CN111811430A - Optical element surface shape measuring device and method in low-temperature environment - Google Patents
Optical element surface shape measuring device and method in low-temperature environment Download PDFInfo
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Abstract
The invention provides an optical element surface shape measuring device and method under a low-temperature environment, which can be accurate, reliable and convenient to operate, and aims to solve the technical problem that the existing optical element surface shape measuring method under the low-temperature environment is limited by the caliber of an interferometer and the technical problem that the deformation of vacuum container window glass can introduce measuring errors. The optical element surface shape measuring device comprises a wavefront sensor, a collimator and a vacuum container; the collimator is provided with window glass, the vacuum container is internally provided with a temperature control cover, and the temperature control cover is provided with a liquid nitrogen heat sink; the temperature control cover and the liquid nitrogen heat sink jointly provide a low-temperature environment with design requirements for the optical element to be tested; the collimator is hermetically connected with the vacuum container to form a sealed cavity together; the wavefront sensor is positioned outside the vacuum container and corresponds to the window glass on the collimator; the wavefront sensor can both output a light beam and detect a light beam exiting the window glass. Compared with the traditional interference measurement method, the method has strong airflow resistance and vibration resistance.
Description
Technical Field
The invention belongs to the field of optical detection, and relates to a device and a method for measuring the surface shape of an optical element in a low-temperature environment.
Background
The infrared optical system is widely applied to the fields of astronomical observation, earth observation, weak target detection and the like. Especially in the field of astronomical observation, the radiation is mainly light waves in an infrared band due to the low temperature of stars, interstellar media and the like. The signal-to-noise ratio of the currently used infrared astronomical detector system is mainly limited by background radiation, the most important radiation comes from the radiation of the detector, and in order to improve the signal-to-noise ratio of the system, the control of the radiation of the detector is very critical. One possible approach is to reduce the temperature of the optical system itself to reduce its background radiation and improve the detection performance of the optical system. Therefore, the research on the low-temperature optical technology has important significance.
Considering the gravity of each element in the optical system under low temperature environment, the pretightening force of the mechanical structure to the optical element and the difference of the thermal expansion coefficients between the elements and the optical machine material can cause the deformation of the optical mirror surface, and finally the imaging quality of the optical system is affected. Therefore, the low-temperature optical system needs to be structurally designed according to the low-temperature working environment in which the low-temperature optical system is located, and generally, a heat dissipation design support structure, a spring pre-tightening support structure and a flexible support structure are provided. In order to verify whether the optical-mechanical structure of the low-temperature optical system is reasonable and whether the performance of the optical system meets the working requirements, performance tests of the optical system in a low-temperature environment, particularly surface shape tests of optical elements in the low-temperature environment, need to be carried out.
In a low-temperature environment, the optical element is placed in a vacuum container, and the detection of the surface shape of the optical element is currently generally completed by using an interferometer directly through the window glass. However, this detection method has the following problems:
1. the aperture of the interferometer is limited.
The optical element is under the stress action of a mechanical structure in a low-temperature environment, and the deformation of the edge position can directly reflect the change of the stress, so that the full-aperture test needs to be completed, and the normal interferometer has a small aperture and cannot complete the full-aperture detection.
2. The window glass of the vacuum container can deform at low temperature, and the deformation can introduce a test error, so that the surface shape of the optical element to be tested generates a measurement error.
The above problems limit the realization of the measurement of the surface shape of the optical element at low temperature, so that the accurate evaluation of the structural design rationality of the optical-mechanical device cannot be realized.
Disclosure of Invention
The invention provides an optical element surface shape measuring device and method under a low-temperature environment, which can be accurate, reliable and convenient to operate, and aims to solve the technical problem that the existing optical element surface shape measuring method under the low-temperature environment is limited by the caliber of an interferometer and the technical problem that the deformation of vacuum container window glass can introduce measuring errors.
The technical solution of the invention is as follows:
an optical element surface shape measuring device is characterized in that: comprises a wavefront sensor, a collimator and a vacuum container; the collimator is provided with window glass, the vacuum container is internally provided with a temperature control cover, and the temperature control cover is provided with a liquid nitrogen heat sink; the temperature control cover and the liquid nitrogen heat sink jointly provide a low-temperature environment with design requirements for the optical element to be tested;
the collimator is hermetically connected with the vacuum container to form a sealed cavity together; the wavefront sensor is positioned outside the vacuum container and corresponds to the window glass on the collimator; the wavefront sensor can both output a light beam and detect a light beam exiting the window glass.
Further, a compensator for compensating the optical path length in the test optical path is arranged between the wavefront sensor and the window glass.
Further, the wavefront sensor comprises a fiber laser, a collimating lens, a spectroscope, a standard lens and a Hartmann wavefront sensor; the light beam emitted by the fiber laser is collimated by the collimating lens to generate parallel light, the parallel light is reflected by the beam splitter, and reflected light is incident to the collimator from the window glass after being collimated by the standard lens; the Hartmann wavefront sensor is arranged on the other side of the spectroscope and shares an optical axis with the standard lens; the hartmann wavefront sensor is capable of receiving a light beam exiting the window glass.
The invention also provides a method for measuring the surface shape of the optical element based on the optical element surface shape measuring device, which is characterized by comprising the following steps:
step 1: calibrating;
1.1) removing the compensator from the optical path, placing a standard plane reflector as a reference mirror in a vacuum container, removing a standard lens of the wavefront sensor to enable the standard lens to emit parallel light, adjusting the position and the posture of the standard plane reflector and the wavefront sensor, and completing the rough alignment of the wavefront sensor and the standard plane reflector;
1.2) installing a standard lens of the wavefront sensor, adjusting the positions and postures of the collimator and the wavefront sensor to ensure that the wave aberration of the collimator measured by the wavefront sensor reaches the minimum, and recording the wave aberration at the moment as W0；
1.3) vacuumizing a sealed cavity formed by a vacuum container and a collimator, setting the temperature of a temperature control point on a temperature control cover to ensure that the temperature of a liquid nitrogen heat sink reaches a temperature value required by design, keeping the temperature of a standard plane reflector in the temperature control cover at normal temperature, and measuring the wave aberration difference of the collimator by using a wavefront sensor, wherein the wave aberration difference is recorded as W0 d；
Step 2: measuring;
2.1) when the temperature in a sealed cavity formed by the vacuum container and the collimator is restored to the normal temperature and normal pressure state, replacing the standard plane reflector with the optical element to be measured, adding a compensator near the focal plane of the collimator, adjusting the position posture of the optical element to be measured, enabling the wave aberration of the collimator measured by the wavefront sensor to be minimum, and recording the wave aberration value at the moment as Wt；
2.2) re-vacuumizing the sealed cavity formed by the vacuum container and the collimator, and arrangingThe temperature of the temperature control point on the temperature control cover is determined, so that the temperature of the liquid nitrogen heat sink reaches the temperature value required by design, the wave front sensor is used for measuring the wave image difference value of the collimator at the moment, and the wave image difference value is recorded as Wt d；
2.3) calculating the surface shape value and the surface shape variable quantity:
the surface shape value of the optical element to be measured in the vacuum low-temperature environment is Wt d-W0 dThe surface shape variation of the optical element to be measured in the low temperature environment is (W)t d-W0 d)-(Wt-W0)。
Further, the method for coarse alignment in step 1.1) specifically includes:
and adjusting the position postures of the standard plane reflecting mirror and the wavefront sensor, so that light beams emitted by the wavefront sensor penetrate through the window glass and then enter the geometric center of the standard plane reflecting mirror, and ensuring that light reflected by the standard plane reflecting mirror and penetrating through the window glass can enter the wavefront sensor, thereby finishing the rough alignment of the wavefront sensor and the standard plane reflecting mirror.
Compared with the prior art, the invention has the advantages that:
1. the invention can not only finish the surface shape measurement of the optical element in the low-temperature environment, but also finish the surface shape measurement of the optical element in the normal-temperature environment, and can also monitor the surface shape change condition of the optical element in the processes of heating and cooling.
2. The invention uses the wavefront sensor and the collimator to form the wavefront test system, can measure the surface shape of the large-caliber optical element, and has strong airflow resistance and vibration resistance compared with the traditional interference measurement method.
3. The invention calibrates the wave front distribution of the wave front test system at normal temperature and in low temperature environment in advance, deducts the wave front distribution in the surface shape of the element to be tested finally, and improves the measurement precision.
4. The invention provides a very convenient low-temperature test environment and a device required by the test by adopting the sealed design of the collimator and the vacuum container.
Drawings
FIG. 1 is a schematic diagram of an optical element surface shape measuring device under a low temperature environment according to the present invention.
Fig. 2 is a schematic diagram of the wavefront sensor of the present invention.
FIG. 3 is a schematic diagram illustrating the principle of calibrating the transmitted wavefront of a wavefront test system of the present invention in ambient and cold temperature environments.
Description of reference numerals:
1-a wavefront sensor; 2-a collimator; 3-window glass; 4-vacuum container; 5-liquid nitrogen heat sink; 6-standard plane mirror; 7-temperature control cover; 8-a compensator; 9-an optical element to be tested; 10-fiber laser; 11-a collimating lens; 12-a spectroscope; 13-standard lens; 14-hartmann wavefront sensor.
Detailed Description
The present invention will be described in detail below with reference to the accompanying drawings.
As shown in FIG. 1, the optical element surface shape measuring device provided by the invention comprises a wavefront sensor 1, a collimator 2 and a vacuum container 4; the collimator 2 is provided with window glass 3, the vacuum container 4 is internally provided with a temperature control cover 7, and the temperature control cover 7 is provided with a liquid nitrogen heat sink 5.
The collimator 2 is hermetically connected with the vacuum container 4 to form a sealed cavity together; the wavefront sensor 1 is positioned outside the vacuum container 4 and corresponds to the window glass 3 of the vacuum container 4; when the optical element to be measured is a free-form surface or an aspheric surface, a compensator 8 is required to be arranged between the wavefront sensor 1 and the window glass 3 for compensating the optical path length in the test optical path.
As shown in fig. 2, the wavefront sensor 1 includes a fiber laser 10, a collimating lens 11, a spectroscope 12, a standard lens 13, and a hartmann wavefront sensor 14; the light beam emitted by the fiber laser 10 is collimated by the collimating lens 11 to generate parallel light, the parallel light is reflected by the beam splitter 12, and the reflected light is collimated by the standard lens 13 and then enters the collimator 2 from the window glass 3; the Hartmann wavefront sensor 14 is arranged at the other side of the spectroscope 12 and shares an optical axis with the standard lens 13; the hartmann wavefront sensor 14 is capable of receiving the light beam exiting the window glass 3.
Before the invention is used for measuring the surface shape of an optical element in a low-temperature environment, the transmitted wavefront of a wavefront test system consisting of a wavefront sensor 1 and a parallel light pipe 2 at a low temperature needs to be accurately calibrated, the calibration principle is shown in figure 3, and the specific calibration steps are as follows:
step 1: the compensator 8 is removed from the optical path, the standard plane mirror 6 is placed in the vacuum vessel 4 as a reference mirror, and the standard lens 13 of the wavefront sensor 1 is removed to emit parallel light. The positions and postures of the standard plane reflecting mirror 6 and the wavefront sensor 1 are adjusted, so that light beams emitted by the wavefront sensor 1 penetrate through the window glass 3 and then enter the geometric center of the standard plane reflecting mirror 6, and light reflected by the standard plane reflecting mirror 6 and penetrating through the window glass 3 can enter the wavefront sensor 1, and at the moment, the rough alignment of the wavefront sensor 1 and the standard plane reflecting mirror 6 is completed.
Step 2: installing a standard lens 13 of the wavefront sensor 1, adjusting the positions and postures of the collimator 2 and the wavefront sensor 1 to ensure that the wave aberration of the collimator 2 measured by the wavefront sensor 1 reaches the minimum, and recording the wave aberration at the moment as W0。
And step 3: vacuumizing a sealed cavity formed by the vacuum container 4 and the parallel light tube 2, setting the temperature of a temperature control point on the temperature control cover 7 to ensure that the temperature of the liquid nitrogen heat sink 5 reaches a temperature value required by design, keeping the temperature of a standard plane reflector 6 in the temperature control cover 7 at normal temperature, and measuring the wave aberration value of the wave front test system by using the wave front sensor 1, and recording the wave aberration value as W0 d。
After calibration is finished, the surface shape test of the optical element is carried out according to the following steps:
step 1: the temperature in a sealed cavity formed by a vacuum container 4 and a collimator 2 is restored to a normal temperature and normal pressure state, a standard plane reflector 6 is removed from the vacuum container 4, an optical element 9 to be measured is placed at the same position, a compensator 8 is added near the focal plane of the collimator 2, the position posture of the optical element 9 to be measured is adjusted, the wave aberration of the collimator 2 measured by the wavefront sensor 1 is enabled to be minimum, and the wave aberration value at the moment is recorded as Wt。
Step 2: re-pumping the sealed cavity formed by the vacuum container 4 and the parallel light tube 2And (4) setting the temperature of a temperature control point on the temperature control cover 7 in vacuum so that the temperature of the liquid nitrogen heat sink 5 reaches a temperature value required by design. The wavefront sensor 1 is used to measure the wave aberration value of the collimator 2 at this time, which is denoted as Wt d。
And step 3: based on the measurement process, the surface shape value W of the optical element 9 to be measured under normal temperature and normal pressure can be calculatedt-W0The surface shape value of the optical element 9 to be measured in the vacuum low-temperature environment is Wt d-W0 dThe surface shape variation of the optical element 9 to be measured in the low temperature environment is (W)t d-W0 d)-(Wt-W0)。
Claims (5)
1. An optical element surface shape measuring device is characterized in that: comprises a wave front sensor (1), a collimator (2) and a vacuum container (4); the collimator (2) is provided with window glass (3), the vacuum container (4) is internally provided with a temperature control cover (7), and the temperature control cover (7) is provided with a liquid nitrogen heat sink (5); the temperature control cover (7) and the liquid nitrogen heat sink (5) jointly provide a low-temperature environment with design requirements for the optical element (9) to be measured;
the collimator (2) is hermetically connected with the vacuum container (4) to form a sealed cavity together; the wavefront sensor (1) is positioned outside the vacuum container (4) and corresponds to the window glass (3) on the collimator (2); the wavefront sensor (1) can output light beams and can detect light beams emitted from the window glass (3).
2. The optical element surface shape measuring apparatus according to claim 1, wherein: and a compensator (8) for compensating the optical path length in the test optical path is also arranged between the wavefront sensor (1) and the window glass (3).
3. The optical element surface shape measuring apparatus according to claim 1 or 2, wherein: the wave-front sensor (1) comprises a fiber laser (10), a collimating lens (11), a spectroscope (12), a standard lens (13) and a Hartmann wave-front sensor (14); the light beam emitted by the fiber laser (10) is collimated by the collimating lens (11) to generate parallel light, the parallel light is reflected by the beam splitter (12), and reflected light is collimated by the standard lens (13) and then enters the collimator (2) from the window glass (3); the Hartmann wavefront sensor (14) is arranged on the other side of the spectroscope (12) and shares an optical axis with the standard lens (13); the Hartmann wavefront sensor (14) is capable of receiving a light beam emerging from the window glass (3).
4. The method for measuring the surface shape of an optical element based on the optical element surface shape measuring device of any one of claims 1 to 3, comprising the steps of:
step 1: calibrating;
1.1) removing a compensator (8) from an optical path, placing a standard plane mirror (6) as a reference mirror in a vacuum container (4), removing a standard lens (13) of the wavefront sensor (1) to enable the standard lens to emit parallel light, adjusting the position and the posture of the standard plane mirror (6) and the wavefront sensor (1), and completing the rough alignment of the wavefront sensor (1) and the standard plane mirror (6);
1.2) installing a standard lens (13) of the wavefront sensor (1), adjusting the positions and postures of the collimator (2) and the wavefront sensor (1) to ensure that the wave aberration of the collimator (2) measured by the wavefront sensor (1) is minimum, and recording the wave aberration at the moment as W0；
1.3) vacuumizing a sealed cavity formed by the vacuum container (4) and the collimator (2), setting the temperature of a temperature control point on a temperature control cover (7) to ensure that the temperature of a liquid nitrogen heat sink (5) reaches a temperature value required by design, keeping the temperature of a standard plane reflector (6) in the temperature control cover (7) at normal temperature, and measuring the wave aberration value of the collimator (2) by using the wavefront sensor (1) and recording the wave aberration value as W0 d；
Step 2: measuring;
2.1) when the temperature in a sealed cavity formed by the vacuum container (4) and the collimator (2) is recovered to the normal temperature and normal pressure state, replacing the standard plane reflector (6) with the optical element (9) to be measured, adding a compensator (8) near the focal plane of the collimator (2), adjusting the position and the posture of the optical element (9) to be measured, minimizing the wave aberration of the collimator (2) measured by the wavefront sensor (1), and recording the wave aberration value at the moment as Wt；
2.2) for vacuum vessels(4) Vacuumizing the sealed cavity formed by the collimator (2) again, setting the temperature of a temperature control point on the temperature control cover (7) to enable the temperature of the liquid nitrogen heat sink (5) to reach a temperature value required by design, measuring the wave aberration value of the collimator (2) at the moment by using the wavefront sensor (1), and recording the wave aberration value as Wt d；
2.3) calculating the surface shape value and the surface shape variable quantity:
the surface shape value of the optical element (9) to be measured under the vacuum low-temperature environment is Wt d-W0 dThe surface shape variation of the optical element (9) to be measured in the low-temperature environment is (W)t d-W0 d)-(Wt-W0)。
5. The method according to claim 4, wherein the coarse alignment in step 1.1) is specifically:
the position postures of the standard plane reflecting mirror (6) and the wavefront sensor (1) are adjusted, so that light beams emitted by the wavefront sensor (1) penetrate through the window glass (3) and then enter the geometric center of the standard plane reflecting mirror (6), light reflected by the standard plane reflecting mirror (6) and penetrating through the window glass (3) can enter the wavefront sensor (1), and the rough alignment of the wavefront sensor (1) and the standard plane reflecting mirror (6) is completed at the moment.
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Cited By (3)
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| CN113281013A (en) * | 2021-05-25 | 2021-08-20 | 华中科技大学 | Device and method for measuring surface shape of optical element in vacuum environment |
| CN113296284A (en) * | 2021-04-14 | 2021-08-24 | 三河市蓝思泰克光电科技有限公司 | Ultra-low temperature collimator device under vacuum environment |
| CN114485463A (en) * | 2022-01-24 | 2022-05-13 | 北京仿真中心 | Testing device and method for coated optical reflector |
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