CN111725117A - Substrate conveying device - Google Patents
Substrate conveying device Download PDFInfo
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- CN111725117A CN111725117A CN202010166501.2A CN202010166501A CN111725117A CN 111725117 A CN111725117 A CN 111725117A CN 202010166501 A CN202010166501 A CN 202010166501A CN 111725117 A CN111725117 A CN 111725117A
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- holding member
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- 239000000758 substrate Substances 0.000 title claims abstract description 344
- 230000007246 mechanism Effects 0.000 claims abstract description 188
- 238000001514 detection method Methods 0.000 claims description 41
- 238000012545 processing Methods 0.000 claims description 16
- 238000005286 illumination Methods 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 abstract description 13
- 230000032258 transport Effects 0.000 description 64
- 239000011521 glass Substances 0.000 description 35
- 238000010586 diagram Methods 0.000 description 12
- 230000008859 change Effects 0.000 description 10
- 239000004973 liquid crystal related substance Substances 0.000 description 10
- 230000005540 biological transmission Effects 0.000 description 8
- 238000012546 transfer Methods 0.000 description 5
- 238000011144 upstream manufacturing Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 2
- 230000002452 interceptive effect Effects 0.000 description 2
- 238000000034 method Methods 0.000 description 2
- 238000012937 correction Methods 0.000 description 1
- 230000008878 coupling Effects 0.000 description 1
- 238000010168 coupling process Methods 0.000 description 1
- 238000005859 coupling reaction Methods 0.000 description 1
- 230000014759 maintenance of location Effects 0.000 description 1
- 238000012986 modification Methods 0.000 description 1
- 230000004048 modification Effects 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67718—Changing orientation of the substrate, e.g. from a horizontal position to a vertical position
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/67005—Apparatus not specifically provided for elsewhere
- H01L21/67242—Apparatus for monitoring, sorting or marking
- H01L21/67288—Monitoring of warpage, curvature, damage, defects or the like
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/67—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere
- H01L21/677—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations
- H01L21/67703—Apparatus specially adapted for handling semiconductor or electric solid state devices during manufacture or treatment thereof; Apparatus specially adapted for handling wafers during manufacture or treatment of semiconductor or electric solid state devices or components ; Apparatus not specifically provided for elsewhere for conveying, e.g. between different workstations between different workstations
- H01L21/67706—Mechanical details, e.g. roller, belt
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- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
Abstract
The invention provides a substrate conveying device, which is used for conveying a substrate, and can shorten the cycle time of a manufacturing line for assembling and using the substrate conveying device even under the condition of changing the orientation of the substrate or correcting the position of the substrate by rotating the substrate. The substrate conveying device comprises: a plurality of support pins (7) on which the substrate (2) is placed; a pin holding member (8) that holds the plurality of support pins (7); a first moving mechanism (9) for moving the pin holding member (8) in the X direction to convey the substrate (2); a second moving mechanism for moving the pin holding member (8) in the Y direction; and a rotating mechanism (11) for rotating the pin holding member (8) in the axial direction in which the vertical direction is the rotation direction. The first moving mechanism (9) moves the rotating mechanism (11) in the X direction together with the pin holding member (8).
Description
Technical Field
The present invention relates to a substrate transport apparatus for transporting a substrate such as a glass substrate.
Background
Conventionally, a substrate processing apparatus for processing a glass substrate used in a liquid crystal display device or the like is known (for example, see patent document 1). The substrate processing apparatus described in patent document 1 includes: a conveying robot for taking out the glass substrate from the box containing a plurality of glass substrates; a processing unit for processing a substrate; and a conveyor for conveying the glass substrate between the conveying robot and the processing part. The conveyor includes a plurality of conveying rollers for conveying the glass substrate and a plurality of pushing pins which are raised and lowered to receive the glass substrate from the conveying robot.
In the substrate processing apparatus described in patent document 1, the glass substrate is placed on the plurality of ejector pins in a state where the upper ends of the plurality of ejector pins are raised above the upper ends of the conveying rollers, and the conveying robot transfers the glass substrate to the conveyor. When the glass substrate is placed on the plurality of ejector pins, the ejector pins are lowered, and the glass substrate is placed on the conveying rollers. When the glass substrate is placed on the conveying roller, the conveying roller is rotated, and the glass substrate is carried into the processing section. In the substrate processing apparatus described in patent document 1, since the conveyor includes a plurality of lift pins which can be raised and lowered, it is possible to prevent interference between the hand fork of the conveyor robot and the conveying roller, and to transfer the glass substrate from the conveyor robot to the conveyor.
Documents of the prior art
Patent document
Patent document 1: japanese laid-open patent publication No. 10-310240
Disclosure of Invention
Technical problem to be solved by the invention
In the substrate processing apparatus described in patent document 1, for example, when the glass substrate is carried into the processing unit after the orientation of the glass substrate placed on the conveying rollers has to be changed, or when the glass substrate is carried into the processing unit after the position of the glass substrate placed on the conveying rollers has to be corrected (aligned), the glass substrate may be scratched if the glass substrate is rotated or the position of the glass substrate is corrected while being placed on the conveying rollers. Therefore, in the substrate processing apparatus described in patent document 1, when the glass substrate is rotated to change the orientation of the glass substrate or to correct the position of the glass substrate, it is necessary to lift the glass substrate from the conveying rollers by the push pins, and then rotate the glass substrate or correct the position of the glass substrate.
However, when the glass substrate is rotated on the conveyor to change the orientation of the glass substrate or to correct the position of the glass substrate, if the glass substrate is lifted up from the conveying rollers by the knock-out pins and then rotated or corrected, the time required to transfer the glass substrate received from the conveying robot to the processing unit becomes long, and the cycle time of the substrate processing apparatus may become long.
Accordingly, an object of the present invention is to provide a substrate transport apparatus for transporting a substrate, which can shorten a cycle time of a manufacturing line in which the substrate transport apparatus is assembled and used, even when the substrate is rotated to change the orientation of the substrate or to correct the position of the substrate.
Technical scheme for solving technical problem
In order to solve the above-described problems, the present invention provides a substrate transport apparatus for transporting a substrate, comprising: a plurality of support pins on which the substrate is placed; a pin holding member that holds a plurality of support pins; a first moving mechanism that moves the pin holding member in a first direction that is a predetermined direction among horizontal directions to convey the substrate; a second moving mechanism that moves the pin holding member in a second direction orthogonal to the up-down direction and the first direction; and a rotating mechanism that rotates the pin holding member in an axial direction in which the vertical direction is a rotation direction, the first moving mechanism moving the rotating mechanism in the first direction together with the pin holding member.
The substrate conveying device of the invention comprises: a first moving mechanism that moves the pin holding member in a first direction to convey the substrate; a second moving mechanism that moves the pin holding member in a second direction; and a rotating mechanism for rotating the pin holding member in the axial direction in which the vertical direction is a rotation direction. Therefore, in the present invention, even if the substrate is not lifted, the substrate placed on the plurality of support pins can be rotated by the rotating mechanism, and the orientation of the substrate can be changed. In the present invention, even if the substrate is not lifted up, the substrate placed on the plurality of support pins can be rotated by the rotating mechanism, moved in the second direction by the second moving mechanism, and moved in the first direction by the first moving mechanism, thereby correcting the position of the substrate.
That is, in the present invention, even if the substrate is not lifted, the substrate can be rotated to change the orientation of the substrate or to correct the position of the substrate. Therefore, in the present invention, in the substrate transport apparatus, even when the orientation of the substrate is changed or the position of the substrate is corrected by rotating the substrate, the cycle time of the manufacturing line in which the substrate transport apparatus is assembled and used can be shortened.
In addition, in the present invention, since the first moving mechanism moves the rotating mechanism in the first direction together with the pin holding member, it is possible to change the orientation of the substrate by rotating the substrate placed on the plurality of support pins by the rotating mechanism while conveying the substrate in one of the first directions by the first moving mechanism. In addition, since the first moving mechanism moves the rotating mechanism in the first direction together with the pin holding member, it is possible to perform position correction of the substrate by rotating the substrate placed on the plurality of support pins by the rotating mechanism and moving it in the second direction by the second moving mechanism while conveying the substrate in one direction of the first direction by the first moving mechanism.
That is, in the present invention, the substrate can be rotated to change the orientation of the substrate or to correct the position of the substrate while being conveyed in one of the first directions. Therefore, in the present invention, in the substrate transport apparatus, even when the orientation of the substrate is changed or the position of the substrate is corrected by rotating the substrate, the cycle time of the manufacturing line in which the substrate transport apparatus is assembled and used can be further shortened.
In the present invention, it is preferable that the plurality of support pins include suction support pins which suck the lower surface of the substrate and hold the substrate. With this configuration, the substrate placed on the plurality of support pins can be reliably prevented from shifting.
In the present invention, for example, the second moving mechanism moves the rotating mechanism in the second direction together with the pin holding member, and the first moving mechanism moves the rotating mechanism and the second moving mechanism in the first direction together with the pin holding member.
In the present invention, for example, the rotating mechanism rotates the pin holding member while the first moving mechanism conveys the substrate in one of the first directions. In this case, the substrate can be conveyed in one of the first directions by the first moving mechanism, and the orientation of the substrate can be changed by rotating the substrate placed on the plurality of support pins by the rotating mechanism.
In the present invention, for example, the second moving mechanism moves the pin holding member and the rotating mechanism in the second direction while the first moving mechanism conveys the substrate in one of the first directions, and the rotating mechanism rotates the pin holding member. In this case, the substrate placed on the plurality of support pins can be rotated by the rotating mechanism while being conveyed in one of the first directions by the first moving mechanism, and the position of the substrate can be corrected by being moved in the second direction by the second moving mechanism.
In the present invention, the substrate transport apparatus includes, for example, a detection mechanism for detecting a position in the first direction, a position in the second direction, and an inclination with respect to the first direction or the second direction of the substrate placed on the plurality of support pins. In this case, the position of the substrate is corrected based on the detection result of the detection mechanism. In the present invention, the substrate transport apparatus includes, for example, a data reading mechanism for reading data recorded on the substrate.
In the present invention, it is preferable that the substrate transport apparatus includes a crack detection mechanism for detecting whether or not a crack is present at an end portion of the substrate, the crack detection mechanism includes a camera and an illumination which are disposed above the support pin, and the crack detection mechanism detects whether or not a crack is present at the end portion of the substrate while the substrate is transported in one of the first directions by the first movement mechanism. With this configuration, even when the crack detection means detects the presence or absence of a crack at the end of the substrate, the cycle time of the manufacturing line in which the substrate transport apparatus is assembled and used can be shortened.
In the present invention, it is preferable that the substrate transport apparatus includes a low reflection member which is disposed below the camera and below the substrate, and at least a part of which is disposed outside an end surface of the substrate in the second direction when viewed from above, and an upper surface of the low reflection member is black and is an inclined surface which inclines downward as it goes outward in the second direction. With this configuration, when the crack detection means detects the presence or absence of a crack at the end of the substrate, the illumination light is less likely to be reflected toward the camera outside the end surface of the substrate in the second direction. Therefore, the presence or absence of a crack at the end portion of the substrate in the second direction can be detected with high accuracy.
In the present invention, it is preferable that the upper surface of the member disposed below the camera and below the substrate be black. With this configuration, when the crack detection means detects the presence or absence of a crack at the end of the substrate, the illumination light is less likely to be reflected toward the camera outside the end surface of the substrate. Therefore, the presence or absence of a crack at the end of the substrate can be detected with high accuracy.
(effect of the invention)
As described above, in the substrate transport apparatus for transporting a substrate according to the present invention, even when the substrate is rotated to change the orientation of the substrate or to correct the position of the substrate, the cycle time of a manufacturing line in which the substrate transport apparatus is assembled and used can be shortened.
Drawings
Fig. 1 is a side view of a substrate transport apparatus according to an embodiment of the present invention.
Fig. 2 is a plan view for explaining the configuration of the substrate transport apparatus shown in fig. 1.
Fig. 3 is a diagram for explaining the configuration of the substrate transport apparatus from the direction E-E in fig. 1.
Fig. 4 is a diagram for explaining the configuration of the portion F in fig. 1.
Fig. 5 is a diagram for explaining the configuration of the substrate transport apparatus from the G-G direction in fig. 1.
Fig. 6 is a diagram for explaining the configuration of the H portion in fig. 2.
Fig. 7 is a diagram for explaining the structure of the J portion in fig. 2.
Fig. 8 is a diagram for explaining a method of correcting the position of the substrate in the substrate transport apparatus shown in fig. 1.
Description of the reference numerals
1 … substrate conveying device; 2 … a substrate; 7 … support pins; 7A … adsorbing the support pin; 8 … pin retention features; 9 … moving mechanism (first moving mechanism); 10 … moving mechanism (second moving mechanism); 11 … a rotating mechanism; 14 … data reading mechanism; 15 … detection mechanism; 16 … crack detection mechanism; 38 … camera; 39 … illumination; 41 … low reflection component; a first direction X …; y … second direction.
Detailed Description
Embodiments of the present invention will be described below with reference to the drawings.
(schematic configuration of substrate transport apparatus)
Fig. 1 is a side view of a substrate transport apparatus 1 according to an embodiment of the present invention. Fig. 2 is a plan view for explaining the structure of the substrate transport apparatus 1 shown in fig. 1. Fig. 3 is a diagram for explaining the structure of the substrate transport apparatus 1 from the direction E-E in fig. 1. Fig. 4 is a diagram for explaining the configuration of the portion F in fig. 1. Fig. 5 is a diagram for explaining the structure of the substrate transport apparatus 1 from the G-G direction of fig. 1.
The substrate transport apparatus 1 of the present embodiment is an apparatus for transporting a substrate 2 in a horizontal direction. The substrate 2 is a large glass substrate used in a liquid crystal display device, and is formed in a rectangular flat plate shape. The substrate transport apparatus 1 is assembled and applied to a manufacturing line of a liquid crystal display device. The manufacturing line of the liquid crystal display device includes an upstream robot that supplies the substrates 2 to the substrate transport device 1 one by one and a downstream robot that discharges the substrates 2 from the substrate transport device 1 one by one. The robot is a horizontal articulated robot, and includes a hand 3, an arm to which the hand 3 is rotatably connected to a distal end side, and a main body to which a proximal end side of the arm is rotatably connected. The hand 3 includes a plurality of forks 4 on which the substrate 2 is mounted.
The substrate transport apparatus 1 includes: a plurality of support pins 7 on which the substrate 2 is placed; a pin holding member 8 for holding the plurality of support pins 7; a moving mechanism 9 (see fig. 5) as a first moving mechanism for linearly moving the pin holding member 8 in a predetermined direction in the horizontal direction; a moving mechanism 10 (see fig. 4) as a second moving mechanism for moving the pin holding member 8 in a direction orthogonal to the moving direction and the vertical direction of the pin holding member 8 moved by the moving mechanism 9; and a rotating mechanism 11 for rotating the pin holding member 8 in the axial direction in which the vertical direction is rotated.
In the following description, the moving direction (X direction in fig. 1 and the like) in which the pin holding member 8 is moved by the moving mechanism 9 is referred to as "front-rear direction", and the Y direction in fig. 1 and the like orthogonal to the up-down direction and the front-rear direction is referred to as "left-right direction". In the following description, one of the front and rear directions, i.e., the X2 direction in fig. 1 and the like, is referred to as the "rear" direction, the opposite direction, i.e., the X1 direction in fig. 1 and the like, is referred to as the "front" direction, one of the left and right directions, i.e., the Y1 direction in fig. 2 and the like, is referred to as the "right" direction, and the opposite direction, i.e., the Y2 direction in fig. 2 and the like, is referred to as the "left. In the present embodiment, the front-back direction (X direction) is a first direction, and the left-right direction (Y direction) is a second direction.
In a manufacturing line of a liquid crystal display device, a main body of an upstream robot is disposed in front of the substrate transport apparatus 1, and a main body of a downstream robot is disposed behind the substrate transport apparatus 1. The substrate transport apparatus 1 transports the substrate 2 supplied from the upstream robot toward the rear side. That is, the moving mechanism 9 moves the pin holding member 8 to the rear side, thereby conveying the substrate 2 to the rear side. The substrate transfer device 1 transfers the substrate 2 by, for example, 8 to 9 (m).
The substrate transport apparatus 1 includes a gate frame 12 to which the moving mechanism 9 and the like are attached, and support legs 13 for supporting the frame 12 from below. The substrate transport apparatus 1 further includes: a data reading mechanism 14 for reading data recorded on the substrate 2; a detection mechanism 15 for detecting the position in the front-rear direction, the position in the left-right direction, and the inclination with respect to the front-rear direction or the left-right direction of the substrate 2 placed on the plurality of support pins 7; and a crack detection mechanism 16 for detecting the presence or absence of a crack at the end of the substrate 2. In fig. 2, the frame 12 and the support legs 13 are not shown.
(constitution of support pin, pin holding member, turning mechanism and moving mechanism)
Fig. 6 is a diagram for explaining the configuration of the H portion in fig. 2.
The pin holding member 8 includes: a plurality of elongated square-cylindrical pin fixing members 19 to which the support pins 7 are fixed; two elongated square-tube-shaped connecting members 20 connecting the plurality of pin fixing members 19; and a flat plate-shaped support plate 21 supporting the two connecting members 20. The pin holding member 8 has an outer shape smaller than that of the substrate 2. Therefore, when the pin holding member 8 is viewed from above in a state where the substrate 2 is placed on the plurality of support pins 7, the pin holding member 8 is accommodated in the outer shape of the substrate 2.
The pin fixing member 19 is disposed such that the longitudinal direction of the pin fixing member 19 coincides with the front-rear direction. The plurality of pin fixing members 19 are disposed at predetermined intervals in the left-right direction. In the present embodiment, the pin holding member 8 includes five pin fixing members 19. The connecting member 20 is disposed so that the longitudinal direction and the left-right direction of the connecting member 20 coincide. The two coupling members 20 are arranged at a distance in the front-rear direction. The support plate 21 is disposed so that the thickness direction of the support plate 21 coincides with the vertical direction. The pin fixing member 19 is fixed to the upper surfaces of the two connecting members 20. The connection member 20 is fixed to the upper surface of the support plate 21. The center of the support plate 21 coincides with the center of the pin holder 8 when viewed in the vertical direction.
The lower end of the support pin 7 is fixed to the pin fixing member 19 directly or via a predetermined bracket, and the support pin 7 protrudes upward from the upper surface of the pin fixing member 19. The plurality of support pins 7 are fixed to the plurality of pin fixing members 19 at fixed intervals in the front-rear direction. The support pins 7 include suction support pins 7A that suck the lower surface of the substrate 2 and hold the substrate 2. In the present embodiment, the four support pins 7 fixed to the front and rear end sides of each of the two pin fixing members 19 disposed at the left and right ends are suction support pins 7A. Therefore, the lower surfaces of the four corners of the rectangular substrate 2 are attracted and held by the attraction and support pins 7A. The suction support pin 7A includes a suction pad. A suction mechanism having a suction pump and the like is connected to the suction support pin 7A.
The pivot mechanism 11 is disposed below the pin holding member 8. The turning mechanism 11 includes a motor 22. The motor 22 is arranged such that the output shaft of the motor 22 protrudes upward. A support plate 21 is fixed to an output shaft of the motor 22. The center of the output shaft of the motor 22 coincides with the center of the pin holding member 8 when viewed in the up-down direction.
As shown in fig. 4, the moving mechanism 10 includes: a slide member 24 to which the motor 22 is fixed; a motor (not shown) for moving the slide member 24 in the left-right direction; a power transmission mechanism 25 for transmitting the power of the motor to the slide member 24; and a guide mechanism 26 that guides the slide member 24 in the left-right direction. The motor 22 is fixed to the upper surface side of the slide member 24. That is, the lower end of the motor 22 is fixed to the upper surface side of the sliding member 24, and the rotating mechanism 11 is attached to the sliding member 24.
The power transmission mechanism 25 is a ball screw having a screw shaft and a nut member engaged with the screw shaft. Therefore, the power transmission mechanism 25 is hereinafter referred to as "ball screw 25". The ball screw 25 is rotatably mounted on a later-described slide member 28 constituting a part of the moving mechanism 9. The screw shaft is disposed so that the axial direction and the left-right direction of the screw shaft coincide with each other. The screw shaft is attached to the distal end of the slide member 28. The screw shaft is rotated by the power of the motor of the moving mechanism 10. The motor is fixed to the slide member 28. The nut member of the ball screw 25 is attached to the distal end of the slide member 24.
The guide mechanism 26 includes a guide rail fixed to the slide member 28 and a guide block engaged with the guide rail. The guide mechanisms 26 are disposed on both front and rear end sides of the slide member 24. The guide rail of the guide mechanism 26 is fixed to the upper surface side of the slide member 28. The guide rail is disposed so that the longitudinal direction of the guide rail coincides with the left-right direction. The guide block of the guide mechanism 26 is fixed to the lower surface side of the slide member 24. The guide block engages with the guide rail from above.
When the motor of the moving mechanism 10 is driven and the screw shaft of the ball screw 25 rotates, the slide member 24 to which the rotating mechanism 11 is attached is guided by the guide rail of the guide mechanism 26 and moves in the left-right direction. That is, the moving mechanism 10 moves the rotating mechanism 11 in the left-right direction together with the pin holding member 8. The movable amount of the slide member 24 moved by the moving mechanism 10 in the left-right direction is, for example, 100 (mm).
As shown in fig. 5, the moving mechanism 9 includes: a slide member 28 to which the screw shaft of the ball screw 25 and the guide rail of the guide mechanism 26 are attached; a motor 29 that moves the slide member 28 in the front-rear direction; a power transmission mechanism 30 for transmitting power of the motor 29 to the slide member 28; and a guide mechanism 31 that guides the slide member 28 in the front-rear direction. The motor of the moving mechanism 10, the screw shaft of the ball screw 25, and the guide rail of the guide mechanism 26 are attached to the upper surface side of the slide member 28, and the moving mechanism 10 is attached to the slide member 28.
The motor 29 and the power transmission mechanism 30 are disposed on the right end side of the slide member 28.
The motor 29 is fixed to the frame 12. The power transmission mechanism 30 includes, for example, a drive pulley and a driven pulley that are rotated by power of the motor 29, a transmission belt that is hung on the drive pulley and the driven pulley, and the like. The drive pulley and the driven pulley are rotatably supported by the frame 12. A portion of the belt is fixed to the slide member 28.
The guide mechanism 31 includes a guide rail fixed to the bottom surface of the frame 12 and a guide block engaged with the guide rail. The guide mechanisms 31 are disposed on both left and right end sides of the slide member 28. The guide rail of the guide mechanism 31 is fixed to the upper surface side of the bottom surface portion of the frame 12. The guide rail is disposed so that the longitudinal direction of the guide rail coincides with the front-rear direction. The guide block of the guide mechanism 31 is fixed to the lower surface side of the slide member 28. The guide block engages with the guide rail from above.
When the motor 29 is driven and the driving pulley of the power transmission mechanism 30 is rotated, the slide member 28 on which the moving mechanism 10 is mounted is guided by the guide rail of the guide mechanism 31 and moves in the front-rear direction. That is, the moving mechanism 9 moves the rotating mechanism 11 and the moving mechanism 10 in the front-rear direction together with the pin holding member 8. Further, as described above, the moving mechanism 9 conveys the substrate 2 placed on the pin holding member 8 to the rear side. As described above, the substrate transport apparatus 1 transports the substrate 2 by 8 to 9(m), for example, and the movable amount of the slide member 28 moved by the moving mechanism 9 in the front-rear direction is 8 to 9 (m).
(constitution of data reading means, detecting means and crack detecting means)
Fig. 7 is a diagram for explaining the structure of the J portion in fig. 2. Fig. 8 is a diagram for explaining a method of correcting the position of the substrate 2 in the substrate transport apparatus 1 shown in fig. 1.
The data reading mechanism 14 includes a camera or the like that reads optically readable data recorded on an end portion of the substrate 2. The camera of the data reading mechanism 14 is disposed above the substrate 2 placed on the plurality of support pins 7. The camera of the data reading mechanism 14 is disposed at the front end of the substrate transport apparatus 1, for example, and reads data recorded on the upper surface of the front end of the substrate 2. Specifically, the camera of the data reading mechanism 14 reads the two-dimensional barcode on the upper surface of the substrate 2. The ID code of the substrate 2 is recorded on the two-dimensional barcode.
The detection mechanism 15 is disposed at the rear end of the substrate transport apparatus 1. The detection mechanism 15 includes two sensors 33 for detecting the position of the substrate 2 in the left-right direction and the inclination with respect to the front-rear direction, and one sensor 34 for detecting the position of the substrate 2 in the front-rear direction. The sensors 33 and 34 are transmissive optical sensors having a light emitting portion 35 and a light receiving portion 36. The sensors 33 and 34 are line sensors each including a plurality of light receiving elements arranged in a straight line. The light emitting portion 35 and the light receiving portion 36 of the sensors 33 and 34 are disposed with the end of the substrate 2 placed on the plurality of support pins 7 interposed therebetween in the vertical direction.
The sensor 33 as a line sensor is disposed so that the longitudinal direction (the arrangement direction of the light receiving elements) of the sensor 33 coincides with the left-right direction, and the sensor 34 as a line sensor is disposed so that the longitudinal direction of the sensor 34 coincides with the front-back direction. One sensor 33 of the two sensors 33 is disposed at a position capable of detecting the front end portion of the right end surface of the substrate 2 placed on the plurality of support pins 7, and the other sensor 33 is disposed at a position capable of detecting the rear end portion of the right end surface of the substrate 2 placed on the plurality of support pins 7. The sensor 34 is disposed at a position capable of detecting the left end portion of the rear end surface of the substrate 2 placed on the plurality of support pins 7.
In the present embodiment, the pivoting mechanism 11 pivots the pin holding member 8 based on the difference Δ Y (see fig. 8 a) in the detection positions of the two sensors 33 with respect to the right end surface of the substrate 2, and corrects the inclination of the substrate 2 with respect to the front-rear direction. When correcting the inclination of the substrate 2 with respect to the front-rear direction, for example, the operator performs a jog operation of the turning mechanism 11 while confirming the difference Δ Y in the detection position of the right end surface of the substrate 2, thereby correcting the inclination of the substrate 2 with respect to the front-rear direction (see fig. 8B). Alternatively, the inclination Δ θ of the substrate 2 with respect to the front-rear direction is automatically calculated based on the difference Δ Y of the detected position of the right end face of the substrate 2, and the rotation mechanism 11 is driven in accordance with the inclination Δ θ to correct the inclination of the substrate 2 with respect to the front-rear direction.
When the inclination of the substrate 2 with respect to the front-rear direction is corrected, the amount of deviation Δ Y1 in the left-right direction of the substrate 2 from the reference position is automatically calculated based on the detection result of the right end face of the substrate 2 by the sensor 33, and the amount of deviation Δ X1 in the front-rear direction of the substrate 2 from the reference position is automatically calculated based on the detection result of the rear end face of the substrate 2 by the sensor 34 (see fig. 8 (B)). Further, the movement mechanism 10 is driven in accordance with the offset amount Δ Y1, and the movement mechanism 9 is driven in accordance with the offset amount Δ X1, so that the position of the substrate 2 in the front-rear right-left direction is corrected.
The crack detection mechanism 16 is disposed on the front end side of the substrate transport apparatus 1. The crack detection mechanism 16 includes a plurality of cameras 38 and an illumination 39 arranged above the support pin 7. The plurality of cameras 38 are arranged in the left-right direction. The illumination 39 is disposed below the camera 38. The plurality of cameras 38 and the illumination 39 are mounted on a support frame 40. The support frame 40 is fixed to the upper end face of the frame 12. The illumination 39 irradiates light to the upper surface of the substrate 2 passing through the lower side of the camera 38. The camera 38 captures an image of the upper surface of the substrate 2 passing through the lower side of the camera 38. The crack detection means 16 detects the presence or absence of cracks (chipping) at the front end portion, rear end portion, right end portion, and left end portion of the substrate 2 based on the image captured by the camera 38.
As shown in fig. 5, the low reflection member 41 is disposed at a position where the crack detection mechanism 16 is disposed in the front-rear direction. The low reflection member 41 is formed in a rectangular flat plate shape. The low reflection member 41 is disposed below the camera 38. The low reflection member 41 is disposed below the substrate 2 placed on the plurality of support pins 7. The low reflection members 41 are disposed at two locations on both left and right end sides. The low reflection member 41 is disposed on the outer side in the left-right direction of the pin holding member 8 passing through the lower side of the camera 38.
When viewed from above, a part of the low reflection member 41 is disposed outside the end surface of the substrate 2 in the left-right direction passing through the lower side of the camera 38 in the left-right direction. That is, the right side portion of the low reflection member 41 disposed on the right side is disposed on the right side of the right end surface of the substrate 2, and the left side portion of the low reflection member 41 disposed on the right side vertically overlaps the right end portion of the substrate 2. The left side portion of the low reflection member 41 disposed on the left side is disposed on the left side of the left end surface of the substrate 2, and the right side portion of the low reflection member 41 disposed on the left side vertically overlaps the left end portion of the substrate 2. When viewed from above, the entire low reflection member 41 may be disposed outside the end surface of the substrate 2 in the lateral direction.
The upper surface of the low reflection member 41 is black. The upper surface of the low reflection member 41 is an inclined surface inclined downward as it goes outward in the lateral direction. That is, the upper surface of the low reflection member 41 disposed on the right side is an inclined surface inclined downward toward the right side, and the upper surface of the low reflection member 41 disposed on the left side is an inclined surface inclined downward toward the left side. In the present embodiment, the upper surface of the member disposed below the camera 38 and below the substrate 2 is black.
(operation of substrate transport apparatus)
In the substrate transport apparatus 1, the upstream robot places the substrate 2 on the plurality of support pins 7 in a state where the slide member 28 is disposed at the front end portion of the substrate transport apparatus 1. At this time, the hand fork 4 of the upstream robot is inserted into the front end portion of the substrate transport apparatus 1 (see fig. 1 and 2). The hand fork 4 is inserted into the front end of the substrate transport apparatus 1 at a position not interfering with the support pin 7 and the pin fixing member 19. When the substrate 2 is placed on the plurality of support pins 7, the rotation mechanism 11 rotates the substrate 2 by 180 °.
When the substrate 2 is rotated by 180 °, the data reading mechanism 14 reads data recorded on the substrate 2. In addition, when the data recorded on the substrate 2 is read, the moving mechanism 9 moves the slide member 28 to the rear side to convey the substrate 2 to the rear side. The crack detection mechanism 16 detects the presence or absence of a crack at the end of the substrate 2 being conveyed. That is, the crack detection mechanism 16 detects the presence or absence of a crack at the end of the substrate 2 while the moving mechanism 9 conveys the substrate 2 to the rear side. When the crack detection means 16 detects the presence or absence of a crack at the end of the substrate 2, the movement means 9 reduces the conveyance speed of the substrate 2.
When the crack detecting means 16 detects the presence or absence of a crack at the end of the substrate 2, the moving means 9 increases the transport speed of the substrate 2. When the substrate 2 reaches the rear end portion of the substrate transport apparatus 1 and stops (i.e., when the slide member 28 reaches the rear end portion of the substrate transport apparatus 1 and stops), the position of the substrate 2 in the front-rear direction, the position in the left-right direction, and the inclination with respect to the front-rear direction are detected by the detection mechanism 15. The moving mechanisms 9 and 10 and the rotating mechanism 11 correct the inclination of the substrate 2 with respect to the front-rear direction and the position thereof in the front-rear left-right direction as described above based on the detection result of the detecting mechanism 15.
When the position of the substrate 2 is corrected, the downstream robot takes out the substrate 2 placed on the plurality of support pins 7. At this time, the hand fork 4 of the downstream robot is inserted into the rear end portion of the substrate transport apparatus 1 (see fig. 1 and 2). The hand fork 4 is inserted into the rear end portion of the substrate transport apparatus 1 at a position not interfering with the support pin 7 and the pin fixing member 19 (see fig. 3).
(main effect of the present embodiment)
As described above, the substrate transport apparatus 1 of the present embodiment includes: a moving mechanism 9 that moves the pin holding member 8 in the front-rear direction; a moving mechanism 10 that moves the pin holding member 8 in the left-right direction; and a rotating mechanism 11 for rotating the pin holding member 8 in the axial direction in which the vertical direction is rotated. Therefore, in the present embodiment, even if the substrate 2 is not lifted up, the orientation of the substrate 2 can be changed by rotating the substrate 2 placed on the plurality of support pins 7 by the rotating mechanism 11. In the present embodiment, even if the substrate 2 is not lifted up, the substrate 2 placed on the plurality of support pins 7 can be rotated by the rotating mechanism 11, moved in the left-right direction by the moving mechanism 10, and moved in the front-rear direction by the moving mechanism 9, so that the position of the substrate 2 can be corrected.
That is, in the present embodiment, even if the substrate 2 is not lifted up, the substrate 2 can be rotated to change the orientation of the substrate 2 or the position of the substrate 2 can be corrected. Therefore, in the present embodiment, in the substrate transport apparatus 1, even when the orientation of the substrate 2 is changed by rotating the substrate 2 or the position of the substrate 2 is corrected, the cycle time of the manufacturing line of the liquid crystal display device in which the substrate transport apparatus 1 is assembled and used can be shortened.
In the present embodiment, the crack detection mechanism 16 detects the presence or absence of a crack at the end of the substrate 2 while the moving mechanism 9 conveys the substrate 2 to the rear side. Therefore, in the present embodiment, even when the crack detection means 16 detects the presence or absence of a crack at the end of the substrate 2, the cycle time of the manufacturing line of the liquid crystal display device in which the substrate transport apparatus 1 is assembled and used can be shortened. In addition, in the present embodiment, since the suction support pins 7A are included in the plurality of support pins 7, the substrate 2 placed on the plurality of support pins 7 can be reliably prevented from being displaced.
In the present embodiment, a part of the low reflection member 41 disposed below the substrate 2 is disposed outside the end surface of the substrate 2 in the left-right direction. In the present embodiment, the upper surface of the low reflection member 41 is black and is an inclined surface inclined downward toward the outside in the left-right direction. Therefore, in the present embodiment, when the crack detection means 16 detects the presence or absence of a crack at the end portion of the substrate 2, the illumination light is less likely to be reflected toward the camera 38 outside the end surface of the substrate 2 in the left-right direction. Therefore, in the present embodiment, the presence or absence of cracks at both left and right end portions of the substrate 2 can be detected with high accuracy.
In the present embodiment, since the upper surface of the member disposed below the camera 38 and below the substrate 2 is black, when the crack detection means 16 detects a crack at the end of the substrate 2, the illumination light is less likely to be reflected toward the camera 38 outside the end surface of the substrate 2. Therefore, in the present embodiment, the presence or absence of a crack at the end of the substrate 2 can be detected with high accuracy.
(other embodiments)
The above embodiment is an example of a preferred embodiment of the present invention, but is not limited thereto, and various modifications can be made without departing from the scope of the present invention.
In the above embodiment, the rotation mechanism 11 may rotate the substrate 2 by 90 °, or may rotate the substrate 2 by 270 °. In the above embodiment, the moving mechanism 10 may move the rotating mechanism 11 and the moving mechanism 9 in the left-right direction together with the pin holding member 8. In this case, the moving mechanism 9 moves the rotating mechanism 11 in the front-rear direction together with the pin holding member 8.
In the above embodiment, the substrate 2 may be rotated by 180 ° by rotating the pin holding member 8 by the rotating mechanism 11 while the moving mechanism 9 conveys the substrate 2 to the rear side. In this case, since the substrate 2 can be rotated to change the orientation of the substrate 2 while the substrate 2 is being conveyed to the rear side, even when the substrate 2 is rotated to change the orientation of the substrate 2 in the substrate conveying apparatus 1, the cycle time of the manufacturing line of the liquid crystal display device to which the substrate conveying apparatus 1 is assembled can be further shortened. The rotating mechanism 11 may rotate the substrate 2 by 90 ° or may rotate the substrate 2 by 270 ° while conveying the substrate 2 to the rear side.
In the above embodiment, the detection mechanism 15 may be disposed at the front end portion of the substrate transport apparatus 1. In this case, for example, while the substrate 2 is being conveyed to the rear side, the inclination of the substrate 2 with respect to the front-rear direction and the position in the front-rear, left-right directions are corrected. That is, while the moving mechanism 9 conveys the substrate 2 to the rear side, the moving mechanism 10 moves the pin holding member 8 and the turning mechanism 11 in the left-right direction, and the turning mechanism 11 turns the pin holding member 8, thereby correcting the inclination of the substrate 2 with respect to the front-rear direction and the position in the front-rear left-right direction.
In this case, since the position of the substrate 2 can be corrected while the substrate 2 is conveyed to the rear side, the cycle time of the manufacturing line of the liquid crystal display device in which the substrate conveying apparatus 1 is assembled and used can be further shortened in the substrate conveying apparatus 1 even when the position of the substrate 2 is corrected. In this case, the inclination Δ θ of the substrate 2 with respect to the front-rear direction is automatically calculated based on the difference Δ Y in the detection positions of the right end surface of the substrate 2 by the two sensors 33, and the turning mechanism 11 is driven by an amount equivalent to the inclination Δ θ. In the case where the detection mechanism 15 is disposed at the front end portion of the substrate transport apparatus 1, the inclination of the substrate 2 with respect to the front-rear direction and the position thereof in the front-rear and left-right directions may be corrected at the front end portion of the substrate transport apparatus 1, as in the above-described embodiment.
In the above embodiment, the substrate transport apparatus 1 may include a fixing member moving mechanism that moves the pin fixing member 19 in the left-right direction. In this case, even if the number and pitch of the forks 4 of the hand 3 are changed, interference of the support pins 7 and the pin fixing members 19 with the forks 4 when transferring the substrate 2 to the substrate transport apparatus 1 can be prevented. In the above embodiment, the detection mechanism 15 may further include two sensors for detecting the position of the substrate 2 in the front-rear direction and the inclination with respect to the left-right direction, and one sensor for detecting the position of the substrate 2 in the left-right direction.
In the above embodiment, the data reading mechanism 14 may be disposed at the rear end portion of the substrate transport apparatus 1. In the above embodiment, the substrate transport apparatus 1 may not include the crack detection mechanism 16. In the above embodiment, the substrate 2 conveyed by the substrate conveying apparatus 1 may be a glass substrate used in an apparatus other than a liquid crystal display apparatus, or may be a substrate other than a glass substrate. The substrate transport apparatus 1 may further include a lifting mechanism that lifts and lowers the pin holding member 8.
Claims (10)
1. A substrate conveying device for conveying a substrate, comprising:
a plurality of support pins on which the substrate is placed;
a pin holding member that holds the plurality of support pins;
a first moving mechanism that moves the pin holding member in a first direction to convey the substrate, the first direction being a prescribed direction among horizontal directions;
a second moving mechanism that moves the pin holding member in a second direction orthogonal to the vertical direction and the first direction; and
a rotating mechanism that rotates the pin holding member in an axial direction in which the pin holding member rotates in an up-down direction,
the first moving mechanism moves the rotating mechanism in a first direction together with the pin holding member.
2. The substrate transport apparatus according to claim 1,
the support pins include suction support pins that suck the lower surface of the substrate and hold the substrate.
3. The substrate transport apparatus according to claim 1 or 2,
the second moving mechanism moves the rotating mechanism together with the pin holding member in a second direction,
the first moving mechanism moves the rotating mechanism and the second moving mechanism in a first direction together with the pin holding member.
4. The substrate transport apparatus according to any one of claims 1 to 3,
the rotating mechanism rotates the pin holding member while the first moving mechanism conveys the substrate in one of the first directions.
5. The substrate transport apparatus according to claim 3,
the second moving mechanism moves the pin holding member and the rotating mechanism in a second direction while the first moving mechanism conveys the substrate in one of first directions, and the rotating mechanism rotates the pin holding member.
6. The substrate transport apparatus according to any one of claims 1 to 5, comprising a detection mechanism for detecting a position in the first direction, a position in the second direction, and an inclination with respect to the first direction or the second direction of the substrate placed on the plurality of support pins.
7. The substrate transport apparatus according to any one of claims 1 to 6,
the data reading device is provided with a data reading mechanism for reading the data recorded on the substrate.
8. The substrate transport apparatus according to any one of claims 1 to 7,
the substrate processing apparatus includes a crack detection means for detecting the presence or absence of a crack at an end portion of the substrate,
the crack detection mechanism comprises a camera and an illumination which are arranged at the position above the supporting pin,
the crack detection mechanism detects the presence or absence of a crack at an end of the substrate while the substrate is being conveyed in one of the first directions by the first movement mechanism.
9. The substrate transport apparatus according to claim 8,
a low reflection member disposed below the camera and below the substrate, and at least a part of the low reflection member is disposed outside an end surface of the substrate in the second direction when viewed from above,
the upper surface of the low reflection member is black and is an inclined surface that is inclined toward the lower side as it goes toward the outer side in the second direction.
10. The substrate transport apparatus according to claim 8 or 9,
the upper surface of the member disposed below the camera and below the substrate is black.
Applications Claiming Priority (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP2019053567A JP7406306B2 (en) | 2019-03-20 | 2019-03-20 | Board transfer device |
| JP2019-053567 | 2019-03-20 |
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| CN111725117A true CN111725117A (en) | 2020-09-29 |
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| CN202010166501.2A Pending CN111725117A (en) | 2019-03-20 | 2020-03-11 | Substrate conveying device |
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| CN (1) | CN111725117A (en) |
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| CN214107934U (en) * | 2020-09-25 | 2021-09-03 | 鸿富锦精密电子(郑州)有限公司 | Detection device |
Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04194701A (en) * | 1990-11-28 | 1992-07-14 | Hitachi Ltd | Picture image inputting method and apparatus and appearance inspecting instrument |
| JP2000200810A (en) * | 1999-01-07 | 2000-07-18 | Micronics Japan Co Ltd | Prober |
| CN1503340A (en) * | 2002-11-21 | 2004-06-09 | 奥林巴斯株式会社 | Chip check apparatus |
| JP2006088235A (en) * | 2004-09-21 | 2006-04-06 | Hirata Corp | Substrate transfer-loading robot device |
| JP2008251754A (en) * | 2007-03-29 | 2008-10-16 | Nikon Corp | Substrate transfer method and apparatus, and exposure method and device |
| CN203877491U (en) * | 2014-05-16 | 2014-10-15 | 日东电工株式会社 | Glass substrate feeder |
| JP2015170688A (en) * | 2014-03-06 | 2015-09-28 | 株式会社ダイヘン | Substrate damage detection device, substrate transfer robot including the same, and substrate damage detection method |
Family Cites Families (6)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH11214284A (en) * | 1998-01-22 | 1999-08-06 | Sharp Corp | Photolithographical process apparatus |
| JPH11251398A (en) * | 1998-02-26 | 1999-09-17 | Dainippon Screen Mfg Co Ltd | Device for carrying substrate, device for cleaning substrate using the same, and method for carrying substrate |
| JP4756677B2 (en) * | 2004-09-27 | 2011-08-24 | 株式会社不二越 | brooch |
| US8277165B2 (en) * | 2007-09-22 | 2012-10-02 | Dynamic Micro System Semiconductor Equipment GmbH | Transfer mechanism with multiple wafer handling capability |
| KR101218112B1 (en) * | 2007-12-05 | 2013-01-21 | 히라따기꼬오 가부시키가이샤 | Substrate conveying apparatus and method of controlling the apparatus |
| JP2018120156A (en) * | 2017-01-27 | 2018-08-02 | 日本電産サンキョー株式会社 | Alignment device |
-
2019
- 2019-03-20 JP JP2019053567A patent/JP7406306B2/en active Active
-
2020
- 2020-03-11 CN CN202010166501.2A patent/CN111725117A/en active Pending
Patent Citations (7)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH04194701A (en) * | 1990-11-28 | 1992-07-14 | Hitachi Ltd | Picture image inputting method and apparatus and appearance inspecting instrument |
| JP2000200810A (en) * | 1999-01-07 | 2000-07-18 | Micronics Japan Co Ltd | Prober |
| CN1503340A (en) * | 2002-11-21 | 2004-06-09 | 奥林巴斯株式会社 | Chip check apparatus |
| JP2006088235A (en) * | 2004-09-21 | 2006-04-06 | Hirata Corp | Substrate transfer-loading robot device |
| JP2008251754A (en) * | 2007-03-29 | 2008-10-16 | Nikon Corp | Substrate transfer method and apparatus, and exposure method and device |
| JP2015170688A (en) * | 2014-03-06 | 2015-09-28 | 株式会社ダイヘン | Substrate damage detection device, substrate transfer robot including the same, and substrate damage detection method |
| CN203877491U (en) * | 2014-05-16 | 2014-10-15 | 日东电工株式会社 | Glass substrate feeder |
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| Publication number | Publication date |
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| JP7406306B2 (en) | 2023-12-27 |
| JP2020155629A (en) | 2020-09-24 |
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