CN110286542A - The device that three multiplying power of laser emission generates - Google Patents
The device that three multiplying power of laser emission generates Download PDFInfo
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- CN110286542A CN110286542A CN201910684187.4A CN201910684187A CN110286542A CN 110286542 A CN110286542 A CN 110286542A CN 201910684187 A CN201910684187 A CN 201910684187A CN 110286542 A CN110286542 A CN 110286542A
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/3501—Constructional details or arrangements of non-linear optical devices, e.g. shape of non-linear crystals
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/355—Non-linear optics characterised by the materials used
- G02F1/3551—Crystals
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- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/3501—Constructional details or arrangements of non-linear optical devices, e.g. shape of non-linear crystals
- G02F1/3509—Shape, e.g. shape of end face
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/35—Non-linear optics
- G02F1/353—Frequency conversion, i.e. wherein a light beam is generated with frequency components different from those of the incident light beams
- G02F1/354—Third or higher harmonic generation
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Abstract
The invention proposes the devices that a kind of three multiplying power of laser emission generates, it include: that front optical system is adjusted the light distribution of the fundamental wave light beam of input, incident fundamental wave light beam is converted into fundamental wave and two multiplied frequency harmonics, but also the optical intensity on the cross section distribution shape for two multiplied frequency harmonics converted is adjusted, fundamental wave adjusted and two multiplied frequency harmonic beam exits to frequency tripling crystal；The beam exit face of frequency tripling crystal is cut into Brewster angle exit boundary interface, fundamental wave and two multiplied frequency harmonics are occurred in frequency tripling crystal and frequency is converted, generate frequency tripling harmonic optcial beam, it is emitted after Brewster angle exit boundary interface, is converted to the required or frequency tripling beam exit essentially identical with the optical intensity on the cross section distribution shape of the fundamental wave light beam of initial input.The beam intensity shape that the present invention passes through fundamental wave and second harmonic before presetting conversion realizes the beam quality requirement of final laser frequency conversion outside chamber, and cost reduces and the conversion crystal service life extends, and production is simple.
Description
Technical field
The present invention relates to laser technology field, in particular to a kind of device of three multiplying power of laser emission generation.Especially swash
Outside light light beam chamber three times or four-time harmonic generates the device and principle of ultraviolet laser radiation.
Background technique
In recent years, specific frequency laser device using more and more, the research and application of the generation of Ultraviolet Coherent Light are got over
Come more universal.Some applications need high-power or high-energy, the relevant ultraviolet light of high light beam quality.However, high-power or high energy
A kind of effective way of the generation of the relevant ultraviolet light of amount, is by the secondary and triple-harmonic filling mistake to IR coherent light beam
Journey.The exploration and research of this respect can be seen in the publication articles and patent or product design that many is delivered.For example,
Written Solid State Laser Engineering, fourth ed., Springer the Series in of Koechner
Optics Sciences V.1 (1996) and patent US5408481,5384803,5295143,5047668,5034951,
4510402,3873825, US5,850,407 etc..
For these applications, existing known gain medium can pass through gas, solid-state material, electric pump half
Conductor and optical pumping provide required various color lasers radiation under various power levels and operation mode.Semiconductor conduct
Gain media, for generating ultraviolet light, visible light and IR laser radiation.Gas laser can produce good ultraviolet light
(uv), it is seen that light and infrared ray (ir) light.Electronics or the semiconductor laser of optical pumping can produce within the scope of visible frequency
Raw infrared and near-infrared fundamental laser light light source and its harmonic wave.Direct semiconductor laser radiation energy generates feux rouges and blue light, ultraviolet spoke
It penetrates with good photoelectric transformation efficiency.However, semiconductor diode laser be not useable for directly generating high impulse intensity and
The UV laser beam of high light beam quality, and it is used for a variety of semiconductor microelectronics industrial applications such as wiring board processing or wafer cutting.
Nanosecoud pulse laser design based on the frequency tripling outside intracavitary or chamber, partly solves industrial processes to ps pulsed laser and ns pulsed laser
The demand of device.However, the requirement of retrofit is higher and higher, to ultrafast pulsed laser with the continuous development of microelectronics industry
The demand of processing is very big.Ultrafast pulsed laser device is generally not suitable for intracavitary frequency tripling scheme, almost all of big energy picosecond
Or the conversion of altra-fast fs pulsed UV, the mode being all made of outside chamber.When this pulsed light beam chamber external conversion, can directly with secondary and
Two frequencys multiplication and frequency tripling crystal that triple-frequency harmonics generates carry out frequency conversion to the light beam that infrared laser exports, generate ultraviolet light
Beam.Laser beam required for Precision Machining, optical intensity on the cross section distribution will reach certain requirement.General cavity external frequency multiplication device
The ultraviolet output beam generated, needs to carry out the adjustment of hot spot cross-sectional shape.
Due to high-energy or high-power ultraviolet outgoing laser beam, the nonlinear crystal generated for it and adjustment ultraviolet light
The optical component of beam can be had damage.Therefore, the service life for generating and adjusting the optical component of UV laser beam is limited, is difficult
Reach the requirement of required long-play.A kind of solution be by mobile frequency tripling crystal or other optical elements,
So that impaired crystal or optical component reuse new unspoiled light spot position.Even so, in general, no matter
Be crystal or ultraviolet optics component geometric size be all it is limited, the service life of whole device is limited.
Needle nanosecond pulse ultraviolet laser exports ultraviolet light life-time dilatation, and William Grossman et al. was in 1997
A kind of method is invented, inventor describes one kind in United States Patent (USP) US5,850,407 and passes through from fundamental wave and secondary frequency multiplication
When the crystal Brewster angle outgoing of frequency tripling conversion, the difference of refraction angle caused by dispersion can isolate frequency tripling light
The method of beam.This method is the frequency tripling crystal cut with a single-ended Brewster incidence angle, is existed using frequency tripling crystal
The frequency tripling ultraviolet light beam generated in the dispersivity separate chamber of angle deviating when Brewster angle reflects, the outgoing of frequency tripling crystal
Beam interface does not need plated film, and returns to remaining fundamental wave energy and used by oscillation conversion again.Avoid frequency tripling crystal
Need to plate the complexity and Gao Chengben of the anti-reflection film of three different wave lengths.In addition, the intracavitary crystalline substance using Brewster angle incidence
When body, beam cross section when ultraviolet light beam is emitted in exit boundary interface becomes larger, and optical density is lower, and the frequency tripling crystal service life extends.By
Before intracavitary fundamental wave is incident on the Brewster angle crystal of frequency-doubling crystal, fundamental wave light beam has the circularity determined by cavity, back and forth
After frequency-doubling crystal, generated ultraviolet light beam can keep the basic configuration of fundamental wave.Therefore, this patent is relatively specific for intracavitary
Frequency tripling.If be used in during cavity scattering, the method for this patent description, it will remaining fundamental wave is returned directly to base
The laser source that wave generates.In this way, laser source can be highly unstable, or broken by remaining strong light.Therefore, do not have also up to now
There is any document or product delivered, directly using method described in this patent into cavity scattering.This title to patent
The other a picosecond of ultraviolet laser developed after 2000 of Lightwave electronics, inc., X-Cyte, product
In series, used a scheme of generation frequency tripling (and frequency) crystal of direct once-through Brewster angle cutting but
Be, this product there is no using pre-adjust generate triple-frequency harmonics fundamental wave and second harmonic beam cross-section intensity distribution, and
It is the adjustment after having used additional ultraviolet optics component to convert generated ultraviolet hot spot.The design scheme of this product
Complexity, it is at high cost, without dexterously solving the problems, such as that beam cross-section deforms, but multiple ultraviolet optics elements is used to carry out
Beam cross-section shape correction after conversion, increases so that product is made.
Summary of the invention
The purpose of the present invention aims to solve at least one of described technological deficiency.
For this purpose, it is an object of the invention to propose a kind of device that laser cavity scattering generates, it is existing sharp to overcome
The complexity or high-cost defect of light cavity scattering device, the method are applied equally to the generation of quadruple.
To achieve the goals above, the embodiment of the present invention provides the device that a variety of three multiplying powers of laser emission generate, comprising:
Front optical system and frequency tripling crystal, wherein
One plane of incidence of some optical component in the front optical system is cut into Brewster incidence angle interface,
Light distribution for the fundamental wave light beam to input is adjusted, and the incident fundamental wave light beam is converted to fundamental wave and two frequencys multiplication
Harmonic wave, so that the optical intensity on the cross section distribution shape of the fundamental wave for the generation converted and two multiplied frequency harmonics is adjusted, after adjustment
Fundamental wave and two multiplied frequency harmonic beam exits to the frequency tripling crystal；
The exit facet of the frequency tripling crystal is cut into Brewster angle of emergence interface, by the fundamental wave of input and two times
Frequency harmonic wave occurs in the frequency tripling crystal and frequency is converted, and generates frequency tripling harmonic optcial beam, the frequency tripling harmonic optcial beam warp
It is emitted after crossing Brewster angle of emergence interface, is corrected to required or is cross section light with the fundamental wave light beam of initial input
Strong distribution shape it is almost the same or be required frequency tripling beam shape beam exit.
Further, the optical intensity on the cross section distribution shape of the incident fundamental wave light beam is circle, and remaining fundamental wave, two frequencys multiplication are humorous
The optical intensity on the cross section distribution shape of wave and the brilliant intracorporal frequency tripling harmonic wave of the frequency tripling is ellipse, the frequency tripling emergent light
The shape of beam is circle.
Further, the front optical system includes at least one two frequency-doubling crystal, and the fundamental wave light beam for that will input turns
Two multiplied frequency harmonics and remaining fundamental wave are changed to, so that the optical intensity on the cross section distribution shape of the remaining fundamental wave and two multiplied frequency harmonics that generate obtains
To adjustment.
Further, the front optical system includes: compensating module, also referred to as compensation crystal, receives the fundamental wave and two
Multiplied frequency harmonic, to the fundamental wave and two multiplied frequency harmonics realize deviation angle spatially or temporal pulse daley escaping be staggered,
Or both have, be conducive to generating adjustment or the pre-compensation of the triple-frequency harmonics of high-quality or high conversion efficiency so that
The beam direction of the fundamental wave and two multiplied frequency harmonics is more preferably conllinear or synchronous in the frequency tripling crystals of secondary frequency conversion
Further, the exit boundary interface of two frequency-doubling crystal is using the plating to the fundamental wave and two multiplied frequency harmonic total transmissivities
Film；
The incident interface of the frequency tripling crystal, which is used, plates anti-reflection film to the fundamental wave and two frequency multiplication wave incident directions.
Further, the fundamental wave and two multiplied frequency harmonics are realized deviation angle adjustment spatially, are made by the compensating module
The beam direction for obtaining the fundamental wave and two multiplied frequency harmonics is more conllinear.
Further, the compensating module is using one of following form:
(1) combination of one or more crystal；
(2) prism of one or more pairs of common prisms or Brewster angle；
(3) one or more chirped mirrors with delayed reflex；
(4) one or more lens combinations.
Further, the front optical system includes: transition medium, two frequency-doubling crystals and compensating module, wherein
The plane of incidence of the transition medium is cut into Brewster incidence angle interface, the light for the fundamental wave light beam to input
Strong distribution is adjusted, and is adjusted with the cross-sectional shape of the fundamental wave to generation, is emitted to two frequency-doubling crystal；
The fundamental wave emitted by the transition medium is converted to two multiplied frequency harmonics by two frequency-doubling crystal, by remaining fundamental wave
The compensating module is emitted to two multiplied frequency harmonics；
The compensating module receives the incidence of the fundamental wave and two multiplied frequency harmonics, realizes to the fundamental wave and two multiplied frequency harmonics
The adjustment of deviation angle spatially, so that the light beam of the fundamental wave and two multiplied frequency harmonics, when generating frequency tripling conversion, in sky
Between upper overlapping it is more preferable.
Further, two frequency-doubling crystal is staggered to the pulse daley on the fundamental wave and two multiplied frequency harmonic generation times,
The compensation crystal realizes temporal relative delay adjustment to the fundamental wave and two multiplied frequency harmonics so that the fundamental wave and
The light beam of two multiplied frequency harmonics, when generating frequency tripling conversion, overlapping is more preferable in time.
Further, the front optical system includes: two frequency-doubling crystals, transition medium and compensating module, wherein
Incident fundamental wave light beam is converted to fundamental wave and two multiplied frequency harmonics by two frequency-doubling crystal, by the fundamental wave and two times
Frequency harmonic wave is emitted to the transition medium；
The plane of incidence of the transition medium is cut into Brewster incidence angle interface, for input fundamental wave and fundamental wave produce
The light distribution of two raw multiplied frequency harmonics is adjusted, and is adjusted with the cross-sectional shape of fundamental wave and two multiplied frequency harmonics to generation
It is whole, it is emitted to the compensating module；
The compensating module receives the incidence of the fundamental wave and two multiplied frequency harmonics, realizes to the fundamental wave and two multiplied frequency harmonics
Deviation angle or temporal pulse daley spatially is staggered and is adjusted.
Further, the front optical system includes all or part of: frequency tripling crystal, two frequency-doubling crystals and optics are anti-
Component is penetrated, an interface cut of the frequency tripling crystal is Brewster angle interface, is had both incident as the fundamental wave light beam
Face, wherein
The fundamental wave light beam is incident to the Brewster angle interface of the frequency tripling crystal, to the light of the fundamental wave light beam of input
Strong distribution is adjusted, and is emitted to two frequency-doubling crystal；
The fundamental wave adjusted by the frequency tripling crystal is converted to two multiplied frequency harmonics by two frequency-doubling crystal, by remaining base
Wave and two multiplied frequency harmonics are emitted to the optical reflection component；
It is brilliant to be again introduced into two frequency multiplication by after the fundamental wave and the reflection turnover of two multiplied frequency harmonics for the optical reflection component
Body, by two frequency-doubling crystal again by remaining fundamental wave and two multiplied frequency harmonics are emitted to the frequency tripling crystal；
The fundamental wave of input and two multiplied frequency harmonics occurred in the frequency tripling crystal by the frequency tripling crystal and
Frequency is converted, and frequency tripling harmonic wave is generated, and the frequency tripling harmonic wave is emitted behind the Brewster angle interface of the frequency tripling crystal,
It is corrected to and the optical intensity on the cross section distribution shape of the fundamental wave light beam of initial input is almost the same or required, frequency tripling is emitted
Light beam.
Further, the optical reflection component is using one of following form:
(1) mirror surface；
The collective component of (2) one groups of one or more mirror surfaces composition；
(3) taper reflections；
(4) phase conjugate mirror pieces.
Further, the front optical system further include: compensation crystal, the compensating module are located at frequency tripling crystal and institute
It states between two frequency-doubling crystals, for realizing deviation angle and temporal arteries and veins spatially to by the fundamental wave and two multiplied frequency harmonics
Punching delay escaping, which is staggered, to be adjusted.
Further, by move in parallel two frequency-doubling crystal or adjustment input fundamental wave cross sectional beam intensity distribution its
He plays and changes a little to adjust the light for exporting the frequency tripling harmonic wave in the relative position of frequency tripling crystal eye point transparent medium
Effect.
Further, by moving in parallel the frequency tripling crystal, adjustment exports the light of the frequency tripling harmonic wave in frequency tripling
The relative position of crystal eye point plays the role of changing a little.
Further, the frequency tripling crystal is moved in parallel by the Brewster face along the frequency tripling crystal, adjusted
The relative position for exporting light eye point on frequency tripling crystal Brewster edged surface of the frequency tripling harmonic wave, does not cause output light
Any variation or movement of beam, play the role of changing a little.
Further, crystal is compensated by translating or rotating the compensating module, adjustment exports the light of the frequency tripling harmonic wave
The relative position of eye point, plays the role of changing a little on frequency tripling crystal Brewster edged surface.
Further, the crystal in the front optical system and the frequency tripling crystal are using one of following form: LBO,
LiNOb, LiTb, BBO, LKP, KD*P, α-BBO, quartz crystal, PPLN, PPTN, PPKT or other crystal.
Further, when the frequency tripling crystal generates the secondary frequency multiplication of two frequency multiplication waves using phase matched, by incident two
Multiplied frequency harmonic is converted to quadruple harmonic wave, by the frequency tripling crystal Brewster angle interface be emitted, be corrected to initially
The optical intensity on the cross section distribution shape of the fundamental wave light beam of input is almost the same or required, quadruple outgoing beam.
The device that three multiplying power of laser emission according to an embodiment of the present invention generates may be implemented the outer secondary laser frequency of chamber and turn
The beamquality improvement changed saves the needs to ultraviolet light beam shape shaping, and cost reduces, and the frequency tripling crystal service life extends, and swashs
The nonlinear crystal that light generates triple-frequency harmonics does not need to realize nonlinear frequency conversion in output face plated film.The present invention is generating
Frequency tripling or other many times frequency multiplications, in general, but be not limited to, for the ultraviolet laser of the frequency tripling 355nm of 1064nm wavelength or four times
Frequency multiplication generate 266nm's or other subharmonic, deep ultraviolet light, using simple, reliable many times frequency multiplication conversion production is ultraviolet
Or the scheme of deep ultraviolet laser light beam, meet the needs of the ultraviolet laser of long-life, high stability and low cost.
The device that three multiplying power of laser emission of the embodiment of the present invention generates, has the advantages that
1) the frequency tripling crystal shape for having used Brewster angle to be emitted, so that beam diameter of the light beam at eye point
Become larger, luminous intensity becomes smaller, and service life of the crystal after by ultraviolet light is elongated；
2) the Brewster angle outgoing or incident by the cutting of Brewster angle has been used, frequency tripling is converted carrying out
Cheng Zhong can relatively easily adjust generated frequency tripling ultraviolet light beam cross sectional intensity distribution.It is basic to keep fundamental wave light beam
Cross-sectional shape reduce without carrying out the adjustment of complicated ultraviolet frequency tripling beam cross-section beam intensity shape
It to the needs of multiple ultraviolet optics components, reduces costs, improves the reliability and stability of product；
3) among first time frequency multiplication and second and frequency process, compensating module, pre-compensation second harmonic and base is added
Being staggered due to the deviation angle that generates in harmonic conversion processes or temporal delay between wave, can significantly improve second of frequency
Rate conversion, generate the frequency tripling (3 ω) or four-time harmonic (4 ω) light beam of triple-frequency harmonics, efficiency；
4) frequency-doubling crystal of Brewster angle is used, so that Brewster angle cutting section does not need optical coating,
So that the crystal with Brewster angle is simple to manufacture, and at low cost.
The additional aspect of the present invention and advantage will be set forth in part in the description, and will partially become from the following description
Obviously, or practice through the invention is recognized.
Detailed description of the invention
Above-mentioned and/or additional aspect of the invention and advantage will become from the description of the embodiment in conjunction with the following figures
Obviously and it is readily appreciated that, in which:
Fig. 1 is the structure chart of the device generated according to three multiplying power of laser emission of the embodiment of the present invention；
Fig. 2 is to be generated according to two frequency-doubling crystals of use of the embodiment of the present invention and three multiplying power of laser emission of compensating module
The structure chart of device；
Fig. 3 is the knot of the device generated according to three multiplying power of laser emission using optical reflection component of the embodiment of the present invention
Composition；
Fig. 4 is according to the embodiment of the present invention using transition medium, two frequency-doubling crystals and the laser emission three for compensating crystal
The structure chart for the device that multiplying power generates.
Specific embodiment
The embodiment of the present invention is described below in detail, the example of embodiment is shown in the accompanying drawings, wherein identical from beginning to end
Or similar label indicates same or similar element or element with the same or similar functions.It is retouched below with reference to attached drawing
The embodiment stated is exemplary, it is intended to is used to explain the present invention, and is not considered as limiting the invention.
The present invention provides a kind of device that three multiplying power of laser emission generates, outer and intracavitary suitable for chamber, can produce ultraviolet
The frequency tripled laser of laser beam.Frequency conversion apparatus of the present invention by the medium of a Brewster angle exit boundary interface, connection
Frequency-doubling crystal or other media are closed, the horizontal interface light intensity shape, simultaneously of input light beam and the intermediate harmonic optcial beam generated is pre-adjusted
It may include the escaping angle between each light beam of adjustment interaction and may include adjustment time delay, then carry out ultraviolet
Frequency conversion, by a Brewster angle exit facet, so that generated ultraviolet output beam optical intensity on the cross section is distributed to obtain
Adjust and reach preferable transfer efficiency.
[first embodiment]
As shown in Figure 1, the device that three multiplying power of laser emission of the embodiment of the present invention generates, comprising: front optical system and
Frequency tripling crystal.
Front optical system 1020, the light distribution for the fundamental wave light beam to input are adjusted, and by fundamental wave light beam
Fundamental wave and two multiplied frequency harmonics are converted to, so that the optical intensity on the cross section distribution shape of the fundamental wave and two multiplied frequency harmonics that generate is adjusted
Whole, fundamental wave adjusted and two multiplied frequency harmonics are emitted to frequency tripling crystal.The front optical system 1020 can use transparent
Incident medium, incident interface are equal or approximately equal to this transparent medium Brewster angle incidence angle and are cut into preferable choosing
Value.
The exit facet of frequency tripling crystal 30 is cut into Brewster angle of emergence interface, by the fundamental wave of input and two multiplied frequency harmonics
Occur in frequency tripling crystal and frequency is converted, generates frequency tripling harmonic wave, frequency tripling harmonic wave is behind Brewster angle of emergence interface
Outgoing, be corrected to it is almost the same or required with the optical intensity on the cross section distribution shape of the fundamental wave light beam of initial input, three times
Occur frequently irradiating light beam.30 phase matched of frequency tripling crystal has at least to go out in the angle direction cutting for generating triple-frequency harmonics
The interface for penetrating triple-frequency harmonics is that Brewster angle arranges outgoing beam.
Specifically, front optical system 1020 appropriate is selected, realize fundamental wave light beam and is converted into two multiplied frequency harmonic light
The cross-sectional shape of beam, so that the fundamental wave light beam 11 of input generated two multiplied frequency harmonics 23 after front optical system 1020
After optical intensity on the cross section distribution with remaining fundamental wave 12 is adjusted, it is humorous expeditiously to generate final required frequency tripling or quadruple
Wave 31, after the approximate Brewster angle exit boundary interface 400 of eventually off conversion equipment, frequency tripling or quadruple light beam 32 with
Interface 400, and the light distribution of its cross section are left in the outgoing of P- polarization state, are optimized.Since exit facet approximation is in cloth
Rust angle, interface 400 do not need to plate anti-reflection membrane coat and frequency tripling or quadruple light beam loss very little to P- polarization, and
And light beam on interface area increase after, intensity of illumination weaken so that interface is extended by the service life that ultraviolet light beam irradiates.
In an embodiment of the present invention, a kind of common situation is that the optical intensity on the cross section distribution shape of fundamental wave light beam is circle,
The optical intensity on the cross section distribution shape of the brilliant intracorporal frequency tripling harmonic wave of fundamental wave, two multiplied frequency harmonics and frequency tripling is ellipse, frequency tripling
The shape of outgoing beam is circle.That is, the optical intensity on the cross section distribution shape of fundamental wave light beam 11 is circle, it is cylindrical symmetric beam, warp
The arrangement of the Brewster angle incidence of front optical system 1020 is crossed, the shape of fundamental wave 11 is adjusted, so that the remaining base generated
The shape of wave 12 and two frequency multiplication light beams 23 is ellipse, and remaining fundamental wave 12 and two frequency multiplication light beams 23 are again incident on frequency tripling crystal
30, wherein the shape of the remaining fundamental wave 12 in 300 pairs of the interface of frequency tripling crystal 30 and two frequency multiplication light beams 23 is without changing, to fundamental wave
12 and two frequency multiplication light beam 23 carry out conversion generate frequency tripling light beam 31,
The frequency tripling light beam 31 of generation and the cross-sectional shape of light beam 12 are close, from the interface of frequency tripling crystal 30 400
After the outgoing of Brewster angle, the final ultraviolet light beam 32 of generation is corrected to desired circle, and light beam 32 can keep base substantially
The shape of glistening light of waves beam 11.After the outgoing of interface 400 out, the light distribution of light beam 32 reaches required optical intensity on the cross section distribution shape
Shape.
Device needed for the present embodiment, due to be in advance to incident fundamental wave light beam optical intensity on the cross section distribution or fundamental wave and
The two multiplied frequency harmonic beam intensities generated are adjusted, and required method is wanted relative to the ultraviolet light beam of adjustment final output
It is simple many, practical and low cost.Since the ultraviolet light beam of final output does not need to be adjusted using optical component, ultraviolet light
Beam reduces a possibility that components damage, so that the service life of whole system is elongated.The present invention is approximately comprising at least one
The device (frequency tripling crystal 30) of Brewster angle exit boundary interface, after ultraviolet light beam outgoing, the harmonic wave of required generation
The optical intensity on the cross section distribution of light beam can achieve required ideal light intensity distribution.
It should be noted that the present embodiment by proper choice of front optical system 1020, may include or not include base
The space of wave and two multiplied frequency harmonics escaping angle or that the escaping in time of fundamental wave and two multiplied frequency harmonics is staggered, whole or
Part compensates or adjustment.
Wherein, the incident interface 100 of front optical system 1020 and the exit boundary interface 400 of frequency tripling crystal are Bruce
Special interface is not necessarily required to plating anti-reflection film.
The present embodiment can be used for that chamber is outer or intracavitary frequency tripled laser device, use the adjustment of Brewster angle incidence
The transparent medium of fundamental wave cross sectional beam intensity distribution and the medium of Brewster angle cutting are inputted, so that with Brewster
Angle is incident or the fundamental wave and triple-frequency harmonics of outgoing, chamber outer light beam by the secondary frequency tripling of non-linear conversion crystal be emitted from
After opening frequency tripling crystal, all or part of variation because of the beam diameter in the Brewster plane of incidence, adjustment or basic are offset
The cross-sectional shape or intensity distribution of former incident fundamental wave are kept, so that the frequency tripling beam cross-section shape being finally emitted and original
Incident fundamental wave shape is almost the same, or reaches expected beam shape.
[second embodiment]
In the present embodiment, front optical system uses two frequency-doubling crystals 20, and the plane of incidence of two frequency-doubling crystals 20 is cut into
Brewster incidence angle interface so that interface 100 do not need plating anti-reflection film also can fundamental wave to P- polarized incident in Brewster
Free of losses when angle incidence.
Two frequency-doubling crystals 20 are used to being converted to the fundamental wave light beam of input into two multiplied frequency harmonics and remaining fundamental wave, so that generate
The optical intensity on the cross section distribution shape of remaining fundamental wave and two multiplied frequency harmonics is adjusted, fundamental wave adjusted and the outgoing of two multiplied frequency harmonics
To frequency tripling crystal.The Brewster angle that the incidence angle interface 100 of two frequency-doubling crystals is equal or approximately equal to this crystal is incident
Angle cutting when Brewster face is as the plane of incidence 100, does not need plating anti-reflection film.
The exit boundary interface 200 of two frequency-doubling crystals 20 is using the plated film to fundamental wave and two multiplied frequency harmonic total transmissivities.If fundamental wave
It can be polarized with secondary frequency multiplication wave for same P-, interface 200 can also be with, but is not necessarily intended to, and is designed to the Brewster angle of emergence
Degree.It should be noted that if the polarization direction of fundamental wave and two frequency multiplication waves is different, generally using face incidence when need to plate it is anti-reflection
Film.
The exit facet 400 of frequency tripling crystal 300 is cut into Brewster angle of emergence interface, by the fundamental wave of input and two frequencys multiplication
Harmonic wave occurs in frequency tripling crystal and frequency is converted, and generates frequency tripling harmonic wave, and frequency tripling harmonic wave passes through Brewster angle of emergence circle
It is emitted behind face, is corrected to the frequency tripling emergent light almost the same with the optical intensity on the cross section distribution shape of the fundamental wave light beam of initial input
Beam.In the present embodiment, the incident interface of frequency tripling crystal uses the plated film to fundamental wave and two frequency multiplication wave total transmissivities, enters in face
Penetrate geometric shape plating anti-reflection film.Frequency tripling crystal 30 be selected as fundamental wave and two frequency multiplication light beams (frequency is added: (ω+2 with frequency
ω)) phase matched, and make generated frequency tripling (3 ω) light beam when interface 400 is emitted for P- polarization, along Bruce
Special angle outgoing.
30 phase matched of frequency tripling crystal has and is at least emitted three times in the angle direction cutting for generating triple-frequency harmonics
The interface of harmonic wave is that Brewster angle arranges outgoing beam, and it is not absolutely required to plate anti-reflection film at outgoing Brewster interface 400.
Laser frequency tripling laser aid of the invention is used for outside chamber, is allowed after needing secondary frequency multiplication and is generated frequency tripling (or four
Frequency multiplication) relevant beam, along two Brewster angles cutting crystal the incidence of Brewster angle and outgoing Bu Lu
This special section is at least secondary, carries out the generation of effective frequency tripling (or quadruple) laser beam, dexterously corrects single or odd-times is logical
When crossing the crystal with Brewster angle cut surface, caused outgoing beam cross-sectional symmetry is compared to original incident beam
Optical intensity on the cross section distribution is substantially change.Using Brewster interface of the laser beam outside chamber refraction angle with wavelength change
(angular dispersion) isolates frequency tripling (or quadruple) light beam from fundamental wave and two frequency multiplication waves.This method, for P- polarization
Frequency tripling (or quadruple) light beam has total transmissivity and does not need plating anti-reflection film.
Specifically, input fundamental wave light beam 11 is that cylindrical symmetric beam passes through two frequency-doubling crystals 20 after such device
Brewster incidence interface so that light beam 12 and light beam 23 be adjusted to ellipse beam shape.It is produced in further and frequency
During life, generated frequency tripling light beam 31 is elliptical shape inside crystal 30.Light beam 31 is final defeated by interface 400
After Brewster angle outgoing out, becoming beam cross-section is circular round symmetrical light intensity distribution, rather than apparent non-circular
Shape intensity distribution.To save the subsequent optical system for needing to correct ultraviolet laser beams circularity.
The present embodiment uses two frequency-doubling crystals 20 and Brewster of the incidence of Brewster angle to fundamental wave light beam 11 first
The frequency tripling crystal 30 of angle cutting, so that with Brewster angle is incident or is emitted fundamental wave and triple-frequency harmonics, the light outside chamber
Beam is offset all or part of because of cloth Shandong after non-linear conversion crystal is secondary and frequency tripling crystal 30 is left in frequency tripling outgoing
The variation of beam diameter in this special plane of incidence, adjustment or the basic cross-sectional shape or intensity distribution for keeping former base wave, so that
The frequency tripling beam cross-section shape being finally emitted is almost the same or approximate consistent with original fundamental wave shape.The present invention passes through optics
Spherical surface and cylindrical lens combination, can also be adjusted original beam cross-section shape, for example be adjusted to the cloth in outgoing
Beam radius in the plane of light incidence at Rust interface than wide non-circular cross-section light distribution obvious in its vertical direction,
So that finally on the cross sectional beam size of generated ultraviolet output beam two orthogonal vertical directions described above
It is equal in magnitude, or meet required light spot shape.
The device of the present embodiment is for general on outside laser cavity, is allowed and is generated frequency tripling or quadruple after needing secondary frequency multiplication
Laser beam, along the face of the last one a non-normal incidence for generating harmonic wave, usually nearly Brewster angle exit facet
400, when being emitted, since the p- polarised light of nearly Brewster angle outgoing becomes larger in the hot spot for being emitted end face, what this face was born
Ultraviolet ray intensity becomes smaller, and have being capable of total transmissivity without plating anti-reflection film for the light that polarizes to p- of this Brewster edged surface 400
The characteristics of, so that the whole service life of device is elongated, manufacturing cost becomes smaller.
In addition, front optical system 1020 can also design two frequency-doubling crystals or individual crystal medium, to generated
The opposite escaping angle of fundamental wave and two multiplied frequency harmonics is adjusted, so that they are when further testing generation and frequency effect, it is total
Dimension is improved, so that transfer efficiency is improved.Can also design in frequency conversion in ultrashort pulsed beam
A kind of compensation medium is compensated and is adjusted to be staggered to the time delay between fundamental wave and two multiplied frequency harmonics, so that they
In further generate with frequency immixture, time-interleaving degree is improved, so that transfer efficiency is improved, is omitted to purple
Outer light beam circularity needs further to correct and the ultraviolet optics correcting element of bring difficulty and required high price, decreases
The optical element of the adjustment ultraviolet light beam of device lifetime is influenced, thus, the service life of entire laser frequency converting device is extended, and
Reduce the cost of device.
For being gone away on above-mentioned offer room and time, on the basis of above-mentioned two frequency-doubling crystals 20, front optical system
Can also include but be not required include, compensation crystal 40.
The plane of incidence of two frequency-doubling crystals 20 is cut into Brewster incidence angle interface 100, and the fundamental wave light beam of input is converted
For fundamental wave and two multiplied frequency harmonics, so that the optical intensity on the cross section distribution shape of the fundamental wave 12 and two multiplied frequency harmonics 22 that generate is adjusted
It is whole；The incidence that crystal 40 receives fundamental wave 12 and two multiplied frequency harmonics 22 is compensated, fundamental wave 12 and two multiplied frequency harmonics 22 are realized spatially
Deviation angle compensate or pre-compensation, improve the light extraction efficiency of frequency tripling harmonic wave 32.
The adjustment of the escaping of fundamental wave 12 and two multiplied frequency harmonics 22 in time, using the difference of its group velocity, to fundamental wave 12
It goes away and is adjusted in time with two multiplied frequency harmonics 22, so that the energy transmission of fundamental wave 12 and two multiplied frequency harmonics 22 is in time
Overlapping is optimized and is suitble to generate efficient pulsed UV light beam.
Aforesaid way can derive a variety of special devices, optical element of the Lai Shixian without using multiple ultraviolet resistances
Ultraviolet light intensity profile is further adjusted.
A kind of device selects value complement to repay the design of crystal, so that light beam is through overfill after fundamental wave 12 and two multiplied frequency harmonics 22 generate
Crystal 40 is repaid, realizes compensation or the pre-compensation of deviation angle spatially, so that the light beam of fundamental wave 12 and two multiplied frequency harmonics 22 exists
The frequency tripling crystals direction of propagation is conllinear, to correct beam direction.Space goes away the adjustment of angle, can be by compensating crystal
40 pairs of fundamental waves 12 adjustment different with two multiplied frequency harmonics, 22 refraction angle, so that the energy transmission of fundamental wave 12 and two multiplied frequency harmonics 22
Spatially overlapping is optimized and is suitble to generate the ultraviolet light beam of the beam intensity of high efficiency and high-quality.
In an embodiment of the present invention, compensating module 40 can use the birefringent crystalline substance transparent to fundamental wave and second harmonic
Body.The LBO, LiNOb, LiTb being orientated in some specific angles, KD*P, α-BBO BBO, LKP, KD*P, α-BBO are such as cut,
Quartz crystal etc..
Compensating module 40 is using one of following form:
(1) combination of one or more crystal；
(2) one or more common prisms or the prism of Brewster angle；
(3) one or more chirped mirrors with delayed reflex；
(4) combination of one or more lens or reflecting mirror.
Figure as shown in Figure 2, working principle are described as follows: fundamental wave light beam 11 has the conventional symmetrical optical intensity on the cross section of circle
Degree distribution.Behind the Brewster angle interface 100 for being incident on two frequency-doubling crystals 20, cross section is converted to fundamental wave light beam 11 by circle
Ellipse enters two frequency-doubling crystal crystal 20 after superrefraction, when crystal 20 passes through, obtains phase matched and effectively first
It is secondary to be converted into two double-frequency laser light beams 22, and crystal 20 is left in outgoing from interface 200.The cross section size of light beam 11, due to
Brewster angle is incident, becomes fundamental wave light beam 12, the beam diameter in a direction of fundamental wave light beam 12 exists than elementary beam 11
Diameter in the plane of incidence composed by incident ray and the normal of end face 100 becomes larger.Light beam 11 becomes fundamental wave after crystal 20
12 and two multiplied frequency harmonic 22 be incident on compensation crystal 40, after overcompensation crystal 40, two beams of fundamental wave 12 and two multiplied frequency harmonics 22
The deviation angle of light or escaping in time are staggered, by the adjustment of the angle or temperature or other characteristics of the crystal 40 designed
The appropriate adjustment that space or time or both required for obtaining have, so that they are entering frequency tripling crystalline substance by interface 300
30 inside of body crystal is spatially more overlapped when converting out frequency tripling for the second time or more synchronization or both has on the time,
Second of frequency conversion is more efficiently carried out inside crystal 30 into triple-frequency harmonics, generates frequency tripling light beam 31.Light beam 31 passes through
Behind Brewster angle interface 400, the cross-sectional shape of light beam is corrected to circle by ellipse, becomes frequency tripling harmonic optcial beam 32.
Beam diameter of the cross section of frequency tripling harmonic optcial beam 32 in paper is reduced after Brewster interfacial refraction, and due to color
The angle generated is dissipated, is separated from remaining fundamental wave light beam 16 and remaining two frequency multiplication light beams 25 with different shooting angles, leaves interface
400, after certain distance is propagated, can further it be efficiently separated, and beam cross-section is made to return generally to original base
True degree required for shape or holding when wave incidence, but also the triple-frequency harmonics light beam 32 generated is readily separated out and fills
It sets.
Wherein, the Brewster angle at interface 100 and interface 400 is almost the same.Therefore, light beam 11 needs not move through complexity
Correction, so that it may realize be converted to cross section be original shape frequency tripling harmonic optcial beam 32.
This mode mainly has the advantages that following four:
(1) section of the frequency tripling light beam on 400 inclined-plane of interface is wide, so that because the frequency tripling crystal longevity that light beam 32 irradiates
Life length, needs not move through subsequent correction, that is, can reach intended shape；
(2) interface 400 does not need additional plated film, greatly reduces cost；
(3) frequency tripling light beam 32, remaining fundamental wave light beam 16 and remaining two frequency multiplication light beams 25 are separated with different shooting angles,
Interface 400 is left, realizes separation automatically in space；
(4) material, grain boundary 100 and the Brewster angle at interface 400 basic one of crystal 20 and crystal 30 are selected
It causes, so that fundamental wave light beam 11 and 32 shape of frequency tripling harmonic wave are almost the same, meets the needs of subsequent applications.
Above-described embodiment provided by the invention uses two frequency-doubling crystals 20 or adjustment input base of Brewster angle incidence
The frequency tripling crystal 30 of other transparent mediums and Brewster angle cutting of wave cross sectional beam intensity distribution, so that with cloth
The fundamental wave and triple-frequency harmonics of the incidence of Rust angle or outgoing, generate after non-linear conversion crystal is secondary in chamber outer light beam
After frequency tripling light beam is refracted off frequency tripling crystal 30, all or part of beam diameter because of in the Brewster plane of incidence is offset
Variation, adjustment or the basic cross-sectional shape or intensity distribution for keeping former base wave, so that the frequency tripling light beam being finally emitted is horizontal
Cross sectional shape is almost the same or approximate consistent with original fundamental wave shape.Also, it can also be additionally converted in beam frequencies twice
It arranges or does not arrange between journey, the compensation crystal 40 that the deviation angle of an adjustable fundamental wave and second harmonic or time are staggered.
In an embodiment of the present invention, two frequency-doubling crystals 20, frequency tripling crystal 30 and compensation crystal 40 are it can be selected that such as
LBO, BBO, α-BBO, quartz crystal, LiNOb, KTP, PPLN, PPKTP, a variety of non-linear laser crystals such as PPTN or they
Combination, cutting is in different directions, angle needed for realizing phase matched or space or time bias.Compensating module can be
Compensate crystal or other optical components etc..
[3rd embodiment]
Fig. 3 describes a kind of design similar to Fig. 2, main difference is that by the design of Fig. 2, by reversely passing through for the second time
The interface of Brewster angle cutting, so that the cross sectional beam shape of original incident beam 11, the frequency tripled laser beam 32 of outgoing
As basic holding or similar shape, then export.When output beam is not needed because of second of frequency multiplication in this way, gone out by single
Beam cross-section circularity when penetrating Brewster angle interface changes and needs to carry out additional beam cross-section beam intensity and carry out
Correction.It should be pointed out that the Brewster angle component of first passage here, be also possible to one individually, have it is preparatory
The optical component for adjusting beam cross-section light distribution, generate with triple-frequency harmonics and frequency crystal separate.
In the present embodiment, front optical system includes: frequency tripling crystal 30, two frequency-doubling crystals 20 and optical reflection component
02, an interface cut of frequency tripling crystal 30 is Brewster angle interface 400, have both fundamental wave beam incident surface and fundamental wave and
The exit facet of second harmonic
Fundamental wave light beam is incident to the Brewster angle interface 400 of frequency tripling crystal 30, to the light of the fundamental wave light beam 111 of input
Strong distribution is adjusted, and is adjusted with the cross-sectional shape of the fundamental wave to generation, is emitted to two frequency-doubling crystals 20.Two frequencys multiplication are brilliant
The fundamental wave sent by frequency tripling crystal 30 is converted to two multiplied frequency harmonics by body 20, and remaining fundamental wave and two multiplied frequency harmonics are emitted to
Optical reflection component.Optical reflection component 02 is again introduced into two frequency-doubling crystals for after fundamental wave and the reflection turnover of two multiplied frequency harmonics, by
Two frequency-doubling crystals fundamental wave it is secondary by when carry out two frequency-doubled conversions to generate two multiplied frequency harmonics, by remaining fundamental wave and two frequencys multiplication
Harmonic wave is emitted to another interface 300 of frequency tripling crystal 30.The fundamental wave of input and two multiplied frequency harmonics are existed by frequency tripling crystal 30
Occur in frequency tripling crystal 30 and frequency is converted, generate frequency tripling harmonic wave, frequency tripling harmonic wave passes through the Bruce of frequency tripling crystal 30
It is emitted behind special angle interface 400, is corrected to three almost the same with the optical intensity on the cross section distribution shape of the fundamental wave light beam of initial input
Frequency multiplication outgoing beam 32.
In an embodiment of the present invention, optical reflection component 02 is using one of following form:
(1) mirror surface；
The collective component of (2) one groups of multiple mirror surface compositions；
(3) taper reflections；
(4) phase conjugate mirror pieces.
Further, front optical system can with but be not required, include: compensating module or for compensation crystal, 40,
Compensation crystal 40 is located between frequency tripling crystal 30 and two frequency-doubling crystals 20, for empty to realizing by fundamental wave and two multiplied frequency harmonics
Between on deviation angle and temporal pulse daley escaping be staggered and compensate.
Compensating module receives the fundamental wave and two multiplied frequency harmonics, realizes spatially to the fundamental wave and two multiplied frequency harmonics
Deviation angle or temporal pulse daley escaping be staggered, or both have, be conducive to generating high-quality or high conversion efficiency
Triple-frequency harmonics adjustment or pre-compensation so that the beam direction of the fundamental wave and two multiplied frequency harmonics is in secondary frequency conversion
Frequency tripling crystals it is more preferably conllinear or synchronous.
With reference to Fig. 3, the working principle of the present embodiment is as follows: incident beam fundamental wave 111, it is assumed that has circular horizontal interface shape
The beam intensity of shape enters crystalline substance into the Brewster angle interface 400 of frequency tripling crystal 30 with Brewster angle incidence
After body 30, become the beam intensity of elliptical cross sectional shape inside crystal 30, passes through the normal incidence interface of crystal 30
The light beam 112 being emitted after 300 is still elliptical shape, generates two frequency multiplication light beams into two frequency-doubling crystals 20 using crystal 40
21.Wherein, the cross-sectional shape of two frequency multiplication light beams 21 is ellipse.
Optical reflection component 02 passes through the light beam 112 of fundamental wave (frequency ω) and two frequencys multiplication (frequency is 2 ω) light beam 21
After crossing 180 degree or approximate 180 degree reflection turnover, two frequency-doubling crystals 20 and compensation crystal 40 are again introduced into, frequency tripling crystalline substance is incident on
In the interface 300 of body 30.Two frequency-doubling crystals 20 generate two frequencys multiplication (2 ω) conversion when passing through for fundamental wave 112 2 times.112 He of fundamental wave
Second harmonic 22 continues the phase with oval cross section light beam 15 and oval cross section second harmonic light beam 24 in crystal 30
Under match condition, occur to generate frequency tripling (3 ω) light beam of oval cross section with second of frequency conversion of frequency (+2 ω of ω)
Light beam 31.The light beam 31 of ellipse is behind Brewster angle interface 400, due to being emitted with Brewster angle, light beam 31
After interface 400 is left in cross section outgoing, the beam diameter in the Brewster plane of incidence is adjusted, and becomes have or approach tool
There is the frequency tripling light beam 32 of the original beam circularity of former base wave.
In this way, initial fundamental wave 111 is the light beam of circular cross section, by the section of two Brewster angle incidences and outgoing
Afterwards, generated frequency tripling light beam 32 can be left with basic circular cross section beam shape.The frequency tripling of this device output
Light beam 32, in addition to because of some changes that during frequency multiplication, the beam shape of cross section is formed by the phase matched of non-linear conversion
It is outside the pale of civilization, the shape of the cross section of original incident fundamental wave light beam, certain shape required for fundamental wave 111 can be kept substantially
After input, generated frequency tripling output beam 32 can achieve the circularity of design and no longer need to carry out beam cross section
The adjustment of face shape.Because to the adjustment of the beam shape of fundamental wave relative to the ultraviolet light beam adjustment to frequency tripling come it is easy very
It is more, this scheme it is ingenious in design simple, manufacturing cost is low.Due to without using additional optics to frequency tripling beam cross section
Face is further adjusted, and structure is simple, and stability is high.Due to having used the crystal of Brewster angle incidence, in crystal
The cross section of the fundamental wave on portion and surface, two frequencys multiplication and the irradiation of frequency tripling light beam becomes larger, and the frequency tripling crystal service life is elongated.Whole device
Service life extends.
[fourth embodiment]
Specifically, front optical system includes: transition medium 10, two frequency-doubling crystals 20 and compensation crystal 40 with reference to Fig. 4.
Wherein, transition medium 10 presets the fundamental wave cross-sectional shape of input, as long as be transparent medium.
The plane of incidence of transition medium 10 is cut into Brewster incidence angle interface, the light intensity for the fundamental wave light beam to input
Distribution is adjusted, and is emitted to two frequency-doubling crystals 20；The fundamental wave emitted by transition medium 10 is converted to two by two frequency-doubling crystals 20
Remaining fundamental wave and two multiplied frequency harmonics are emitted to compensation crystal 40 by multiplied frequency harmonic；Compensating module 40 receives fundamental wave and two frequencys multiplication
The incidence of harmonic wave realizes that deviation angle spatially or temporal pulse daley escaping are staggered progress to fundamental wave and two multiplied frequency harmonics
It presets and compensates.Compensating module 40 realizes deviation angle or pulse daley escaping mistake spatially to fundamental wave and two multiplied frequency harmonics
It opens after compensating, so that the light beam side of fundamental wave and two multiplied frequency harmonics is in space or is overlapped on the time more preferable.
Transition medium has at least one interface for the cutting of Brewster angle, to incident beam cross-section light spot shape
It is adjusted, so that the fundamental wave light beam adjusted is conducive to the sum of the final light spot shape of output beam required for generating
Frequently needed for converting, second harmonic light beam and remaining fundamental wave light beam.
It should be noted that the sequence of positions of two frequency-doubling crystals 20 and transition medium 10 can exchange.That is, front optical system
System includes: two frequency-doubling crystals 20, transition medium 10 and compensation crystal 40.That is, the plane of incidence of transition medium 10 is cut into Bruce
Special incidence angle interface, the light distribution for fundamental wave and two multiplied frequency harmonics to input are adjusted, and are emitted to compensation crystal 40；
Compensate the incidence that crystal 40 receives fundamental wave and two multiplied frequency harmonics, to fundamental wave and two multiplied frequency harmonics realize deviation angle spatially or when
Between on pulse daley be staggered and compensate.
In addition, front optical system of the invention includes: frequency tripling crystal, two frequency-doubling crystals and optical reflection component, three
One interface cut of frequency-doubling crystal is Brewster angle interface, as the plane of incidence for fundamental wave light beam first time.Fundamental wave light beam
It is incident to the Brewster angle interface of frequency tripling crystal, the optical intensity on the cross section distribution of the fundamental wave light beam of input is adjusted, out
It is incident upon two frequency-doubling crystals.The fundamental wave adjusted by frequency tripling crystal is converted to two multiplied frequency harmonics by two frequency-doubling crystals, by remaining base
Wave and two multiplied frequency harmonics are emitted to optical reflection component.After optical reflection component transfers fundamental wave and the reflection of two multiplied frequency harmonics, then
It is secondary to enter two frequency-doubling crystals, by two frequency-doubling crystals again by when carry out two frequency-doubled conversions to generate two multiplied frequency harmonics, will be remaining
Fundamental wave and two multiplied frequency harmonics be emitted to frequency tripling crystal.By frequency tripling crystal by the fundamental wave of input and two multiplied frequency harmonics at three times
Occur in frequency crystal and frequency is converted, generate frequency tripling harmonic wave, frequency tripling harmonic wave passes through the Brewster angle interface of frequency tripling crystal
After be emitted, be corrected to and the optical intensity on the cross section distribution shape of the fundamental wave light beam of initial input is almost the same or three times of required shape
Occur frequently irradiating light beam.
As shown in figure 4, optically transparent transition Jie that the present embodiment is close with medium 30 or the same using a kind of refractive index
Matter 10, and be the plane of incidence of Brewster angle by an interface manufacture of medium, so that the cross section of incident beam is entering
When secondary frequency conversion crystal 30, generated triple-frequency harmonics, when being emitted by frequency tripling crystal 30, the output of frequency tripling crystal
The optical intensity on the cross section distribution shape of light beam keeps the optical intensity on the cross section distribution shape feature of input light beam substantially.
In the device of the present embodiment, it is assumed that incidence wave intensity distribution in cross-section distribution shape is the symmetrical fundamental wave light beam 11 of circle, with close
After seemingly or being refracted into transition medium 10 equal to Brewster incidence angle, 11 cross sectional intensity distribution shape of fundamental wave light beam becomes ellipse
The light beam 12 of circular cross-section.Light beam 12 enters two frequency-doubling crystals 20, when light beam 12 carries out harmonic conversion by two frequency-doubling crystals 20,
Generate second harmonic (two frequencys multiplication) light beam 22 of similar 12 cross-sectional shape of light beam.Light beam 12 and two multiplied frequency harmonic light beams 22 pass through
When the compensation crystal 40 of design, the delay that is staggered of mutual deviation angle or time makes after being subjected to compensation for the appropriate adjustment of crystal 40
Light beam 23 enters two times transfer and generates frequency tripling (and frequency) crystal 30 and generates significantly more efficient and frequency light beam 31, three times of generation
The shape of the optical intensity on the cross section distribution of frequency light beam 31 is also elliptical shape, and substantially has the fundamental wave 12 adjusted by interface 100
Elliptical shape.The light beam 31 of oval cross section is by interface 400, when the length on interface Brewster angle inclined-plane and light beam 31
When short-axis direction cooperation is consistent, light beam 31 can be made to pass through Brewster angle interface with Brewster angle at interface 400
After outgoing, the cross section of light beam 31 is adjusted to frequency tripling light beam 32 by interface 400.The optical intensity on the cross section of frequency tripling light beam 32 point
Cloth can achieve almost the same with the round degree of characteristics of original incident beam 11.
The present invention can obtain required three by adjusting the symmetry of the optical intensity on the cross section distribution of input fundamental wave as a result,
The optical intensity on the cross section of frequency multiplication output beam is distributed.Can be to avoid to frequency tripling using the present invention, the usually light beam of ultraviolet wavelength,
It needs to carry out the complicated Optical devices of beam shape adjustment and needs to overcome such Optical devices after by ultraviolet light short-lived
The difficulty of life.By the method that this is invented, the device of the obtained ultraviolet output light of frequency tripling, output face is without plating to three times
The advantages that anti-reflection film of harmonic wave, device is simple, at low cost, and performance is stablized, and the service life is long.
It should be noted that in above-mentioned all embodiments of the invention, by move in parallel two frequency-doubling crystal or
Other media of adjustment input fundamental wave cross sectional beam intensity distribution, to adjust the hot spot for exporting the frequency tripling harmonic wave at three times
The position of frequency crystal eye point, plays the role of changing a little.
By suitably moving in parallel frequency tripling crystal, the light of adjustment output frequency tripling harmonic wave is in frequency tripling crystal eye point
Relative position plays the role of changing a little.
By translating or rotating the compensation crystal or excessive medium, adjustment exports the light of the frequency tripling harmonic wave at three times
The position of eye point, plays the role of changing a little on frequency crystal Brewster edged surface.
Frequency tripling crystal is moved in parallel by the Brewster face along frequency tripling crystal, adjustment output frequency tripling harmonic wave
The relative position of light eye point on frequency tripling crystal Brewster edged surface, does not cause any variation or movement of output beam,
Play the role of changing a little.
By suitably translating or rotation compensation crystal, the light of adjustment output frequency tripling harmonic wave is in frequency tripling crystal Brewster
The relative position of eye point on edged surface, plays the role of changing a little.
In above-mentioned all embodiments of the invention, crystal and the frequency tripling crystal in the optical system of front use with
One of lower form: LBO, LiNOb, LiTb, BBO, LKP, KD*P, α-BBO, quartz crystal, PPLN, PPTN, PPKT or other are non-
Linear crystal.The Brewster of these crystal is incident or shooting angle between 30-70 ° or controls.
In the present invention, frequency tripling crystal can be substituted with quadruple frequency crystal, when generating the secondary frequency multiplication of two frequency multiplication waves, will entered
Two multiplied frequency harmonics penetrated are converted to quadruple harmonic wave, are emitted, are corrected to by the Brewster angle interface of the quadruple frequency crystal
With the optical intensity on the cross section distribution shape of the fundamental wave light beam of initial input is almost the same or the quadruple of required other shapes is emitted
Light beam.
In addition, it is contemplated that the present invention may be use with generating the four-time harmonic of fundamental wave.Specifically, frequency tripling crystal uses phase matched
When generating the secondary frequency multiplication of two frequency multiplication waves, two incident multiplied frequency harmonics are converted into quadruple harmonic wave, by quadruple frequency crystal
The outgoing of Brewster angle interface, is corrected to the quadruple almost the same with the cross-sectional distribution shape of the fundamental wave light beam of initial input
Outgoing beam.That is, the process of quadruple light beam is generated above, if crystal 30 is that a phase matched generates the two of two frequency multiplication waves
Secondary frequency multiplication, i.e. quadruple wave can also effectively generate the four-time harmonic of fundamental wave.In this case, four-time harmonic is transversal
Face is also adjusted or is corrected as required beam quality.If quadruple light beam has P- polarization state, exit boundary interface 400
When, and understand total transmissivity, method is equally effective.If quadruple light beam is not P- polarization state, the interface 400 of non-plated anti-reflection film is right
It has loss.
The device that three multiplying power of laser emission according to an embodiment of the present invention generates can be achieved on the outer secondary laser frequency of chamber
The beamquality improvement of conversion, cost reduce and crystal service life for finally converting extends, nonlinear crystal may not be needed defeated
It appears plated film, the ingehious design of nonlinear optical frequency conversion and selection.The present invention is to generate frequency tripling or other many times frequency multiplications, is led to
The deep ultraviolet light that 266nm is often generated for the ultraviolet laser of the frequency tripling 355nm of 1064nm wavelength or four frequencys multiplication, using simple
And reliable many times frequency multiplication conversion produces ultraviolet or deep ultraviolet laser light beam scheme, meet the long-life, high stability and it is low at
The design of this ultraviolet laser needs.This hair cleverly it is bright create by preset conversion before fundamental wave and second harmonic
Beam intensity shape reach the beam quality requirement for realizing final laser frequency conversion outside chamber, cost reduces and conversion is brilliant
Body life time extends, and production is simple.
The device that three multiplying power of laser emission of the embodiment of the present invention generates, has the advantages that
1) the frequency tripling crystal shape for having used Brewster angle to be emitted, so that beam diameter of the light beam at eye point
Become larger, luminous intensity becomes smaller, and service life of the crystal after by ultraviolet light is elongated；
2) Brewster angle outgoing or incident of the secondary or even-times by the cutting of Brewster angle has been used, has been carried out
In frequency tripling conversion process, generated frequency tripling ultraviolet light beam cross sectional intensity distribution can be relatively easily adjusted.It is basic to protect
The cross-sectional shape for holding fundamental wave light beam is reduced without carrying out the adjustment of complicated ultraviolet frequency tripling beam cross-section intensity distribution
Needs and possible damage to multiple ultraviolet optics components, reduce costs, improve the reliability and stability of product；
3) among first time frequency multiplication and second of frequency multiplication process, compensation crystal, pre-compensation second harmonic and base is added
The deviation angle generated in the process due to second-harmonic conversion or temporal delay between wave are staggered, and can significantly improve second
Secondary and frequency (+2 ω of ω) generates the efficiency of frequency tripling (3 ω) light beam of triple-frequency harmonics；
4) frequency-doubling crystal of Brewster angle is used, so that Brewster angle cutting section does not need optical coating,
So that the crystal with Brewster angle is simple to manufacture, and at low cost.
In the description of this specification, reference term " one embodiment ", " some embodiments ", " example ", " specifically show
The description of example " or " some examples " etc. means specific features, structure, material or spy described in conjunction with this embodiment or example
Point is included at least one embodiment or example of the invention.In the present specification, schematic expression of the above terms are not
Centainly refer to identical embodiment or example.Moreover, particular features, structures, materials, or characteristics described can be any
One or more embodiment or examples in can be combined in any suitable manner.
Although the embodiments of the present invention has been shown and described above, it is to be understood that above-described embodiment is example
Property, it is not considered as limiting the invention, those skilled in the art are not departing from the principle of the present invention and objective
In the case where can make changes, modifications, alterations, and variations to the above described embodiments within the scope of the invention.The scope of the present invention
By appended claims and its equivalent limit.
Claims (10)
1. the device that a kind of three multiplying power of laser emission generates characterized by comprising front optical system and frequency tripling crystal,
Wherein,
The front optical system, the light distribution for the fundamental wave light beam to input are adjusted, and by the incident fundamental wave
Light beam is converted to fundamental wave and two multiplied frequency harmonics, but also the optical intensity on the cross section distribution shape for two multiplied frequency harmonics converted is adjusted
It is whole, fundamental wave adjusted and two multiplied frequency harmonic beam exits to the frequency tripling crystal；
The beam exit face of the frequency tripling crystal is cut into Brewster angle exit boundary interface, by the fundamental wave of input and two times
Frequency harmonic wave occurs in the frequency tripling crystal and frequency is converted, and generates frequency tripling harmonic optcial beam, the frequency tripling harmonic optcial beam warp
It is emitted after crossing Brewster angle exit boundary interface, is converted to required or is cross section light with the fundamental wave light beam of initial input
The essentially identical frequency tripling beam exit of strong distribution shape.
2. the device that three multiplying power of laser emission as described in claim 1 generates, which is characterized in that the front optical system packet
At least one two frequency-doubling crystal is included, for the fundamental wave light beam of input to be converted to two multiplied frequency harmonics and remaining fundamental wave, so that generating
Remaining fundamental wave and the optical intensity on the cross section distribution shapes of two multiplied frequency harmonics be adjusted.
3. the device that three multiplying power of laser emission as described in claim 1 generates, which is characterized in that the incidence fundamental wave light beam
Optical intensity on the cross section distribution shape is circle, the brilliant intracorporal frequency tripling harmonic wave of remaining fundamental wave, two multiplied frequency harmonics and the frequency tripling
Optical intensity on the cross section distribution shape be ellipse, the shape of the frequency tripling outgoing beam is circle.
4. the device that three multiplying power of laser emission as described in claim 1 generates, which is characterized in that the front optical system packet
It includes: compensating module,
The compensating module receives the fundamental wave and two multiplied frequency harmonics, realizes spatially to the fundamental wave and two multiplied frequency harmonics
Deviation angle or temporal pulse daley escaping be staggered, or both have, be conducive to generating high-quality or high conversion efficiency
Triple-frequency harmonics adjustment or pre-compensation so that the beam direction of the fundamental wave and two multiplied frequency harmonics is in secondary frequency conversion
Frequency tripling crystals it is more preferably conllinear or synchronous.
5. the device that three multiplying power of laser emission as claimed in claim 4 generates, which is characterized in that the compensating module include but
It is not limited to, using one of following form:
(1) combination of one or more crystal；
(2) one or more common prisms or the prism of Brewster angle；
(3) one or more chirped mirrors with delayed reflex；
(4) combination of one or more lens or reflecting mirror.
6. the device that three multiplying power of laser emission as described in claim 1 generates, which is characterized in that the front optical system packet
It includes all or part of: transition medium, two frequency-doubling crystals and compensating module, wherein
At least one interface cut of the transition medium is Brewster incidence angle interface, for the fundamental wave light beam to input
Light distribution is adjusted, and is emitted on two frequency-doubling crystal；
Two frequency-doubling crystal will be partially converted into two multiplied frequency harmonics and remaining by transition medium fundamental wave adjusted
Remaining fundamental wave and two multiplied frequency harmonics are emitted to the compensating module or directly to frequency tripling crystal by fundamental wave；
The compensating module receives the incidence of the fundamental wave and two multiplied frequency harmonics, realizes space to the fundamental wave and two multiplied frequency harmonics
On deviation angle or temporal pulse daley go away the pre-compensation that is staggered.
7. the device that three multiplying power of laser emission as claimed in claim 6 generates, which is characterized in that the transition medium has extremely
A few interface is the cutting of Brewster angle, is adjusted to incident beam cross-section light spot shape, so that adjusted
Fundamental wave light beam is conducive to the final light spot shape of output beam required for generating and that frequency conversion is required, second harmonic
Light beam and remaining fundamental wave light beam.
8. the device that three multiplying power of laser emission as described in claim 1 generates, which is characterized in that the front optical system packet
It includes: two frequency-doubling crystals, transition medium, wherein
Incident fundamental wave light beam is converted to fundamental wave and two multiplied frequency harmonics by two frequency-doubling crystal；
The plane of incidence of the transition medium is cut into Brewster incidence angle interface, the light of fundamental wave and two multiplied frequency harmonics to generation
Strong distribution is adjusted.
9. the device that three multiplying power of laser emission as described in claim 1 generates, which is characterized in that the front optical system packet
Include: frequency tripling crystal, two frequency-doubling crystals and optical reflection component, an interface cut of the frequency tripling crystal are Brewster
Angle interface, as the plane of incidence for the fundamental wave light beam first time, wherein
The fundamental wave light beam is incident to the Brewster angle interface of the frequency tripling crystal, to the cross section of the fundamental wave light beam of input
Light distribution is adjusted, and is emitted to two frequency-doubling crystal；
The fundamental wave adjusted by the frequency tripling crystal is converted to two multiplied frequency harmonics by two frequency-doubling crystal, by remaining fundamental wave and
Two multiplied frequency harmonics are emitted to the optical reflection component；
The optical reflection component is again introduced into two frequency-doubling crystal for after the fundamental wave and the reflection turnover of two multiplied frequency harmonics,
By two frequency-doubling crystal again by when carry out two frequency-doubled conversions to generate two multiplied frequency harmonics, by remaining fundamental wave and two frequencys multiplication
Harmonic wave is emitted to the frequency tripling crystal；
The fundamental wave of input and two multiplied frequency harmonics are occurred in the frequency tripling crystal by the frequency tripling crystal and frequency turns
It changes, generates frequency tripling harmonic wave, the frequency tripling harmonic wave is emitted behind the Brewster angle interface of the frequency tripling crystal, is corrected
Optical intensity on the cross section distribution shape for the fundamental wave light beam with initial input is almost the same or the frequency tripling outgoing beam of required shape.
10. the device that three multiplying power of laser emission as described in claim 1 generates, which is characterized in that the optical reflection component
Using one of following form:
(1) mirror surface；
The collective component of (2) one groups of multiple mirror surface compositions；
(3) taper reflections；
(4) phase conjugate mirror pieces.
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| CN201910684187.4A CN110286542B (en) | 2019-07-26 | 2019-07-26 | Device for generating laser radiation triple rate |
| PCT/CN2020/085824 WO2021017539A1 (en) | 2019-07-26 | 2020-04-21 | Device for generating triple rate of laser radiation |
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| CN201910684187.4A CN110286542B (en) | 2019-07-26 | 2019-07-26 | Device for generating laser radiation triple rate |
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| CN111880299A (en) * | 2020-06-22 | 2020-11-03 | 中国科学院苏州生物医学工程技术研究所 | Large-view-field digital scanning optical sheet illumination system based on phase conjugate reflector |
| WO2021017539A1 (en) * | 2019-07-26 | 2021-02-04 | 南京钻石激光科技有限公司 | Device for generating triple rate of laser radiation |
| CN112421361A (en) * | 2020-11-26 | 2021-02-26 | 中国林业科学研究院木材工业研究所 | Ultraviolet ultrafast laser for wood processing |
| CN113708200A (en) * | 2020-06-18 | 2021-11-26 | 北京科益虹源光电技术有限公司 | 266nm deep ultraviolet laser generating device |
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| CN116698375B (en) * | 2023-08-02 | 2023-10-17 | 中国工程物理研究院激光聚变研究中心 | Method for acquiring full-laser power section harmonic conversion efficiency curve |
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| CN110286542B (en) | 2024-07-09 |
| WO2021017539A1 (en) | 2021-02-04 |
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