CN112354806A - Intelligent dispensing equipment for semiconductor products - Google Patents

Intelligent dispensing equipment for semiconductor products Download PDF

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Publication number
CN112354806A
CN112354806A CN202011315589.6A CN202011315589A CN112354806A CN 112354806 A CN112354806 A CN 112354806A CN 202011315589 A CN202011315589 A CN 202011315589A CN 112354806 A CN112354806 A CN 112354806A
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CN
China
Prior art keywords
plate
cylinder
lifting
block
dispensing
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Granted
Application number
CN202011315589.6A
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Chinese (zh)
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CN112354806B (en
Inventor
易佳朋
刘建辉
谢国荣
王华茂
黄辉
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Shenzhen Ait Precision Technology Co ltd
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Shenzhen Ait Precision Technology Co ltd
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Priority to CN202011315589.6A priority Critical patent/CN112354806B/en
Publication of CN112354806A publication Critical patent/CN112354806A/en
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Publication of CN112354806B publication Critical patent/CN112354806B/en
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C5/00Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work
    • B05C5/02Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work
    • B05C5/0208Apparatus in which liquid or other fluent material is projected, poured or allowed to flow on to the surface of the work the liquid or other fluent material being discharged through an outlet orifice by pressure, e.g. from an outlet device in contact or almost in contact, with the work for applying liquid or other fluent material to separate articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C13/00Means for manipulating or holding work, e.g. for separate articles
    • B05C13/02Means for manipulating or holding work, e.g. for separate articles for particular articles
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05CAPPARATUS FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05C9/00Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important
    • B05C9/08Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation
    • B05C9/12Apparatus or plant for applying liquid or other fluent material to surfaces by means not covered by any preceding group, or in which the means of applying the liquid or other fluent material is not important for applying liquid or other fluent material and performing an auxiliary operation the auxiliary operation being performed after the application
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05DPROCESSES FOR APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05D3/00Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials
    • B05D3/06Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation
    • B05D3/061Pretreatment of surfaces to which liquids or other fluent materials are to be applied; After-treatment of applied coatings, e.g. intermediate treating of an applied coating preparatory to subsequent applications of liquids or other fluent materials by exposure to radiation using U.V.
    • B05D3/065After-treatment
    • B05D3/067Curing or cross-linking the coating
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/6715Apparatus for applying a liquid, a resin, an ink or the like
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/68Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for positioning, orientation or alignment

Abstract

The invention relates to intelligent glue dispensing equipment for semiconductor products, which comprises a bottom plate, wherein a vertical main frame plate is arranged on the bottom plate, a mounting plate is arranged on the left side of the top end of the main frame plate, a Y shaft assembly is arranged on the mounting plate, an X shaft assembly is arranged on the Y shaft assembly, a visual glue dispensing mechanism is arranged on the X shaft assembly, a rotary adjusting mechanism is arranged on the front wall of the main frame plate, and a feeding mechanism is arranged on the bottom plate below the rotary adjusting mechanism; according to the invention, the Z shaft is separated from the X, Y shaft, the visual dispensing mechanism is arranged above the Z shaft, so that the space is greatly saved, the workpiece can rotate along the X shaft direction by arranging the rotary adjusting mechanism, the three-dimensional positioning of the workpiece in the X shaft direction is realized, the three-dimensional positioning of the workpiece in the Y shaft direction is realized by arranging the fine adjusting mechanism, the effect of accurate positioning dispensing is achieved, the dispensing precision and the assembling quality of parts are greatly improved, and the visual dispensing mechanism has good market application value.

Description

Intelligent dispensing equipment for semiconductor products
Technical Field
The invention relates to the field of dispensing equipment, in particular to intelligent dispensing equipment for semiconductor products.
Background
In the production process of some semiconductor products, in the existing semiconductor device manufacturing process, glue dispensing treatment is generally required to be carried out on semiconductor devices such as circuit boards and semiconductor chips, hot melt glue is dripped or coated on the products in the process, other parts and the products are firmly adhered together through the hot melt glue, the existing glue dispenser has the problems of large positioning errors, and the partial products are possibly scrapped due to errors of glue dispensing positions.
Disclosure of Invention
Aiming at the defects in the prior art, the invention aims to provide the intelligent dispensing equipment for the semiconductor product so as to solve the problem of accurate positioning of a dispenser. In order to achieve the purpose, the invention adopts the following technical scheme: the intelligent glue dispensing equipment for the semiconductor products comprises a bottom plate, wherein a vertical main frame plate is arranged on the bottom plate, a horizontal mounting plate is arranged on the left side of the top end of the main frame plate, a Y shaft assembly is arranged on the upper surface of the mounting plate, an X shaft assembly is arranged on the Y shaft assembly, a visual glue dispensing mechanism is arranged on the X shaft assembly, a rotary adjusting mechanism is arranged on the front wall of the main frame plate, and a feeding mechanism is arranged on the bottom plate corresponding to the lower part of the rotary adjusting mechanism;
the rotary adjusting mechanism comprises a Z-axis sliding table cylinder which is vertically arranged on the right side of the front wall of the main frame plate, the movable end of the Z-axis sliding table cylinder is provided with a horizontal overturning mounting plate, the upper surface of the overturning mounting plate is provided with an overturning motor fixing frame, the rear end surface of the turnover motor fixing frame is provided with a turnover motor, the front end surface is provided with a turnover shaft, the side surface and the bottom surface are respectively provided with a turnover detection component, the front end of a rotating shaft of the turnover motor is connected with the rear end of the turnover shaft through a coupler, the front end of the coupler is concentrically provided with a detection disc, the front end of the turning shaft is provided with a vertical turning fixing plate, the bottom end of the turning fixing plate is provided with a horizontal turning bottom plate, the upper surface of the turnover bottom plate is provided with a suction module, and two opposite corners of the turnover bottom plate are respectively provided with a fine adjustment fixing module and a fine adjustment driving module.
Preferably, the fine setting fixed module includes the slide rail supporting plate, the slide rail supporting plate is installed perpendicularly upset bottom plate upper surface, the antetheca of slide rail supporting plate is provided with first slide rail perpendicularly, sliding connection has first slider on the first slide rail, first cylinder propelling movement piece is installed perpendicularly to the front end of first slider, the upper surface of first cylinder propelling movement piece is provided with the first right angle locating piece of horizontally, the slide rail supporting plate with cylinder connecting block one and cylinder connecting block two are installed respectively to the same side of first cylinder propelling movement piece, install first cylinder of vertically on the cylinder connecting block one, the expansion end of first cylinder is connected cylinder connecting block two.
Preferably, the fine adjustment driving module comprises a slide rail fixing plate, the front end of the slide rail fixing plate is fixed on the lower surface of the turnover bottom plate, a vertical second slide rail is installed at the rear end of the slide rail fixing plate, a second slide block is connected to the second slide rail in a sliding manner, a second cylinder pushing block is installed on the second slide block, a third cylinder connecting block and a fourth cylinder connecting block are respectively installed on the same side surface of the slide rail fixing plate and the second cylinder pushing block, a vertical second cylinder is installed on the third cylinder connecting block, the movable end of the second cylinder is connected with the fourth cylinder connecting block, a horizontal third slide rail is installed on the upper surface of the second cylinder pushing block, a third slide block is installed on the third slide rail in a sliding manner, a slide seat fixing block is installed on the upper surface of the third slide block, and a right-angle positioning upper cover is installed on the upper surface of, the front end face of right angle location upper cover is provided with horizontally second right angle locating piece, second cylinder propelling movement piece with the slide fixed block install cylinder connecting block five and cylinder connecting block six respectively with the side, install horizontally third cylinder on the cylinder connecting block five, the expansion end of third cylinder is connected cylinder connecting block six.
Preferably, the workpiece fixing blocks are respectively installed on the right-angle sides of the inner side surfaces of the first right-angle positioning block and the second right-angle positioning block, which are opposite to each other.
Preferably, the overturn detection assembly comprises two sensor supports and two groove-shaped photoelectric sensors, the two sensor supports are respectively mounted on the side face and the bottom face of the overturn motor fixing frame, the groove-shaped photoelectric sensors are mounted on the sensor supports, and the circumference of the detection disc is located in induction grooves of the groove-shaped photoelectric sensors.
Preferably, the suction module comprises a turnover support plate, the turnover support plate is provided with two plates which are respectively and vertically arranged on the left side and the right side of the upper surface of the turnover bottom plate, the two plates are provided with horizontal sucker mounting plates which are connected to the top ends of the turnover support plate, and vacuum suckers are arranged on the upper surfaces of the sucker mounting plates and run through the bottoms of the vacuum suckers.
Preferably, the Y axle subassembly includes Y axle slip table cylinder, Y axle linear guide, Y axle slide, first spacing support, first response piece, Y axle slip table cylinder and Y axle linear guide are respectively along fore-and-aft direction parallel mount and are in the mounting panel upper surface, the expansion end of Y axle slip table cylinder with Y axle linear guide's activity end upper surface is connected respectively the bottom surface left end of Y axle slide, the left surface middle part of Y axle slide is provided with first response piece, first spacing support is on a parallel with Y axle linear guide and installs Y axle linear guide is left the mounting panel upper surface, limit switch is installed respectively at both ends around first spacing support.
Preferably, the X axle subassembly includes X axle fixed plate, X axle slip table cylinder, point and glues the connecting plate, a little glues bottom plate, the spacing support of second, second response piece, the X axle fixed plate is installed Y axle slide upper surface, horizontal installation is gone up to the leading flank of X axle fixed plate has X axle slip table cylinder, the movable part of X axle slip table cylinder is installed perpendicularly the connecting plate is glued to the point, the leading flank of gluing the connecting plate is installed perpendicularly the bottom plate is glued to the point, point is glued the bottom plate preceding terminal surface left side and is provided with the vertically spout, the trailing flank of gluing the connecting plate is installed the second response piece, the spacing support mounting of second is in the up end of X axle fixed plate, limit switch is installed respectively at the spacing support both ends of second.
Preferably, the visual dispensing mechanism comprises a camera fixing block, a CCD camera, a light source fixing plate, an annular LED light source, an adjusting clamping plate, an adjusting knob, a dispensing linear guide rail, a dispensing support frame, a dispensing buffering separation blade, a dispensing buffering shaft, a dispensing gun, a UV lamp and a UV lamp fixing frame, wherein the camera fixing block is slidably mounted in a chute on the front end surface of the dispensing bottom plate, the CCD camera is vertically mounted on the front end surface of the camera fixing block, the light source fixing plate is horizontally mounted on the dispensing bottom plate at the bottom end of the chute, the annular LED light source is mounted at the bottom end of the light source fixing plate, the adjusting clamping plate is horizontally mounted at the top end of the chute, the adjusting knob is spirally connected onto the adjusting clamping plate, the bottom end of the adjusting knob is connected with the top end of the camera fixing block, and the dispensing linear guide rail, the movable end sliding connection who glues linear guide's point has the support frame is glued to the point, install on the support frame is glued to the point the rifle is glued to the point, glue the rifle top the point install the horizontally on the bottom plate the buffering separation blade is glued to the point, glue the buffering axle of gluing on the buffering piece perpendicular spiral connection the point, the bottom of gluing the buffering axle is connected the top of support frame is glued to the point, UV lamp mount sets up the light source fixed plate with between the rifle is glued to the point on the bottom plate, install on the UV lamp mount the UV lamp.
Preferably, the feed mechanism includes lifting cylinder mounting panel, lifting cylinder, lifting spout, lifting slide rail, lifting cylinder connecting plate, lifting suction head mounting panel, lifting shaft, lifting cover plate, lifting suction head, lifting cylinder mounting panel is installed perpendicularly in bottom plate upper surface front end, lifting cylinder mounting panel front end face is installed the lifting cylinder, lifting cylinder mounting panel's rear end face is installed perpendicularly the lifting spout, perpendicular sliding connection has in the lifting spout the lifting slide rail, lifting slide rail's top is connected the lower surface rear end of lifting cylinder connecting plate, lifting cylinder's expansion end is connected lifting cylinder connecting plate lower surface, four angles of lifting suction head mounting panel's bottom surface are installed perpendicularly respectively the lifting shaft, four lifting shaft's bottom respectively with lifting cylinder connecting plate sliding connection, the upper surface of the lifting suction head mounting plate is inlaid with the lifting suction head.
Compared with the prior art, the automatic glue dispensing device has the beneficial effects that by adopting the scheme, the automatic glue dispensing device is simple in structure and convenient to use, the Z shaft is separated from the X, Y shaft, the visual glue dispensing mechanism is arranged above the Z shaft, the space is greatly saved, the workpiece can rotate along the X shaft direction by arranging the rotary adjusting mechanism, the three-dimensional positioning of the workpiece in the X shaft direction is realized, the three-dimensional positioning of the workpiece in the Y shaft direction is realized by arranging the fine adjusting mechanism, the effect of multi-angle accurate positioning glue dispensing is achieved, the part glue dispensing precision and the assembling quality are greatly improved, and the automatic glue dispensing device has good market application value.
Drawings
FIG. 1 is a schematic view of the overall assembly structure of one embodiment of the present invention;
FIG. 2 is a schematic view of the rotation adjustment mechanism of the embodiment of FIG. 1 according to the present invention;
FIG. 3 is a schematic structural view of the turning detection assembly and the suction module of the embodiment of FIG. 1;
FIG. 4 is a schematic view of the fine tuning stent module of the embodiment of FIG. 1 of the present invention;
FIG. 5 is a left side schematic view of the trimming driver module according to the embodiment of FIG. 1;
FIG. 6 is a schematic diagram of a right side structure of the trimming driver module of the embodiment of FIG. 1 according to the present invention;
FIG. 7 is a schematic view of the Y-axis assembly of the embodiment of FIG. 1 of the present invention;
FIG. 8 is a rear perspective view of the X-axis assembly of the embodiment of FIG. 1 in accordance with the present invention;
FIG. 9 is a schematic view of the visual dispensing mechanism of the embodiment of FIG. 1 according to the present invention;
FIG. 10 is a schematic view of the feeding mechanism of the embodiment of FIG. 1 according to the present invention;
the figures above show: the device comprises a bottom plate 1, a main frame plate 2, a mounting plate 3, a Z-axis sliding table cylinder 4, a turnover mounting plate 5, a turnover motor fixing frame 6, a turnover motor 7, a turnover shaft 8, a coupler 9, a detection disc 10, a turnover fixing plate 11, a turnover bottom plate 12, a fine adjustment fixing module 13, a fine adjustment driving module 14, a slide rail supporting plate 20, a first slide rail 21, a first slide block 22, a first cylinder pushing block 23, a first right-angle positioning block 24, a cylinder connecting block I25, a cylinder connecting block II 26, a first cylinder 27, a slide rail fixing plate 30, a second slide rail 31, a second slide block 32, a second cylinder pushing block 33, a cylinder connecting block III 34, a cylinder connecting block IV 35, a second cylinder 36, a third slide rail 37, a third slide block 38, a slide block 39, a right-angle positioning upper cover 40, a second right-angle positioning block 41, a cylinder connecting block V42, a cylinder connecting block VI 43, The device comprises a sensor bracket 50, a groove-type photoelectric sensor 51, a turnover support plate 52, a sucker mounting plate 53, a vacuum sucker 54, a Y-axis sliding table cylinder 60, a Y-axis linear guide rail 61, a Y-axis sliding plate 62, a first limit bracket 63, a first sensing sheet 64, a groove-type limit switch 65, an X-axis fixing plate 70, an X-axis sliding table cylinder 71, a dispensing connecting plate 72, a dispensing bottom plate 73, a second limit bracket 74, a second sensing sheet 75, a camera fixing block 80, a CCD camera 81, a light source fixing plate 82, an annular LED light source 83, an adjusting clamping plate 84, an adjusting knob 85, a dispensing linear guide rail 86, a dispensing support frame 87, a dispensing buffer baffle plate 88, a dispensing buffer shaft 89, a dispensing gun 90, a UV lamp 91, a UV lamp fixing frame 92, a lifting cylinder mounting plate 112, a lifting cylinder 93, a lifting chute 94, a lifting slide rail 95, a lifting cylinder connecting plate 96, a lifting sucker mounting plate 97, Lifting a suction head 99, a glue discharging cylinder fixing frame 100, a glue discharging cylinder 101, a third induction sheet 102, a third limiting bracket 103 and a limiting switch 104.
Detailed Description
In order to facilitate an understanding of the invention, the invention is described in more detail below with reference to the accompanying drawings and specific examples. Preferred embodiments of the present invention are shown in the drawings. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
It will be understood that when an element is referred to as being "secured to" another element, it can be directly on the other element or intervening elements may also be present. When an element is referred to as being "connected" to another element, it can be directly connected to the other element or intervening elements may also be present. The terms "vertical," "horizontal," "left," "right," "front," "rear," and the like as used herein are for descriptive purposes only.
Unless defined otherwise, all technical and scientific terms used herein have the same meaning as commonly understood by one of ordinary skill in the art to which this invention belongs. The terminology used in the description of the invention herein is for the purpose of describing particular embodiments only and is not intended to be limiting of the invention.
As shown in fig. 1 to 10, an embodiment of the present invention is an intelligent dispensing apparatus for semiconductor products, including a base plate 1, a vertical main frame plate 2 is disposed on the base plate 1, a horizontal mounting plate 3 is disposed on the left side of the top end of the main frame plate 2, a Y-axis assembly is disposed on the upper surface of the mounting plate 3, an X-axis assembly is disposed on the Y-axis assembly, a visual dispensing mechanism is disposed on the X-axis assembly, a rotation adjusting mechanism is disposed on the front wall of the main frame plate, and a feeding mechanism is disposed on the base plate below the rotation adjusting mechanism;
the rotary adjusting mechanism comprises a Z-axis sliding table cylinder 4, the Z-axis sliding table cylinder 4 is vertically installed on the right side of the front wall of the main frame plate 2, the movable end of the Z-axis sliding table cylinder 4 is provided with a horizontal overturning mounting plate 5, the upper surface of the overturning mounting plate 5 is provided with an overturning motor fixing frame 6, the rear end surface of the overturning motor fixing frame 6 is provided with an overturning motor 7, the front end surface is provided with an overturning shaft 8, the side surface and the bottom surface are respectively provided with an overturning detection component, the front end of a rotating shaft of the overturning motor 7 and the rear end of the overturning shaft 8 are connected through a coupler 9, a detection disc 10 is concentrically installed at the front end of the coupler 9, the front end of the overturning shaft 8 is provided with a vertical overturning fixing plate 11, the bottom end of the overturning fixing plate 11 is provided with a horizontal overturning bottom plate 12, the upper surface of the overturning bottom plate 12 is provided with a, the right rear angle of the upper surface of the turnover bottom plate 12 is provided with a fine adjustment driving module 14, the Z-axis sliding table cylinder drives the turnover mounting plate to move up and down, the turnover motor drives the turnover fixing plate to rotate, and the turnover detection assembly detects the displacement of the detection disc so as to control the rotation angle of the turnover motor.
Preferably, the fine adjustment fixing module 13 includes a slide rail support plate 20, the slide rail support plate 20 is installed perpendicularly the upper surface of the turnover bottom plate 12, the antetheca of the slide rail support plate 20 is provided with a first slide rail 21 perpendicularly, sliding connection has a first slider 22 on the first slide rail 21, a first cylinder propelling movement block 23 is installed perpendicularly to the front end of the first slider 22, the upper surface of the first cylinder propelling movement block 23 is provided with a first right angle positioning block 24 of horizontally, the slide rail support plate 20 with a cylinder connecting block 25 and a cylinder connecting block two 26 are installed respectively to the same side of the first cylinder propelling movement block 23, a first cylinder 27 of vertically is installed on the cylinder connecting block 25, the movable end of the first cylinder 27 is connected with the cylinder connecting block two 26.
Preferably, the fine adjustment driving module 14 includes a slide rail fixing plate 30, the front end of the slide rail fixing plate 30 is fixed on the lower surface of the turnover bottom plate 12, a vertical second slide rail 31 is installed at the rear end of the slide rail fixing plate 30, a second slide block 32 is slidably connected to the second slide rail 31, a second cylinder pushing block 33 is installed on the second slide block 32, a cylinder connecting block third 34 and a cylinder connecting block fourth 35 are respectively installed on the same side surface of the slide rail fixing plate 30 and the second cylinder pushing block 33, a vertical second cylinder 36 is installed on the cylinder connecting block third 34, the movable end of the second cylinder 36 is connected to the cylinder connecting block fourth 35, a horizontal third slide rail 37 is installed on the upper surface of the second cylinder pushing block 33, a third slide block 38 is installed on the third slide rail 37, a slide fixing block 39 is installed on the third slide block 38, surface mounting has right angle location upper cover 40 on the slide fixed block 39, the preceding terminal surface of right angle location upper cover 40 is provided with horizontally second right angle locating piece 41, second cylinder propelling movement piece 33 with slide fixed block 39 install cylinder connecting block five 42 and cylinder connecting block six 43 respectively with the side, install horizontally third cylinder 44 on cylinder connecting block five 42, the expansion end of third cylinder 44 is connected cylinder connecting block six 43.
The fine adjustment fixing module and the fine adjustment driving module are matched to clamp the workpiece, and the front end and the rear end of the workpiece are adjusted in the vertical position.
Preferably, the first cylinder, the second cylinder and the third cylinder are needle-shaped cylinders, the needle-shaped cylinders are small in size and high in precision, and the types of the needle-shaped cylinders are as follows: PNAD-12X 10-B.
Preferably, the workpiece fixing blocks 45 are respectively installed on the right-angle sides of the inner side surfaces of the first right-angle positioning block 24 and the second right-angle positioning block 41, and the workpiece fixing blocks can be replaced and are suitable for products of different specifications.
Preferably, upset detection subassembly includes sensor support 50 and notch type photoelectric sensor 51, sensor support 50 has two, installs respectively on the side and the bottom surface of upset motor mount 6, install on the sensor support 50 notch type photoelectric sensor 51, the circumference that detects disc 10 is located in notch type photoelectric sensor's induction tank, upset detection subassembly detects detection disc turned position, and the cooperation rotating electrical machines rotates to adjustment work piece rotation angle. The groove type photoelectric sensor is the prior art, and the model is: EE-SX 672.
Preferably, the suction module comprises two turnover support plates 52, the two turnover support plates 52 are respectively and vertically arranged on the left side and the right side of the upper surface of the turnover bottom plate 12, the horizontal suction cup mounting plates 53 are connected to the top ends of the turnover support plates 52, vacuum suction cups 54 are arranged on the upper surfaces of the suction cup mounting plates 53, and the bottom of each vacuum suction cup 54 penetrates through the suction cup mounting plates 53.
Preferably, the Y axle subassembly includes Y axle slip table cylinder 60, Y axle linear guide 61, Y axle slide 62, first spacing support 63, first response piece 64, recess type limit switch 65, Y axle slip table cylinder 60 and Y axle linear guide 61 are respectively along fore-and-aft direction parallel mount in the 3 upper surfaces of mounting panel, the expansion end of Y axle slip table cylinder 60 with the activity of Y axle linear guide 61 is served the upper surface and is connected respectively Y axle slide 62's bottom surface left end, Y axle slide 62's left surface middle part is provided with first response piece 64, first spacing support 63 is on a parallel with Y axle linear guide 61 and installs Y axle linear guide 61 is left the 3 upper surfaces of mounting panel, recess type limit switch 65 is installed respectively to the front and back both ends of first spacing support 63, the recess type limit switch model is: EE-SX 674.
Preferably, the X axle subassembly includes X axle fixed plate 70, X axle slip table cylinder 71, a little glue connecting plate 72, a little glue bottom plate 73, the spacing support 74 of second, the response piece 75 of second, X axle fixed plate 70 installs Y axle slide 62 upper surface, horizontal installation is gone up to the leading flank of X axle fixed plate 70X axle slip table cylinder 71, the movable part of X axle slip table cylinder 71 is installed perpendicularly a little glue connecting plate 72, the leading flank of a little glue connecting plate 72 is installed perpendicularly a little glue bottom plate 73, a little glue bottom plate 73 preceding terminal surface left side is provided with vertically spout 76, the trailing flank of a little glue connecting plate 72 installs the second response piece 75, the spacing support 74 of second is installed the up end of X axle fixed plate 70, recess type limit switch is installed respectively at the spacing support 74 both ends of second.
X axle slip table cylinder, Y axle slip table cylinder, Z axle slip table cylinder are the accurate slip table of KK 60.
Preferably, the vision dispensing mechanism comprises a camera fixing block 80, a CCD camera 81, a light source fixing plate 82, an annular LED light source 83, an adjusting clamping plate 84, an adjusting knob 85, a dispensing linear guide rail 86, a dispensing support frame 87, a dispensing buffering baffle 88, a dispensing buffering shaft 89, a dispensing gun 90, a UV lamp 91 and a UV lamp fixing frame 92, wherein the camera fixing block 80 is slidably mounted in a chute of the front end surface of the dispensing bottom plate, the CCD camera 81 is vertically mounted on the front end surface of the camera fixing block 80, the light source fixing plate 82 is horizontally mounted on the dispensing bottom plate at the bottom end of the chute, the annular LED light source 83 is mounted at the bottom end of the light source fixing plate 82, the horizontal adjusting clamping plate 84 is mounted at the top end of the chute, the adjusting knob 85 is spirally connected on the adjusting clamping plate 84, and the bottom end of the adjusting knob 85 is connected with the, the point is glued linear guide 86 and is installed perpendicularly the leading flank right-hand member of bottom plate is glued to the point, the expansion end sliding connection who glues linear guide 86 is glued support frame 87 is glued to the point, install on the point support frame 87 glue rifle 90, glue rifle 90 top the point is glued and is installed the horizontally on the bottom plate the point and glue buffering separation blade 88, the perpendicular spiral connection on the buffering piece is glued to the point and is glued buffering axle 89, the bottom of gluing buffering axle 89 is connected the top of point support frame 87, the UV lamp mount sets up light source fixed plate 82 with glue between the rifle 90 on the bottom plate is glued to the point, install on the UV lamp mount 92 UV lamp 91.
Preferably, feed mechanism includes lift cylinder mounting panel 112, lift cylinder 93, lift spout 94, lift slide rail 95, lift cylinder connecting plate 96, lift suction head mounting panel 97, lift axle 98, lift suction head 99, lift cylinder mounting panel 112 is installed perpendicularly bottom plate 1 upper surface front end, lift cylinder mounting panel 112 front end face is installed perpendicularly upwards lift cylinder 93, lift cylinder mounting panel 112's rear end face is installed perpendicularly lift spout 94, it has perpendicularly sliding connection in the spout 94 to lift slide rail 95, the top of lifting slide rail 95 is connected the lower surface rear end of lift cylinder connecting plate 96, the expansion end of lift cylinder 93 is connected lift cylinder connecting plate 96 lower surface, four angles in the bottom surface of lifting suction head mounting panel 97 are installed perpendicularly respectively lift axle 98, four lift axle 98 the bottom respectively with lift cylinder connecting plate 96 sliding connection, the upper surface of lifting suction head mounting panel 97 is inlayed and is had lifting suction head 99 is preferred, four lift epaxial spring of installing respectively.
Preferably, the right end of the upper surface of the turnover mounting plate 5 is provided with a glue discharging cylinder fixing frame 100, and the glue discharging cylinder fixing frame 100 is provided with a glue discharging cylinder 101.
Preferably, a third induction sheet 102 is installed on the right side surface of the movable end of the Z-axis sliding table cylinder 4, a vertical third limiting support 103 is installed on the main frame plate 2 on the right side of the Z-axis sliding table cylinder 4, and limit switches 104 are installed at the upper end and the lower end of the third limiting support 103 respectively.
The working principle is as follows: in the intelligent glue dispensing device for semiconductor products in the embodiment, at the beginning of the operation of the device, a worker firstly adjusts the motion position of each part and the position of a photoelectric switch to ensure that the device is suitable for a processed product, firstly, a workpiece to be processed is placed on a lifting suction head through a manipulator or manually, the lifting suction head sucks the workpiece, a lifting cylinder pushes the workpiece to move upwards, a Z-axis sliding table cylinder moves downwards, a turnover motor rotates to enable a suction module to move downwards, a vacuum chuck sucks the workpiece, the turnover motor rotates to enable the workpiece to move upwards, an X-axis component and a Y-axis component are matched to drive a visual glue dispensing mechanism to work, a CCD camera observes the glue dispensing position, a fine adjustment driving module and a fine adjustment fixing module are matched to clamp the workpiece, the upper and lower position of the front end and the lower end of the workpiece are adjusted, the turnover motor rotates, the workpiece rotating position is adjusted through a turnover, and (4) solidifying the UV lamp, after the dispensing process is finished, placing the workpiece on the sucker mounting plate by the fine-tuning driving module and the fine-tuning fixing module, sucking the workpiece by the vacuum sucker, rotating the overturning motor, placing the workpiece on the lifting suction head, and returning the lifting cylinder to the original position to finish the whole process.
The technical features mentioned above are combined with each other to form various embodiments which are not listed above, and all of them are regarded as the scope of the present invention described in the specification; also, modifications and variations may be suggested to those skilled in the art in light of the above teachings, and it is intended to cover all such modifications and variations as fall within the true spirit and scope of the invention as defined by the appended claims.

Claims (10)

1. An intelligent glue dispensing device for semiconductor products is characterized by comprising a bottom plate, wherein a vertical main frame plate is arranged on the bottom plate, a horizontal mounting plate is arranged on the left side of the top end of the main frame plate, a Y shaft assembly is arranged on the upper surface of the mounting plate, an X shaft assembly is arranged on the Y shaft assembly, a visual glue dispensing mechanism is arranged on the X shaft assembly, a rotary adjusting mechanism is arranged on the front wall of the main frame plate, and a feeding mechanism is arranged on the bottom plate corresponding to the lower part of the rotary adjusting mechanism;
the rotary adjusting mechanism comprises a Z-axis sliding table cylinder which is vertically arranged on the right side of the front wall of the main frame plate, the movable end of the Z-axis sliding table cylinder is provided with a horizontal overturning mounting plate, the upper surface of the overturning mounting plate is provided with an overturning motor fixing frame, the rear end surface of the turnover motor fixing frame is provided with a turnover motor, the front end surface is provided with a turnover shaft, the side surface and the bottom surface are respectively provided with a turnover detection component, the front end of a rotating shaft of the turnover motor is connected with the rear end of the turnover shaft through a coupler, the front end of the coupler is concentrically provided with a detection disc, the front end of the turning shaft is provided with a vertical turning fixing plate, the bottom end of the turning fixing plate is provided with a horizontal turning bottom plate, the upper surface of the turnover bottom plate is provided with a suction module, and two opposite corners of the turnover bottom plate are respectively provided with a fine adjustment fixing module and a fine adjustment driving module.
2. The intelligent semiconductor product dispensing device according to claim 1, wherein the fine adjustment fixing module comprises a slide rail support plate, the slide rail support plate is vertically installed on the upper surface of the turnover bottom plate, a first slide rail is vertically arranged on the front wall of the slide rail support plate, a first slide block is slidably connected onto the first slide rail, a first cylinder pushing block is vertically installed at the front end of the first slide block, a horizontal first right-angle positioning block is arranged on the upper surface of the first cylinder pushing block, a first cylinder connecting block and a second cylinder connecting block are respectively installed on the same side surface of the slide rail support plate and the first cylinder pushing block, a first vertical cylinder is installed on the first cylinder connecting block, and the movable end of the first cylinder is connected with the second cylinder connecting block.
3. The intelligent semiconductor product dispensing device of claim 2, wherein the fine adjustment driving module comprises a slide rail fixing plate, the front end of the slide rail fixing plate is fixed on the lower surface of the turnover bottom plate, the rear end of the slide rail fixing plate is provided with a vertical second slide rail, the second slide rail is connected with a second sliding block in a sliding manner, the second sliding block is provided with a second cylinder pushing block, the same side surfaces of the slide rail fixing plate and the second cylinder pushing block are respectively provided with a cylinder connecting block III and a cylinder connecting block IV, the cylinder connecting block III is provided with a vertical second cylinder, the movable end of the second cylinder is connected with the cylinder connecting block IV, the upper surface of the second cylinder pushing block is provided with a horizontal third slide rail, the third slide rail is provided with a third sliding block in a sliding manner, and the upper surface of the third sliding block is provided with a sliding seat fixing block, slide fixed block upper surface mounting has the right angle location upper cover, the preceding terminal surface of right angle location upper cover is provided with horizontally second right angle locating piece, second cylinder propelling movement piece with cylinder connecting block five and cylinder connecting block six are installed respectively to the same side of slide fixed block, install horizontally third cylinder on the cylinder connecting block five, the expansion end of third cylinder is connected cylinder connecting block six.
4. The intelligent semiconductor product dispensing device of claim 3, wherein workpiece fixing blocks are respectively mounted on the right-angled sides of the opposite inner sides of the first right-angled positioning block and the second right-angled positioning block.
5. The intelligent semiconductor product dispensing device of claim 1, wherein the flipping detection assembly comprises two sensor brackets and two groove-type photoelectric sensors, the two sensor brackets are respectively mounted on the side surface and the bottom surface of the flipping motor fixing frame, the groove-type photoelectric sensors are mounted on the sensor brackets, and the circumference of the detection disc is located in the sensing groove of the groove-type photoelectric sensors.
6. An intelligent semiconductor product dispensing device according to claim 1, wherein the suction module comprises two turnover support plates vertically disposed at the left and right sides of the upper surface of the turnover base plate, a horizontal suction cup mounting plate is connected to the top ends of the two turnover support plates, a vacuum suction cup is disposed on the upper surface of the suction cup mounting plate, and the bottom of the vacuum suction cup penetrates through the suction cup mounting plate.
7. The intelligent semiconductor product dispensing device of claim 1, wherein the Y-axis assembly comprises a Y-axis sliding table cylinder, a Y-axis linear guide rail, a Y-axis sliding plate, a first limiting support and a first sensing piece, the Y-axis sliding table cylinder and the Y-axis linear guide rail are respectively installed on the upper surface of the mounting plate in parallel along the front-back direction, the movable end of the Y-axis sliding table cylinder and the upper surface of the movable end of the Y-axis linear guide rail are respectively connected with the left end of the bottom surface of the Y-axis sliding plate, the middle part of the left side surface of the Y-axis sliding plate is provided with the first sensing piece, the first limiting support is parallel to the Y-axis linear guide rail and installed on the left side of the Y-axis linear guide rail on the upper surface of the mounting plate, and limit switches are respectively installed at the.
8. The intelligent semiconductor product dispensing device of claim 7, the X-axis assembly comprises an X-axis fixing plate, an X-axis sliding table cylinder, a glue dispensing connecting plate, a glue dispensing bottom plate, a second limiting bracket and a second induction sheet, the X-axis fixing plate is arranged on the upper surface of the Y-axis sliding plate, the X-axis sliding table cylinder is horizontally arranged on the front side surface of the X-axis fixing plate, the movable part of the X-axis sliding table cylinder is vertically provided with the dispensing connecting plate, the front side surface of the dispensing connecting plate is vertically provided with the dispensing bottom plate, the left side of the front end surface of the dispensing bottom plate is provided with a vertical chute, the back side surface of the dispensing connecting plate is provided with the second induction sheet, the second limiting support is arranged on the upper end face of the X-axis fixing plate, and two ends of the second limiting support are respectively provided with a limiting switch.
9. The intelligent semiconductor product dispensing device according to claim 8, wherein the visual dispensing mechanism comprises a camera fixing block, a CCD camera, a light source fixing plate, an annular LED light source, an adjusting clamp plate, an adjusting knob, a dispensing linear guide rail, a dispensing support frame, a dispensing buffer baffle, a dispensing buffer shaft, a dispensing gun, a UV lamp and a UV lamp fixing frame, the camera fixing block is slidably mounted in a chute on the front end surface of the dispensing bottom plate, the CCD camera is vertically mounted on the front end surface of the camera fixing block, the light source fixing plate is horizontally mounted on the dispensing bottom plate at the bottom end of the chute, the annular LED light source is mounted at the bottom end of the light source fixing plate, the horizontal adjusting clamp plate is mounted at the top end of the chute, the adjusting knob is spirally connected to the adjusting clamp plate, and the bottom end of the adjusting knob is connected with the top end of the camera fixing block, the point is glued linear guide and is installed perpendicularly the leading flank right-hand member of bottom plate is glued to the point, the expansion end sliding connection who glues linear guide is glued the support frame is glued to the point, install on the support frame is glued to the point the rifle is glued, glue the rifle top point install the horizontally on the bottom plate the point glue buffering separation blade, glue the perpendicular spiral connection on the buffering piece and glue buffering axle, the bottom of gluing buffering axle is connected the top of support frame is glued to the point, the UV lamp mount sets up the light source fixed plate with between the point is glued the rifle on the bottom plate is glued to the point, install on the UV lamp mount the UV lamp.
10. The intelligent semiconductor product dispensing device according to claim 1, wherein the feeding mechanism comprises a lifting cylinder mounting plate, a lifting cylinder, a lifting chute, a lifting slide rail, a lifting cylinder connecting plate, a lifting suction head mounting plate, a lifting shaft, a lifting cover plate and a lifting suction head, the lifting cylinder mounting plate is vertically mounted at the front end of the upper surface of the bottom plate, the lifting cylinder is mounted on the front end surface of the lifting cylinder mounting plate, the lifting chute is vertically mounted on the rear end surface of the lifting cylinder mounting plate, the lifting slide rail is vertically slidably connected in the lifting chute, the top end of the lifting slide rail is connected with the rear end of the lower surface of the lifting cylinder connecting plate, the movable end of the lifting cylinder is connected with the lower surface of the lifting cylinder connecting plate, and the lifting shaft is vertically mounted at four corners of the bottom surface of the lifting suction head mounting plate respectively, four the bottom of lifting the axle respectively with lift cylinder connecting plate sliding connection, the upper surface of lifting the suction head mounting panel is inlayed and is had the lifting suction head.
CN202011315589.6A 2020-11-21 2020-11-21 Intelligent dispensing equipment for semiconductor products Active CN112354806B (en)

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