CN111377084A - Mechanical auxiliary tool and method for packaging target material by using same - Google Patents

Mechanical auxiliary tool and method for packaging target material by using same Download PDF

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Publication number
CN111377084A
CN111377084A CN201811621124.6A CN201811621124A CN111377084A CN 111377084 A CN111377084 A CN 111377084A CN 201811621124 A CN201811621124 A CN 201811621124A CN 111377084 A CN111377084 A CN 111377084A
Authority
CN
China
Prior art keywords
target
packaged
moving
mechanical aid
mechanical
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201811621124.6A
Other languages
Chinese (zh)
Inventor
姚力军
潘杰
王学泽
丁向前
赵剑
杨立明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ningbo Jiangfeng Electronic Material Co Ltd
Original Assignee
Ningbo Jiangfeng Electronic Material Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ningbo Jiangfeng Electronic Material Co Ltd filed Critical Ningbo Jiangfeng Electronic Material Co Ltd
Priority to CN201811621124.6A priority Critical patent/CN111377084A/en
Publication of CN111377084A publication Critical patent/CN111377084A/en
Pending legal-status Critical Current

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Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65BMACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
    • B65B35/00Supplying, feeding, arranging or orientating articles to be packaged
    • B65B35/30Arranging and feeding articles in groups
    • B65B35/42Arranging and feeding articles in groups by roller-ways
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B65CONVEYING; PACKING; STORING; HANDLING THIN OR FILAMENTARY MATERIAL
    • B65BMACHINES, APPARATUS OR DEVICES FOR, OR METHODS OF, PACKAGING ARTICLES OR MATERIALS; UNPACKING
    • B65B5/00Packaging individual articles in containers or receptacles, e.g. bags, sacks, boxes, cartons, cans, jars
    • B65B5/06Packaging groups of articles, the groups being treated as single articles
    • B65B5/067Packaging groups of articles, the groups being treated as single articles in bags

Abstract

A mechanical aid and a method for packaging a target material by the aid of the mechanical aid, wherein the mechanical aid comprises: a moving part including at least two moving units, the moving units being arranged in parallel; the mobile unit includes: the supporting shaft and the height adjusting device are suitable for adjusting the height of the supporting shaft. The invention is beneficial to improving the working efficiency of packaging the target material.

Description

Mechanical auxiliary tool and method for packaging target material by using same
Technical Field
The invention relates to the technical field of semiconductor manufacturing, in particular to a mechanical auxiliary tool and a method for packaging a target material by using the same.
Background
The sputtering coating belongs to one of the processes for preparing thin films by a physical vapor deposition method, and particularly relates to a method for forming a thin film by bombarding the surface of a sputtering target material by using high-energy particles so that atoms or molecules of the sputtering target material obtain enough energy to escape and deposit on the surface of a base material or a workpiece.
The sputtering target comprises a target body and a back plate, wherein the target body is fixedly connected with the back plate, the target body is a target material bombarded by high-energy particles, and the back plate is used for fixedly supporting the target body.
After the sputtering target material is formed, the sputtering target material generally needs to be cleaned, and the cleaned sputtering target material is vacuum-packed by using a packing bag to prevent the sputtering target material from being polluted and prevent the surface of the sputtering target material from generating oxidation reaction with oxygen in the air, thereby ensuring the coating quality of the sputtering target material.
However, the work efficiency of the prior art packed sputtering target material is low.
Disclosure of Invention
The invention aims to provide a mechanical aid and a method for packaging a target material by using the same, which are beneficial to improving the working efficiency of packaging the target material.
In order to solve the above problems, the present invention provides a mechanical aid, comprising: a moving part; wherein the moving part comprises at least two moving units which are arranged in parallel; the mobile unit includes: the supporting shaft and the height adjusting device are suitable for adjusting the height of the supporting shaft.
Optionally, the mobile unit further includes: the rotary driving device is positioned at the end part of the supporting shaft and is suitable for driving the supporting shaft to rotate.
Optionally, the mobile units are arranged at intervals or adjacently.
Optionally, the mechanical aid further comprises: the roller is arranged on one side of the moving part and is parallel to the supporting shaft.
Optionally, in each of the moving units, the number of the rotation driving devices is one or two.
Optionally, the height adjusting device is connected to the rotation driving device.
Optionally, in each of the mobile units, the number of the height adjusting devices is at least two.
Optionally, the height adjusting device is a cylinder or a lead screw.
Optionally, the mobile unit further includes: the ring piece is fixedly sleeved on the support shaft.
Correspondingly, the invention also provides a method for packaging the target by adopting the mechanical auxiliary tool, which comprises the following steps: placing the target to be packaged on at least two support shafts; the height of the supporting shafts is adjusted through the height adjusting device, the supporting shafts are sequentially separated from the target material to be packaged and then return to a contact state along the direction in which the moving units are arranged in parallel, and when one of the supporting shafts is separated from the target material to be packaged, at least one other supporting shaft is arranged to support the target material to be packaged.
Compared with the prior art, the technical scheme of the invention has the following advantages:
the mechanical assistive device comprises a moving part, wherein the moving part comprises at least two moving units which are arranged in parallel; the moving unit includes a support shaft and a height adjusting device adapted to adjust a height of the support shaft. And placing the target to be packaged on the moving part, wherein the at least two support shafts provide support for the target to be packaged. The height of the supporting shaft is adjusted through the height adjusting device, and the supporting shaft is sequentially separated from the target material to be packaged along the direction in which the moving units are arranged in parallel, so that a gap which is convenient for a packaging bag to pass through is formed between the supporting shaft and the target material to be packaged. In addition, when one of the support shafts is separated from the target material to be packaged, the height of the rest of the support shafts is adjusted, so that at least one other support shaft is used for supporting the target material to be packaged until the whole target material is packaged in a packaging bag. Therefore, the mechanical aid contributes to improving the operating efficiency of the packaging operation.
Drawings
FIG. 1 is a schematic diagram of a mechanical aid according to an embodiment of the present invention;
FIG. 2 is a view of the mechanical aid of FIG. 1 taken in the direction A1A 2;
FIG. 3 is a schematic view of the mechanical aid and the target to be packaged shown in FIG. 1;
fig. 4 is a view of the mechanical aid and the target to be packaged shown in fig. 3 along the direction A1a 2;
fig. 5 to 8 are schematic structural diagrams corresponding to steps in a method for using a mechanical aid according to an embodiment of the present invention.
Detailed Description
Through creative labor, the inventor notices that the target material packaging operation is completed by adopting a forklift and a cart in cooperation operation at present, but the forklift and the cart are not special tools for packaging the target material, so that more inconvenience exists in packaging the target material by using the forklift and the cart, the operation efficiency of the packaging operation is seriously influenced, and the safety is low.
In order to solve the above problems, the present invention provides a mechanical assistant and a method for packaging a target material using the same, wherein the mechanical assistant comprises a moving part, the moving part comprises at least two moving units, and the moving units comprise a support shaft and a height adjusting device. Placing the target to be packaged on at least two support shafts, and adjusting the heights of the support shafts through the height adjusting devices along the direction in which the moving units are arranged in parallel, wherein on one hand, the support shafts are sequentially separated from the target to be packaged along the direction in which the moving units are arranged in parallel, so that a space is provided for sleeving a packaging bag; on the other hand, in the process that one of the support shafts is separated from the target material to be packaged, at least one other support shaft is ensured to provide support for the target material to be packaged. Therefore, the mechanical assistive device is beneficial to improving the operation efficiency and the safety of the packaging operation.
In order to make the aforementioned objects, features and advantages of the present invention comprehensible, embodiments accompanied with figures are described in detail below.
FIG. 1 is a schematic diagram of a mechanical aid 100 according to an embodiment of the present invention; fig. 2 is a view of the mechanical aid 100 shown in fig. 1 taken along the direction A1a 2.
Referring to fig. 1 and 2, a mechanical aid 100 includes: a moving part including at least two moving units 300, the moving units 300 being arranged in parallel. The moving unit 300 includes a supporting shaft 310 and a height adjusting device 320, and the height adjusting device 320 is adapted to adjust the height of the supporting shaft 310.
In this embodiment, as shown in fig. 1, the number of the mobile units 300 is three.
In this embodiment, the mobile units 300 are arranged at intervals. In other embodiments, the mobile units 300 may be arranged adjacently, i.e. there is no gap between adjacent mobile units 300.
When the number of the mobile units 300 is greater than two and the mobile units 300 are arranged at intervals, the intervals between adjacent mobile units 300 are equal.
In this embodiment, the arrangement direction of the plurality of moving units 300 is defined as a first direction x, and the extending direction of the supporting shaft 310 is defined as a second direction y. The first direction x is perpendicular to the second direction y.
The number of the support shafts 310 is equal to the number of the moving units 300. In this embodiment, the number of the support shafts 310 is three, and the support shafts are a first support shaft 311, a second support shaft 312, and a third support shaft 313 in sequence along the first direction x.
Fig. 3 is a schematic structural view of the mechanical aid 100 and the target 400 to be packaged shown in fig. 1; fig. 4 is a view of the mechanical aid 100 and the target 400 to be packaged shown in fig. 3 along the direction A1a 2.
In this embodiment, as shown in fig. 3 and 4, the target 400 to be packaged is rectangular. When the target 400 is placed on the moving portion, the target 400 to be packaged straddles the support shafts 310 of different moving units 300. The extending direction of the target 400 to be packaged is parallel to the first direction x.
In this embodiment, the target 400 to be packaged includes a first end 401 and a second end 402. The second end 402 is oriented in the first direction x with respect to the first end 401.
In this embodiment, the mechanical assistive device 100 may simultaneously pack multiple targets 400 to be packaged, so as to pack multiple targets 400 to be packaged into the same packaging bag. The targets 400 to be packaged are sequentially arranged along the second direction y.
In this embodiment, the target 400 to be packaged includes a back plate 420 and a target body 410 fixedly disposed on the back plate 420.
In this embodiment, as shown in fig. 2, the moving unit 300 further includes a rotation driving device 330, and the rotation driving device 330 is located at an end of the supporting shaft 310 and adapted to drive the supporting shaft 310 to rotate.
In this embodiment, the supporting shaft 310 is made of metal or stainless steel.
In the present embodiment, as shown in fig. 1, a rotation arrow 200 represents a rotation direction of the support shaft 310.
In this embodiment, the first direction x coincides with the instantaneous speed direction of the top of the support shaft 310.
The supporting shafts 310 are driven by the rotation driving device 330 to rotate, and the supporting shafts 310 rotate in the same direction, so as to drive the target 400 placed on the supporting shafts 310 to move in the first direction x.
In this embodiment, the rotation driving device 330 is a motor. The motor shaft of the motor is inserted into the end of the support shaft 310, and the motor shaft of the motor coincides with the axis of the support shaft 310.
In each of the mobile units 300, the number of the rotation driving devices 330 is one or two. In this embodiment, the number of the rotation driving devices 330 is two. The two rotation driving devices 330 rotate synchronously to drive the whole supporting shaft 310 to rotate.
In the present embodiment, the z direction represents the height direction as shown in fig. 2.
In this embodiment, the height adjusting device 320 is connected to the rotation driving device 330.
In this embodiment, the height adjusting device 320 is an air cylinder.
In this embodiment, the number of the height adjusting devices 320 is two, and the two height adjusting devices are respectively disposed at the bottom of the rotation driving device 330 to stably drive the rotation driving device 330 to perform a lifting motion, so as to drive the whole supporting shaft 310 to perform a lifting motion. In other embodiments, the number of height adjustment devices 320 may be greater than two.
In this embodiment, the mobile unit 300 further includes: the ring piece 340 is fixedly sleeved on the support shaft 310, and the ring piece 340 is fixedly sleeved on the support shaft 310.
In this embodiment, the ring member 340 directly contacts the target 400 to be packaged (refer to fig. 3), the material of the ring member 340 is plastic, and the material of the ring member 340 is softer than the material of the support shaft 310, so that the target 400 to be packaged is placed on the ring member 340, which is helpful for preventing the target 400 to be packaged from being damaged.
The number of the ring members 340 on a single support shaft 310 is equal to the number of the targets 400 to be packaged.
In this embodiment, as shown in fig. 3, the mechanical assistive device 100 further includes: and a roller 500, the roller 500 being provided at one side of the moving part, the roller 500 being parallel to the support shaft 310.
In this embodiment, the roller 500 is close to the third support shaft 313, and a space is provided between the roller 500 and the third support shaft 313, so as to provide a space for installing the packing bag 600.
In this embodiment, the distance between the roller 500 and the third support shaft 313 is equal to the distance between the adjacent support shafts 310.
In this embodiment, the number of the rollers 500 is one. In other embodiments, the number of the rollers 500 may be more than one.
The invention also provides a method for packaging the target by adopting the mechanical auxiliary tool, which comprises the following steps: placing the target material 400 to be packaged on at least two support shafts 310; the height of the support shafts 310 is adjusted by the height adjusting device 320, the support shafts 310 are sequentially separated from the target 400 to be packaged and then return to a contact state along the direction in which the moving units 300 are arranged in parallel, and when one of the support shafts 310 is separated from the target 400 to be packaged, at least another support shaft 310 is present to support the target 400 to be packaged.
Fig. 5 to 8 are schematic structural diagrams corresponding to steps in the using method of the mechanical assistive device 100. The method of using the mechanical aid 100 will be described in detail with reference to fig. 5 to 8.
In this embodiment, as shown in fig. 5, the supporting shafts 310 rotate to drive the target 400 to be packaged to move toward the first direction x. The roller 500 is directed towards the first direction x relative to the moving part, so that the target 400 to be packed is moved towards the roller 500. As shown in fig. 6, the second end 402 of the target 400 to be packaged is first moved onto the roller 500, and when the second end 402 of the target 400 to be packaged is moved onto the roller 500, the first end 401 of the target 400 to be packaged is separated from the first support shaft 311. As the target 400 to be packaged continues to move along the first direction x, the target 400 to be packaged continues to move up the roller 500.
In this embodiment, as shown in fig. 5, during the movement of the second end 402 of the target 400 to be packaged along the first direction x and before moving onto the roller 500, an operator may direct the opening of the packaging bag 600 toward the second end 402 to sleeve the packaging bag 600 on the second end 402 of the target 400 to be packaged. Further, as the target material 400 to be packaged continues to move in the first direction x, the target material 400 to be packaged between the roller 500 and the third support shaft 313 may be loaded into the packaging bag 600.
In this embodiment, the material of the packaging bag 600 is plastic, and the packaging bag 600 is made of transparent material. In other embodiments, the package 600 may be made of plastic films with various colors.
In this embodiment, as shown in fig. 6, after the target material 400 to be packaged between the roller 500 and the third support shaft 313 is loaded into the packaging bag 600, the third support shaft 313 is moved downward under the control of the corresponding height adjusting device 320 (see fig. 4), so that the mouth of the packaging bag 600 can be moved toward the second support shaft 312, and the target material 400 to be packaged between the second support shaft 312 and the third support shaft 313 is loaded into the packaging bag 600.
In this embodiment, as shown in fig. 7, after the target material 400 to be packaged between the second support shaft 312 and the third support shaft 313 is loaded into the packaging bag 600, the third support shaft 313 is controlled by the corresponding height adjusting device 320 to perform a lifting motion, so as to return to an initial state and provide support for the target material 400 to be packaged. After the third support shaft 313 returns to the initial state, the second support shaft 312 moves downward under the control of the corresponding height adjusting device 320, so that the mouth of the packaging bag 600 can move toward the first support shaft 311, and the target 400 to be packaged between the first support shaft 311 and the second support shaft 312 is loaded into the packaging bag 600.
In this embodiment, as shown in fig. 8, after the target material 400 to be packaged located between the first supporting shaft 311 and the second supporting shaft 312 is loaded into the packaging bag 600, the second supporting shaft 312 is controlled by the corresponding height adjusting device 320 (refer to fig. 4) to perform an ascending motion, so as to return to an initial state, and provide support for the target material 400 to be packaged. After the second supporting shaft 312 is restored to the initial state, the first supporting shaft 311 moves downward under the control of the corresponding height adjusting device 320, so as to provide an operation space for the bag mouth of the packaging bag 600 for the plastic packaging machine 700 to complete the packaging operation.
In this embodiment, the roller 500 is rotatable about a central axis. When the second end 402 of the target 400 to be packaged moves onto the roller 500, the roller 500 is driven by the target 400 to be packaged to rotate because the target 400 to be packaged still has a speed along the first direction x, and the rotation direction of the roller 500 is the same as the rotation direction of the support shaft 310.
In this embodiment, the roller 500 is driven by the target 400 to be packaged to rotate, which is helpful to reduce the friction between the roller 500 and the target 400 to be packaged, and prevent the target 400 to be packaged from being worn due to the excessive friction between the target 400 to be packaged and the roller 500.
Although the present invention is disclosed above, the present invention is not limited thereto. Various changes and modifications may be effected therein by one skilled in the art without departing from the spirit and scope of the invention as defined in the appended claims.

Claims (10)

1. A mechanical aid, comprising: a moving part;
wherein the moving part comprises at least two moving units which are arranged in parallel;
the mobile unit includes: the supporting shaft and the height adjusting device are suitable for adjusting the height of the supporting shaft.
2. The mechanical aid of claim 1, wherein the mobile unit further comprises: the rotary driving device is positioned at the end part of the supporting shaft and is suitable for driving the supporting shaft to rotate.
3. Mechanical aid according to claim 1 or 2, characterized in that said mobile units are arranged at intervals or adjacent to each other.
4. The mechanical aid of claim 2, further comprising: the roller is arranged on one side of the moving part and is parallel to the supporting shaft.
5. The mechanical aid of claim 2, wherein the number of the rotary driving means in each of the moving units is one or two.
6. The mechanical aid of claim 2, wherein the height adjustment device is coupled to the rotary drive device.
7. The mechanical aid of claim 1, wherein the number of height adjustment devices in each of the mobile units is at least two.
8. Mechanical aid according to claim 1, 6 or 7, characterised in that the height adjustment means are cylinders or screws.
9. The mechanical aid of claim 1, wherein the mobile unit further comprises: the ring piece is fixedly sleeved on the support shaft.
10. A method of target packaging using the mechanical aid of any of claims 1 to 9, comprising:
placing the target to be packaged on at least two support shafts;
the height of the supporting shafts is adjusted through the height adjusting device, the supporting shafts are sequentially separated from the target material to be packaged and then return to a contact state along the direction in which the moving units are arranged in parallel, and when one of the supporting shafts is separated from the target material to be packaged, at least one other supporting shaft is arranged to support the target material to be packaged.
CN201811621124.6A 2018-12-28 2018-12-28 Mechanical auxiliary tool and method for packaging target material by using same Pending CN111377084A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201811621124.6A CN111377084A (en) 2018-12-28 2018-12-28 Mechanical auxiliary tool and method for packaging target material by using same

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201811621124.6A CN111377084A (en) 2018-12-28 2018-12-28 Mechanical auxiliary tool and method for packaging target material by using same

Publications (1)

Publication Number Publication Date
CN111377084A true CN111377084A (en) 2020-07-07

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Country Status (1)

Country Link
CN (1) CN111377084A (en)

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JP2015129323A (en) * 2014-01-07 2015-07-16 山陽特殊製鋼株式会社 Sputtering target material
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CN207670810U (en) * 2017-12-22 2018-07-31 鲁丰织染有限公司 Finished fabric automatically delivers set bag system
CN108622446A (en) * 2018-05-10 2018-10-09 成都富通光通信技术有限公司 A kind of optical wand test and packaging integrated device
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