CN111734799A - Rotary device capable of removing radial force, heater rotary system and semiconductor equipment - Google Patents

Rotary device capable of removing radial force, heater rotary system and semiconductor equipment Download PDF

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Publication number
CN111734799A
CN111734799A CN202010695757.2A CN202010695757A CN111734799A CN 111734799 A CN111734799 A CN 111734799A CN 202010695757 A CN202010695757 A CN 202010695757A CN 111734799 A CN111734799 A CN 111734799A
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CN
China
Prior art keywords
synchronizing wheel
heater
rotating
fixing plate
wheel
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Granted
Application number
CN202010695757.2A
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Chinese (zh)
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CN111734799B (en
Inventor
潘学勤
李中云
宋维聪
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Shanghai Betone Semiconductor Energy Technology Co ltd
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Shanghai Betone Semiconductor Energy Technology Co ltd
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Priority to CN202010695757.2A priority Critical patent/CN111734799B/en
Publication of CN111734799A publication Critical patent/CN111734799A/en
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Publication of CN111734799B publication Critical patent/CN111734799B/en
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Classifications

    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16HGEARING
    • F16H7/00Gearings for conveying rotary motion by endless flexible members
    • F16H7/02Gearings for conveying rotary motion by endless flexible members with belts; with V-belts
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16HGEARING
    • F16H7/00Gearings for conveying rotary motion by endless flexible members
    • F16H7/02Gearings for conveying rotary motion by endless flexible members with belts; with V-belts
    • F16H7/023Gearings for conveying rotary motion by endless flexible members with belts; with V-belts with belts having a toothed contact surface or regularly spaced bosses or hollows for slipless or nearly slipless meshing with complementary profiled contact surface of a pulley
    • HELECTRICITY
    • H01BASIC ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES; ELECTRIC SOLID STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H01L21/00Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
    • H01L21/67Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
    • H01L21/67005Apparatus not specifically provided for elsewhere
    • H01L21/67011Apparatus for manufacture or treatment
    • H01L21/67098Apparatus for thermal treatment
    • HELECTRICITY
    • H02GENERATION; CONVERSION OR DISTRIBUTION OF ELECTRIC POWER
    • H02KDYNAMO-ELECTRIC MACHINES
    • H02K7/00Arrangements for handling mechanical energy structurally associated with dynamo-electric machines, e.g. structural association with mechanical driving motors or auxiliary dynamo-electric machines
    • H02K7/10Structural association with clutches, brakes, gears, pulleys or mechanical starters
    • H02K7/116Structural association with clutches, brakes, gears, pulleys or mechanical starters with gears

Abstract

The invention provides a rotating device capable of removing radial force, a heater rotating system and a semiconductor device. The rotating device comprises a fixing plate, a motor, a first synchronous wheel, a second synchronous wheel, a third synchronous wheel and a synchronous belt; the fixing plate is provided with a through hole; the first synchronizing wheel, the second synchronizing wheel and the third synchronizing wheel are all arranged on the first surface of the fixing plate, and the shaft hole of the second synchronizing wheel corresponds to the through hole; the first synchronizing wheel and the third synchronizing wheel are positioned at two opposite sides of the second synchronizing wheel, and the central points of the first synchronizing wheel and the third synchronizing wheel are positioned on the same horizontal line; the motor is connected with the third synchronizing wheel, the synchronous belt is wound on the first synchronizing wheel, the second synchronizing wheel and the third synchronizing wheel, and the rotating shaft of the rotating piece penetrates through the through hole of the fixing plate and the shaft hole of the second synchronizing wheel and is connected with the second synchronizing wheel. The invention can effectively avoid the damage and deformation of the part to be rotated and the accessory connected with the part to be rotated due to the action of radial force, prolong the service life of equipment and reduce the production cost.

Description

Rotary device capable of removing radial force, heater rotary system and semiconductor equipment
Technical Field
The present invention relates to the field of semiconductor manufacturing equipment, and more particularly, to a rotary device capable of removing radial force, a heater rotary system, and a semiconductor device.
Background
A heater is a widely used component in a semiconductor manufacturing apparatus such as a thin film deposition apparatus. The heater usually includes the plummer and the bracing piece (also be the rotation axis) that is connected with the bottom surface of plummer, and the rotation through the bracing piece drives the plummer rotatory, drives the base plate rotation that is located on the plummer from this, can effectively improve the homogeneity of heating the base plate, and then improves the homogeneity of film deposition. The existing heater rotating equipment has the problem that the supporting rod is acted by radial force. During long-term rotation operation, the heater is easy to generate large deflection due to the influence of radial force, and the diameter of the support rod is usually small, so the heater is easy to wear and deform under the condition of receiving alternating load radial force for a long time, and further other parts of the heater and other structures of equipment connected with the heater are damaged. For example, in a thin film deposition apparatus, a support rod of a heater needs to penetrate through a bottom plate of a chamber and extend out of the chamber, and the support rod and the chamber are usually sealed by a magnetic fluid to ensure that the support rod can still normally rotate under the condition that the chamber meets the requirement of vacuum degree. However, the gap between the magnetic fluid and the magnetic fluid is very small, and the radial force generated by the long-term rotation of the heater easily causes the deformation and leakage of the magnetic fluid, so that the pollution of equipment and the reduction of the service life of the equipment are easily caused, and the production cost is increased.
Disclosure of Invention
In view of the above-mentioned drawbacks of the prior art, an object of the present invention is to provide a rotating device capable of removing a radial force, a heater rotating system and a semiconductor device, which are used to solve the problems in the prior art that, during a long-term rotation operation of a support rod of a heater, the radial force causes damage and deformation of parts of the heater and other structures of the device connected to the heater, which results in a reduction in the service life of the device, a contamination of the device, and an increase in the production cost.
In order to achieve the above and other related objects, the present invention provides a rotary device capable of removing radial force, including a fixed plate, a motor, a first synchronous pulley, a second synchronous pulley, a third synchronous pulley and a synchronous belt; the fixing plate is provided with a first surface and a second surface opposite to the first surface, and a through hole is formed in the fixing plate; the first synchronizing wheel, the second synchronizing wheel and the third synchronizing wheel are all arranged on the first surface of the fixing plate, and a shaft hole of the second synchronizing wheel corresponds to the through hole in the fixing plate; the first synchronizing wheel and the third synchronizing wheel are positioned on two opposite sides of the second synchronizing wheel, and the center points of the first synchronizing wheel, the second synchronizing wheel and the third synchronizing wheel are positioned on the same horizontal line; the motor with the third synchronizing wheel is connected, the hold-in range is around locating on first synchronizing wheel, second synchronizing wheel and the third synchronizing wheel, just the hold-in range is tight state that rises, treats that the rotation axis of rotating member passes the through-hole of fixed plate and the shaft hole of second synchronizing wheel, and with the second synchronizing wheel is connected.
Optionally, the diameter of the second synchronizing wheel is larger than the diameter of the first synchronizing wheel and the third synchronizing wheel.
Optionally, the diameters of the first synchronizing wheel and the third synchronizing wheel are the same, and the distance between the second synchronizing wheel and the first synchronizing wheel is equal to the distance between the second synchronizing wheel and the third synchronizing wheel.
Optionally, the rotating device further includes a first bracket, the first bracket includes a bending portion and a linear portion, one end of the bending portion is connected to the side surface of the fixing plate, the other end of the bending portion extends to the lower side of the first synchronizing wheel, one end of the linear portion is connected to the bending portion, and the other end of the linear portion penetrates through the shaft hole of the first synchronizing wheel until the linear portion is connected to the first surface of the fixing plate.
Optionally, the rotating device further includes a fixing frame, the fixing frame is located between the motor and the fixing plate and located at the periphery of the third synchronizing wheel, and the fixing frame connects the motor and the fixing plate.
Optionally, the rotating device further includes a second bracket and a tensioning screw, the second bracket is located on the first surface of the fixing plate and located on a side of the fixing frame away from the second synchronizing wheel, and the tensioning screw is connected between the second bracket and the fixing frame.
In order to achieve the above and other related objects, the present invention further provides a heater rotating system, which includes a heater and a rotating device as described in any one of the above aspects, wherein the heater includes a bearing platform and a rotating shaft connected to a bottom of the bearing platform, the rotating shaft of the heater passes through the through hole and the shaft hole of the second synchronizing wheel from the second surface of the fixing plate, and the rotating shaft of the heater is connected to the second synchronizing wheel.
In order to achieve the above and other related objects, the present invention further provides a semiconductor device, which includes a chamber, a heater and the rotating device according to any one of the above aspects, wherein the rotating device is located at the bottom of the chamber, the heater includes a bearing table and a rotating shaft connected to the bottom of the bearing table, the rotating shaft of the heater extends from the inside of the chamber to the outside and sequentially passes through the through hole of the fixing plate and the shaft hole of the second synchronizing wheel, and the rotating shaft of the heater is connected to the second synchronizing wheel.
Optionally, the semiconductor apparatus further comprises a heater lifting assembly, the heater lifting assembly is located between the rotating device and the chamber, and the heater lifting assembly is connected with both the chamber and the rotating device.
Optionally, the chamber comprises one of a physical vapor deposition chamber and a chemical vapor deposition chamber.
As described above, the rotating device, the heater rotating system and the semiconductor apparatus capable of removing radial force according to the present invention have the following advantageous effects: the improved structure design of the invention is that three synchronous wheels with three central points positioned on the same horizontal line are arranged to drive the synchronous belt, the rotating shaft of a member to be rotated (such as a heater) is connected with the synchronous wheel positioned in the middle, when a motor drives one of the synchronous wheels to rotate, the synchronous belt is stretched and tightened to clamp the synchronous wheel in the middle, and the radial forces acting on the synchronous wheel in the middle on two sides of the synchronous belt are exactly counteracted oppositely, so that the member to be rotated and the accessory connected with the member to be rotated are effectively prevented from being damaged and deformed due to the action of the radial force, the service life of the equipment can be effectively prolonged, the pollution of the equipment is reduced, and the production cost is reduced.
Drawings
Fig. 1 to 3 are schematic structural diagrams of a rotating device capable of removing radial force according to a first embodiment of the invention, which are presented from different directions.
Fig. 4 and 5 are schematic structural diagrams of a semiconductor device according to a second embodiment of the invention from different directions.
Description of the element reference numerals
11-a fixed plate; 12-a motor; 13-a first synchronizing wheel; 14-a second synchronizing wheel; 141-axle hole; 15-a third synchronizing wheel; 16-a synchronous belt; 17-a first scaffold; 171-a bend section; 172-linear portion; 18-a holder; 19-a second scaffold; 20-tensioning screws; 21-a chamber; 22-a heater lifting assembly; 23-a cylinder; 24-magnetic fluid.
Detailed Description
The following description of the embodiments of the present invention is provided for illustrative purposes, and other advantages and effects of the present invention will become apparent to those skilled in the art from the present disclosure.
Please refer to fig. 1 to 5. It should be understood that the structures, ratios, sizes, and the like shown in the drawings and described in the specification are only used for matching with the disclosure of the specification, so as to be understood and read by those skilled in the art, and are not used to limit the conditions under which the present invention can be implemented, so that the present invention has no technical significance, and any structural modification, ratio relationship change, or size adjustment should still fall within the scope of the present invention without affecting the efficacy and the achievable purpose of the present invention. In addition, the terms such as "upper", "lower", "left", "right", "middle" and "one" used in the present specification are for clarity of description, and are not intended to limit the scope of the present invention, and changes or modifications of the relative relationship may be made without substantial technical changes.
Example one
As shown in fig. 1 to 3, the present invention provides a rotating device capable of removing radial force, which includes a fixing plate 11, a motor 12, a first synchronous pulley 13, a second synchronous pulley 14, a third synchronous pulley 15 and a synchronous belt 16; the fixing plate 11 has a first surface and a second surface opposite to the first surface, and a through hole is formed in the fixing plate 11; the first synchronizing wheel 13, the second synchronizing wheel 14 and the third synchronizing wheel 15 are all disposed on the first surface of the fixing plate 11, and the shaft hole 141 of the second synchronizing wheel 14 corresponds to the through hole on the fixing plate 11, that is, the shaft hole 141 of the second synchronizing wheel 14 exposes out of the through hole of the fixing plate 11; the first synchronous wheel 13 and the third synchronous wheel 15 are positioned at two opposite sides of the second synchronous wheel 14, and the central points (i.e. axes) of the first synchronous wheel 13, the second synchronous wheel 14 and the third synchronous wheel 15 are positioned on the same horizontal line; the motor 12 is connected to the third synchronizing wheel 15, and is configured to drive the third synchronizing wheel 15 to rotate, the synchronous belt 16 is wound on the first synchronizing wheel 13, the second synchronizing wheel 14, and the third synchronizing wheel 15, the synchronous belt 16 is in a tensioned state, and a rotating shaft of a member to be rotated (e.g., a heater) passes through the through hole of the fixing plate 11 and the shaft hole 141 of the second synchronizing wheel 14, and is connected to the second synchronizing wheel 14. When the motor 12 drives the third synchronizing wheel 15 to rotate, the synchronous belt 16 wound around the first synchronizing wheel 13, the second synchronizing wheel 14 and the third synchronizing wheel 15 is driven to rotate, so as to drive the to-be-rotated member connected with the second synchronizing wheel 14 to rotate. The improved structure design of the invention is that three synchronous wheels with three central points positioned on the same horizontal line are arranged to drive the synchronous belt, the synchronous belt is in a tension state, a rotating shaft of a member to be rotated is connected with a second synchronous wheel positioned in the middle, when a motor drives one of the synchronous wheels to rotate, the synchronous belt is stretched and tightened to clamp the second synchronous wheel in the middle, so radial force generated when the synchronous belt is tensioned acts on the first synchronous wheel and the third synchronous wheel on two sides, and the second synchronous wheel positioned in the middle of the synchronous belt is clamped by the synchronous belt on two sides, so that the forces acted by the synchronous belts on two sides of the second synchronous wheel are mutually offset, no radial force is transmitted to the member to be rotated on the second synchronous wheel, the member to be rotated and accessories connected with the member to be rotated can be effectively prevented from being damaged and deformed due to the action of the radial force, and the service life of the equipment can be effectively prolonged, reduce the equipment pollution and the production cost.
It should be noted that descriptions of "first", "second", and "third" in this specification are only for convenience of description and have no substantial limiting meaning. For example, the middle synchronizing wheel may be defined as a first synchronizing wheel and the two side synchronizing wheels may be defined as second and third synchronizing wheels.
As an example, the diameter of the second synchronizing wheel 14 is larger than the diameters of the first synchronizing wheel 13 and the third synchronizing wheel 15, so when the synchronous belt 16 is wound around the first synchronizing wheel 13, the second synchronizing wheel 14 and the third synchronizing wheel 15, a contact curved surface with a larger curvature is formed with the second synchronizing wheel 14, which is beneficial to increasing the contact area between the second synchronizing wheel 14 and the synchronous belt 16 to enhance the friction force between the two, is beneficial to increasing the rotation torque of the second synchronizing wheel 14, and can effectively drive the to-be-rotated member. In a further example, the diameters of the first synchronizing wheel 13 and the third synchronizing wheel 15 are the same, the first synchronizing wheel 13, the second synchronizing wheel 14 and the third synchronizing wheel 15 have a spacing therebetween, and the spacing between the second synchronizing wheel 14 and the first synchronizing wheel 13 is equal to the spacing between the second synchronizing wheel 14 and the third synchronizing wheel 15. Through such setting, can effectively ensure that the radial force that hold-in range 16 both sides acted on second synchronizing wheel 14 in the middle just in time offsets completely, ensure that no radial force is acted on waiting to rotate the piece, can effectively avoid radial force to treat the rotating member and wait the adverse effect of the spare part that the rotating member is connected.
In an example, the first synchronizing wheel 13, the second synchronizing wheel 14, the third synchronizing wheel 15 and the synchronizing belt 16 may be in mesh transmission, when in mesh transmission, a plurality of gear teeth are distributed at intervals on an inner surface of the synchronizing belt 16, a plurality of gear teeth are distributed at intervals on a circumferential direction of outer rings of the first synchronizing wheel 13, the second synchronizing wheel 14 and the third synchronizing wheel 15, and intervals between the gear teeth may be set as required, so as to realize accurate control of a rotation angle of the rotating member to be treated. Of course, in other examples, the first synchronizing wheel 13, the second synchronizing wheel 14, the third synchronizing wheel 15 and the synchronizing belt 16 may be in friction transmission, and the embodiment is not limited strictly. The circumferential edges of the outer rings of the first synchronizing wheel 13, the second synchronizing wheel 14 and the third synchronizing wheel 15 can be provided with flanges, that is, a structure similar to a groove is formed on the outer ring, so as to prevent the synchronous belt from falling off.
By way of example, the motor 12 includes, but is not limited to, a stepper motor. In one example, the rotating device further includes a fixing frame 18, the fixing frame 18 is located between the motor 12 and the fixing plate 11 and located at the periphery of the third synchronizing wheel 15, the fixing frame 18 connects the motor 12 and the fixing plate 11, and the third synchronizing wheel 15 is assembled on the rotating shaft of the motor 12. The distance between the fixed frame 18 and the third synchronizing wheel 15 is slightly larger than the thickness of the synchronous belt 16, that is, the fixed frame 18 and the third synchronizing wheel 15 have only a small distance, for example, less than 2cm, so as to protect the synchronous belt 16 to a certain extent and prevent the synchronous belt 16 from being separated from the third synchronizing wheel 15.
As an example, the rotating device further includes a first bracket 17, the first bracket 17 includes a bent portion 171 and a linear portion 172, one end of the bent portion 171 is connected to a side surface of the fixing plate 11, and the other end extends to a position below the first synchronizing wheel 13 (it should be noted that the lower position is defined as a state when the device is normally placed, that is, the state shown in fig. 1 is taken as an illustration), one end of the linear portion 172 is connected to the bent portion 171, the other end of the linear portion passes through the shaft hole of the first synchronizing wheel 13 until the linear portion is connected to the first surface of the fixing plate 11, the first synchronizing wheel 13 is fixed to the linear portion 172, and a portion of the bent portion 171 below the first synchronizing wheel 13 can prevent the first synchronizing wheel 13 from falling off.
As an example, the rotating device further includes a second bracket 19 and a tensioning screw 20, the second bracket 19 is located on the first surface of the fixing plate 11 and is located on a side of the fixing frame 18 away from the second synchronizing wheel 14, and the tensioning screw 20 is connected between the second bracket 19 and the fixing frame 18. The fixing frame 18 is pulled by adjusting the tensioning screw 20, so that the third synchronous pulley 15 is driven to tension the synchronous belt 16, the synchronous belt 16 clamps the second synchronous pulley 14, the tension of the synchronous belt 16 can be adjusted as required, and the stable transmission of the synchronous belt 16 and the stable rotation of the second synchronous pulley 14 are ensured. Of course, in other examples, the tension of the synchronous belt 16 may be adjusted by providing a tension wheel on the inner side or the outer side of the synchronous belt 16, which is not strictly limited in this embodiment, but the tension adjustment of the synchronous belt is simpler in structure and more convenient in adjustment compared with other designs by using the design of the second bracket and the tension screw.
The rotating device of the invention is provided with three synchronizing wheels with three central points positioned on the same horizontal line to drive the synchronous belt through an improved structural design, the rotating shaft of a piece to be rotated is connected with the synchronizing wheel positioned in the middle, when a motor drives one of the synchronizing wheels to rotate, the synchronous belt is stretched and tightened to clamp the synchronizing wheel in the middle, the radial forces acting on the second synchronizing wheel in the middle at two sides of the synchronous belt are exactly counteracted oppositely, the piece to be rotated and the accessory connected with the piece to be rotated can be effectively prevented from being damaged and deformed due to the action of the radial force, the service life of equipment can be effectively prolonged, the pollution of the equipment can be reduced, and the production cost can be reduced. The invention can be used for removing the radial force influence of the heater, and can be used in other devices which are similar to the heater and drive the whole device to rotate through the small-diameter supporting rod and need to reduce the radial force influence. The invention has the advantages of simple structure, low cost and convenient use.
The invention also provides a heater rotating system, which comprises a heater and the rotating device in any scheme, wherein the heater comprises a bearing table and a rotating shaft connected with the bottom of the bearing table, the rotating shaft of the heater penetrates through the through hole and the shaft hole of the second synchronizing wheel from the second surface of the fixing plate, and the rotating shaft of the heater is connected with the second synchronizing wheel. Because the radial force acted on the middle synchronizing wheel at the two sides of the synchronous belt is exactly counteracted oppositely, the heater and the accessories connected with the heater can be effectively prevented from being damaged and deformed due to the action of the radial force, the service life of the equipment can be effectively prolonged, the pollution of the equipment is reduced, and the production cost is reduced.
Example two
As shown in fig. 4 and 5, the present invention further provides a semiconductor apparatus, which includes a chamber 21, a heater and a rotating device according to one embodiment of the present invention, wherein the rotating device is located at the bottom (outside) of the chamber 21, the heater includes a susceptor and a rotating shaft connected to the bottom of the susceptor, the rotating shaft of the heater extends from the inside to the outside of the chamber 21 and sequentially passes through the through hole of the fixing plate 11 and the shaft hole 141 of the second synchronizing wheel 14, and the rotating shaft of the heater is connected to the second synchronizing wheel 14.
As an example, the semiconductor device further includes a heater lifting assembly 22, the heater lifting assembly 22 is located between the rotating device and the chamber 21, and the heater lifting assembly 22 is connected to both the chamber 21 and the rotating device for driving the heater to move up and down as required. The semiconductor device also comprises a cylinder 23, a magnetic fluid 24 and other components, the magnetic fluid 24 is connected between the chamber 21 and the cylinder 23, the cylinder 23 is connected between the magnetic fluid 24 and the rotating device, a bearing table of the heater is positioned in the chamber 21, a rotating shaft connected with the bearing table penetrates through a bottom plate of the chamber 21 and extends to the outside of the chamber 21, and the rotating shaft penetrates through the magnetic fluid 24, the cylinder 23, a through hole of the fixing plate 11 and a shaft hole 141 of the second synchronous wheel 14 in sequence, so that the vacuum degree in the chamber 21 cannot be damaged in the rotating process of the heater. Because the radial forces acted on the middle synchronizing wheel on the two sides of the synchronous belt are exactly counteracted oppositely, the heater, the cylinder connected with the heater, the magnetic fluid and other parts can be effectively prevented from being damaged and deformed due to the action of the radial forces, the service life of the equipment can be effectively prolonged, the pollution of the equipment is reduced, and the production cost is reduced.
The chamber may be one of a physical vapor deposition chamber and a chemical vapor deposition chamber, that is, the semiconductor apparatus may be a physical vapor deposition apparatus or a chemical vapor deposition apparatus.
In summary, the present invention provides a rotating device capable of removing radial force, which includes a fixing plate, a motor, a first synchronous wheel, a second synchronous wheel, a third synchronous wheel and a synchronous belt; the fixing plate is provided with a first surface and a second surface opposite to the first surface, and a through hole is formed in the fixing plate; the first synchronizing wheel, the second synchronizing wheel and the third synchronizing wheel are all arranged on the first surface of the fixing plate, and a shaft hole of the second synchronizing wheel corresponds to the through hole in the fixing plate; the first synchronizing wheel and the third synchronizing wheel are positioned on two opposite sides of the second synchronizing wheel, and the center points of the first synchronizing wheel, the second synchronizing wheel and the third synchronizing wheel are positioned on the same horizontal line; the motor with the third synchronizing wheel is connected for the drive the third synchronizing wheel is rotatory, the hold-in range is around locating on first synchronizing wheel, second synchronizing wheel and the third synchronizing wheel, just the hold-in range is tight state that rises, treats that the rotation axis of rotating member passes the through-hole of fixed plate and the shaft hole of second synchronizing wheel, and with the second synchronizing wheel is connected. When the motor drives the third synchronizing wheel to rotate, the third synchronizing wheel is driven to rotate around the synchronizing belts arranged on the first synchronizing wheel, the second synchronizing wheel and the third synchronizing wheel, so that the to-be-rotated piece connected with the second synchronizing wheel is driven to rotate. According to the improved structural design, the three synchronous wheels with the central points positioned on the same horizontal line are arranged to drive the synchronous belt, the rotating shaft of the piece to be rotated is connected with the synchronous wheel positioned in the middle, when the motor drives one of the synchronous wheels to rotate, the synchronous belt is stretched and tightened to clamp the synchronous wheel in the middle, radial forces acting on the synchronous wheel in the middle on two sides of the synchronous belt are exactly counteracted oppositely, the piece to be rotated and accessories connected with the piece to be rotated can be effectively prevented from being damaged and deformed due to the action of the radial force, the service life of equipment can be effectively prolonged, the pollution of the equipment is reduced, and the production cost is reduced. The invention has simple structure, low cost and convenient use. Therefore, the invention effectively overcomes various defects in the prior art and has high industrial utilization value.
The foregoing embodiments are merely illustrative of the principles and utilities of the present invention and are not intended to limit the invention. Any person skilled in the art can modify or change the above-mentioned embodiments without departing from the spirit and scope of the present invention. Accordingly, it is intended that all equivalent modifications or changes which can be made by those skilled in the art without departing from the spirit and technical spirit of the present invention be covered by the claims of the present invention.

Claims (10)

1. A rotary device capable of removing radial forces, comprising: the device comprises a fixing plate, a motor, a first synchronous wheel, a second synchronous wheel, a third synchronous wheel and a synchronous belt; the fixing plate is provided with a first surface and a second surface opposite to the first surface, and a through hole is formed in the fixing plate; the first synchronizing wheel, the second synchronizing wheel and the third synchronizing wheel are all arranged on the first surface of the fixing plate, and a shaft hole of the second synchronizing wheel corresponds to the through hole in the fixing plate; the first synchronizing wheel and the third synchronizing wheel are positioned on two opposite sides of the second synchronizing wheel, and the center points of the first synchronizing wheel, the second synchronizing wheel and the third synchronizing wheel are positioned on the same horizontal line; the motor with the third synchronizing wheel is connected, the hold-in range is around locating on first synchronizing wheel, second synchronizing wheel and the third synchronizing wheel, just the hold-in range is tight state that rises, treats that the rotation axis of rotating member passes the through-hole of fixed plate and the shaft hole of second synchronizing wheel, and with the second synchronizing wheel is connected.
2. The rotary device of claim 1, wherein: the diameter of the second synchronizing wheel is larger than the diameters of the first synchronizing wheel and the third synchronizing wheel.
3. The rotary device of claim 2, wherein: the diameters of the first synchronizing wheel and the third synchronizing wheel are the same, and the distance between the second synchronizing wheel and the first synchronizing wheel is equal to the distance between the second synchronizing wheel and the third synchronizing wheel.
4. The rotary device of claim 1, wherein: the rotating device further comprises a first support, the first support comprises a bending portion and a straight portion, one end of the bending portion is connected with the side face of the fixing plate, the other end of the bending portion extends to the position below the first synchronizing wheel, one end of the straight portion is connected with the bending portion, and the other end of the straight portion penetrates through a shaft hole of the first synchronizing wheel until the other end of the straight portion is connected with the first surface of the fixing plate.
5. The rotary device of claim 1, wherein: the rotating device further comprises a fixing frame, the fixing frame is located between the motor and the fixing plate and located on the periphery of the third synchronizing wheel, and the fixing frame connects the motor and the fixing plate.
6. The rotary device of claim 5, wherein: the rotating device further comprises a second support and a tensioning screw, the second support is located on the first surface of the fixing plate and located on one side, away from the second synchronizing wheel, of the fixing frame, and the tensioning screw is connected between the second support and the fixing frame.
7. A heater rotating system, comprising a heater and the rotating device according to any one of claims 1 to 6, wherein the heater comprises a bearing table and a rotating shaft connected to the bottom of the bearing table, the rotating shaft of the heater passes through the through hole and the shaft hole of the second synchronizing wheel from the second surface of the fixing plate, and the rotating shaft of the heater is connected to the second synchronizing wheel.
8. A semiconductor device comprising a chamber, a heater and the rotating device according to any one of claims 1 to 6, wherein the rotating device is located at the bottom of the chamber, the heater comprises a bearing table and a rotating shaft connected to the bottom of the bearing table, the rotating shaft of the heater extends from the inside to the outside of the chamber and sequentially passes through the through hole of the fixing plate and the shaft hole of the second synchronizing wheel, and the rotating shaft of the heater is connected to the second synchronizing wheel.
9. The semiconductor device according to claim 8, wherein: the semiconductor equipment further comprises a heater lifting assembly, the heater lifting assembly is located between the rotating device and the chamber, and the heater lifting assembly is connected with both the chamber and the rotating device.
10. The semiconductor device according to claim 8 or 9, characterized in that: the chamber includes one of a physical vapor deposition chamber and a chemical vapor deposition chamber.
CN202010695757.2A 2020-07-20 2020-07-20 Rotary device capable of removing radial force, heater rotary system and semiconductor equipment Active CN111734799B (en)

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CN111734799B CN111734799B (en) 2020-12-08

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Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102072294A (en) * 2009-11-23 2011-05-25 吴小平 Bearing pressure-dispersing belt transmission method and speed changing box manufactured thereby
CN204140796U (en) * 2014-10-16 2015-02-04 中国石油大学(华东) A kind of belt stretcher
CN204677706U (en) * 2015-05-27 2015-09-30 合肥智光应用技术研究所 The epicyclic gear train arrangements for speed regulation of Timing Belt structure
CN207321034U (en) * 2017-06-10 2018-05-04 上海陛通半导体能源科技股份有限公司 A kind of vacuum rotating device
JP2019055450A (en) * 2017-09-21 2019-04-11 株式会社ディスコ Processing device
CN110654959A (en) * 2019-10-31 2020-01-07 苏州吾德电梯有限公司 Power transmission structure of household platform elevator

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102072294A (en) * 2009-11-23 2011-05-25 吴小平 Bearing pressure-dispersing belt transmission method and speed changing box manufactured thereby
CN204140796U (en) * 2014-10-16 2015-02-04 中国石油大学(华东) A kind of belt stretcher
CN204677706U (en) * 2015-05-27 2015-09-30 合肥智光应用技术研究所 The epicyclic gear train arrangements for speed regulation of Timing Belt structure
CN207321034U (en) * 2017-06-10 2018-05-04 上海陛通半导体能源科技股份有限公司 A kind of vacuum rotating device
JP2019055450A (en) * 2017-09-21 2019-04-11 株式会社ディスコ Processing device
CN110654959A (en) * 2019-10-31 2020-01-07 苏州吾德电梯有限公司 Power transmission structure of household platform elevator

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