for driving the second gripper unit 21 to lift and a transfer rotating unit 23 for driving the second gripper unit 21 to rotate; the conveyance rotating unit 23 is attached to the second conveyance lifting unit 22, the conveyance rotating unit 23 is connected to the second gripper unit 21, and the second conveyance lifting unit 22 is attached to the conveyance driving unit 3. With this structure, the second holding jaw unit 21 can be lifted in the vertical plane by the second carrying lifting unit 22, and the second holding jaw unit 21 can be rotated in the horizontal plane by the carrying rotating unit 23, so that the position of the second holding jaw unit 21 can be adjusted in multiple directions.
In an embodiment, referring to fig. 5 and fig. 6, as a specific implementation of the dual-arm type wafer replacing mechanism provided in the embodiment of the present application, the second carrying lifting unit 22 includes a second carrying lifting member 223 mounted on the sliding block 33 of the carrying driving unit 3, a second mounting seat 221 connected to the second carrying lifting member 223, and a connecting seat 222 hinged to the second mounting seat 221; the carrying rotary unit 23 includes a rotary seat 231 connected with the connecting seat 222 and a carrying rotary member 232 mounted on the slide block 33 of the carrying driving unit 3, the carrying rotary member 232 is connected with the rotary seat 231, and the connecting seat 222 and the rotary seat 231 can slide relatively; the second jaw unit 21 is mounted on the connection base 222. With this structure, when the second carrying lifter 223 drives the connecting base 222 to be lifted and lowered on the rotating base 231, the second jaw unit 21 can be lifted and lowered in the vertical plane. When the carrying rotating member 232 drives the rotating seat 231 to rotate, the rotating seat 231 drives the connecting seat 222 to rotate around the second mounting seat 221, so that the second clamping jaw unit 21 can rotate in the horizontal plane, and the position of the second clamping jaw unit 21 can be adjusted in multiple directions. Wherein, the second carrying lifting member 223 can be a cylinder, an electric cylinder, an oil cylinder, etc.; the carrying rotator 232 may be a motor.
In an embodiment, referring to fig. 6, the connecting seat 222 is provided with a second opening 2220 for the rotating seat 231 to pass through, the rotating seat 231 is provided with a second sliding slot 2311 passing through the second opening 2220, and the connecting seat 222 is correspondingly provided with a second sliding rail 2221 matching with the second sliding slot 2311. The rotating base 231 is inserted through the connecting base 222 through the second opening 2220, so as to drive the connecting base 222 and the second jaw unit 21 to rotate around the second mounting base 221, and further drive the second jaw unit 21 to rotate. Through the cooperation of the second sliding groove 2311 and the second sliding rail 2221, a directional guiding function can be performed on the movement of the connecting seat 222 on the rotating seat 231.
In one embodiment, referring to fig. 6, the second carrying lifting unit 22 further includes a positioning block 224 supporting the second carrying lifting member 223; the second mounting seat 221 is provided with a positioning shaft 2211, and the positioning block 224 is correspondingly provided with a positioning hole 2240 for inserting the positioning shaft 2211. Through the cooperation of the positioning shaft 2211 and the positioning hole 2240, the positioning and guiding function for lifting the second installation seat 221 can be realized, and the moving reliability of the second installation seat 221 is improved.
In some embodiments, the second carrying elevating unit 22 may also be a screw driving mechanism, a slide linear motor, or the like. The carrying rotary unit 23 may also be a combined member of a motor and a rotary disk, the second carrying lifting unit 22 is mounted on the rotary disk, and the second carrying lifting unit 22 is connected to the second jaw unit 21. Alternatively, the conveying rotation unit 23 may be a combined member of a motor, a gear attached to a main shaft of the motor, and a toothed plate on which the second conveying lifting unit 22 is attached, the gear being engaged with the toothed plate. The second carrying lifting unit 22 and the second clamping jaw unit 21 can be driven to rotate together by the rotation of the gear plate.
In an embodiment, referring to fig. 5 and fig. 6, as a specific implementation manner of the dual-arm type wafer replacing mechanism provided in the embodiment of the present application, the second clamping jaw unit 21 includes a fixed seat 211 installed on the connecting seat 222, a second fixed clamp 212 connected to the fixed seat 211, a second movable clamp 213 for clamping the wafer ring 4 in cooperation with the second fixed clamp 212, and a second clamping jaw driving member 214 for driving the second movable clamp 213 to approach or depart from the second fixed clamp 212; the second jaw driving member 214 is mounted on the fixed base 211, and the second jaw driving member 214 is connected to the second movable clamp 213. With the structure, when the second jaw driving member 214 drives the second movable clamp 213 to approach the second fixed clamp 212, the second movable clamp 213 cooperates with the second fixed clamp 212 to clamp the die ring 4, so that the used die ring 4 can be taken out from the die ring blanking position. When the second movable clamp 213 is driven away from the second fixed clamp 212 by the second jaw driver 214, the used wafer ring 4 can be released. The second jaw driving member 214 may be an air cylinder, an electric cylinder, an oil cylinder, etc.
In some embodiments, the second jaw unit 21 may also be a pneumatic clamp, an electric clamp, a hydraulic clamp, etc., and is not limited herein.
In an embodiment, referring to fig. 6, as a specific implementation manner of the dual-arm type wafer changing mechanism provided in the embodiment of the present application, the second carrying arm 2 further includes a second guiding shaft 215 mounted on the second movable clamp 213, and the second fixed clamp 212 is correspondingly provided with a second through hole 2120 for the second guiding shaft 215 to pass through. With this structure, the second guide shaft 215 is aligned with the second through hole 2120, so that the reciprocating movement of the second movable clamp 213 can be positioned and guided, and the reliability of the reciprocating movement of the second movable clamp 213 can be improved.
In an embodiment, referring to fig. 6, the second carrying arm 2 further includes a second limiting block 216 for blocking the second movable clamp 213, and the second limiting block 216 is mounted on the fixing base 211. With this structure, the second stopper 216 can stop the second movable clip 213, so as to limit the moving stroke of the second movable clip 213.
In some embodiments, the second transfer arm 2 may also be a combination of the second jaw unit 21, the lateral movement mechanism, the longitudinal movement mechanism, and the lifting mechanism, so that the lateral and longitudinal movement of the second jaw unit 21 in the horizontal plane, and the lifting in the vertical plane can be realized. The transverse moving mechanism, the longitudinal moving mechanism and the lifting mechanism can be screw rod transmission mechanisms, sliding table linear motors, cylinder transmission mechanisms and the like, and are not limited exclusively herein.
The operation steps of the double-arm type crystal ring changing mechanism provided by the embodiment of the application are as follows:
1. the carrying driving unit 3 drives the first carrying arm 1 to a wafer ring loading position, and the first carrying arm 1 clamps a wafer ring 4 containing wafers. Specifically, the conveying driving member 34 realizes the movement of the first conveying arm 1 in the horizontal plane through the screw rod 32 and the slide block 33; the first movable clamp 112 is driven by the first jaw driver 113 to approach the first fixed clamp 111 to clamp the wafer ring 4.
2. The conveying driving unit 3 drives the first conveying arm 1 to a crystal ring feeding position, the second conveying arm 2 takes out the crystal ring 4 which is used up in the crystal ring feeding position, and the first conveying arm 1 places the clamped crystal ring 4 in the crystal ring feeding position. Specifically, the second jaw driver 214 drives the second movable clamp 213 to approach the second fixed clamp 212 to clamp the used wafer ring 4; the second clamping jaw unit 21 is driven to rotate by 90 degrees through the conveying rotating unit 23 so as to take out the used crystal ring 4 and realize avoidance of the first conveying arm 1; the first carrying arm 1 is driven by the first carrying lifting unit 12 to descend, and the first clamping jaw driving member 113 drives the first movable clamp 112 to move away from the first fixed clamp 111, so that the wafer ring 4 containing the wafer is placed at the wafer ring unloading position.
3. The conveying driving unit 3 drives the second conveying arm 2 to the wafer ring recovery position, and the second conveying arm 2 releases the clamped wafer ring 4 to realize recovery. Specifically, under the driving action of the carrying driving unit 3, the second jaw driving member 214 drives the second movable clamp 213 to move away from the second fixed clamp 212, so as to release the used wafer ring 4 to the wafer ring receiving position; subsequently, the second carrying arm 2 is restored to the initial position by the driving of the carrying rotary unit 23.
According to the double-arm crystal ring replacing mechanism, through repeating the steps, the first carrying arm 1 finishes the feeding operation of the crystal ring 4, and the second carrying arm 2 finishes the discharging operation of the crystal ring 4, so that compared with the traditional method that the feeding operation and the discharging operation of the crystal ring 4 are realized by only one mechanical arm, the double-arm crystal ring replacing mechanism is beneficial to improving the feeding and discharging speed of the crystal ring 4, reducing the waiting time of the feeding operation and the discharging operation of the crystal ring 4, and further improving the crystal fixing efficiency.
It should be understood that, the sequence numbers of the steps in the foregoing embodiments do not imply an execution sequence, and the execution sequence of each process should be determined by its function and inherent logic, and should not constitute any limitation to the implementation process of the embodiments of the present application.
The above description is only exemplary of the present application and should not be taken as limiting the present application, as any modification, equivalent replacement, or improvement made within the spirit and principle of the present application should be included in the protection scope of the present application.

Claims (10)

1. Two arm-type trade brilliant ring mechanism, its characterized in that includes:
a first transfer arm (1) for moving a wafer ring (4) containing wafers at a wafer ring loading position to a wafer ring unloading position;
a second carrying arm (2) for taking out the used wafer ring (4) from the wafer ring feeding position;
the conveying driving unit (3) is respectively connected with the first conveying arm (1) and the second conveying arm (2) and is used for driving the first conveying arm (1) and the second conveying arm (2) to reciprocate between the crystal ring feeding position and the crystal ring discharging position;
wherein the first transfer arm (1) and the second transfer arm (2) are synchronously driven by the transfer drive unit (3) and move in the same direction.
2. The dual-arm change ring mechanism of claim 1, wherein: the first carrying arm (1) comprises a first clamping jaw unit (11) for clamping the crystal ring (4) and a first carrying lifting unit (12) for driving the first clamping jaw unit (11) to lift; the first conveying lifting unit (12) is installed on the conveying driving unit (3), and the first conveying lifting unit (12) is connected with the first clamping jaw unit (11).
3. The dual-arm change ring mechanism of claim 2, wherein: the first conveying lifting unit (12) comprises a first mounting seat (121) mounted on the conveying driving unit (3), a sliding seat (122) mounted on the first mounting seat (121), and a first conveying lifting piece (123) used for driving the sliding seat (122) to lift; the first carrying lifting piece (123) is installed on the first installation seat (121), the first carrying lifting piece (123) is connected with the sliding seat (122), and the first clamping jaw unit (11) is installed on the sliding seat (122).
4. The dual-arm change ring mechanism of claim 2, wherein: the first clamping jaw unit (11) comprises a first fixed clamp (111) arranged on the first carrying lifting unit (12), a first movable clamp (112) used for clamping the crystal ring (4) in a matching way with the first fixed clamp (111), a first clamping jaw driving piece (113) used for driving the first movable clamp (112) to be close to or far away from the first fixed clamp (111), and a supporting seat (114) supporting the first clamping jaw driving piece (113); the supporting seat (114) is installed on the first fixing clamp (111), and the first clamping jaw driving piece (113) is connected with the first movable clamp (112).
5. The dual-arm change ring mechanism of claim 4, wherein: the first clamping jaw unit (11) further comprises a first guide shaft (115) installed on the first movable clamp (112), and a first through hole (1140) for the first guide shaft (115) to pass through is correspondingly formed in the supporting seat (114).
6. The dual arm change wafer ring mechanism of any one of claims 1-5, wherein: the second carrying arm (2) comprises a second clamping jaw unit (21) for clamping the crystal ring (4), a second carrying lifting unit (22) for driving the second clamping jaw unit (21) to lift, and a carrying rotating unit (23) for driving the second clamping jaw unit (21) to rotate; the conveying rotating unit (23) is installed on the second conveying lifting unit (22), the conveying rotating unit (23) is connected with the second clamping jaw unit (21), and the second conveying lifting unit (22) is installed on the conveying driving unit (3).
7. The dual-arm change ring mechanism of claim 6, wherein: the second carrying lifting unit (22) comprises a second mounting seat (221), a connecting seat (222) hinged with the second mounting seat (221) and a second carrying lifting piece (223) mounted on the carrying driving unit (3), and the second carrying lifting piece (223) is connected with the second mounting seat (221); the conveying rotating unit (23) comprises a rotating seat (231) installed on the connecting seat (222) and a conveying rotating piece (232) installed on the conveying driving unit (3), the conveying rotating piece (232) is connected with the rotating seat (231), and the second clamping jaw unit (21) is installed on the connecting seat (222).
8. The dual-arm change ring mechanism of claim 7, wherein: the second clamping jaw unit (21) comprises a fixed seat (211) arranged on the connecting seat (222), a second fixed clamp (212) connected with the fixed seat (211), a second movable clamp (213) used for clamping the crystal ring (4) in a matching way with the second fixed clamp (212), and a second clamping jaw driving piece (214) used for driving the second movable clamp (213) to be close to or far away from the second fixed clamp (212); the second clamping jaw driving piece (214) is installed on the fixed seat (211), and the second clamping jaw driving piece (214) is connected with the second movable clamp (213).
9. The dual-arm change ring mechanism of claim 8, wherein: the second clamping jaw unit (21) further comprises a second guide shaft (215) mounted on the second movable clamp (213), and a second through hole (2120) for the second guide shaft (215) to pass through is correspondingly formed in the second fixed clamp (212).
10. The dual arm change wafer ring mechanism of any one of claims 1-5, wherein: the conveying driving unit (3) comprises a supporting frame (31), a screw rod (32) arranged on the supporting frame (31), a sliding block (33) arranged on the screw rod (32) and a conveying driving piece (34) used for driving the screw rod (32) to rotate; the carrying driving piece (34) is installed on the supporting frame (31), the carrying driving piece (34) is connected with the screw rod (32), and the first carrying arm (1) and the second carrying arm (2) are installed on the sliding block (33) respectively.
CN202110153764.4A 2021-02-04 2021-02-04 Double-arm type crystal ring replacing mechanism Active CN112811165B (en)

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