CN111203651A - Method for processing and calculating hologram in transparent material by space shaping femtosecond laser - Google Patents

Method for processing and calculating hologram in transparent material by space shaping femtosecond laser Download PDF

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CN111203651A
CN111203651A CN202010042410.8A CN202010042410A CN111203651A CN 111203651 A CN111203651 A CN 111203651A CN 202010042410 A CN202010042410 A CN 202010042410A CN 111203651 A CN111203651 A CN 111203651A
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hologram
femtosecond laser
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CN111203651B (en
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姜澜
么铸霖
李晓炜
王志鹏
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Beijing Institute of Technology BIT
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    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/50Working by transmitting the laser beam through or within the workpiece
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B23MACHINE TOOLS; METAL-WORKING NOT OTHERWISE PROVIDED FOR
    • B23KSOLDERING OR UNSOLDERING; WELDING; CLADDING OR PLATING BY SOLDERING OR WELDING; CUTTING BY APPLYING HEAT LOCALLY, e.g. FLAME CUTTING; WORKING BY LASER BEAM
    • B23K26/00Working by laser beam, e.g. welding, cutting or boring
    • B23K26/02Positioning or observing the workpiece, e.g. with respect to the point of impact; Aligning, aiming or focusing the laser beam
    • B23K26/06Shaping the laser beam, e.g. by masks or multi-focusing
    • B23K26/064Shaping the laser beam, e.g. by masks or multi-focusing by means of optical elements, e.g. lenses, mirrors or prisms

Abstract

The invention relates to a method for processing a computer hologram in a transparent material by space shaping femtosecond laser, belonging to the technical field of laser application. The method comprises the steps of firstly theoretically calculating a high-quality calculation hologram, selecting a proper hologram order, then calculating and generating phase diagrams capable of forming Bessel-like beams with different lengths, sequentially loading the phase diagrams on a spatial light modulator, realizing point-by-point one-time processing of a structure with the same length by controlling a translation table to horizontally move through programming, then replacing the phase diagrams to realize processing of the structures with different lengths, and realizing high-efficiency processing of the high-quality calculation hologram without moving the translation table up and down and accurately controlling processing parameters. The method has high processing efficiency, does not need to accurately control the removal amount of the material, has large information content of the formed hologram and high precision, and can be applied to various fields.

Description

Method for processing and calculating hologram in transparent material by space shaping femtosecond laser
Technical Field
The invention relates to a method for processing a computer hologram in a transparent material by space shaping femtosecond laser, belonging to the technical field of laser application.
Background
In recent years, the processing of computer holograms has wide application prospects in the fields of optical anti-counterfeiting, optical storage, aspheric surface measurement and the like. A computer-generated hologram is often composed of thousands of pixel points, and the traditional processing method of the computer-generated hologram is to optically reduce a computer-generated hologram pattern by using output tools such as printing and drawing, and then to develop and fix the image to obtain the hologram, but the process is complex to manufacture, and the resolution of the processed hologram is limited. With the development of etching equipment, high-precision computer holograms have generally used photolithography or electron beam lithography. The processing modes can only form the hologram on the surface of the material, and the material removal processing needs to be carried out point by point, the difference of the removal amount of the material among different pixel points is often in the nanometer level, so the processing difficulty is greatly improved, the processing efficiency is reduced, and the abrasion resistance of the hologram is poor due to the fact that the processed hologram is on the surface of the material, and the using effect and the service life of the hologram are seriously influenced. The femtosecond laser can form extremely high power density near the focus position after being focused, so that the transparent material only generates nonlinear absorption of energy at the focus position, and the processing of the internal structure of the transparent material is realized on the premise of not damaging the surface of the material. Therefore, the processing of computer holograms inside materials using femtosecond lasers is a very potential processing method.
The femtosecond laser can process the calculation hologram in the material, which mainly comprises two types, one is amplitude type calculation hologram, and the other is phase type calculation hologram. Although the amplitude type computer hologram is relatively simple to process, the diffraction efficiency is low and a twin image exists, so that the effective information contained in the hologram is greatly reduced. The phase type calculation hologram not only can make up the problem of low diffraction efficiency, but also can greatly increase the contained effective information amount through the processing of multi-order calculation hologram, and the application range is wider. However, when a traditional gaussian beam is used for processing and calculating a hologram in a transparent material, a high-power objective lens is often needed to be used for ablating the material, and the processing of the amplitude type hologram in the material is further realized by designing the position and the size of an ablation area. When phase type holographic processing is carried out by using a focused Gaussian beam, a focus needs to be dynamically moved, dozens of hours are often needed for processing a square millimeter-sized calculation hologram, the processing efficiency is extremely low, and the structure processed at different depths is greatly influenced by aberration, so that a processing method capable of efficiently processing a high-quality calculation hologram in a transparent material is urgently needed at present.
Disclosure of Invention
The invention aims to solve the problems of low processing efficiency and poor quality of the existing computational hologram in the material, and provides a method for processing the computational hologram in the transparent material by space shaping femtosecond laser. The method comprises the steps of firstly theoretically calculating a high-quality calculation hologram, selecting a proper hologram order, then calculating and generating phase diagrams capable of forming Bessel-like beams with different lengths, sequentially loading the phase diagrams on a spatial light modulator, realizing point-by-point one-time processing of a structure with the same length by controlling a translation table to horizontally move through programming, then replacing the phase diagrams to realize processing of the structures with different lengths, and realizing high-efficiency processing of the high-quality calculation hologram without moving the translation table up and down and accurately controlling processing parameters. The method has high processing efficiency, does not need to accurately control the removal amount of the material, has large information content of the formed hologram and high precision, and can be applied to various fields.
The purpose of the invention is realized by the following technical scheme:
the method for processing and calculating the hologram in the transparent material by the space shaping femtosecond laser comprises the following specific steps:
the method comprises the following steps: obtaining a continuous phase diagram through a GS phase recovery algorithm according to a designed light field, and dispersing the obtained continuous phase diagram into N orders (N order)>2) The phase change of each step is 0, 2 pi/N, 2 × 2 pi/N, 3 × 2 pi/N, 4 × 2 pi/N, …, (N-1) × 2 pi/N, respectively. According to the length l and phase change of the diffraction-free region
Figure BDA0002368218340000021
The relationship of (1):
Figure BDA0002368218340000022
wherein, λ represents the incident beam wavelength, Δ N is the refractive index change inside the material caused by the femtosecond laser, and N diffraction-free Bessel beam phase diagrams with designed length are generated by calculation, and the phase diagrams can realize the processing of N modified depth structures;
step two: the number of pulses of the femtosecond laser irradiated on a sample is controlled by using an optical switch device, the number of the pulses is controlled to be between 100 and 1000, at the moment, a silicon-oxygen six-ring structure in the material can be converted into a silicon-oxygen three-ring structure or a silicon-oxygen four-ring structure to the maximum extent, and the refractive index change in the material is maximum and uniform under the condition of not causing material ablation;
step three: loading the N phase diagrams generated in the step one onto a spatial light modulator, and shaping femtosecond laser Gaussian beams vertically incident on the spatial light modulator into Bessel-like beams with different lengths and long focal depths and small focal spots;
step four: enabling the Bessel-like light beam obtained in the step three to pass through a telescopic system, wherein the telescopic system is used for preliminarily adjusting the length of the light beam and improving the energy density of the light beam;
step five: and (3) placing the processed sample on a six-dimensional moving translation table, focusing the shaping light beam with improved energy density obtained in the fourth step inside the processed sample, controlling the translation table to drive the sample to move horizontally and simultaneously replacing the phase diagram, realizing efficient processing of various modified structures with different depths, and finally processing a complete hologram inside the material.
The device for realizing the method comprises a femtosecond laser system, an optical switch device, a beam splitter, a spatial light modulator, a telescopic system and a six-dimensional precise displacement platform;
connection relation: the femtosecond laser system, the optical switch device and the spatial light modulator are sequentially arranged in parallel and coaxially; the laser vertically irradiates the spatial light modulator after passing through the beam splitter, and the light beam shaped by the spatial light modulator is vertically incident to the telescopic system after being reflected by the beam splitter; focusing the light beam passing through the telescopic system into the processing sample; the area to be processed of the processed sample is positioned at the center of the six-dimensional precision displacement platform;
light path: after the femtosecond laser system generates ultrashort pulse femtosecond laser, the number of laser pulses irradiated on a sample is adjusted by using the optical switch device; the adjusted light beam is vertically incident to a spatial light modulator through a beam splitter, and the spatial light modulator shapes a Gaussian beam into long focal depth small focal spot beams with different lengths after loading different phase diagrams; then, after being reflected by a beam splitter, the energy density is improved and the length of the processing light beam is preliminarily adjusted through a telescopic system; the processing sample is fixed on the six-dimensional precise displacement platform, and the six-dimensional precise displacement platform is moved to enable the long-focal-depth small-focal-spot light beam region to be located inside the processing sample.
Advantageous effects
1. The invention can disperse the designed hologram into N orders (N >2), and realizes the processing of high-order calculation hologram by adjusting the length of Bessel-like light beam, thereby greatly inhibiting twin image in holographic imaging, improving the information content contained in the hologram and improving the practicability of calculating the hologram;
2. according to the invention, by controlling the number of pulses of the Bessel-like light beams irradiated into the sample, uniform refractive index change in the material is realized, the size of a single pixel point of the hologram is extremely small, and the imaging quality of the computed hologram is improved;
3. the invention uses the space shaping technology to realize the high-efficiency processing of the high-precision computation hologram single point, reduces the processing difficulty and improves the processing efficiency of the computation hologram;
4. the invention uses femtosecond laser to process high-quality calculation hologram in the transparent material, because the surface of the material is not damaged, the abrasion resistance of the hologram is greatly increased, and the service life of the calculation hologram is prolonged.
Drawings
Fig. 1 is a schematic diagram for constructing a light path of the method for processing a computer hologram in a transparent material by using a space shaping femtosecond laser.
FIG. 2 is a simplified schematic process diagram of a method for processing a computer hologram inside a transparent material by using a space-shaping femtosecond laser according to the present invention.
FIG. 3 is a graphical representation of the results of the present invention of a method of spatially shaping a femtosecond laser to process a computer hologram within a transparent material.
The system comprises a 1-femtosecond laser system, a 2-optical switch device, a 3-beam splitter, a 4-spatial light modulator, a 5-telescope system and a 6-sample.
Detailed Description
The invention is further described with reference to the following figures and examples.
Example 1
The method for processing the computer hologram in the transparent material by the space shaping femtosecond laser comprises the following steps:
(1) and calculating a phase hologram corresponding to the letter A of the target shaping light field by adopting a Fourier iterative algorithm based on Fresnel diffraction.
(2) Holographically discretizing the phase obtained in (1) into a matrix of 100 × 100 elements, wherein the discretized phase values are respectively
Figure BDA0002368218340000041
When the initial phase value
Figure BDA0002368218340000042
When, take the phase
Figure BDA0002368218340000043
When the initial phase value
Figure BDA0002368218340000044
When, take the phase
Figure BDA0002368218340000045
When the initial phase value is reached
Figure BDA0002368218340000046
When, take the phase
Figure BDA0002368218340000047
When phase value
Figure BDA0002368218340000048
When, take the phase
Figure BDA0002368218340000049
(3) The refractive index change Deltan caused by femtosecond laser modification processing in Corning glass is known to be 10-2~10-5In order of magnitude, the refractive index variation in this example is taken to be 2 × 10-5According to the formula, the relationship between the phase change and the modification length in the material is as follows:
Figure BDA00023682183400000410
where λ represents the incident beam wavelength, phase value
Figure BDA00023682183400000411
Respectively substituting the modified lengths into the above formulas to obtain the modified lengths l to be processed0、l1、l2、l3
(4) Using a computer to design and generate 4 Bessel-like beam phase diagrams, which can generate the length l0、l1、l2、l3The light field distribution of (2).
(5) The processing device shown in figure 1 is used for processing a 4-order computer-generated hologram and mainly comprises a femtosecond laser system 1, an optical switching device 2, a beam splitter 3, a spatial light modulator 4, a telescopic system 5 and a sample 6.
(6) The specific experimental process is as follows: the femtosecond laser system 1 generates Gaussian beams, and the number of laser pulses irradiated by the femtosecond laser system is controlled to be 100 by the optical switch adjusting device 2. The gaussian beam after energy adjustment is incident on the spatial light modulator 4 through the beam splitter 3. And (3) sequentially loading the phase diagram generated in the step (4) on the spatial light modulator 4, shaping the Gaussian beam into four lengths, reducing the Bessel-like beam with the focal spot diameter of only about 1.5 micrometers by a telescopic system 5 consisting of a plano-convex lens with the focal length of 150 millimeters and an objective lens with the focal length of 20 times, primarily adjusting the length, further improving the energy density, and vertically irradiating the beam into the transparent sample 6.
(7) As shown in fig. 2, the starting position of the non-diffraction region of the long-focus-depth small-focal-spot light beam is moved to a position 100 microns below a corning glass sample to be processed, the phase diagram is changed between processing points with different delays while the translation stage is controlled to move horizontally by a program, the processing time of a single pixel point is only 0.1 second, the time required for processing the whole 100 × 100-point calculation hologram is less than 0.5 hour, and the time is less than 1/5 of the time required for forming a hologram with the same size in a traditional mode that a single pixel point needs dynamic movement processing.
(8) Irradiating the computed hologram processed in step (7) with a continuous He-Ne laser, wherein the irradiation result is shown in figure 3, the far-field diffraction result shows a pattern of letter "A", and the twin image of the light field is greatly suppressed,
the quality of the computed hologram is greatly improved.
The device for realizing the method comprises a femtosecond laser system 1, an optical switch device 2, a beam splitter 3, a spatial light modulator 4, a telescopic system 5 and a six-dimensional precise displacement platform 6;
after the femtosecond laser system 1 generates ultrashort pulse femtosecond laser, the number of laser pulses irradiated on a sample is adjusted by using the optical switch device 2; the adjusted light beam is vertically incident on a spatial light modulator 4 through a beam splitter 3, and the spatial light modulator 4 shapes a Gaussian light beam into long focal depth small focal spot light beams with different lengths after loading different phase diagrams; then, after being reflected by a beam splitter, the energy density is improved and the length of the processing light beam is preliminarily adjusted by a telescopic system 5; the processing sample 6 is fixed on the six-dimensional precision displacement platform, and the six-dimensional precision displacement platform is moved to enable the long-focal-depth small-focal-spot light beam region to be located inside the processing sample.
The above detailed description is intended to illustrate the objects, aspects and advantages of the present invention, and it should be understood that the above detailed description is only exemplary of the present invention and is not intended to limit the scope of the present invention, and any modifications, equivalents, improvements and the like made within the spirit and principle of the present invention should be included in the scope of the present invention.

Claims (2)

1. The method for processing and calculating the hologram in the transparent material by the space shaping femtosecond laser is characterized in that: the method comprises the following specific steps:
step one, obtaining a continuous phase diagram through a GS phase recovery algorithm according to a designed light field, and dispersing the obtained continuous phase diagram into N orders, N>2, the phase change of each step is 0, 2 pi/N, 2 multiplied by 2 pi/N, 3 multiplied by 2 pi/N, 4 multiplied by 2 pi/N, …, (N-1) multiplied by 2 pi/N; length of diffraction free zone and phase variation
Figure FDA0002368218330000011
The relation of (A) is as follows:
Figure FDA0002368218330000012
wherein, λ represents the incident beam wavelength, and Δ n is the refractive index change inside the material caused by the femtosecond laser; generating N diffraction-free Bessel-like beam phase diagrams with designed lengths by calculation, wherein the phase diagrams can realize the processing of N modified depth structures;
secondly, controlling the number of pulses of the femtosecond laser irradiated on the sample by using an optical switch device, and controlling the number of the pulses to be between 100 and 1000, wherein at the moment, a silicon-oxygen six-ring structure in the material can be converted into a silicon-oxygen three-ring or silicon-oxygen four-ring structure to the maximum extent, and the refractive index change in the material is maximum and uniform under the condition of not causing ablation of the material;
loading the N phase diagrams generated in the step one onto a spatial light modulator, and shaping femtosecond laser Gaussian beams vertically incident on the spatial light modulator into Bessel-like beams with different lengths and long focal depths and small focal spots;
step four, enabling the Bessel-like light beam obtained in the step three to pass through a telescopic system, wherein the telescopic system is used for preliminarily adjusting the length of the light beam and improving the energy density of the light beam;
and fifthly, placing the processed sample on a six-dimensional moving translation stage, focusing the shaped light beam with the improved energy density obtained in the fourth step inside the processed sample, controlling the translation stage to drive the sample to move horizontally and simultaneously replacing the phase diagram, realizing efficient processing of modified structures with various different depths, and finally processing a complete hologram inside the material.
2. An apparatus for implementing the method of claim 1, wherein: the system comprises a femtosecond laser system, an optical switch device, a beam splitter, a spatial light modulator, a telescopic system and a six-dimensional precision displacement platform;
after the femtosecond laser system generates ultrashort pulse femtosecond laser, the number of laser pulses irradiated on a sample is adjusted by using the optical switch device; the adjusted light beam is vertically incident to a spatial light modulator through a beam splitter, and the spatial light modulator shapes a Gaussian beam into long focal depth small focal spot beams with different lengths after loading different phase diagrams; then, after being reflected by a beam splitter, the energy density is improved and the length of the processing light beam is preliminarily adjusted through a telescopic system; the processing sample is fixed on the six-dimensional precise displacement platform, and the six-dimensional precise displacement platform is moved to enable the long-focal-depth small-focal-spot light beam region to be located inside the processing sample.
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