CN111413069A - Micro focal spot light source parameter measuring lens, and measuring system and method - Google Patents
Micro focal spot light source parameter measuring lens, and measuring system and method Download PDFInfo
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Abstract
The present disclosure discloses a micro focal spot light source parameter measuring lens, and a measuring system and method, the system including: the X-ray focusing mirror is arranged behind an X-ray light source to be measured and enables the X-ray to be subjected to single total reflection in the X-ray focusing mirror; the X-ray detector is arranged behind the X-ray focusing mirror and is provided with a multi-dimensional adjusting frame for coaxially adjusting devices; the X-ray detector is used for detecting the energy of the X-ray totally reflected by the X-ray focusing mirror; the beam stopper is arranged in front of the X-ray detector and used for blocking the direct light passing through the X-ray focusing mirror; and the data processor is connected with the X-ray detector and used for acquiring the measurement data of the X-ray detector, calling a preset parameter calculation formula in combination with the basic parameter data of the measurement system, and calculating to obtain the micro focal spot light source parameters. By implementing the technical scheme of the disclosure, the focal spot and the focal depth of the light source can be simultaneously and accurately measured and calculated.
Description
Technical Field
The disclosure relates to the technical field of X-ray, and in particular to a micro focal spot light source parameter measuring lens, a micro focal spot light source parameter measuring system and a micro focal spot light source parameter measuring method.
Background
The X-ray light source has wide application in a plurality of fields of X-ray science and technology application, and the characteristic parameters which effectively represent the X-ray light source play a vital role in the design, production and development of the X-ray light source. After a lot of research, the inventors of the present application found that there are several methods for measuring the size of the focal spot of an X-ray light source, which are commonly used in the industry, and the methods are described as follows:
1. pinhole imaging method
The small hole imaging method is a common method for measuring the size of a focal spot at present, but because the method requires that the size of the small hole is smaller than the size of the focal spot, when the size of a micron or submicron micro focal spot light source is measured, the diameter size of the small hole is extremely high, and the accurate measurement of the size of the focal spot of the micro focal spot light source is difficult to perform through the small hole imaging method.
2. Multi-capillary collimator measurement method
By using the method of the multi-capillary collimator, the focal spot size of the micro focal spot X-ray light source can be effectively measured. However, the manufacturing process of the multi-capillary collimator is complicated and the cost is high. In addition, this method can only measure the focal spot size, and cannot measure the depth of focus.
3. Ellipsoid single glass capillary X-ray focusing lens measuring method
By utilizing the ellipsoidal single glass capillary X-ray focusing mirror, the focal depth of a light source can be measured while the focal spot size of a micro focal spot light source is measured, but the ideal ellipsoidal surface shape is difficult to achieve in manufacturing, and when the focal spot size is measured by using the ellipsoidal single glass capillary X-ray focusing mirror, the focal point of the focusing mirror needs to be accurately found, so that the measuring process becomes relatively complex.
In addition, the parameter of the surface type error is also used for measuring and calculating the focal depth and the focal spot size, and the measurement of the surface type error generates certain deviation, so that more errors are introduced into the measuring and calculating result.
In order to solve the above problems, the inventors of the present application have been studying and developing related technologies and applications of single glass X-ray focusing mirrors, and have been dedicated to design a new method for measuring the focal depth and the focal spot size of an X-ray light source, so as to accurately and effectively measure characteristic parameters such as the focal depth and the focal spot size of the X-ray light source.
Disclosure of Invention
In view of this, the embodiments of the present disclosure provide a micro focal spot light source parameter measuring lens, and a measuring system and method, which can simultaneously and accurately measure and calculate a focal spot and a focal depth of a light source.
In an alternative embodiment, the present disclosure discloses a system for measuring parameters of a micro focal spot light source, comprising:
the X-ray focusing mirror is arranged behind an X-ray light source to be measured and enables the X-ray to be subjected to single total reflection in the X-ray focusing mirror;
the X-ray detector is arranged behind the X-ray focusing mirror and is provided with a multi-dimensional adjusting frame for coaxially adjusting devices; the X-ray detector is used for detecting the energy of the X-ray totally reflected by the X-ray focusing mirror;
the beam stopper is arranged in front of the X-ray detector and used for blocking the direct light passing through the X-ray focusing mirror;
and the data processor is connected with the X-ray detector and used for acquiring the measurement data of the X-ray detector, calling a preset parameter calculation formula in combination with the basic parameter data of the measurement system, and calculating to obtain the micro focal spot light source parameters.
In some optional embodiments, in the above system for measuring parameters of a micro focal spot light source, the beam stopper is disposed after the X-ray focusing mirror and before the X-ray detector; or the beam stopper is arranged in front of the X-ray focusing mirror and behind the X-ray light source.
In some optional embodiments, the system for measuring parameters of a micro focal spot light source may further include:
a memory connected to the processor for storing measurement data and parameters of the micro focal spot light source;
and the display is connected with the processor and the memory and is used for displaying data and performing man-machine interaction operation.
In some alternative embodiments, the system for measuring parameters of a micro focal spot light source may be a portable device, which further comprises a housing.
Wherein, the following structure has been seted up to this shell:
the receiving end opening is arranged at the front end of the shell and used for embedding the X-ray focusing mirror, and the inlet end of the X-ray focusing mirror is tightly attached to the outer wall of the front end of the shell;
the detector clamping groove is formed in the rear end of the shell and used for clamping the X-ray detector;
the blocker clamping groove is formed in the bottom of the shell, is close to the X-ray detector and is used for clamping the beam blocker;
a ray receiving chamber is formed between the opening of the receiving end and the detector clamping groove; the outlet of the X-ray focusing mirror is tightly attached to the front end of the ray receiving chamber.
In some optional embodiments, in the above system for measuring parameters of a micro focal spot light source, the housing is made of a lead material capable of blocking X-ray radiation; and/or the length of the ray receiving chamber is set to separate the reflected ray and the through ray in the light path; and/or the beam stopper clamping groove is arranged at the rear end of the ray receiving chamber to block direct light; and/or the detector clamping groove is a movable clamping groove and is adjustable according to the probe area of the X-ray detector.
In some optional embodiments, in the above system for measuring parameters of a micro focal spot light source, the length of the radiation receiving chamber is about 20cm, and the height of the radiation receiving chamber is 2 cm; and/or the length of the light beam blocker is 1.2-1.5 cm; the distance between the clamping groove of the beam stopper and the front end of the ray receiving chamber is about 15 cm; and/or the movable range of the detector clamping groove is 2 cm-10 cm; the X-ray detector is coaxial with the X-ray light source, and the distance between the X-ray detector and the X-ray light source is more than 10 cm.
In some optional embodiments, in the above system for measuring parameters of a micro focal spot light source, a minimum value F of a distance F from an inlet of the X-ray focusing mirror to the beryllium window of the micro focal spot light sourcemThe method comprises the following steps:
in the above formula, L is the length of the X-ray focusing lens, ID is the inlet diameter of the X-ray focusing lens, OD is the outlet diameter of the X-ray focusing lens, and S is the tilt angle of the X-ray focusing lens.
In some optional embodiments, in the system for measuring parameters of a micro focal spot light source, the parameters of the micro focal spot light source include a light source focal depth D and a focal spot size Z of the micro focal spot light source, and the processor calls a preset parameter calculation formula to calculate the light source focal depth D and the focal spot size Z of the micro focal spot light source according to the obtained measurement parameters;
the parameter calculation formula is as follows:
wherein ρ is the density of the reflecting surface material, and Es is the energy of the X-ray focusing mirror to the focusable ray with the maximum energy emitted by the micro focal spot light source.
In addition, the disclosure discloses a micro focal spot light source parameter measuring lens, which is used in any one of the micro focal spot light source parameter measuring systems, wherein the measuring lens is a tapered single glass capillary with a certain slope.
In some alternative embodiments, in the above-mentioned micro focal spot light source parameter measuring lens, the slope of the X-ray focusing mirror is set to a value in a range of about: 0.05mrad to 0.5 mrad; and/or, the length of the X-ray focusing mirror ranges from about: 5cm to 10 cm; and/or the diameter range of the inlet and the outlet of the X-ray focusing mirror is about: 300 μm to 1000 μm; and/or detecting the shape of the focusing mirror by a laser range finder in the process of drawing the conical single-glass capillary X-ray focusing mirror, and adjusting the drawing process in real time to control the surface shape error of the focusing mirror to be below 1 mu rad.
Therefore, the present disclosure discloses a method for measuring and controlling parameters of a micro focal spot light source, which uses any one of the above-mentioned systems for measuring parameters of a micro focal spot light source, and the method includes:
step one, collimation adjustment: placing and fixing the X-ray detector in the detector clamping groove, and adjusting the X-ray light source to be coaxial with the X-ray detector; then turning on the X-ray light source, keeping the horizontal positions of the X-ray light source and the X-ray light source unchanged, and adjusting the relative positions of the X-ray detector and the X-ray light source by using the multi-dimensional adjusting frame until the counting rate of the X-ray detector is maximum, thereby completing the collimation adjustment of the micro focal spot light source parameter measuring system;
step two, data measurement: placing the light beam blocker in the blocker clamping groove, moving the X-ray detector, measuring a plurality of groups of X-ray energy spectrums at different positions, and determining the highest energy obtained by measurement;
step three: and (3) parameter calculation: and calculating the focal spot and the focal depth of the light source by combining the relative position data of each measuring point according to the parameter calculation formula.
Through implementing the technical scheme of this disclosure, the technical scheme that this disclosure compares with prior art, has following technological effect:
1. compared with a small hole imaging method, the micro focal spot light source parameter measuring system and the conical single glass capillary X-ray focusing mirror can simultaneously measure the focal depth and the focal spot size of the micro focal spot light source, and the size of the focusing mirror is not necessarily smaller than the focal spot size of the light source.
2. Compared with a multi-capillary collimator, the micro focal spot light source parameter measuring system and the conical single-glass capillary X-ray focusing mirror can measure the focal depth and the focal spot size of the micro focal spot light source at the same time, the efficiency is higher, and the cost is lower in manufacturing.
3. Compared with an ellipsoid single-glass capillary tube X-ray focusing mirror, the conical single-glass capillary tube X-ray focusing mirror disclosed by the invention is easier to realize in the aspect of surface type control in the manufacturing process, the measuring process is relatively simple, the introduced errors are relatively less, and the obtained measuring and calculating result is more reliable.
Further features and advantages of embodiments of the present disclosure will be described in, or are apparent from, the following detailed description.
Drawings
The accompanying drawings, which are included to provide a further understanding of the embodiments of the disclosure, and are incorporated in and constitute a part of this disclosure. In the drawings:
fig. 1 is a schematic structural composition diagram of a system for measuring parameters of a micro focal spot light source according to an embodiment of the present disclosure;
fig. 2 is a schematic diagram illustrating an operation principle of a micro focal spot light source parameter measuring system according to an embodiment of the disclosure;
FIG. 3 is a schematic diagram illustrating a focusing principle of a point focal spot light source ray in an embodiment of the present disclosure;
FIG. 4 is a schematic diagram illustrating the minimum distance for ensuring single total reflection of incident light in a tapered single glass capillary X-ray focusing mirror according to an embodiment of the present disclosure; and
fig. 5 is a schematic view of a housing of a micro focal spot light source parameter measuring system according to an embodiment of the disclosure.
Description of the reference numerals
11X-ray focusing mirror
12 focal spot
Beryllium window with 13 light source
14 light beam blocker
15X-ray detector
16 outer casing
20 ray receiving chamber
21 receiving end opening
22 detector card slot
23 blocker slot
ID entrance diameter
OD outlet diameter
Detailed Description
The technical solutions in the embodiments of the present disclosure will be clearly and completely described below with reference to the drawings in the embodiments of the present disclosure, and it is obvious that the described embodiments are only a part of the embodiments of the present disclosure, and not all of the embodiments. All other embodiments, which can be derived by a person skilled in the art from the embodiments disclosed herein without making any creative effort, shall fall within the protection scope of the present disclosure.
It should be noted that the features of the embodiments and examples of the present disclosure may be combined with each other without conflict.
Preferred embodiments of the present disclosure are further described below with reference to the accompanying drawings:
according to the embodiments of the disclosure, the relationship between the upper limit of the energy of the focused X-ray and the focal depth of the light source and the size of the focal spot is utilized by utilizing the single total reflection conical single glass capillary X-ray focusing mirror, so that the focal depth and the size of the focal spot of the micro focal spot X-ray light source can be measured simultaneously.
It should be noted that, in the art, it has very important practical significance to implement accurate measurement of the focal spot size and the focal depth of the X-ray light source, for the following reasons:
1. the focal spot size of the light source is a main reason for geometric unsharpness of the X-ray imaging system, which affects the imaging resolution, and the unsharpness can be effectively corrected by the light source size obtained by implementing the technical scheme of the embodiment.
2. The focal spot size and the focal depth are also important criteria for adjusting the X-ray optical system, especially for systems comprising optical elements such as lenses with well-defined relative position requirements. However, in practical applications, the focal spot size of many light sources is larger than the focal spot size given by the manufacturer, and the focal depth cannot be accurately given.
3. Due to the fact that the use time is long, the focal spot size changes, and especially for medical diagnosis type X-ray light sources, accurate determination of the focal spot size and the focal depth is necessary.
Product examples
Reference is made to fig. 1 and fig. 2, which are a schematic diagram of a structure and a schematic diagram of a system for measuring parameters of a micro focal spot light source according to the present embodiment. In this embodiment, the system for measuring parameters of a micro focal spot light source includes: an X-ray focusing mirror 11, a beam stop 14, an energy-resolving X-ray detector 15 and a data processor.
The X-ray focusing mirror 11 is disposed behind the X-ray light source to be measured, and makes the X-ray of the X-ray light source perform single total reflection therein.
The X-ray detector 15 is arranged behind the X-ray focusing mirror and is provided with a multi-dimensional adjusting frame for coaxially adjusting devices, and the X-ray detector 15 is used for detecting X-rays emitted from the X-ray focusing mirror 11 and acquiring the energy of the X-rays totally reflected by the X-ray focusing mirror. The X-ray light source, the X-ray focusing mirror and the X-ray detector are on the same axis.
The beam stopper 14 is disposed in front of the X-ray detector 15 for blocking the direct light passing through the X-ray focusing mirror.
And the data processor is connected with the X-ray detector and used for acquiring the measurement data of the X-ray detector, calling a preset parameter calculation formula in combination with the basic parameter data of the measurement system, and calculating to obtain the micro focal spot light source parameters.
As shown in fig. 2, in the present embodiment, the focal spot 12 of the X-ray light source, such as a micro focal spot light source, is placed in front of the entrance of the X-ray focusing mirror 11 and kept at a certain distance to ensure a single total reflection of the incident light in the X-ray focusing mirror 11. The X-ray emitted through the X-ray focusing mirror 11 is detected by an X-ray detector 15 with energy resolution. Here, the distance between the X-ray source and the X-ray focusing mirror 11 may be the sum of the distance between the entrance of the X-ray focusing mirror and the micro focal spot light source beryllium window 13 and the light source focal depth D, depending on the actual focusing mirror and light source used.
In the implementation process, the X-ray light source, the X-ray focusing mirror 11 and the X-ray detector 15 are adjusted on the same axis. Then, the relative position of the X-ray detector 15 and the light source is kept unchanged, the relative position of the X-ray focusing mirror 11 and the light source is changed, and then the energy spectrum of light emitted from the X-ray focusing mirror 11 at different positions is measured, so that the data of the upper energy limit of the focused rays of the conical single-glass capillary X-ray focusing mirror 11 and the distance between the entrance of the focusing mirror 11 and the light source beryllium window 13 can be correspondingly obtained. And calculating micro focal spot light source parameters according to the data, wherein the micro focal spot light source parameters comprise the focal depth of the light source and the focal spot size.
As shown in fig. 3 and 4, in the above embodiment, the X-ray focusing mirror 11 may be a tapered single glass capillary, an inlet diameter of the tapered single glass capillary X-ray focusing mirror 11 is ID, an outlet diameter of the tapered single glass capillary X-ray focusing mirror 11 is OD, a length of the X-ray focusing mirror 11 is L, an inclination angle of the X-ray focusing mirror 11 is S.X, a distance between the inlet of the X-ray focusing mirror 11 and the micro focal spot light source beryllium window 13 is F, a focal depth of the light source is D, an included angle between a ray of the X-ray focusing mirror 11 and a maximum energy which can be focused by the micro focal spot light source and the focusing mirror 11 is θ, and a size of the focal spot 12 of the micro focal spot light source is Z.
In an alternative embodiment, the beam stop may be disposed after the X-ray focusing mirror and before the X-ray detector. Alternatively, in an alternative embodiment, the beam stop may also be positioned before the X-ray focusing mirror, after the X-ray source.
Based on any one of the foregoing embodiments, the system for measuring parameters of a micro focal spot light source may further include a memory, where the memory is connected to the processor and is used for storing measurement data and parameters of the micro focal spot light source.
Based on any one of the foregoing embodiments, the system for measuring parameters of a micro focal spot light source may further include a display, and the display is connected with the processor and the memory, and is used for displaying data and performing human-computer interaction operations.
In an alternative embodiment, as shown in fig. 5, the system for measuring parameters of a micro focal spot light source may be made as a portable device, which further comprises a housing 16. The housing 16 is provided with the following structure:
1) the receiving end opening 21 is arranged at the front end of the shell 16 and is used for embedding an X-ray focusing mirror, and the inlet end of the X-ray focusing mirror is tightly attached to the outer wall of the front end of the shell;
2) the detector clamping groove 22 is formed in the rear end of the shell 16 and used for clamping the X-ray detector;
3) the blocker clamping groove 23 is formed in the bottom of the outer 16 shell, is close to the X-ray detector and is used for clamping the light beam blocker;
a ray receiving chamber 20 is formed between the receiving end opening 21 and the detector clamping groove 22; the outlet of the X-ray focusing mirror is closely attached to the front end of the radiation receiving chamber 20.
In an alternative embodiment, the housing 16 is made of a lead material that blocks X-ray radiation.
In an alternative embodiment, the radiation-receiving chamber 20 is arranged with a length such that the reflected radiation is separated from the through radiation in the optical path.
In an alternative embodiment, a beam blocker 23 slot is provided at the rear end of the radiation receiving chamber 20 to block direct light.
In an alternative embodiment, the detector slot 22 is a movable slot, which is adjustable according to the area of the probe of the X-ray detector 15.
In an alternative embodiment, the radiation-receiving chamber 20 is approximately 20cm in length and 2cm in height.
In an alternative embodiment, the length of the beam stop is 1.2-1.5 cm.
In an alternative embodiment, the beam blocker slot is approximately 15cm from the front end of the radiation-receiving chamber.
In an optional embodiment, the movable range of the detector clamping groove is 2 cm-10 cm. The X-ray detector is coaxial with the X-ray light source and is more than 10cm away from the X-ray light source.
As an alternative implementation, the calculation process of the focal depth and the focal spot size of the micro focal spot light source is described below with reference to fig. 1 to 5 as follows:
as shown in fig. 2, it is a schematic diagram of the principle of focusing point focal spot light source rays by a single total reflection conical single glass capillary X-ray focusing mirror. The angle between the conical single glass capillary tube X-ray focusing mirror 22 and the focusing mirror 22 is θ for the ray with the maximum energy capable of being focused emitted by the point X-ray light source 21.
According to the principle of total reflection of X-rays, the relation between theta and the maximum energy Es detected by the detector is shown as the formula (1):
where ρ is the density of the reflecting surface material.
See FIG. 3, which illustrates a point source for neglecting sizeCan ensure the minimum distance F of single total reflection of the incident light in the X-ray focusing mirror 31mThe length of the conical single glass capillary tube X-ray focusing mirror 31 is L, the diameters of the inlet and the outlet of the conical single glass capillary tube X-ray focusing mirror 31 are ID and OD respectively, the distance between the inlet of the focusing mirror 31 and the point light source focal spot 32 is F, and the inclination angle of the conical single glass capillary tube X-ray focusing mirror 31 is SmCan be expressed as formula (2):
formula (2) shows the minimum distance for only once total reflection of the incident X-ray in the focusing mirror for a point light source with a negligible size, and the focusing mirror can only once totally reflect the incident X-ray in the focusing mirror if the distance of the focusing mirror relative to the light source is exceeded under the condition of ensuring the collimation of the light path. In practical application, the focal spot of the light source has a certain size, which is generally less than 500 μm for a micro focal spot light source, and the size of the entrance of the tapered single-glass capillary focusing mirror is generally about 500 μm, so that in consideration of the influence of the focal spot size, the distance between the entrance of the focusing mirror and the beryllium window of the light source is more than twice F in the measurement processm。
As shown in FIG. 2, θ can be expressed as
Due to the small design angle, so
Thus, the upper energy limit (maximum energy that can be focused) of the focusing mirror can be expressed as formula (3)
Where C is a correction factor related to detector performance and system architecture.
Further, by modifying the formula (3), the formula (4) can be obtained
In the above formula, can
Viewed as the independent variable X, i.e.
Will be provided with
Viewed as the slope K, i.e.
Considering- (D + L) as the intercept B, i.e., - (D + L) then equation (4) can be viewed as a linear function of the independent variables X and F related to the upper energy limit of the focusing mirror, expressed as equation (5)
F＝K*X+B (5)
Wherein, both F and X can be obtained by measurement and calculation. Adjusting the relative position of the focusing lens and the light source to obtain a group of F and X, and obtaining the F and X by the least square method
Wherein,
and
and (3) representing the average value of X, Y, and obtaining B by using a undetermined coefficient method, wherein Z is OD-2K, and D is B-L.
In summary, since the focal spot size of the X-ray light source is a main reason for geometric unsharpness of the X-ray imaging system, it may affect the imaging resolution, and by implementing the technical solutions disclosed in the above embodiments, the focal spot size of the X-ray light source may be obtained, and thus, the unsharpness may be effectively corrected.
In addition, the focal spot size and the focal depth are also important criteria for adjusting the X-ray optical system, especially for systems comprising optical elements such as X-ray lenses with well-defined relative position requirements. However, in practical applications, the focal spot size of many light sources is larger than the focal spot size given by the manufacturer, and the focal depth cannot be accurately given. By implementing the technical scheme disclosed by the embodiments, the focal spot size and the focal depth of the target X-ray optical system can be accurately determined.
In particular, for the case of the focal spot size changing due to long usage time, such as for the X-ray light source of medical diagnosis, accurate determination of the focal spot size and the focal depth is necessary, and the technical solution disclosed by the embodiment of the present disclosure can just meet this requirement.
The above embodiments illustrate the implementation and use of the micro focal spot light source parameter measurement system, and the following describes the tapered single glass capillary X-ray focusing lens in the above embodiments:
the embodiment designs and draws a cone-shaped single glass capillary X-ray focusing mirror with a certain slope, the main tube adopts a cylindrical hollow glass tube, and the inner wall is purified before drawing to avoid the phenomenon that impurity particles on the tube wall cause the roughness of the inner wall to rise in the drawing process, thereby avoiding influencing the measuring result.
In an alternative implementation manner, in any of the foregoing embodiments, the measurement lens is a tapered single glass capillary, and the tapered single glass capillary X-ray focusing mirror may have the following parameter characteristics:
the slope of the conical single glass capillary tube X-ray focusing mirror is generally set between 0.05mrad and 0.5mrad, the length is between 5cm and 10cm, the diameter of the inlet and the outlet is between 300 mu m and 1000 mu m, the shape of the focusing mirror is detected by a laser range finder in the drawing process, the drawing process is adjusted in real time, and the surface type error is controlled below 1 mu rad.
In the practical application process, a beam stop (beam stop) is additionally arranged in front of an inlet of a single-cone glass capillary tube X-ray focusing mirror to stop the direct light of the focusing mirror, an X-ray imaging detector (CCD) can be utilized to help to adjust the position of the stop, and the CCD is placed at a certain position of an outlet of the focusing mirror, so that the image formed on the CCD is a large aperture and a small concentric light spot, and the aperture reflects the light, and the light spot is the direct light. The beam stopper can completely block straight-through light which is not reflected, and ensure that X rays emitted by the conical single-glass capillary tube X-ray focusing mirror are transmitted after being reflected by the inner wall of the focusing mirror.
In the practical application process, a standard light source with known focal depth and focal spot size is used for correcting and debugging the system, and a correction coefficient C is determined through multiple measurements, wherein for the same measurement system, C is a fixed value.
As can be seen from the above embodiments, the technical solution disclosed in the present disclosure has the following technical effects compared with the prior art:
1. compared with a small hole imaging method, the micro focal spot light source parameter measuring system and the conical single glass capillary X-ray focusing mirror can simultaneously measure the focal depth and the focal spot size of the micro focal spot light source, and the size of the focusing mirror is not necessarily smaller than the focal spot size of the light source.
2. Compared with a multi-capillary collimator, the micro focal spot light source parameter measuring system and the conical single-glass capillary X-ray focusing mirror can measure the focal depth and the focal spot size of the micro focal spot light source at the same time, the efficiency is higher, and the cost is lower in manufacturing.
3. Compared with an ellipsoid single-glass capillary tube X-ray focusing mirror, the conical single-glass capillary tube X-ray focusing mirror disclosed by the invention is easier to realize in the aspect of surface type control in the manufacturing process, the measuring process is relatively simple, the introduced errors are relatively less, and the obtained measuring and calculating result is more reliable.
Method embodiment
Based on the system for measuring the parameters of the micro focal spot light source disclosed by any of the embodiments, the present disclosure further discloses a method for measuring and controlling the parameters of the micro focal spot light source, wherein the method uses the system for measuring the parameters of the micro focal spot light source, and the method comprises the following steps:
step one, collimation adjustment:
placing and fixing an X-ray detector in a detector clamping groove, and adjusting an X-ray light source to be coaxial with the X-ray detector; then turning on the X-ray light source, keeping the horizontal positions of the X-ray light source and the X-ray light source unchanged, and adjusting the relative positions of the X-ray detector and the X-ray light source by using the multi-dimensional adjusting frame until the counting rate of the X-ray detector is maximum, thereby completing the collimation adjustment of the micro focal spot light source parameter measuring system;
step two, data measurement:
placing a light beam blocker in a blocker clamping groove, moving an X-ray detector, measuring a plurality of groups of X-ray energy spectrums at different positions, and determining the highest energy obtained by measurement;
step three: and (3) parameter calculation:
and calculating the focal spot and the focal depth of the light source by combining the relative position data of each measuring point according to a parameter calculation formula.
Here, to facilitate understanding of the above method and system embodiments, an example of simultaneous measurement of the focal depth and focal spot size of a microfocus spot X-ray light source based on a single tapered glass capillary X-ray focusing mirror is given below:
the diameters of the inlet and the outlet of the single-cone glass capillary X-ray focusing mirror are 459 mu m and 374 mu m respectively, the length is 5cm, the inclination angle is 0.0487 degrees, and the correction coefficient C is 1.04. A tungsten target micro focal spot light source with the known focal depth of 16.5mm and the known focal spot size of 20 mu m is evaluated.
The highest energy at eight different positions was detected and recorded, resulting in the following data:
from the data given above, and in combination with the least squares method, the fitting yields K176.7 and B66408.0, and further yields: the depth of focus D is 16.4mm, the focal spot size Z is 20.6 μm, with errors of 0.6% and 3%, respectively.
It will be appreciated by those skilled in the art that the information processing apparatus of the present disclosure described above may be implemented as a general purpose computing apparatus, centralized on a single computing apparatus or distributed over a network of multiple computing apparatuses, or alternatively, as program code executable by a computing apparatus, such that the program code may be stored in a storage device and executed by a computing apparatus, or may be implemented as individual integrated circuit modules, or may form multiple modules or steps thereof into a single integrated circuit module. As such, the present disclosure is not limited to any specific combination of hardware and software. The storage device is a nonvolatile memory, such as: ROM/RAM, flash memory, magnetic disk, optical disk, etc.
The present disclosure is to be considered as limited only by the preferred embodiments and not limited to the specific embodiments described herein, and all changes, equivalents, and modifications that come within the spirit and scope of the disclosure are desired to be protected.
Claims (11)
1. A system for measuring parameters of a micro focal spot light source, comprising:
the X-ray focusing mirror is arranged behind an X-ray light source to be measured and enables the X-ray to be subjected to single total reflection in the X-ray focusing mirror;
the X-ray detector is arranged behind the X-ray focusing mirror and is provided with a multi-dimensional adjusting frame for coaxially adjusting devices; the X-ray detector is used for detecting the energy of the X-ray totally reflected by the X-ray focusing mirror;
the beam stopper is arranged in front of the X-ray detector and used for blocking the direct light passing through the X-ray focusing mirror;
and the data processor is connected with the X-ray detector and used for acquiring the measurement data of the X-ray detector, calling a preset parameter calculation formula in combination with the basic parameter data of the measurement system, and calculating to obtain the micro focal spot light source parameters.
2. The microfocus spot light source parameter measurement system of claim 1, wherein:
the beam stopper is arranged behind the X-ray focusing mirror and in front of the X-ray detector; or,
the beam stopper is arranged in front of the X-ray focusing mirror and behind the X-ray light source.
3. Micro focal spot light source parameter measurement system according to claim 1 or 2, characterized in that the system further comprises:
a memory connected to the processor for storing measurement data and parameters of the micro focal spot light source;
and the display is connected with the processor and the memory and is used for displaying data and performing man-machine interaction operation.
4. The system according to any one of claims 1 to 3, wherein the system is a portable device, the device further comprising a housing, the housing defining:
the receiving end opening is arranged at the front end of the shell and used for embedding the X-ray focusing mirror, and the inlet end of the X-ray focusing mirror is tightly attached to the outer wall of the front end of the shell;
the detector clamping groove is formed in the rear end of the shell and used for clamping the X-ray detector;
the blocker clamping groove is formed in the bottom of the shell, is close to the X-ray detector and is used for clamping the beam blocker;
a ray receiving chamber is formed between the opening of the receiving end and the detector clamping groove; the outlet of the X-ray focusing mirror is tightly attached to the front end of the ray receiving chamber.
5. The microfocus spot light source parameter measurement system of claim 4, wherein:
the shell is made of lead material which can block X-ray radiation; and/or the presence of a gas in the gas,
the length of the ray receiving chamber is set to separate the reflected ray and the through ray in the light path; and/or the presence of a gas in the gas,
the beam stopper clamping groove is arranged at the rear end of the ray receiving chamber to block direct light; and/or the presence of a gas in the gas,
the detector clamping groove is a movable clamping groove and is adjustable according to the probe area of the X-ray detector.
6. The microfocus spot light source parameter measurement system of claim 4 or 5, wherein:
the length of the ray receiving chamber is about 20cm, and the height of the ray receiving chamber is 2 cm; and/or the presence of a gas in the gas,
the length of the light beam blocker is 1.2-1.5 cm; the distance between the clamping groove of the beam stopper and the front end of the ray receiving chamber is about 15 cm; and/or the presence of a gas in the gas,
the movable range of the detector clamping groove is 2 cm-10 cm; the X-ray detector is coaxial with the X-ray light source, and the distance between the X-ray detector and the X-ray light source is more than 10 cm.
7. The system for micro focal spot light source parameter measurement according to claim 4, wherein a minimum value F of a distance F from an inlet of the X-ray focusing mirror to the micro focal spot light source beryllium windowmThe method comprises the following steps:
in the above formula, L is the length of the X-ray focusing lens, ID is the inlet diameter of the X-ray focusing lens, OD is the outlet diameter of the X-ray focusing lens, and S is the tilt angle of the X-ray focusing lens.
8. The microfocus spot light source parameter measurement system of claim 7, wherein:
the micro focal spot light source parameters comprise a light source focal depth D and a focal spot size Z of the micro focal spot light source, and the processor calls a preset parameter calculation formula to calculate the light source focal depth D and the focal spot size Z of the micro focal spot light source according to the obtained measurement parameters;
the parameter calculation formula is as follows:
wherein rho is the density of the reflecting surface material, Es is the energy of the X-ray with the maximum energy capable of being focused, and C is a correction coefficient.
9. Micro focal spot light source parameter measuring lens, characterized in that the measuring lens is used in the micro focal spot light source parameter measuring system according to any one of claims 1 to 8, and the measuring lens is a tapered single glass capillary with a certain slope.
10. The micro focal spot light source parameter measuring lens of claim 9, wherein:
the slope of the X-ray focusing mirror is set to a value in the range of about: 0.05mrad to 0.5 mrad; and/or
The length of the X-ray focusing mirror is about: 5cm to 10 cm; and/or
The diameter ranges of the inlet and outlet of the X-ray focusing mirror are about: 300 μm to 1000 μm; and/or
In the process of drawing the conical single-glass capillary X-ray focusing mirror, the appearance of the focusing mirror is detected by a laser range finder, and the drawing process is adjusted in real time so that the surface type error is controlled below 1 mu rad.
11. A method for measuring and controlling parameters of a micro focal spot light source, the method using the system for measuring parameters of a micro focal spot light source according to any one of claims 1 to 8, the method comprising:
step one, collimation adjustment: placing and fixing the X-ray detector in the detector clamping groove, and adjusting the X-ray light source to be coaxial with the X-ray detector; then turning on the X-ray light source, keeping the horizontal positions of the X-ray light source and the X-ray light source unchanged, and adjusting the relative positions of the X-ray detector and the X-ray light source by using the multi-dimensional adjusting frame until the counting rate of the X-ray detector is maximum, thereby completing the collimation adjustment of the micro focal spot light source parameter measuring system;
step two, data measurement: placing the light beam blocker in the blocker clamping groove, moving the X-ray detector, measuring a plurality of groups of X-ray energy spectrums at different positions, and determining the highest energy obtained by measurement;
step three: and (3) parameter calculation: and calculating the focal spot and the focal depth of the light source by combining the relative position data of each measuring point according to the parameter calculation formula.
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