CN112702040A - 单晶薄膜声表面波滤波器及降低基带提高带外抑制的方法 - Google Patents
单晶薄膜声表面波滤波器及降低基带提高带外抑制的方法 Download PDFInfo
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- CN112702040A CN112702040A CN202110177497.4A CN202110177497A CN112702040A CN 112702040 A CN112702040 A CN 112702040A CN 202110177497 A CN202110177497 A CN 202110177497A CN 112702040 A CN112702040 A CN 112702040A
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- 238000010897 surface acoustic wave method Methods 0.000 title claims abstract description 31
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Classifications
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- H—ELECTRICITY
- H03—ELECTRONIC CIRCUITRY
- H03H—IMPEDANCE NETWORKS, e.g. RESONANT CIRCUITS; RESONATORS
- H03H9/00—Networks comprising electromechanical or electro-acoustic devices; Electromechanical resonators
- H03H9/46—Filters
- H03H9/64—Filters using surface acoustic waves
- H03H9/6489—Compensation of undesirable effects
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- Physics & Mathematics (AREA)
- Acoustics & Sound (AREA)
- Surface Acoustic Wave Elements And Circuit Networks Thereof (AREA)
Abstract
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CN202110177497.4A CN112702040B (zh) | 2021-02-09 | 2021-02-09 | 单晶薄膜声表面波滤波器及降低基带提高带外抑制的方法 |
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CN112702040A true CN112702040A (zh) | 2021-04-23 |
CN112702040B CN112702040B (zh) | 2024-03-12 |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113839645A (zh) * | 2021-11-26 | 2021-12-24 | 深圳新声半导体有限公司 | 一种体声波滤波器的提升带外抑制的方法及滤波器结构 |
CN114978099A (zh) * | 2022-05-09 | 2022-08-30 | 中国电子科技集团公司第二十六研究所 | 一种提高极窄带带宽新结构的声表滤波器 |
CN116470876A (zh) * | 2023-04-25 | 2023-07-21 | 中国电子科技集团公司第二十六研究所 | 一种声表面波器件 |
Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08330898A (ja) * | 1995-05-29 | 1996-12-13 | Matsushita Electric Ind Co Ltd | 弾性表面波フィルタ |
CN1286485A (zh) * | 1999-08-26 | 2001-03-07 | 中国科学院声学研究所 | 一种欧洲数字无绳电话用声表面波中频滤波器 |
US20030011281A1 (en) * | 2000-03-24 | 2003-01-16 | Katsuhiro Itakura | Surface acoustic wave element |
US20090152981A1 (en) * | 2005-09-30 | 2009-06-18 | Epson Toyocom Corporation | Surface acoustic wave device, module device, oscillation circuit, and method for manufacturing surface acoustic wave device |
US20170331453A1 (en) * | 2014-12-05 | 2017-11-16 | Snaptrack, Inc. | Arrangement comprising a dms filter and a steep right edge |
CN107431471A (zh) * | 2015-03-27 | 2017-12-01 | 株式会社村田制作所 | 弹性波谐振器、弹性波滤波器以及双工器 |
CN109374157A (zh) * | 2018-09-14 | 2019-02-22 | 北京遥测技术研究所 | 一种基于损耗检测的声表面波压力传感器 |
CN111200417A (zh) * | 2020-02-17 | 2020-05-26 | 无锡市好达电子有限公司 | 一种具有横模抑制功能的声表面波换能器及其制备方法 |
CN111510106A (zh) * | 2020-05-06 | 2020-08-07 | 中电科技德清华莹电子有限公司 | 一种声表面波谐振结构滤波器 |
CN111649839A (zh) * | 2020-06-10 | 2020-09-11 | 北京遥测技术研究所 | 一种非线性自校正的谐振型声表面波温度传感器 |
CN112088490A (zh) * | 2018-05-08 | 2020-12-15 | Rf360欧洲有限责任公司 | 用于超高频的具有复合衬底的saw装置 |
CN112840561A (zh) * | 2018-07-27 | 2021-05-25 | 福瑞斯恩系统 | 谐振腔表面声波(saw)滤波器 |
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2021
- 2021-02-09 CN CN202110177497.4A patent/CN112702040B/zh active Active
Patent Citations (12)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH08330898A (ja) * | 1995-05-29 | 1996-12-13 | Matsushita Electric Ind Co Ltd | 弾性表面波フィルタ |
CN1286485A (zh) * | 1999-08-26 | 2001-03-07 | 中国科学院声学研究所 | 一种欧洲数字无绳电话用声表面波中频滤波器 |
US20030011281A1 (en) * | 2000-03-24 | 2003-01-16 | Katsuhiro Itakura | Surface acoustic wave element |
US20090152981A1 (en) * | 2005-09-30 | 2009-06-18 | Epson Toyocom Corporation | Surface acoustic wave device, module device, oscillation circuit, and method for manufacturing surface acoustic wave device |
US20170331453A1 (en) * | 2014-12-05 | 2017-11-16 | Snaptrack, Inc. | Arrangement comprising a dms filter and a steep right edge |
CN107431471A (zh) * | 2015-03-27 | 2017-12-01 | 株式会社村田制作所 | 弹性波谐振器、弹性波滤波器以及双工器 |
CN112088490A (zh) * | 2018-05-08 | 2020-12-15 | Rf360欧洲有限责任公司 | 用于超高频的具有复合衬底的saw装置 |
CN112840561A (zh) * | 2018-07-27 | 2021-05-25 | 福瑞斯恩系统 | 谐振腔表面声波(saw)滤波器 |
CN109374157A (zh) * | 2018-09-14 | 2019-02-22 | 北京遥测技术研究所 | 一种基于损耗检测的声表面波压力传感器 |
CN111200417A (zh) * | 2020-02-17 | 2020-05-26 | 无锡市好达电子有限公司 | 一种具有横模抑制功能的声表面波换能器及其制备方法 |
CN111510106A (zh) * | 2020-05-06 | 2020-08-07 | 中电科技德清华莹电子有限公司 | 一种声表面波谐振结构滤波器 |
CN111649839A (zh) * | 2020-06-10 | 2020-09-11 | 北京遥测技术研究所 | 一种非线性自校正的谐振型声表面波温度传感器 |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN113839645A (zh) * | 2021-11-26 | 2021-12-24 | 深圳新声半导体有限公司 | 一种体声波滤波器的提升带外抑制的方法及滤波器结构 |
CN114978099A (zh) * | 2022-05-09 | 2022-08-30 | 中国电子科技集团公司第二十六研究所 | 一种提高极窄带带宽新结构的声表滤波器 |
CN116470876A (zh) * | 2023-04-25 | 2023-07-21 | 中国电子科技集团公司第二十六研究所 | 一种声表面波器件 |
CN116470876B (zh) * | 2023-04-25 | 2024-03-12 | 中国电子科技集团公司第二十六研究所 | 一种声表面波器件 |
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CN112702040B (zh) | 2024-03-12 |
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