CN111804642A - Automatic cleaning device for polycrystalline silicon - Google Patents
Automatic cleaning device for polycrystalline silicon Download PDFInfo
- Publication number
- CN111804642A CN111804642A CN202010672039.3A CN202010672039A CN111804642A CN 111804642 A CN111804642 A CN 111804642A CN 202010672039 A CN202010672039 A CN 202010672039A CN 111804642 A CN111804642 A CN 111804642A
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- CN
- China
- Prior art keywords
- cleaning
- drying
- hood
- rack
- lifting
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000004140 cleaning Methods 0.000 title claims abstract description 129
- 229910021420 polycrystalline silicon Inorganic materials 0.000 title claims abstract description 27
- 238000001035 drying Methods 0.000 claims abstract description 69
- 238000004506 ultrasonic cleaning Methods 0.000 claims abstract description 18
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 12
- 238000005507 spraying Methods 0.000 claims description 14
- 238000005406 washing Methods 0.000 claims description 6
- 229910021642 ultra pure water Inorganic materials 0.000 claims description 5
- 239000012498 ultrapure water Substances 0.000 claims description 5
- 239000000463 material Substances 0.000 claims description 2
- 239000007921 spray Substances 0.000 claims 3
- 229920005591 polysilicon Polymers 0.000 abstract description 3
- 239000013078 crystal Substances 0.000 description 5
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910052710 silicon Inorganic materials 0.000 description 2
- 239000010703 silicon Substances 0.000 description 2
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910003460 diamond Inorganic materials 0.000 description 1
- 239000010432 diamond Substances 0.000 description 1
- 239000000428 dust Substances 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 239000000126 substance Substances 0.000 description 1
- 238000004781 supercooling Methods 0.000 description 1
Images
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/02—Cleaning by the force of jets or sprays
- B08B3/022—Cleaning travelling work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/041—Cleaning travelling work
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/045—Cleaning involving contact with liquid using perforated containers, e.g. baskets, or racks immersed and agitated in a liquid bath
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/12—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration by sonic or ultrasonic vibrations
- B08B3/123—Cleaning travelling work, e.g. webs, articles on a conveyor
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F26—DRYING
- F26B—DRYING SOLID MATERIALS OR OBJECTS BY REMOVING LIQUID THEREFROM
- F26B21/00—Arrangements or duct systems, e.g. in combination with pallet boxes, for supplying and controlling air or gases for drying solid materials or objects
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- General Engineering & Computer Science (AREA)
- Cleaning By Liquid Or Steam (AREA)
Abstract
The invention discloses an automatic cleaning device for polysilicon, which comprises a cleaning rack, a drying rack, a cleaning hood, a drying hood, a conveyor belt supporting side plate, a plurality of cleaning hanging baskets, a cleaning hanging basket carrying device and a plurality of drying fans, wherein one end of the cleaning rack is connected with the drying rack, the upper end of the drying rack is transversely provided with the drying hood, the upper end of the cleaning rack is transversely provided with the cleaning hood, the cleaning hood is communicated with the drying hood, one end of the cleaning rack, far away from the drying rack, extends out of the cleaning hood and is provided with a feeding platform, the automatic cleaning device can realize automatic feeding, automatic cleaning and automatic drying by matching the cleaning hanging basket carrying device with the cleaning hanging baskets, a cleaning tank and the conveyor belt, the cleaning efficiency of polysilicon is improved, the labor intensity is reduced, and pure water is arranged in the cleaning tank, through ultrasonic cleaning, improve cleaning quality.
Description
[ technical field ] A method for producing a semiconductor device
The invention relates to the technical field of polycrystalline silicon production equipment, in particular to the technical field of a polycrystalline silicon cleaning device.
[ background of the invention ]
Polycrystalline silicon is a form of elemental silicon. When fused simple substance silicon is solidified under a supercooling condition, silicon atoms are arranged into a plurality of crystal nuclei in a diamond lattice form, if the crystal nuclei grow into crystal grains with different crystal face orientations, the crystal grains are combined to crystallize into polycrystalline silicon, and the polycrystalline silicon needs to clean stains and dust attached to the surface of the polycrystalline silicon in the production process so as to improve the purity of the polycrystalline silicon and improve the quality of finished products.
[ summary of the invention ]
The invention aims to solve the problems in the prior art, and provides an automatic cleaning device for polycrystalline silicon, which can improve the cleaning quality of polycrystalline silicon, improve the cleaning efficiency of polycrystalline silicon and reduce the labor intensity.
In order to achieve the purpose, the invention provides an automatic cleaning device for polycrystalline silicon, which comprises a cleaning rack, a drying rack, a cleaning hood, a drying hood, a conveyor belt supporting side plate, a plurality of cleaning hanging baskets, a cleaning hanging basket carrying device and a plurality of drying fans, wherein one end of the cleaning rack is connected with the drying rack, the upper end of the drying rack is transversely provided with the drying hood, the upper end of the cleaning rack is transversely provided with the cleaning hood, the cleaning hood is communicated with the drying hood, one end of the cleaning rack, far away from the drying rack, extends out of the cleaning hood and is provided with a feeding platform, the dryer rack is transversely provided with the conveyor belt along the long side direction of the dryer rack, one end of the conveyor belt is fixedly connected with the inside of the drying rack, one end of the conveyor belt, far away from the cleaning rack, extends out of the drying rack, the conveyer belt other end and conveyer belt support curb plate fixed connection, the washing aircraft bonnet in one side lateral wall transversely be equipped with can with material loading platform, conveyer belt input complex wash hanging flower basket handling device, washing frame, drying machine frame in be equipped with a plurality of washing hanging flower baskets, drying machine aircraft bonnet upper end be equipped with a plurality of drying fan, drying fan output and drying machine aircraft bonnet intercommunication.
Preferably, a first ultrasonic cleaning tank, a second ultrasonic cleaning tank, a first pure water cleaning tank, a second pure water cleaning tank, an ultrapure water cleaning tank, a standing waiting tank and a spraying tank are sequentially arranged in the cleaning rack from the end close to the feeding platform to the drying rack, and a spraying device capable of being matched with the spraying tank is arranged at the upper end of the spraying tank.
Preferably, a plurality of ultrasonic generators are uniformly arranged at the bottoms of the first ultrasonic cleaning tank and the second ultrasonic cleaning tank.
Preferably, the spraying device comprises a sprayer and a lifting cylinder, the lifting cylinder is vertically arranged at the upper end of the spraying groove downwards, the upper end of the lifting cylinder is fixedly connected with the cleaning hood, and the sprayer is transversely arranged at the lower end of a cylinder arm of the lifting cylinder.
Preferably, the cleaning hanging basket carrying device comprises a transverse moving electric cylinder, a plurality of lifting electric cylinders, a lifting plate, a plurality of lifting hooks, lifting hook supporting frames and a hood extending side plate, the upper end of the cleaning rack is vertically provided with a hood extending side plate and a transverse moving guide rail, the hood extending side plate is fixedly connected with the side wall of one side of the cleaning hood, the transverse moving electric cylinder is transversely arranged on the side wall of the cleaning hood and the hood extending side plate, the transverse moving guide rail matched with the transverse moving electric cylinder is arranged on the lower side of the transverse moving electric cylinder, the plurality of lifting electric cylinders are vertically arranged between the transverse moving electric cylinder and the transverse moving guide rail, the lifting plate is vertically arranged on a lifting electric cylinder sliding block, the lifting plate is provided with a plurality of lifting hook supporting frames, and the lifting hooks matched with the cleaning hanging basket are vertically arranged.
The automatic cleaning device for polycrystalline silicon has the beneficial effects that: according to the invention, the cleaning hanging basket carrying device is matched with the cleaning hanging basket, the cleaning tank and the conveying belt, so that automatic feeding, automatic cleaning and automatic drying can be realized, the cleaning efficiency of polycrystalline silicon is improved, the labor intensity of workers is reduced, pure water is arranged in the cleaning tank through the plurality of cleaning tanks, and the cleaning quality is improved through ultrasonic cleaning.
The features and advantages of the present invention will be described in detail by embodiments in conjunction with the accompanying drawings.
[ description of the drawings ]
FIG. 1 is a front view of a schematic structure of an automatic cleaning apparatus for polysilicon according to the present invention;
FIG. 2 is a front sectional view of an automatic cleaning apparatus for polycrystalline silicon according to the present invention.
In the figure: 1-a cleaning rack, 2-a drying rack, 3-a cleaning hood, 4-a drying hood, 5-a conveyor belt, 6-a conveyor belt supporting side plate, 7-a cleaning basket, 8-a cleaning basket carrying device, 9-a drying fan, 11-a loading platform, 12-a first ultrasonic cleaning tank, 13-a second ultrasonic cleaning tank, 14-a first pure water cleaning tank, 15-a second pure water cleaning tank, 16-an ultrapure water cleaning tank, 17-a standing waiting tank, 18-a spraying tank, 19-a spraying device, 81-a transverse moving electric cylinder, 82-a lifting electric cylinder, 83-a lifting plate, 84-a lifting hook, 85-a lifting hook supporting frame, 86-a hood extending side plate and 121-an ultrasonic generator.
[ detailed description ] embodiments
In order to make the objects, technical solutions and advantages of the present invention more apparent, the present invention is further described in detail below with reference to the accompanying drawings and examples. It should be understood, however, that the description herein of specific embodiments is only intended to illustrate the invention and not to limit the scope of the invention. Moreover, in the following description, descriptions of well-known structures and techniques are omitted so as to not unnecessarily obscure the concepts of the present invention.
Referring to fig. 1 and 2, the automatic cleaning device for polycrystalline silicon comprises a cleaning rack 1, a drying rack 2, a cleaning hood 3, a drying hood 4, a conveyor belt 5, a conveyor belt supporting side plate 6, a plurality of cleaning baskets 7, a cleaning basket carrying device 8 and a plurality of drying fans 9, wherein one end of the cleaning rack 1 is connected with the drying rack 2, the upper end of the drying rack 2 is transversely provided with the drying hood 4, the upper end of the cleaning rack 1 is transversely provided with the cleaning hood 3, the cleaning hood 3 is communicated with the drying hood 4, one end of the cleaning rack 1, which is far away from the drying rack 2, extends out of the cleaning hood 3 to be provided with a feeding platform 11, the drying rack 2 is transversely provided with the conveyor belt 5 along the long side direction of the drying rack 2, one end of the conveyor belt 5 is fixedly connected with the inside of the drying rack 2, and one end of the conveyor belt 5, which is far away, the cleaning machine comprises a drying rack 2, a conveyor belt supporting side plate 6 which can be matched with a conveyor belt 5 is arranged on two sides of the drying rack 2, the other end of the conveyor belt 5 is fixedly connected with the conveyor belt supporting side plate 6, a cleaning hanging basket carrying device 8 which can be matched with an input end of a feeding platform 11 and an input end of the conveyor belt 5 is transversely arranged on a side wall of one side in a cleaning machine cover 3, a plurality of cleaning hanging baskets 7 are arranged in the cleaning rack 1 and the drying rack 2, a plurality of drying fans 9 are arranged at the upper end of the drying machine cover 4, an output end of each drying fan 9 is communicated with the drying machine cover 4, a first ultrasonic cleaning tank 12, a second ultrasonic cleaning tank 13, a first pure water cleaning tank 14, a second pure water cleaning tank 15, an ultrapure water standing cleaning tank 16, a waiting tank 17 and a spraying tank 18 are sequentially arranged from the end close to the feeding platform 11 to the drying rack 2, the bottom parts of the first ultrasonic cleaning tank 12 and the second ultrasonic cleaning tank 13 are uniformly provided with a plurality of ultrasonic generators 121, the spraying device 19 comprises a sprayer 191 and a lifting cylinder 192, the lifting cylinder 192 is vertically and downwardly arranged at the upper end of the spraying tank 18, the upper end of the lifting cylinder 192 is fixedly connected with the cleaning hood 3, the sprayer 191 is transversely arranged at the lower end of a cylinder arm of the lifting cylinder 192, the cleaning basket carrying device 8 comprises a transverse electric cylinder 81, a plurality of lifting electric cylinders 82, a lifting plate 83, a plurality of lifting hooks 84, a lifting hook supporting frame 85 and a hood extension side plate 86, the upper end of the cleaning rack 1 is vertically provided with a hood extension side plate 86 and a transverse guide rail 87, the hood extension side plate 86 is fixedly connected with the side wall at one side of the cleaning hood 3, and the transverse electric cylinder 81 is transversely arranged on the side plate 86 of the cleaning hood 3, the lower side of the transverse moving electric cylinder 81 is provided with a transverse moving guide rail 87 which can be matched with the transverse moving electric cylinder 81, a plurality of lifting electric cylinders 82 are vertically arranged between the transverse moving electric cylinder 81 and the transverse moving guide rail 87, lifting plates 83 are vertically arranged on electric cylinder sliding blocks of the lifting electric cylinders 82, a plurality of lifting hook supporting frames 85 are arranged on the lifting plates 83, and a plurality of lifting hooks 84 which can be matched with the cleaning hanging basket 7 are vertically arranged on the lifting hook supporting frames 85 downwards.
The working process of the invention is as follows:
in the working process of the automatic cleaning device for polycrystalline silicon, the polycrystalline silicon to be cleaned is placed in a cleaning basket 7, the cleaning basket 7 is placed on a feeding platform 11, a cleaning basket carrying device 8 controls a lifting hook 84 to lift the cleaning basket 7, the cleaning basket carrying device 8 sequentially immerses the cleaning basket 7 into a first ultrasonic cleaning groove 12, a second ultrasonic cleaning groove 13, a first pure water cleaning groove 14, a second pure water cleaning groove 15, an ultrapure water cleaning groove 16, a standing waiting groove 17 and a spraying groove 18 for cleaning for multiple times, then the cleaning basket carrying device 8 carries the cleaning basket 7 to the upper end of a conveyor belt 5, the conveyor belt 5 conveys the cleaning basket into a dryer cover 4, and a drying fan 9 generates hot air for drying.
The above embodiments are illustrative of the present invention, and are not intended to limit the present invention, and any simple modifications of the present invention are within the scope of the present invention.
Claims (5)
1. An automatic cleaning device for polycrystalline silicon is characterized in that: comprises a cleaning rack (1), a drying rack (2), a cleaning hood (3), a drying hood (4), a conveyor belt (5), a conveyor belt supporting side plate (6), a plurality of cleaning baskets (7), a cleaning basket carrying device (8) and a plurality of drying fans (9), wherein one end of the cleaning rack (1) is connected with the drying rack (2), the upper end of the drying rack (2) is transversely provided with the drying hood (4), the upper end of the cleaning rack (1) is transversely provided with the cleaning hood (3), the cleaning hood (3) is communicated with the drying hood (4), one end of the cleaning rack (1) far away from the drying rack (2) extends out of the cleaning hood (3) and is provided with a feeding platform (11), the drying rack (2) is transversely provided with the conveyor belt (5) along the long edge direction of the drying rack (2), one end of the conveyor belt (5) is fixedly connected with the inside of the drying rack (2), conveyer belt (5) keep away from the one end of wasing frame (1) and extend drying rack (2), drying rack (2) both sides be equipped with can support curb plate (6) with conveyer belt (5) complex conveyer belt, conveyer belt (5) other end and conveyer belt support curb plate (6) fixed connection, washing aircraft bonnet (3) in one side lateral wall transversely be equipped with can with loading platform (11), conveyer belt (5) input complex wash hanging flower basket handling device (8), washing frame (1), drying rack (2) in be equipped with a plurality of washing hanging flower baskets (7), drying aircraft bonnet (4) upper end be equipped with a plurality of drying blower (9), drying blower (9) output and drying aircraft bonnet (4) intercommunication.
2. The automatic cleaning apparatus for polycrystalline silicon as set forth in claim 1, wherein: cleaning frame (1) in by be close to material loading platform (11) to drying frame (2) end be equipped with first ultrasonic cleaning tank (12), second ultrasonic cleaning tank (13), first pure water cleaning tank (14), second pure water cleaning tank (15), ultrapure water cleaning tank (16), wait for groove (17), spray tank (18) of stewing in proper order, spray tank (18) upper end be equipped with can rather than complex spray set (19).
3. The automatic cleaning apparatus for polycrystalline silicon as set forth in claim 2, wherein: the bottom parts of the first ultrasonic cleaning tank (12) and the second ultrasonic cleaning tank (13) are uniformly provided with a plurality of ultrasonic generators (121).
4. The automatic cleaning apparatus for polycrystalline silicon as set forth in claim 2, wherein: the spraying device (19) comprises a sprayer (191) and a lifting cylinder (192), the lifting cylinder (192) is vertically arranged at the upper end of the spraying groove (18) downwards, the upper end of the lifting cylinder (192) is fixedly connected with the cleaning hood (3), and the sprayer (191) is transversely arranged at the lower end of a cylinder arm of the lifting cylinder (192).
5. The automatic cleaning apparatus for polycrystalline silicon as set forth in claim 1, wherein: the cleaning hanging basket carrying device (8) comprises a transverse electric cylinder (81), a plurality of lifting electric cylinders (82), a lifting plate (83), a plurality of lifting hooks (84), lifting hook support frames (85) and a hood extension side plate (86), wherein the upper end of the cleaning rack (1) is vertically provided with a hood extension side plate (86) and a transverse guide rail (87), the hood extension side plate (86) is fixedly connected with the side wall of one side of the cleaning hood (3), the transverse electric cylinder (81) is transversely arranged on the side wall of the cleaning hood (3) and the hood extension side plate (86), the lower side of the transverse electric cylinder (81) is provided with the transverse guide rail (87) which can be matched with the transverse electric cylinder, the plurality of lifting electric cylinders (82) are vertically arranged between the transverse electric cylinder (81) and the transverse guide rail (87), the lifting plate (83) is vertically arranged on an electric cylinder sliding block of the lifting electric cylinder (82), and the lifting hook support frames (85) are arranged on, the lifting hook support frame (85) is vertically provided with a plurality of lifting hooks (84) which can be matched with the cleaning hanging basket (7) downwards.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010672039.3A CN111804642A (en) | 2020-07-14 | 2020-07-14 | Automatic cleaning device for polycrystalline silicon |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CN202010672039.3A CN111804642A (en) | 2020-07-14 | 2020-07-14 | Automatic cleaning device for polycrystalline silicon |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| CN111804642A true CN111804642A (en) | 2020-10-23 |
Family
ID=72843384
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CN202010672039.3A Pending CN111804642A (en) | 2020-07-14 | 2020-07-14 | Automatic cleaning device for polycrystalline silicon |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN111804642A (en) |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112705519A (en) * | 2021-01-29 | 2021-04-27 | 曹苗苗 | Impurity removal and purification device and process for traditional Chinese medicine decoction piece raw materials |
| CN113680753A (en) * | 2021-08-27 | 2021-11-23 | 海盐卫士标准件有限公司 | Corrosion-resistant anti-delayed fracture surface cleaning machine for high-strength nut |
| CN115709196A (en) * | 2022-10-17 | 2023-02-24 | 杭州中欣晶圆半导体股份有限公司 | Apparatus for improving particle contamination after final cleaning and method for controlling the same |
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| JP2001338904A (en) * | 2000-05-30 | 2001-12-07 | Konan Koki Kk | Wafer cleaning equipment |
| CN205732134U (en) * | 2016-07-05 | 2016-11-30 | 苏州格瑞泰克环保科技有限公司 | A kind of multi-groove ultrasonic washing unit |
| CN106694463A (en) * | 2017-03-10 | 2017-05-24 | 东莞市维迅机械科技有限公司 | Precise hardware device high-frequency ultrasonic cleaning equipment based on PLC control |
| CN207770399U (en) * | 2017-12-11 | 2018-08-28 | 珠海东精大电子科技有限公司 | A kind of quartz wafer machine frame ultrasonic automatic cleaning machine |
| CN208695762U (en) * | 2018-08-21 | 2019-04-05 | 北京洁创环保科技有限公司 | Block combiner automatic washing machine |
| CN212442300U (en) * | 2020-07-14 | 2021-02-02 | 海盐得胜化工设备有限公司 | Automatic cleaning device for polycrystalline silicon |
-
2020
- 2020-07-14 CN CN202010672039.3A patent/CN111804642A/en active Pending
Patent Citations (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2001338904A (en) * | 2000-05-30 | 2001-12-07 | Konan Koki Kk | Wafer cleaning equipment |
| CN205732134U (en) * | 2016-07-05 | 2016-11-30 | 苏州格瑞泰克环保科技有限公司 | A kind of multi-groove ultrasonic washing unit |
| CN106694463A (en) * | 2017-03-10 | 2017-05-24 | 东莞市维迅机械科技有限公司 | Precise hardware device high-frequency ultrasonic cleaning equipment based on PLC control |
| CN207770399U (en) * | 2017-12-11 | 2018-08-28 | 珠海东精大电子科技有限公司 | A kind of quartz wafer machine frame ultrasonic automatic cleaning machine |
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| CN212442300U (en) * | 2020-07-14 | 2021-02-02 | 海盐得胜化工设备有限公司 | Automatic cleaning device for polycrystalline silicon |
Cited By (3)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN112705519A (en) * | 2021-01-29 | 2021-04-27 | 曹苗苗 | Impurity removal and purification device and process for traditional Chinese medicine decoction piece raw materials |
| CN113680753A (en) * | 2021-08-27 | 2021-11-23 | 海盐卫士标准件有限公司 | Corrosion-resistant anti-delayed fracture surface cleaning machine for high-strength nut |
| CN115709196A (en) * | 2022-10-17 | 2023-02-24 | 杭州中欣晶圆半导体股份有限公司 | Apparatus for improving particle contamination after final cleaning and method for controlling the same |
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