CN110253407A - Accurate outer rotor air bearing burnishing device - Google Patents

Accurate outer rotor air bearing burnishing device Download PDF

Info

Publication number
CN110253407A
CN110253407A CN201910535733.8A CN201910535733A CN110253407A CN 110253407 A CN110253407 A CN 110253407A CN 201910535733 A CN201910535733 A CN 201910535733A CN 110253407 A CN110253407 A CN 110253407A
Authority
CN
China
Prior art keywords
bearing
polishing barrel
outer rotor
thrust bearing
motor stator
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
CN201910535733.8A
Other languages
Chinese (zh)
Inventor
田硕
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SHENZHEN HI-TEST SEMICONDUCTOR EQUIPMENT Co Ltd
Original Assignee
SHENZHEN HI-TEST SEMICONDUCTOR EQUIPMENT Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SHENZHEN HI-TEST SEMICONDUCTOR EQUIPMENT Co Ltd filed Critical SHENZHEN HI-TEST SEMICONDUCTOR EQUIPMENT Co Ltd
Priority to CN201910535733.8A priority Critical patent/CN110253407A/en
Publication of CN110253407A publication Critical patent/CN110253407A/en
Pending legal-status Critical Current

Links

Classifications

    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B29/00Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents
    • B24B29/02Machines or devices for polishing surfaces on work by means of tools made of soft or flexible material with or without the application of solid or liquid polishing agents designed for particular workpieces
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B41/00Component parts such as frames, beds, carriages, headstocks
    • B24B41/04Headstocks; Working-spindles; Features relating thereto
    • BPERFORMING OPERATIONS; TRANSPORTING
    • B24GRINDING; POLISHING
    • B24BMACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B55/00Safety devices for grinding or polishing machines; Accessories fitted to grinding or polishing machines for keeping tools or parts of the machine in good working condition
    • B24B55/02Equipment for cooling the grinding surfaces, e.g. devices for feeding coolant

Abstract

The invention discloses a kind of accurate outer rotor air bearing burnishing device, the polishing barrel that the present invention rotates is located at the outside of air-bearing, and polishing barrel is inside and outside to be contacted with air, considerably increases radiating efficiency, therefore do not need that radiator structure specially is arranged;Transverse bearing uses orifice restriction, and axial bearing uses Porous, and guarantee air-floating main shaft so radially has bigger bearing capacity in grinding, axial to have relatively high rigidity.

Description

Accurate outer rotor air bearing burnishing device
Technical field
The invention belongs to automate components range, in particular to a kind of ultraprecise outer rotor air bearing burnishing device structure.
Background technique
Existing sanding and polishing device is usually that a column sanding block rotation is fixedly connected with by a rotation axis, thus real Now to the polishing of workpiece, but this polishing form, it can only be dropped by accelerating the flowing of gas or liquid outside sanding block Temperature, cool down low efficiency, can not effectively contain the promotion of polishing deblocking temperature, and sanding block and workpiece can gradually go out under high-temperature condition Phenomena such as softening transform that existing hardness reduces, influence the final quality of finish of workpiece.
Summary of the invention
The object of the present invention is to provide a kind of accurate outer rotor air bearing burnishing device, the polishing barrel that the present invention rotates is located at gas The outside that floating axle is held, polishing barrel is inside and outside to be contacted with air, considerably increases radiating efficiency, therefore does not need specially to set Set radiator structure;Transverse bearing uses orifice restriction, and axial bearing uses Porous, in this way guarantee air-floating main shaft diameter in grinding To with bigger bearing capacity, axially there is relatively high rigidity.
To achieve the above object, technical scheme is as follows:
A kind of precision outer rotor air bearing burnishing device, including motor stator, motor stator are arranged with polishing barrel outside;The master Transverse bearing is installed between axis stator and polishing barrel, if being formed with dry bearing throttle orifice on transverse bearing;On motor stator also Thrust bearing there are two being arranged;Two thrust bearings are respectively at transverse bearing both ends;Spindle end is installed on the outside of thrust bearing Lid, main shaft end cap are fixedly connected with polishing barrel;The motor stator internal shaping has transverse bearing gas circuit and thrust bearing gas circuit;Diameter It is connected to bearing gas circuit with bearing throttle orifice;Axial stomata is formed on thrust bearing, thrust bearing gas circuit and axial stomata connect It is logical;8 both ends of polishing barrel are arranged with transmission belt 11, and transmission belt 11 is solid to be connected with the shaft of rotating device 12.
Further to improve, the main shaft end cap is fixed by lock-screw and polishing barrel.
Further to improve, the thrust bearing is made of porous material ceramics or graphite;The inner ring of thrust bearing It crosses win cooperation to be fixed on motor stator, outer ring is separated with polishing barrel air film.
Further to improve, the rotating device is motor or rotary cylinder.
Detailed description of the invention
Fig. 1 is structure chart of the invention.
Specific embodiment
The invention by transverse bearing gas circuit 1, thrust bearing gas circuit 2, lock-screw 3, main shaft end cap 4, thrust bearing 5, Transverse bearing 6, bearing throttle orifice 7, polishing barrel 8, motor stator 9, axial stomata 10, transmission belt 11, rotating device 12 etc. are several Part forms.
Transverse bearing gas circuit 1 passes to the throttling of transverse bearing by the stomata guidance air-flow opened up inside motor stator Hole, which provides, stablizes air pressure.
Thrust bearing gas circuit 2 passes to the axial stomata 10 of transverse bearing and thrust bearing by motor stator surface pores Thrust bearing, which provides, stablizes air pressure, forms gas mould in thrust bearing two sides.
Lock-screw 3, main function are that main shaft end cap and polishing barrel are fixedly connected with rotation.
Main shaft end cap 4, rotates together with polishing barrel, forms air film between thrust bearing and separates;
Thrust bearing 5, using porous material ceramics or graphite, inner ring is crossed win cooperation and is fixed on motor stator, outside Circle is separated with polishing barrel air film.
Transverse bearing 6, using orifice restriction principle, the regularly arranged throttle orifice on bearing, can be used brass or copper class is closed Gold is used as making material, and transverse bearing inner ring is solid and motor stator tight fit, outer ring and polishing barrel formation have steady pressure Air film.
Throttle orifice 7 forms stable air pressure using orifice restriction principle.
The motor stator 9 plays a part of determining main spindle's.
Polishing barrel 8 is external to contact with air for polishing to article, forms gas between internal and motor stator 9 Film progress is thermally conductive, thus it is thermally conductive to the inside and outside carry out of polishing barrel simultaneously, increase its heat transfer efficiency, it is therefore prevented that due to temperature when polishing Grinding efficiency decline and temperature is excessively high damages caused by workpiece caused by degree improves.The transmission belt that polishing barrel 8 passes through two sides Rotation is driven, ensure that the dynamic equilibrium during that of its turn.
Specific embodiment should compare Summary and be understood, to avoid unnecessary misunderstanding.In addition, this example The content is merely used to help understand method and its core concept of the invention.It should be pointed out that for the skill of the art , without departing from the principle of the present invention, can be with several improvements and modifications are made to the present invention for art personnel, these change It is also fallen within the protection scope of the claims of the present invention into modification.

Claims (4)

1. a kind of precision outer rotor air bearing burnishing device, including motor stator (9), motor stator (9) are arranged with polishing barrel outside (8);It is characterized in that, being equipped with transverse bearing (6) between the motor stator (9) and polishing barrel (8), on transverse bearing (6) If being formed with dry bearing throttle orifice (7);There are two being also arranged on motor stator (9) thrust bearing (5);Two thrust bearings (5) It is respectively at transverse bearing (6) both ends;It is equipped with main shaft end cap (4) on the outside of thrust bearing (5), main shaft end cap (4) and polishing barrel (8) it is fixedly connected;Motor stator (9) internal shaping has transverse bearing gas circuit (1) and thrust bearing gas circuit (2);Transverse bearing Gas circuit (1) is connected to bearing throttle orifice (7);Be formed on thrust bearing (5) axial stomata (10), thrust bearing gas circuit (2) with Axial stomata (10) connection;Polishing barrel (8) both ends are arranged with transmission belt (11), and transmission belt (11) is solid and rotating device (12) Shaft is connected.
2. the accurate outer rotor air bearing burnishing device of solution cavity is lain concealed at punishment stake end as described in claim 1, which is characterized in that institute It is fixed by lock-screw (3) and polishing barrel (8) to state main shaft end cap (4).
3. the accurate outer rotor air bearing burnishing device of solution cavity is lain concealed at punishment stake end as described in claim 1, which is characterized in that institute Thrust bearing (5) is stated to be made of porous material ceramics or graphite;The inner ring of thrust bearing (5) crosses win cooperation and is fixed on main shaft On stator, outer ring is separated with polishing barrel air film.
4. the accurate outer rotor air bearing burnishing device of solution cavity is lain concealed at punishment stake end as described in claim 1, which is characterized in that institute Stating rotating device (12) is motor or rotary cylinder.
CN201910535733.8A 2019-06-20 2019-06-20 Accurate outer rotor air bearing burnishing device Pending CN110253407A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
CN201910535733.8A CN110253407A (en) 2019-06-20 2019-06-20 Accurate outer rotor air bearing burnishing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
CN201910535733.8A CN110253407A (en) 2019-06-20 2019-06-20 Accurate outer rotor air bearing burnishing device

Publications (1)

Publication Number Publication Date
CN110253407A true CN110253407A (en) 2019-09-20

Family

ID=67919735

Family Applications (1)

Application Number Title Priority Date Filing Date
CN201910535733.8A Pending CN110253407A (en) 2019-06-20 2019-06-20 Accurate outer rotor air bearing burnishing device

Country Status (1)

Country Link
CN (1) CN110253407A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112636510A (en) * 2020-11-09 2021-04-09 珠海格力电器股份有限公司 Air supporting rotor heat radiation structure and motor

Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009255220A (en) * 2008-04-16 2009-11-05 Disco Abrasive Syst Ltd Spindle unit mechanism mounted with rotary tool
CN102476194A (en) * 2010-11-25 2012-05-30 北京中电科电子装备有限公司 Aerostatic electric spindle and cooling device thereof
CN103128864A (en) * 2011-11-23 2013-06-05 北京中电科电子装备有限公司 Thrust bearing and motorized spindle
CN204487330U (en) * 2014-12-20 2015-07-22 铜陵长江铜业有限公司 Copper bar burnishing device
CN105643418A (en) * 2016-02-26 2016-06-08 铜陵安东铸钢有限责任公司 Steel polishing device
CN109676507A (en) * 2019-01-23 2019-04-26 厦门大学 A kind of high speed air-floating main shaft air bag polishing device

Patent Citations (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009255220A (en) * 2008-04-16 2009-11-05 Disco Abrasive Syst Ltd Spindle unit mechanism mounted with rotary tool
CN102476194A (en) * 2010-11-25 2012-05-30 北京中电科电子装备有限公司 Aerostatic electric spindle and cooling device thereof
CN103128864A (en) * 2011-11-23 2013-06-05 北京中电科电子装备有限公司 Thrust bearing and motorized spindle
CN204487330U (en) * 2014-12-20 2015-07-22 铜陵长江铜业有限公司 Copper bar burnishing device
CN105643418A (en) * 2016-02-26 2016-06-08 铜陵安东铸钢有限责任公司 Steel polishing device
CN109676507A (en) * 2019-01-23 2019-04-26 厦门大学 A kind of high speed air-floating main shaft air bag polishing device

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN112636510A (en) * 2020-11-09 2021-04-09 珠海格力电器股份有限公司 Air supporting rotor heat radiation structure and motor
CN112636510B (en) * 2020-11-09 2022-08-19 珠海格力电器股份有限公司 Air supporting rotor heat radiation structure and motor

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SE01 Entry into force of request for substantive examination
SE01 Entry into force of request for substantive examination
RJ01 Rejection of invention patent application after publication

Application publication date: 20190920

RJ01 Rejection of invention patent application after publication