CN112067436A - Method for testing lead strength of beam type device - Google Patents
Method for testing lead strength of beam type device Download PDFInfo
- Publication number
- CN112067436A CN112067436A CN202010760630.4A CN202010760630A CN112067436A CN 112067436 A CN112067436 A CN 112067436A CN 202010760630 A CN202010760630 A CN 202010760630A CN 112067436 A CN112067436 A CN 112067436A
- Authority
- CN
- China
- Prior art keywords
- gold
- lead
- substrate
- plated
- tested
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000012360 testing method Methods 0.000 title claims abstract description 46
- 238000000034 method Methods 0.000 title claims abstract description 34
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 claims abstract description 70
- 239000000758 substrate Substances 0.000 claims abstract description 60
- 238000009864 tensile test Methods 0.000 claims abstract description 11
- 238000005259 measurement Methods 0.000 claims abstract description 8
- 239000010931 gold Substances 0.000 claims description 24
- 229910052737 gold Inorganic materials 0.000 claims description 24
- 239000010409 thin film Substances 0.000 claims description 8
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 239000000463 material Substances 0.000 claims description 5
- PNEYBMLMFCGWSK-UHFFFAOYSA-N Alumina Chemical compound [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 claims description 4
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 4
- 229910052802 copper Inorganic materials 0.000 claims description 4
- 239000010949 copper Substances 0.000 claims description 4
- 230000004323 axial length Effects 0.000 claims description 3
- 229910010293 ceramic material Inorganic materials 0.000 claims description 3
- 239000002184 metal Substances 0.000 claims description 3
- 229910052751 metal Inorganic materials 0.000 claims description 3
- 235000014820 Galium aparine Nutrition 0.000 claims 4
- 240000005702 Galium aparine Species 0.000 claims 4
- 238000009713 electroplating Methods 0.000 claims 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 abstract description 9
- 238000010998 test method Methods 0.000 description 17
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 6
- 238000011156 evaluation Methods 0.000 description 6
- 229910052710 silicon Inorganic materials 0.000 description 6
- 239000010703 silicon Substances 0.000 description 6
- 230000001066 destructive effect Effects 0.000 description 5
- 239000010408 film Substances 0.000 description 5
- 238000012986 modification Methods 0.000 description 3
- 230000004048 modification Effects 0.000 description 3
- 230000007812 deficiency Effects 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 2
- 239000002648 laminated material Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 238000009434 installation Methods 0.000 description 1
- 238000004377 microelectronic Methods 0.000 description 1
- 238000004806 packaging method and process Methods 0.000 description 1
- 230000003071 parasitic effect Effects 0.000 description 1
- 238000007585 pull-off test Methods 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000010561 standard procedure Methods 0.000 description 1
- 238000012795 verification Methods 0.000 description 1
Images
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N3/00—Investigating strength properties of solid materials by application of mechanical stress
- G01N3/08—Investigating strength properties of solid materials by application of mechanical stress by applying steady tensile or compressive forces
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
- G01N19/00—Investigating materials by mechanical methods
- G01N19/04—Measuring adhesive force between materials, e.g. of sealing tape, of coating
Landscapes
- Physics & Mathematics (AREA)
- Health & Medical Sciences (AREA)
- Life Sciences & Earth Sciences (AREA)
- Chemical & Material Sciences (AREA)
- Analytical Chemistry (AREA)
- Biochemistry (AREA)
- General Health & Medical Sciences (AREA)
- General Physics & Mathematics (AREA)
- Immunology (AREA)
- Pathology (AREA)
- Testing Or Measuring Of Semiconductors Or The Like (AREA)
Abstract
本发明涉及一种梁式器件引线强度的试验方法,属于梁式引线横向抗拉强度测试领域;步骤一、制作矩形板状的基板;步骤二、在基板上表面制作矩形板状的微带线;步骤三、准备待测梁式器件;步骤四、将基板水平放置,将待测梁式器件水平放置在基板上表面;并将待测梁式器件其中一侧的镀金梁式引线键合到基板的微带线上;步骤五、将金丝的两端键合在另一侧的镀金梁式引线上,形成金丝环;步骤六、将基板竖直固定在拉力测试设备的承片台上;步骤七、将拉钩穿过U型结构的金丝环中,竖直向上钩拉金丝环;步骤八、记录拉力数据,完成待测梁式器件引线横向抗拉强度的测量试验;本发明实现了对梁式引线横向抗拉强度的简单、直接、有效测量。
The invention relates to a method for testing the lead strength of beam-type devices, belonging to the field of transverse tensile strength testing of beam-type leads. ; Step 3, prepare the beam-type device to be tested; Step 4, place the substrate horizontally, and place the beam-type device to be tested horizontally on the upper surface of the substrate; and bond the gold-plated beam-type wire on one side of the beam-type device to be tested to the The microstrip line of the substrate; Step 5, bond the two ends of the gold wire to the gold-plated beam-type lead on the other side to form a gold wire loop; Step 6, vertically fix the substrate on the support table of the tensile test equipment Step 7: Pass the draw hook through the gold wire loop of the U-shaped structure, and hook the gold wire loop vertically upward; Step 8: Record the tensile force data, and complete the measurement test of the transverse tensile strength of the beam-type device leads to be tested; this The invention realizes the simple, direct and effective measurement of the transverse tensile strength of the beam lead wire.
Description
技术领域technical field
本发明属于电子元器件性能测试领域,涉及一种梁式器件引线强度的试验方法。The invention belongs to the field of performance testing of electronic components, and relates to a method for testing the lead strength of beam-type components.
背景技术Background technique
梁式器件为带有悬空梁式引线结构的器件,其封装属于裸芯片,无额外管壳封装,宇航应用以梁式引线二极管芯片最为常见。梁式器件采用电镀金金属梁代替常规器件的金属引线,直接连接到微带电路上,取消了管壳封装,减小了管壳电容、具有结构简单、尺寸小、电容小、寄生参数小等特点,被广泛应用于高频宽带集成混频器、检波器、开关、VCO等微波电路系统中。The beam-type device is a device with a suspended beam-type lead structure, and its package is a bare chip without additional package. The beam-type lead diode chip is the most common in aerospace applications. The beam-type device uses electroplated gold metal beams instead of metal leads of conventional devices, and is directly connected to the microstrip circuit, eliminating the case-to-case package and reducing the case-to-case capacitance. It has the characteristics of simple structure, small size, small capacitance, and small parasitic parameters. It is widely used in microwave circuit systems such as high-frequency broadband integrated mixers, detectors, switches, and VCOs.
梁式器件在应用时,两侧的梁式引线通常采用引线键合方式安装在基板的微带线上。由于产品尺寸小,安装难度大,且在应用的温度应力下可能发生引线开裂甚至脱落现象。因此,在宇航应用验证时,需重点对梁式器件开展装联可靠性和应用适应性评价。其中,梁式器件引线强度是装联可靠性和应用适应性评价的关键试验项目。When the beam-type device is applied, the beam-type leads on both sides are usually mounted on the microstrip line of the substrate by wire bonding. Due to the small size of the product, the installation is difficult, and the lead wire may crack or even fall off under the applied temperature stress. Therefore, in the verification of aerospace applications, it is necessary to focus on the evaluation of assembly reliability and application adaptability of beam devices. Among them, the lead strength of beam-type devices is a key test item for the evaluation of assembly reliability and application adaptability.
梁式器件应用时装配在基板电路中,在温度应力下,由于壳体、基板和梁式引线的热膨胀系数不同,梁式引线在其引线长度方向(横向)上,可能受到向外的拉力或向内的挤压力,导致引线从根部开裂甚至脱落。因此,梁式引线的引线横向抗拉强度是评价梁式引线器件是否适合宇航应用的关键可靠性指标之一。然而,国内外目前无现行有效评价梁式引线横向抗拉强度的试验方法。When the beam device is applied and assembled in the substrate circuit, under the temperature stress, due to the different thermal expansion coefficients of the casing, the substrate and the beam lead, the beam lead may be subjected to outward pulling force or The inward squeezing force causes the lead to crack or even fall off the root. Therefore, the lead transverse tensile strength of beam leads is one of the key reliability indicators for evaluating whether beam lead devices are suitable for aerospace applications. However, there is currently no effective test method for evaluating the transverse tensile strength of beam leads at home and abroad.
目前,在评价梁式引线梁强度时,现有评价梁式引线强度的测量试验标准依据为GJB 548B-2005《微电子器件试验方法和程序》中方法2011.1键合强度(破坏性键合拉力试验)中的“3.1.5试验条件G-推开试验(梁式引线)”和“3.1.6试验条件H-拉开试验(梁式引线)”。这两个试验条件中对器件施加的力为推力或拉力,都是垂直于引线的纵向力,评价的是梁式引线在芯片上的附着力,以及与基板的键合强度,无法测量器件引线横向抗拉强度,而该指标是梁式器件宇航实际应用时重点的关注的指标之一。At present, when evaluating beam lead beam strength, the existing measurement test standard for evaluating beam lead strength is based on the method 2011.1 Bonding Strength (Destructive Bonding Tensile Test) in GJB 548B-2005 "Test Methods and Procedures for Microelectronic Devices" ) in "3.1.5 Test Condition G-Push-Off Test (Beam Lead)" and "3.1.6 Test Condition H-Pull-Off Test (Beam Lead)". In these two test conditions, the force applied to the device is a pushing force or a pulling force, both of which are longitudinal forces perpendicular to the leads. The evaluation is the adhesion of the beam leads on the chip and the bonding strength with the substrate. The device leads cannot be measured. Transverse tensile strength, which is one of the most important indicators in the practical application of beam-type devices in aerospace.
中国电子科技集团公司第四十一研究所CN 105510225 A专利公开了一种键合强度试验方法,该方法“制作与待测试产品相同的薄膜或厚膜电路,在制作的薄膜或厚膜电路上的两个焊盘间加工一条盲槽,将待测试互联引线或梁式引线器件键合到薄膜或厚膜电路的焊盘上,键合点为盲槽两侧的相对应焊盘;将键合完毕的焊盘放置到拉力测试设备的承片台上,将测试用拉钩通过盲槽从待测试互联引线或梁式引线器件底部通过后与待测试互联引线或梁式引线器件固定,进行非破坏性及破坏性键合强度测试”。该方法仅对键合强度试验无损操作方面进行了改进,评价的试验目的仍然是梁式引线在芯片上的附着力,以及与基板的键合强度梁式引线与器件的剥离力,无法测量器件引线横向抗拉强度。The 41st Research Institute of China Electronics Technology Group Corporation CN 105510225 A patent discloses a bonding strength test method, the method "makes the same thin film or thick film circuit as the product to be tested, on the produced thin film or thick film circuit A blind slot is processed between the two pads of the device, and the interconnect lead or beam lead device to be tested is bonded to the pad of the thin film or thick film circuit, and the bonding point is the corresponding pad on both sides of the blind slot; the bonding The completed pad is placed on the holding table of the tensile test equipment, and the test hook is passed through the blind slot from the bottom of the interconnection lead or beam lead device to be tested, and then fixed with the interconnection lead or beam lead device to be tested for non-destructive Destructive and Destructive Bond Strength Testing". This method only improves the non-destructive operation of the bonding strength test. The purpose of the evaluation test is still the adhesion of the beam lead on the chip, and the bonding strength with the substrate. The peel force of the beam lead and the device cannot be measured. Transverse tensile strength of leads.
综上所述,现有的标准方法中缺乏有效测量梁式引线器件横向抗拉强度的试验方法。To sum up, the existing standard methods lack an effective test method for measuring the transverse tensile strength of beam-lead devices.
发明内容SUMMARY OF THE INVENTION
本发明解决的技术问题是:克服现有技术的不足,提出一种梁式器件引线强度的试验方法,实现了对梁式引线横向抗拉强度的简单、直接、有效测量。The technical problem solved by the present invention is: to overcome the deficiencies of the prior art, a method for testing the lead strength of the beam-type device is proposed, which realizes simple, direct and effective measurement of the transverse tensile strength of the beam-type lead.
本发明解决技术的方案是:The technical solution of the present invention is:
一种梁式器件引线强度的试验方法,包括如下步骤:A method for testing the lead strength of a beam-type device, comprising the following steps:
步骤一、制作矩形板状的基板;Step 1, making a rectangular plate-shaped substrate;
步骤二、在基板上表面制作矩形板状的微带线;
步骤三、准备待测梁式器件;Step 3: Prepare the beam device to be tested;
步骤四、将带有微带线的基板水平放置,将待测梁式器件水平放置在基板上表面;并将待测梁式器件其中一侧的镀金梁式引线键合到基板的微带线上;
步骤五、将金丝的两端键合在待测梁式器件另一侧的镀金梁式引线上,形成金丝环;
步骤六、将完成待测梁式器件两侧镀金梁式引线键合的基板竖直固定在拉力测试设备的承片台上;Step 6: Vertically fix the substrate on which the gold-plated beam-type wire bonding on both sides of the beam-type device to be tested is completed on the support table of the tensile test equipment;
步骤七、将拉力测试仪的拉钩穿过金丝环中,沿镀金梁式引线的长度方向竖直向上钩拉金丝环;Step 7: Pass the pull hook of the tension tester through the gold wire loop, and pull the gold wire loop vertically upward along the length direction of the gold-plated beam lead;
步骤八、记录拉力数据,完成待测梁式器件引线横向抗拉强度的测量试验。Step 8: Record the tensile force data, and complete the measurement test of the transverse tensile strength of the leads of the beam-type device to be tested.
在上述的一种梁式器件引线强度的试验方法,所述步骤一中,所述基板采用氧化铝陶瓷材料或4003覆铜板材料;基板长度大于等于10mm;宽度为5-10mm;厚度为0.3-0.5mm。In the above-mentioned test method for the lead strength of a beam-type device, in the first step, the substrate is made of alumina ceramic material or 4003 copper clad laminate material; the length of the substrate is greater than or equal to 10mm; the width is 5-10mm; the thickness is 0.3- 0.5mm.
在上述的一种梁式器件引线强度的试验方法,所述步骤二中,微带线的制作方法为:In the above-mentioned test method for the lead strength of a beam-type device, in the second step, the manufacturing method of the microstrip line is:
在基板上表面宽度边位置采用薄膜工艺制作微带线;微带线的上表面电镀金层,金层厚度大于等于1.27μm;金层中金的含量大于等于99.99%;微带线的宽度不小于镀金梁式引线宽度的2倍。The microstrip line is made by thin film technology at the width side of the upper surface of the substrate; the upper surface of the microstrip line is electroplated with a gold layer, and the thickness of the gold layer is greater than or equal to 1.27 μm; the content of gold in the gold layer is greater than or equal to 99.99%; the width of the microstrip line is not Less than 2 times the width of the gold-plated beam lead.
在上述的一种梁式器件引线强度的试验方法,所述步骤三中,所述待测梁式器件采用带有悬空梁式引线结构的梁式器件,裸芯片,无管壳封装;待测梁式器件上设置有2个镀金梁式引线;2个镀金梁式引线对称设置在待测梁式器件的侧壁,且位于统一水平面;镀金梁式引线采用金材料,金含量大于等于99.99%。In the above-mentioned test method for the lead strength of a beam-type device, in the third step, the beam-type device to be tested adopts a beam-type device with a suspended beam-type lead structure, bare chip, and packaged without a tube case; Two gold-plated beam-type leads are arranged on the beam-type device; the two gold-plated beam-type leads are symmetrically arranged on the sidewall of the beam-type device to be tested, and are located on a uniform level; the gold-plated beam-type leads are made of gold material, and the gold content is greater than or equal to 99.99% .
在上述的一种梁式器件引线强度的试验方法,所述步骤四中,镀金梁式引线与微带线的健合方法为:In the above-mentioned test method for the lead strength of a beam-type device, in the
采用半自动键合机进行键合,键合时炉温为120-140℃;劈刀温度为100-120℃;压力为90-100g;半自动键合机中劈刀的端口采用长方形结构;劈刀端口尺寸为150μm×50μm。The semi-automatic bonding machine is used for bonding, and the furnace temperature is 120-140 ℃; the temperature of the riving knife is 100-120 ℃; the pressure is 90-100g; the port of the riving knife in the semi-automatic bonding machine adopts a rectangular structure; The port size is 150 μm × 50 μm.
在上述的一种梁式器件引线强度的试验方法,所述步骤五中,金丝环为一端开口的U形丝状结构,金丝的轴向长度不小于2mm;金丝环的抗拉强度大于镀金梁式引线的抗拉强度;镀金梁式引线的抗拉强度不小于0.3N(30gf)乘以镀金梁式引线的宽度。In the above-mentioned test method for the lead strength of a beam-type device, in the fifth step, the gold wire ring is a U-shaped filament structure with one end open, and the axial length of the gold wire is not less than 2 mm; the tensile strength of the gold wire ring is not less than 2 mm. Greater than the tensile strength of the gold-plated beam lead; the tensile strength of the gold-plated beam lead is not less than 0.3N (30gf) multiplied by the width of the gold-plated beam lead.
在上述的一种梁式器件引线强度的试验方法,所述步骤五中,金丝两端与镀金梁式引线键合的方法为:In the above-mentioned test method for the lead strength of a beam-type device, in the fifth step, the method for bonding both ends of the gold wire to the gold-plated beam-type lead is:
采用半自动键合机进行键合,键合时炉温为120-140℃;劈刀温度为100-120℃;压力为90-100g;半自动键合机中劈刀的端口采用长方形结构;劈刀端口尺寸为150μm×50μm。The semi-automatic bonding machine is used for bonding, and the furnace temperature is 120-140 ℃; the temperature of the riving knife is 100-120 ℃; the pressure is 90-100g; the port of the riving knife in the semi-automatic bonding machine adopts a rectangular structure; The port size is 150 μm × 50 μm.
在上述的一种梁式器件引线强度的试验方法,所述步骤六中,基板竖直固定在拉力测试设备的承片台上时,基板沿竖直方向的偏差角度为-10°~10°。In the above-mentioned test method for the lead strength of a beam-type device, in the sixth step, when the substrate is vertically fixed on the holding table of the tensile test equipment, the deviation angle of the substrate along the vertical direction is -10°~10° .
在上述的一种梁式器件引线强度的试验方法,所述步骤六中,拉钩竖直向上钩拉金丝环时,拉钩沿竖直方向的偏差角度为-10°~10°。In the above-mentioned test method for the lead strength of a beam-type device, in the sixth step, when the retractor hooks vertically upward to pull the gold wire loop, the deviation angle of the retractor along the vertical direction is -10° to 10°.
本发明与现有技术相比的有益效果是:The beneficial effects of the present invention compared with the prior art are:
(1)本发明实现了对梁式器件引线引线横向抗拉强度的测试,解决了梁式器件宇航实际应用非常关注的可靠性指标评价无据可依的问题,提供了一种适用于所有梁式器件引线引线横向抗拉强度的测量、评价、考核的试验指导;填补了梁式引线强度试验方法的一项空白;(1) The present invention realizes the test of the lateral tensile strength of the lead wire of the beam-type device, solves the problem that the reliability index evaluation of the beam-type device is very concerned about the practical application of aerospace, and provides a method suitable for all beams. The test guide for the measurement, evaluation and assessment of the transverse tensile strength of the lead wire of the beam type device; it fills a gap in the strength test method of the beam type lead wire;
(2)本发明通过选择合适尺寸的刚性或半刚性基板、在基板上采用薄膜工艺制作满足键合工艺要求的足够厚度和纯度的镀金微带线,保证了梁式器件一侧镀金梁式引线与基板微带线的可靠键合;通过选择合适直径、长度、材料的U形状金丝,以及适当的键合方法,保证了U形状金丝环的抗拉强度大于镀金梁式引线的抗拉强度;将完成梁式器件两侧引线键合的基板垂直固定在拉力测试设备的承片台上,用测试设备拉钩垂直向上沿着镀金梁式引线的长度方向钩拉U型状金丝环,保证了测试精度和测试结果的有效性;(2) In the present invention, by selecting a rigid or semi-rigid substrate of an appropriate size, and using a thin-film process on the substrate to produce a gold-plated microstrip line with sufficient thickness and purity to meet the requirements of the bonding process, the gold-plated beam-type lead on one side of the beam-type device is guaranteed. Reliable bonding with the substrate microstrip line; by selecting the U-shaped gold wire with the appropriate diameter, length and material, and the appropriate bonding method, the tensile strength of the U-shaped gold wire ring is guaranteed to be greater than that of the gold-plated beam lead. Strength; vertically fix the substrate with wire bonding on both sides of the beam-type device on the support table of the tensile test equipment, and use the test equipment to pull the U-shaped gold wire loop vertically upward along the length of the gold-plated beam-type lead. Guarantee the test accuracy and the validity of test results;
(3)本发明设计巧妙,制作简单、成本低,只需要额外制作基板电路、微带线、以及U形状金丝环,即可对属于裸芯片封装形式、安装难度大的梁式器件,完成引线引线横向抗拉强度的测试;(3) The present invention is ingenious in design, simple in fabrication and low in cost. It only needs to additionally fabricate a substrate circuit, a microstrip line, and a U-shaped gold wire ring to complete the beam-type device that is in the form of bare chip packaging and is difficult to install. Test of transverse tensile strength of lead wire;
(4)本发明易操作,且在测试过程不会对梁式器件本体或引线造成损伤,避免更换试验样品而造成的试验的返工或重复,提高试验效率。(4) The present invention is easy to operate, and will not cause damage to the beam device body or leads during the test process, avoid rework or repetition of the test caused by replacing the test sample, and improve the test efficiency.
附图说明Description of drawings
图1为本发明梁式引线强度试验示意图。FIG. 1 is a schematic diagram of the strength test of the beam lead wire of the present invention.
具体实施方式Detailed ways
下面结合实施例对本发明作进一步阐述。The present invention will be further elaborated below in conjunction with the examples.
本发明填补现有梁式引线强度试验方法的不足,提供一种简单、直接、有效测量梁式引线横向抗拉强度的试验方法。The invention fills in the deficiencies of the existing beam-type lead strength test methods, and provides a simple, direct and effective test method for measuring the transverse tensile strength of beam-type leads.
本发明的测试原理为:将待测梁式器件3的一侧镀金梁式引线6键合在基1板的微带线2上;在另一侧镀金梁式引线6上键合U型状的金丝环4;通过拉力测试仪的拉钩5钩住金丝环4,施加相对于待测梁式器件3的横向拉力,记录拉力数据,并观察记录失效类别。The testing principle of the present invention is as follows: one side of the beam-
梁式器件引线强度的试验方法,如图1所示,具体包括如下步骤:The test method of beam-type device lead strength, as shown in Figure 1, specifically includes the following steps:
步骤一、首先要制作测试硬件,制作矩形板状的基板1;基板1采用氧化铝陶瓷材料或4003覆铜板材料;基板1长度大于等于10mm;宽度为5-10mm;厚度为0.3-0.5mm。Step 1: First, make test hardware and make a rectangular plate-shaped substrate 1; the substrate 1 is made of alumina ceramic material or 4003 copper clad laminate material; the length of the substrate 1 is greater than or equal to 10mm; the width is 5-10mm; the thickness is 0.3-0.5mm.
步骤二、在基板1上表面制作矩形板状的微带线2;微带线2的制作方法为:在基板1上表面宽度边位置采用薄膜工艺制作微带线2;微带线2的上表面电镀金层,金层厚度大于等于1.27μm;金层中金的含量大于等于99.99%;微带线2的宽度不小于镀金梁式引线6宽度的2倍。Step 2: Making a rectangular plate-shaped
步骤三、准备待测梁式器件3;待测梁式器件3采用带有悬空梁式引线结构的梁式器件,裸芯片,无管壳封装;待测梁式器件3上设置有2个镀金梁式引线6;2个镀金梁式引线6对称设置在待测梁式器件3的侧壁,且位于统一水平面;镀金梁式引线6采用金材料,金含量大于等于99.99%。镀金梁式引线6与微带线2均采用了含量大于等于99.99%金,才能保证可靠键合。Step 3: Prepare the beam-
步骤四、将带有微带线2的基板1水平放置,将待测梁式器件3水平放置在基板1上表面;并将待测梁式器件3其中一侧的镀金梁式引线6键合到基板1的微带线2上;镀金梁式引线6与微带线2的健合方法为:采用半自动键合机进行键合,键合时炉温为120-140℃;劈刀温度为100-120℃;压力为90-100g;半自动键合机中劈刀的端口采用长方形结构;劈刀端口尺寸为150μm×50μm。
步骤五、将金丝的两端键合在待测梁式器件3另一侧的镀金梁式引线6上,形成金丝环4;金丝环4为一端开口的U形丝状结构,金丝的轴向长度不小于2mm;U型状金丝环4应采用合适直径的金丝;金丝直径的选择应使得金丝环4的抗拉强度大于镀金梁式引线6的抗拉强度;镀金梁式引线6的抗拉强度不小于0.3N30gf乘以镀金梁式引线6的宽度。Step 5: Bond both ends of the gold wire on the gold-plated beam-
金丝两端与镀金梁式引线6键合的方法为:采用半自动键合机进行键合,键合时炉温为120-140℃;劈刀温度为100-120℃;压力为90-100g;半自动键合机中劈刀的端口采用长方形结构;劈刀端口尺寸为150μm×50μm。键合时,U型状的金丝环4水平放置,且U型状金丝环4的U形开口端与待测梁式器件3另一侧的镀金梁式引线6键合连接。The method for bonding both ends of the gold wire to the gold-plated
步骤六、将完成待测梁式器件3两侧镀金梁式引线6键合的基板1竖直固定在拉力测试设备的承片台上;基板1竖直固定在拉力测试设备的承片台上时,基板1沿竖直方向的偏差角度为-10°~10°。Step 6: Vertically fix the substrate 1 on which the gold-plated beam-type leads 6 on both sides of the beam-
步骤七、将拉力测试仪的拉钩5穿过金丝环4中,沿镀金梁式引线6的长度方向竖直向上钩拉金丝环4;拉钩5竖直向上钩拉金丝环4时,拉钩5沿竖直方向的偏差角度为-10°~10°。Step 7: Pass the
步骤八、记录拉力数据,完成待测梁式器件3引线横向抗拉强度(即沿镀金梁式引线6长度方向)的测量试验。Step 8: Record the tensile force data, and complete the measurement test of the transverse tensile strength of the leads of the beam-
实施例1Example 1
1、采用氧化铝陶瓷基板制作基板1,基板尺寸为:长度12mm,宽度为7mm,厚度为0.3mm。1. The substrate 1 is made of an alumina ceramic substrate. The dimensions of the substrate are: length 12mm, width 7mm, and thickness 0.3mm.
2、在基板1上采用薄膜或厚膜工艺制作微带线2,微带线2表面镀涂层为金,金层厚度为5μm。微带线2的宽度为0.3mm,长度为4mm。2. A
3、准备待测硅基梁式引线二极管3,芯片宽度为0.26mm,长度为0.28mm(不计引线长度),两侧的镀金梁式引线分别宽0.12mm,长0.2mm,厚0.01mm。3. Prepare the silicon-based
4、将待测硅基梁式引线二极管3的一侧镀金梁式引线6键合到基板1的微带线2;4. Bond the gold-plated
5、在待测硅基梁式引线二极管3另一侧镀金梁式引线6上键合金丝环4,成U型状;成U型状金丝直径为38μm,长2.5mm;5. Bond the
6、将完成器件键合的基板1放置到拉力测试设备的承片台上,固定基板1,将测试用拉钩5到达U型金丝环4,沿着引线长度方向钩拉金丝环4;6. Place the substrate 1 on which the device has been bonded on the holding table of the tensile test equipment, fix the substrate 1, and reach the U-shaped
7、记录拉力数据,并观察记录失效类别,记录拉力值,拉力值大于0.036N,则判定梁式引线二极管3的引线横向抗拉强度合格。7. Record the tensile force data, observe and record the failure category, and record the tensile force value. If the tensile force value is greater than 0.036N, it is judged that the transverse tensile strength of the lead of the
实施例2Example 2
本发明的实现步骤如下:The implementation steps of the present invention are as follows:
1、采用4003覆铜板制作基板1,基板尺寸为:长度15mm,宽度为10mm,厚度为0.5mm。1. Use 4003 copper clad laminate to make substrate 1. The size of the substrate is: length 15mm, width 10mm, and thickness 0.5mm.
2、在基板1上采用薄膜或厚膜工艺制作微带线2,微带线2表面镀涂层为金,金层厚度为5μm。微带线的宽度为0.5mm,长度为5mm。2. A
3、准备待测硅基梁式引线二极管3,芯片宽度为0.6mm,长度为0.6mm(不计引线长度),两侧的镀金梁式引线分别宽0.15mm,长0.2mm,厚0.01mm。3. Prepare the silicon-based
4、将待测硅基梁式引线二极管3的一侧镀金梁式引线6键合到基板的微带线2,形貌如6所示。4. Bond one side of the silicon-based beam-
5、在待测硅基梁式引线二极管3另一侧镀金梁式引线6上键合金丝环4,成U型状金丝直径为50μm,长3mm。5. Bond the
6、将完成器件键合的基板1放置到拉力测试设备的承片台上,固定基板1,将测试用拉钩5到达U型键合环处,沿着引线长度方向钩拉金丝环4。6. Place the substrate 1 on which the device bonding has been completed on the holding table of the tensile testing equipment, fix the substrate 1, place the
7、记录拉力数据,并观察记录失效类别,记录拉力值,拉力值大于0.045N,则判定梁式引线二极管3的引线横向抗拉强度合格。7. Record the tensile force data, observe and record the failure category, and record the tensile force value. If the tensile force value is greater than 0.045N, it is judged that the transverse tensile strength of the
本发明虽然已以较佳实施例公开如上,但其并不是用来限定本发明,任何本领域技术人员在不脱离本发明的精神和范围内,都可以利用上述揭示的方法和技术内容对本发明技术方案做出可能的变动和修改,因此,凡是未脱离本发明技术方案的内容,依据本发明的技术实质对以上实施例所作的任何简单修改、等同变化及修饰,均属于本发明技术方案的保护范围。Although the present invention has been disclosed above with preferred embodiments, it is not intended to limit the present invention. Any person skilled in the art can use the methods and technical contents disclosed above to improve the present invention without departing from the spirit and scope of the present invention. The technical solutions are subject to possible changes and modifications. Therefore, any simple modifications, equivalent changes and modifications made to the above embodiments according to the technical essence of the present invention without departing from the content of the technical solutions of the present invention belong to the technical solutions of the present invention. protected range.
Claims (9)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010760630.4A CN112067436B (en) | 2020-07-31 | 2020-07-31 | A Test Method for Lead Strength of Beam Devices |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010760630.4A CN112067436B (en) | 2020-07-31 | 2020-07-31 | A Test Method for Lead Strength of Beam Devices |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN112067436A true CN112067436A (en) | 2020-12-11 |
| CN112067436B CN112067436B (en) | 2023-04-14 |
Family
ID=73656848
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010760630.4A Active CN112067436B (en) | 2020-07-31 | 2020-07-31 | A Test Method for Lead Strength of Beam Devices |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN112067436B (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114719885A (en) * | 2022-03-29 | 2022-07-08 | 兰州空间技术物理研究所 | Long-distance cross-plane bonding gold wire connection method |
Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4055992A (en) * | 1976-06-16 | 1977-11-01 | Rockwell International Corporation | Beam lead testing apparatus |
| JPH0817879A (en) * | 1994-07-01 | 1996-01-19 | Sharp Corp | Pull tester |
| US20030234451A1 (en) * | 2002-06-25 | 2003-12-25 | Eli Razon | Stabilized wire bonded electrical connections and method of making same |
| CN105510225A (en) * | 2015-09-04 | 2016-04-20 | 中国电子科技集团公司第四十一研究所 | Bonding strength test method |
| US20160153880A1 (en) * | 2014-12-02 | 2016-06-02 | Asm Technology Singapore Pte Ltd | Method and system for pull testing of wire bonds |
| CN207197929U (en) * | 2017-07-09 | 2018-04-06 | 重庆瑞润电子有限公司 | A kind of terminal pull force tester |
| CN108106991A (en) * | 2017-12-15 | 2018-06-01 | 超威电源有限公司 | A kind of fluid sealant bond strength detection device and method |
| CN210427217U (en) * | 2019-08-28 | 2020-04-28 | 厦门星河创自动化科技有限公司 | Measure mechanism of 13F pin spot welding pull-out force |
-
2020
- 2020-07-31 CN CN202010760630.4A patent/CN112067436B/en active Active
Patent Citations (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4055992A (en) * | 1976-06-16 | 1977-11-01 | Rockwell International Corporation | Beam lead testing apparatus |
| JPH0817879A (en) * | 1994-07-01 | 1996-01-19 | Sharp Corp | Pull tester |
| US20030234451A1 (en) * | 2002-06-25 | 2003-12-25 | Eli Razon | Stabilized wire bonded electrical connections and method of making same |
| US20160153880A1 (en) * | 2014-12-02 | 2016-06-02 | Asm Technology Singapore Pte Ltd | Method and system for pull testing of wire bonds |
| CN105510225A (en) * | 2015-09-04 | 2016-04-20 | 中国电子科技集团公司第四十一研究所 | Bonding strength test method |
| CN207197929U (en) * | 2017-07-09 | 2018-04-06 | 重庆瑞润电子有限公司 | A kind of terminal pull force tester |
| CN108106991A (en) * | 2017-12-15 | 2018-06-01 | 超威电源有限公司 | A kind of fluid sealant bond strength detection device and method |
| CN210427217U (en) * | 2019-08-28 | 2020-04-28 | 厦门星河创自动化科技有限公司 | Measure mechanism of 13F pin spot welding pull-out force |
Non-Patent Citations (2)
| Title |
|---|
| PARK, JH: "Development of micromechanical testing machine and its application", 《IEEE TRANSACTIONS ON COMPONENTS AND PACKAGING TECHNOLOGIES》 * |
| 金德宣等: "微电子器件无引线焊接技术——梁式引线技术", 《电子工艺技术》 * |
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN114719885A (en) * | 2022-03-29 | 2022-07-08 | 兰州空间技术物理研究所 | Long-distance cross-plane bonding gold wire connection method |
| CN114719885B (en) * | 2022-03-29 | 2024-02-02 | 兰州空间技术物理研究所 | A long-distance cross-plane bonding gold wire connection method |
Also Published As
| Publication number | Publication date |
|---|---|
| CN112067436B (en) | 2023-04-14 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US11402408B2 (en) | Electrical characteristics inspection tool | |
| TW565529B (en) | Probe card and method for testing the proceed function or speed of electronic devices | |
| US20070279074A1 (en) | Probe Cassette, Semiconductor Inspection Apparatus And Manufacturing Method Of Semiconductor Device | |
| TW465001B (en) | High-speed probing apparatus | |
| WO2012025532A1 (en) | Method for measuring adhesion energy and associated substrates | |
| CN112067436B (en) | A Test Method for Lead Strength of Beam Devices | |
| Mercado et al. | Evaluation of die edge cracking in flip-chip PBGA packages | |
| US8305102B2 (en) | Probe card, method for manufacturing probe card, and prober apparatus | |
| CN103822869B (en) | The reliability checking method of power supply bonding lead solder-joint | |
| TW584727B (en) | Wafer level probe card | |
| CN116027078A (en) | A probe card alignment device | |
| CN116794362A (en) | Probe card device | |
| US6220102B1 (en) | Die-shear test fixture apparatus | |
| JP2006098064A (en) | Probe card | |
| CN103941049A (en) | probe card | |
| CN219302534U (en) | Cantilever type probe card for wafer test | |
| CN116148175A (en) | A method for detecting the peel strength of ceramic aluminum-clad substrate | |
| US8313947B2 (en) | Method for testing a contact structure | |
| JP4498829B2 (en) | Card holder | |
| CN119343606A (en) | Method for testing an electronic component and electronic component having a testing device | |
| JP2013007603A (en) | Manufacturing method of semiconductor device | |
| CN202534636U (en) | Testing equipment for spacers for semiconductor packaging | |
| JP2004020209A (en) | Probe card | |
| Mirgkizoudi et al. | Combined temperature and vibration testing for wire bond interconnections in harsh environment electronics | |
| JPH08255976A (en) | Multilayer wiring board |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| PB01 | Publication | ||
| PB01 | Publication | ||
| SE01 | Entry into force of request for substantive examination | ||
| SE01 | Entry into force of request for substantive examination | ||
| GR01 | Patent grant | ||
| GR01 | Patent grant |
