CN111729769A - High-efficient atomizing nozzle - Google Patents

High-efficient atomizing nozzle Download PDF

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Publication number
CN111729769A
CN111729769A CN202010556733.9A CN202010556733A CN111729769A CN 111729769 A CN111729769 A CN 111729769A CN 202010556733 A CN202010556733 A CN 202010556733A CN 111729769 A CN111729769 A CN 111729769A
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CN
China
Prior art keywords
liquid flow
liquid
gas flow
layer
central
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Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN202010556733.9A
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Chinese (zh)
Inventor
张建辉
陈震林
陈晓生
张帆
黄智�
赖立怡
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Guangzhou University
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Guangzhou University
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Publication date
Application filed by Guangzhou University filed Critical Guangzhou University
Priority to CN202010556733.9A priority Critical patent/CN111729769A/en
Publication of CN111729769A publication Critical patent/CN111729769A/en
Pending legal-status Critical Current

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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/02Spray pistols; Apparatus for discharge
    • B05B7/06Spray pistols; Apparatus for discharge with at least one outlet orifice surrounding another approximately in the same plane
    • B05B7/061Spray pistols; Apparatus for discharge with at least one outlet orifice surrounding another approximately in the same plane with several liquid outlets discharging one or several liquids
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/02Spray pistols; Apparatus for discharge
    • B05B7/08Spray pistols; Apparatus for discharge with separate outlet orifices, e.g. to form parallel jets, i.e. the axis of the jets being parallel, to form intersecting jets, i.e. the axis of the jets converging but not necessarily intersecting at a point
    • B05B7/0807Spray pistols; Apparatus for discharge with separate outlet orifices, e.g. to form parallel jets, i.e. the axis of the jets being parallel, to form intersecting jets, i.e. the axis of the jets converging but not necessarily intersecting at a point to form intersecting jets
    • B05B7/0853Spray pistols; Apparatus for discharge with separate outlet orifices, e.g. to form parallel jets, i.e. the axis of the jets being parallel, to form intersecting jets, i.e. the axis of the jets converging but not necessarily intersecting at a point to form intersecting jets with one single gas jet and several jets constituted by a liquid or a mixture containing a liquid
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B05SPRAYING OR ATOMISING IN GENERAL; APPLYING FLUENT MATERIALS TO SURFACES, IN GENERAL
    • B05BSPRAYING APPARATUS; ATOMISING APPARATUS; NOZZLES
    • B05B7/00Spraying apparatus for discharge of liquids or other fluent materials from two or more sources, e.g. of liquid and air, of powder and gas
    • B05B7/02Spray pistols; Apparatus for discharge
    • B05B7/08Spray pistols; Apparatus for discharge with separate outlet orifices, e.g. to form parallel jets, i.e. the axis of the jets being parallel, to form intersecting jets, i.e. the axis of the jets converging but not necessarily intersecting at a point
    • B05B7/0892Spray pistols; Apparatus for discharge with separate outlet orifices, e.g. to form parallel jets, i.e. the axis of the jets being parallel, to form intersecting jets, i.e. the axis of the jets converging but not necessarily intersecting at a point the outlet orifices for jets constituted by a liquid or a mixture containing a liquid being disposed on a circle

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  • Nozzles (AREA)

Abstract

The invention provides a high-efficiency atomizing nozzle, and relates to the field of nozzles. The high-efficiency atomizing nozzle comprises a nozzle body, wherein a central liquid flow passage, a plurality of inner-layer gas flow passages and a plurality of outer-layer liquid flow passages are arranged in the nozzle body, the outer-layer liquid flow passages are circumferentially arranged at intervals outside the central liquid flow passage, and the inner-layer gas flow passages are circumferentially arranged at intervals at annular intervals between the central liquid flow passage and the outer-layer liquid flow passages; the liquid flow directions of the outer layer liquid flow channels and the gas flow directions of the inner layer gas flow channels are respectively arranged towards the liquid flow axis close to the central liquid flow channel in an inclined mode, and the liquid flow directions of the outer layer liquid flow channels and the gas flow directions of the inner layer gas flow channels are respectively intersected at the same position on the liquid flow axis of the central liquid flow channel. The liquid discharged from the outer liquid channels collides with the liquid discharged from the central liquid channel to form liquid drop flying clusters, and the liquid drop flying clusters are blown away and atomized under the jet action of the air flow, so that mist is formed efficiently and uniformly, and the atomization effect is better.

Description

High-efficient atomizing nozzle
Technical Field
The invention relates to the technical field of nozzles, in particular to a high-efficiency atomizing nozzle.
Background
The atomizing nozzle is a nozzle structure which uniformly mixes liquid and gas into fine droplet mist which can be suspended in air, and is widely applied to scenes of humidifying, cooling, purifying air and the like.
The traditional atomizing nozzle mostly adopts a single gas flow channel and a single liquid flow channel intersection design, the mixing uniformity of gas flow and liquid flow is poor, the size of mist liquid drops generated by the nozzle is inconsistent, and the problem that large liquid drops are easy to form and drop is solved. An improved liquid atomizing device was subsequently developed, and a nozzle body including a first gas ejection portion and a second gas ejection portion for ejecting two gas streams, and a liquid passage portion having a liquid flow passage was disclosed; a gas-liquid mixing area portion that atomizes the liquid by causing the gas flow ejected from the first gas ejection portion and the gas flow ejected from the second gas flow ejection portion to collide with the liquid flowing out from the liquid passage portion; and a spray outlet portion for spraying the mist atomized by the gas-liquid mixing area portion to the outside.
The existing improved liquid atomization device is provided with two gas flow channels, the spraying directions of the two gas flow channels are crossed, and the collision blowing effect is formed on liquid, so that the atomization effect on the liquid can be improved, and the liquid drop particles of mist are more uniform and fine. The liquid flow flowing out from the middle liquid passage determines the atomization efficiency, but for the requirement of large atomization amount, if the sectional area of the liquid passage is increased or the flow rate of the liquid is increased, the atomization requirement of more liquid cannot be effectively met due to the limitation of the gas jet flow, and the problem that large liquid drops are formed at the outlet and drop is caused.
In conclusion, the existing atomization device has the problems that the atomization requirement of large-flow liquid cannot be met and the atomization effect is poor.
Disclosure of Invention
In order to solve the above problems, an object of the present invention is to provide an efficient atomizing nozzle, so as to solve the problems that the existing atomizing device cannot meet the atomizing requirement of large flow liquid and has poor atomizing effect.
The technical scheme of the high-efficiency atomizing nozzle is as follows:
the high-efficiency atomizing nozzle comprises a nozzle body, wherein a central liquid flow passage, a plurality of inner-layer gas flow passages and a plurality of outer-layer liquid flow passages are arranged in the nozzle body, the outer-layer liquid flow passages are circumferentially arranged at intervals outside the central liquid flow passage, and the inner-layer gas flow passages are circumferentially arranged at intervals at an annular interval between the central liquid flow passage and the outer-layer liquid flow passages;
the liquid flow direction of the outer layer liquid flow channel and the gas flow direction of the inner layer gas flow channel are respectively arranged towards the liquid flow axis close to the central liquid flow channel in an inclined mode, and the liquid flow directions of the outer layer liquid flow channels and the gas flow directions of the inner layer gas flow channels are respectively intersected at the same position on the liquid flow axis of the central liquid flow channel.
Has the advantages that: intersecting the liquid flow directions of the outer layer liquid flow channels at the same position on the liquid flow axis of the central liquid flow channel, so that liquid discharged from the outer layer liquid flow channels collides, the liquid discharged from the outer layer liquid flow channels collides with the liquid discharged from the central liquid flow channel, liquid drop flyballs are formed after the liquid collides, the gas flow direction of the inner layer gas flow channel and the liquid flow direction of the outer layer liquid flow channel intersect at the liquid drop flyballs, and the liquid drop flyballs are subjected to blowing, scattering and atomizing effects through gas flow sprayed from the inner layer gas flow channel; because the liquid particles in the liquid drop flying mass are small in size, the liquid drops are easy to be further blown away and atomized under the spraying action of the air flow, and therefore mist can be formed efficiently and uniformly; and through the combined design of the central liquid flow channel and the outer layer liquid flow channel, the discharge flow of the liquid is obviously improved, the atomization requirement of large-flow liquid is fully met, and the atomization effect is better.
Further, a plurality of the inner layer gas flow passages and a plurality of the outer layer liquid flow passages are arranged in concentric circles with respect to a liquid flow axis of the central liquid flow passage.
Furthermore, the included angle between the gas flow direction of the inner layer gas flow channel and the liquid flow axis of the central liquid flow channel is any angle between 15 degrees and 45 degrees.
Further, the included angle between the liquid flow direction of the outer layer liquid flow channel and the liquid flow axis of the central liquid flow channel is any angle between 45 degrees and 85 degrees.
Furthermore, a plurality of inner-layer air cavities are further arranged inside the nozzle body, the inner-layer air cavities are communicated with the inner-layer air flow channels, and a plurality of air inlet flow channels are further respectively arranged on the inner-layer air cavities and are radially arranged.
Further, the inner layer gas flow channel comprises a cylindrical section and a conical outlet section, and the conical outlet section is arranged in a shrinking mode along the gas flow direction of the inner layer gas flow channel.
Furthermore, the nozzle body is provided with a first wedge-shaped sinking groove corresponding to the conical outlet section of the inner-layer gas flow channel, and the bottom surface of the first wedge-shaped sinking groove is perpendicular to the gas flow direction of the inner-layer gas flow channel.
Furthermore, a second wedge-shaped sinking groove is further formed in the position, corresponding to the liquid outlet of the outer-layer liquid flow channel, of the nozzle body, and the groove bottom face of the second wedge-shaped sinking groove is perpendicular to the liquid flow direction of the outer-layer liquid flow channel.
Further, inlayer gas flow channel circumference interval equipartition is equipped with eight, outer liquid flow channel circumference interval equipartition is equipped with four.
Furthermore, the nozzle body is of a hollow round cake structure, a central liquid flow pipe and a plurality of outer layer liquid flow pipes are arranged on the nozzle body in a penetrating mode along the thickness direction, the outer layer liquid flow pipes are inclined to the thickness direction in a penetrating mode, and liquid inlet connectors located on the back side of the nozzle body are respectively arranged on the central liquid flow pipe and the outer layer liquid flow pipes; the plurality of intake runners are disposed in communication with the outer peripheral wall of the nozzle body.
Drawings
FIG. 1 is a schematic cross-sectional view of a high efficiency atomizing nozzle in an embodiment 1 of the high efficiency atomizing nozzle of the present invention;
FIG. 2 is a schematic top view of a high efficiency atomizing nozzle in an embodiment 1 of the high efficiency atomizing nozzle of the present invention;
FIG. 3 is a schematic cross-sectional view of the nozzle body of FIG. 2 at B-B.
In the figure: 1-nozzle body, 10-central liquid flow channel, 100-liquid flow axis of central liquid flow channel, 11-inner layer gas flow channel, 110-gas flow direction of inner layer gas flow channel, 111-column section, 112-conical outlet section, 12-outer layer liquid flow channel, 120-liquid flow direction of outer layer liquid flow channel, 13-inner layer gas cavity, 14-gas inlet flow channel, 15-second wedge-shaped sink, 16-first wedge-shaped sink, 2-central liquid flow tube and 3-outer layer liquid flow tube.
Detailed Description
The following detailed description of embodiments of the present invention is provided in connection with the accompanying drawings and examples. The following examples are intended to illustrate the invention but are not intended to limit the scope of the invention.
In embodiment 1 of the high-efficiency atomizing nozzle of the present invention, as shown in fig. 1 to 3, the high-efficiency atomizing nozzle includes a nozzle body 1, a central liquid flow passage 10, a plurality of inner layer gas flow passages 11, and a plurality of outer layer liquid flow passages 12 are provided in the nozzle body 1, the plurality of outer layer liquid flow passages 12 are circumferentially arranged at intervals outside the central liquid flow passage 10, and the plurality of inner layer gas flow passages 11 are circumferentially arranged at intervals at an annular interval between the central liquid flow passage 10 and the outer layer liquid flow passages 12; the liquid flow directions 120 of the outer layer liquid flow channels and the gas flow directions 110 of the inner layer gas flow channels are respectively arranged towards the liquid flow axis 100 close to the central liquid flow channel in an inclined manner, and the liquid flow directions 120 of the outer layer liquid flow channels and the gas flow directions 110 of the inner layer gas flow channels are respectively intersected at the same position on the liquid flow axis 100 of the central liquid flow channel.
Intersecting the liquid flow directions 120 of the outer layer liquid flow channels at the same position on the liquid flow axis 100 of the central liquid flow channel, so that the liquid discharged from the outer layer liquid flow channels 12 collides, the liquid discharged from the outer layer liquid flow channels 12 collides with the liquid discharged from the central liquid flow channel 10, liquid drop flyballs are formed after the liquid collides, the gas flow direction 110 of the inner layer gas flow channel and the liquid flow direction 120 of the outer layer liquid flow channel intersect at the liquid drop flyballs, and the liquid drop flyballs are blown and atomized by the gas flow sprayed from the inner layer gas flow channel 11; because the liquid particles in the liquid drop flying mass are small in size, the liquid drops are easy to be further blown away and atomized under the spraying action of the air flow, and therefore mist can be formed efficiently and uniformly; moreover, through the combined design of the central liquid flow passage 10 and the outer layer liquid flow passage 12, the discharge flow of liquid is obviously improved, the atomization requirement of large-flow liquid is fully met, and the atomization effect is better.
In this embodiment, the inner gas channels 11 and the outer liquid channels 12 are concentrically arranged with respect to the liquid flow axis 100 of the central liquid channel, and the concentric arrangement ensures that the gas flow ejected from the inner gas channels 11 can perform a precise dispersion and atomization effect on the liquid drop flyball formed at the intersection position of the liquid flow direction 120 of the outer liquid channel and the liquid flow axis 100 of the central liquid channel, thereby improving the concentration of mist generation and ensuring that the particle size of the liquid drop is small enough. The included angle between the gas flow direction 110 of the inner layer gas flow channel and the liquid flow axis 100 of the central liquid flow channel is any angle between 15 degrees and 45 degrees, and the included angle between the liquid flow direction 120 of the outer layer liquid flow channel and the liquid flow axis 100 of the central liquid flow channel is any angle between 45 degrees and 85 degrees.
Specifically, the included angle between the gas flow direction 110 of the inner layer gas flow channel and the liquid flow axis 100 of the central liquid flow channel is 25 °, and the included angle between the liquid flow direction 120 of the outer layer liquid flow channel and the liquid flow axis 100 of the central liquid flow channel is 45 °. The liquid flow ejected from the outer layer liquid flow channel 12 has a part of branch power perpendicular to the direction of the liquid flow axis 100 of the central liquid flow channel, and the branch power is used for impacting and scattering the liquid flow ejected from the other outer layer liquid flow channels 12 and the liquid flow ejected from the central liquid flow channel 10, so that a liquid drop flying mass is formed on the liquid flow axis 100 of the central liquid flow channel, and the gas flow ejected from the inner layer gas flow channel 11 plays a significant blowing and atomizing role on the liquid drop flying mass.
Wherein, the inside of nozzle body 1 still is equipped with inlayer air cavity 13, and inlayer air cavity 13 intercommunication sets up on inlayer gas runner 11, and still is equipped with air intake runner 14 on a plurality of inlayer air cavities 13 respectively, and a plurality of air intake runners 14 are radial arrangement. The inner layer air cavity 13 is used as a buffering space of air, plays a role in gathering and buffering the entering air, eliminates turbulence and disturbance flow in the air, and then is ejected outwards from the inner layer air flow channel 11, so that the flowing performance of the ejected air flow is more stable.
Furthermore, the inner layer gas flow channel 11 comprises a cylindrical section 111 and a conical outlet section 112, the conical outlet section 112 being arranged in a converging manner in the gas flow direction 110 of the inner layer gas flow channel. The outlet structural design of the conical outlet section 112 is adopted, so that the collecting and pressurizing effects on the jet air flow are facilitated, the jet pressure and power of the air flow are increased, and the blowing and atomizing effects on the liquid drop flying mass are improved; and, the taper of the conical outlet section 112 is 30 degrees, and has a small gas flow resistance value, so that the gas can be sprayed outwards at a high speed.
The nozzle body 1 is further provided with a first wedge-shaped sinking groove 16 corresponding to the conical outlet section 112 of the inner layer gas flow passage 11, and the groove bottom surface of the first wedge-shaped sinking groove 16 is perpendicular to the gas flow direction 110 of the inner layer gas flow passage. Specifically, the first wedge-shaped sinking groove 16 is an annular groove body, and the bottom surface of the first wedge-shaped sinking groove 16 is perpendicular to the airflow sprayed from the inner-layer gas flow passage 11, so that no interference influence of other structures is caused at the outlet position of the inner-layer gas flow passage 11, and the accurate spraying movement of the gas in the airflow direction is ensured; correspondingly, a second wedge-shaped sinking groove 15 is further formed in the liquid outlet of the outer-layer liquid flow channel 12, the second wedge-shaped sinking groove 15 is also an annular groove body, the groove bottom surface of the second wedge-shaped sinking groove 15 is perpendicular to the liquid flow direction 120 of the outer-layer liquid flow channel, and liquid can be guaranteed to accurately move outwards in a jet flow mode.
In this embodiment, eight inner gas flow passages 11 are circumferentially and uniformly distributed at intervals, and four outer liquid flow passages 12 are circumferentially and uniformly distributed at intervals. The four outer-layer liquid flow passages 12 are combined with the central liquid flow passage 10 to form a fluid passage with a larger sectional area, so that the structural requirement of large-flow liquid is met; the eight inner-layer gas flow channels 11 are arranged, so that the gas flow of the whole efficient atomizing nozzle in unit time is improved, and the atomizing effect of liquid drop flying clusters is ensured.
In addition, nozzle body 1 is hollow round cake structure, and nozzle body 1 goes up to run through along thickness direction and is provided with central liquid flow tube 2 to and a plurality of outer liquid flow tubes 3 that run through in the thickness direction and set up, central liquid flow tube 2 and outer liquid flow tube 3 are equipped with the liquid inlet joint who is located the back side of nozzle body 1 respectively. The central liquid flow pipe 2 and the outer layer liquid flow pipe 3 are respectively communicated with the liquid flow pipeline through the liquid inlet interface, the eight gas inlet flow channels 14 are communicated and arranged on the outer peripheral wall of the nozzle body 1, and it should be noted that the gas inlet flow channels 14 of the inner layer gas flow channel 11 are arranged between the two adjacent outer layer liquid flow channels 12.
In order to meet different use requirements, nine inner-layer gas flow passages are circumferentially and uniformly distributed at intervals, three outer-layer liquid flow passages are circumferentially and uniformly distributed at intervals, and the nine inner-layer gas flow passages and the three outer-layer liquid flow passages are centrosymmetrically distributed around the liquid flow axis of the central liquid flow passage. In addition, the included angle between the gas flow direction of the inner layer gas flow channel and the liquid flow axis of the central liquid flow channel is 30 degrees or 45 degrees; or the included angle between the liquid flow direction of the outer layer liquid flow channel and the liquid flow axis of the central liquid flow channel can be 60 degrees or 75 degrees, and the liquid drop flying mass can be obviously blown away and atomized by the air flow sprayed by the inner layer gas flow channel, so that the aim of higher atomization efficiency is fulfilled.
The above description is only a preferred embodiment of the present invention, and it should be noted that, for those skilled in the art, various modifications and substitutions can be made without departing from the technical principle of the present invention, and these modifications and substitutions should also be regarded as the protection scope of the present invention.

Claims (10)

1. A high-efficiency atomizing nozzle is characterized by comprising a nozzle body, wherein a central liquid flow passage, a plurality of inner-layer gas flow passages and a plurality of outer-layer liquid flow passages are arranged in the nozzle body, the outer-layer liquid flow passages are circumferentially arranged at intervals outside the central liquid flow passage, and the inner-layer gas flow passages are circumferentially arranged at intervals at annular intervals between the central liquid flow passage and the outer-layer liquid flow passages;
the liquid flow direction of the outer layer liquid flow channel and the gas flow direction of the inner layer gas flow channel are respectively arranged towards the liquid flow axis close to the central liquid flow channel in an inclined mode, and the liquid flow directions of the outer layer liquid flow channels and the gas flow directions of the inner layer gas flow channels are respectively intersected at the same position on the liquid flow axis of the central liquid flow channel.
2. A high efficiency atomizing nozzle as set forth in claim 1, wherein said plurality of inner gas flow passages and said plurality of outer liquid flow passages are arranged in concentric circles about a flow axis of said central liquid flow passage.
3. A high efficiency atomizing nozzle as set forth in claim 2, wherein said inner gas flow passage has a gas flow direction which is at any angle between 15 ° and 45 ° to the liquid flow axis of said central liquid flow passage.
4. A high efficiency atomizing nozzle as set forth in claim 2, wherein said outer liquid flow passage has a flow direction which is at any angle between 45 ° and 85 ° relative to the flow axis of said central liquid flow passage.
5. The high-efficiency atomizing nozzle as set forth in claim 3, wherein said nozzle body further has a plurality of inner air chambers therein, said inner air chambers being connected to said inner gas flow passages, and said inner air chambers being further provided with said gas inlet flow passages, respectively, said gas inlet flow passages being radially arranged.
6. A high efficiency atomizing nozzle as set forth in claim 3, wherein said inner gas flow passage includes a cylindrical portion and a tapered outlet portion, said tapered outlet portion being disposed in a converging relationship in the direction of gas flow through said inner gas flow passage.
7. The high-efficiency atomizing nozzle as set forth in claim 6, wherein said nozzle body is further provided with a first wedge-shaped sinking groove at a position corresponding to said tapered outlet section of said inner gas flow passage, and a bottom surface of said first wedge-shaped sinking groove is perpendicular to a gas flow direction of said inner gas flow passage.
8. The high-efficiency atomizing nozzle as set forth in claim 1, wherein a second wedge-shaped sinking groove is further formed in the nozzle body at a position corresponding to the liquid outlet of the outer liquid flow passage, and the bottom surface of the second wedge-shaped sinking groove is perpendicular to the liquid flow direction of the outer liquid flow passage.
9. The high efficiency atomizing nozzle as set forth in claim 1, wherein eight of said inner gas flow passages are circumferentially spaced and four of said outer liquid flow passages are circumferentially spaced and spaced.
10. The high efficiency atomizing nozzle according to claim 5, wherein said nozzle body is a hollow cylindrical structure, said nozzle body having a central liquid flow pipe extending therethrough in a thickness direction and a plurality of outer liquid flow pipes extending therethrough in an oblique direction with respect to the thickness direction, said central liquid flow pipe and said outer liquid flow pipes being provided with liquid inlet fittings located on a rear surface side of said nozzle body, respectively; the plurality of intake runners are disposed in communication with the outer peripheral wall of the nozzle body.
CN202010556733.9A 2020-06-17 2020-06-17 High-efficient atomizing nozzle Pending CN111729769A (en)

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Application Number Priority Date Filing Date Title
CN202010556733.9A CN111729769A (en) 2020-06-17 2020-06-17 High-efficient atomizing nozzle

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Application Number Priority Date Filing Date Title
CN202010556733.9A CN111729769A (en) 2020-06-17 2020-06-17 High-efficient atomizing nozzle

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CN111729769A true CN111729769A (en) 2020-10-02

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Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112495105A (en) * 2020-11-12 2021-03-16 姹や寒 Dust removal method for grinding machine machining
CN112516722A (en) * 2020-11-12 2021-03-19 姹や寒 Particulate matter processing apparatus of grinding machine processing
CN112619402A (en) * 2020-11-09 2021-04-09 光大环境科技(中国)有限公司 Mixed SNCR deNOx systems of reinforcing
CN112792036A (en) * 2020-12-31 2021-05-14 至微半导体(上海)有限公司 System and method for recycling wafer cleaning solution in semiconductor wet process

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112619402A (en) * 2020-11-09 2021-04-09 光大环境科技(中国)有限公司 Mixed SNCR deNOx systems of reinforcing
CN112495105A (en) * 2020-11-12 2021-03-16 姹や寒 Dust removal method for grinding machine machining
CN112516722A (en) * 2020-11-12 2021-03-19 姹や寒 Particulate matter processing apparatus of grinding machine processing
CN112792036A (en) * 2020-12-31 2021-05-14 至微半导体(上海)有限公司 System and method for recycling wafer cleaning solution in semiconductor wet process
CN112792036B (en) * 2020-12-31 2022-12-20 至微半导体(上海)有限公司 System and method for recycling wafer cleaning solution in semiconductor wet process

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