CN111023058A - Binary channels lamp house cooling system - Google Patents

Binary channels lamp house cooling system Download PDF

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Publication number
CN111023058A
CN111023058A CN201911373157.8A CN201911373157A CN111023058A CN 111023058 A CN111023058 A CN 111023058A CN 201911373157 A CN201911373157 A CN 201911373157A CN 111023058 A CN111023058 A CN 111023058A
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China
Prior art keywords
gas
channel
circulating
air
cooling fluid
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CN201911373157.8A
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CN111023058B (en
Inventor
席海冬
金鑫
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PHST Corp
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PHST Corp
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    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21LIGHTING
    • F21VFUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V29/00Protecting lighting devices from thermal damage; Cooling or heating arrangements specially adapted for lighting devices or systems
    • F21V29/50Cooling arrangements
    • F21V29/54Cooling arrangements using thermoelectric means, e.g. Peltier elements
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21LIGHTING
    • F21VFUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V29/00Protecting lighting devices from thermal damage; Cooling or heating arrangements specially adapted for lighting devices or systems
    • F21V29/50Cooling arrangements
    • F21V29/60Cooling arrangements characterised by the use of a forced flow of gas, e.g. air
    • F21V29/61Cooling arrangements characterised by the use of a forced flow of gas, e.g. air characterised by control arrangements
    • FMECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F21LIGHTING
    • F21VFUNCTIONAL FEATURES OR DETAILS OF LIGHTING DEVICES OR SYSTEMS THEREOF; STRUCTURAL COMBINATIONS OF LIGHTING DEVICES WITH OTHER ARTICLES, NOT OTHERWISE PROVIDED FOR
    • F21V29/00Protecting lighting devices from thermal damage; Cooling or heating arrangements specially adapted for lighting devices or systems
    • F21V29/50Cooling arrangements
    • F21V29/60Cooling arrangements characterised by the use of a forced flow of gas, e.g. air
    • F21V29/65Cooling arrangements characterised by the use of a forced flow of gas, e.g. air the gas flowing in a closed circuit

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  • Engineering & Computer Science (AREA)
  • General Engineering & Computer Science (AREA)
  • Cooling Or The Like Of Electrical Apparatus (AREA)

Abstract

The invention discloses a double-channel lamp box cooling system which comprises a gas circulating system, a cooling fluid system and a detection control system, wherein the gas circulating system comprises an air inlet channel, a tail end system, an air return channel, a gas heat exchanger and a gas confluence device, and the cooling fluid system comprises a first stop valve, a flow regulating valve and a second stop valve. The invention adopts the gas heat exchanger to take away the heat emitted by the lamp tube in the lamp box, the heat is transferred to the cooling medium through the gas heat exchanger, thereby realizing the temperature control of the whole system, the microcomputer processing system controls the opening of the cooling fluid flow regulating valve after analyzing the signals collected by the temperature sensor in the process, thereby controlling the flow of the cooling fluid, further realizing the temperature control of the whole system, having strong universality and meeting the working condition requirements of high temperature control requirement or special circulating gas and the like.

Description

Binary channels lamp house cooling system
Technical Field
The invention relates to the technical field of ultraviolet or infrared lamp boxes, in particular to a double-channel lamp box cooling system.
Background
Uv (ultraviolet) refers to ultraviolet rays and is classified into four types, vacuum, short wave, medium wave, long wave, and ultra-long wave. Ultraviolet refers to the generic term for radiation in the electromagnetic spectrum having wavelengths from 10nm to 400nm, which is not visible to humans. In 1801 german physics, curister found that a segment outside the violet end of the solar spectrum was able to sensitize silver bromide containing photographic negatives and thus found the presence of ultraviolet light.
Infrared is a short term for infrared, which is an electromagnetic wave. It can realize wireless transmission of data. Since 1800 s was discovered, it has found widespread use, such as infrared mouse, infrared printer, infrared keyboard, and the like. Infrared characteristics: the infrared transmission is a point-to-point transmission mode, is wireless, cannot be far away, needs to be aligned to the direction, cannot have an obstacle in the middle, namely cannot pass through a wall, and almost cannot control the progress of information transmission.
At present, the level of the semiconductor industry has risen to the important field of competition in the big country, and is a strategic demand that the recent stage of China must break through and occupy the high-point of the industry. The localization of the equipment mother machine in each link of the semiconductor is gradually promoted, and the ultraviolet curing equipment is an important link of the previous process and is also a link needing to be broken through, and is somewhat prominent in moisture-proof protective coatings, wafer masks, wafer pollution inspection, exposure of ultraviolet adhesive tapes and wafer polishing inspection. When the ultraviolet lamp works, a part of energy is converted into heat, and temperature control equipment is required to be introduced to ensure the reasonable working temperature range of the lamp tube, so that the matched temperature control equipment also needs to be matched and solved.
Disclosure of Invention
The purpose of the invention is as follows: in order to overcome the defects in the prior art, the dual-channel lamp box cooling system is provided, has strong universality, and can meet the working condition requirements of high temperature control requirements or special circulating gas and the like.
The technical scheme is as follows: in order to achieve the above object, the present invention provides a dual-channel lamp box cooling system, which comprises a gas circulation system, a cooling fluid system and a detection control system;
the gas circulation system comprises an air inlet channel, a tail end system, a return air channel, a gas heat exchanger and a gas confluence device, wherein the tail end system comprises two mutually independent lamp box systems which respectively comprise a first lamp box and a second lamp box, the air inlet channel is double-channel and respectively comprises a first channel and a second channel, the first channel and the second channel respectively comprise a first circulating fan, a first air outlet static pressure box, a second circulating fan and a second air outlet static pressure box, the first air outlet static pressure box and the second air outlet static pressure box are respectively and correspondingly communicated with the first lamp box and the second lamp box, the gas confluence device is arranged at the air inlet end of the air inlet channel, the gas heat exchanger is arranged at the air inlet end of the gas confluence device, and an air inlet and an air outlet of the return air channel are respectively arranged at the air outlet end of the tail end system and the air inlet end of the gas;
the cooling fluid system comprises a first stop valve, a flow regulating valve and a second stop valve, wherein the first stop valve and the second stop valve are respectively arranged at a cooling fluid medium inlet end and a cooling fluid medium outlet end of the gas heat exchanger, and the flow regulating valve is arranged between the cooling fluid medium inlet end and the first stop valve;
the detection control system comprises a fifth temperature sensor for detecting the inlet temperature of the cooling fluid medium, a sixth temperature sensor for detecting the outlet temperature of the cooling fluid medium, a first temperature sensor for detecting the outlet circulating gas temperature of the first circulating fan, a third temperature sensor for detecting the outlet circulating gas temperature of the second circulating fan, a first pressure sensor and a second temperature sensor for detecting the pressure and the temperature of the circulating gas in the first lamp box respectively, a second pressure sensor and a fourth temperature sensor for detecting the pressure and the temperature of the circulating gas in the second lamp box respectively, a third pressure sensor for detecting the pressure of the circulating gas of the return air and a gas concentration sensor for detecting the concentration of the circulating gas.
Furthermore, the gas concentration sensor is arranged on a gas concentration detection loop, an inlet of the gas concentration detection loop is positioned at an inlet of the return air channel, and an outlet of the gas concentration detection loop is positioned at an inlet of the gas heat exchanger.
Further, a gas circulating pump for introducing gas with the detected concentration is arranged on the gas concentration detection loop.
Furthermore, be provided with tonifying qi mouth and gas vent on the return air passageway respectively, be convenient for carry out tonifying qi and exhaust to the return air passageway, ensure that the pressure value in the return air passageway is in reasonable scope.
Furthermore, an air flow balancer is arranged in the air converging device, and circulating air can enter the air inlet channel more uniformly due to the arrangement of the air flow balancer.
Furthermore, the first circulating fan and the second circulating fan are variable-speed high-pressure fans.
Has the advantages that: compared with the prior art, the invention adopts the gas heat exchanger to take away the heat emitted by the lamp tube in the lamp box, and the heat is transferred to the cooling medium through the gas heat exchanger, thereby realizing the temperature control of the whole system. In the process, the gas of the closed circulating system is driven to circulate by the circulating fan, when the circulating gas passes through the lamp box, the heat around the lamp tube is taken away, the circulating gas enters the gas heat exchanger through the air channel in a circulating manner, and the circulating gas passing through the gas heat exchanger exchanges heat with cooling fluid. In the process, after signals are collected by the temperature sensor, the microcomputer processing system analyzes the signals and controls the opening of the cooling fluid flow regulating valve, so that the flow of the cooling fluid is controlled, and the temperature control of the whole system is realized. The universality is strong, and the working condition requirements of high temperature control requirement or special circulating gas and the like are met.
Drawings
FIG. 1 is a schematic diagram of the system of the present invention.
Wherein: 1-a gas confluence means; 2-an airflow balancer; 3-a first circulating fan; 4-a first temperature sensor; 5-a first air outlet static pressure box; 6-a first pressure sensor; 7-a first light box; 8-a second temperature sensor; 9-a second circulating fan; 10-a third temperature sensor; 11-a second air outlet static pressure box; 12-a second pressure sensor; 13-a second light box; 14-a fourth temperature sensor; 15-return air channel; 16-a third pressure sensor; 17-a gas heat exchanger; 18-air supplement port; 19-an exhaust port; 20-a first stop valve; 21-a flow regulating valve; 22-a fifth temperature sensor; 23-a sixth temperature sensor; 24-a second stop valve; 25-a gas concentration sensor; 26-gas circulation pump.
Detailed Description
The invention is further elucidated with reference to the drawings and the embodiments.
In this embodiment, UV curing refers to ultraviolet curing, which is an acronym for ultraviolet light, and curing refers to a process of converting a substance from a low molecule to a high molecule. UV curing generally refers to the curing conditions or requirements of coatings (paints), inks, adhesives (glues) or other potting sealants that require curing with ultraviolet light, which is different from thermal curing, curing with crosslinking agents (curing agents), natural curing, and the like; IrDA is already a set of standards, and IR receiving/transmitting components are also standardized products; a lithium battery pack: the lithium battery is an integral formed by combining single lithium batteries in series or in parallel; laser means "amplified by stimulated emission of light".
As shown in fig. 1, the present invention provides a dual channel lamp box cooling system, which comprises a gas circulation system, a cooling fluid system and a detection control system.
The gas circulation system comprises an air inlet channel, an end system, a return air channel 15, a gas heat exchanger 17 and a gas confluence device 1, wherein the end system comprises two mutually independent lamp box systems which respectively comprise a first lamp box 7 and a second lamp box 13, the air inlet channel is a double channel and respectively comprises a first channel and a second channel, the first channel and the second channel respectively comprise a first circulating fan 3, a first air outlet static pressure box 5 and a second circulating fan 9, and a second air outlet static pressure box 11, the first air outlet static pressure box 5 and the second air outlet static pressure box 11 are respectively communicated with the first lamp box 7 and the second lamp box 13 correspondingly, the gas confluence device 1 is arranged at the air inlet end of the air inlet channel, the gas heat exchanger 17 is arranged at the air inlet end of the gas confluence device 1, the air inlet and the air outlet of the return air channel are respectively arranged at the air outlet end of the end system and the air inlet end of the gas heat exchanger 17, the gas heat exchanger, A cooling fluidic medium outlet, an air inlet, and an air outlet.
The cooling fluid system comprises a first stop valve 20, a flow regulating valve 21 and a second stop valve 24, the first stop valve 20 and the second stop valve 24 being arranged at the cooling fluid medium inlet end and the cooling fluid medium outlet end of the gas heat exchanger 17, respectively, the flow regulating valve 21 being arranged between the cooling fluid medium inlet end and the first stop valve 20.
The detection control system comprises a fifth temperature sensor 22 for detecting the inlet temperature of the cooling fluid medium, a sixth temperature sensor 23 for detecting the outlet temperature of the cooling fluid medium, a first temperature sensor 4 for detecting the outlet circulating gas temperature of the first circulating fan 3, a third temperature sensor 8 for detecting the outlet circulating gas temperature of the second circulating fan 9, a first pressure sensor 6 and a second temperature sensor 10 for detecting the pressure and the temperature of the circulating gas in the first lamp box 7 respectively, a second pressure sensor 12 and a fourth temperature sensor 14 for detecting the pressure and the temperature of the circulating gas in the second lamp box 13 respectively, a third pressure sensor 16 for detecting the pressure of the circulating gas in the return air channel 15 and a gas concentration sensor 25 for detecting the concentration of the circulating gas.
Specific positions of the fifth temperature sensor 22, the sixth temperature sensor 23, the first temperature sensor 4, the third temperature sensor 8, the first pressure sensor 6, the second temperature sensor 10, the second pressure sensor 12, the fourth temperature sensor 14, the third pressure sensor 16, and the gas concentration sensor 25 in the present embodiment are as shown in fig. 1.
In the embodiment, the gas concentration sensor 25 is arranged on a gas concentration detection loop, the inlet of the gas concentration detection loop is positioned at the inlet of the air return channel 15, the outlet of the gas concentration detection loop is positioned at the air inlet of the gas heat exchanger 17, and the gas concentration detection loop is provided with a gas circulating pump 26 for introducing gas with detected concentration; the air return channel 15 is respectively provided with an air supplementing port 18 and an air exhaust port 19; an airflow balancer 2 is arranged in the gas confluence device 1; the first circulating fan 3 and the second circulating fan 9 are variable-speed high-pressure fans.
In this example, the cooling system is applied to a lamp box such as Ultraviolet (UV) and Infrared (IR), and the UV curing technique is a technique of irradiating UV curing resin such as a coating material containing a photo-polymerization prepolymer, a photo-polymerization monomer and a photo-initiator, an adhesive or ink with UV light (having a main wavelength of 365nm, in a special case of 254nm), and then rapidly curing and drying the resin in seconds. UV is widely applied to the fields of food, electronics, semiconductors, liquid crystal displays, plasma televisions, crystal vibrators, precision devices, chemical engineering, medicine and the like. The specific flow path of the circulating gas is as follows:
the air supplementing port 18 is opened at the initial stage of system operation to supplement air until the components of the circulating gas of the system are stable and simultaneously the gas with different components is discharged through the air exhaust port 19, the first circulating fan 3 and the second circulating fan 9 are respectively utilized to drive the circulating gas to move from the air return channel 15 to the air supply channel, the circulating gas of the first channel respectively flows through the first air outlet static pressure box 5 and the first lamp box 7, the circulating gas of the second channel respectively flows through the second air outlet static pressure box 11 and the second lamp box 13, and the circulating gas flows through the air return channel 15 from the air inlet of the gas heat exchanger 17 and then enters the gas confluence device 1, so that the gas circulation is formed. The flow path can be expressed as:
the first and second circulation fans 3 and 9 → the first and second outlet plenum boxes 5 and 11 → the first and second lamp boxes 7 and 13 → the return air passage 15 → the gas heat exchanger 17 → the first and second circulation fans 3 and 9.
In this embodiment, the circulating gas enters the gas heat exchanger 17 and then exchanges heat with the cooling fluid medium in the gas heat exchanger 17, so as to cool the circulating gas, and when the cooled circulating gas passes through the first lamp box 7 and the second lamp box 13, the heat around the lamp tube is taken away respectively, and then the circulating gas returns to the gas heat exchanger 17 through the return air channel 15, and the heat in the lamp box is transferred to the cooling fluid medium in the gas heat exchanger 17 in the whole process, thereby realizing the temperature control of the whole system.
In the operation process of the system, the first temperature sensor 4 and the second temperature sensor 10 respectively acquire real-time temperatures in the first lamp box 7 and the second lamp box 13 and transmit the real-time temperatures to the microcomputer processing system, the microcomputer processing system analyzes the temperatures and controls the opening degree of the regulating valve 21, and then the flow of the cooling fluid medium is controlled, so that the temperature control of the gas heat exchanger 17 on the circulating gas is regulated, and the temperature precision control of the first lamp box 7, the second lamp box 13 and the whole system is realized.

Claims (6)

1. A binary channels lamp house cooling system which characterized in that: comprises a gas circulation system, a cooling fluid system and a detection control system;
the gas circulation system comprises an air inlet channel, a tail end system, a return air channel, a gas heat exchanger and a gas confluence device, wherein the tail end system comprises two mutually independent lamp box systems which respectively comprise a first lamp box and a second lamp box, the air inlet channel is double-channel and respectively comprises a first channel and a second channel, the first channel and the second channel respectively comprise a first circulating fan, a first air outlet static pressure box, a second circulating fan and a second air outlet static pressure box, the first air outlet static pressure box and the second air outlet static pressure box are respectively and correspondingly communicated with the first lamp box and the second lamp box, the gas confluence device is arranged at the air inlet end of the air inlet channel, the gas heat exchanger is arranged at the air inlet end of the gas confluence device, and an air inlet and an air outlet of the return air channel are respectively arranged at the air outlet end of the tail end system and the air inlet end of the gas;
the cooling fluid system comprises a first stop valve, a flow regulating valve and a second stop valve, wherein the first stop valve and the second stop valve are respectively arranged at a cooling fluid medium inlet end and a cooling fluid medium outlet end of the gas heat exchanger, and the flow regulating valve is arranged between the cooling fluid medium inlet end and the first stop valve;
the detection control system comprises a fifth temperature sensor for detecting the inlet temperature of the cooling fluid medium, a sixth temperature sensor for detecting the outlet temperature of the cooling fluid medium, a first temperature sensor for detecting the outlet circulating gas temperature of the first circulating fan, a third temperature sensor for detecting the outlet circulating gas temperature of the second circulating fan, a first pressure sensor and a second temperature sensor for detecting the pressure and the temperature of the circulating gas in the first lamp box respectively, a second pressure sensor and a fourth temperature sensor for detecting the pressure and the temperature of the circulating gas in the second lamp box respectively, a third pressure sensor for detecting the pressure of the circulating gas of the return air and a gas concentration sensor for detecting the concentration of the circulating gas.
2. The dual channel light box cooling system of claim 1, wherein: the gas concentration sensor is arranged on a gas concentration detection loop, an inlet of the gas concentration detection loop is positioned at an inlet of the return air channel, and an outlet of the gas concentration detection loop is positioned at an inlet of the gas heat exchanger.
3. The dual channel light box cooling system of claim 2, wherein: and the gas concentration detection loop is provided with a gas circulating pump for introducing gas with detection concentration.
4. The dual channel light box cooling system of claim 1, wherein: and the return air channel is respectively provided with an air supplementing port and an air exhaust port.
5. The dual channel light box cooling system of claim 1, wherein: and an airflow balancer is arranged in the gas confluence device.
6. The dual channel light box cooling system of claim 1, wherein: and the first circulating fan and the second circulating fan are both variable-speed high-pressure fans.
CN201911373157.8A 2019-12-27 2019-12-27 Binary channels lamp house cooling system Active CN111023058B (en)

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CN111023058B CN111023058B (en) 2021-07-13

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112985827A (en) * 2021-01-20 2021-06-18 德国Bf工程公司 A lamp house structure for complex environment
CN113438860A (en) * 2021-06-08 2021-09-24 武汉中仪物联技术股份有限公司 UV ultraviolet curing prosthetic devices's cooling system

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102297379A (en) * 2011-05-31 2011-12-28 无锡爱迪信光电科技有限公司 Solar LED (light emitting diode) lamp box for service station
CN103838267A (en) * 2012-11-20 2014-06-04 罗爱春 Temperature control system for neon lamp box
CN105704982A (en) * 2015-12-18 2016-06-22 上海联影医疗科技有限公司 Cooling system used for medical imaging device
EP3064985A1 (en) * 2015-03-06 2016-09-07 Ricoh Company, Ltd. Temperature control device, image display apparatus and vehicle
WO2018131256A1 (en) * 2017-01-16 2018-07-19 ソニー株式会社 Illuminating device, control device, and control method
CN208108040U (en) * 2018-04-26 2018-11-16 深圳市灏天光电有限公司 LED cooling device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102297379A (en) * 2011-05-31 2011-12-28 无锡爱迪信光电科技有限公司 Solar LED (light emitting diode) lamp box for service station
CN103838267A (en) * 2012-11-20 2014-06-04 罗爱春 Temperature control system for neon lamp box
EP3064985A1 (en) * 2015-03-06 2016-09-07 Ricoh Company, Ltd. Temperature control device, image display apparatus and vehicle
CN105704982A (en) * 2015-12-18 2016-06-22 上海联影医疗科技有限公司 Cooling system used for medical imaging device
WO2018131256A1 (en) * 2017-01-16 2018-07-19 ソニー株式会社 Illuminating device, control device, and control method
CN208108040U (en) * 2018-04-26 2018-11-16 深圳市灏天光电有限公司 LED cooling device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112985827A (en) * 2021-01-20 2021-06-18 德国Bf工程公司 A lamp house structure for complex environment
CN113438860A (en) * 2021-06-08 2021-09-24 武汉中仪物联技术股份有限公司 UV ultraviolet curing prosthetic devices's cooling system

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