CN111890261A - Clamping device for machining metal plane target - Google Patents
Clamping device for machining metal plane target Download PDFInfo
- Publication number
- CN111890261A CN111890261A CN202010793969.4A CN202010793969A CN111890261A CN 111890261 A CN111890261 A CN 111890261A CN 202010793969 A CN202010793969 A CN 202010793969A CN 111890261 A CN111890261 A CN 111890261A
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- China
- Prior art keywords
- clamping device
- machining
- wheel
- plane target
- metal plane
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- B—PERFORMING OPERATIONS; TRANSPORTING
- B25—HAND TOOLS; PORTABLE POWER-DRIVEN TOOLS; MANIPULATORS
- B25B—TOOLS OR BENCH DEVICES NOT OTHERWISE PROVIDED FOR, FOR FASTENING, CONNECTING, DISENGAGING, OR HOLDING
- B25B11/00—Work holders not covered by any preceding group in the subclass, e.g. magnetic work holders, vacuum work holders
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
- C23C14/34—Sputtering
- C23C14/3407—Cathode assembly for sputtering apparatus, e.g. Target
- C23C14/3414—Metallurgical or chemical aspects of target preparation, e.g. casting, powder metallurgy
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- Chemical & Material Sciences (AREA)
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Materials Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- Jigs For Machine Tools (AREA)
Abstract
The invention relates to the technical field of planar target manufacturing equipment and discloses a clamping device for machining a metal planar target, which comprises an operating platform, wherein the bottom of the operating platform is connected with a rotating mechanism, the front end and the rear end of the top of the operating platform are both provided with a strip-shaped groove, two sliding blocks are connected inside the strip-shaped groove in a sliding manner, and the top of each sliding block is connected with a fixed rod; according to the invention, through the arrangement of the rotating mechanism, the strip-shaped groove, the sliding block, the fixed rod, the compression spring, the pressing block, the limiting block, the threaded cover, the fan frame, the motor, the output wheel, the double-rail wheel, the transmission wheel, the rotating rod and the fan blade, the problems that a clamping device for machining a traditional metal plane target material can only clamp and fix the size, cannot clean scraps and cannot adjust the angle are solved, the clamping device has the advantages of clamping plane target materials with different sizes, cleaning dust and adjusting the angle, is suitable for the production requirements of modern factories, improves the production efficiency and is worthy of popularization and use.
Description
Technical Field
The invention relates to the technical field of planar target manufacturing equipment, in particular to a clamping device for machining a metal planar target.
Background
The metal plane target material needs to be machined, because the metal plane target material has no toughness and plasticity, the machined metal plane target material needs to be clamped and fixed on a machine tool through a clamp, the traditional clamping device for machining the plane target material at present can not clamp plane target materials with different sizes, only target materials with uniform specifications can be clamped, in the actual production, the shape and the size of the target materials have larger difference along with the difference of sputtering machine tables, and the target materials have various irregular target materials such as round, rectangular and other irregular target materials, in the preparation process of the irregular target materials, because the shape is irregular and the structure is complex, the machining difficulty is greatly improved compared with the target materials with the common shape, certain limitation is realized, meanwhile, the machining fragments, dust and impurities and the like generated by a platform seriously influence the clamping of the target materials, and the cleaning effect on dust and fragments is avoided, the clamping device is used for clamping the metal plane target material machining, and solves the problems that the clamping device is easy to cause certain influence on the target material machining, the production efficiency is seriously influenced, most of target material supports are fixed, the testing angle cannot be freely changed, the testing angle needs to be clamped again when the testing angle is changed every time, and the clamping device is quite troublesome to use.
Disclosure of Invention
The invention aims to provide a clamping device for machining a metal plane target, which has the advantages of clamping plane targets with different sizes, cleaning dust and adjusting angles, and solves the problems that the traditional clamping device for machining the metal plane target can only clamp and fix the size, cannot clean chips and cannot adjust the angles.
In order to achieve the purpose, the invention provides the following technical scheme: a clamping device for machining a metal plane target comprises an operation platform, wherein the bottom of the operation platform is connected with a rotating mechanism, the front end and the rear end of the top of the operation platform are respectively provided with a strip-shaped groove, the inside of the strip-shaped groove is connected with two sliding blocks in a sliding manner, the top of each sliding block is connected with a fixed rod, the surface of each fixed rod is movably sleeved with a compression spring, the bottom of each compression spring is connected with a pressing block in a clamping manner, the top of each compression spring is connected with a limiting block in a clamping manner, the top of each fixed rod penetrates through the limiting block and the inside of the corresponding pressing block and is in threaded connection with a threaded cover, the right side of the top of the operation platform is connected with a recovery frame, the bottom of the recovery frame penetrates through the right side of the top of the operation platform and is communicated with a recovery box, the left side, the fixed cover of output of motor has connect the output wheel, the surface of output wheel runs through operation platform's top and fan frame's bottom and fixed cover in proper order through the belt and has connect the double track wheel, the surface of double track wheel has connect the drive wheel through the fixed cover of belt, the double track wheel has all fixedly cup jointed the dwang with the axle center department of drive wheel, the right-hand member of dwang is connected with the fan leaf, the left end of dwang is passed through the bearing and is rotated the left side of connecting at the fan frame inner wall.
Preferably, slewing mechanism is including rotating the case, the notch has been seted up to the both sides of rotating the case, the bottom of rotating the incasement wall is connected with the support column, the top of support column is rotated through the bearing and is connected with rotatory section of thick bamboo, the lower extreme meshing of rotatory section of thick bamboo has the tooth piece disc, and the tooth piece disc activity cup joints on the support column on the surface, the both sides of tooth piece disc all are connected with the driving lever, the notch is passed to the one end that the tooth piece disc was kept away from to the driving lever, the top of rotatory section of thick bamboo is run through the top of rotating the case and is connected the center department.
Preferably, the bottom of the inner wall of the rotating box is connected with a limiting spring in a clamping mode through a metal sheet, the inside of the limiting spring is sleeved on the surface of the supporting column, and the top of the limiting spring is connected with the bottom of the tooth block disc in a clamping mode.
Preferably, four the shock pad has all been pasted with operation platform's top to the bottom of pressing the briquetting, and the material of shock pad is soft silica gel.
Preferably, the bottom of the rotating mechanism is connected with a bottom plate, universal wheels are connected to the periphery of the bottom plate, and the surface of each universal wheel is provided with a limiter.
Preferably, the right side of the recovery box is connected with a handle, and an anti-slip sleeve is fixedly sleeved on the surface of the handle.
Compared with the prior art, the invention has the following beneficial effects:
according to the invention, through the arrangement of the strip-shaped groove, the sliding block, the fixed rod, the compression spring, the pressing block, the limiting block and the threaded cover, the problem that the traditional clamping device for machining the metal plane target material can only clamp and fix the metal plane target material with a fixed size is solved, the flexibility of clamping the target material is effectively improved, and the clamping device can be suitable for use of target materials with different specifications;
according to the invention, through the arrangement of the recovery frame, the recovery box, the fan frame, the motor, the output wheel, the double-rail wheel, the transmission wheel, the rotating rod and the fan blade, the problem that a clamping device for machining the traditional metal plane target cannot clean scraps is solved, the machining deviation of the plane target due to the accumulation of the scraps is prevented, and the cleanliness during machining is improved;
according to the invention, through the arrangement of the rotating box, the notch, the supporting column, the rotating cylinder and the toothed block disc, the problem that the angle of a clamping device for machining the traditional metal plane target cannot be adjusted is solved, the rotating angle of the target can be adjusted in real time according to production requirements in the machining process, and the machining working efficiency is improved.
Drawings
FIG. 1 is a schematic top view of the structure of the present invention;
FIG. 2 is a front cross-sectional view of the structure of the present invention;
FIG. 3 is a side cross-sectional view of the structure of the present invention;
fig. 4 is a partial structural sectional view of the present invention.
In the figure: 1. an operating platform; 2. a rotating mechanism; 201. a rotating box; 202. a notch; 203. a support pillar; 204. a rotary drum; 205. a toothed block disc; 206. a deflector rod; 3. a strip-shaped groove; 4. a slider; 5. fixing the rod; 6. a compression spring; 7. a pressing block; 8. a limiting block; 9. a threaded cap; 10. a recovery frame; 11. a recovery box; 12. a fan frame; 13. a motor; 14. an output wheel; 15. a double-rail wheel; 16. a driving wheel; 17. rotating the rod; 18. a fan blade; 19. a limiting spring; 20. a shock pad; 21. a base plate; 22. a universal wheel; 23. a stopper; 24. a handle; 25. an anti-slip sleeve; 26. and a through hole.
Detailed Description
The technical solutions in the embodiments of the present invention will be clearly and completely described below with reference to the drawings in the embodiments of the present invention, and it is obvious that the described embodiments are only a part of the embodiments of the present invention, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments given herein without making any creative effort, shall fall within the protection scope of the present invention.
Referring to fig. 1-4, a clamping device for machining a metal plane target comprises an operation platform 1, a rotating mechanism 2 is connected to the bottom of the operation platform 1, a strip-shaped groove 3 is formed in each of the front end and the rear end of the top of the operation platform 1, two sliders 4 are slidably connected to the inside of the strip-shaped groove 3, a fixing rod 5 is connected to the top of each slider 4, a compression spring 6 is movably sleeved on the surface of each fixing rod 5, a pressing block 7 is clamped to the bottom of the compression spring 6, a limiting block 8 is clamped to the top of the compression spring 6, the top of each fixing rod 5 penetrates through the limiting block 8 and the inside of the corresponding pressing block 7 and is in threaded connection with a threaded cover 9, a recovery frame 10 is connected to the right side of the top of the operation platform 1, a recovery box 11 is communicated to the right side of the bottom of the recovery frame 10, a fan frame 12 is connected to the left side, the bottom of operation platform 1 inner wall is connected with motor 13, the fixed cover of output of motor 13 has connect output wheel 14, the surface of output wheel 14 passes through the top of operation platform 1 and the bottom of fan frame 12 in proper order through the belt and fixed cover has connect double track wheel 15, the fixed cover of surface of double track wheel 15 has connect drive wheel 16 through the belt, double track wheel 15 and the axle center department of drive wheel 16 all fixedly cup joint dwang 17, the right-hand member of dwang 17 is connected with fan leaf 18, the left end of dwang 17 passes through the bearing and rotates the left side of connecting at fan frame 12 inner wall.
Further, slewing mechanism 2 is including rotating case 201, notch 202 has been seted up to the both sides of rotating case 201, the bottom of rotating the case 201 inner wall is connected with support column 203, the top of support column 203 is rotated through the bearing and is connected with rotatory section of thick bamboo 204, the lower extreme meshing of rotatory section of thick bamboo 204 has tooth piece disc 205, and tooth piece disc 205 activity cup joints on the surface of support column 203, the both sides of tooth piece disc 205 all are connected with driving lever 206, notch 202 is passed to the one end that tooth piece disc 205 was kept away from to driving lever 206, the top of rotatory section of thick bamboo 204 is run through the top of rotating case 201 and is connected in the center department of operation platform 1 bottom, through setting up slewing mechanism 2, thereby can the effect of angle of adjustment processing to the.
Further, the bottom of the inner wall of the rotating box 201 is connected with a limiting spring 19 in a clamping mode through a metal sheet, the inside of the limiting spring 19 is sleeved on the surface of the supporting column 203, the top of the limiting spring 19 is connected with the bottom of the tooth block disc 205 in a clamping mode, and the limiting spring 19 is arranged, so that the rotating mechanism 2 is fixed, and the limiting effect is achieved.
Furthermore, the damping pads 20 are adhered to the bottoms of the four pressing blocks 7 and the top of the operating platform 1, the damping pads 20 are made of soft silica gel, and the damping pads 20 are arranged, so that the target is protected when being clamped and fixed.
Further, the bottom of slewing mechanism 2 is connected with bottom plate 21, all is connected with universal wheel 22 around the bottom plate 21 bottom, and universal wheel 22's surface mounting has stopper 23, through setting up universal wheel 22 to the removal of convenience of installation, stopper 23 has played fixed effect.
Further, the right side of retrieving box 11 is connected with handle 24, and the fixed surface of handle 24 has cup jointed anti-skidding cover 25, through setting up anti-skidding cover 25 to in the use to handle 24, play increase frictional force and prevent the effect of skidding.
The working principle is as follows: a worker moves the device to a proper position, fixes the device by using a limiting stopper 23, starts a motor 13, the motor 13 drives an output wheel 14 to rotate, the output wheel 14 drives a double-rail wheel 15 to rotate through a belt, the double-rail wheel 15 drives a driving wheel 16 to rotate, and simultaneously drives a rotating rod 17 to rotate, the rotating rod 17 enables a fan blade 18 to rotate to blow air, and debris is blown into a recovery box 11 below a recovery frame 10 to clean dust and debris;
placing a target material on the top of an operation platform 1, moving a fixed rod 5, driving a sliding block 4 to horizontally slide in a strip-shaped groove 3 by the fixed rod 5, extruding a compression spring 6 by a limit block 8, extruding a pressing block 7 downwards by the compression spring 6, contacting and fixing the target material by the pressing block 7, screwing a threaded cover 9, pulling down a deflector rod 206, driving a toothed block disc 205 by the deflector rod 206 to vertically move and press a limiting spring 19 downwards, and fixing the target material;
if the angle needs to be changed during machining, when the operating platform 1 needs to be rotated, the operating platform 1 drives the rotating cylinder 204 to rotate, the shifting lever 206 is loosened after the operating platform 1 is adjusted to a proper angle, and the limiting spring 19 pushes the tooth block disc 205 to vertically move so as to limit and fix the rotating cylinder 204.
It is noted that, herein, relational terms such as first and second, and the like may be used solely to distinguish one entity or action from another entity or action without necessarily requiring or implying any actual such relationship or order between such entities or actions. Also, the terms "comprises," "comprising," or any other variation thereof, are intended to cover a non-exclusive inclusion, such that a process, method, article, or apparatus that comprises a list of elements does not include only those elements but may include other elements not expressly listed or inherent to such process, method, article, or apparatus. Without further limitation, an element defined by the phrase "comprising an … …" does not exclude the presence of other identical elements in a process, method, article, or apparatus that comprises the element.
Although embodiments of the present invention have been shown and described, it will be appreciated by those skilled in the art that changes, modifications, substitutions and alterations can be made in these embodiments without departing from the principles and spirit of the invention, the scope of which is defined in the appended claims and their equivalents.
Claims (6)
1. The utility model provides a clamping device of metal plane target machine tooling, includes operation platform (1), its characterized in that: the bottom of the operating platform (1) is connected with a rotating mechanism (2), the front end and the rear end of the top of the operating platform (1) are respectively provided with a strip-shaped groove (3), the inside of the strip-shaped groove (3) is connected with two sliders (4) in a sliding manner, the top of each slider (4) is connected with a fixed rod (5), a compression spring (6) is sleeved on the surface of each fixed rod (5) in a movable manner, a pressing block (7) is clamped at the bottom of each compression spring (6), a limiting block (8) is clamped at the top of each compression spring (6), the top of each fixed rod (5) penetrates through the limiting block (8) and the inside of each pressing block (7) and is in threaded connection with a threaded cover (9), the right side of the top of the operating platform (1) is connected with a recovery frame (10), and the bottom of the recovery frame (10) penetrates through the right side of, the left side at operation platform (1) top is connected with fan board (12), through-hole (26) have been seted up in the left side of fan board (12), the bottom of operation platform (1) inner wall is connected with motor (13), the fixed cover of output of motor (13) has connect output wheel (14), the surface of output wheel (14) is through the belt in proper order run through the top of operation platform (1) and the bottom of fan board (12) and fixed the cup joint have two rail wheel (15), the surface of two rail wheel (15) has fixed drive wheel (16) of cup jointing through the belt, equal fixed dwang (17) of having cup jointed in axle center department of two rail wheel (15) and drive wheel (16), the right-hand member of dwang (17) is connected with fan leaf (18), the left end of dwang (17) is passed through the bearing and is rotated the left side of connecting at fan board (12) inner wall.
2. The clamping device for machining the metal plane target according to claim 1, wherein the clamping device comprises: slewing mechanism (2) are including rotating case (201), notch (202) have been seted up to the both sides of rotating case (201), the bottom of rotating case (201) inner wall is connected with support column (203), the top of support column (203) is rotated through the bearing and is connected with rotatory section of thick bamboo (204), the lower extreme meshing of rotatory section of thick bamboo (204) has tooth piece disc (205), and tooth piece disc (205) activity cup joints on the surface of support column (203), the both sides of tooth piece disc (205) all are connected with driving lever (206), notch (202) are passed to the one end that tooth piece disc (205) were kept away from in driving lever (206), the top of rotatory section of thick bamboo (204) runs through the top of rotating case (201) and connects the center department in operation platform (1) bottom.
3. The clamping device for machining the metal plane target according to claim 2, wherein: the bottom of rotating case (201) inner wall has spacing spring (19) through the sheetmetal joint, and the inside of spacing spring (19) cup joints the surface at support column (203), the top of spacing spring (19) and the bottom joint of dog disc (205).
4. The clamping device for machining the metal plane target according to claim 1, wherein the clamping device comprises: four shock pads (20) are pasted on the bottom of the pressing block (7) and the top of the operating platform (1), and the shock pads (20) are made of soft silica gel.
5. The clamping device for machining the metal plane target according to claim 1, wherein the clamping device comprises: the bottom of slewing mechanism (2) is connected with bottom plate (21), all be connected with universal wheel (22) around bottom plate (21) bottom, and the surface mounting of universal wheel (22) has stopper (23).
6. The clamping device for machining the metal plane target according to claim 1, wherein the clamping device comprises: the right side of the recovery box (11) is connected with a handle (24), and an anti-slip sleeve (25) is fixedly sleeved on the surface of the handle (24).
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010793969.4A CN111890261A (en) | 2020-08-10 | 2020-08-10 | Clamping device for machining metal plane target |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010793969.4A CN111890261A (en) | 2020-08-10 | 2020-08-10 | Clamping device for machining metal plane target |
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| Publication Number | Publication Date |
|---|---|
| CN111890261A true CN111890261A (en) | 2020-11-06 |
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Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010793969.4A Pending CN111890261A (en) | 2020-08-10 | 2020-08-10 | Clamping device for machining metal plane target |
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| Country | Link |
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| CN (1) | CN111890261A (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN119704094A (en) * | 2024-11-27 | 2025-03-28 | 鑫磊压缩机股份有限公司 | Assembling method of target material assembly with reusable tooling |
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| KR20160115594A (en) * | 2015-03-27 | 2016-10-06 | 박찬문 | Position adjustable for easy clamping jig |
| CN208099841U (en) * | 2018-03-28 | 2018-11-16 | 东莞市欧莱溅射靶材有限公司 | A clamping device for machining a metal plane target |
| CN208744631U (en) * | 2018-08-24 | 2019-04-16 | 中山市恒玻钢化玻璃有限公司 | A fixing device with good clamping effect for laminated glass processing |
| CN210161016U (en) * | 2019-06-14 | 2020-03-20 | 新沂巨兴自动化科技有限公司 | Limiting and rotating mechanism for electrical mechanical equipment |
| CN210999072U (en) * | 2019-08-30 | 2020-07-14 | 龙南骏亚精密电路有限公司 | PCB printed circuit board production and processing device |
| CN211005587U (en) * | 2019-10-31 | 2020-07-14 | 许小红 | Fixing and pressing device for planar target |
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2020
- 2020-08-10 CN CN202010793969.4A patent/CN111890261A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR20160115594A (en) * | 2015-03-27 | 2016-10-06 | 박찬문 | Position adjustable for easy clamping jig |
| CN208099841U (en) * | 2018-03-28 | 2018-11-16 | 东莞市欧莱溅射靶材有限公司 | A clamping device for machining a metal plane target |
| CN208744631U (en) * | 2018-08-24 | 2019-04-16 | 中山市恒玻钢化玻璃有限公司 | A fixing device with good clamping effect for laminated glass processing |
| CN210161016U (en) * | 2019-06-14 | 2020-03-20 | 新沂巨兴自动化科技有限公司 | Limiting and rotating mechanism for electrical mechanical equipment |
| CN210999072U (en) * | 2019-08-30 | 2020-07-14 | 龙南骏亚精密电路有限公司 | PCB printed circuit board production and processing device |
| CN211005587U (en) * | 2019-10-31 | 2020-07-14 | 许小红 | Fixing and pressing device for planar target |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN119704094A (en) * | 2024-11-27 | 2025-03-28 | 鑫磊压缩机股份有限公司 | Assembling method of target material assembly with reusable tooling |
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Application publication date: 20201106 |