CN110402034B - 一种提高pcb图形电镀面均性的方法 - Google Patents
一种提高pcb图形电镀面均性的方法 Download PDFInfo
- Publication number
- CN110402034B CN110402034B CN201910688246.5A CN201910688246A CN110402034B CN 110402034 B CN110402034 B CN 110402034B CN 201910688246 A CN201910688246 A CN 201910688246A CN 110402034 B CN110402034 B CN 110402034B
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- CN
- China
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- copper plating
- jig
- pcb substrate
- substrate
- pcb
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- 238000000034 method Methods 0.000 title claims abstract description 30
- 238000009713 electroplating Methods 0.000 title claims abstract description 14
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims abstract description 105
- 229910052802 copper Inorganic materials 0.000 claims abstract description 105
- 239000010949 copper Substances 0.000 claims abstract description 105
- 238000007747 plating Methods 0.000 claims abstract description 98
- 239000000758 substrate Substances 0.000 claims abstract description 98
- QAOWNCQODCNURD-UHFFFAOYSA-N Sulfuric acid Chemical compound OS(O)(=O)=O QAOWNCQODCNURD-UHFFFAOYSA-N 0.000 claims abstract description 20
- 238000009832 plasma treatment Methods 0.000 claims abstract description 16
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims abstract description 13
- 238000005406 washing Methods 0.000 claims abstract description 10
- FAPWRFPIFSIZLT-UHFFFAOYSA-M Sodium chloride Chemical compound [Na+].[Cl-] FAPWRFPIFSIZLT-UHFFFAOYSA-M 0.000 claims description 8
- 239000000654 additive Substances 0.000 claims description 7
- 230000000996 additive effect Effects 0.000 claims description 7
- 229910001220 stainless steel Inorganic materials 0.000 claims description 7
- 239000010935 stainless steel Substances 0.000 claims description 7
- 239000004020 conductor Substances 0.000 claims description 4
- 239000011229 interlayer Substances 0.000 claims description 4
- 238000005554 pickling Methods 0.000 claims description 4
- 239000011780 sodium chloride Substances 0.000 claims description 4
- VEXZGXHMUGYJMC-UHFFFAOYSA-M Chloride anion Chemical compound [Cl-] VEXZGXHMUGYJMC-UHFFFAOYSA-M 0.000 claims description 3
- QPLDLSVMHZLSFG-UHFFFAOYSA-N Copper oxide Chemical compound [Cu]=O QPLDLSVMHZLSFG-UHFFFAOYSA-N 0.000 claims description 3
- 238000004140 cleaning Methods 0.000 claims description 3
- 229910000365 copper sulfate Inorganic materials 0.000 claims description 3
- ARUVKPQLZAKDPS-UHFFFAOYSA-L copper(II) sulfate Chemical compound [Cu+2].[O-][S+2]([O-])([O-])[O-] ARUVKPQLZAKDPS-UHFFFAOYSA-L 0.000 claims description 3
- 238000011161 development Methods 0.000 claims description 3
- 239000000463 material Substances 0.000 claims description 3
- 238000007781 pre-processing Methods 0.000 claims description 3
- 238000002791 soaking Methods 0.000 claims description 3
- 229910000619 316 stainless steel Inorganic materials 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 11
- 230000008569 process Effects 0.000 description 11
- 230000006872 improvement Effects 0.000 description 10
- 239000007788 liquid Substances 0.000 description 7
- 239000003814 drug Substances 0.000 description 6
- 239000007789 gas Substances 0.000 description 6
- 150000002500 ions Chemical class 0.000 description 6
- 239000000126 substance Substances 0.000 description 6
- 238000006243 chemical reaction Methods 0.000 description 5
- 230000000694 effects Effects 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- CURLTUGMZLYLDI-UHFFFAOYSA-N Carbon dioxide Chemical compound O=C=O CURLTUGMZLYLDI-UHFFFAOYSA-N 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 239000003795 chemical substances by application Substances 0.000 description 2
- -1 copper complex ions Chemical class 0.000 description 2
- 230000005684 electric field Effects 0.000 description 2
- 125000000524 functional group Chemical group 0.000 description 2
- LEQAOMBKQFMDFZ-UHFFFAOYSA-N glyoxal Chemical compound O=CC=O LEQAOMBKQFMDFZ-UHFFFAOYSA-N 0.000 description 2
- HHLFWLYXYJOTON-UHFFFAOYSA-N glyoxylic acid Chemical compound OC(=O)C=O HHLFWLYXYJOTON-UHFFFAOYSA-N 0.000 description 2
- 230000000977 initiatory effect Effects 0.000 description 2
- 238000009434 installation Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000007935 neutral effect Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 238000012545 processing Methods 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- JPVYNHNXODAKFH-UHFFFAOYSA-N Cu2+ Chemical compound [Cu+2] JPVYNHNXODAKFH-UHFFFAOYSA-N 0.000 description 1
- 239000003109 Disodium ethylene diamine tetraacetate Substances 0.000 description 1
- ZGTMUACCHSMWAC-UHFFFAOYSA-L EDTA disodium salt (anhydrous) Chemical compound [Na+].[Na+].OC(=O)CN(CC([O-])=O)CCN(CC(O)=O)CC([O-])=O ZGTMUACCHSMWAC-UHFFFAOYSA-L 0.000 description 1
- DGAQECJNVWCQMB-PUAWFVPOSA-M Ilexoside XXIX Chemical compound C[C@@H]1CC[C@@]2(CC[C@@]3(C(=CC[C@H]4[C@]3(CC[C@@H]5[C@@]4(CC[C@@H](C5(C)C)OS(=O)(=O)[O-])C)C)[C@@H]2[C@]1(C)O)C)C(=O)O[C@H]6[C@@H]([C@H]([C@@H]([C@H](O6)CO)O)O)O.[Na+] DGAQECJNVWCQMB-PUAWFVPOSA-M 0.000 description 1
- 239000002202 Polyethylene glycol Substances 0.000 description 1
- GSEJCLTVZPLZKY-UHFFFAOYSA-N Triethanolamine Chemical compound OCCN(CCO)CCO GSEJCLTVZPLZKY-UHFFFAOYSA-N 0.000 description 1
- 230000003213 activating effect Effects 0.000 description 1
- 230000004913 activation Effects 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 238000005282 brightening Methods 0.000 description 1
- 239000001569 carbon dioxide Substances 0.000 description 1
- 229910002092 carbon dioxide Inorganic materials 0.000 description 1
- 239000003638 chemical reducing agent Substances 0.000 description 1
- 239000011248 coating agent Substances 0.000 description 1
- 238000000576 coating method Methods 0.000 description 1
- 239000008139 complexing agent Substances 0.000 description 1
- 229910001431 copper ion Inorganic materials 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 238000009792 diffusion process Methods 0.000 description 1
- 235000019301 disodium ethylene diamine tetraacetate Nutrition 0.000 description 1
- 230000005281 excited state Effects 0.000 description 1
- 229940015043 glyoxal Drugs 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 239000003112 inhibitor Substances 0.000 description 1
- 238000002955 isolation Methods 0.000 description 1
- 238000011068 loading method Methods 0.000 description 1
- 229910052751 metal Inorganic materials 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- WSFSSNUMVMOOMR-NJFSPNSNSA-N methanone Chemical compound O=[14CH2] WSFSSNUMVMOOMR-NJFSPNSNSA-N 0.000 description 1
- 239000011368 organic material Substances 0.000 description 1
- 230000003647 oxidation Effects 0.000 description 1
- 238000007254 oxidation reaction Methods 0.000 description 1
- ACVYVLVWPXVTIT-UHFFFAOYSA-M phosphinate Chemical compound [O-][PH2]=O ACVYVLVWPXVTIT-UHFFFAOYSA-M 0.000 description 1
- 150000003071 polychlorinated biphenyls Chemical class 0.000 description 1
- 229920001223 polyethylene glycol Polymers 0.000 description 1
- 239000011148 porous material Substances 0.000 description 1
- LJCNRYVRMXRIQR-OLXYHTOASA-L potassium sodium L-tartrate Chemical compound [Na+].[K+].[O-]C(=O)[C@H](O)[C@@H](O)C([O-])=O LJCNRYVRMXRIQR-OLXYHTOASA-L 0.000 description 1
- 229940074439 potassium sodium tartrate Drugs 0.000 description 1
- 239000002244 precipitate Substances 0.000 description 1
- 238000005086 pumping Methods 0.000 description 1
- 230000009257 reactivity Effects 0.000 description 1
- 229910052708 sodium Inorganic materials 0.000 description 1
- 239000011734 sodium Substances 0.000 description 1
- 239000001509 sodium citrate Substances 0.000 description 1
- NLJMYIDDQXHKNR-UHFFFAOYSA-K sodium citrate Chemical compound O.O.[Na+].[Na+].[Na+].[O-]C(=O)CC(O)(CC([O-])=O)C([O-])=O NLJMYIDDQXHKNR-UHFFFAOYSA-K 0.000 description 1
- 235000011083 sodium citrates Nutrition 0.000 description 1
- 235000011006 sodium potassium tartrate Nutrition 0.000 description 1
- FRTIVUOKBXDGPD-UHFFFAOYSA-M sodium;3-sulfanylpropane-1-sulfonate Chemical compound [Na+].[O-]S(=O)(=O)CCCS FRTIVUOKBXDGPD-UHFFFAOYSA-M 0.000 description 1
- BDHFUVZGWQCTTF-UHFFFAOYSA-M sulfonate Chemical compound [O-]S(=O)=O BDHFUVZGWQCTTF-UHFFFAOYSA-M 0.000 description 1
- 238000006557 surface reaction Methods 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Images
Classifications
-
- H—ELECTRICITY
- H05—ELECTRIC TECHNIQUES NOT OTHERWISE PROVIDED FOR
- H05K—PRINTED CIRCUITS; CASINGS OR CONSTRUCTIONAL DETAILS OF ELECTRIC APPARATUS; MANUFACTURE OF ASSEMBLAGES OF ELECTRICAL COMPONENTS
- H05K3/00—Apparatus or processes for manufacturing printed circuits
- H05K3/10—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern
- H05K3/18—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material
- H05K3/181—Apparatus or processes for manufacturing printed circuits in which conductive material is applied to the insulating support in such a manner as to form the desired conductive pattern using precipitation techniques to apply the conductive material by electroless plating
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- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Manufacturing Of Printed Wiring (AREA)
- Electroplating Methods And Accessories (AREA)
Abstract
Description
Claims (8)
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CN201910688246.5A CN110402034B (zh) | 2019-07-29 | 2019-07-29 | 一种提高pcb图形电镀面均性的方法 |
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CN201910688246.5A CN110402034B (zh) | 2019-07-29 | 2019-07-29 | 一种提高pcb图形电镀面均性的方法 |
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CN110402034A CN110402034A (zh) | 2019-11-01 |
CN110402034B true CN110402034B (zh) | 2023-01-24 |
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WO2021134794A1 (zh) * | 2020-01-03 | 2021-07-08 | 京东方科技集团股份有限公司 | 阵列基板、其制备方法及背光模组 |
CN114214713A (zh) * | 2022-01-11 | 2022-03-22 | 成都明天高新产业有限责任公司 | 一种基于阴极框架结构的电镀挂具的线路板电镀工艺 |
Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05320994A (ja) * | 1992-05-21 | 1993-12-07 | Nitto Denko Corp | プリント回路板の電解メッキ用治具 |
US6193863B1 (en) * | 1997-01-22 | 2001-02-27 | Hideyuki Kobayashi | Product conveyance mechanism for electroplating apparatus |
KR101237833B1 (ko) * | 2011-10-10 | 2013-02-27 | (주)포인텍 | 연속도금장치의 인쇄회로기판용 통전지그 |
JP2015086444A (ja) * | 2013-10-31 | 2015-05-07 | 凸版印刷株式会社 | 電解めっき装置 |
CN109898127A (zh) * | 2019-04-15 | 2019-06-18 | 淮安特创科技有限公司 | 一种线路板生产用电镀装置 |
Family Cites Families (7)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN201264621Y (zh) * | 2008-07-08 | 2009-07-01 | 欣兴电子股份有限公司 | 装载基板的运送车 |
CN102080253B (zh) * | 2010-12-23 | 2012-07-25 | 北大方正集团有限公司 | 电镀夹具及印制线路板电镀系统 |
CN102134735A (zh) * | 2011-02-28 | 2011-07-27 | 上海美维电子有限公司 | 印刷线路板载具 |
CN103305882B (zh) * | 2012-03-07 | 2016-08-10 | 深南电路有限公司 | Pcb板电镀方法及装置 |
CN106304668B (zh) * | 2016-10-31 | 2019-03-05 | 广州市安旭特电子有限公司 | 一种采用增强型半加成法制作印制线路板的制作方法 |
CN206961859U (zh) * | 2017-06-01 | 2018-02-02 | 福建金石能源有限公司 | 一种太阳能电池片金属成栅的挂具及系统 |
CN107740176A (zh) * | 2017-09-29 | 2018-02-27 | 奥士康科技股份有限公司 | 一种电镀薄板架 |
-
2019
- 2019-07-29 CN CN201910688246.5A patent/CN110402034B/zh active Active
Patent Citations (5)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH05320994A (ja) * | 1992-05-21 | 1993-12-07 | Nitto Denko Corp | プリント回路板の電解メッキ用治具 |
US6193863B1 (en) * | 1997-01-22 | 2001-02-27 | Hideyuki Kobayashi | Product conveyance mechanism for electroplating apparatus |
KR101237833B1 (ko) * | 2011-10-10 | 2013-02-27 | (주)포인텍 | 연속도금장치의 인쇄회로기판용 통전지그 |
JP2015086444A (ja) * | 2013-10-31 | 2015-05-07 | 凸版印刷株式会社 | 電解めっき装置 |
CN109898127A (zh) * | 2019-04-15 | 2019-06-18 | 淮安特创科技有限公司 | 一种线路板生产用电镀装置 |
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Effective date of registration: 20220105 Address after: 264203 room 402, No. 8, Binhai Park, Zhangcun Town, Huancui District, Weihai City, Shandong Province Applicant after: Wu Dawei Address before: 301802 room 409d, No. 5, Xingyuan Road, Jiuyuan Industrial Park, Baodi District, Tianjin Applicant before: Huaxin Electronics (Tianjin) Co.,Ltd. |
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Effective date of registration: 20230331 Address after: 116-E4, Customs Supervision Warehouse Supporting Office Area, Jinan Comprehensive Bonded Zone, No. 5999 Aerospace Avenue, High tech Zone, Jinan City, Shandong Province, 250000 Patentee after: Qinghe Electronic Technology (Shandong) Co.,Ltd. Address before: 264203 room 402, No. 8, Binhai Park, Zhangcun Town, Huancui District, Weihai City, Shandong Province Patentee before: Wu Dawei |