CN111142179B - 阶梯结构光滤波器 - Google Patents

阶梯结构光滤波器 Download PDF

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Publication number
CN111142179B
CN111142179B CN201911067451.6A CN201911067451A CN111142179B CN 111142179 B CN111142179 B CN 111142179B CN 201911067451 A CN201911067451 A CN 201911067451A CN 111142179 B CN111142179 B CN 111142179B
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China
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filter
mirror
spacer
channel
stepped
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CN201911067451.6A
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English (en)
Chinese (zh)
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CN111142179A (zh
Inventor
威廉·D·霍克
史蒂文·萨克斯
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Viavi Solutions Inc
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Viavi Solutions Inc
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Priority to CN202311061226.8A priority Critical patent/CN117031607A/zh
Publication of CN111142179A publication Critical patent/CN111142179A/zh
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    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/26—Reflecting filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/28—Interference filters
    • G02B5/285—Interference filters comprising deposited thin solid films
    • G02B5/288—Interference filters comprising deposited thin solid films comprising at least one thin film resonant cavity, e.g. in bandpass filters
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/20—Filters
    • G02B5/201—Filters in the form of arrays
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B26/00—Optical devices or arrangements for the control of light using movable or deformable optical elements
    • G02B26/001—Optical devices or arrangements for the control of light using movable or deformable optical elements based on interference in an adjustable optical cavity
    • G—PHYSICS
    • G02—OPTICS
    • G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
    • G02B5/00—Optical elements other than lenses
    • G02B5/08—Mirrors
    • G02B5/0816—Multilayer mirrors, i.e. having two or more reflecting layers
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/011—Manufacture or treatment of image sensors covered by group H10F39/12
    • H10F39/024—Manufacture or treatment of image sensors covered by group H10F39/12 of coatings or optical elements
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/806—Optical elements or arrangements associated with the image sensors
    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10F—INORGANIC SEMICONDUCTOR DEVICES SENSITIVE TO INFRARED RADIATION, LIGHT, ELECTROMAGNETIC RADIATION OF SHORTER WAVELENGTH OR CORPUSCULAR RADIATION
    • H10F39/00—Integrated devices, or assemblies of multiple devices, comprising at least one element covered by group H10F30/00, e.g. radiation detectors comprising photodiode arrays
    • H10F39/80—Constructional details of image sensors
    • H10F39/806—Optical elements or arrangements associated with the image sensors
    • H10F39/8067—Reflectors

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  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Optics & Photonics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Optical Filters (AREA)
  • Solid State Image Pick-Up Elements (AREA)
  • Instruments For Measurement Of Length By Optical Means (AREA)
  • Mounting And Adjusting Of Optical Elements (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
CN201911067451.6A 2018-11-02 2019-11-04 阶梯结构光滤波器 Active CN111142179B (zh)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN202311061226.8A CN117031607A (zh) 2018-11-02 2019-11-04 阶梯结构光滤波器

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
US16/179,480 2018-11-02
US16/179,480 US10962694B2 (en) 2018-11-02 2018-11-02 Stepped structure optical filter

Related Child Applications (1)

Application Number Title Priority Date Filing Date
CN202311061226.8A Division CN117031607A (zh) 2018-11-02 2019-11-04 阶梯结构光滤波器

Publications (2)

Publication Number Publication Date
CN111142179A CN111142179A (zh) 2020-05-12
CN111142179B true CN111142179B (zh) 2023-09-08

Family

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Family Applications (2)

Application Number Title Priority Date Filing Date
CN201911067451.6A Active CN111142179B (zh) 2018-11-02 2019-11-04 阶梯结构光滤波器
CN202311061226.8A Pending CN117031607A (zh) 2018-11-02 2019-11-04 阶梯结构光滤波器

Family Applications After (1)

Application Number Title Priority Date Filing Date
CN202311061226.8A Pending CN117031607A (zh) 2018-11-02 2019-11-04 阶梯结构光滤波器

Country Status (7)

Country Link
US (3) US10962694B2 (https=)
EP (1) EP3647839B1 (https=)
JP (3) JP7210417B2 (https=)
KR (2) KR102565869B1 (https=)
CN (2) CN111142179B (https=)
CA (1) CA3060740A1 (https=)
TW (2) TWI791917B (https=)

Families Citing this family (13)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US10962694B2 (en) 2018-11-02 2021-03-30 Viavi Solutions Inc. Stepped structure optical filter
US12392945B2 (en) * 2020-04-28 2025-08-19 Viavi Solutions Inc. Induced transmission filter with hydrogenated silicon, silver, and silicon dioxide
CN111579067B (zh) * 2020-05-22 2023-03-03 中国科学院上海技术物理研究所 一种具有超宽带外截止的集成窄带分光器件
WO2021237567A1 (zh) * 2020-05-28 2021-12-02 深圳市海谱纳米光学科技有限公司 一种可调光学滤波器件和光谱成像系统
EP3943988B1 (en) 2020-07-20 2023-12-27 Samsung Electronics Co., Ltd. Spectral filter, and image sensor and electronic device including the spectral filter
WO2022147920A1 (zh) * 2021-01-11 2022-07-14 苏州联讯仪器有限公司 用于光通信的光波长测量系统
CN113503978A (zh) * 2021-08-16 2021-10-15 苏州联讯仪器有限公司 光通信用光波长测量系统
WO2023027523A1 (ko) * 2021-08-27 2023-03-02 경북대학교 산학협력단 마이크로옵틱 마하젠더 간섭계의 파장대역 특성을 원하는 형상으로 제어하는 방법
KR102727382B1 (ko) * 2021-08-27 2024-11-07 경북대학교 산학협력단 마이크로옵틱 마하젠더 간섭계의 파장대역 특성을 원하는 형상으로 제어하는 방법
CN114236663B (zh) * 2021-12-15 2025-07-25 浙江大学 大面积单片集成的平坦化多通道滤光片阵列及制备方法
CN114551489A (zh) * 2022-02-11 2022-05-27 中国科学院上海技术物理研究所 一种分光与探测一体化的短波红外光谱探测器
CN115831041B (zh) * 2023-01-09 2023-04-18 北京数字光芯集成电路设计有限公司 一种阶梯式线阵MicroLED、扫描装置及扫描方法
CN119779483A (zh) * 2025-01-23 2025-04-08 星遥光宇(常州)科技有限公司 多光谱成像系统的焦面补偿方法、焦面补偿系统

Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2211655A1 (en) * 1997-07-28 1999-01-28 Paul Colbourne Multi-pass etalon filter
JP2004287191A (ja) * 2003-03-24 2004-10-14 Seiko Epson Corp カラーフィルタアレイおよび空間光変調装置および投射型表示装置
CN1661426A (zh) * 2004-02-26 2005-08-31 Lg.菲利浦Lcd株式会社 液晶显示装置及其制造方法
JP2008197673A (ja) * 1999-02-15 2008-08-28 Sharp Corp 液晶表示装置
JP2010113058A (ja) * 2008-11-05 2010-05-20 Seiko Epson Corp カラーフィルターの製造方法、カラーフィルター、画像表示装置、および、電子機器
CN102832237A (zh) * 2012-07-03 2012-12-19 电子科技大学 一种槽型半导体功率器件
CN106796306A (zh) * 2014-10-17 2017-05-31 3M创新有限公司 具有重叠谐波的多层光学膜
CN107015302A (zh) * 2015-12-29 2017-08-04 唯亚威解决方案股份有限公司 基于介质镜的多光谱滤波器阵列
EP3206060A1 (en) * 2016-02-12 2017-08-16 Viavi Solutions Inc. Optical filter array

Family Cites Families (23)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5920804A (ja) 1982-07-28 1984-02-02 Minolta Camera Co Ltd 膜厚監視装置
JPH0814509B2 (ja) * 1986-05-15 1996-02-14 ミノルタ株式会社 分光測定センサ
JP3375147B2 (ja) 1992-05-26 2003-02-10 浜松ホトニクス株式会社 半導体光検出装置
JPH08508114A (ja) * 1993-12-23 1996-08-27 ハネウエル・インコーポレーテッド カラーフィルタ・アレイ
JPH1138397A (ja) * 1997-07-24 1999-02-12 Sharp Corp 反射型カラー液晶表示素子
US6791736B2 (en) * 2001-06-19 2004-09-14 Teralum Llc Optical device for dispersion compensation
FR2904432B1 (fr) 2006-07-25 2008-10-24 Commissariat Energie Atomique Structure matricielle de filtrage optique et capteur d'images associe
CN104316987A (zh) * 2006-08-09 2015-01-28 光学解决方案纳米光子学有限责任公司 光学滤波器及其生产方法以及用于检查电磁辐射的装置
US7803704B2 (en) * 2008-08-22 2010-09-28 Chartered Semiconductor Manufacturing, Ltd. Reliable interconnects
CA2765818A1 (en) 2009-06-17 2010-12-23 Koninklijke Philips Electronics N.V. Interference filters with high transmission and large rejection range for mini-spectrometer
JP5868706B2 (ja) 2010-01-21 2016-02-24 株式会社東芝 干渉型フィルタ層付基板及びそれを用いた表示装置
US20120200852A1 (en) * 2010-09-10 2012-08-09 Aerospace Missions Corporation Spectroscopy and spectral imaging methods and apparatus
CN102798917B (zh) * 2011-05-25 2015-02-25 苏州大学 一种彩色图像制作方法及使用该方法制作的彩色滤光片
EP3351981B1 (en) * 2011-06-23 2025-04-02 Viavi Solutions Inc. Multi color-shifting devices
JP5757835B2 (ja) * 2011-10-04 2015-08-05 浜松ホトニクス株式会社 分光センサの製造方法
US20160182786A1 (en) 2013-09-11 2016-06-23 Lytro, Inc. Hybrid light-field camera
FR3020878B1 (fr) * 2014-05-06 2025-06-06 Commissariat Energie Atomique Dispositif de filtrage optique comportant des cavites fabry-perot a couche structuree et d'epaisseurs differentes
CN105093376A (zh) * 2015-09-07 2015-11-25 西安工业大学 中心波长渐变的带通滤光片制备方法
JP2017168822A (ja) 2016-02-12 2017-09-21 ヴァイアヴィ・ソリューションズ・インコーポレイテッドＶｉａｖｉ Ｓｏｌｕｔｉｏｎｓ Ｉｎｃ． センサデバイスの製造方法
DE102016010078A1 (de) 2016-08-18 2018-02-22 Giesecke+Devrient Currency Technology Gmbh Optisch variables Sicherheitselement mit Dünnschichtelement
EP3324161B1 (de) 2016-11-18 2020-06-17 Espros Photonics AG Spektrometer und verfahren zur justierung eines filterarrays
US10914961B2 (en) 2017-02-13 2021-02-09 Viavi Solutions Inc. Optical polarizing filter
US10962694B2 (en) 2018-11-02 2021-03-30 Viavi Solutions Inc. Stepped structure optical filter

Patent Citations (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CA2211655A1 (en) * 1997-07-28 1999-01-28 Paul Colbourne Multi-pass etalon filter
JP2008197673A (ja) * 1999-02-15 2008-08-28 Sharp Corp 液晶表示装置
JP2004287191A (ja) * 2003-03-24 2004-10-14 Seiko Epson Corp カラーフィルタアレイおよび空間光変調装置および投射型表示装置
CN1661426A (zh) * 2004-02-26 2005-08-31 Lg.菲利浦Lcd株式会社 液晶显示装置及其制造方法
JP2010113058A (ja) * 2008-11-05 2010-05-20 Seiko Epson Corp カラーフィルターの製造方法、カラーフィルター、画像表示装置、および、電子機器
CN102832237A (zh) * 2012-07-03 2012-12-19 电子科技大学 一种槽型半导体功率器件
CN106796306A (zh) * 2014-10-17 2017-05-31 3M创新有限公司 具有重叠谐波的多层光学膜
CN107015302A (zh) * 2015-12-29 2017-08-04 唯亚威解决方案股份有限公司 基于介质镜的多光谱滤波器阵列
EP3206060A1 (en) * 2016-02-12 2017-08-16 Viavi Solutions Inc. Optical filter array

Also Published As

Publication number Publication date
US12436328B2 (en) 2025-10-07
JP2024174959A (ja) 2024-12-17
TWI791917B (zh) 2023-02-11
US10962694B2 (en) 2021-03-30
US20200142111A1 (en) 2020-05-07
JP7210417B2 (ja) 2023-01-23
KR102951105B1 (ko) 2026-04-09
TW202024680A (zh) 2020-07-01
EP3647839A3 (en) 2020-07-29
KR20230118795A (ko) 2023-08-14
US20210199866A1 (en) 2021-07-01
CA3060740A1 (en) 2020-05-02
US11892664B2 (en) 2024-02-06
JP7822974B2 (ja) 2026-03-03
EP3647839A2 (en) 2020-05-06
KR102565869B1 (ko) 2023-08-10
KR20200050882A (ko) 2020-05-12
JP2020071488A (ja) 2020-05-07
CN117031607A (zh) 2023-11-10
EP3647839B1 (en) 2024-10-30
JP2023052306A (ja) 2023-04-11
TWI907760B (zh) 2025-12-11
CN111142179A (zh) 2020-05-12
US20240094450A1 (en) 2024-03-21
TW202316146A (zh) 2023-04-16

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