CN110966167A - Piezoelectric micropump - Google Patents
Piezoelectric micropump Download PDFInfo
- Publication number
- CN110966167A CN110966167A CN201911351963.5A CN201911351963A CN110966167A CN 110966167 A CN110966167 A CN 110966167A CN 201911351963 A CN201911351963 A CN 201911351963A CN 110966167 A CN110966167 A CN 110966167A
- Authority
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- China
- Prior art keywords
- pump
- layer
- magnetic
- magnetic composite
- valve
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000002131 composite material Substances 0.000 claims abstract description 27
- 239000000463 material Substances 0.000 claims abstract description 18
- 239000012528 membrane Substances 0.000 claims abstract description 12
- 239000000696 magnetic material Substances 0.000 claims abstract description 10
- 239000002861 polymer material Substances 0.000 claims abstract description 9
- 229920001721 Polyimide Polymers 0.000 claims description 5
- 239000000741 silica gel Substances 0.000 claims description 3
- 229910002027 silica gel Inorganic materials 0.000 claims description 3
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicium dioxide Chemical compound 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O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 3
- 238000005530 etching Methods 0.000 claims description 2
- 229920002799 BoPET Polymers 0.000 claims 1
- 239000010410 layer Substances 0.000 description 27
- 239000007788 liquid Substances 0.000 description 7
- 239000012530 fluid Substances 0.000 description 5
- 239000010408 film Substances 0.000 description 4
- 239000004642 Polyimide Substances 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000010586 diagram Methods 0.000 description 1
- 239000003814 drug Substances 0.000 description 1
- 229940079593 drugs Drugs 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 238000005286 illumination Methods 0.000 description 1
- 239000000203 mixture Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
- 230000002194 synthesizing Effects 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 235000012431 wafers Nutrition 0.000 description 1
Classifications
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- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/02—Machines, pumps, or pumping installations having flexible working members having plate-like flexible members, e.g. diaphragms
- F04B43/04—Pumps having electric drive
- F04B43/043—Micropumps
- F04B43/046—Micropumps with piezo-electric drive
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B43/00—Machines, pumps, or pumping installations having flexible working members
- F04B43/0009—Special features
- F04B43/0054—Special features particularities of the flexible members
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F04—POSITIVE - DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS FOR LIQUIDS OR ELASTIC FLUIDS
- F04B—POSITIVE-DISPLACEMENT MACHINES FOR LIQUIDS; PUMPS
- F04B53/00—Component parts, details or accessories not provided for in, or of interest apart from, groups F04B1/00 - F04B23/00 or F04B39/00 - F04B47/00
- F04B53/10—Valves; Arrangement of valves
- F04B53/102—Disc valves
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
- F05C2225/00—Synthetic polymers, e.g. plastics; Rubber
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
- F05C2225/00—Synthetic polymers, e.g. plastics; Rubber
- F05C2225/02—Rubber
-
- F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
- F05—INDEXING SCHEMES RELATING TO ENGINES OR PUMPS IN VARIOUS SUBCLASSES OF CLASSES F01-F04
- F05C—INDEXING SCHEME RELATING TO MATERIALS, MATERIAL PROPERTIES OR MATERIAL CHARACTERISTICS FOR MACHINES, ENGINES OR PUMPS OTHER THAN NON-POSITIVE-DISPLACEMENT MACHINES OR ENGINES
- F05C2225/00—Synthetic polymers, e.g. plastics; Rubber
- F05C2225/10—Polyimides, e.g. Aurum
Abstract
The invention protects a piezoelectric micropump, which comprises a piezoelectric vibrator, a magnetic composite microvalve and a pump body, wherein the magnetic composite microvalve comprises a magnetic composite membrane and a supporting beam, the magnetic composite membrane is formed by compounding a surface polymer material layer, a bottom flexible material layer and a middle magnetic material layer, and the magnetic composite microvalve is supported by the supporting beam and is positioned above a pump inlet and a pump outlet of the pump body respectively; the inlet and the outlet of the pump are provided with magnetic attraction rings, and the inlet and the outlet are closed by utilizing the attraction force of the magnetic attraction rings and the magnetic composite micro valve. The invention adopts the multilayer magnetic composite micro valve, can improve the air tightness of the micro pump, prevent reverse leakage and increase the output pressure of the micro pump.
Description
Technical Field
The invention belongs to the field of microfluid control, and particularly relates to a microfluid pump.
Background
The micropump is used as a core control element in a microfluidic system, and has wide application prospects in the fields of drug delivery, synthesis, micro-fluid supply, precise control and the like.
At present, most of the domestic and foreign research on micropumps is based on piezoelectric thin film pumps driven by piezoelectric wafers. The piezoelectric film pump mainly comprises a piezoelectric vibrator, a pump valve and a pump body. During work, alternating current is applied to two ends of the piezoelectric vibrator, the piezoelectric vibrator generates radial compression under the action of an electric field, and stress is generated inside the cavity, so that the piezoelectric vibrator is bent and deformed. When the piezoelectric vibrator is bent in the positive direction, the piezoelectric vibrator is stretched, the volume of a pump cavity is increased, the pressure of fluid in the cavity is reduced, a pump valve is opened, and liquid enters the pump cavity; when the piezoelectric vibrator is bent reversely, the piezoelectric vibrator contracts, the volume of a pump cavity is reduced, the pressure of fluid in the cavity is increased, a pump valve is closed, and the liquid in the pump cavity is extruded and discharged to form smooth continuous directional flow.
The micro valve is an important element for controlling the direction of fluid, can allow liquid or gas to flow in one direction, and has direct influence on the opening and overflowing characteristics of the micro pump, including reverse leakage, opening pressure, response time, manufacturing cost and the like. The micro valves in the micro pump are divided into two categories, namely an active valve and a passive valve, and the passive valve is simple in structure, light in weight, low in manufacturing cost and wide in application. The passive valve is usually made of SU-8, polyimide and the like, but has the problems of poor air tightness, reverse leakage and the like. In order to solve the problem of unidirectional flow of microfluid on the microfluidic chip, Gunn illumination and the like design an SU-8 glue miniature valve plate. The valve plate has the characteristics of low elastic modulus and constant, small opening pressure, easy processing and the like, but still has the problem of reverse leakage.
Generally speaking, the passive micro valve has a simple structure, is widely applied to a micro pump, and has important influence on the characteristics of the micro pump. However, most of the reported micropump valve structures have only one polymer film, so that the airtightness is not good enough, the reverse leakage is large, and the output flow and the output pressure of the pump are influenced.
Disclosure of Invention
The invention provides a piezoelectric micropump, which adopts a multilayer magnetic composite microvalve and aims to improve the air tightness of the micropump, prevent reverse leakage and increase the output pressure of the micropump.
The technical scheme of the invention is as follows:
a piezoelectric micropump mainly comprises a piezoelectric vibrator, a magnetic and magnetic composite microvalve and a pump body.
The magnetic composite micro valve comprises a magnetic composite membrane and a supporting structure. The magnetic composite diaphragm is formed by compounding a high polymer material layer on the surface layer, a flexible material layer on the bottom layer and a magnetic material layer in the middle layer, and the magnetic composite micro valve is supported by a supporting structure and is positioned above a pump inlet and a pump outlet of the pump body respectively. The inlet and the outlet of the pump body are provided with magnetic attraction rings, and the combination between the pump body and the micro valve is increased by utilizing the attraction force of the magnetic attraction rings and the magnetic material layer of the magnetic composite micro valve and the deformation of the flexible material layer to seal the inlet and the outlet, so that the air tightness of the micro pump is improved, and the reverse leakage of the internal liquid or gas is prevented. At the same time, the attractive prestress of the magnetic material further increases the output pressure of the pump.
The polymer material layer of top layer can adopt other macromolecular material preparation such as polyimide, has flexibility and high strength, if adopt polyimide film, SU8 membrane, PET membrane etc..
The middle layer adopts a magnetic film, and magnets attract each other, so that the pump body and the micro valve are combined more tightly, and the air tightness of the piezoelectric pump is improved.
The flexible material layer of bottom can adopt other flexible materials such as silica gel or rubber, and the pump body produces the prestressing force with the magnetic attraction of pump valve, can cause elastic material's deformation.
The piezoelectric micropump provided by the invention depends on the magnetic attraction between the pump body and the microvalve, the flexible layer is deformed by the attraction force between the pump body and the microvalve and is tightly attached to the liquid inlet and outlet, so that excellent air tightness is obtained, the reverse leakage of liquid is inhibited, and the output capacity of the pump is improved. The presence of the magnetic prestress increases the microvalve opening pressure. When the piezoelectric micropump works, the opening and closing of the microvalve can be adjusted only when the internal and external pressure difference is greater than the opening pressure of the microvalve, so that the output pressure of the piezoelectric micropump is improved. In addition, the micropump has the characteristics of simple structure and easiness in implementation.
Drawings
FIG. 1 is a schematic diagram of a piezoelectric micro-pump;
FIG. 2 is a cross-sectional view A-A of FIG. 1;
FIG. 3 is a top view of the underlying structure of the micro-pump;
figure 4 is a schematic view of a microvalve structure,
fig. 5 is a sectional view taken along line B-B of fig. 4.
Detailed Description
The present invention will be described in further detail with reference to the accompanying drawings. It should be noted that the drawings are only for the purpose of explaining the present invention, are schematic illustrations of embodiments of the present invention, and are not to be construed as limiting the present invention.
Referring to fig. 1 and 2, the piezoelectric micro pump may be divided into an upper layer structure and a lower layer structure. The upper layer structure mainly comprises a piezoelectric vibrator 3 and an elastic diaphragm 4. The lower layer structure comprises a pump body 1, a pump cavity 2, a pump outlet 5, a pump inlet 6 and a magnetic composite micro valve 7. The piezoelectric vibrator 3 and the elastic membrane 4 are directly bonded together, the elastic membrane 4 is bonded with the pump body 1, and the pump cavity 2 is formed due to the fact that the interior of the pump body is sunken. The pump outlet 5 and the pump inlet 6 are respectively provided with a magnetic composite micro valve 7 which is a passive opening valve.
Referring to fig. 4 and 5, the magnetic composite microvalve 7 includes a magnetic composite membrane 9 and four support beams 10 around the magnetic composite membrane 9, and the magnetic composite membrane 9 is composed of a top polymer material layer 9c, a middle magnetic material layer 9b and a bottom flexible material layer 9 a. In this embodiment, the polymer material layer 9c is made of polyimide, the middle magnetic material layer 9b is made of a magnetic film, and the flexible material layer 9a is made of silica gel.
The supporting beam 10 and the high polymer material layer 9c are made of the same layer of material, four supporting beams and a valve frame are formed by etching the material layer, one end of each supporting beam is integrally connected with the edge of the molecular material layer, and the other end of each supporting beam is integrally connected with the valve frame. The valve frame is bonded to the pump outlet 5 and the pump inlet 6 such that the support beam 10 supports the magnetic composite diaphragm 9 above the pump outlet 5 and the pump inlet 6 in an open-closed relationship therewith.
Referring to fig. 3, the magnetic attraction ring 8 is arranged at the pump outlet 5 and the pump inlet 6, and the pump outlet 5 and the pump inlet 6 are closed by utilizing the attraction force between the magnetic attraction ring 8 and the magnetic material layer 9b, so that the air tightness of the micropump is improved, and the reverse leakage of the internal liquid or gas is prevented.
When the piezoelectric micropump works, the microvalve still maintains the original state when the internal and external pressure difference is less than the opening pressure of the microvalve; when the internal and external pressure difference is greater than the opening pressure of the micro valve, the micro valve can be adjusted to be opened and closed, and the existence of magnetic prestress increases the opening pressure of the micro valve, so that the output pressure of the micro pump is improved. Meanwhile, due to the magnetic attraction between the pump body and the micro valve, the micro valve and the pump body are combined more tightly, the air tightness of the micro pump is improved, and the reverse leakage of fluid is effectively prevented.
Claims (5)
1. The piezoelectric micropump comprises a piezoelectric vibrator, a microvalve and a pump body, and is characterized in that: the micro valve is a magnetic composite micro valve and comprises a magnetic composite membrane and a supporting structure, wherein the magnetic composite membrane is formed by compounding a surface polymer material layer, a bottom flexible material layer and a middle magnetic material layer, and the magnetic composite micro valve is supported by the supporting structure and is positioned above a pump inlet and a pump outlet of a pump body respectively; the magnetic attraction rings are arranged on the pump inlet and the pump outlet, and the suction force of the magnetic attraction rings and the magnetic material layer of the magnetic composite micro valve and the deformation of the flexible material layer are utilized to seal the inlet and the outlet, so that the air tightness of the micro valve is improved, and the reverse leakage is reduced.
2. The piezoelectric micropump of claim 1, wherein: the magnetic material layer is a magnetic film.
3. The piezoelectric micropump of claim 1, wherein: the polymer material layer has good flexibility and high strength, and can adopt polyimide film, SU8 film, PET film, etc.
4. The piezoelectric micropump of claim 1, wherein: the flexible material layer of the bottom layer is made of flexible materials such as silica gel or rubber.
5. A piezoelectric micropump according to claim 1, 2, 3 or 4, wherein: the supporting structure and the high polymer material layer are made of the same layer of material, a plurality of supporting beams and a valve frame are formed through etching, one end of each supporting beam is integrally connected with the edge of the molecular material layer of the magnetic composite micro valve, and the other end of each supporting beam is integrally connected with the valve frame.
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| CN201911351963.5A CN110966167B (en) | 2019-12-25 | 2019-12-25 | Piezoelectric micropump |
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