CN112222967A - Silicon ingot tumbling mill equipment - Google Patents

Silicon ingot tumbling mill equipment Download PDF

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Publication number
CN112222967A
CN112222967A CN202011114538.7A CN202011114538A CN112222967A CN 112222967 A CN112222967 A CN 112222967A CN 202011114538 A CN202011114538 A CN 202011114538A CN 112222967 A CN112222967 A CN 112222967A
Authority
CN
China
Prior art keywords
grinding
pressing
silicon ingot
roller
pair
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202011114538.7A
Other languages
Chinese (zh)
Inventor
李喜尼
黄智伟
黄斯哲
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Jiangxi Sentong New Material Technology Co ltd
Original Assignee
Jiangxi Sentong New Material Technology Co ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Jiangxi Sentong New Material Technology Co ltd filed Critical Jiangxi Sentong New Material Technology Co ltd
Priority to CN202011114538.7A priority Critical patent/CN112222967A/en
Publication of CN112222967A publication Critical patent/CN112222967A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B5/00Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor
    • B24B5/18Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor involving centreless means for supporting, guiding, floating or rotating work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/04Headstocks; Working-spindles; Features relating thereto
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B47/00Drives or gearings; Equipment therefor
    • B24B47/22Equipment for exact control of the position of the grinding tool or work at the start of the grinding operation
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B5/00Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor
    • B24B5/18Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor involving centreless means for supporting, guiding, floating or rotating work
    • B24B5/307Means for supporting work
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B5/00Machines or devices designed for grinding surfaces of revolution on work, including those which also grind adjacent plane surfaces; Accessories therefor
    • B24B5/35Accessories

Abstract

The silicon ingot barreling equipment comprises a grinding part, a driving part, a pressing part and a silicon ingot, wherein the driving part is arranged on the side part of the grinding part, the pressing part is positioned above the grinding part, and the silicon ingot is arranged between the grinding part and the driving part in a specified mode. The grinding part comprises a base, a grinding roller, a driven wheel, a platform and side plates, the base is provided with a pair of single lugs which are arranged side by side, a pair of grinding rollers are arranged between the pair of bases, the outer end of a rotating shaft of the grinding roller is provided with the driven wheel, the platform extends from the outer end of the base on the same side as the driven wheel, and the side plates are arranged on the inner side of the platform in an upward mode. The drive part comprises a motor and a driving wheel, the motor is arranged on the platform, and an output shaft of the motor is connected with the driving wheel. The pressing part comprises a support, a pressing roller, a pressing column, a supporting column, a spring and a nut, the support is provided with a pair of supporting rods, the support is arranged on the ground, the pressing roller is arranged on the support, and the pressing roller presses the silicon ingot. And the compressing columns are arranged above two ends of the rotating shaft of the compressing roller.

Description

Silicon ingot tumbling mill equipment
Technical Field
The invention belongs to the technical field of chip manufacturing, and particularly relates to silicon ingot barreling equipment.
Background
The manufacturing process of the chip has a plurality of links, wherein one important step is to slice the prepared monocrystalline silicon ingot to obtain a silicon wafer, one important step in the slicing of the silicon wafer is to carry out scale on the silicon ingot, and at the moment, because the outer diameter surface of the grown monocrystalline silicon ingot is not even, the diameter of the grown monocrystalline silicon ingot is larger than the diameter specification specified by the final polished lens, the precise diameter of the silicon ingot needs to be obtained through outer diameter roll grinding. The operation usually requires special equipment, and a large amount of special equipment is currently applied to the field, but most of the equipment has complex structure, high cost and complex operation.
Disclosure of Invention
The invention provides silicon ingot barreling equipment to solve the problems in the background technology.
The technical problem solved by the invention is realized by adopting the following technical scheme:
the silicon ingot barreling equipment comprises a grinding part, a driving part, a pressing part and a silicon ingot, wherein the driving part is installed on the side part of the grinding part, the pressing part is positioned above the grinding part, and the silicon ingot barreling equipment is installed between the grinding part and the driving part in a specified mode.
The grinding part comprises a base, a grinding roller, a driven wheel, a platform and side plates, the base is provided with a pair of single lugs which are arranged side by side, a pair of grinding rollers are arranged between the pair of bases, the outer end of a rotating shaft of the grinding roller is provided with the driven wheel, the two driven wheels are arranged on the same side of the base, the platform extends from the outer end of the base on the same side of the driven wheel, and the side plates are arranged on the inner side of the platform in an upward mode. The drive division includes motor and action wheel, and the motor is installed at the platform, and the output shaft of motor takes turns the action wheel, and the action wheel is installed between the auricle of curb plate and base, and the action wheel meshes with two driven wheels simultaneously. The pressing part comprises a support, a pressing roller, a pressing column, a supporting column, a spring and a nut, the support is provided with a pair of supporting rods, the support is arranged on the ground, the pressing roller is arranged on the support, and the pressing roller presses the silicon ingot. The compressing roller can slide up and down on the support, the compressing columns are installed above two ends of a rotating shaft of the compressing roller, the supporting columns are installed below two ends of the rotating shaft of the compressing roller, the supporting columns are installed on the support through a pair of nuts, springs are sleeved on the compressing columns, and the compressing columns extrude the compressing roller downwards to know that the compressing roller abuts against the supporting columns under the action of the springs.
Furthermore, the grinding roller is a silicon ingot grinding part, and the surface of the grinding roller is provided with abrasive grains with proper meshes, so that the silicon ingot can be ground.
Furthermore, the surface of the pressing roller is also provided with abrasive grains, so that the silicon ingot is also ground.
Further, the support is including rising the frame, the riser, the spout, go up auricle and auricle down, it stands in ground to rise the frame, install the riser on the upper portion crossbeam of rising the frame, the riser middle part has the spout, on the pivot installation spout of pinch roller, the pinch roller can slide from top to bottom in the spout, the riser top has auricle, it installs and downwardly extending on the auricle to compress tightly the post, the spring is located compresses tightly post and auricle below, the riser bottom has auricle down, the support column is installed on auricle down, a pair of nut is installed respectively in auricle's top and below down, adjust the altitude mixture control and the operation that compresses tightly that a pair of nut can realize the support column simultaneously.
Furthermore, a pair of rollers is installed at the top end of the supporting column, and the pair of rollers tangentially supports a rotating shaft of the pressing roller, so that friction force is reduced. Similarly, the bottom of the compression column has the same structural features as the top of the support column.
The invention has the beneficial effects that:
the silicon ingot grinding device is used for silicon ingot grinding operation in the production process of chips, has a good automatic centering function, can ensure the roundness of the silicon ingot after grinding, has an accurate diameter determining function, and can obtain the adjusted silicon ingot size at last after grinding.
Drawings
FIG. 1 is a schematic view of the present invention;
FIG. 2 is a right side view of the present invention;
FIG. 3 is an exploded view of the present invention;
in the figure: 10. the grinding machine comprises a grinding part, 11 parts of a base, 12 parts of a grinding roller, 13 parts of a driven wheel, 14 parts of a platform, 15 parts of a side plate, 20 parts of a driving part, 21 parts of a motor, 22 parts of a driving wheel, 30 parts of a pressing part, 31 parts of a support, 311 parts of a lifting frame, 312 parts of a vertical plate, 313 parts of a sliding groove, 314 parts of an upper lug, 315 parts of a lower lug, 32 parts of a pressing roller, 33 parts of a pressing column, 34 parts of a supporting column, 341 parts of a roller, 35 parts of a spring, 36 parts of a nut and 40 parts.
Detailed Description
To facilitate an understanding of the invention, the invention will now be described more fully with reference to the accompanying drawings. Preferred embodiments of the present invention are shown in the drawings. This invention may, however, be embodied in many different forms and should not be construed as limited to the embodiments set forth herein. Rather, these embodiments are provided so that this disclosure will be thorough and complete.
Referring to fig. 1 to 3, the silicon ingot barreling apparatus includes a grinding part 10, a driving part 20, a pressing part 30, and a silicon ingot 40, wherein the driving part 20 is installed at a side of the grinding part 10, the pressing part 30 is located above the grinding part 10, and the ingot 40 is installed between the grinding part 10 and the driving part 20.
Grinding portion 10 includes base 11, grinding rod 12, from driving wheel 13, platform 14 and curb plate 15, base 11 has a pair ofly, two monads that arrange side by side have on the base 11, install a pair of grinding rod 12 between a pair of base 11, grinding rod 12 is the grinding part of silicon ingot, grinding rod 12 surface has the suitable grit of mesh number, play the effect of grinding to the silicon ingot, interval between the grinding rod 12 should arrange according to the diameter of silicon ingot, make the silicon ingot erect on two grinding rod 12, the installation of the pivot outer end of grinding rod 12 is followed driving wheel 13, two are followed driving wheel 13 and are installed in the same one side of base 11, base 11 outer end with follow driving wheel 13 looks extension platform 14, installation drive portion 20 on platform 14, platform 14 inboard still has upward installation curb plate 15, install the pivot of drive portion 20 on the curb plate 15.
Drive division 20 includes motor 21 and action wheel 22, motor 21 installs at platform 14, motor 21's output shaft connects action wheel 22, action wheel 22 installs between the auricle of curb plate 15 and base 11, action wheel 22 meshes from driving wheel 13 with two simultaneously, action wheel 22 drives two simultaneously and rotates from driving wheel 13, it rotates to further drive grinding rod 12 from driving wheel 13, according to gear engagement's transmission principle, two grinding rods 12 rotate according to same direction of rotation and rotational speed, in order to realize the grinding of silicon bulk.
The pressing portion 30 includes a pair of brackets 31, a pressing roller 32, a pressing column 33, a support column 34, a spring 35, and a nut 36, the brackets 31 stand on the ground, the pressing roller 32 is installed on the brackets 31, the pressing roller 32 presses the silicon ingot 40, and meanwhile, the surface of the pressing roller 32 also has abrasive grains and has a grinding effect on the silicon ingot 40. The pressing roller 32 can slide up and down on the support 31, the pressing columns 33 are installed above two ends of the rotating shaft of the pressing roller 32, the pressing columns 33 extrude the pressing roller 32 downwards, further the silicon ingot 40 extrudes downwards, the grinding operation is gradually completed, the supporting columns 34 are installed below two ends of the rotating shaft of the pressing roller 32, the supporting columns 34 support the pressing roller 32, the supporting columns 34 are installed on the support 31 through the pair of nuts 36, the supporting columns 34 play a role in limiting downwards for the pressing roller 32, when the pressing roller 32 presses downwards to abut against the supporting columns 34, the pressing is not performed, at the moment, the final grinding diameter of the silicon ingot 40 is achieved, namely, the height adjustment of the supporting columns 34 is accurate, and the final diameter adjustment is performed according to the silicon ingot 40. The pressing column 33 is sleeved with a spring 35, and under the action of the spring 35, the pressing column 33 presses the pressing roller 32 downwards until the pressing roller 32 abuts against the supporting column 34.
The support 31 comprises a lifting frame 311, a vertical plate 312, a sliding groove 313, an upper lug 314 and a lower lug 315, the lifting frame 311 stands on the ground, the vertical plate 312 is mounted on an upper cross beam of the lifting frame 311, the sliding groove 313 is formed in the middle of the vertical plate 312, a rotating shaft of the pressing roller 32 is mounted on the sliding groove 313, the pressing roller 32 can slide up and down in the sliding groove 313, the upper lug 314 is arranged at the top of the vertical plate 312, the pressing column 33 is mounted on the upper lug 314 and extends downwards, the spring 35 is located below the pressing column 33 and the upper lug 314, the lower lug 315 is arranged at the bottom of the vertical plate 312, the supporting column 34 is mounted on the lower lug 315, the pair of nuts 36 are respectively mounted above and below the lower lug 315, and the height adjustment and the pressing operation of.
A pair of rollers 341 are installed at the top end of the supporting column 34, and the pair of rollers 341 tangentially supports the rotating shaft of the pressing roller 32, so that the friction force is reduced. Similarly, the bottom of compression column 33 has the same features as the top of support column 34.
The working principle of the invention is as follows: installing a silicon ingot barreling device according to the attached drawing, then lifting the pressing roller 32, putting the silicon ingot blank between the grinding roller 12 and the pressing roller 32, properly rotating the pressing roller 32 to enable the silicon ingot blank to be automatically centered, then starting the motor 21 to start grinding until the pressing roller 32 contacts the supporting column 34, and continuously grinding for a certain time to obtain the silicon ingot with accurate size. The device also has the function of automatic centering, and silicon ingot materials with higher roundness tolerance can be obtained only by properly improving the mounting precision of the two grinding rods 12 and the pressing roller 32.
The above examples mainly illustrate the silicon ingot barreling apparatus of the present invention. While only a limited number of embodiments and features have been described, those skilled in the art will recognize that the invention can be embodied in many other forms without departing from the spirit or scope thereof. The present embodiments are, therefore, to be considered in all respects as illustrative and not restrictive, and various modifications and alternative arrangements may be devised without departing from the spirit and scope of the present invention as defined by the appended claims.

Claims (5)

1. A silicon ingot tumbling mill device comprises a grinding part (10), a driving part (20), a pressing part (30) and a silicon ingot (40), and is characterized in that the driving part (20) is installed on the side part of the grinding part (10), the pressing part (30) is located above the grinding part (10), a rule (40) is installed between the grinding part (10) and the driving part (20), the grinding part (10) comprises a base (11), a grinding roller (12), a driven wheel (13), a platform (14) and a side plate (15), the base (11) is provided with a pair, the base (11) is provided with two lugs which are arranged side by side, a pair of grinding rollers (12) is installed between the pair of bases (11), the driven wheel (13) is installed at the outer end of a rotating shaft of the grinding rollers (12), the two driven wheels (13) are installed at the same side of the base (11), and the platform (14) extends from the outer end of the base (11) on the, the inner side of the platform (14) is also provided with an upward mounting side plate (15), the driving part (20) comprises a motor (21) and a driving wheel (22), the motor (21) is mounted on the platform (14), an output shaft of the motor (21) is connected with the driving wheel (22), the driving wheel (22) is mounted between the side plate (15) and an ear piece of the base (11), the driving wheel (22) is simultaneously meshed with two driven wheels (13), the pressing part (30) comprises a support (31), a pressing roller (32), a pressing column (33), a supporting column (34), a spring (35) and a nut (36), the support (31) is provided with a pair of supports, the support (31) is erected on the ground, the pressing roller (32) is mounted on the support (31), the pressing columns (33) are mounted above two ends of a rotating shaft of the pressing roller (32), the supporting columns (34) are mounted below two ends of the rotating shaft of the pressing roller (32), and the supporting columns, the pressing column (33) is sleeved with a spring (35).
2. The ingot tumbling apparatus of claim 1, wherein the grinding roller (12) has abrasive grains of a suitable mesh on its surface for grinding the ingot.
3. The silicon ingot barreling apparatus of claim 1, wherein the surface of the pressure roller (32) has abrasive grains.
4. The silicon ingot barreling apparatus of claim 1, wherein the support (31) comprises a rising frame (311), a rising plate (312), the lifting frame (311) is arranged on the ground, a vertical plate (312) is arranged on an upper cross beam of the lifting frame (311), the middle of the vertical plate (312) is provided with the sliding groove (313), a rotating shaft of a pressing roller (32) is arranged on the sliding groove (313), the pressing roller (32) can slide up and down in the sliding groove (313), the top of the vertical plate (312) is provided with an upper lug plate (314), a pressing column (33) is arranged on the upper lug plate (314) and extends downwards, a spring (35) is positioned below the pressing column (33) and the upper lug plate (314), the bottom of the vertical plate (312) is provided with a lower lug plate (315), a supporting column (34) is arranged on the lower lug plate (315), and a pair of nuts (36) are respectively arranged above and below the lower lug plate (315).
5. The silicon ingot barreling apparatus of claim 1, wherein a pair of rollers (341) is installed at the top end of the supporting column (34), and the pair of rollers (341) tangentially supports the rotation axis of the pressing roller (32).
CN202011114538.7A 2020-10-19 2020-10-19 Silicon ingot tumbling mill equipment Pending CN112222967A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202011114538.7A CN112222967A (en) 2020-10-19 2020-10-19 Silicon ingot tumbling mill equipment

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN202011114538.7A CN112222967A (en) 2020-10-19 2020-10-19 Silicon ingot tumbling mill equipment

Publications (1)

Publication Number Publication Date
CN112222967A true CN112222967A (en) 2021-01-15

Family

ID=74117850

Family Applications (1)

Application Number Title Priority Date Filing Date
CN202011114538.7A Pending CN112222967A (en) 2020-10-19 2020-10-19 Silicon ingot tumbling mill equipment

Country Status (1)

Country Link
CN (1) CN112222967A (en)

Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003175444A (en) * 2002-10-24 2003-06-24 Seiko Instruments Inc Outer-periphery grinding machine for ferrule
CN104191323A (en) * 2014-08-04 2014-12-10 芜湖中驰机床制造有限公司 Press-down type centerless grinding machine
CN204075892U (en) * 2014-07-20 2015-01-07 安庆市亿豪工贸发展有限公司 A kind of swing arm device of piston rod processing of improvement
CN110815006A (en) * 2019-12-03 2020-02-21 杨弃 Steel pipe fixing and derusting equipment for different pipe diameters
CN210189282U (en) * 2019-06-19 2020-03-27 天津顺永荣科技有限公司 Port grinding device for steel pipe machining

Patent Citations (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2003175444A (en) * 2002-10-24 2003-06-24 Seiko Instruments Inc Outer-periphery grinding machine for ferrule
CN204075892U (en) * 2014-07-20 2015-01-07 安庆市亿豪工贸发展有限公司 A kind of swing arm device of piston rod processing of improvement
CN104191323A (en) * 2014-08-04 2014-12-10 芜湖中驰机床制造有限公司 Press-down type centerless grinding machine
CN210189282U (en) * 2019-06-19 2020-03-27 天津顺永荣科技有限公司 Port grinding device for steel pipe machining
CN110815006A (en) * 2019-12-03 2020-02-21 杨弃 Steel pipe fixing and derusting equipment for different pipe diameters

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