CN110449400A - A kind of Environmental-protecting treater and its operating method for the production of chip silicon - Google Patents
A kind of Environmental-protecting treater and its operating method for the production of chip silicon Download PDFInfo
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- CN110449400A CN110449400A CN201910790182.XA CN201910790182A CN110449400A CN 110449400 A CN110449400 A CN 110449400A CN 201910790182 A CN201910790182 A CN 201910790182A CN 110449400 A CN110449400 A CN 110449400A
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- production
- electrocontrolled tee
- reactor tank
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- 229910052710 silicon Inorganic materials 0.000 title claims abstract description 47
- 239000010703 silicon Substances 0.000 title claims abstract description 47
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 33
- 238000011017 operating method Methods 0.000 title claims abstract description 9
- 239000007788 liquid Substances 0.000 claims abstract description 62
- 238000005554 pickling Methods 0.000 claims abstract description 42
- 239000003814 drug Substances 0.000 claims abstract description 38
- 239000002699 waste material Substances 0.000 claims abstract description 36
- 238000006243 chemical reaction Methods 0.000 claims abstract description 19
- 239000012535 impurity Substances 0.000 claims abstract description 13
- 238000002156 mixing Methods 0.000 claims abstract description 12
- 239000010865 sewage Substances 0.000 claims abstract description 12
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 44
- 238000001914 filtration Methods 0.000 claims description 26
- 238000004062 sedimentation Methods 0.000 claims description 20
- 238000011068 loading method Methods 0.000 claims description 13
- 239000004576 sand Substances 0.000 claims description 12
- 239000004575 stone Substances 0.000 claims description 12
- 230000007246 mechanism Effects 0.000 claims description 11
- 239000002210 silicon-based material Substances 0.000 claims description 11
- 230000001376 precipitating effect Effects 0.000 claims description 6
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 5
- 230000000694 effects Effects 0.000 claims description 4
- 230000009183 running Effects 0.000 claims description 4
- 230000008878 coupling Effects 0.000 claims description 3
- 238000010168 coupling process Methods 0.000 claims description 3
- 238000005859 coupling reaction Methods 0.000 claims description 3
- -1 pickling tube (1) Chemical compound 0.000 claims description 3
- 239000007787 solid Substances 0.000 claims description 2
- 238000003860 storage Methods 0.000 claims description 2
- 229940079593 drug Drugs 0.000 claims 2
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 10
- 238000000034 method Methods 0.000 description 7
- MHAJPDPJQMAIIY-UHFFFAOYSA-N Hydrogen peroxide Chemical compound OO MHAJPDPJQMAIIY-UHFFFAOYSA-N 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 230000009471 action Effects 0.000 description 3
- 238000004140 cleaning Methods 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- ZKQDCIXGCQPQNV-UHFFFAOYSA-N Calcium hypochlorite Chemical compound [Ca+2].Cl[O-].Cl[O-] ZKQDCIXGCQPQNV-UHFFFAOYSA-N 0.000 description 2
- 239000005708 Sodium hypochlorite Substances 0.000 description 2
- 239000007844 bleaching agent Substances 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 230000005611 electricity Effects 0.000 description 2
- 230000007613 environmental effect Effects 0.000 description 2
- 239000005416 organic matter Substances 0.000 description 2
- 238000007254 oxidation reaction Methods 0.000 description 2
- 239000002244 precipitate Substances 0.000 description 2
- 230000008569 process Effects 0.000 description 2
- SUKJFIGYRHOWBL-UHFFFAOYSA-N sodium hypochlorite Chemical compound [Na+].Cl[O-] SUKJFIGYRHOWBL-UHFFFAOYSA-N 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 description 1
- 239000006004 Quartz sand Substances 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 239000004411 aluminium Substances 0.000 description 1
- XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 description 1
- 229910052782 aluminium Inorganic materials 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 230000008859 change Effects 0.000 description 1
- 239000012295 chemical reaction liquid Substances 0.000 description 1
- 150000001875 compounds Chemical class 0.000 description 1
- 239000010949 copper Substances 0.000 description 1
- 229910052802 copper Inorganic materials 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 239000003344 environmental pollutant Substances 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- 238000007689 inspection Methods 0.000 description 1
- 229910021421 monocrystalline silicon Inorganic materials 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000001259 photo etching Methods 0.000 description 1
- 231100000719 pollutant Toxicity 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
- 239000000047 product Substances 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000002994 raw material Substances 0.000 description 1
- 230000035484 reaction time Effects 0.000 description 1
- 230000004044 response Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
- 239000004065 semiconductor Substances 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- SBEQWOXEGHQIMW-UHFFFAOYSA-N silicon Chemical compound [Si].[Si] SBEQWOXEGHQIMW-UHFFFAOYSA-N 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
- 238000006467 substitution reaction Methods 0.000 description 1
- 239000013589 supplement Substances 0.000 description 1
- 239000010409 thin film Substances 0.000 description 1
- 238000011282 treatment Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B13/00—Accessories or details of general applicability for machines or apparatus for cleaning
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/08—Cleaning involving contact with liquid the liquid having chemical or dissolving effect
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B08—CLEANING
- B08B—CLEANING IN GENERAL; PREVENTION OF FOULING IN GENERAL
- B08B3/00—Cleaning by methods involving the use or presence of liquid or steam
- B08B3/04—Cleaning involving contact with liquid
- B08B3/10—Cleaning involving contact with liquid with additional treatment of the liquid or of the object being cleaned, e.g. by heat, by electricity or by vibration
- B08B3/14—Removing waste, e.g. labels, from cleaning liquid
Landscapes
- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- General Chemical & Material Sciences (AREA)
- Treatment Of Water By Oxidation Or Reduction (AREA)
Abstract
The invention discloses a kind of Environmental-protecting treaters for the production of chip silicon, including pickling tube, the lower end side of the pickling tube, which is run through, is equipped with drain pipe, one end of the drain pipe is connected with the first Electrocontrolled tee valve, the two sides of first Electrocontrolled tee valve are respectively connected with sewage pipe, one end of two sewage pipes is run through equipped with reactor tank, the reactor tank is equipped with mixing arrangement, the upper end side of two reactor tanks is run through equipped with grug transportation tube, the second Electrocontrolled tee valve is connected between two grug transportation tubes jointly, one end of second Electrocontrolled tee valve is connected with medicine storing pot；The invention also provides a kind of operating methods of Environmental-protecting treater for the production of chip silicon.The present invention can guarantee the reaction duration between waste liquid and medicament, and waste liquid and medicament can be made well sufficiently to react, and can promote processing quality and efficiency to waste liquid, moreover it is possible to the impurity in waste liquid is filtered and be precipitated, preferably protect environment.
Description
Technical field
The present invention relates to chip silicon production equipment technology more particularly to a kind of environmental protection treatments for the production of chip silicon
Equipment and its operating method.
Background technique
The raw material wafer of chip, the ingredient of wafer are silicon, silicon be by quartz sand it is concise come out, wafer is element silicon
(99.999%) is purified, silicon crystal bar is made followed by by these pure silicons, becomes the material of the crystalline semiconductor of manufacture integrated circuit
Material, being sliced is exactly chip manufacturing specifically required wafer.Wafer is thinner, and the cost of production is lower, but will to technique
That asks is higher.
It is used as base using monocrystalline silicon wafer crystal, the groups such as MOSFET or BJT then is made using technologies such as photoetching, doping, CMP
Part recycles film and CMP technique that conducting wire is made, so just completes chip manufacturing.Because of product performance demands and cost viewpoint, lead
Line can be divided into aluminium technique and process for copper.Main technology can be divided into following a few major class: yellow light lithographic, etching, diffusion, thin
Film, planarization is made, metallizing is made.
In order to promote the quality of chip, the purity for producing silicon used in chip is required, in chip silicon production process
It needs to react silicon using pickling tube, to remove its internal impurity, the quality of material is promoted, to promote final core
The quality of piece silicon, the solution in existing pickling tube cannot be handled well after the completion of cleaning, and in processing,
It cannot be guaranteed that the mixing quality of itself and pharmacy response, reduces processing quality, it is unfavorable for protecting environment, for this purpose, we have proposed
A kind of Environmental-protecting treater and its operating method for the production of chip silicon solves the above problems.
Summary of the invention
The purpose of the present invention is to solve disadvantages existing in the prior art, and the one kind proposed is produced for chip silicon
Environmental-protecting treater and its operating method.
To achieve the goals above, present invention employs following technical solutions:
A kind of Environmental-protecting treater for the production of chip silicon, including pickling tube, the lower end side of the pickling tube, which is run through, to be equipped with
Drain pipe, one end of the drain pipe are connected with the first Electrocontrolled tee valve, and the two sides of first Electrocontrolled tee valve are respectively connected with
Sewage pipe, one end of two sewage pipes are run through equipped with reactor tank, and the reactor tank is equipped with mixing arrangement, two reactor tanks
Upper end side is run through equipped with grug transportation tube, is connected with the second Electrocontrolled tee valve between two grug transportation tubes jointly, and described second is automatically controlled
One end of triple valve is connected with medicine storing pot, and the lower end of two reactor tanks is run through equipped with connecting tube, and one end of two connecting tubes is total
With third Electrocontrolled tee valve is connected with, one end of the third Electrocontrolled tee valve is connected with filtering ponds, the lower end of the filtering ponds
Side, which is run through, is equipped with outlet pipe, and one end of the outlet pipe is connected with sedimentation basin.
Preferably, the mixing arrangement includes the driving motor being mounted in reactor tank, the output shaft of the driving motor
End is fixed with connecting shaft by shaft coupling, and the lower end of the connecting shaft extends in reactor tank, and the lower end of the connecting shaft is solid
Surely there is turntable, spacing are fixed there are four cross bar on one week side wall of the turntable etc., are arranged with first rotating shaft on the cross bar, institute
The upper end for stating first rotating shaft is fixed with gear, and ring gear is fixed on one week side wall of the reactor tank, and four gears are and interior
Gear ring is meshed, and the lower end of the turntable is fixed with the second shaft, equidistant in second shaft and four first rotating shafts
It is fixed with more than two paddles, the lower end of second shaft and four first rotating shafts is equipped with bindiny mechanism jointly, described
Bindiny mechanism is connected with reactor tank.
Preferably, the bindiny mechanism includes the placement plate for being rotatably connected on four first rotating shaft lower ends, and described second turn
The lower end of axis is rotatably connected to loading plate, and there are four connecting rod, four companies for spacing fixation on one week side wall of the loading plate etc.
One end of extension bar is separately fixed at the side of four placement plates, and the lower end of the loading plate is rotatably connected on the bottom in reactor tank
Portion.
Preferably, carrying basket is placed in the pickling tube, the upper end quadrangle of the carrying basket is respectively and fixedly provided with lifting lug, described
Through equipped with inlet tube on one end side wall in pickling tube.
Preferably, the upper end side of the medicine storing pot is hinged with cover board, and the side of the cover board is fixed with riser, described perpendicular
It is arranged with slide bar on plate, spring is arranged on the slide bar, the both ends of the spring are separately fixed at one end and the riser of slide bar
Side, the medicine storing pot be equipped with blind hole, one end of the slide bar extends in blind hole.
Preferably, the lower end of the cover board and the upper end of medicine storing pot are respectively and fixedly provided with rubber pad.Preferably, in the filtering ponds
Bottom be equipped with sand stone layer, the upper end of the sand stone layer is equipped with pebble layer.Preferably, the lower end side of the sedimentation basin
Through drainpipe is equipped with, valve is installed on the drainpipe.Preferably, it is fixed with lantern ring jointly in four placement plates.This hair
A kind of bright operating method that also proposed Environmental-protecting treater for the production of chip silicon, comprising the following steps:
S1, in order to reduce the impurity in silicon, need to carry out pickling to silicon, silicon material be placed into carrying basket, and by suspender and
Lifting lug connection, convenient for silicon material to be placed into pickling tube, after the completion of pickling, the waste liquid in pickling tube is discharged by drain pipe；
S2, it selects to drain into waste liquid in one of reactor tank by the first Electrocontrolled tee valve of control, waste liquid passes through sewage pipe
Into in selected reactor tank, the medicament in medicine storing pot enters the reactor tank through grug transportation tube by the effect of the second Electrocontrolled tee valve
It is interior；
S3, driving motor running, so as to make connecting shaft drive turntable rotation, so as to rotate the second shaft, while turntable
First rotating shaft is driven to rotate by the center of circle of the second shaft by cross bar, gear and ring gear are meshed, and first rotating shaft can be made to rotate,
So as to rotate paddle, the quality of mixing is promoted, the quality of reaction is improved, loading plate and four placement plates guarantee first turn
Axis and the second shaft stable motion；
S4, liquid after the reaction was completed enter third Electrocontrolled tee valve by connecting tube, hence into being filtered in filtering ponds；
S5, enter sand stone layer after passing through pebble layer in filtering ponds, so as to filter out the intracorporal impurity of liquid well, then lead to
Outlet pipe is crossed to enter in sedimentation basin；
S6, liquid enter precipitating in sedimentation basin, work at the same time the water quality situation that personnel detect liquid, arrange convenient for being controlled by valve
Can water pipe the liquid in sedimentation basin be discharged.
Compared with prior art, the beneficial effects of the present invention are:
1, by the cooperation of the components such as multiple Electrocontrolled tee valves, reactor tank, filtering ponds and sedimentation basin, consequently facilitating controlling waste liquid
Flow direction, convenient for guaranteeing the reaction time between waste liquid and medicament, to help to promote reaction mass, and can be well to anti-
The intracorporal impurity of liquid is adequately filtered and is precipitated after answering, and then helps to be promoted the quality of liquid, avoids pollution environment；
2, by the cooperation of the components such as reactor tank and mixing arrangement, so as to mix waste liquid and medicament adequately, can make
Paddle quick rotation in reactor tank, the further reaction mass for promoting solution and medicament, removes the pollutant in waste liquid,
Preferably promote the quality of waste liquid；
In conclusion the present invention can guarantee the reaction duration between waste liquid and medicament, and waste liquid and medicament can be made to fill well
Divide reaction, processing quality and the efficiency to waste liquid can be promoted, moreover it is possible to the impurity in waste liquid is filtered and be precipitated, preferably protected
Retaining ring border.
Detailed description of the invention
Fig. 1 is a kind of flow chart of Environmental-protecting treater for the production of chip silicon proposed by the present invention；
Fig. 2 is a kind of attachment structure schematic diagram of Environmental-protecting treater for the production of chip silicon proposed by the present invention；Fig. 3 is this
A kind of annular gear structure schematic diagram for Environmental-protecting treater for the production of chip silicon that invention proposes；Fig. 4 is that the present invention proposes
It is a kind of for chip silicon production Environmental-protecting treater bindiny mechanism's schematic diagram；Fig. 5 is that one kind proposed by the present invention is used for
Enlarged drawing at the A of the Environmental-protecting treater of chip silicon production；Fig. 6 is a kind of environmental protection for the production of chip silicon proposed by the present invention
The carrying basket structure schematic diagram of processing equipment；
In figure: 1 pickling tube, 2 drain pipes, 3 grug transportation tubes, 4 second Electrocontrolled tee valves, 5 medicine storing pots, 6 connecting tubes, 7 first automatically controlled three
Port valve, 8 sewage pipes, 9 reactor tanks, 10 third Electrocontrolled tee valves, 11 filtering ponds, 12 sedimentation basins, 13 lifting lugs, 14 inlet tubes, 15 teeth
Wheel, 16 ring gears, 17 paddles, 18 first rotating shafts, 19 driving motors, 20 connecting shafts, 21 second shafts, 22 pebble layers, 23
Sand stone layer, 24 outlet pipes, 25 valves, 26 drainpipes, 27 cross bars, 28 turntables, 29 loading plates, 30 placement plates, 31 connecting rods, 32 sets
Ring, 33 rubber pads, 34 blind holes, 35 cover boards, 36 risers, 37 slide bars, 38 springs, 39 carrying baskets.
Specific embodiment
Following will be combined with the drawings in the embodiments of the present invention, and technical solution in the embodiment of the present invention carries out clear, complete
Site preparation description, it is clear that described embodiments are only a part of the embodiments of the present invention, instead of all the embodiments.
Referring to Fig.1-6, a kind of Environmental-protecting treater for the production of chip silicon, including pickling tube 1, in the manufacturing process of silicon
Silicon must be isolated from the compound of silicon, the quality of silicon is preferably promoted after separation, need to carry out pickling to silicon, thus
The quality of silicon is promoted, and then helps to be promoted the quality of chip, the lower end side of pickling tube 1, which is run through, is equipped with drain pipe 2, and pickling is complete
Cheng Hou, the waste liquid in pickling tube 1 can be discharged pickling tube 1 by drain pipe 2 and help to ensure that pickling consequently facilitating being replaced
Quality, promoted chip silicon quality.In the present invention, one end of drain pipe 2 is connected with the first Electrocontrolled tee valve 7, and first is automatically controlled
The two sides of triple valve 7 are respectively connected with sewage pipe 8, and one end of two sewage pipes 8 is run through equipped with reactor tank 9, and waste liquid passes through drain
Pipe 2 enters the first Electrocontrolled tee valve 7, and Electrocontrolled tee valve 7 is connected with external component, to guarantee its energy normal operation, and just
It is manipulated in staff, waste liquid is controlled by staff and is flowed into selected reactor tank 9, two reactor tanks 9 and is successively made
With, thus help to ensure that the reaction duration of waste liquid and medicament, guarantee reaction quality.In the present invention, reactor tank 9 is equipped with mixed
It attaches together and sets, medicament and waste liquid can be made more fully to be reacted, promote the quality of reaction, the upper end side of two reactor tanks 9
Through grug transportation tube 3 is equipped with, it is connected with the second Electrocontrolled tee valve 4 jointly between two grug transportation tubes 3, convenient for adding for control medicament
Adding, one end of the second Electrocontrolled tee valve 4 is connected with medicine storing pot 5, storage hydrogen peroxide, sodium hypochlorite or bleaching powder in medicine storing pot 5, from
And fall the organic matter in chemical cleaning waste liquid convenient for oxidation processes.In the present invention, the company of being equipped with is run through in the lower end of two reactor tanks 9
Adapter tube 6, one end of two connecting tubes 6 are connected with third Electrocontrolled tee valve 10 jointly, in reactor tank 9 after the reaction was completed, by third
Electrocontrolled tee valve 10 controls whether it is discharged, and one end of third Electrocontrolled tee valve 10 is connected with filtering ponds 11, will be useless after reaction
Liquid discharges into filtering ponds 11, and the lower end side of filtering ponds 11, which is run through, is equipped with outlet pipe 24, and one end of outlet pipe 24 is connected with precipitating
Pond 12, waste liquid are precipitated through outlet pipe 24 into sedimentation basin 12 after the filtering of filtering ponds 11.Bottom in the present invention, in filtering ponds 11
Portion is equipped with sand stone layer 23, and the upper end of sand stone layer 23 is equipped with pebble layer 22, can be incited somebody to action by pebble layer 22 and sand stone layer 23
Impurity in waste liquid is purged, and is conveniently replaceable cobblestone and sandstone, to guarantee the quality of filtering, under sedimentation basin 12
It holds side to run through and is equipped with drainpipe 26, valve 25 is installed on drainpipe 26, sedimentation basin 12 can sink the sandstone carried in waste liquid
Shallow lake is fallen, and detects convenient for staff to the liquid in sedimentation basin 12, differentiates whether it can discharge, consequently facilitating control
Whether valve 25 is opened.
In the present invention, mixing arrangement includes the driving motor 19 being mounted in reactor tank 9, driving motor 19 and external component
Connection, can stablize running, manipulate convenient for staff, the output shaft end of driving motor 19 is fixed with company by shaft coupling
Spindle 20, the lower end of connecting shaft 20 extend in reactor tank 9, and the lower end of connecting shaft 20 is fixed with turntable 28,19 energy of driving motor
It drives turntable 28 to rotate by connecting shaft 20, provides power to be mixed.In the present invention, between equal on one week side wall of turntable 28
Away from fixed there are four cross bar 27, it is arranged with first rotating shaft 18 on cross bar 27, the upper end of first rotating shaft 18 is fixed with gear 15, reaction
Ring gear 16 is fixed on one week side wall of tank 9, four gears 15 are meshed with ring gear 16, and the rotation of turntable 28 drives cross bar
27 rotations, so as to rotate first rotating shaft 18 around turntable 28, while the rotation of first rotating shaft 18 can make gear 15 engage ring gear
16 are rotated, and then can be carried out rotation and revolution convenient for first rotating shaft 18, can promote mixed quality.In the present invention, turntable
28 lower end is fixed with the second shaft 21, and turntable 28 can drive the second shaft 21 to rotate, the second shaft 21 and four first rotating shafts
More than two paddles 17 are equidistantly fixed on 18, first rotating shaft 18 and the second shaft 21 drive paddle 17 to rotate,
Mixed quality and efficiency can be promoted, promotes the quality of reaction, the lower end of the second shaft 21 and four first rotating shafts 18 is set jointly
There is bindiny mechanism, bindiny mechanism is connected with reactor tank 9, and it is more stable that bindiny mechanism can be such that shaft rotates.In the present invention, even
Connection mechanism includes the placement plate 30 for being rotatably connected on four 18 lower ends of first rotating shaft, is fixed with lantern ring jointly in four placement plates 30
32, the lower end of the second shaft 21 is rotatably connected to loading plate 29, and there are four connect for spacing fixation on one week side wall of loading plate 29 etc.
Extension bar 31, one end of four connecting rods 31 are separately fixed at the side of four placement plates 30, the lower end rotation connection of loading plate 29
Bottom in reactor tank 9 can support first rotating shaft 18 and the second shaft 21 well, and convenient for following it to be rotated,
Guarantee the stability of stirring.
In the present invention, carrying basket 39 is placed in pickling tube 1, the upper end quadrangle of carrying basket 39 is respectively and fixedly provided with lifting lug 13, acid
Through inlet tube 14 is equipped on one end side wall in wash pool 1, it is convenient for injecting pickling into pickling tube 1 with molten by inlet tube 14
Silicon material is placed into carrying basket 39 by liquid, under the action of external hanging device, carrying basket 39 can be driven to transport by lifting lug 13
It is dynamic, so that silicon material is entered pickling tube 1 and facilitates removal of.
In the present invention, the upper end side of medicine storing pot 5 is hinged with cover board 35, and the lower end of cover board 35 and the upper end of medicine storing pot 5 are equal
Be fixed with rubber pad 33, rubber pad 33 is squeezed, can well deformation occurs, blind, guarantee leakproofness, avoid medicament and
External contact guarantees the quality of medicament.
In the present invention, the side of cover board 35 is fixed with riser 36, and slide bar 37 is arranged on riser 36, is arranged on slide bar 37
Spring 38, the both ends of spring 38 are separately fixed at one end of slide bar 37 and the side of riser 36, and medicine storing pot 5 is equipped with blind hole 34,
One end of slide bar 37 extends in blind hole 34, pulls slide bar 37 that slide bar 37 can be made to remove blind hole 34, convenient for rotating cover board 35, side
Just medicament is added, after the completion of addition, cover board 35 is resetted, under the action of spring 38, can guarantee the fastness of connection, to mention
Rise sealing performance.It is including following the invention also provides a kind of operating method of Environmental-protecting treater for the production of chip silicon
Step:
S1, in order to reduce the impurity in silicon, need to carry out pickling to silicon, silicon material is placed into carrying basket 39, and pass through suspender
It is connected with lifting lug 13, convenient for silicon material to be placed into pickling tube 1, after the completion of pickling, the waste liquid in pickling tube 1 passes through drain pipe 2
Discharge, suspender and lifting lug 13 connect, and removing pickling tube 1 convenient for will carry basket 39 replaces silicon material, progress pickling next time, by into
Liquid pipe 14 is convenient for supplement and replacement pickling solution；
S2, it selects to drain into waste liquid in one of reactor tank 9 by the first Electrocontrolled tee valve 7 of control, waste liquid passes through blowdown
Pipe 8 enters in selected reactor tank 9, and the medicament in medicine storing pot 5 is entered by the effect of the second Electrocontrolled tee valve 4 through grug transportation tube 3
In the reactor tank 9, it can control whether liquid can flow and control flow direction, medicine storing pot well by Electrocontrolled tee valve
Hydrogen peroxide, sodium hypochlorite or bleaching powder can be placed in 5, to can be carried out oxidation reaction, disposed in chemical cleaning waste liquid
Organic matter；
S3, driving motor 19 operate, so as to make connecting shaft 20 that turntable 28 be driven to rotate, so as to rotate the second shaft 21,
Turntable 28 drives first rotating shaft 18 with the second shaft 21 for center of circle rotation by cross bar 27 simultaneously, and gear 15 is mutually nibbled with ring gear 16
It closes, first rotating shaft 18 can be made to rotate, so as to rotate paddle 17, promote the quality of mixing, improve the quality of reaction, carry
Plate 29 and four placement plates 30 guarantee first rotating shafts 18 and 21 stable motion of the second shaft, can make first rotating shaft 18 carry out rotation and
Revolution, so as to preferably be mixed medicament and waste liquid；
S4, liquid after the reaction was completed enter third Electrocontrolled tee valve 10 by connecting tube 6, hence into carrying out in filtering ponds 11
Filtering；
S5, enter sand stone layer 23 after passing through pebble layer 22 in filtering ponds 11, it is intracorporal miscellaneous so as to filter out liquid well
Matter, then entered in sedimentation basin 12 by outlet pipe 24, cobblestone filters out biggish impurity, and sandstone filters out lesser impurity,
And it is convenient for replacing, guarantees the quality of filtering；
S6, liquid enter precipitating in sedimentation basin 12, can precipitate the sandstone carried when flowing through filtering ponds 11, work at the same time personnel's inspection
The water quality situation of liquid is surveyed, the liquid in sedimentation basin 12 can be discharged convenient for controlling drainpipe 26 by valve 25.
In the present invention, in use, silicon material is placed into carrying basket 39, and is connected by suspender and lifting lug 13, being convenient for will
Silicon material is placed into pickling tube 1, and after the completion of pickling, the waste liquid in pickling tube 1 is discharged by drain pipe 2, passes through the first electricity of control
Triple valve 7 is controlled to select waste liquid to be drained into one of reactor tank 9, and waste liquid enters selected reactor tank 9 by sewage pipe 8
Interior, the medicament in medicine storing pot 5 is entered in the reactor tank 9 by the effect of the second Electrocontrolled tee valve 4 through grug transportation tube 3, driving motor
19 runnings, so as to make connecting shaft 20 that turntable 28 be driven to rotate, so as to rotate the second shaft 21, while turntable 28 passes through cross
Bar 27 drives first rotating shaft 18 with the second shaft 21 for center of circle rotation, and gear 15 and ring gear 16 are meshed, and can make first rotating shaft
18 rotations promote the quality of mixing so as to rotate paddle 17, improve the quality of reaction, loading plate 29 and four placements
Plate 30 guarantees first rotating shaft 18 and 21 stable motion of the second shaft, and liquid after the reaction was completed enters third electricity by connecting tube 6
Triple valve 10 is controlled, hence into being filtered in filtering ponds 11, by entering sand stone layer after pebble layer 22 in filtering ponds 11
23, so as to filter out the intracorporal impurity of liquid well, then pass through outlet pipe 24 and enter in sedimentation basin 12, liquid enters sedimentation basin
Can precipitating in 12 works at the same time the water quality situation that personnel detect liquid, will precipitate convenient for controlling drainpipe 26 by valve 25
Liquid discharge in pond 12.
The foregoing is only a preferred embodiment of the present invention, but scope of protection of the present invention is not limited thereto,
Anyone skilled in the art in the technical scope disclosed by the present invention, according to the technique and scheme of the present invention and its
Inventive concept is subject to equivalent substitution or change, should be covered by the protection scope of the present invention.
Claims (10)
1. a kind of Environmental-protecting treater for the production of chip silicon, including pickling tube (1), it is characterised in that: the pickling tube (1)
Lower end side run through and be equipped with drain pipe (2), one end of the drain pipe (2) is connected with the first Electrocontrolled tee valve (7), described the
The two sides of one Electrocontrolled tee valve (7) are respectively connected with sewage pipe (8), and one end of two sewage pipes (8) is run through equipped with reactor tank
(9), the reactor tank (9) is equipped with mixing arrangement, and the upper end side of two reactor tanks (9) is run through equipped with grug transportation tube (3), and two
It is connected with jointly the second Electrocontrolled tee valve (4) between a grug transportation tube (3), one end of second Electrocontrolled tee valve (4) is connected with
Medicine storing pot (5), the lower end of two reactor tanks (9) are run through equipped with connecting tube (6), and one end of two connecting tubes (6) connects jointly
Have third Electrocontrolled tee valve (10), one end of the third Electrocontrolled tee valve (10) is connected with filtering ponds (11), the filtering ponds
(11) lower end side, which is run through, is equipped with outlet pipe (24), and one end of the outlet pipe (24) is connected with sedimentation basin (12).
2. a kind of Environmental-protecting treater for the production of chip silicon according to claim 1, it is characterised in that: the mixing
Device includes the driving motor (19) being mounted on reactor tank (9), and the output shaft end of the driving motor (19) passes through shaft coupling
Device is fixed with connecting shaft (20), and the lower end of the connecting shaft (20) extends in reactor tank (9), the lower end of the connecting shaft (20)
It is fixed with turntable (28), there are four cross bar (27), the cross bars (27) for spacing fixation on one week side wall of the turntable (28) etc.
On be arranged with first rotating shaft (18), the upper end of the first rotating shaft (18) is fixed with gear (15), one week of the reactor tank (9)
It is fixed on side wall ring gear (16), four gears (15) are meshed with ring gear (16), and the lower end of the turntable (28) is solid
Surely have the second shaft (21), be equidistantly fixed on second shaft (21) and four first rotating shafts (18) more than two
The lower end of paddle (17), second shaft (21) and four first rotating shafts (18) is equipped with bindiny mechanism, the connection jointly
Mechanism is connected with reactor tank (9).
3. a kind of Environmental-protecting treater for the production of chip silicon according to claim 2, it is characterised in that: the connection
Mechanism includes being rotatably connected on the placement plate (30) of four first rotating shaft (18) lower ends, the lower end rotation of second shaft (21)
It is connected with loading plate (29), there are four connecting rod (31), four companies for spacing fixation on one week side wall of the loading plate (29) etc.
One end of extension bar (31) is separately fixed at the side of four placement plates (30), and the lower end of the loading plate (29) is rotatably connected on instead
Answer the bottom in tank (9).
4. a kind of Environmental-protecting treater for the production of chip silicon according to claim 1, it is characterised in that: the pickling
Carrying basket (39) is placed in pond (1), the upper end quadrangle of carrying basket (39) is respectively and fixedly provided with lifting lug (13), the pickling tube
(1) through equipped with inlet tube (14) on one end side wall in.
5. a kind of Environmental-protecting treater for the production of chip silicon according to claim 1, it is characterised in that: the drug storage
The upper end side of tank (5) is hinged with cover board (35), and the side of the cover board (35) is fixed with riser (36), on the riser (36)
It is arranged with slide bar (37), is arranged with spring (38) on the slide bar (37), the both ends of the spring (38) are separately fixed at slide bar
(37) side of one end and riser (36), the medicine storing pot (5) are equipped with blind hole (34), and one end of the slide bar (37) extends
In to blind hole (34).
6. a kind of Environmental-protecting treater for the production of chip silicon according to claim 5, it is characterised in that: the cover board
(35) upper end of lower end and medicine storing pot (5) is respectively and fixedly provided with rubber pad (33).
7. a kind of Environmental-protecting treater for the production of chip silicon according to claim 1, it is characterised in that: the filtering
Bottom in pond (11) is equipped with sand stone layer (23), and the upper end of the sand stone layer (23) is equipped with pebble layer (22).
8. a kind of Environmental-protecting treater for the production of chip silicon according to claim 1, it is characterised in that: the precipitating
The lower end side in pond (12), which is run through, is equipped with drainpipe (26), is equipped with valve (25) on the drainpipe (26).
9. a kind of Environmental-protecting treater for the production of chip silicon according to claim 3, it is characterised in that: four placements
Lantern ring (32) are fixed on plate (30) jointly.
10. a kind of operating method of the Environmental-protecting treater for the production of chip silicon, which comprises the following steps:
S1, in order to reduce the impurity in silicon, need to carry out pickling to silicon, silicon material be placed into carrying basket (39), and by hanging
Tool and lifting lug (13) connection, convenient for silicon material to be placed into pickling tube (1), after the completion of pickling, the waste liquid in pickling tube (1) passes through
Drain pipe (2) discharge；
S2, it selects to drain into waste liquid in one of reactor tank (9) by control the first Electrocontrolled tee valve (7), waste liquid passes through
Sewage pipe (8) enters in selected reactor tank (9), and the medicament in medicine storing pot (5) is passed through by the effect of the second Electrocontrolled tee valve (4)
Grug transportation tube (3) enters in the reactor tank (9)；
S3, driving motor (19) running, so as to make connecting shaft (20) to drive turntable (28) rotation, so as to make the second shaft
(21) it rotates, while turntable (28) drives first rotating shaft (18) with the second shaft (21) for center of circle rotation, tooth by cross bar (27)
Wheel (15) and ring gear (16) are meshed, and first rotating shaft (18) can be made to rotate, and so as to rotate paddle (17), promote mixing
Quality, improve the quality of reaction, loading plate (29) and four placement plates (30) guarantee first rotating shaft (18) and the second shaft
(21) stable motion；
S4, liquid after the reaction was completed enter third Electrocontrolled tee valve (10) by connecting tube (6), hence into filtering ponds (11)
Inside it is filtered；
S5, pass through pebble layer (22) in filtering ponds (11) afterwards into sand stone layer (23), so as to filter out liquid well
Interior impurity, then entered in sedimentation basin (12) by outlet pipe (24)；
S6, liquid enter precipitating in sedimentation basin (12), the water quality situation that personnel detect liquid are worked at the same time, convenient for passing through valve
(25) can control drainpipe (26) liquid in sedimentation basin (12) be discharged.
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| CN201910790182.XA CN110449400A (en) | 2019-08-26 | 2019-08-26 | A kind of Environmental-protecting treater and its operating method for the production of chip silicon |
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