CN110261939A - Method for manufacturing PDMS-based double-layer structure magnetic response micro-lens array - Google Patents
Method for manufacturing PDMS-based double-layer structure magnetic response micro-lens array Download PDFInfo
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- CN110261939A CN110261939A CN201910569068.4A CN201910569068A CN110261939A CN 110261939 A CN110261939 A CN 110261939A CN 201910569068 A CN201910569068 A CN 201910569068A CN 110261939 A CN110261939 A CN 110261939A
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- 239000004205 dimethyl polysiloxane Substances 0.000 title claims abstract description 152
- 229920000435 poly(dimethylsiloxane) Polymers 0.000 title claims abstract description 152
- 238000004987 plasma desorption mass spectroscopy Methods 0.000 title claims abstract description 151
- 235000013870 dimethyl polysiloxane Nutrition 0.000 title claims abstract description 150
- CXQXSVUQTKDNFP-UHFFFAOYSA-N octamethyltrisiloxane Chemical compound C[Si](C)(C)O[Si](C)(C)O[Si](C)(C)C CXQXSVUQTKDNFP-UHFFFAOYSA-N 0.000 title claims abstract description 149
- 230000004044 response Effects 0.000 title claims abstract description 58
- 238000000034 method Methods 0.000 title claims abstract description 23
- 238000004519 manufacturing process Methods 0.000 title claims abstract description 16
- 229920001971 elastomer Polymers 0.000 claims abstract description 18
- 239000000806 elastomer Substances 0.000 claims abstract description 18
- 238000004528 spin coating Methods 0.000 claims abstract description 10
- 239000000203 mixture Substances 0.000 claims description 53
- SZVJSHCCFOBDDC-UHFFFAOYSA-N iron(II,III) oxide Inorganic materials O=[Fe]O[Fe]O[Fe]=O SZVJSHCCFOBDDC-UHFFFAOYSA-N 0.000 claims description 40
- 239000011248 coating agent Substances 0.000 claims description 16
- 238000000576 coating method Methods 0.000 claims description 16
- 239000002245 particle Substances 0.000 claims description 15
- 239000003795 chemical substances by application Substances 0.000 claims description 13
- 239000002105 nanoparticle Substances 0.000 claims description 12
- 239000010409 thin film Substances 0.000 claims description 12
- 238000002156 mixing Methods 0.000 claims description 10
- 239000000463 material Substances 0.000 abstract description 11
- 230000003287 optical effect Effects 0.000 abstract description 10
- 238000002834 transmittance Methods 0.000 abstract description 6
- 230000008859 change Effects 0.000 abstract description 5
- 230000000694 effects Effects 0.000 abstract description 5
- 238000003384 imaging method Methods 0.000 description 8
- 239000010408 film Substances 0.000 description 7
- 239000002131 composite material Substances 0.000 description 4
- 238000010586 diagram Methods 0.000 description 4
- 238000004458 analytical method Methods 0.000 description 3
- 239000011159 matrix material Substances 0.000 description 3
- 238000000518 rheometry Methods 0.000 description 3
- 230000007613 environmental effect Effects 0.000 description 2
- 239000011521 glass Substances 0.000 description 2
- 239000002122 magnetic nanoparticle Substances 0.000 description 2
- 239000006249 magnetic particle Substances 0.000 description 2
- 238000000399 optical microscopy Methods 0.000 description 2
- 238000007711 solidification Methods 0.000 description 2
- 230000008023 solidification Effects 0.000 description 2
- 238000002604 ultrasonography Methods 0.000 description 2
- -1 Polydimethylsiloxane Polymers 0.000 description 1
- 238000004026 adhesive bonding Methods 0.000 description 1
- 238000003491 array Methods 0.000 description 1
- 230000009286 beneficial effect Effects 0.000 description 1
- 229910002056 binary alloy Inorganic materials 0.000 description 1
- 238000012512 characterization method Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 125000000118 dimethyl group Chemical group [H]C([H])([H])* 0.000 description 1
- 239000006185 dispersion Substances 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000003292 glue Substances 0.000 description 1
- 239000008187 granular material Substances 0.000 description 1
- 239000012943 hotmelt Substances 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 239000008204 material by function Substances 0.000 description 1
- 238000000465 moulding Methods 0.000 description 1
- 239000002086 nanomaterial Substances 0.000 description 1
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- 238000001259 photo etching Methods 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
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- 230000008439 repair process Effects 0.000 description 1
- 229920005573 silicon-containing polymer Polymers 0.000 description 1
- 229920002379 silicone rubber Polymers 0.000 description 1
- 238000003756 stirring Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G02—OPTICS
- G02B—OPTICAL ELEMENTS, SYSTEMS OR APPARATUS
- G02B3/00—Simple or compound lenses
- G02B3/0006—Arrays
- G02B3/0012—Arrays characterised by the manufacturing method
- G02B3/0031—Replication or moulding, e.g. hot embossing, UV-casting, injection moulding
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/29—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the position or the direction of light beams, i.e. deflection
- G02F1/294—Variable focal length devices
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- Physics & Mathematics (AREA)
- Nonlinear Science (AREA)
- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Engineering & Computer Science (AREA)
- Manufacturing & Machinery (AREA)
- Compositions Of Macromolecular Compounds (AREA)
Abstract
The invention provides a manufacturing method of a PDMS-based double-layer structure magnetic response micro-lens array, and relates to the technical field of micro-lens array manufacturing methods. The method comprises the following steps: manufacturing a PDMS micro lens array; and (3) spin-coating a PDMS-based magnetorheological elastomer film on the PDMS micro-lens array to obtain the PDMS-based double-layer structure magnetic response micro-lens array. The PDMS-based double-layer structure magnetic response microlens array manufactured by the method is formed on pure material PDMS, so that the optical transmittance is high, the microstructure forming quality is good, and the magnetic response effect can be realized by applying an external magnetic field to change the focal length of the microlens array.
Description
Technical field
The present invention relates to the technical fields of fabricating method of microlens array, in particular to a kind of PDMS base bilayer knot
Structure magnetic response fabricating method of microlens array.
Background technique
Existing magnetic control fabricating method of microlens array makes photoresist lenticule battle array using photoetching and hot-melt technology first
Column mother matrix is made PDMS microlens array concave template from mother matrix, then PDMS- magnetic nano-particle composite material is made from concave template
Magnetic control microlens array.
It is taken shape in material piece using the magnetic control microlens array that the above method manufactures, thickness is larger.On the one hand, because
The optical transmittance of PDMS- magnetic nano-particle composite material is far away from pure material PDMS, so the magnetic control lenticule battle array of manufacture
The optical transmittance of column is relatively low.On the other hand, there are more defects for composite material itself, and the magnetic control manufactured using composite material is micro-
Its micro-structured form quality of lens array is also far away from pure material PDMS.
Summary of the invention
The purpose of the present invention is to provide a kind of PDMS base double-layer structure magnetic response fabricating method of microlens array, moldings
In pure material PDMS, not only optical transmittance is high, but also micro-structured form is high-quality, furthermore, it is possible to be changed by applying external magnetic field
The focal length of microlens array realizes magnetic response effect.
The present invention provides a kind of technical solution:
A kind of PDMS base double-layer structure magnetic response fabricating method of microlens array comprising steps of
Manufacture PDMS microlens array；
The spin coating PDMS based magnetic rheologic elastomer thin film on the PDMS microlens array obtains PDMS base double-layer structure magnetic
Respond microlens array.
Further, the manufacture PDMS microlens array, comprising:
The first PDMS prepolymer and the first curing agent are mixed, PDMS mixture is obtained；
The PDMS mixture is spun on SU-8 cavity plate, obtains the PDMS microlens array.
Further, after the acquisition PDMS mixture, comprising:
The PDMS mixture is vacuumized in vacuum (-tight) housing.
Further, described that the PDMS mixture is spun on SU-8 cavity plate, obtain PDMS microlens array, comprising:
By PDMS mixture drop in the centre of SU-8 cavity plate, the PDMS mixture flows described in covering
The array region of SU-8 cavity plate；
Solidify the PDMS mixture, obtains the PDMS microlens array.
Further, the spin coating PDMS based magnetic rheologic elastomer thin film on the PDMS microlens array obtains
PDMS base double-layer structure magnetic response microlens array, comprising:
Mix the 2nd PDMS prepolymer, Fe3O4Particle and the second curing agent obtain PDMS-Fe3O4Nano particle mixing
Object；
By the PDMS-Fe3O4Mixture of nanoparticles is spun on the PDMS microlens array, obtains uncured
PDMS-Fe3O4Compelx coating；
By the unsegregated SU-8 cavity plate, the PDMS microlens array and the PDMS-Fe3O4Compelx coating is set
In uniform strong magnetic field；
Solidify the PDMS-Fe3O4Compelx coating obtains the PDMS base double-layer structure magnetic response microlens array,
In, the PDMS base double-layer structure magnetic response microlens array includes the PDMS based magnetic rheologic elastomer thin film.
Further, mixing the 2nd PDMS prepolymer, Fe3O4Particle and curing agent obtain PDMS-Fe3O4Nanometer
Granulate mixture, comprising:
Mix the 2nd PDMS prepolymer and the Fe3O4Particle obtains intermediate blend；
The intermediate blend and second curing agent are mixed, the PDMS-Fe is obtained3O4Mixture of nanoparticles.
Further, the mixing the 2nd PDMS prepolymer and the Fe3O4Particle obtains intermediate blend, packet
It includes:
The Fe3O4The partial size of particle is 20nm, the Fe3O4The weight percent of particle is 1wt%.
Further, described by the unsegregated SU-8 cavity plate, the PDMS microlens array and the PDMS-
Fe3O4Compelx coating is placed in uniform strong magnetic field, comprising:
The magnetic direction of the uniform strong magnetic field is parallel or perpendicular to the PDMS-Fe3O4Compelx coating.
Further, after the acquisition PDMS base double-layer structure magnetic response microlens array, comprising:
The PDMS base double-layer structure magnetic response microlens array is removed from the SU-8 cavity plate.
The beneficial effect of PDMS base double-layer structure magnetic response fabricating method of microlens array provided by the invention is:
(1) micro-structured form of PDMS base double-layer structure magnetic response microlens array is in pure material PDMS, not only optical lens
Rate height is crossed, and micro-structured form is high-quality.
(2) bottom of PDMS microlens array is PDMS based magnetic rheologic elastomer thin film, since its refractive index can pass through
Apply external magnetic field to adjust, so that the focal length of PDMS base double-layer structure magnetic response microlens array be allow to adjust by external magnetic field.
Therefore, the PDMS base double-layer structure magnetic response microlens array tool of manufacturing method production provided in an embodiment of the present invention
There are higher optical transmittance, good micro-structured form quality and image quality.Moreover, can change by applying external magnetic field
The focal length of microlens array realizes magnetic response effect.
Detailed description of the invention
In order to illustrate the technical solution of the embodiments of the present invention more clearly, below will be to needed in the embodiment attached
Figure is briefly described, it should be understood that the following drawings illustrates only certain embodiments of the present invention, therefore is not construed as pair
The restriction of range for those of ordinary skill in the art without creative efforts, can also be according to this
A little attached drawings obtain other relevant attached drawings.
Fig. 1 is that the process of PDMS base double-layer structure magnetic response fabricating method of microlens array provided in an embodiment of the present invention is shown
It is intended to.
Fig. 2 is a kind of structural schematic diagram of PDMS base double-layer structure magnetic response microlens array.
Fig. 3 is another structural schematic diagram of PDMS base double-layer structure magnetic response microlens array.
Fig. 4 is a kind of imaging results schematic diagram of PDMS base double-layer structure magnetic response microlens array.
Fig. 5 is another imaging results schematic diagram of PDMS base double-layer structure magnetic response microlens array.
Icon: 1-SU-8 cavity plate；2-PDMS microlens array；3-PDMS-Fe3O4Compelx coating；4-PDMS base double-layer structure
Magnetic response microlens array.
Specific embodiment
In order to make the object, technical scheme and advantages of the embodiment of the invention clearer, below in conjunction with the embodiment of the present invention
In attached drawing, technical scheme in the embodiment of the invention is clearly and completely described, it is clear that described embodiment is
A part of the embodiment of the present invention, instead of all the embodiments.The present invention being usually described and illustrated herein in the accompanying drawings is implemented
The component of example can be arranged and be designed with a variety of different configurations.
Therefore, the detailed description of the embodiment of the present invention provided in the accompanying drawings is not intended to limit below claimed
The scope of the present invention, but be merely representative of selected embodiment of the invention.Based on the embodiments of the present invention, this field is common
Technical staff's every other embodiment obtained without creative efforts belongs to the model that the present invention protects
It encloses.
It should also be noted that similar label and letter indicate similar terms in following attached drawing, therefore, once a certain Xiang Yi
It is defined in a attached drawing, does not then need that it is further defined and explained in subsequent attached drawing.
In addition, term " first ", " second ", " third " etc. are only used for distinguishing description, it is not understood to indicate or imply
Relative importance.
Referring to Fig. 1, a kind of 4 manufacturing method of PDMS base double-layer structure magnetic response microlens array is present embodiments provided,
Comprising steps of
S10: manufacture PDMS microlens array 2 specifically includes step:
S11: the first PDMS prepolymer of mixing and the first curing agent obtain PDMS mixture.
It takes the first PDMS prepolymer 2g to be put into beaker specifically, making to weigh with scale, the first curing agent is then taken also to be put in
Beaker, stirring mix two components, obtain PDMS mixture, then PDMS mixture is put into ultrasonic vibration instrument and vibrates 5min
Keep its mixing more uniform.
Wherein, PDMS (Chinese name: dimethyl silicone polymer, English name: Polydimethylsiloxane, referred to as:
It PDMS) is a kind of silicone elastomer, the mixture by solidifying PDMS prepolymer and curing agent obtains, and has high optical transparency
Degree and the high contour accuracy less than 10nm can be used for manufacturing the optical element for carrying micro nano structure, such as lenticule.The present embodiment
In, the PDMS for manufacturing lenticule is pure material, without the characteristic for generating response to environmental stimuli.
S12: PDMS mixture is vacuumized in vacuum (-tight) housing.
10min is vacuumized specifically, the PDMS mixture for handling completion in S11 is put into vacuum (-tight) housing, removal PDMS is mixed
Close the bubble in object.
S13: PDMS mixture is spun on SU-8 cavity plate 1, obtains PDMS microlens array 2.
Specifically, first SU-8 cavity plate 1 is placed horizontally on the glue evenning table of sol evenning machine.
Take the PDMS mixture 0.2g drop for handling completion in S12 in the centre of SU-8 cavity plate 1, PDMS mixture flow again
The array region of dynamic covering SU-8 cavity plate 1.
Then, sol evenning machine is opened, the gluing parameter of sol evenning machine: level-one revolving speed 90r/min, duration 15s is set；Second level
Revolving speed 1500r/min, duration 40s.Start sol evenning machine, 1 surface of SU-8 cavity plate, that is, spin coating, one layer of PDMS mixture.
Finally, horizontal rest spin coating has the SU-8 cavity plate 1 of one layer of PDMS mixture under room temperature environment, until PDMS is mixed
Object solidification, which is PDMS microlens array 2.
S20: the spin coating PDMS based magnetic rheologic elastomer thin film on PDMS microlens array 2 obtains PDMS base double-layer structure
Magnetic response microlens array 4, specifically includes step:
S21: the 2nd PDMS prepolymer of mixing and Fe3O4Particle obtains intermediate blend.
It is put into beaker specifically, measuring the 2nd PDMS prepolymer 5g, then partial size is added with the weight percent of 1wt%
The Fe of 20nm3O4Particle is put into Ultrasound Instrument in beaker, then after mixing evenly with glass bar and vibrates 3min, makes Fe3O4Particle
It is uniformly distributed in the 2nd PDMS prepolymer, obtains intermediate blend.
S22: mixing intermediate blend and the second curing agent obtain PDMS-Fe3O4Mixture of nanoparticles.
Specifically, the second curing agent 0.5g is added in the intermediate blend that S21 is obtained, then after mixing evenly with glass bar
1min is vibrated with Ultrasound Instrument, i.e. acquisition PDMS-Fe3O4Mixture of nanoparticles.
S23: by PDMS-Fe3O4Mixture of nanoparticles is spun on PDMS microlens array 2, obtains uncured PDMS-
Fe3O4Compelx coating 3.
Specifically, first SU-8 cavity plate 1 is placed on the spin coating platform of sol evenning machine, and make to be provided with PDMS microlens array
2 one side upward, then, takes the PDMS-Fe obtained in S223O4Mixture of nanoparticles 0.3g drop is in PDMS microlens array 2
Centre, finally, setting sol evenning machine spin coating parameters: level-one revolving speed 100r/min, duration 30s；Second-Stage Rotating Speed
3000r/min, duration 40s start sol evenning machine, i.e., one layer of uncured PDMS- is formed on PDMS microlens array 2
Fe3O4Compelx coating 3.
S24: by unsegregated SU-8 cavity plate 1, PDMS microlens array 2 and PDMS-Fe3O4Compelx coating 3 is placed in uniformly strong
In magnetic field.
Wherein, the magnetic direction of uniform strong magnetic field is parallel or perpendicular to PDMS-Fe3O4Compelx coating 3.Fe3O4Nano particle
It is rearranged under magnetic fields along magnetic direction, forms the chain structure parallel or perpendicular to film coated surface.
S25: solidification PDMS-Fe3O4Compelx coating 3 obtains PDMS base double-layer structure magnetic response microlens array 4.
Wherein, it on the basis of S24, keeps applying magnetic field state until curing of coating forms PDMS base double-layer structure magnetic and rings
Answer microlens array 4.PDMS base double-layer structure magnetic response microlens array 4 includes PDMS based magnetic rheologic elastomer thin film.
Magnetic rheology elastic body (English name: Magnetorheological Elastomer, referred to as: MRE) had by non magnetic
Machine viscoelastic matrix and dispersion micron therein or nano magnetic particle composition, are a kind of intelligent functional materials, can be to magnetic
The environmental stimulis such as field, power, temperature generate response.Magnetic rheology elastic body active will be applied to vibration control, in the exploration of optical field
Seldom.In the present embodiment, magnetic rheology elastic body is applied to manufacture lenticule, there is biggish meaning.
S26: PDMS base double-layer structure magnetic response microlens array 4 is removed from SU-8 cavity plate 1.
About characterization PDMS base double-layer structure magnetic response microlens array 4:
(1) surface microscopic topographic
The surface microscopic topographic of PDMS base double-layer structure magnetic response microlens array 4 is characterized using optical microscopy.It please join
Read Fig. 2 and Fig. 3 (Fe in PDMS based magnetic rheologic elastomer thin film3O4Particle weight percentage is 1wt%), the present embodiment provides two
Kind PDMS base double-layer structure magnetic response microlens array 4: the first, as shown in Fig. 2, PDMS based magnetic rheologic elastomer thin film has
It is parallel to the chain structure (parallel chain micro-structure) of film surface；Second, as shown in figure 3, PDMS based magnetic rheologic elastomer is thin
Film has the chain structure (vertical chain micro-structure) perpendicular to film surface.
It can be seen that, marshalling is regular in length and breadth for each lenticule in array, elastomer film from Fig. 2 and Fig. 3
Fe3O4Parallel chain or vertical chain micro-structure are high-visible.
(2) optical imaging analysis
Test macro for carrying out imaging analysis to PDMS base double-layer structure magnetic response microlens array 4 includes carrying
Optical microscopy, imaging material object and the white light source of CCD imaging.
Test object is Fig. 2 and two kinds of PDMS base double-layer structure magnetic response microlens array 4 shown in Fig. 3, and imaging is in kind
It is about 5 millimeters of size of the letter " A " write on filter paper.Imaging results are shown, as Fig. 4 (parallel chain micro-structure) and Fig. 5 are (vertical
Chain micro-structure), in array most lenticules can blur-free imagings, two kinds of PDMS base double-layer structure magnetic response microlens arrays
4 overall image quality are preferable.
(3) magnetic response specificity analysis
When applying magnetic field to PDMS base double-layer structure magnetic response microlens array 4, what elastomer film generated is answered
Power will lead to Fe3O4The spacing of magnetic-particle changes in parallel chain or vertical chain micro-structure, to change the dielectricity of material
Energy (dielectric constant).Elastomer film is two-dimentional binary system, the relationship of refractive index n and permittivity ε are as follows:
Therefore, the refractive index of elastomer film can be changed by applying magnetic field.And the focal length of lenticule is relevant to its material
The refractive index of material, so passing through the focal length of the adjustable PDMS base double-layer structure magnetic response microlens array 4 in magnetic field, to generate
Magnetic response effect.
Manufacturing method provided in this embodiment and the PDMS base double-layer structure magnetic response microlens array 4 obtained, have compared with
High optical transmittance, good micro-structured form quality and image quality.Moreover, can change by application external magnetic field micro-
The focal length of lens array realizes magnetic response effect.
The foregoing is only a preferred embodiment of the present invention, is not intended to restrict the invention, for the skill of this field
For art personnel, the invention may be variously modified and varied.All within the spirits and principles of the present invention, made any to repair
Change, equivalent replacement, improvement etc., should all be included in the protection scope of the present invention.
Claims (9)
1. a kind of PDMS base double-layer structure magnetic response fabricating method of microlens array, which is characterized in that comprising steps of
It manufactures PDMS microlens array (2)；
The spin coating PDMS based magnetic rheologic elastomer thin film on the PDMS microlens array (2) obtains PDMS base double-layer structure magnetic
It responds microlens array (4).
2. PDMS base double-layer structure magnetic response fabricating method of microlens array according to claim 1, which is characterized in that institute
State manufacture PDMS microlens array (2), comprising:
The first PDMS prepolymer and the first curing agent are mixed, PDMS mixture is obtained；
The PDMS mixture is spun on SU-8 cavity plate (1), obtains the PDMS microlens array (2).
3. PDMS base double-layer structure magnetic response fabricating method of microlens array according to claim 2, which is characterized in that institute
It states after obtaining PDMS mixture, comprising:
The PDMS mixture is vacuumized in vacuum (-tight) housing.
4. PDMS base double-layer structure magnetic response fabricating method of microlens array according to claim 3, which is characterized in that institute
It states and is spun on the PDMS mixture SU-8 cavity plate (1), obtain PDMS microlens array (2), comprising:
By PDMS mixture drop in the centre of SU-8 cavity plate (1), the PDMS mixture flowing covers the SU-
The array region of 8 cavity plates (1)；
Solidify the PDMS mixture, obtains the PDMS microlens array (2).
5. PDMS base double-layer structure magnetic response fabricating method of microlens array according to claim 1, which is characterized in that institute
The spin coating PDMS based magnetic rheologic elastomer thin film on the PDMS microlens array (2) is stated, PDMS base double-layer structure magnetic is obtained and rings
Answer microlens array (4), comprising:
Mix the 2nd PDMS prepolymer, Fe3O4Particle and the second curing agent obtain PDMS-Fe3O4Mixture of nanoparticles；
By the PDMS-Fe3O4Mixture of nanoparticles is spun on the PDMS microlens array (2), obtains uncured
PDMS-Fe3O4Compelx coating (3)；
By the unsegregated SU-8 cavity plate (1), the PDMS microlens array (2) and the PDMS-Fe3O4Compelx coating
(3) it is placed in uniform strong magnetic field；
Solidify the PDMS-Fe3O4Compelx coating (3) obtains the PDMS base double-layer structure magnetic response microlens array (4),
Wherein, the PDMS base double-layer structure magnetic response microlens array (4) includes the PDMS based magnetic rheologic elastomer thin film.
6. PDMS base double-layer structure magnetic response fabricating method of microlens array according to claim 5, which is characterized in that institute
State mixing the 2nd PDMS prepolymer, Fe3O4Particle and the second curing agent obtain PDMS-Fe3O4Mixture of nanoparticles, comprising:
Mix the 2nd PDMS prepolymer and the Fe3O4Particle obtains intermediate blend；
The intermediate blend and second curing agent are mixed, the PDMS-Fe is obtained3O4Mixture of nanoparticles.
7. PDMS base double-layer structure magnetic response fabricating method of microlens array according to claim 6, which is characterized in that institute
State Fe3O4The partial size of particle is 20nm, the Fe3O4The weight percent of particle is 1wt%.
8. PDMS base double-layer structure magnetic response fabricating method of microlens array according to claim 5, which is characterized in that institute
The magnetic direction of uniform strong magnetic field is stated parallel or perpendicular to the PDMS-Fe3O4Compelx coating (3).
9. PDMS base double-layer structure magnetic response fabricating method of microlens array according to claim 5, which is characterized in that institute
It states after obtaining the PDMS base double-layer structure magnetic response microlens array (4), comprising:
The PDMS base double-layer structure magnetic response microlens array (4) is removed from the SU-8 cavity plate (1).
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Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN113817320A (en) * | 2021-08-13 | 2021-12-21 | 广东省科学院健康医学研究所 | Magnetic response elastomer and preparation method and application thereof |
| CN114236967A (en) * | 2021-12-13 | 2022-03-25 | 电子科技大学 | Method for manufacturing magnetic control bionic thin film microstructure |
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| CN108318946A (en) * | 2018-01-12 | 2018-07-24 | 上海理工大学 | Focal length with the curved microlens array of changes in spatial distribution production method |
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|---|---|---|---|---|
| CN104530455A (en) * | 2014-12-28 | 2015-04-22 | 电子科技大学 | Preparation method and application of PDMS (polydimethylsiloxane)-magnetic nano-particle composite optical film |
| CN105334553A (en) * | 2015-10-30 | 2016-02-17 | 电子科技大学 | Manufacturing method for magnetron micro-lens array based on PDMS-magnetic nanoparticle composite thin film |
| CN108318946A (en) * | 2018-01-12 | 2018-07-24 | 上海理工大学 | Focal length with the curved microlens array of changes in spatial distribution production method |
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| Publication number | Priority date | Publication date | Assignee | Title |
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| CN113817320A (en) * | 2021-08-13 | 2021-12-21 | 广东省科学院健康医学研究所 | Magnetic response elastomer and preparation method and application thereof |
| CN114236967A (en) * | 2021-12-13 | 2022-03-25 | 电子科技大学 | Method for manufacturing magnetic control bionic thin film microstructure |
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