CN111665190B - Method for detecting removal efficiency of chemical filter - Google Patents

Method for detecting removal efficiency of chemical filter Download PDF

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CN111665190B
CN111665190B CN202010639369.2A CN202010639369A CN111665190B CN 111665190 B CN111665190 B CN 111665190B CN 202010639369 A CN202010639369 A CN 202010639369A CN 111665190 B CN111665190 B CN 111665190B
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chemical filter
test piece
corrosion test
resistance
removal efficiency
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CN111665190A (en
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杨政谕
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L&K ENGINEERING (SUZHOU) CO LTD
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    • G01—MEASURING; TESTING
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    • G01N17/00—Investigating resistance of materials to the weather, to corrosion, or to light
    • G01N17/02—Electrochemical measuring systems for weathering, corrosion or corrosion-protection measurement
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
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    • Y02A—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE
    • Y02A50/00—TECHNOLOGIES FOR ADAPTATION TO CLIMATE CHANGE in human health protection, e.g. against extreme weather
    • Y02A50/20—Air quality improvement or preservation, e.g. vehicle emission control or emission reduction by using catalytic converters

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Abstract

The invention discloses a method for detecting the removal efficiency of a chemical filter, which comprises the following steps: (1) Selecting a chemical filter to be tested, selecting an applicable corrosion test piece and a detection mechanism aiming at the pollutants, and measuring a standard curve of the voltage change relation between the concentration of the accumulated pollutants and the corrosion test piece; (2) Measuring a standard curve of the relation between the concentration of accumulated pollutants and the removal efficiency of the chemical filter to be detected; (3) Calculating a relation curve of the voltage change of the corrosion test piece in the detection mechanism and the removal efficiency of the chemical filter to be detected; (4) And (4) after the removal efficiency value of the chemical filter to be tested is determined according to the requirements of different clean occasions, obtaining the voltage variation from the relation curve in the step (3), and taking the voltage variation as an alarm value of the service life of the chemical filter to be tested. The invention develops a detection method for the removal efficiency of the chemical filter in the true sense, different removal efficiencies can be selected at will, and the detection requirements of any occasion are met.

Description

Method for detecting removal efficiency of chemical filter
Technical Field
The invention relates to the field of clean production, in particular to an online detection method for the removal efficiency of a chemical filter.
Background
Chemical filters are indispensable in the manufacturing process of current high-performance flat panel displays and semiconductor ICs, and are installed to remove chemical atmospheres (such as chloride ions, sulfides, VOCs, ammonia gas, etc.) that are unfavorable to production in the production environment. Semiconductor manufacturing processes, precision product manufacturing processes, electronic product manufacturing processes, and the like are generally performed in clean rooms (clean rooms) from which contaminants are removed, and therefore the degree of contamination in the clean rooms is an important factor directly related to the yield of products to be manufactured. The filtering material of the existing chemical filter adopts special impregnated granular activated carbon or ion exchange resin and a microsphere adsorbent with high oxidizing property, has strong pertinence, is not easy to analyze after adsorption, and does not produce secondary pollution. The chemical filter is generally used in cooperation with the FFU, and is installed at an air inlet of the FFU to filter and purify air fed into the clean space through the FFU.
At present, the service life detection of a chemical filter is mainly classified into 2 types of off-line detection and on-line detection, wherein the common method of the off-line detection is to sample the chemical atmosphere of an air inlet and an air outlet of the chemical filter respectively, then take the sampled samples to a laboratory for analysis, and if the analysis result shows that the concentrations of the chemical atmosphere of the air inlet and the air outlet are basically unchanged, the service life of the chemical filter is reached; however, this detection method is costly, long in cycle time, and requires expensive laboratory analysis equipment, and the main disadvantages thereof are that online detection cannot be realized, and real-time feedback capability is poor. Thus, online detection is widely needed and developed.
In order to solve the technical problems, the Chinese patent application CN103630382A discloses an online detection device and a method for the service life of a chemical filter, wherein the device comprises a test head, an air pump and an air pressure tester, the flow of gas leaking out of a constant volume device under a standard condition is deduced by measuring the change of the pressure in a constant volume container, and the design of the working principle of service life detection is realized by utilizing the relation between the saturation degree of the chemical filter and the ventilation performance; the specific method comprises the following steps: the method comprises the following steps of firstly, ensuring that the contact surface of a test head and a chemical filter is isolated and sealed from the surrounding air environment in the using process; secondly, changing the air pressure in the test head by using an air pump, wherein the air pump is an additional pump or a vacuum pump; thirdly, when the air pressure in the test head reaches a specified value, the air pump is closed; fourthly, when the air pressure in the test head is higher than the air pressure in the atmospheric environment, the air in the test head flows to the outside through the chemical filter, the pressure in the test head is gradually reduced, and the pressure change process is recorded by using the air pressure tester; and fifthly, analyzing the pressure change process and calculating the saturation degree of the chemical filter to be detected. However, this method has the following problems: (1) An additional air pump and an air pressure tester are needed to be configured, so that the cost is high, and the commercial popularization and application are not facilitated; (2) The detection method needs to ensure that the contact surface of the test head and the chemical filter is isolated and sealed from the surrounding air environment in the using process, has high requirement and complex operation, and is difficult to realize online real-time detection in practice; (3) The method mainly utilizes air pressure to test, and the air pressure is easy to be unstable due to air leakage, so that the detection precision needs to be further improved.
In addition, more important is: because the requirements of different plants on cleanliness are different, the requirements on the removal efficiency of the chemical filter are also different, for example, for occasions with high requirements, when the removal efficiency of the chemical filter is lower than 90%, the chemical filter needs to be replaced by a new chemical filter; for some occasions with lower requirements, the chemical filter needs to be replaced when the removal efficiency of the chemical filter is lower than 60%. This is because the removal efficiency of the chemical filter is related to the amount of harmful chemical atmosphere (e.g., chloride ions, sulfides, VOCs, ammonia, etc.) passing through, and when the removal efficiency is 90%, 10% of the harmful chemical atmosphere enters the clean room, and when the removal efficiency is 60%, 40% of the harmful chemical atmosphere enters the clean room. Therefore, there is no detection method for the removal efficiency of the chemical filter in the prior art in the true sense, but the alarm is usually given when the removal efficiency of the chemical filter is very low (generally lower than 10%), or even when the chemical filter cannot be used, and the alarm is given later, because the amount of harmful chemical atmosphere in the clean room is already high, the method is also applicable to occasions with low requirements, but is not suitable for occasions with high requirements. Therefore, the problem is a problem which always exists in the field but can not be solved.
In summary, the prior art is difficult to achieve the monitoring accuracy, and the cost is high, which is not suitable for large-scale commercial application.
Disclosure of Invention
The invention aims to provide a method for detecting the removal efficiency of a chemical filter, which has good accuracy and saves cost.
In order to achieve the purpose, the invention adopts the technical scheme that: a method of detecting removal efficiency of a chemical filter, comprising the steps of:
(1) Selecting a chemical filter to be tested, selecting an applicable corrosion test piece and a detection mechanism aiming at a pollutant, and measuring a standard curve of the voltage change relation between the concentration of the accumulated pollutant and the corrosion test piece;
the detection mechanism comprises a corrosion test piece A, a corrosion test piece B and a resistor R 1 And a resistor R 2 A Wheatstone bridge, a corrosion test piece A and a resistor R 1 Form a branch, a corrosion test piece B and a resistor R 2 Forming another branch; the galvanometer of the Wheatstone bridge is a voltmeter; the resistor R 1 And a resistor R 2 Equal; the corrosion test piece A is arranged at an upstream inlet of the chemical filter to be tested, and the corrosion test piece B is arranged at a downstream outlet of the chemical filter to be tested;
(2) Measuring a standard curve of the relation between the concentration of the accumulated pollutants and the removal efficiency of the chemical filter to be detected by adopting the pollutants and the chemical filter to be detected which are the same as those in the step (1);
(3) Calculating a relation curve of the voltage change of the corrosion test piece in the detection mechanism and the removal efficiency of the chemical filter to be detected according to the two standard curves in the steps (1) and (2);
(4) And (4) after determining the removal efficiency value of the chemical filter to be tested according to the requirements of different clean occasions, obtaining the voltage variation from the relation curve in the step (3), and taking the voltage variation as an alarm value of the service life of the chemical filter to be tested.
As mentioned above, the corrosion coupon is a conductor or a semiconductor with a certain resistance value, which will corrode when contacting with corrosive gas, resulting in a change of its own resistance value. The core of the application is to utilize the point, the change of the resistance value of the corrosion test piece is used for being matched with the Wheatstone bridge to detect, and the monitoring and the judgment of the service life of the chemical filter are provided by monitoring the change of the voltage (or the current) of the two corrosion test pieces in the operation of the Wheatstone bridge along with the time change. As for the voltage (or current) variation with time, the variation of the value and the inflection point may be used, and the variation may be a slope.
As for the shape of the corrosion coupon, it may be a sheet, a strip, a stick or other shapes commonly used in the art, and the application is not limited thereto.
The chemical filter may be a V-shaped activated carbon air filter, a flat activated carbon air filter, a box-shaped activated carbon air filter, a cylindrical activated carbon air filter, a folded activated carbon air filter, a bag-type activated carbon air filter, or a densely pleated activated carbon air filter.
In the above technical solution, the unit of the cumulative pollutant concentration is ppb hr.
Preferably, in the detecting means of step (1): the resistance of the corrosion test piece A is as follows: resistance R 1 Resistance value of>10; the resistance of the corrosion test piece B is as follows: resistance R 2 Resistance value of>10000。
In the above technical solution, in the detecting mechanism in the step (1): the corrosion test piece A and the corrosion test piece B are made of the same or different materials and are respectively an iron sheet, a copper sheet, a silver sheet or a semiconductor. Examples of the semiconductor include silicon, germanium, and gallium arsenide.
Preferably, in the detecting means of step (1): the resistance values of the corrosion test piece A and the corrosion test piece B are equal. More preferably, the outer surface of the corrosion test piece A is provided with an anti-corrosion coating.
Preferably, in the detecting means of step (1): the resistance of the corrosion test piece A is as follows: the resistance value of the corrosion test piece B is less than 0.02.
The other corresponding technical scheme is as follows: a method of detecting removal efficiency of a chemical filter, comprising the steps of:
(1) Selecting a chemical filter to be detected, selecting an applicable detection element and detection mechanism aiming at a pollutant, and measuring a standard curve of the voltage change relation between the concentration of the accumulated pollutant and the detection element;
the detection mechanism comprises a detection element A, a detection element B and a resistor R 1 Resistance R 2 A Wheatstone bridge formed by the detection elements A and the resistor R 1 Forming a branch, a detecting element B and a resistor R 2 Forming another branch; the galvanometer of the Wheatstone bridge is a voltmeter; the resistor R 1 Resistance R 2 Equal; the detection element A is arranged at an upstream inlet of the chemical filter to be detected, and the detection element B is arranged at a downstream outlet of the chemical filter to be detected; the detection element A and the detection element B are the same or different and are respectively metal oxide or/and semiconductor oxide with gas adsorption, and the detection element A and the detection element B can generate conductive property change after adsorbing gas;
(2) Measuring a standard curve of the relation between the concentration of accumulated pollutants and the removal efficiency of the chemical filter to be detected by adopting the pollutants and the chemical filter to be detected which are the same as the pollutants and the chemical filter to be detected in the step (1);
(3) Calculating a relation curve of the voltage change of a detection element in the detection mechanism and the removal efficiency of the chemical filter to be detected according to the two standard curves in the steps (1) and (2);
(4) And (4) determining the removal efficiency value of the chemical filter to be tested according to the requirements of different clean occasions, then obtaining the voltage variation from the relation curve in the step (3), and taking the voltage variation as the alarm value of the service life of the chemical filter to be tested.
Preferably, the cumulative contaminant concentration is in ppb hr.
Preferably, in the detecting means of step (1): the detection element A and the detection element B are both In three-dimensional inverse opal structures 2 O 3 A gas sensor. The three-dimensional inverse opal structure In 2 O 3 Gas sensors are prior art and can be found in particular in the doctor's paper "Jilin university" 2016: research on nano-semiconductor oxide VOC gas sensors by the auschen Chongqing.
This scheme can detect ammonia gas, VOCs, and the like.
The metal oxide or/and semiconductor oxide may be In 2 O 3 、SnO 2 And the like, and the sensor types of the N-type semiconductor oxides belong to surface conductivity types. Preferably, the resistances of the detection element a and the detection element B are equal.
The mechanism of the above scheme is as follows: the detection element a and the detection element B adsorb ammonia gas molecules onto a sensing layer of a metal oxide (or a semiconductor oxide) by chemisorption, causing a change in the conductance thereof, thereby determining the concentration of ammonia gas. Specifically, taking a metal oxide film as an example: when the metal oxide film is exposed to a chemical reducing gas (such as ammonia), the interaction and adsorption between the oxide film and the gas cause the reducing gas to be oxidized, the oxygen on the surface of the particles is reduced, so that the barrier height is reduced, and the conductance is changed. Specifically, in an oxidizing gas, the electron affinity of the adsorbed gas is greater than the work function of the semiconductor, electrons will be transferred from the semiconductor to the gas, and the gas acquires the electrons and then adsorbs the electrons on the surface of the semiconductor in the form of negative charges, at this time, the semiconductor bends upwards due to the loss of an electronic surface energy band, and the surface resistance is increased; in the reducing gas, the electron affinity of the adsorbed gas is smaller than the work function of the semiconductor, electrons are transferred to the semiconductor, and the gas loses electrons and then is adsorbed on the surface of the semiconductor in the form of positive charge. That is, when the surface adsorbs gas molecules, electrons will be transferred between the semiconductor oxide and the adsorbed gas molecules, resulting in an increase or decrease in the number of electrons on the conduction band of the semiconductor, and thus a decrease or increase in the resistance of the semiconductor.
Due to the application of the technical scheme, compared with the prior art, the invention has the following advantages:
(1) The invention develops a detection method aiming at the removal efficiency of the chemical filter in a real sense, can detect specific pollutants, and calculates the relation curve between the voltage change of a corrosion test piece in a detection mechanism and the removal efficiency of the chemical filter to be detected, thereby being capable of randomly selecting different removal efficiencies and meeting the detection requirements of any occasions, which has remarkable significance especially for high-requirement occasions (for example, when the removal efficiency of the chemical filter is lower than 90 percent, a new chemical filter needs to be replaced), and the method can not be realized in the past, thereby realizing the technical breakthrough in the field and having substantial progress;
(2) The detection method is simple and easy to implement, high in accuracy and low in cost, and is beneficial to large-scale commercial application;
(3) The invention can aim at detecting different harmful gases by selecting proper detection elements, for example, three-dimensional inverse opal structure In can be selected 2 O 3 The gas sensor is used for detecting ammonia gas, so that the gas sensor has a wide application range and is suitable for practical application.
Drawings
FIG. 1 is a schematic diagram of a Wheatstone bridge according to a first embodiment of the invention.
FIG. 2 is a standard graph of the relationship between the accumulated contaminant concentration and the voltage variation of the corrosion coupon in one embodiment of the present invention.
FIG. 3 is a standard curve of cumulative contaminant concentration versus removal efficiency of a chemical filter under test in accordance with an embodiment of the present invention.
FIG. 4 is a graph showing the relationship between the voltage change of the corrosion coupon and the removal efficiency of the chemical filter under test according to the first embodiment of the present invention.
Detailed Description
The invention is further described with reference to the following figures and examples:
example one
Referring to fig. 1-4, a method of testing removal efficiency of a chemical filter includes the steps of:
(1) Selecting a chemical filter to be tested, selecting an applicable corrosion test piece and a detection mechanism aiming at a pollutant (such as chloride ions), and measuring a standard curve of the voltage change relation of the accumulated pollutant concentration and the corrosion test piece;
the detection mechanism comprises a corrosion test piece A, a corrosion test piece B and a resistor R 1 Resistance R 2 A Wheatstone bridge, a corrosion test piece A and a resistor R 1 Form a branch, a corrosion test piece B and a resistor R 2 Forming another branch; the galvanometer of the Wheatstone bridge is a voltmeter; the resistance R 1 And a resistor R 2 Equal; the corrosion test piece A is arranged at an upstream inlet of the chemical filter to be tested, and the corrosion test piece B is arranged at a downstream outlet of the chemical filter to be tested; the resistance of the corrosion test piece A is as follows: resistance R 0 Resistance value of =1:1; the resistance of the corrosion test piece B is as follows: resistance R 0 Resistance value of =1:1; the resistance values of the corrosion test piece A and the corrosion test piece B are equal; i.e. the resistance values of the 4 arms of the wheatstone bridge are all the same, see fig. 1; the corrosion test piece A and the corrosion test piece B are made of the same material and are silver sheets;
the chemical filter to be tested is a V-shaped activated carbon air filter;
when the chemical filter has just filtered the corrosive gas (i.e. when the chemical filter is in an active state): the resistance value of the corrosion test piece A at the upstream inlet of the filtering unit is gradually increased, while the resistance value of the corrosion test piece B is unchanged, and the reading of the voltmeter is gradually increased from 0 and gradually reaches a peak value; when the chemical filter is gradually full of impurity gas and fails, the resistance of the corrosion test piece B arranged at the downstream outlet of the filter unit becomes larger, and the reading of the voltmeter is gradually reduced from the peak value at the moment, as shown in fig. 2;
(2) Measuring a standard curve of the relation between the concentration of accumulated pollutants and the removal efficiency of the chemical filter to be detected by adopting the pollutants and the chemical filter to be detected which are the same as the pollutants and the chemical filter to be detected in the step (1); as shown in fig. 3;
(3) Calculating a relation curve of the voltage change of the corrosion test piece in the detection mechanism and the removal efficiency of the chemical filter to be detected according to the two standard curves in the steps (1) and (2); as shown in fig. 4;
(4) And (4) after the removal efficiency value of the chemical filter to be tested is determined according to the requirements of different clean occasions, obtaining the voltage variation from the relation curve in the step (3), and taking the voltage variation as an alarm value of the service life of the chemical filter to be tested.
The cumulative contaminant concentration is in ppb hr.
The previous description of the disclosed embodiments is provided to enable any person skilled in the art to make or use the present invention. Various modifications to these embodiments will be readily apparent to those skilled in the art, and the generic principles defined herein may be applied to other embodiments without departing from the spirit or scope of the invention. Thus, the present invention is not intended to be limited to the embodiments shown herein but is to be accorded the widest scope consistent with the principles and novel features disclosed herein.

Claims (10)

1. A method of detecting removal efficiency of a chemical filter, comprising the steps of:
(1) Selecting a chemical filter to be tested, selecting an applicable corrosion test piece and a detection mechanism aiming at a pollutant, and measuring a standard curve of the relation between the concentration of the accumulated pollutant and the voltage change of the corrosion test piece;
the detection mechanism comprises a corrosion test piece A, a corrosion test piece B and a resistor R 1 Resistance R 2 Wheatstone of compositionA conductive bridge, and a corrosion test piece A and a resistor R 1 Form a branch, a corrosion test piece B and a resistor R 2 Forming another branch; the galvanometer of the Wheatstone bridge is a voltmeter; the resistor R 1 Resistance R 2 Equal; the corrosion test piece A is arranged at an upstream inlet of the chemical filter to be tested, and the corrosion test piece B is arranged at a downstream outlet of the chemical filter to be tested;
(2) Measuring a standard curve of the relation between the concentration of accumulated pollutants and the removal efficiency of the chemical filter to be detected by adopting the pollutants and the chemical filter to be detected which are the same as the pollutants and the chemical filter to be detected in the step (1);
(3) Calculating a relation curve of the voltage change of the corrosion test piece in the detection mechanism and the removal efficiency of the chemical filter to be detected according to the two standard curves in the steps (1) and (2);
(4) And (4) after the removal efficiency value of the chemical filter to be tested is determined according to the requirements of different clean occasions, obtaining the voltage variation from the relation curve in the step (3), and taking the voltage variation as an alarm value of the service life of the chemical filter to be tested.
2. The method of claim 1, wherein: the cumulative contaminant concentration is in ppb hr.
3. The method of claim 1, wherein in the detection mechanism of step (1): the resistance of the corrosion test piece A is resistance R 1 Resistance value of>10; the resistance of the corrosion test piece B is the resistance R 2 Resistance value of>10000。
4. The method of claim 1, wherein in the detection mechanism of step (1): the corrosion test piece A and the corrosion test piece B are made of the same or different materials and are respectively an iron sheet, a copper sheet, a silver sheet or a semiconductor.
5. The method of claim 1, wherein in the detection mechanism of step (1): the resistance values of the corrosion test piece A and the corrosion test piece B are equal.
6. The method of claim 1, wherein in the detection mechanism of step (1): the resistance of the corrosion test piece A is less than 0.02 of the resistance of the corrosion test piece B.
7. A method of detecting removal efficiency of a chemical filter, comprising the steps of:
(1) Selecting a chemical filter to be detected, selecting an applicable detection element and detection mechanism aiming at a pollutant, and measuring a standard curve of the voltage change relation between the concentration of the accumulated pollutant and the detection element;
the detection mechanism comprises a detection element A, a detection element B and a resistor R 1 Resistance R 2 A Wheatstone bridge formed by the elements, and a detecting element A and a resistor R 1 Forming a branch, a detecting element B and a resistor R 2 Forming another branch; the galvanometer of the Wheatstone bridge is a voltmeter; the resistance R 1 Resistance R 2 Equal; the detection element A is arranged at an upstream inlet of the chemical filter to be detected, and the detection element B is arranged at a downstream outlet of the chemical filter to be detected; the detection element A and the detection element B are the same or different and are respectively metal oxide or/and semiconductor oxide with gas adsorption, and the detection element A and the detection element B can generate conductive property change after adsorbing gas;
(2) Measuring a standard curve of the relation between the concentration of the accumulated pollutants and the removal efficiency of the chemical filter to be detected by adopting the pollutants and the chemical filter to be detected which are the same as those in the step (1);
(3) Calculating a relation curve of the voltage change of a detection element in the detection mechanism and the removal efficiency of the chemical filter to be detected according to the two standard curves in the steps (1) and (2);
(4) And (4) after the removal efficiency value of the chemical filter to be tested is determined according to the requirements of different clean occasions, obtaining the voltage variation from the relation curve in the step (3), and taking the voltage variation as an alarm value of the service life of the chemical filter to be tested.
8. The method of claim 7, wherein: the cumulative contaminant concentration is in ppb hr.
9. The method of claim 7, wherein the step (1) of detecting comprises: the detection element A and the detection element B are both In three-dimensional inverse opal structures 2 O 3 A gas sensor.
10. The method according to claim 7, wherein the resistances of the sensing elements A and B are equal.
CN202010639369.2A 2020-07-06 2020-07-06 Method for detecting removal efficiency of chemical filter Active CN111665190B (en)

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US5856198A (en) * 1994-12-28 1999-01-05 Extraction Systems, Inc. Performance monitoring of gas-phase air filters
JP2980124B1 (en) * 1998-11-26 1999-11-22 日本電気株式会社 Chemical filter and its replacement determination method, and gas purification device
JP3763455B2 (en) * 2001-01-26 2006-04-05 オムロン株式会社 Chemical filter replacement time determination method
CN103630382B (en) * 2013-01-16 2016-12-28 世源科技工程有限公司 The online detection instrument in chemical filter service life and detection method
JP2017181244A (en) * 2016-03-30 2017-10-05 ニッタ株式会社 Method for predicting life of chemical filter for removing siloxane compound gas
CN107860695A (en) * 2017-10-16 2018-03-30 广东美的制冷设备有限公司 Air cleaning facility and the wherein detection method in filter screen life-span, device

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