CN111982815A - A positioning fixture for short working distance detection - Google Patents

Abstract

The invention discloses a positioning fixture for short working distance detection. There are a component positioning frame and a component limiting frame, the component limiting frame is fixedly connected to the front surface of the component positioning frame, and a component limiting plate is fixed on the top and bottom ends of the inner wall of the component limiting frame. The positioning frame passes through the inner ring of the female fixture; a plurality of locking screws pass through the component positioning frame and are threadedly connected to the threaded holes of the female fixture, and a plurality of top screw threads pass through the component positioning frame and press against the rear surface of the female fixture; During clamping, the component is placed in the inner ring of the sub-clamp, the front surface of the component abuts the rear surfaces of the two component limiting plates, and a plurality of component pressing blocks press the rear surface of the component to position the component in the sub-clamp. The present invention can realize a short working distance and precisely locate the posture of the element.

Description

A positioning fixture for short working distance detection

technical field

The invention relates to the technical field of positioning fixtures, in particular to a positioning fixture used for short working distance detection.

Background technique

Inspection is a crucial part of the manufacturing process and product application, which determines whether the quality of the product meets the requirements. When high-precision inspection is used, when the size of the defect is micron and nanometer, many inspection methods are different from the inspection tools and the waiting. The distance and angle of the detection element surface put forward stringent requirements. For example, when a high-power objective lens (50X-100X) is used, the working distance is generally only 0.5mm-1mm. While achieving stable clamping of the component at this working distance, it is a difficult problem to adjust the surface of the component to be perpendicular to the axis of the objective lens. .

SUMMARY OF THE INVENTION

The technical problem to be solved by the present invention is to provide a positioning fixture for short working distance detection, which can realize short working distance and accurately locate the posture (pitch, yaw) of components.

The technical scheme of the present invention is:

A positioning fixture for short working distance detection, comprising a mother fixture, a sub-fixture, a plurality of locking screws, a plurality of top screws, a plurality of element pressing blocks and an auxiliary positioning plate;

The main fixture is a frame structure, and the sub-fixture is a double-layer frame structure composed of a component positioning frame and a component limiting frame. The outer ring of the frame is located on the outer circumference of the outer ring of the element limiting frame, and the element limiting frame is fixedly connected to the front surface of the element positioning frame;

The element limiting frame is fixed with two element limiting plates, both of which are parallel to the frame of the element limiting frame and are respectively fixed on the top and bottom ends of the inner wall of the element limiting frame. The thickness of the component limiter is smaller than the thickness of the component limiter, the front surfaces of the two component limiters and the front surface of the component limiter are on the same plane, and the thickness of the component limiter is cut from the component limiter. The thickness is greater than that of the parent fixture;

The shape and size of the outer ring of the component positioning frame is larger than the shape and size of the inner ring of the mother fixture. When clamping, the component positioning frame passes through the inner ring of the mother fixture, and the component positioning frame is located at the rear of the mother fixture;

The plurality of locking screws pass through the through holes of the component positioning frame and are threadedly connected to the threaded holes of the female fixture, and the plurality of top screw threads pass through the threaded holes of the component positioning frame and then press against the rear surface of the female fixture;

When clamping, the component is placed in the inner ring where the sub-clamp component positioning frame and the component limiting frame overlap, and the front surface of the component abuts the rear surface of the two component limiting plates. The block presses the rear surface of the component to locate the component in the sub-jig;

The rear surface of the auxiliary positioning plate faces the front surface of the female fixture, the rear surface of the auxiliary positioning plate and adjacent to both ends thereof are provided with outer convex strips, and the rear surface of the auxiliary positioning plate is located at the edge of each outer convex strip. Corresponding inner convex strips are arranged on the inner side, that is, the two inner convex strips are located between the two outer convex strips, and a groove structure is formed between each outer convex strip and the corresponding inner convex strip. The thickness of the inner convex strips is the same, that is, the rear surfaces of the outer convex strips and the inner convex strips are located on the same plane. When the components are assembled, the rear surfaces of the two outer convex strips on the auxiliary positioning plate are respectively close to the front surface of the mother clamp, that is, the mother clamp. On the positioning surface, the vertical frame portion of the component limiting frame extends into the corresponding groove of the auxiliary positioning plate, and the rear surfaces of the two inner protruding strips are both in contact with the front surface of the component.

The number of the locking screws is four, and the component positioning frame is provided with four through holes. The four through holes are evenly distributed along the frame of the component positioning frame. The four locking screws pass through the corresponding through holes of the component positioning frame respectively. The screw is connected to the threaded hole of the female fixture.

The element pressing block is of an L-shaped pressing block structure. The horizontal part of each element pressing block extends into the inner ring where the fixture element positioning frame and the element limiting frame overlap to press the rear surface of the element. The vertical part of the component abuts the rear surface of the component positioning frame.

The component positioning frame, the component limiting frame and the two component limiting plates of the sub-clamp are of an integral plastic structure.

Advantages of the present invention:

In the present invention, after the clamping of the components is completed, the sub-mother clamps are taken as a whole, the front surfaces of the components and the front surfaces of the main clamps are in contact and coplanar, and the sub-mother clamps are loaded into the equipment as a whole. The loading of components can be completed; after the layer conversion between the surface to be inspected, that is, the front surface, and the positioning surface, that is, the front surface of the parent fixture, the working distance of the inspection tool only needs to be greater than the thickness of the component limit plate of the sub-jig. The edge of the component can be detected and the edge of the component can be detected; the positioning surface of the sub-clamp of the present invention, that is, the rear surface of the component limit plate does not require high-precision machining, and allows deformation, so the thickness of the component limit plate can be designed to be very thin, such as When using a high-power objective lens for observation, if the working distance is 0.5mm, the thickness of the component limit plate can be designed to be 0.3mm-0.4mm, which can meet the detection requirements.

Description of drawings

FIG. 1 is a schematic view of the structure of the present invention for component clamping.

Figure 2 is an exploded view of the present invention.

FIG. 3 is a schematic structural diagram of the clamping element of the sub-clamp.

Figure 4 is a transverse cross-sectional view of the sub-clamp clamping element.

Fig. 5 is a longitudinal cross-sectional view of a sub-clamp holding member.

FIG. 6 is a schematic diagram of the structure of the mother clamp and the auxiliary positioning plate.

FIG. 7 is a cross-sectional view of the sub-jig after the sub-jig is installed in the mother-jig and the adjustment is completed.

Detailed ways

The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the accompanying drawings in the embodiments of the present invention. Obviously, the described embodiments are only a part of the embodiments of the present invention, rather than all the embodiments. Based on the embodiments of the present invention, all other embodiments obtained by those of ordinary skill in the art without creative efforts shall fall within the protection scope of the present invention.

See Figures 1 to 7, a positioning fixture for short working distance detection, including a mother fixture 1, a sub-fixture 2, four locking screws 3, three top screws 4, four element pressing blocks 5 and auxiliary positioning plate 7;

The main fixture 1 is a rectangular frame structure, and the sub fixture 2 is a double-layer rectangular frame structure composed of a component positioning frame 21 and a component limiting frame 22. The inner circles of the component positioning frame 21 and the component limiting frame 22 overlap each other, and the component positioning frame The outer ring of 21 is located on the outer periphery of the outer ring of the component limiting frame 22, and the component limiting frame 22 is fixedly connected to the front surface of the component positioning frame 21;

A vertically arranged component limiting plate 23 is fixed on the upper and lower horizontal surfaces of the inner wall of the component limiting frame 22. The thickness of each component limiting plate 23 is smaller than the thickness of the component limiting frame 22. The two component limiting plates 23 The front surface of the component limiting frame 22 and the front surface of the component limiting frame 22 are located on the same plane, and the thickness of the component limiting frame 22 and the thickness of the component limiting plate 23 are greater than the thickness of the mother fixture 1;

The component positioning frame 21, the component limiting frame 22 and the two component limiting plates 23 of the sub-clamp are integrally formed into a plastic structure;

The shape and size of the outer ring of the component positioning frame 21 is larger than that of the inner ring of the female fixture 1. When clamping, the component positioning frame 22 passes through the inner ring of the female fixture 1, and the component positioning frame 21 is located at the rear of the female fixture 1;

The component positioning frame 21 is provided with four through holes 24, the four through holes 24 are respectively adjacent to the four corners of the component positioning frame 21, and the four locking screws 3 are respectively threaded through the corresponding through holes 24 of the component positioning frame. Connected to the threaded hole 11 of the female fixture 1, the three jack screws 4 thread through the threaded hole 25 of the component positioning frame 21 and then press against the rear surface of the female fixture 1;

When clamping, the component 6 is placed in the inner ring where the sub-clamp component positioning frame 21 and the component limiting frame 22 overlap, and the front surface of the component 6 is against the rear surface of the two component limiting plates 23, and the component pressing block 5 is L. The horizontal part of each element pressing block 5 protrudes into the inner ring where the fixture element positioning frame 21 and the element limiting frame 22 overlap to press the rear surface of the element 6, and the vertical part of each element pressing block 5 Partly abuts the rear surface of the component positioning frame 21;

The rear surface of the auxiliary positioning plate 7 faces the front surface of the female fixture 1. The rear surface of the auxiliary positioning plate 7 and adjacent to both ends thereof are provided with outer protruding strips 71. The rear surface of the auxiliary positioning plate 7 is located on each outer protrusion. The inner sides of the strips 71 are provided with corresponding inner convex strips 72 , that is, the two inner convex strips 72 are located between the two outer convex strips 71 , and a groove 73 is formed between each outer convex strip 71 and the corresponding inner convex strip 72 . Structure, the convex thickness of the outer convex strips 71 and the inner convex strips 72 is the same, that is, the rear surfaces of the outer convex strips 71 and the inner convex strips 72 are located on the same plane. When the components are assembled, the rear surfaces of the two outer convex strips 71 on the auxiliary positioning plate They are respectively close to the front surface of the female fixture 1, that is, the positioning surface of the female fixture, and the vertical frame portion of the component limiting frame 22 extends into the corresponding groove 73 of the auxiliary positioning plate 7. The front surface of the component 6, ie the surface of the component to be inspected, is in contact.

The clamping steps of the components are as follows:

(1), see Fig. 3-Fig. 5, the element 6 is placed in the inner ring where the sub-clamp element positioning frame 21 and the element limiting frame 22 overlap, and the front surface of the element 6 abuts the rear surface of the two element limiting plates 23 , press the rear surface of the element 6 through the four element pressing blocks 5 to complete the clamping of the element in the sub-jig 1;

(2), see Fig. 6, install the auxiliary positioning plate 7 on the female fixture 1, the outer convex strips 71 of the auxiliary positioning plate 7 are in contact with the front surface of the female fixture 1, and the two outer convex strips 71 of the auxiliary positioning plate 7 are in contact with the front surface of the female fixture 1. coplanar with the two inner convex strips 72;

(3), see Fig. 7, put the sub-jig 2 that clamps the component 6 to be tested into the mother fixture 1, so that the front surface of the component 6, that is, the surface to be tested, is in contact with the two inner protruding strips 72 of the auxiliary positioning plate 7 contact, the four locking screws 3 respectively pass through the corresponding through holes 24 of the component positioning frame and then are threadedly connected to the threaded holes 11 of the female fixture 1, that is, the stable contact between the surface to be inspected of the component 6 and the auxiliary positioning plate 7 is completed; three The thread of each jack screw 4 passes through the threaded hole 25 of the component positioning frame 21 and then presses against the rear surface of the female fixture 1; Fixed to each other, the surface to be inspected of the component to be tested 6 is in contact with the two inner convex strips 72 of the auxiliary positioning plate 7, that is, the surface to be inspected of the component to be tested 6 is coplanar with the outer convex strip 71, and the outer convex strip 71 and the female fixture The front surface of 1 is in direct contact, that is, the outer convex strips 71 are coplanar with the front surface of the female fixture 1, so the surface to be inspected of the component 6 is coplanar with the front surface of the female fixture 1, that is, the positioning surface of the female fixture.

(3), see Fig. 1, after completing the clamping, remove the auxiliary positioning plate 7, that is, complete the component clamping, the thickness between the front surface of the component 6 and the front surface of the sub-clamp 2 is only the thickness of the component limit plate 23 , the front surface of the component 6 is coplanar with the front surface of the mother fixture 1 , the child and mother fixtures are loaded into the equipment as a whole, and the component loading can be completed only by positioning the front surface of the mother fixture 1 .

Although embodiments of the present invention have been shown and described, it will be understood by those skilled in the art that various changes, modifications, and substitutions can be made in these embodiments without departing from the principle and spirit of the invention and modifications, the scope of the present invention is defined by the appended claims and their equivalents.

Claims (4)

1. The utility model provides a positioning fixture for short working distance detects which characterized in that: the device comprises a female clamp, a male clamp, a plurality of locking screws, a plurality of jackscrews, a plurality of element pressing blocks and an auxiliary positioning plate;

the female clamp is of a frame structure, the sub-clamp is of a double-layer frame structure consisting of an element positioning frame and an element limiting frame, inner rings of the element positioning frame and the element limiting frame are overlapped with each other, an outer ring of the element positioning frame is positioned on the periphery of the outer ring of the element limiting frame, and the element limiting frame is fixedly connected to the front surface of the element positioning frame;

the element limiting frame is fixedly provided with two element limiting plates, the two element limiting plates are parallel to the frame of the element limiting frame and are respectively fixed on the top end and the bottom end of the inner wall of the element limiting frame, the thickness of each element limiting plate is smaller than that of the element limiting frame, the front surfaces of the two element limiting plates and the front surface of the element limiting frame are positioned on the same plane, and the thickness of the element limiting plate cut by the thickness of the element limiting frame is larger than that of the female clamp;

the shape and size of the outer ring of the element positioning frame are larger than those of the inner ring of the female clamp, the element limiting frame penetrates through the inner ring of the female clamp during clamping, and the element positioning frame is positioned behind the female clamp;

the locking screws penetrate through the through holes of the element positioning frame and then are connected to the threaded holes of the female clamp in a threaded manner, and the jackscrew threads penetrate through the threaded holes of the element positioning frame and then abut against the rear surface of the female clamp;

during clamping, the element is arranged in the inner ring of the sub-clamp in which the element positioning frame and the element limiting frame are overlapped, the front surface of the element abuts against the rear surfaces of the two element limiting plates, and during clamping, the element pressing blocks press the rear surfaces of the elements to position the elements in the sub-clamp;

the rear surface of the auxiliary positioning plate faces the front surface of the female fixture, outer convex strips are arranged on the rear surface of the auxiliary positioning plate and adjacent to two ends of the auxiliary positioning plate, corresponding inner convex strips are arranged on the rear surface of the auxiliary positioning plate and located on the inner sides of the outer convex strips, namely the two inner convex strips are located between the two outer convex strips, a groove structure is formed between each outer convex strip and the corresponding inner convex strip, the thicknesses of the outer convex strips and the thickness of the inner convex strips are equal, namely the rear surfaces of the outer convex strips and the inner convex strips are located on the same plane, when the element is assembled, the rear surfaces of the two outer convex strips on the auxiliary positioning plate are respectively tightly attached to the front surface of the female fixture, namely a positioning surface of the female fixture, the vertical frame part of the element limiting frame extends into the corresponding groove of the auxiliary positioning plate, and the rear surfaces of the two inner convex strips.

2. A positioning fixture for short working distance detection as claimed in claim 1, characterized in that: the number of the locking screws is four, the element positioning frame is provided with four through holes, the four through holes are uniformly distributed along the frame of the element positioning frame, and the four locking screws respectively penetrate through the through holes corresponding to the element positioning frame and then are connected to the threaded holes of the female clamp in a threaded mode.

3. A positioning fixture for short working distance detection as claimed in claim 1, characterized in that: the element pressing blocks are of an L-shaped pressing block structure, the horizontal part of each element pressing block extends into the inner ring overlapped by the clamp element positioning frame and the element limiting frame to press the rear surface of the element, and the vertical part of each element pressing block is tightly attached to the rear surface of the element positioning frame.

4. A positioning fixture for short working distance detection as claimed in claim 1, characterized in that: the element positioning frame, the element limiting frame and the two element limiting plates of the sub-clamp are of an integral molding structure.

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