CN111463164A - Etching equipment for chip processing - Google Patents

Abstract

The invention discloses an etching equipment for chip processing. Its structure includes a bottom solid box, an outer solid box, an upper contact layer, an inner control box and a control panel. Inside the box, the parts that need to be etched are exposed, and the rest of the parts are covered by the lamination. The adhesion force can protect the side of the protected part while the etched part is moved down. It is stuck between the main pressure plates through the abutting block, and the swing angle at the upper end supports the bearing force of the main pressure plate, which mainly bears The external fulcrum force enables the guide head to expand its leading angle outward, and the clamping block will assist to push open, and when the part can move down with the height of the etching, it will be pushed by the extrusion force of the upper end. When extruding, the lower end has a reverse wrapping force, and it will retract back when there is no release force at the bottom end.

Description

A kind of etching equipment for chip processing

technical field

The invention belongs to the field of chips, and more specifically relates to an etching device for chip processing.

Background technique

To etch the chip, because it is small and sometimes needs to etch the pattern, the main choice is dry etching. When pattern etching is required, place the photoresist on the desired shape, and let the rest of the Etching is performed to leave the desired sites.

Based on the above findings of the present inventors, the existing chip etching devices mainly have the following deficiencies, such as:

When it is covered with photoresist for etching, after the etching reaction is completed in a sealed room, it is covered on the periphery of the bottom of the photoresist, which will be affected and slightly fused. When the photoresist is opened, it is easier to damage. ontology.

Therefore, it is necessary to propose an etching apparatus for chip processing.

SUMMARY OF THE INVENTION

In order to solve the above-mentioned technology, when it is covered with photoresist for etching, after the etching reaction is completed in a sealed chamber, the periphery of the bottom of the photoresist is covered, which will be slightly affected and slightly fused. , it is easier to damage the body.

The purpose and effect of a chip processing etching device of the present invention are achieved by the following specific technical means:

Its structure includes a bottom solid box, an outer solid box, an upper layer, an inner control box and a control panel.

The bottom solid box is installed at the bottom end of the outer solid box, the inner control box is embedded inside the outer solid box, the upper contact layer is arranged inside the inner control box, and the control panel is installed on the outer surface of the outer solid box.

As a further improvement of the present invention, the upper abutting layer includes a veneer, a clip, and a laminate, the clip is embedded inside the laminate, and the outer surface of the laminate is abutted with a veneer, and the veneer It is regarded as a trapezoidal structure.

As a further improvement of the present invention, the smooth surface includes a support surface, a rubber support angle, a uniform ball, and an interlayer, the rubber support angle is attached to the inner surface of the support surface, and the uniform ball is embedded in the interlayer, so The partition layer is connected with the support surface, the support surface is in an arc structure, the uniform ball is in a spherical structure, and the rubber support angle is made of rubber material.

As a further improvement of the present invention, the support surface includes a center ball, an arc swing core, and a rear jack, the rear jack is attached to the outer surface of the arc swing core, and one end of the arc swing core away from the rear jack is connected to the center ball. connected to each other, the arc pendulum core is an arc structure, and one side of the rear plug is arc-shaped and the other end is a sharp angle.

As a further improvement of the present invention, the middle impact ball includes an outer rubber ring, a clamping edge head and an expansion core, the outer rubber ring is attached to the outer surface of the expansion core, and the end of the outer rubber ring away from the expansion core and the clamping edge The heads are connected to each other, the clamping head is provided with two, the outer rubber ring is an arc structure in the middle of the two ends, and the expansion core is an elliptical structure.

As a further improvement of the present invention, the clamping mouth includes a pressing edge, a main pressing plate, a swing angle, and an abutting block, the pressing edge and the swing angle are an integrated structure, the swing angle is connected with the main pressing plate, and the The abutting blocks are located between the main pressing plates, the swing angles are provided with two and are symmetrically distributed, and the pressing edges are provided with two.

As a further improvement of the present invention, the pressing side includes a rear abutment arc, a leading angle, and a guide head, the guide head is connected with the rear abutment arc, the leading angle abuts on the outer surface of the rear abutment arc, and the The guide head is provided with two and inclined downward, and the rear contact arc has an arc structure.

As a further improvement of the present invention, the rear reaching arc includes a total arc angle, an arc rubber strip, a clamping block, and a fixing ball. The fixing ball is connected with the arc rubber strip, and the arc rubber strip is embedded in the total arc angle. The clamping block abuts on the inner wall of the total arc angle, the solid ball is a spherical structure, there are two arc rubber strips, and two clamping blocks are provided.

Compared with the prior art, the present invention has the following beneficial effects:

1. The parts to be etched are exposed, and the rest are covered by the laminate. The original bottom end is pressed against the upper surface of the object, and will be pushed out by the force of the clamp, so that there is a For the anti-expansion force, the rear end is uniformly divided by the uniform ball to make the overall center of gravity have an even distribution, and the middle end of the ball is evenly divided by the card edge fixing force, which assists the overall adhesion and can be etched. While moving down, protect the side of the protected part.

2. By clamping the block between the main pressure plates, the swing angle at the upper end supports the bearing force of the main pressure plate, and mainly bears the external fulcrum force, so that the guide head can expand its leading angle outward, and the clamping block will assist. Push it open so that the back arc wraps the part, and at the same time wraps all the internal parts, which plays a role of rebound. When the part moves down with the height of the etching, it will pass the squeezing force of the upper end. Extrude it, the lower end has a reverse wrapping force, and it will retract back when there is no release force at the bottom end.

Description of drawings

FIG. 1 is a schematic structural diagram of an etching apparatus for chip processing according to the present invention.

FIG. 2 is a schematic diagram of the internal structure of an upper contact layer of the present invention as viewed from the right side.

FIG. 3 is a left-view internal structure diagram of a veneer according to the present invention.

FIG. 4 is a schematic view of the front view of the internal structure of a support surface of the present invention.

FIG. 5 is a schematic diagram of the front view of the internal structure of a middle-reach ball according to the present invention.

FIG. 6 is a schematic view of the front view of the internal structure of a clip of the present invention.

FIG. 7 is a schematic diagram of the front view of the internal structure of a pressing edge according to the present invention.

FIG. 8 is a schematic diagram of the front view of the internal structure of a rear reaching arc according to the present invention.

In the picture: Bottom solid box-t011, outer solid box-t022, top layer-t033, inner control box-t044, control panel-t055, veneer-g11, clip-g22, laminated layer-g33, support surface- w01, rubber support angle-w02, uniform ball-w03, spacer-w04, middle ball-x11, arc swing core-x22, rear head-x33, outer rubber ring-z01, card edge head-z02, expansion core- z03, forward pressure edge-s10, main pressure plate-s20, swing angle-s30, contact block-s40, rear contact arc-m01, leading angle-m02, guide head-m03, total arc angle-a11, arc rubber strip- a22, block-a33, solid ball-a44.

Detailed ways

The present invention will be further described below in conjunction with the accompanying drawings:

Example 1:

As shown in accompanying drawings 1 to 5:

The invention provides an etching equipment for chip processing, the structure of which includes a bottom solid box t011, an outer solid box t022, an upper contact layer t033, an inner control box t044, and a control panel t055.

The bottom solid box t011 is installed at the bottom end of the outer solid box t022, the inner control box t044 is embedded in the outer solid box t022, the upper contact layer t033 is arranged inside the inner control box t044, and the control panel t055 is installed in the outer solid box t055. Outer surface of box t022.

Wherein, the upper abutting layer t033 includes a veneer g11, a clip opening g22, and a laminated layer g33, the clip opening g22 is embedded in the interior of the laminated layer g33, and the outer surface of the laminated layer g33 is abutted with a smooth veneer surface g11. The veneer g11 is regarded as a trapezoidal structure, and the jaw g22 has a counter-expansion force on the part against which the middle part is in conflict, and the veneer g11 plays a role of sticking to the conflicting part.

Wherein, the veneer surface g11 includes a support surface w01, a rubber support angle w02, a uniform ball w03, and an interlayer w04, the rubber support angle w02 is attached to the inner surface of the support surface w01, and the uniform ball w03 is embedded in the interlayer Inside w04, the partition layer w04 is connected with the support surface w01, the support surface w01 is an arc structure, the uniform ball w03 is a spherical structure, the rubber support angle w02 is made of rubber, and the support surface w01 is large The area is supported on the surface of the object, the uniform ball w03 evenly separates the force of the outer layer, and the rubber support angle w02 is placed between the stressed parts, which plays a balancing role.

Wherein, the supporting surface w01 includes a middle ball x11, an arc swing core x22, and a rear plug x33, the rear plug x33 is attached to the outer surface of the arc swing core x22, and the end of the arc swing core x22 away from the rear plug x33 is connected to the The middle ball x11 is connected, the arc swing core x22 is an arc structure, the rear head x33 has an arc shape on one side and a sharp angle at the other end, and the middle ball x11 is fixed at the middle end for a large area of attachment The force on both sides, the arc swing core x22 assists the peripheral support force, and the rear head x33 allows the internal parts to have a maximum limit.

Wherein, the middle ball x11 includes an outer rubber ring z01, a clip head z02, and an expansion core z03, the outer rubber ring z01 is attached to the outer surface of the expansion core z03, and the outer rubber ring z01 is away from the end of the expansion core z03 It is connected with the card edge head z02, the card edge head z02 is provided with two, the outer rubber ring z01 is an arc structure in the middle of the two ends, the expansion core z03 is an elliptical structure, and the card edge head z02 assists The overall adhesion, the outer rubber ring z01 adheres to foreign objects in a large area, and the expansion core z03 is placed at the middle end to expand and expand the outer layer.

The specific usage mode and function of this embodiment:

In the present invention, the chip to be etched is placed inside the internal control box t044, so that it is covered by the upper contact layer t033 above, exposing the part to be etched, and the remaining parts are covered by the laminated layer g33, After the perimeter covered by the laminated layer g33 has been etched, the veneer g11 whose bottom end was originally pressed against the upper surface of the object will be pushed down by the force of the clamp g22, so that the veneer g11 will move downward. force, while the support surface g11 is under the support, the support surface w01 will touch the side of the part covered by the laminated layer g33, and the rear end is made by the uniform ball w03 to make the overall center of gravity have an even distribution, and the support surface w01 It is against the side of the object and continues to follow the height of the etching. The middle end ball x11 plays a fixed role, the arc pendulum core x22 on both sides does a moving and pulling attachment effect, and the middle end ball x11 is fixed The force is evenly divided by the card edge head z02, so that it can be fixed while moving, the inner outer rubber ring z01 will be deformed, and the inner expansion core z03 will be squeezed to release and tighten the outer force, and the object Mobile attachment on the side.

Example 2:

As shown in accompanying drawings 6 to 8:

Wherein, the jaw g22 includes a pressure side s10, a main pressure plate s20, a swing angle s30, and a stop block s40. The pressure side s10 and the swing angle s30 are an integrated structure, and the swing angle s30 is in phase with the main pressure plate s20. connection, the abutting blocks s40 are located between the main pressing plates s20, the swing angles s30 are provided with two and are symmetrically distributed, the pressing edges s10 are provided with two, and the main pressing plates s20 mainly bear the external fulcrum force, The swing angle s30 makes the part where the corner extends have a certain tendency to be fixed, the abutting block s40 continues to fix itself, and the pressing edge s10 makes the connected part have a clamping force.

Wherein, the pressing side s10 includes a rear abutment arc m01, a leading angle m02, and a guide head m03, the guide head m03 is connected with the rear abutment arc m01, and the guide angle m02 abuts on the outer surface of the rear abutment arc m01 , the guide head m03 is provided with two and is inclined downward, the rear reaching arc m01 is in an arc structure, the guide angle m02 guides the general direction of the whole, and the guide head m03 is stuck in the position of the auxiliary guide to play With the effect of fixing the back force, the back contact arc m01 wraps all the internal parts and plays the role of rebound.

Wherein, the rear contact arc m01 includes a total arc angle a11, an arc rubber strip a22, a clamping block a33, and a fixing ball a44, the fixing ball a44 is connected with the arc rubber strip a22, and the arc rubber strip a22 is embedded in the total arc Inside the corner a11, the clamping block a33 abuts against the inner wall of the total arc angle a11, the fixing ball a44 is a spherical structure, there are two arc rubber strips a22, two clamping blocks a33 are provided, and the clamping The block a33 allows the stacked part to have a guiding radian, and the radian of the arc rubber strip a22 itself fixes the shape of the outer layer.

The specific usage mode and function of this embodiment:

In the present invention, when the veneer g11 is to move with the height, the abutting block s40 is fixed on the veneer g11, and the abutting block s40 is clamped between the main pressing plates s20, and the swing angle s30 at the upper end supports the main pressing plate The bearing force of s20 allows it to have a swinging force within a range. The most contact with the abutting block s40 is the pressing side s10, and the guiding angle m02 inside the pressing side s10 will guide the overall tendency, allowing it to guide. The head m03 can expand its leading angle m02 outward, so that it can wrap the abutment block s40 in the reverse direction, and the rear abutment arc m01 at the rear end will assist the reverse force, allowing the arc rubber strip a22 to support the total arc angle a11 In the bending direction, the block a33 will assist to push open, so that while the rear contact arc m01 wraps the part, it will also push the block s40 as far as possible, so that it can have a retracting force when it loses resistance.

Utilizing the technical solutions of the present invention, or those skilled in the art design similar technical solutions under the inspiration of the technical solutions of the present invention, and achieve the above technical effects, all fall within the protection scope of the present invention.

Claims (8)

1. The utility model provides an etching equipment for chip processing, its structure includes end solid case (t011), outer solid case (t022), goes up to layer (t033), interior accuse case (t044), control panel (t055), its characterized in that:

the bottom fixing box (t011) is installed at the bottom end of the outer fixing box (t022), the inner control box (t044) is embedded into the outer fixing box (t022), the upper support layer (t033) is arranged inside the inner control box (t044), and the control panel (t055) is installed on the outer surface of the outer fixing box (t 022).

2. The etching apparatus for chip processing according to claim 1, wherein: the upper supporting layer (t033) comprises a smooth attaching face (g11), a clamping opening (g22) and a lamination layer (g33), the clamping opening (g22) is embedded into the lamination layer (g33), and the outer surface of the lamination layer (g33) is abutted to the smooth attaching face (g 11).

3. The etching apparatus for chip processing according to claim 2, wherein: the smooth attaching surface (g11) comprises a supporting surface (w01), a glue supporting angle (w02), uniform balls (w03) and an interlayer (w04), wherein the glue supporting angle (w02) is attached to the inner surface of the supporting surface (w01), the uniform balls (w03) are embedded into the interlayer (w04), and the interlayer (w04) is connected with the supporting surface (w 01).

4. The etching apparatus for chip processing according to claim 3, wherein: the support surface (w01) comprises a middle support ball (x11), an arc pendulum core (x22) and a rear top head (x33), the rear top head (x33) is attached to the outer surface of the arc pendulum core (x22), and one end, away from the rear top head (x33), of the arc pendulum core (x22) is connected with the middle support ball (x 11).

5. The etching apparatus for chip processing according to claim 4, wherein: the middle support ball (x11) comprises an outer rubber ring (z01), a clamping edge head (z02) and an expansion core (z03), wherein the outer rubber ring (z01) is attached to the outer surface of the expansion core (z03), and one end, away from the expansion core (z03), of the outer rubber ring (z01) is connected with the clamping edge head (z 02).

6. The etching apparatus for chip processing according to claim 2, wherein: the clamping opening (g22) comprises a forward pressing edge (s10), a main pressing plate (s20), a swing angle (s30) and a butting block (s40), the forward pressing edge (s10) and the swing angle (s30) are of an integrated structure, the swing angle (s30) is connected with the main pressing plate (s20), and the butting block (s40) is located between the main pressing plates (s 20).

7. The etching apparatus for chip processing according to claim 6, wherein: the forward pressing edge (s10) comprises a rear arc (m01), a guide angle (m02) and a guide head (m03), the guide head (m03) is connected with the rear arc (m01), and the guide angle (m02) abuts against the outer surface of the rear arc (m 01).

8. The etching apparatus for chip processing according to claim 7, wherein: the rear arc (m01) comprises a total arc angle (a11), an arc rubber strip (a22), a clamping block (a33) and a fixed ball (a44), wherein the fixed ball (a44) is connected with the arc rubber strip (a22), the arc rubber strip (a22) is embedded into the total arc angle (a11), and the clamping block (a33) abuts against the inner wall of the total arc angle (a 11).

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