CN112007754A - Pickup device - Google Patents
Pickup device Download PDFInfo
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- CN112007754A CN112007754A CN202010880466.0A CN202010880466A CN112007754A CN 112007754 A CN112007754 A CN 112007754A CN 202010880466 A CN202010880466 A CN 202010880466A CN 112007754 A CN112007754 A CN 112007754A
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- pickup
- metal particles
- mask plate
- lifting
- cross
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C1/00—Magnetic separation
- B03C1/02—Magnetic separation acting directly on the substance being separated
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/04—Coating on selected surface areas, e.g. using masks
- C23C14/042—Coating on selected surface areas, e.g. using masks using masks
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- H—ELECTRICITY
- H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
- H10K—ORGANIC ELECTRIC SOLID-STATE DEVICES
- H10K71/00—Manufacture or treatment specially adapted for the organic devices covered by this subclass
- H10K71/10—Deposition of organic active material
- H10K71/16—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering
- H10K71/166—Deposition of organic active material using physical vapour deposition [PVD], e.g. vacuum deposition or sputtering using selective deposition, e.g. using a mask
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B03—SEPARATION OF SOLID MATERIALS USING LIQUIDS OR USING PNEUMATIC TABLES OR JIGS; MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C—MAGNETIC OR ELECTROSTATIC SEPARATION OF SOLID MATERIALS FROM SOLID MATERIALS OR FLUIDS; SEPARATION BY HIGH-VOLTAGE ELECTRIC FIELDS
- B03C2201/00—Details of magnetic or electrostatic separation
- B03C2201/20—Magnetic separation of bulk or dry particles in mixtures
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Manufacturing & Machinery (AREA)
- Manipulator (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The embodiment of the invention relates to the technical field of manufacturing, and discloses a pickup device, which comprises: a magnetizing part and a pickup connected with the magnetizing part; the magnetization part is used for magnetizing the pickup; the picker includes a curved portion; the bending part is used for adsorbing metal particles. According to the pickup device provided by the invention, metal particles on the surface of an object (such as a mask plate) can be removed by using the pickup device, and the probability of damaging the surface of the object is greatly reduced.
Description
Technical Field
The embodiment of the invention relates to the technical field of manufacturing, in particular to a pickup device.
Background
At present, in the process of manufacturing an Organic Light Emitting layer of an OLED (Organic Light-Emitting Diode) display screen, a mask plate with a pattern is used to mask and form a required pattern on a substrate to be evaporated by a vacuum evaporation method.
After the mask is used, metal particles remain on the surface. There are three main sources for these metal particles: the mask plate contains a small amount of metal particles; the metal particles generated in the process of reprocessing (after testing, reprocessing one mask can generate more than 100 metal particles); and metal particles generated by friction in the operation process of the mask plate. When the mask plate is cleaned, the metal particles can fall in the cleaning pool in the cleaning process, so that the content of the metal particles in the cleaning pool is increased, and the cleaning effect of the mask plate and the cleanliness of the cleaning liquid are influenced. Some metal particles can even adhere to the mask plate, so that the mask plate is difficult to repair. Some metal particles with larger sizes are easy to block the filter element, and the service life of the filter element is shortened.
Disclosure of Invention
An object of an embodiment of the present invention is to provide a pickup apparatus with which metal particles on a surface of an object can be removed and a probability of damaging the surface of the object is greatly reduced.
To solve the above technical problem, an embodiment of the present invention provides a pickup apparatus including: a magnetizing part and a pickup connected with the magnetizing part; the magnetization part is used for magnetizing the pickup; the picker includes a curved portion; the bending part is used for adsorbing metal particles.
In addition, the magnetizing part includes: the clamping mechanism is used for clamping the picker at one end; and the other end of the clamping mechanism is fixedly provided with a conductive coil, and at least part of the pickup extends into the conductive coil. The scheme gives a specific structure of the magnetizing part.
In addition, the pickup device further includes: a regulating switch connected with the conductive coil; the adjusting switch is used for controlling the current passing through the conductive coil so as to change the magnetic size of the pickup. This scheme is provided with the regulating switch who is connected with the conductive coil, and regulating switch can control the electric current size that lets in the conductive coil to change the magnetism size of picker, realize picking up the pertinence of the metal particle thing of different particle sizes, different quality on the object (for example mask plate) surface.
In addition, the pickup device further includes: the lifting part and the turning part connected with the lifting part are connected with the magnetizing part. The pick-up device in the scheme comprises a lifting part and a steering part, and can drive the magnetizing part to lift and rotate.
Further, the lifting unit includes: a first lifting unit and a second lifting unit; the second lifting part is movably connected to the first lifting part and fixedly connected to the steering part; the first lifting part is used for roughly adjusting the height of the steering part, and the second lifting part is used for finely adjusting the height of the steering part. According to the scheme, the first lifting part for coarse adjustment and the second lifting part for fine adjustment are arranged, so that height adjustment of different degrees can be realized.
In addition, the cross-sectional shape of the curved portion in a direction perpendicular to the longitudinal direction of the pickup is a circle, an ellipse, or a square with four corners having a curvature.
In addition, the pickup further includes: and a fixing part connected between the magnetizing part and the bending part, wherein the widest distance between any two points on the cross section of the fixing part is larger than the widest distance between any two points on the cross section of the bending part in the direction perpendicular to the length direction of the pickup. This scheme fixed part can play the supporting role to the flexion.
In addition, the widest distance between any two points on the section of the fixing part is more than or equal to 0.8 mm, and the widest distance between any two points on the section of the bending part is between 0.5 mm and 0.65 mm. This scheme flexion can adsorb the object (for example mask plate) metal particles of nanometer level on the surface, and the fixed part can play good supporting role to the flexion.
The length of the fixing part ranges from 5 cm to 6 cm, and the length of the bending part is less than or equal to 0.4 cm.
In addition, the tail end of the bending part is on the extension line of the fixing part, and the included angle formed by the bending part and the fixing part at the connecting position is more than 120 degrees; preferably, the angle formed by the curved portion and the fixing portion at the junction is less than 135 °.
Compared with the prior art, the embodiment of the invention provides a pickup device, which comprises: the magnetic part is used for magnetizing the pickup; the pickup includes a curved portion; the bending part is used for adsorbing metal particles. The magnetization portion in this embodiment can magnetize the pickup so that the pickup is magnetized, and thus the pickup can utilize its magnetism to adsorb metal particles, for example: the pickup device can be used for picking up metal particles left on the surface of an object (such as a mask plate), so that the problem that the yield is low when the display panel is prepared due to the metal particles on the surface of the object (such as the mask plate) is avoided; compared with a high-power laser device for removing metal particles on the surface of an object (such as a mask plate) in the prior art, the pickup device in the embodiment has the advantages of low cost, extremely low loss when the metal particles are picked up, and long service life. Because the flexion of picker is when adsorbing the metal particles on object surface, and the flexion is difficult for causing the fish tail to object surface, consequently, utilizes the metal particles on pickup apparatus pickup object surface among this embodiment, can also greatly reduce the probability to object surface damage.
Drawings
One or more embodiments are illustrated by way of example in the accompanying drawings, which correspond to the figures in which like reference numerals refer to similar elements and which are not to scale unless otherwise specified.
Fig. 1 is a schematic structural view of a pickup apparatus according to a first embodiment of the present invention after being disassembled;
fig. 2 is a schematic view of a combined structure of a pickup device according to a first embodiment of the present invention;
fig. 3 is a schematic structural view of a picker according to a first embodiment of the present invention;
fig. 4 is another configuration diagram of the picker according to the first embodiment of the present invention;
FIG. 5 is a schematic cross-sectional view of a magnetized portion according to a first embodiment of the present invention;
fig. 6 is a schematic structural view of a pickup device according to a first embodiment of the present invention.
Detailed Description
In order to make the objects, technical solutions and advantages of the embodiments of the present invention more apparent, the embodiments of the present invention will be described in detail below with reference to the accompanying drawings. However, it will be appreciated by those of ordinary skill in the art that numerous technical details are set forth in order to provide a better understanding of the present application in various embodiments of the present invention. However, the technical solution claimed in the present application can be implemented without these technical details and various changes and modifications based on the following embodiments.
A first embodiment of the present invention relates to a pickup apparatus, and a configuration diagram of the pickup apparatus according to the present embodiment after being disassembled is shown in fig. 1, and a configuration diagram of the pickup apparatus after being assembled is shown in fig. 2:
in particular, the pick-up device can be used for picking up metal particles on the surface of an object. In the present embodiment, the pickup device is mainly used to pick up the metal particles on the surface of the mask plate, but it is understood that the pickup device in the present embodiment can also be used to pick up the metal particles on the surface of other objects, for example: and metal residues in the preparation process of each film layer structure of the display panel can be adsorbed.
The pickup device includes: a magnetizing part 1, and a pickup 2 connected to the magnetizing part 1. The magnetization part 1 is used for magnetizing the pickup 2 so as to enable the pickup 2 to be magnetized, and therefore the pickup 2 can adsorb metal particles by utilizing the magnetism of the pickup 2, and the metal particles are picked up. Furthermore, the pickup device 2 can be used for picking up the residual metal particles on the surface of the mask plate, so that the problem that the yield is low when the display panel is prepared due to the metal particles on the surface of the mask plate is avoided; compared with the mode of removing the metal particles on the surface of the mask plate by using high-power laser equipment in the prior art, the pickup device in the embodiment has the advantages of low cost, extremely low loss when the metal particles are picked up, and long service life.
The picker 2 in this scheme includes: the bending portion 22 and the bending portion 22 are used for adsorbing metal particles, and the bending portion 22 of the pickup device 2 is used for adsorbing metal particles on the surface of the object, so that the end of the bending portion 22 is not easy to scratch the surface of the object, and therefore, when the pickup device in the embodiment is used for picking up the metal particles on the surface of the mask plate, the probability of damage to the surface of the object can be greatly reduced.
Wherein the material of the pickup 2 includes: magnetic materials such as neodymium iron boron, silicon steel, amorphous, nanocrystalline, ferrite, magnetic powder core and the like. Preferably, if the pickup 2 is used for picking up the metal residue on the surface of the mask plate, the material of the pickup 2 may be the same as the material of the surface of the mask plate, so that the probability of damage to the surface of the mask plate caused by the pickup 2 can be greatly reduced. For example: if the mask plate surface material comprises nickel iron, then the material of the picker 2 also comprises nickel iron.
The pickup 2 further includes: and a fixing portion 21 connected between the magnetizing portion 1 and the bending portion 22.
As shown in fig. 3, the fixing portion 21 is flat, and the angle formed by the bending portion 22 and the fixing portion 21 at the junction is greater than 120 °, and the angle referred to herein is the angle formed by the tangent to the bending portion and the fixing portion at the junction and the fixing portion at the bending portion, i.e., the angle α in fig. 3.
Specifically, in the case where the length of the bending portion 22 is not changed, the tip of the bending portion 22 is located on the extension line of the fixing portion 21, and when the metal particles are adsorbed, the larger the included angle formed by the bending portion 22 and the fixing portion 21 at the connection point is, the larger the contactable area of the bending portion 22 and the surface of the mask plate is. In this embodiment, when the included angle formed by the connection portion between the bending portion 22 and the fixing portion 21 is greater than 120 °, the contact area between the bending portion 22 and the surface of the mask plate can be ensured to be appropriate, so as to ensure that the bending portion 22 has a better adsorption effect on the metal particles. Preferably, the included angle formed by the bending portion 22 and the fixing portion 21 at the connection position, i.e. the angle α in fig. 3, is smaller than 135 °, so as to further ensure the adsorption effect of the bending portion 22 on the metal particles.
Further, as shown in fig. 3, the fixing portion 21 is flat, and the curved portion 22 has an arc-shaped surface. In a first direction perpendicular to the fixing portion 21 and toward the bending portion 22, which is an arrow direction shown in fig. 3, an angle between a tangent line of a lowest point of the bending portion 22 and a line connecting a tip of the bending portion 22 away from the fixing portion 21 and the lowest point of the bending portion 22, that is, an angle β in fig. 3, is greater than 30 °, thereby reducing a probability that the tip of the bending portion 22 away from the fixing portion 21 scratches the surface of the mask plate as much as possible.
Preferably, an angle between a tangent to the lowest point of the bent portion 22 and a line connecting a tip of the bent portion 22 away from the fixing portion 21 and the lowest point of the bent portion 22, i.e., an angle β in fig. 3, is less than 45 ° in the first direction. Because the smaller the included angle is, the larger the contactable area between the bending portion 22 and the surface of the mask plate is when the bending portion 22 is not changed in length, and the included angle between the tangent line of the lowest point of the bending portion 22 and the connecting line between the end of the bending portion 22 away from the fixing portion 21 and the lowest point of the bending portion 22 is smaller than 45 degrees, the probability that the end of the bending portion 22 away from the fixing portion 21 scratches the surface of the mask plate can be reduced, and the contactable area between the bending portion 22 and the surface of the mask plate can be ensured, so as to ensure the adsorption effect of the bending portion 22 on the metal particles.
The type of the bending portion 22 in fig. 2 and 3 of this embodiment is merely an example, and should not be limited thereto, and in practical application, the bending portion 22 is not easy to scratch the surface of the mask plate as long as it has an arc-shaped structure, and the surface of the arc-shaped structure protruding therefrom is used to adsorb metal particles on the surface of the mask plate.
It is noted that the cross-sectional shape of the curved portion 22 in the direction perpendicular to the length direction of the pickup 2 is circular, elliptical, or square with four corners having a curvature.
Specifically, this embodiment shows an implementation of the sectional shape of the curved portion 22 in the direction perpendicular to the longitudinal direction of the pickup 2, that is, the sectional shape of the curved portion 22 does not include corners, nor does it protrude in the circumferential direction, so that the side edges of the curved portion 22 are less likely to scratch the surface of the mask plate in the direction along the longitudinal direction of the pickup 2 when the curved portion 22 is placed on the surface of the mask plate to adsorb metal particles. It should be noted that the cross-sectional shape of the curved portion 22 in the present embodiment is merely an example, and should not be limited thereto, and in practical applications, the cross-sectional shape of the curved portion 22 along the length direction of the pickup 2 is not likely to scratch the surface of the mask plate as long as the cross-sectional shape does not include the corner.
In the case where the widest distance between any two points on the cross section of the curved portion 22 is not changed, in the direction perpendicular to the longitudinal direction of the pickup 2, the curved portion 22 having an elliptical cross section has a larger contact area with the surface of the mask plate than the curved portion 22 having a circular cross section, and thus has a better effect of adsorbing the metal particles; compared with the bending part 22 with the oval cross section, the bending part 22 with the square cross section having the radian at four corners has a larger contact area with the surface of the mask plate, and the bending part 22 has a better adsorption effect on the metal particles.
In addition, the widest distance between any two points on the cross section of the fixing portion 21 is larger than the widest distance between any two points on the cross section of the bending portion 22 in the direction perpendicular to the longitudinal direction of the pickup 2. For example: when the cross sections of the fixing portion 21 and the bending portion 22 are both circular, the fixing portion 21 can support the bending portion 22 because the widest distance between any two points on the cross section of the fixing portion 21 is greater than the widest distance between any two points on the cross section of the bending portion 22, that is, the diameter of the fixing portion 21 is greater than the diameter of the bending portion 22.
Preferably, the widest distance between any two points on the cross section of the fixing portion 21 is greater than or equal to 0.8 mm, and the widest distance between any two points on the cross section of the bending portion 22 is between 0.5 mm and 0.65 mm. In the scheme, the widest distance between any two points on the section of the bending part 22 is 0.5-0.65 mm, so that the flexibility of the bending part 22 is ensured, and nano-level metal particles on the surface of the mask plate can be well adsorbed. The widest distance between any two points on the section of the fixing part 21 is greater than or equal to 0.8 mm, so that when the widest distance between any two points on the section of the bending part 22 is between 0.5 mm and 0.65 mm, the fixing part 21 can support the bending part 22.
It is to be noted that, in the present embodiment, the sectional shape of the fixing portion 21 may be the same as that of the bending portion 22 in the direction perpendicular to the length direction of the pickup 2, thereby facilitating the preparation. The cross-sectional shape of the fixing portion 21 may be different from the cross-sectional shape of the bent portion 22, and the cross-sectional shape of the fixing portion 21 in the present embodiment may be circular, elliptical, square, or square with four corners curved, and the cross-sectional shape of the fixing portion 21 in the present embodiment is not limited.
The length of the fixed portion 21 is in the range of 5 cm to 6 cm, and the length of the bent portion 22 is 0.4 cm or less. In the scheme, the length of the bending part 22 is set to be less than 0.4 cm, so that the situation that the tail end of the bending part 22, which is far away from the fixing part 21, is drooped to scratch the surface of the mask plate due to the overlong bending part 22 is avoided. And the length range of the fixing part 21 is 5 cm-6 cm, so that the fixing part 21 can play a good supporting role on the bending part 22.
In one embodiment, as shown in fig. 2, the magnetizing part 1 includes: one end of the clamping mechanism 11 is used for clamping the picker 2; the other end of the clamping mechanism 11 is fixed with a conductive coil 12, and the pick-up 2 at least partially extends into the conductive coil 12, so that when the conductive coil 12 is electrified to generate a magnetic field, the part of the fixing part 21 extending into the conductive coil 12 can be magnetized, and the whole fixing part 21 and the bending part 22 can be magnetized. In the present embodiment, the fixing portion 21 is held by the holding mechanism 11, so that the fixing portion 21 can be easily replaced.
Specifically, as shown in fig. 5, the chucking mechanism 11 includes: the accommodating part 111, a positioning knob 112 connected with the accommodating part 111, and a positioning clamping block 113 positioned on one side of the positioning knob 112 far away from the accommodating part 111. The accommodating portion 111 is used for fixing the conductive coil 12, a through hole 10 is disposed in the middle of the positioning knob 112, and the fixing portion 21 can penetrate through the through hole 10 to be connected with the conductive coil 12 in the accommodating portion 111. The leaning clamping block 113 comprises a clamping block sliding groove, when the leaning knob 112 is screwed, the leaning clamping block 113 moves along the clamping block sliding groove, and the plurality of leaning clamping blocks 113 are gathered to clamp the fixing part 21. It should be noted that, 4 positioning clamping blocks 113 shown in fig. 5 are provided, and in practical applications, 2 or 3 positioning clamping blocks 113 may also be provided, and the structure and number of the positioning clamping blocks 113 in this embodiment are not limited as long as the fixing portion 21 can be clamped.
Preferably, the pickup device further includes: a regulating switch (not shown in the drawings) connected to the conductive coil 12; the adjustment switch is used to control the amount of current passed to the conductive coil 12 to change the magnetic magnitude of the pickup 2. Still be provided with the regulating switch who is connected with conductive coil 12 in this scheme, regulating switch can control the electric current size that lets in conductive coil 12 to change the magnetism size of picker 2, realize picking up the pertinence of the metal particle thing of different particle sizes, different quality on the object mask plate surface.
Further, as shown in fig. 6, the pickup device further includes: the lifting unit 3 and the turning unit 4 connected to the lifting unit 3, and the turning unit 4 is connected to the magnetizing unit 1.
The lifting part 3 is used for adjusting the vertical distance between the steering part 4 and the surface of the mask plate so as to adjust the vertical distance between the picker 2 and the surface of the mask plate; the turning part 4 is used for driving the magnetizing part 1 to rotate so as to drive the pickup 2 to rotate. In this scheme, the vertical distance between the pickup 2 and the surface of the mask plate is adjusted by the lifting part 3, and the rotation of the pickup 2 is realized by the turning part 4.
Specifically, the lifting unit 3 includes: a first lifting unit 31 and a second lifting unit 32; the second lifting unit 32 is movably connected to the first lifting unit 31, and the second lifting unit 32 is fixedly connected to the turning unit 4. The first lifting part 31 is used for roughly adjusting the vertical height between the steering part 4 and the surface of the mask plate, so that the rough adjustment of the vertical height between the pickup 2 and the surface of the mask plate is realized; the second elevating portion 32 is used for fine-tuning the vertical height between the turning portion 4 and the surface of the mask plate to achieve fine-tuning of the vertical height between the pickup 2 and the surface of the mask plate. The steering part 4 specifically comprises a universal joint and a steering engine, the universal joint is a mechanical mechanism, and an included angle of the pickup 2 perpendicular to the surface of the mask plate is adjusted, so that the contact angle of the pickup 2 and the surface of the mask plate is adjusted; the steering engine controls the clamping mechanism 11 to rotate 360 degrees, so that the position of the picker 2 in the horizontal direction of the surface of the mask plate is adjusted.
The following describes the pickup apparatus according to the present embodiment with reference to the use method: a mask plate is placed on the carrying platform and is driven to move to the position below the preset position of the picker 2; the adjusting switch adjusts the electric quantity led into the conductive coil 12, and the pickup 2 is magnetized; the first lifting and lowering section 31 automatically starts to descend, i.e., the entire pickup apparatus starts to descend; after the whole picking device is descended to a preset height, observing the distance between the picker 2 and the surface of the mask plate, and manually controlling the second lifting part 32 to enable the bending part 22 of the picker 2 to be in contact with the surface of the mask plate; the steering part 4 is controlled to rotate the pickup 2 in a small range, and metal particles are adsorbed; the first lifting part 31 is lifted up, and the steering part 4 is controlled to rotate the picker 2 to the storage box; and when the conductive coil 12 is powered off, the adsorbed metal particles fall to the storage box.
Compared with the prior art, in the pickup device provided in the embodiment, the magnetization part 1 is used for magnetizing the pickup 2, so that the pickup 2 is magnetized, and thus, the pickup 2 can adsorb metal particles by utilizing the magnetism of the pickup 2, and the metal particles are picked up. Furthermore, the pickup device 2 can be used for picking up the residual metal particles on the surface of the mask plate, so that the problem that the yield is low when the display panel is prepared due to the metal particles on the surface of the mask plate is avoided; compared with the prior art that the high-power laser equipment is used for removing the metal particles on the surface of the mask plate, the pickup device in the embodiment has the advantages of low cost, extremely low loss when the metal particles are picked up, and long service life; and because the flexion 22 of picker 2 is when adsorbing the metal particle thing on mask plate surface, the tip of flexion 22 is difficult for causing the fish tail to the object surface, consequently, when utilizing pickup apparatus to pick up the metal particle thing on mask plate surface in this embodiment, can also greatly reduce the probability that causes the damage to mask plate surface.
It will be understood by those of ordinary skill in the art that the foregoing embodiments are specific examples for carrying out the invention, and that various changes in form and details may be made therein without departing from the spirit and scope of the invention in practice.
Claims (10)
1. A pickup apparatus, comprising:
the magnetic part is used for magnetizing the pickup;
the pickup includes a bent portion for adsorbing metal particles.
2. The pickup device according to claim 1, wherein the magnetized portion includes: the clamping mechanism is used for clamping the picker at one end;
and the other end of the clamping mechanism is fixedly provided with a conductive coil, and at least part of the pickup extends into the conductive coil.
3. The pickup apparatus as set forth in claim 2, further comprising: a regulating switch connected with the conductive coil;
the adjusting switch is used for controlling the current passing through the conductive coil so as to change the magnetic size of the pickup.
4. The pickup apparatus as recited in claim 1, further comprising: the lifting part and the turning part connected with the lifting part are connected with the magnetizing part.
5. The pickup device according to claim 4, wherein the elevating portion includes: a first lifting unit and a second lifting unit; the second lifting part is movably connected to the first lifting part and fixedly connected with the steering part;
the first lifting part is used for roughly adjusting the height of the steering part, and the second lifting part is used for finely adjusting the height of the steering part.
6. The pickup device according to claim 1, wherein a cross-sectional shape of the curved portion in a direction perpendicular to a length direction of the pickup is a circle, an ellipse, or a square having four corners curved.
7. The pickup apparatus as claimed in claim 1, wherein the picker further comprises: and a fixing part connected between the magnetizing part and the bending part, wherein the widest distance between any two points on the cross section of the fixing part is larger than the widest distance between any two points on the cross section of the bending part in the direction perpendicular to the length direction of the pickup.
8. The pickup device as claimed in claim 7, wherein a widest distance between any two points on a cross section of the fixing portion is greater than or equal to 0.8 mm, and a widest distance between any two points on a cross section of the bending portion is between 0.5 mm and 0.65 mm.
9. The pickup device as claimed in claim 7, wherein the length of the fixing portion is in a range of 5 cm to 6 cm, and the length of the curved portion is less than or equal to 0.4 cm.
10. A pick-up device according to claim 7, characterised in that the bent portion ends on a line extending from the fixed portion, the bent portion and the fixed portion forming an angle of more than 120 ° at the junction;
preferably, the angle formed by the curved portion and the fixing portion at the junction is less than 135 °.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010880466.0A CN112007754B (en) | 2020-08-27 | 2020-08-27 | Pickup device |
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| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010880466.0A CN112007754B (en) | 2020-08-27 | 2020-08-27 | Pickup device |
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| CN112007754A true CN112007754A (en) | 2020-12-01 |
| CN112007754B CN112007754B (en) | 2022-11-11 |
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| CN202010880466.0A Active CN112007754B (en) | 2020-08-27 | 2020-08-27 | Pickup device |
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| CN106917062A (en) * | 2017-02-21 | 2017-07-04 | 成都晟翔科技有限公司 | A kind of method that use magnetic absorption principle removes nitriding salt bath slag |
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