CN111381218A - Hybrid solid-state laser radar and manufacturing method and detection method thereof - Google Patents

Hybrid solid-state laser radar and manufacturing method and detection method thereof Download PDF

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Publication number
CN111381218A
CN111381218A CN201811607878.6A CN201811607878A CN111381218A CN 111381218 A CN111381218 A CN 111381218A CN 201811607878 A CN201811607878 A CN 201811607878A CN 111381218 A CN111381218 A CN 111381218A
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laser
dimensional galvanometer
laser beam
hybrid solid
mirror
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CN111381218B (en
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刘红魏
庄怀港
逄锦超
王雷
宋耀东
宋云峰
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Yuyao Sunny Optical Intelligence Technology Co Ltd
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Yuyao Sunny Optical Intelligence Technology Co Ltd
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481Constructional features, e.g. arrangements of optical elements
    • G01S7/4814Constructional features, e.g. arrangements of optical elements of transmitters alone
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01SRADIO DIRECTION-FINDING; RADIO NAVIGATION; DETERMINING DISTANCE OR VELOCITY BY USE OF RADIO WAVES; LOCATING OR PRESENCE-DETECTING BY USE OF THE REFLECTION OR RERADIATION OF RADIO WAVES; ANALOGOUS ARRANGEMENTS USING OTHER WAVES
    • G01S7/00Details of systems according to groups G01S13/00, G01S15/00, G01S17/00
    • G01S7/48Details of systems according to groups G01S13/00, G01S15/00, G01S17/00 of systems according to group G01S17/00
    • G01S7/481Constructional features, e.g. arrangements of optical elements
    • G01S7/4817Constructional features, e.g. arrangements of optical elements relating to scanning

Abstract

A hybrid solid state laser radar, a method of manufacturing the same and a method of detecting the same. The hybrid solid-state lidar includes: a laser transmitter for transmitting a laser beam; the one-dimensional galvanometer is arranged in the emission path of the laser emitter and used for changing the propagation direction of the laser beam through reflection, so that the laser beam reflected by the one-dimensional galvanometer can be scanned and propagated within a preset angle range in a first plane; rotating means for rotating the one-dimensional galvanometer in a second plane so that the laser beam reflected by the one-dimensional galvanometer can be scanned and propagated by 360 degrees in the second plane; and the receiving module is used for receiving the laser echo reflected by the diffusion reflection.

Description

Hybrid solid-state laser radar and manufacturing method and detection method thereof
Technical Field
The invention relates to the technical field of laser measurement, in particular to a hybrid solid-state laser radar and a manufacturing method and a detection method thereof.
Background
In recent years, with the continuous development of science and technology, the application of laser ranging is more and more extensive. Accordingly, there is a trend toward diversification of lidar, such as mechanical lidar and all-solid-state lidar, which has become an important development direction. At present, MEMS galvanometers are frequently used in the commonly used solid-state laser radar scheme, and the solid-state laser radar needs to emit a detection beam with a larger scanning angle according to the requirement of the market at present. In order to achieve the above purpose, a solid-state lidar scheme is to use a two-dimensional galvanometer (e.g., a two-dimensional MEMS galvanometer) to perform scanning in a circular arc plane, so as to implement two-dimensional scanning at a larger angle. However, the two-dimensional galvanometer generally has the problems of difficult mass production, high price, complex control and the like, so that the scheme is difficult to popularize and popularize in a large range.
Another commonly used solid-state lidar solution is to use a one-dimensional galvanometer (e.g., a one-dimensional MEMS galvanometer) in combination with an optical diffraction element (e.g., a DOE device) to scan a beam emitting laser within a predetermined angular range, but this solution needs to solve the problem of crosstalk between detectors. In addition, the scheme converts the emitted light beam into a line or a plurality of points for scanning, which causes the energy of the emitted laser beam in a single direction to be reduced, so that the energy of the detection avalanche diode for receiving the echo light signal in a certain direction under the same condition is lower, the detection distance of the solid-state laser radar is greatly shortened, and the requirement of a specific scene on remote detection cannot be met.
Disclosure of Invention
An object of the present invention is to provide a hybrid solid-state lidar, a manufacturing method and a detection method thereof, which have the advantages of large-angle scanning, low cost, low technical difficulty and relatively easy implementation of process difficulty.
Another object of the present invention is to provide a hybrid solid-state lidar, a method for manufacturing the same, and a detection method thereof, wherein, in an embodiment of the present invention, the hybrid solid-state lidar is capable of emitting a laser beam of a large scanning angle through a combination of a one-dimensional galvanometer and a rotating device, without using an expensive two-dimensional galvanometer.
It is another object of the present invention to provide a hybrid solid-state lidar and a method for manufacturing the same and a method for detecting the same, wherein, in an embodiment of the present invention, the hybrid solid-state lidar is capable of achieving 360-degree laser scanning in one direction and a larger angle laser scanning in the other direction, which is helpful for meeting the demands of the market today for wide-range laser detection.
Another objective of the present invention is to provide a hybrid solid-state lidar, a manufacturing method and a detection method thereof, wherein, in an embodiment of the present invention, the hybrid solid-state lidar is capable of matching the mirror surface size of the one-dimensional galvanometer in combination with a special optical simulation design, so that the beam energy at different angles is uniform.
Another object of the present invention is to provide a hybrid solid-state lidar, a manufacturing method and a detection method thereof, wherein in an embodiment of the present invention, the hybrid solid-state lidar is capable of reducing the requirement on the size of the mirror surface of the one-dimensional galvanometer, which is beneficial to reducing the cost.
Another object of the present invention is to provide a hybrid solid state lidar, a method for manufacturing the same, and a detection method thereof, wherein, in an embodiment of the present invention, the hybrid solid state lidar collimates an emitted laser beam in a certain direction by using a first cylindrical lens group, so that the collimated laser beam matches with a mirror surface size of the one-dimensional galvanometer.
It is another object of the present invention to provide a hybrid solid state lidar and a method of manufacturing and detecting the same, wherein in one embodiment of the present invention, the hybrid solid state lidar utilizes a second cylindrical lens group to collimate the laser beam in another direction, which helps to emit better laser beam quality.
Another object of the present invention is to provide a hybrid solid-state lidar, a method for manufacturing the same, and a detection method thereof, wherein, in an embodiment of the present invention, the hybrid solid-state lidar does not reduce the energy of the emitted laser beam, and is helpful for obtaining a longer laser detection distance.
It is another object of the present invention to provide a hybrid solid-state lidar and a method of manufacturing and detecting the same, wherein expensive materials or complicated structures are not required in the present invention in order to achieve the above objects. Accordingly, the present invention successfully and effectively provides a solution to not only provide a hybrid solid-state lidar and methods of manufacturing and detecting the same, but also increases the practicality and reliability of the hybrid solid-state lidar and methods of manufacturing and detecting the same.
To achieve at least one of the above objects or other objects and advantages, the present invention provides a hybrid solid-state lidar including:
a laser transmitter for transmitting a laser beam;
the one-dimensional galvanometer is arranged in the emission path of the laser emitter and used for changing the propagation direction of the laser beam through reflection, so that the laser beam reflected by the one-dimensional galvanometer can perform scanning propagation in a predetermined angle range in a first plane;
rotating means for rotating the one-dimensional galvanometer in a second plane so that the laser beam reflected by the one-dimensional galvanometer can perform 360-degree scanning propagation in the second plane; and
and the receiving unit is used for receiving the laser echo reflected by the diffusion reflection.
In an embodiment of the invention, the first plane is perpendicular to the second plane.
In an embodiment of the invention, the emitting end of the laser emitter corresponds to a rotation axis of the one-dimensional galvanometer, wherein the one-dimensional galvanometer can always reflect the laser beam emitted by the laser emitter when the rotating device rotates the one-dimensional galvanometer.
In an embodiment of the invention, the laser emitter is a semiconductor laser.
In an embodiment of the present invention, the hybrid solid state lidar further comprises a first lens group, wherein the first lens group is disposed between the laser emitter and the one-dimensional galvanometer, and is configured to shape and collimate the laser beam emitted by the laser emitter.
In an embodiment of the present invention, the first lens group includes a rod mirror, wherein an end surface of the rod mirror corresponds to the laser emitter for shaping and collimating a laser beam emitted by the laser emitter in a long axis direction of a light source of the laser emitter.
In an embodiment of the invention, the hybrid solid state lidar further includes a second lens group, wherein the second lens group is disposed on the rotating device and located in a reflection path of the one-dimensional galvanometer, and is used for shaping and collimating the laser beam reflected by the one-dimensional galvanometer.
In an embodiment of the invention, the second lens group includes a cylindrical lens, wherein a generatrix of the cylindrical lens is parallel to the first plane, so that the laser beam reflected by the one-dimensional galvanometer can always pass through the cylindrical lens to be shaped and collimated when scanning and propagating.
In an embodiment of the invention, the generatrix of the cylindrical lens is perpendicular to a light source short axis of the laser emitter, so that the cylindrical lens can shape and collimate the laser beam reflected by the one-dimensional galvanometer in a direction of the light source short axis of the laser emitter.
In an embodiment of the invention, the laser emitter and the first lens group are both disposed outside the rotating device, so that the rotating device drives only the one-dimensional galvanometer and the second lens group to rotate.
In an embodiment of the invention, the receiving unit includes a laser receiver, a third lens group and a reflecting element, wherein the third lens group is disposed between the laser receiver and the reflecting element and corresponds to a receiving path of the laser receiver, and is used for focusing the laser echo reflected by the reflecting element, so that the focused laser echo is received by the laser receiver.
In an embodiment of the present invention, the reflecting element is a mirror disposed on the rotating device, wherein the mirror is located on a side of the one-dimensional galvanometer away from the laser emitter, and the mirror and the laser receiver both correspond to a rotation axis of the one-dimensional galvanometer, wherein when the rotating device rotates the mirror, the laser receiver can always receive a laser echo reflected back through the mirror.
In an embodiment of the invention, the reflective element is a half-mirror disposed on the rotating device, wherein the half-mirror is located between the one-dimensional vibrating mirror and the laser emitter, wherein the laser receiver and the third lens group are both disposed on the rotating device and located in a reflection path of the half-mirror, and when the rotating device rotates the half-mirror, the laser receiver can always receive a laser echo reflected by the one-dimensional vibrating mirror and then the half-mirror.
According to another aspect of the present invention, there is also provided a method of manufacturing a hybrid solid state lidar, comprising the steps of:
arranging a one-dimensional galvanometer on a rotating device, so that the rotating device can drive the one-dimensional galvanometer to rotate 360 degrees in a second plane;
correspondingly setting a laser emitter so that the one-dimensional galvanometer is always positioned in the emission path of the laser emitter and is used for changing the propagation direction of the laser beam emitted by the laser emitter through the reflection of the one-dimensional galvanometer so that the reflected laser beam can be scanned and propagated within a preset angle range in a first plane; and
and correspondingly arranging a receiving unit for receiving the laser echo reflected by diffusion so as to assemble the hybrid solid-state laser radar.
In an embodiment of the present invention, the method for manufacturing a hybrid solid state lidar further includes:
and arranging a first lens group between the laser emitter and the one-dimensional galvanometer for shaping and collimating the laser beam emitted by the laser emitter so as to enable the beam size of the laser beam to be matched with the mirror surface size of the one-dimensional galvanometer.
In an embodiment of the present invention, the method for manufacturing a hybrid solid state lidar further includes:
and arranging a second lens group on the rotating device, and the second lens group is positioned on the reflection path of the one-dimensional galvanometer and used for shaping and collimating the laser beam reflected by the one-dimensional galvanometer.
According to another aspect of the present invention, the present invention further provides a detection method of a hybrid solid-state lidar, comprising the steps of:
emitting a laser beam towards the one-dimensional galvanometer by a laser emitter;
the one-dimensional galvanometer is used for reflecting to change the propagation direction of the laser beam, so that the laser beam reflected by the one-dimensional galvanometer can be scanned and propagated within a preset angle range in a second plane;
rotating the one-dimensional galvanometer in a first plane by a rotating device so that the laser beam reflected by the one-dimensional galvanometer can be scanned and propagated in the first plane; and
the laser echo reflected by the diffuse reflection is received in real time by a receiving unit so as to detect the surrounding environment information.
In an embodiment of the present invention, the method for detecting a hybrid solid state lidar further includes:
and shaping and collimating the laser beam emitted by the laser emitter by a first lens group so as to match the beam size of the collimated laser beam with the size of the mirror surface of the one-dimensional galvanometer.
In an embodiment of the present invention, the method for detecting a hybrid solid state lidar further includes:
and shaping and collimating the laser beam reflected by the one-dimensional galvanometer by a second lens group.
Further objects and advantages of the invention will be fully apparent from the ensuing description and drawings.
These and other objects, features and advantages of the present invention will become more fully apparent from the following detailed description, the accompanying drawings and the claims.
Drawings
FIG. 1 is a system diagram of a hybrid solid-state lidar in accordance with an embodiment of the invention.
Fig. 2A and 2B are schematic diagrams showing a transmission state of the hybrid solid-state lidar according to the above-described embodiment of the present invention.
Fig. 3A to 3C show another emission state diagram of the hybrid solid-state lidar according to the above-described embodiment of the present invention.
Fig. 4A shows a schematic structural diagram of the hybrid solid-state lidar in accordance with an embodiment of the invention.
Fig. 4B shows a variant implementation of the hybrid solid-state lidar according to the above-described embodiment of the invention.
Fig. 5 is a schematic flow diagram of a method of manufacturing a hybrid solid-state lidar in accordance with an embodiment of the invention.
Fig. 6 is a flow chart illustrating a detection method of the hybrid solid-state lidar according to an embodiment of the invention.
Detailed Description
The following description is presented to disclose the invention so as to enable any person skilled in the art to practice the invention. The preferred embodiments in the following description are given by way of example only, and other obvious variations will occur to those skilled in the art. The basic principles of the invention, as defined in the following description, may be applied to other embodiments, variations, modifications, equivalents, and other technical solutions without departing from the spirit and scope of the invention.
It will be understood by those skilled in the art that in the present disclosure, the terms "longitudinal", "lateral", "up", "down", "front", "back", "left", "right", "vertical", "horizontal", "top", "bottom", "inner", "outer", etc., indicate orientations or positional relationships that are based on those shown in the drawings, which are merely for convenience in describing the present invention and simplifying the description, and do not indicate or imply that the device or element being referred to must have a predetermined orientation, be constructed and operated in a predetermined orientation, and thus the terms should not be construed as limiting the present invention.
In the present invention, the terms "a" and "an" in the claims and the description should be understood as meaning "one or more", that is, one element may be one in number in one embodiment, and the element may be more than one in number in another embodiment. The terms "a" and "an" should not be construed as limiting the number unless the number of such elements is explicitly recited as one in the present disclosure, but rather the terms "a" and "an" should not be construed as being limited to only one of the number.
In the description of the present invention, it is to be understood that the terms "first," "second," and the like are used for descriptive purposes only and are not to be construed as indicating or implying relative importance. In the description of the present invention, it should be noted that, unless explicitly stated or limited otherwise, the terms "connected" and "connected" are to be interpreted broadly, and may be, for example, fixedly connected, detachably connected, or integrally connected; can be mechanically or electrically connected; they may be directly connected or indirectly connected through an intermediate. The specific meanings of the above terms in the present invention can be understood by those skilled in the art according to specific situations.
In the description herein, references to the description of the term "one embodiment," "some embodiments," "an example," "a specific example," or "some examples," etc., mean that a particular feature, structure, material, or characteristic described in connection with the embodiment or example is included in at least one embodiment or example of the invention. In this specification, the schematic representations of the terms used above are not necessarily intended to refer to the same embodiment or example. Furthermore, the particular features, structures, materials, or characteristics described may be combined in any suitable manner in any one or more embodiments or examples. Furthermore, various embodiments or examples and features of different embodiments or examples described in this specification can be combined and combined by one skilled in the art without contradiction.
In recent years, the application of laser ranging or laser vibration measurement is becoming wider and wider, so that the laser radar technology is rapidly developed and widely popularized, such as mechanical laser radar and all-solid-state laser radar. Although the mechanical laser radar can utilize the rotating device to rotate the laser transmitter and the receiver by 360 degrees so as to realize the detection range of 360 degrees, the laser transmitter and the receiver rotate continuously in the detection process, so that the control signal and the detection data in the detection process can only be transmitted in a slip ring or optical communication mode, and the problem of poor detection result precision or failure caused by data transmission failure or code messing is easy to occur.
In order to solve the problem of unstable data transmission, the all-solid-state laser radar on the market replaces the traditional rotating device with a two-dimensional galvanometer, so that the propagation direction of the laser beam is changed by only using the two-dimensional galvanometer under the condition of not rotating the laser transmitter and the laser receiver to realize scanning detection in a certain arc surface. However, the all-solid-state lidar is difficult to popularize and popularize in the market because the two-dimensional galvanometer generally has the problems of difficult mass production and relative high price. Therefore, in order to solve the above problems, a new laser radar is urgently needed in the market.
Referring to fig. 1 to 3C, a hybrid solid-state lidar according to an embodiment of the present invention is illustrated, which has advantages of large angle scanning, low cost, low technical difficulty, and relatively easy implementation of the process difficulty. Specifically, as shown in fig. 1 and 2A, the hybrid solid-state lidar 1 includes a laser transmitter 10, a galvanometer 20, a rotating device 30, and a receiving unit 40. The laser transmitter 10 is used to emit a laser beam 100 (i.e., a laser signal). The one-dimensional galvanometer 20 is disposed in the emitting path of the laser emitter 10, and is used for changing the propagation direction of the laser beam 100 through reflection, so that the laser beam 100 performs scanning propagation in a predetermined angle range in the first plane 101. The rotating device 30 is used for rotating the galvanometer 20 in a second plane 102 so that the laser beam 100 reflected by the galvanometer 20 can perform 360-degree scanning propagation in the second plane 102. The receiving unit 40 is configured to receive the laser echo 400 (i.e., echo signal) reflected by diffusion, so as to obtain a target detection distance by comparing a phase difference or a time of flight between the laser echo 400 and the laser beam 100. It is understood that the predetermined angle θ of the predetermined angle range can be, but is not limited to, implemented as an included angle between the laser beam 100 reflected by the one-dimensional galvanometer 20 and the second plane 102.
It is noted that in this embodiment of the invention, the first plane 101 may be, but is not limited to being, perpendicular to the second plane 102, for example: the first plane 101 may be implemented as a horizontal plane or a vertical plane; accordingly, the second plane 102 may be implemented as a vertical plane or a horizontal plane. Thus, the hybrid solid-state laser radar 1 can obtain the maximum detection range, thereby meeting various application scenes needing large-range scanning detection, such as unmanned vehicle-mounted radar and the like. Of course, in other examples of the present invention, the first plane 101 may also form an acute angle with the second plane 102, which also enables a wider range of scanning detection, just by ensuring that the first plane 101 is not parallel to the second plane 102.
Illustratively, as shown in fig. 2A to 3C, in the orthogonal spatial coordinate system O-XYZ, the second plane 102 is parallel to the XOY plane (i.e., the second plane 102 is a horizontal plane), the first plane 101 is parallel to the XOZ plane (i.e., the first plane 101 is a vertical plane), and the emission path of the laser emitter 10 is parallel to the Z axis. When the laser transmitter 10 transmits the laser beam 100 along the Z axis, the one-dimensional galvanometer 20 reflects the laser beam 100, so that the laser beam 100 propagates along a direction deviating from the Z axis, and at the same time, the one-dimensional galvanometer 20 can adjust the propagation direction of the laser beam 100 within a predetermined angle range in the first plane 101, so that the laser beam 100 reflected by the one-dimensional galvanometer 20 can perform scanning propagation within the predetermined angle range in a vertical plane, thereby increasing the detection range of the hybrid solid-state lidar 1 in the vertical direction.
It should be noted that, as shown in fig. 3A to 3C, the predetermined angle range may be designed according to the performance of the one-dimensional galvanometer 20, and the one-dimensional galvanometer 20 has an adjustable mirror surface to change the reflection path of the one-dimensional galvanometer 20, so as to adjust the propagation direction of the laser beam 100 reflected by the one-dimensional galvanometer 20 within the predetermined angle range. For example, the predetermined angular range may be implemented as, but is not limited to: theta is more than or equal to minus 45 degrees and less than or equal to 45 degrees. Of course, the predetermined angular range may also be implemented as any other feasible angular range.
Next, when the rotating device 30 drives the galvanometer mirror 20 to rotate 360 degrees in the second plane 101 as shown in fig. 2A and 2B, the galvanometer mirror 20 adjusts the propagation direction of the laser beam 100 within the 360-degree range in the second plane 101, so that the laser beam 100 reflected by the galvanometer mirror 20 can perform scanning propagation of 360 degrees in the horizontal direction, and the laser beam 100 is diffusely reflected at the target object to make the receiving unit 40 receive the corresponding echo signal, so that the hybrid solid-state lidar 1 can obtain the surrounding environment information in all directions. Therefore, the hybrid solid-state laser radar 1 does not need to adopt a two-dimensional galvanometer which is expensive, accordingly, the technical difficulty and the manufacturing cost of the laser radar can be reduced, and a wide-angle detection range can be obtained. It is understood that the one-dimensional galvanometer 20 may be, but is not limited to being, implemented as a MEMS galvanometer, also known as a micro-electro-mechanical systems (MEMS) galvanometer. Of course, the one-dimensional galvanometer 20 may be implemented as other types of galvanometers in other examples of the invention.
In addition, the rotating device 30 may be implemented as, but not limited to, a stepping motor or a servo motor to rotate the one-dimensional galvanometer 20 by the rotating device 30. Of course, the rotating means 30 may also be implemented as other types of motors or drives.
It is noted that in other examples of the present invention, the XOY plane (i.e., the second plane 102) may also be implemented as a vertical plane, and accordingly, the XOZ plane or the YOZ plane (i.e., the first plane 101) is implemented as a horizontal plane, so that the hybrid solid state lidar 1 can perform scanning detection of 360 degrees in the vertical direction and scanning detection of a predetermined angular range in the horizontal direction.
It should be noted that, in this embodiment of the present invention, as shown in fig. 2A and 2B, the laser emitter 10 corresponds to the rotation axis 200 of the one-dimensional galvanometer 20, and the rotation axis 200 of the one-dimensional galvanometer 20 passes through the reflection surface of the one-dimensional galvanometer 20, that is, the central axis of the emission path of the laser emitter 10 overlaps with the rotation axis 200 of the one-dimensional galvanometer 20 and passes through the reflection surface of the one-dimensional galvanometer 20. In this way, when the one-dimensional galvanometer 20 performs 360-degree rotation around the rotation axis 200, the one-dimensional galvanometer 20 can always correspond to the emission path of the laser emitter 10 to change the propagation direction of the laser beam 100 by reflection.
Preferably, the laser transmitter 10 is disposed at a position outside the rotating device 30, that is, the rotating device 30 does not drive the laser transmitter 10 to rotate during the rotation of the one-dimensional galvanometer 20. Thus, the laser transmitter 10 can receive various control signals by way of wired transmission, which helps to ensure the stability of signal transmission and simplify the structure of the signal transmission device. For example, there is no need to use expensive slip rings or unstable optical communication to achieve signal transmission, as in conventional mechanical lidar.
Illustratively, as shown in fig. 2A, when the rotating device 30 rotates the one-dimensional galvanometer 20 in a plane (i.e., a second plane 102) parallel to the XOY plane so that the mirror surface of the one-dimensional galvanometer 20 is perpendicular to the XOZ plane, i.e., the first plane 101 is parallel to the XOZ plane, the laser beam 100 emitted by the laser emitter 10 propagates in the XOZ plane after being reflected by the one-dimensional galvanometer 20 to change the propagation direction, and the propagation direction of the laser beam 100 is approximately parallel to the XOY plane.
As shown in fig. 2B, when the rotating device 30 rotates the one-dimensional galvanometer 20 in a plane parallel to the XOY plane (i.e., the second plane 102) so that the mirror surface of the one-dimensional galvanometer 20 is perpendicular to the YOZ plane, i.e., the first plane 101 is parallel to the YOZ plane, the laser beam 100 emitted by the laser emitter 10 propagates in a plane parallel to the YOZ plane (i.e., the first plane 101 at this time) after being reflected by the one-dimensional galvanometer 20 to change the propagation direction, and the propagation direction of the laser beam 100 is approximately parallel to the XOY plane. In this way, when the rotating device 30 drives the one-dimensional galvanometer 20 to rotate 360 ° in the XOY plane, the laser beam 100 emitted by the laser emitter 10 can be scanned and propagated 360 degrees, and accordingly, the receiving unit 40 can also receive the laser echoes diffusely reflected from all directions, so that the hybrid solid-state lidar 1 can obtain all-around environment information.
In this embodiment of the present invention, the Laser transmitter 10 may be, but is not limited to, implemented as a semiconductor Laser (LD) to transmit the Laser beam 100 through the semiconductor Laser. Of course, in other examples of the present invention, the laser emitter 10 may also be implemented as other lasers such as a Light Emitting Diode (LED) laser, a Vertical Cavity Surface Emitting Laser (VCSEL), and the like.
It should be noted that, since the laser beam 100 emitted by the laser emitter 10 generally has a certain divergence angle, the mirror surface size of the one-dimensional galvanometer 20 is relatively small. Therefore, as shown in fig. 1 and fig. 2A, the hybrid solid-state lidar 1 further includes a first lens group 50, wherein the first lens group 50 is disposed between the laser emitter 10 and the one-dimensional galvanometer 20, and is used for shaping and collimating the laser beam 100 emitted by the laser emitter 10 to reduce the beam size of the laser beam 100, so that the beam size of the laser beam 100 matches the mirror size of the one-dimensional galvanometer 20 (for example, the beam size of the collimated laser beam 100 is slightly smaller than the mirror size of the one-dimensional galvanometer 20). Meanwhile, by the shaping and collimating of the first lens group 50, the laser beam 100 excellent in beam quality can also be obtained.
Illustratively, as shown in fig. 2A and 2B, the first lens group 50 includes a rod mirror 51, wherein a central axis of the rod mirror 51 overlaps with a rotation axis 200 of the galvanometer 20, so that a beam size of the laser beam 100 shaped and collimated by the rod mirror 51 matches a mirror surface size of the galvanometer 20. In other words, the two end surfaces of the rod mirror 51 correspond to the laser emitter 10 and the one-dimensional galvanometer 20, respectively, so that the laser beam 100 enters from one end surface of the rod mirror 51, exits from the other end surface of the rod mirror 51 to be shaped and collimated, and then is reflected by the one-dimensional galvanometer 20. In this way, since the beam size of the laser beam 100 is reduced after being shaped and collimated by the first lens group 50, the mirror surface size of the one-dimensional galvanometer 20 can be reduced accordingly, which contributes to reducing the overall size of the hybrid solid-state lidar 1 and meets the trend of miniaturization of electronic devices. It is understood that the first lens group 50 may further include other lenses (not shown) such as a convex lens, a concave lens, a curved lens, or the like, so as to enhance the shaping and collimating effects of the first lens group 50.
In particular, since the laser beam emitted by the semiconductor laser (i.e., the laser emitter 10) has an elliptical cross section, the rod mirror 51 of the first lens group 50 may be designed to shape and collimate the laser beam 100 in the light source major axis direction of the laser emitter 10 (i.e., the direction in which the beam emission angle is large) so that the divergence angle of the laser beam 100 in the light source major axis direction is reduced, thereby contributing to reducing the mirror surface size of the one-dimensional galvanometer 20. In other words, the first lens group 50 of the hybrid solid-state laser radar 1 can reduce the requirement for the mirror surface size of the one-dimensional galvanometer 20, which helps to reduce the production cost of the one-dimensional galvanometer 20.
It should be noted that, after shaping and collimating only by the first lens group 50, it is difficult to obtain a laser beam with good shaping and collimating effects, especially limited by the overall height of the hybrid solid-state lidar 1, and more lenses cannot be included between the laser transmitter 10 and the one-dimensional galvanometer 20 for shaping and collimating. Therefore, as shown in fig. 1 and fig. 2A, the hybrid solid-state lidar 1 further comprises a second lens group 60, wherein the second lens group 60 is disposed on the rotating device 20 and located in the reflection path of the one-dimensional galvanometer 20, and is used for shaping and collimating the laser beam 100 reflected by the one-dimensional galvanometer 20, so as to further shape and collimate the laser beam 100, and obtain the laser beam 100 with better shaping and collimating effects. In other words, the second lens group 60 is disposed at the rotating device 20 to rotate synchronously with the one-dimensional galvanometer 20 such that the second lens group 60 is always in the reflection path of the one-dimensional galvanometer 20, so that the second lens group 60 can continuously shape and collimate the laser beam 100 reflected via the one-dimensional galvanometer 20 when the one-dimensional galvanometer 20 rotates. In this way, the propagation distance of the laser beam 100 is extended by further shaping and collimating the second lens group 60, thereby contributing to an increase in the detection distance of the hybrid solid-state lidar 1. In addition, the laser beam 100 is shaped and collimated to have a small divergence angle, so that the laser echo 400 reflected diffusely has a small divergence angle, so that the receiving unit 40 receives the laser echo 400 in various directions.
Illustratively, as shown in fig. 2A and fig. 2B, the second lens group 60 may include a cylindrical lens 61 (also called a cylindrical lens), wherein a cylindrical surface of the cylindrical lens 61 corresponds to the one-dimensional galvanometer 20, and is configured to shape and collimate the laser beam 100 reflected by the one-dimensional galvanometer 20 to obtain the laser beam 100 with better beam quality, so that light rays in the laser beam 100 are approximately parallel, and the propagation distance of the laser beam 100 is increased, thereby increasing the detection distance of the hybrid solid state lidar 1. It will be appreciated that the second lens group 60 may also include other lenses (not shown) such as convex, concave, or curved lenses, etc., to enhance the shaping and collimating effect of the second lens group 60.
It should be noted that, since the laser beam 100 reflected by the one-dimensional galvanometer 20 will scan and propagate within the predetermined angle range in the first plane 101, in this embodiment of the present invention, the generatrix of the cylindrical lens 61 is parallel to the first plane 101, so that the laser beam 100 reflected by the one-dimensional galvanometer 20 can always pass through the cylindrical lens 61 during scanning and propagating, and is conveniently shaped and collimated by the cylindrical lens 61, thereby stably obtaining the laser beam 100 with good beam quality.
Illustratively, as shown in fig. 3A, when the predetermined angle in the predetermined angle range is-6.25 ° (i.e., -6.25 °), the laser beam 100 reflected by the one-dimensional galvanometer 20 is propagated out through the first end 611 of the cylindrical lens 61 to shape and collimate the laser beam 100 by the first end 611 of the cylindrical lens 61; as shown in fig. 3B, when the predetermined angle in the predetermined angle range is 0 ° (i.e., θ is 0 °), the laser beam 100 reflected by the one-dimensional galvanometer 20 is transmitted through the intermediate portion 612 of the cylindrical lens 61 to be shaped and collimated by the intermediate portion 612 of the cylindrical lens 61; as shown in fig. 3C, when the predetermined angle in the predetermined angle range is 6.25 ° (i.e., θ is 6.25 °), the laser beam 100 reflected by the one-dimensional galvanometer 20 is transmitted through the second end 613 of the cylindrical lens 61 to shape and collimate the laser beam 100 by the second end 613 of the cylindrical lens 61.
It should be noted that, in other examples of the present invention, the laser emitter 10 may also be disposed on the rotating device 30, so as to drive the laser emitter 10 and the one-dimensional galvanometer 20 to rotate synchronously through the rotating device 30, thereby ensuring that the one-dimensional galvanometer 20 always corresponds to the emitting path of the laser emitter 10, and further realizing the change of the propagation direction of the laser beam 100 emitted by the laser emitter 10 through the reflection of the one-dimensional galvanometer 20.
Preferably, for this example of a semiconductor laser as the laser emitter 10, the generatrix of the cylindrical lens 61 is perpendicular to the light source short axis direction of the laser emitter 10 (i.e., the direction in which the beam divergence angle is small), so that the cylindrical lens 61 can shape and collimate the laser beam 100 in the light source short axis direction of the laser emitter 10. And the rod mirror 51 of the first lens group 50 is designed to shape and collimate the laser beam 100 in the long-axis direction of the light source of the laser transmitter 10 (i.e., the direction in which the beam emission angle is large) so that the divergence angle of the laser beam 100 in the long-axis direction of the light source is reduced. Thus, the laser beam 100 is shaped and collimated in all directions, so that collimated light with small divergence angles in all directions is obtained, and good shaping and collimating effects are obtained.
It should be noted that, in an embodiment of the present invention, as shown in fig. 4A, the receiving unit 40 of the hybrid solid state lidar 1 may include a laser receiver 41, a third lens group 42 and a reflecting element 43, wherein the third lens group 42 is disposed between the laser receiver 41 and the reflecting element 43 and corresponds to a receiving path of the laser receiver 41, and is configured to focus the laser echo 400 reflected by the reflecting element 43, and enable the laser echo 400 focused by the third lens group 42 to be received by the laser receiver 41 to obtain an echo signal, so as to implement the detection of the target distance by the hybrid solid state lidar 1.
Specifically, as shown in fig. 4A, the reflection element 43 of the receiving unit 40 may be, but is not limited to, implemented as a mirror 431, wherein the mirror 431 is disposed on the rotating device 30 and is located on a side of the one-dimensional galvanometer 20 away from the laser transmitter 10, that is, the one-dimensional galvanometer 20 is located between the laser reflector 10 and the mirror 431, wherein when the laser beam 100 reflected by the one-dimensional galvanometer 20 is reflected by a target to form the laser echo 400, the laser echo 400 is firstly reflected by the mirror 431 to propagate in a direction away from the laser transmitter 10, and then is received by the laser receiver 41 after being focused by the third lens group 42 to obtain an echo signal. It can be understood that, since the mirror 431 and the one-dimensional galvanometer 20 are both disposed on the rotating device 30, the rotating device 30 can drive the mirror 431 and the one-dimensional galvanometer 20 to rotate synchronously around the rotation axis 200, so that the mirror 431 and the one-dimensional galvanometer 20 can always correspond to the same side of the hybrid solid-state lidar 1, which helps the mirror 431 to always reflect the laser echo 400 for the laser receiver 41 to receive.
Preferably, the laser receiver 41 and the mirror 431 of the receiving unit 40 correspond to a rotation axis 200 of the one-dimensional galvanometer 20, and the rotation axis 200 of the one-dimensional galvanometer 20 passes through a reflection surface of the mirror 431, that is, a central axis of a receiving path of the laser receiver 41 overlaps with the rotation axis 200 of the one-dimensional galvanometer 20 and passes through a reflection surface of the mirror 431. In this way, when the mirror 431 rotates 360 degrees around the rotation axis 200, the mirror 431 can always correspond to the receiving path of the laser receiver 41 to change the propagation direction of the laser echo 400 by reflection.
In particular, the laser receiver 41 and the third lens group 42 of the receiving unit 40 may be disposed at positions outside the rotating device 30, and a central axis of a receiving path of the laser receiver 41 overlaps with the rotation axis 200 of the one-dimensional galvanometer 20, that is, the rotating device 30 does not drive the laser receiver 41 to rotate, but the receiving path of the laser receiver 41 can always correspond to the reflecting surface of the reflecting mirror 431 when the reflecting mirror 431 is driven to rotate, so as to receive the laser echo 400 reflected by the reflecting mirror 431. In this way, the laser receiver 41 can also transmit the acquired detection data to the outside by way of wired transmission, which helps to ensure the stability of data transmission and simplifies the structure of the data transmission device. For example, expensive slip rings or unstable optical communication, as in conventional mechanical lidar, are not required to enable data transmission.
Fig. 4B shows a variant of the hybrid solid-state lidar 1 according to the above-described embodiment of the invention, wherein the reflective element 43 of the receiving unit 40 of the hybrid solid-state lidar 1 is implemented as a half mirror 432, wherein the laser receiver 41 and the third lens group 42 are both arranged at the rotating means 30 and in the reflection path of the half mirror 432, wherein the half mirror 432 is arranged between the laser transmitter 10 and the one-dimensional galvanometer 20, such that a laser echo 400 diffusely reflected back by an environmental object is reflected by the one-dimensional galvanometer 20 first in the opposite direction of the transmission path to propagate to the half mirror 432 and then reflected by the half mirror 432 to pass through the third lens group 424 for reception by the laser receiver 41. In this way, the receiving unit 40 of the hybrid solid-state lidar 1 receives the laser echo 400 by using the reflection of the one-dimensional galvanometer 20, which is beneficial to improving the intensity of the laser echo 400 received by the laser receiver 41, and further improving the detection quality of the hybrid solid-state lidar 1. Meanwhile, the one-dimensional galvanometer 20 is shared by the laser transmitter 10 and the laser receiver 40, so that the overall structure of the hybrid solid-state laser radar 1 is simplified.
It is understood that the half mirror 432 can allow half of the light to pass through and reflect the other half of the light to block the other half of the light, that is, half of the laser beam 100 emitted by the laser emitter 10 will pass through the half mirror 432 to be reflected by the one-dimensional galvanometer 20; accordingly, half of the laser echo 400 reflected back by the one-dimensional galvanometer 20 will be reflected by the half-reflecting and half-transmitting mirror 432 to be received by the laser receiver 41, so that the hybrid solid-state lidar 1 can complete the detection of the target distance. In addition, the laser receiver 41, the third lens group 42 and the half mirror 432 of the receiving unit 40 are synchronously rotated by the rotating device 30 to ensure that the laser receiver 41 can still receive the laser echo 400 when the half mirror 432 rotates.
It should be noted that in some other examples of the present invention, the half-reflecting and half-transmitting mirror 432 may be provided with a through hole to allow the laser beam 100 with a smaller diameter to pass through the through hole on the half-reflecting and half-transmitting mirror 432, and since the diameter of the laser echo 400 is larger, most of the laser echo 400 reflected back through the one-dimensional vibrating mirror 20 can still be reflected by the half-reflecting and half-transmitting mirror 432 to the laser receiver 41, so as to reduce the intensity loss of the transmitted laser beam speed 100 and the received laser echo 400, which helps to improve the detection distance and the detection accuracy of the hybrid solid-state lidar 1.
Of course, in another example of the present invention, the reflecting element 43 may also be implemented as a reflecting mirror 431 disposed between the laser transmitter 10 and the one-dimensional oscillating mirror 20, and the reflecting mirror 431 is provided with a through hole to allow the laser beam 100 with a smaller diameter to pass through the through hole of the reflecting mirror 431 and be reflected by the one-dimensional oscillating mirror 20, and reflect the laser echo 400 with a larger diameter to be received by the laser receiver 41, so that most of the laser echo 400 is reflected by the reflecting mirror 431 to the laser receiver 41 to be received, which helps to further improve the detection distance and the detection accuracy of the hybrid solid-state lidar 1.
According to another aspect of the present invention, the present invention further provides a method for manufacturing a hybrid solid-state lidar. Specifically, as shown in fig. 5, the manufacturing method of the hybrid solid-state lidar 1 includes the steps of:
s510: arranging a galvanometer 20 on a rotating device 30, so that the rotating device 30 can drive the galvanometer 20 to rotate 360 degrees in a second plane 102;
s520: correspondingly arranging a laser emitter 10, so that the one-dimensional galvanometer 20 is always located in the emitting path of the laser emitter 10, and is used for changing the propagation direction of the laser beam 100 emitted by the laser emitter 10 through reflection of the one-dimensional galvanometer 20, so that the reflected laser beam 100 can perform scanning propagation within a predetermined angle range in a first plane 101; and
s530: correspondingly, a receiving unit 40 is provided for receiving the laser echo 400 that is diffusely reflected back, so as to assemble the hybrid solid-state lidar 1.
Further, as shown in fig. 5, the method for manufacturing the hybrid solid state lidar 1 may further include the steps of:
s540: a first lens group 50 is disposed between the laser emitter 10 and the one-dimensional galvanometer 20 for shaping and collimating the laser beam 100 emitted by the laser emitter 10 so that the beam size of the laser beam 100 matches the mirror surface size of the one-dimensional galvanometer 20.
Furthermore, as shown in fig. 5, the method for manufacturing the hybrid solid-state lidar 1 may further include the steps of:
s550: a second lens assembly 60 is disposed on the rotating device 30 and located in the reflection path of the one-dimensional galvanometer 20 for shaping and collimating the laser beam 100 reflected by the one-dimensional galvanometer 20.
In an example of the present invention, the first plane 101 is perpendicular to the second plane 102.
According to another aspect of the present invention, the present invention further provides a detection method of a hybrid solid-state lidar. Specifically, as shown in fig. 6, the detection method of the hybrid solid-state lidar 1 includes the steps of:
s610: emitting a laser beam 100 toward a one-dimensional galvanometer 20 by a laser emitter 10;
s620: the one-dimensional galvanometer 20 is used for reflecting to change the propagation direction of the laser beam 100, so that the laser beam 100 reflected by the one-dimensional galvanometer 20 can perform scanning propagation within a predetermined angle range in a second plane 102;
s630: rotating the one-dimensional galvanometer 20 in a first plane 101 by a rotating device 30, so that the laser beam 100 reflected by the one-dimensional galvanometer 20 can perform 360-degree scanning propagation in the plane of the first plane 101; and
s640: the laser echo 400 reflected by the diffuse reflection is received in real time by a receiving unit 40 to detect the surrounding environment information.
In an example of the present invention, as shown in fig. 6, the detection method of the hybrid solid-state lidar 1 further includes the steps of:
s650: the laser beam 100 emitted by the laser emitter 10 is shaped and collimated by a first lens assembly 50, so that the beam size of the collimated laser beam 100 matches the size of the mirror surface of the one-dimensional galvanometer 20.
In an example of the present invention, as shown in fig. 6, the detection method of the hybrid solid-state lidar 1 further includes the steps of:
s660: the laser beam 100 reflected by the one-dimensional galvanometer 20 is shaped and collimated by a second lens assembly 60.
It is noted that in one example of the present invention, the first plane 101 is perpendicular to the second plane 102.
It will be appreciated by persons skilled in the art that the embodiments of the invention described above and shown in the drawings are given by way of example only and are not limiting of the invention. The objects of the invention have been fully and effectively accomplished. The functional and structural principles of the present invention have been shown and described in the examples, and any variations or modifications of the embodiments of the present invention may be made without departing from the principles.

Claims (19)

1. A hybrid solid state lidar, comprising:
a laser transmitter for transmitting a laser beam;
the one-dimensional galvanometer is arranged in the emission path of the laser emitter and used for changing the propagation direction of the laser beam through reflection, so that the laser beam reflected by the one-dimensional galvanometer can perform scanning propagation in a predetermined angle range in a first plane;
rotating means for rotating the one-dimensional galvanometer in a second plane so that the laser beam reflected by the one-dimensional galvanometer can perform 360-degree scanning propagation in the second plane; and
and the receiving unit is used for receiving the laser echo reflected by the diffusion reflection.
2. The hybrid solid-state lidar of claim 1, wherein the first plane is perpendicular to the second plane.
3. The hybrid solid-state lidar of claim 2, wherein the transmitting end of the laser emitter corresponds to an axis of rotation of the one-dimensional galvanometer, wherein the one-dimensional galvanometer is capable of always reflecting the laser beam emitted by the laser emitter when the rotating device rotates the one-dimensional galvanometer.
4. A hybrid solid state lidar according to claim 3, wherein the laser transmitter is a semiconductor laser.
5. The hybrid solid-state lidar of claim 4, further comprising a first lens group, wherein the first lens group is disposed between the laser emitter and the galvanometer for shaping and collimating a laser beam emitted by the laser emitter.
6. The hybrid solid state lidar of claim 5, wherein the first lens group comprises a rod mirror, wherein an end face of the rod mirror corresponds to the laser emitter for shaping and collimating a laser beam emitted by the laser emitter in a long axis direction of a light source of the laser emitter.
7. The hybrid solid state lidar of claim 6, further comprising a second lens group, wherein the second lens group is disposed in the rotating means and in a reflection path of the one-dimensional galvanometer for shaping and collimating the laser beam reflected by the one-dimensional galvanometer.
8. The hybrid solid-state lidar of claim 7, wherein the second lens group comprises a cylindrical lens, wherein a generatrix of the cylindrical lens is parallel to the first plane, such that the laser beam reflected via the one-dimensional galvanometer can always pass through the cylindrical lens to be shaped and collimated while being scan-propagated.
9. The hybrid solid-state lidar of claim 8, wherein the generatrix of the cylindrical lens is perpendicular to a minor source axis of the laser emitter to enable the cylindrical lens to shape and collimate the laser beam reflected via the one-dimensional galvanometer in a direction of the minor source axis of the laser emitter.
10. The hybrid solid state lidar of claim 9, wherein the laser emitter and the first lens group are both disposed outside of the rotating device such that the rotating device drives rotation of only the one-dimensional galvanometer and the second lens group.
11. The hybrid solid-state lidar of claims 1 to 9, wherein the receiving unit comprises a laser receiver, a third lens group, and a reflecting element, wherein the third lens group is disposed between the laser receiver and the reflecting element and corresponds to a receiving path of the laser receiver for focusing the laser echo reflected by the reflecting element, such that the focused laser echo is received by the laser receiver.
12. The hybrid solid-state lidar of claim 11, wherein the reflective element is a mirror disposed to the rotating device, wherein the mirror is located on a side of the galvanometer mirror remote from the laser emitter, and the mirror and the laser receiver each correspond to an axis of rotation of the galvanometer mirror, wherein the laser receiver is capable of always receiving a laser echo reflected back via the mirror when the rotating device rotates the mirror.
13. The hybrid solid-state lidar of claim 11, wherein the reflective element is a transflective mirror disposed at the rotating device, wherein the transflective mirror is between the one-dimensional galvanometer and the laser emitter, wherein the laser receiver and the third lens group are both disposed at the rotating device and in a reflective path of the transflective mirror, wherein the laser receiver is capable of always receiving a laser echo reflected by the one-dimensional galvanometer and then the transflective mirror when the rotating device rotates the transflective mirror.
14. A method of manufacturing a hybrid solid state lidar comprising the steps of:
arranging a one-dimensional galvanometer on a rotating device, so that the rotating device can drive the one-dimensional galvanometer to rotate 360 degrees in a second plane;
correspondingly setting a laser emitter so that the one-dimensional galvanometer is always positioned in the emission path of the laser emitter and is used for changing the propagation direction of the laser beam emitted by the laser emitter through the reflection of the one-dimensional galvanometer so that the reflected laser beam can be scanned and propagated within a preset angle range in a first plane; and
and correspondingly arranging a receiving unit for receiving the laser echo reflected by diffusion so as to assemble the hybrid solid-state laser radar.
15. The method of manufacturing a hybrid solid state lidar of claim 14, further comprising the steps of:
and arranging a first lens group between the laser emitter and the one-dimensional galvanometer for shaping and collimating the laser beam emitted by the laser emitter so as to enable the beam size of the laser beam to be matched with the mirror surface size of the one-dimensional galvanometer.
16. The method of manufacturing a hybrid solid state lidar of claim 15, further comprising the steps of:
and arranging a second lens group on the rotating device, and the second lens group is positioned on the reflection path of the one-dimensional galvanometer and used for shaping and collimating the laser beam reflected by the one-dimensional galvanometer.
17. A detection method of a hybrid solid-state laser radar is characterized by comprising the following steps:
emitting a laser beam towards the one-dimensional galvanometer by a laser emitter;
the one-dimensional galvanometer is used for reflecting to change the propagation direction of the laser beam, so that the laser beam reflected by the one-dimensional galvanometer can be scanned and propagated within a preset angle range in a second plane;
rotating the one-dimensional galvanometer in a first plane by a rotating device so that the laser beam reflected by the one-dimensional galvanometer can be scanned and propagated in the first plane; and
the laser echo reflected by the diffuse reflection is received in real time by a receiving unit so as to detect the surrounding environment information.
18. The method for hybrid solid state lidar detection of claim 17, further comprising the steps of:
and shaping and collimating the laser beam emitted by the laser emitter by a first lens group so as to match the beam size of the collimated laser beam with the size of the mirror surface of the one-dimensional galvanometer.
19. The method for hybrid solid state lidar detection of claim 18, further comprising the steps of:
and shaping and collimating the laser beam reflected by the one-dimensional galvanometer by a second lens group.
CN201811607878.6A 2018-12-27 2018-12-27 Hybrid solid-state laser radar and manufacturing method and detection method thereof Active CN111381218B (en)

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