CN112811062A

CN112811062A - Mask plate batch temporary storage device and mask plate turnover system

Info

Publication number: CN112811062A
Application number: CN202110192845.5A
Authority: CN
Inventors: 张华超; 甄华彪; 魏晖; 葛翔
Original assignee: Hefei Qingyi Photoelectric Co ltd
Current assignee: Hefei Qingyi Photoelectric Co ltd
Priority date: 2021-02-20
Filing date: 2021-02-20
Publication date: 2021-05-18
Anticipated expiration: 2041-02-20
Also published as: CN112811062B

Abstract

The invention discloses a batch temporary storage device for masks. The fixed guide beams on the two opposite inner sides of the storage racks, and the two fixed guide beams are provided with moving racks, and the moving racks move in and out of the storage rack inner area of the frame-like structure along the axis direction of the fixed guide beams, so The moving frame is provided with a clamping mechanism; the mask batch temporary storage device of the present invention has a temporary storage device capable of automatically accessing the mask, which can solve the problem of product accumulation in the process, and can also avoid product create pollution.

Description

Mask plate batch temporary storage device and mask plate turnover system

Technical Field

The invention belongs to the field of equipment for mask production, and particularly relates to a mask batch temporary storage device and a mask turnover system.

Background

At present, with the high popularization of automation, the production line of the mask (made of glass material) also starts to move to automation and no humanization, and the automatic robot carries and transmits the mask in the whole process. However, in a series of production processes, the time required for completing one mask operation in some processes is short, and the time required for completing one mask operation in some processes is relatively long, which results in product accumulation in some processes. At present, the major processes are long in bottleneck in the cleaning process, the time required by the cleaning process is long (one mask needs about 3 hours), and one mask needs to be cleaned at least twice, and some masks need more, so that products in the cleaning process are accumulated, the blockage of the previous process is caused, and the machine time of equipment in the previous process is wasted. Moreover, when the quantity of orders is large or urgent orders are inserted, if the accumulated products are not processed, the subsequent urgent orders cannot be carried out, so that the ordered delivery cannot be carried out, the loss is brought to customers, and the bad influence is brought to the image of the department.

There are two approaches to solve this problem: firstly, the number of cleaning machines is increased, and the relative cost is increased; another method is to manually take out the accumulated products and temporarily put the products into a box, so that when the machine is released, the products can be made a way for the production of urgent orders, but the method has the defects that a person can dirty the products in the process of lifting the mask plate, the cleaning difficulty is increased, and the risk of falling is caused.

Disclosure of Invention

The invention aims to provide a mask plate batch temporary storage device and a mask plate turnover system, which are provided with the temporary storage device capable of automatically storing and taking mask plates, can solve the problem of product accumulation in a process and can avoid pollution to products.

The invention provides a mask plate batch temporary storage device, which comprises a storage frame with a U-shaped frame-shaped structure in cross section, wherein a plurality of storage layers are arranged at the upper and lower positions of the storage frame, each storage layer comprises fixed guide beams respectively arranged on two opposite inner side surfaces of the storage frame, a moving frame is arranged on the two fixed guide beams, the moving frame moves in and out of the inner area of the storage frame with the frame-shaped structure along the axis direction of the fixed guide beams, and a clamping mechanism is arranged on the moving frame.

Preferably, the movable frame comprises two movable beams which are respectively arranged on the fixed guide beams and are parallel to the fixed guide beams, the bottom of each movable beam is connected with a first screw mechanism, the first screw mechanisms are arranged in the fixed guide beams and drive the movable beams to move along the fixed guide beams, and the clamping mechanisms can enter and exit the storage frame inner area with the frame-shaped structure.

Preferably, clamping mechanism includes anchor clamps and anchor clamps mount pad, the anchor clamps mount pad includes two bridge breaks, two the mutual parallel arrangement of bridge break and both ends overlap joint respectively on two walking beams, two bridge break bottom is connected with second screw rod mechanism, second screw rod mechanism sets up in the walking beam and drives two bridge breaks relative or move dorsad, accomplishes anchor clamps size control.

Preferably, the broken bridge is horizontally arranged, the axis of the broken bridge is perpendicular to the axis of the movable beam, the broken bridge comprises two coaxially arranged single beams, a space is reserved between the two single beams, and the clamp comprises an L-shaped supporting block respectively arranged on each single beam.

Preferably, the bottoms of the four supporting blocks are connected with third screw mechanisms, the third screw mechanisms are respectively arranged in the single beams and drive the two supporting blocks on the same broken bridge to be close to or far away from each other, so that the size of the clamp is adjusted, and the supporting blocks clamp the mask plate from the four vertex angles of the mask plate.

A mask turnover system comprises a control system, a transfer device, an AGV and the storage device, wherein the transfer device comprises a lifting platform and a transfer execution mechanism arranged on the lifting platform; the control system controls the lifting platform to adapt to the height of each storage layer and the height of the AGV on the storage device respectively, and the transfer executing mechanism achieves turnover of the mask between the AGV and the storage layer.

Preferably, the transfer device further comprises a fixed frame and a lifting mechanism vertically mounted on the fixed frame, the lifting platform is connected with the top of the lifting mechanism, and the lifting mechanism drives a transfer execution mechanism mounted on the lifting platform to lift to a position suitable for the storage layer through the lifting platform;

elevating system includes the cylinder, installs at the excessive platform at cylinder push rod top and the support post of connecting excessive platform upper surface and elevating platform lower surface, three are no less than in the support post setting, and with the setting of elevating platform center axis symmetry.

Preferably, the transfer executing mechanism comprises four fixing arms which are arranged and fixed on the lifting platform in a cross shape and transfer clamping mechanisms which are respectively arranged in the four fixing arms, each transfer clamping mechanism comprises a fourth screw mechanism which is respectively arranged on the four fixing arms and transfer clamping blocks which are respectively connected with the four fourth screw mechanisms, and the fourth screw mechanisms drive the four transfer clamping blocks to move in the opposite direction or in the opposite direction, so that the size adjustment of the transfer clamping mechanisms is realized;

and fourthly, the transfer clamping blocks are symmetrically arranged with the center of the central axis of the lifting platform, and the turnover clamping blocks are fixed to the mask plate along the center of the four edges of the mask plate.

Preferably, a turnover executing mechanism is arranged on the AGV, the turnover executing mechanism comprises two parallel support arm groups, a fifth screw mechanism is respectively arranged on the two support arm groups, and the fifth screw mechanism drives the two support arm groups to approach or leave; the utility model discloses a mask version, including the mask version, the supporting arm group is including being the lower limb and the last supporting arm that the upper and lower position set up, goes up supporting arm length and is greater than the lower limb and be provided with sixth screw rod mechanism, the lower limb with the turnover that all hangs an L type on the sixth screw rod mechanism presss from both sides tight piece, and the turnover of two L types on the same supporting arm group presss from both sides tight piece and sets up relatively, and the turnover that sixth screw rod mechanism realized on the same supporting arm group presss from both sides tight piece and is close to relatively and keeps away from, and four turnover clamp pieces on two supporting arm groups are realized pressing from both sides tightly the mask version by four.

The mask batch temporary storage device has the beneficial effects that:

1. by adopting the storage device with the multiple storage layers, the mask which cannot be processed immediately can be temporarily stored, a temporary storage area is provided for the mask, the mask can be well processed in the turnover process, and the mask is prevented from being polluted.

2. The storage moving mechanism is arranged on the storage layer, so that the storage clamping mechanism can enter and exit the storage frame, the mask in the storage layer can be conveniently taken out or a mask house can be conveniently and quickly operated on the storage layer.

The mask plate turnover system has the beneficial effects that: the problem that the masks are temporarily stacked and stored due to the fact that the processing time of each process is inconsistent in production of the masks is well solved, and the problem of pollution caused by turnover of the masks among the processes is avoided.

Drawings

FIG. 1 is a schematic diagram of a mask batch temporary storage device according to an embodiment of the present invention,

figure 2 is an enlarged view of a portion of figure 1,

figure 3 is a top view of figure 1,

FIG. 4 is a schematic structural diagram of a mask turnover system,

FIG. 5 is a schematic view showing the construction of the transfer device,

figure 6 is a top view of an epicyclic actuator disposed on an AGV,

fig. 7 is a right side view of fig. 6.

Detailed Description

In order to facilitate the understanding of the technical solutions of the present invention for those skilled in the art, the technical solutions of the present invention will be further described with reference to the drawings attached to the specification.

As shown in fig. 1, fig. 2 and fig. 3, a mask batch temporary storage apparatus according to an embodiment of the present invention includes a storage rack 10 having a U-shaped frame structure in cross section, and a plurality of storage layers 11 are disposed on the storage rack 10 in an up-down position. The storage layer 11 comprises fixed guide beams 12 arranged on two opposite inner sides of the storage rack 10, respectively, and a moving rack is arranged on the two fixed guide beams 12. The moving frame, which is provided with a clamping mechanism, moves in and out of the interior region of the storage frame 10 of the frame-like structure in the axial direction of the fixed guide beam 12.

Based on above-mentioned technical scheme, when the turnover, need place storage layer 11 or take off the mask version by storage layer 11 with mask version 400, at this in-process, remove the frame and all need shift out in the region in the U type frame body wall of storage frame 10, the mask version 400 of being convenient for on the one hand like this takes or places, convenient operation, and on the other hand can not cause the influence or collide with to the mask version of other storage layers.

As shown in fig. 2, the moving frame includes moving beams 13 respectively disposed on the two fixed guide beams 12 and parallel to the fixed guide beams 12. The bottom of the movable beam 13 is connected with a first screw mechanism 121, the first screw mechanism 121 is disposed in the fixed guide beam 12 and drives the movable beam 13 to move along the fixed guide beam 12, so that the clamping mechanism can enter and exit the inner area of the U-shaped frame structure of the storage rack 10. As shown in fig. 2, the first screw mechanism 121 includes a screw rod and a guide rod which are arranged in the fixed guide beam 12 and parallel to the fixed guide beam, one end of the screw rod is connected to a servo motor, and the servo motor drives the screw rod to rotate, so as to realize the movement of the movable beam 13 connected to the screw rod. In order to ensure that the movable beam 12 can drive the movable frame to move out of the inner area of the storage frame 10, the bottom of the movable beam 13 is provided with a connecting block 132 which is sleeved with the screw and the guide rod, the connecting block 132 is arranged at the inner end close to the movable beam 13 on the premise of ensuring the balance of the movable beam 13 as much as possible, the movable frame and the clamping mechanism can be ensured to completely move out of the inner area of the storage frame 10, and the operation of a mask plate on the clamping mechanism is facilitated or the mask plate is placed on the clamping mechanism.

In order to ensure that the mask is turned around and avoid interference between the movable frame and the transfer device 200 during turning around, the distance between the two movable beams 13 must be greater than the sum of the lengths of the two fixed arms 211 fixed in a cross arrangement on the transfer actuator of the transfer device 200.

As shown in fig. 2, the clamping mechanism includes a clamp 15 and a clamp mounting seat, the clamp mounting seat includes two bridge segments 14, the two bridge segments 14 are parallel to each other and have two ends respectively overlapping the two movable beams 13. The bottom of the two-section bridge 14 is connected with a second screw mechanism 131, and the second screw mechanism 131 is arranged in the movable beam 13 and drives the two-section bridge 14 to move relatively or backwards, so that the size adjustment of the clamp is completed.

As shown in fig. 2, the bridge-cut 14 is horizontally disposed and has an axis perpendicular to the axis of the movable beam 13, the bridge-cut 14 includes two coaxially disposed single beams 141/142, a space is left between the two single beams 141/142, and the clamp 15 includes an L-shaped support block respectively disposed on each single beam. The second screw mechanism 131 includes screws respectively disposed in the two movable beams 13, ends of the screws are connected to a servo motor, threads with opposite rotation directions are respectively disposed on the screws disposed in the two movable beams 13 from the middle to the two ends, the screws rotate, and the two threads with opposite rotation directions drive the two bridge sections 14 to move in opposite directions or away from each other, so as to adjust the size of the clamp in one direction.

As shown in fig. 2, the bottoms of the four support blocks are connected with third screw mechanisms 143, the third screw mechanisms 143 are respectively arranged in each single beam and drive the two support blocks on the same broken bridge 14 to approach or depart from each other, so as to complete the size adjustment of the fixture, and the four support blocks clamp the mask by the four vertex angles of the mask 400. The third screw mechanism 143 includes a screw and a servo motor disposed in each single beam, and the servo motor and the screw drive the support blocks to move along the single beam, so as to enable the two support blocks on the same bridge segment 14 to approach or move away from each other, thereby enabling the mask 400 to be adapted to different sizes for storage.

As shown in fig. 4, a reticle transfer system includes a control system, a relay device 200, an AGV300, and the aforementioned storage device 100. As shown in fig. 5, the relay device 200 includes a lifting platform 20 and a relay actuator 21 disposed on the lifting platform 20. The control system controls the lifting platform 20 to adapt to the height of each storage layer 11 and the height of the AGV300 on the storage device 100 respectively, and the transfer executing mechanism 21 realizes the turnover of the mask 400 between the AGV and the storage layer 11.

As shown in fig. 5, the transfer device 200 further includes a fixing frame 22 and a lifting mechanism 23 vertically mounted on the fixing frame 22. The lifting platform 20 is connected with the top of the lifting mechanism 23, and the lifting mechanism 23 drives the transfer executing mechanism 21 installed on the lifting platform 20 to lift to the position suitable for the storage layer 11 through the lifting platform 20. Elevating system 23 includes cylinder 231, installs excessive platform 232 at cylinder push rod top and connects the support post 233 of excessive platform 232 upper surface and elevating platform 20 lower surface, and support post 233 sets up and is no less than three, and sets up with elevating platform 20 central axis symmetry. The arrangement of the transition platform 232 and the support upright 233 ensures that the lifting platform 20 can lift stably.

As shown in fig. 5, the transfer actuator 21 includes four fixing arms 211 fixed on the lifting platform 20 in a cross arrangement, and transfer clamping mechanisms respectively disposed in the four fixing arms 211, and each transfer clamping mechanism includes a fourth screw mechanism 212 respectively disposed on the four fixing arms 211, and a transfer clamping block 213 respectively connected to the fourth screw mechanism 212. The fourth screw mechanism 212 drives the four transit clamping blocks 213 to move towards or away from each other, so as to realize size adjustment of the transit clamping mechanism. The four middle rotating clamping blocks 213 are symmetrically arranged with the center of the central axis of the lifting platform 20, and the four peripheral rotating clamping blocks 213 fix the mask plate 400 along the center position by four sides of the mask plate. The positioning of the epicyclic clamping blocks 213 effectively avoids interference with the grippers 15 on the storage device 100.

As shown in fig. 6 and 7, the AGV is provided with a turnover actuator, the turnover actuator includes two parallel support arm sets 31, and the two support arm sets 31 are respectively provided with a fifth screw mechanism 32. The fifth screw mechanism 32 drives the two support arm sets 31 to move closer to or away from each other. The support arm set 31 includes a lower support arm 312 and an upper support arm 311 which are arranged at upper and lower positions, the length of the upper support arm 311 is greater than that of the lower support arm 312 and is provided with a sixth screw mechanism 314, and an L-shaped turnover clamping block 313 is hung on both the lower support arm 311 and the sixth screw mechanism 314. Two L-shaped turnover clamping blocks 313 on the same supporting arm group 31 are oppositely arranged, the sixth screw mechanism 314 enables the turnover clamping blocks on the same supporting arm group 31 to be relatively close to and far away from each other, and the four-side turnover clamping blocks on the two supporting arm groups 31 are clamped on the mask plate through four vertex angles of the mask plate. The two support arm sets 31, the lower support arm 312 and the upper support arm 311 are structurally designed to avoid interference with the transfer actuator 21 on the transfer device 200 during the turnover of the mask.

Based on the technical scheme, the plate placing working process of the mask plate turnover system in the technical scheme of the invention is as follows:

firstly, preparing an AGV, and receiving a mask from the previous process position; then, the storage device 100 and the transfer device 200 receive signals of the control system and the AGV, the size and the position of the clamp 15 and the transfer actuator 21 on the storage device 100 and the transfer device 200 are adjusted according to the size of the mask 400 to be placed, and the height of the transfer device 200 is adjusted to be in a state of being adapted to the height of the AGV; then the transfer device 200 feeds back the prepared information to the AGV, the AGV moves, and the mask is placed on a transfer executing mechanism 21 of the transfer device 200; then the AGV moves away from the standby position and feeds back a signal to the relay device 200 and the storage device 100; then, the transfer device 200 is lifted to the position of the specified storage layer 11 which needs to exist on the storage device 100 and is positioned at the upper part of the height position of the storage layer 111, and after the completion, the information is fed back to the storage device 100; then, the moving frame of the storage device 100 is moved out to the designated position, the central axis of the clamp 15 on the moving frame coincides with the central axis of the mask 400, the transfer actuator 21 of the transfer device 200 descends, the mask is transferred to the clamp 15 of the storage device 100, then the transfer actuator 21 of the transfer device 200 descends and returns to the standby state, and the moving beam 13 on the storage device 100 drives the mask to retract to the storage layer. According to the technical scheme, the plate taking working process and the plate placing process of the mask plate turnover system are opposite in operation.

Technical solution of the invention is described above with reference to the accompanying drawings, it is obvious that the specific implementation of the invention is not limited by the above-mentioned manner, and it is within the scope of the invention to adopt various insubstantial modifications of the inventive method concept and technical solution, or to apply the inventive concept and technical solution to other occasions without modification.

Claims

1. A reticle batch temporary storage device, characterized in that it comprises a storage rack with a U-shaped frame structure in cross section, a plurality of storage layers are arranged on the storage rack in upper and lower positions, and the storage layers include separately arranged storage racks. The fixed guide beams on the two opposite inner sides of the storage racks, the two fixed guide beams are provided with moving racks, and the moving racks move in and out of the storage rack inner area of the frame-like structure along the axis direction of the fixed guide beams , a clamping mechanism is arranged on the moving frame.

2 . The mask batch temporary storage device according to claim 1 , wherein the moving frame comprises moving beams respectively arranged on the two fixed guide beams and parallel to the fixed guide beams, and the moving beams The bottom is connected with a first screw mechanism, and the first screw mechanism is arranged in the fixed guide beam and drives the moving beam to move along the fixed guide beam, so that the clamping mechanism can enter and exit the storage rack of the frame-like structure. internal area.

3. The mask batch temporary storage device according to claim 1, wherein the clamping mechanism comprises a clamp and a clamp mounting seat, the clamp mounting seat includes two broken bridges, and the two broken bridges are parallel to each other Installed and overlapped on two moving beams at both ends, the bottom of the two broken bridges is connected with a second screw mechanism, the second screw mechanism is arranged in the moving beam and drives the two broken bridges to move relative or back to complete the size of the fixture adjust.

4. The mask batch temporary storage device according to claim 3, wherein the broken bridge is arranged horizontally and the axis is perpendicular to the axis of the moving beam, and the broken bridge comprises two single beams arranged coaxially, A space is left between the two single beams, and the fixture includes an L-shaped support block respectively arranged on each single beam.

5 . The mask batch temporary storage device according to claim 4 , wherein a third screw mechanism is connected to the bottom of the four support blocks, and the third screw mechanism is respectively arranged in each single beam and drives the 5. 5 . The two support blocks on the same broken bridge are close to or away from each other to complete the adjustment of the size of the fixture, and the four support blocks can clamp the mask plate by the four corner positions of the mask plate.

6. A reticle turnover system, characterized in that it comprises a control system, a transfer device, an AGV and the storage device according to any one of claims 1 to 5, wherein the transfer device comprises a lifting platform and a The relay actuator on the platform; the control system controls the lifting platform to adapt to the height of each storage layer on the storage device and the height of the AGV, and the relay actuator realizes the turnover of the mask between the AGV and the storage layer.

7 . The mask turnover system according to claim 6 , wherein the transfer device further comprises a fixing frame and a lifting mechanism installed on the fixing frame in a vertical state, and the lifting platform is connected to the lifting platform. 8 . The top of the mechanism is connected, and the lifting mechanism drives the relay actuator installed on the lifting platform to lift to a position suitable for the storage layer through the lifting platform;

The lifting mechanism includes a cylinder, a transition platform installed on the top of the cylinder push rod, and a support column connecting the upper surface of the transition platform and the lower surface of the lift platform.

8 . The mask turnover system according to claim 6 , wherein the relay actuator comprises four fixed arms arranged in a "cross" and fixed on the lifting platform, and four fixed arms respectively arranged in four The relay clamping mechanism in the fixed arm, the relay clamping mechanism includes a fourth screw mechanism respectively arranged on the four fixed arms and a relay clamping block respectively connected with the fourth screw mechanism, the fourth screw mechanism The screw mechanism drives the four transfer clamping blocks to move toward or away from each other, so as to realize the size adjustment of the transfer clamping mechanism;

Fourth, the transit clamping blocks are arranged symmetrically with the center of the central axis of the lifting platform, and the four epicyclic clamping blocks are fixed to the mask by the center position of the four edges of the mask.

9 . The mask turnover system according to claim 6 , wherein an epicyclic actuator is provided on the AGV, and the epicyclic actuator comprises two parallel support arm groups, and the two support arms A fifth screw mechanism is respectively arranged on the group, and the fifth screw mechanism drives the two supporting arm groups to approach or move away; The support arm is provided with a sixth screw mechanism, an L-shaped epicyclic clamping block is hung on the lower support arm and the sixth screw mechanism, and the two L-shaped epicyclic clamping blocks on the same support arm group are opposite to each other. Setting, the sixth screw mechanism realizes that the epicyclic clamping blocks on the same support arm group are relatively close and far away, and the circumferential clamping blocks on the two support arm groups are clamped by the four top corners of the reticle. tight.