CN110079759A - A kind of metal bellows surface treatment method - Google Patents
A kind of metal bellows surface treatment method Download PDFInfo
- Publication number
- CN110079759A CN110079759A CN201910178561.3A CN201910178561A CN110079759A CN 110079759 A CN110079759 A CN 110079759A CN 201910178561 A CN201910178561 A CN 201910178561A CN 110079759 A CN110079759 A CN 110079759A
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- metal bellows
- bellows
- treatment method
- surface treatment
- plated film
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- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/02—Pretreatment of the material to be coated
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/22—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material characterised by the process of coating
-
- C—CHEMISTRY; METALLURGY
- C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
- C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
- C23C14/00—Coating by vacuum evaporation, by sputtering or by ion implantation of the coating forming material
- C23C14/58—After-treatment
- C23C14/5826—Treatment with charged particles
- C23C14/5833—Ion beam bombardment
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- Chemical & Material Sciences (AREA)
- Chemical Kinetics & Catalysis (AREA)
- Engineering & Computer Science (AREA)
- Materials Engineering (AREA)
- Mechanical Engineering (AREA)
- Metallurgy (AREA)
- Organic Chemistry (AREA)
- ing And Chemical Polishing (AREA)
- Physical Vapour Deposition (AREA)
- Diaphragms And Bellows (AREA)
Abstract
The invention discloses a kind of metal bellows surface treatment method, step includes heat treatment, activation processing, coating film treatment and etching process.The advantages of doing invention is through the heat treatment of alcohol vapour while eliminating internal stress, the grease or other impurities on metal bellows first product surface can be effectively removed, and closed steam chest makes the surfaces externally and internally of bellows that can obtain uniform, sufficient processing;It is impregnated by activator solution, bellows is constantly extended and compressed by immersion while, makes to be activated more thorough, improves subsequent coating quality, and can effectively prevent the bellows later period elastic recoil occur and the problem of the pitch of waves, wave mode have differences;By PVD plated film, the corrosion resistance of bellows is effectively increased, extends the service life of bellows;By etching double micro-structures of micron-nanometer, makes bellows surface that there is good stain resistance, when bellows is as the sensing element measured, can guarantee its accuracy for a long time.
Description
Technical field
The present invention relates to bellows production technical fields, and in particular to a kind of metal bellows surface treatment method.
Background technique
Metal bellows is a kind of tubing of external form as the wave sample of rule, and common metal bellows has carbon steel, and
Stainless steel, it is also having steel lining plastic, aluminum etc..It is mainly used for needing the non-concentric axial transmission of the bending radius of very little,
Perhaps it irregular turning, flexible perhaps thermal deformation of extraction duct etc. or is not easy to do pipe with the occasion that fixed elbow is installed
The connection of the connection of road and pipeline or pipeline and equipment uses.The performances such as the stain resistant of conventional metals bellows, corrosion-resistant compared with
Difference, it would be highly desirable to improve.
Summary of the invention
The purpose of the present invention is to provide a kind of metal bellows surface treatment methods, significantly improve the resistance to of bellows
The performances such as contamination, corrosion-resistant.
The present invention through the following technical solutions to achieve the above objectives:
A kind of metal bellows surface treatment method, step include
Heat treatment: metal bellows being suspended in closed steam chest, and alcohol vapour is led in steam chest;
It is activated: metal bellows being soaked in activator solution, constantly changes metal bellows in soaking process
Elongation;
Coating film treatment: PVD plated film is formed in the inner and outer wall of metal bellows;
Etching process: once etching on the surface of PVD plated film and form micron mastoid process or recess, then two in micron mastoid process
Secondary etching forms nanometer protrusion.
Further improvement lies in that the temperature of the alcohol vapour is 180-200 DEG C, and metal bellows is placed when heat treatment
Time is 2-2.5h.
Further improvement lies in that the activator solution be selected from neopelex, lauryl sodium sulfate or its
Corresponding sylvite, ammonium salt.
Further improvement lies in that the variation range of the elongation is -5%~5%, and rate of change is every 8s change
1% length.
Further improvement lies in that the time of the soaking process is 1-4h.
Further improvement lies in that the PVD plated film be by vacuum evaporation, sputter coating, arc-plasma plating or from
The mode of sub- plated film is formed.
Further improvement lies in that the PVD plated film with a thickness of 0.01-0.015mm.
Further improvement lies in that the film material that the PVD plated film is selected is Ni, NiO, Ti, TiO2, Sn or SnO2。
Further improvement lies in that the etching is to carry out plasma etching by ion beam or atmosphere plasma.
The beneficial effects of the present invention are:
1) metal bellows first product table can be effectively removed while eliminating internal stress by the heat treatment of alcohol vapour
The grease or other impurities in face, and closed steam chest makes the surfaces externally and internally of bellows that can obtain uniform, sufficient processing;
2) it is impregnated by activator solution, bellows constantly extend and compressed by immersion while, makes activation processing more
Add thoroughly, improve subsequent coating quality, and can effectively prevent that elastic recoil and the pitch of waves occurs in the bellows later period, wave mode exists
The problem of difference;
3) by PVD plated film, the corrosion resistance of bellows is effectively increased, the service life of bellows is extended;
4) by etching double micro-structures of micron-nanometer, the surface for keeping bellows final has good hydro-oleophobicity,
Contaminated resistance effectively improves, and when bellows is as the sensing element measured, can guarantee its accuracy for a long time.
Specific embodiment
The application is described in further detail below with reference to embodiment, it is necessary to it is indicated herein to be, it is real in detail below
The mode of applying is served only for that the application is further detailed, and should not be understood as the limitation to the application protection scope, the field
Technical staff some nonessential modifications and adaptations can be made to the application according to above-mentioned application content.
Embodiment 1
A kind of metal bellows surface treatment method, step include
Heat treatment: metal bellows being suspended in closed steam chest, and alcohol vapour is led in steam chest, alcohol vapour
Temperature is 180 DEG C, and metal bellows standing time is 2.5h;
It being activated: metal bellows is soaked in activator solution, activator solution is neopelex,
The time of soaking process is 1h, constantly changes the elongation of metal bellows in soaking process, the variation range of elongation is-
5%~5%, and rate of change is the length that every 8s changes 1%;
Coating film treatment: PVD plated film, PVD plating are formed in the inner and outer wall of metal bellows by way of vacuum evaporation
Film with a thickness of 0.01mm, the film material that PVD plated film is selected is NiO;
Etching process: carrying out plasma etching by ion beam, once etches on the surface of PVD plated film and forms micron cream
Prominent or recess, etching period 1.5h;, then second etch forms nanometer protrusion in micron mastoid process.
Embodiment 2
A kind of metal bellows surface treatment method, step include
Heat treatment: metal bellows being suspended in closed steam chest, and alcohol vapour is led in steam chest, alcohol vapour
Temperature is 190 DEG C, and metal bellows standing time is 2.2h;
It is activated: metal bellows is soaked in activator solution, activator solution is lauryl sodium sulfate, leaching
The time of bubble process is 2.5h, constantly changes the elongation of metal bellows in soaking process, the variation range of elongation is-
5%~5%, and rate of change is the length that every 8s changes 1%;
Coating film treatment: PVD plated film, PVD plating are formed in the inner and outer wall of metal bellows by way of sputter coating
Film with a thickness of 0.012mm, the film material that PVD plated film is selected is Ti;
Etching process: carrying out plasma etching by ion beam, once etches on the surface of PVD plated film and forms micron cream
Prominent or recess, then second etch forms nanometer protrusion in micron mastoid process.
Embodiment 3
A kind of metal bellows surface treatment method, step include
Heat treatment: metal bellows being suspended in closed steam chest, and alcohol vapour is led in steam chest, alcohol vapour
Temperature is 200 DEG C, and metal bellows standing time is 2h;
It is activated: metal bellows is soaked in activator solution, activator solution is dodecyl sulphate potassium, leaching
The time of bubble process is 4h, constantly changes the elongation of metal bellows in soaking process, and the variation range of elongation is -5%
~5%, and rate of change is the length that every 8s changes 1%;
Coating film treatment: PVD plated film, PVD plating are formed in the inner and outer wall of metal bellows by way of sputter coating
Film with a thickness of 0.015mm, the film material that PVD plated film is selected is Sn;
Etching process: plasma etching is carried out by atmosphere plasma, once etches to be formed on the surface of PVD plated film
Micron mastoid process or recess, then second etch forms nanometer protrusion in micron mastoid process.
Performance detection is carried out to the metal bellows that above three embodiments are prepared, mainly from specification qualification rate, corrosion resistant
Erosion performance and stain resistant show these three aspects and are detected.
Specific detection process:
(1) 600 metal bellows first products are chosen, are randomly divided into four groups, every group 150, wherein three groups are used reality respectively
It applies example 1, embodiment 2 and embodiment 3 to be surface-treated, last group is without any processing, as a control group;
(2) measuring the Gu Fengzheng minus tolerances of 50 bellowss in every group respectively, (i.e. the big diameter of a circle of each of bellows is flat
The mean error of each small diameter of a circle in equal error and bellows), and record result;
(3) other 50 bellowss in every group are placed in acidic environment respectively and carry out Acceleration study, observed afterwards for 24 hours
There is the radical of corrosion condition in every group of inner corrugated pipe surface;
(4) remaining 50 bellowss in every group are soaked in oil respectively, are at the uniform velocity extracted out after immersion, observes wave in every group
There is the radical of oil content in line pipe surface.
Above-mentioned experimental result is counted into lower table:
Gu Fengzheng minus tolerance/mm | Be corroded number/root | By contamination number/root | |
Embodiment 1 | ±1.2 | 3 | 7 |
Embodiment 2 | ±0.9 | 2 | 7 |
Embodiment 3 | ±1.5 | 4 | 9 |
Control group | ±8.2 | 44 | 48 |
As can be seen from the above table, embodiment 1-3 is significantly better than that in specification qualification rate, corrosion-resistant performance and stain resistant performance
Control group.
The embodiments described above only express several embodiments of the present invention, and the description thereof is more specific and detailed, but simultaneously
Limitations on the scope of the patent of the present invention therefore cannot be interpreted as.It should be pointed out that for those of ordinary skill in the art
For, without departing from the inventive concept of the premise, various modifications and improvements can be made, these belong to guarantor of the invention
Protect range.
Claims (9)
1. a kind of metal bellows surface treatment method, it is characterised in that: step includes
Heat treatment: metal bellows being suspended in closed steam chest, and alcohol vapour is led in steam chest;
It is activated: metal bellows being soaked in activator solution, constantly changes stretching for metal bellows in soaking process
Long rate;
Coating film treatment: PVD plated film is formed in the inner and outer wall of metal bellows;
Etching process: once etching on the surface of PVD plated film and form micron mastoid process or recess, the then secondary erosion in micron mastoid process
Form nanometer protrusion quarter.
2. a kind of metal bellows surface treatment method according to claim 1, it is characterised in that: described when heat treatment
The temperature of alcohol vapour is 180-200 DEG C, and metal bellows standing time is 2-2.5h.
3. a kind of metal bellows surface treatment method according to claim 1, it is characterised in that: the activator solution
Selected from neopelex, lauryl sodium sulfate or its corresponding sylvite, ammonium salt.
4. a kind of metal bellows surface treatment method according to claim 1, it is characterised in that: the change of the elongation
Changing range is -5%~5%, and rate of change is the length that every 8s changes 1%.
5. a kind of metal bellows surface treatment method according to claim 1, it is characterised in that: the soaking process
Time is 1-4h.
6. a kind of metal bellows surface treatment method according to claim 1, it is characterised in that: the PVD plated film is
It is formed by way of vacuum evaporation, sputter coating, arc-plasma plating or ion film plating.
7. a kind of metal bellows surface treatment method according to claim 1, it is characterised in that: the PVD plated film
With a thickness of 0.01-0.015mm.
8. a kind of metal bellows surface treatment method according to claim 1, it is characterised in that: the PVD plated film choosing
Film material is Ni, NiO, Ti, TiO2, Sn or SnO2。
9. a kind of metal bellows surface treatment method according to claim 1, it is characterised in that: the etching is to pass through
Ion beam or atmosphere plasma carry out plasma etching.
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CN201910178561.3A CN110079759B (en) | 2019-03-11 | 2019-03-11 | Surface treatment method for metal corrugated pipe |
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CN201910178561.3A CN110079759B (en) | 2019-03-11 | 2019-03-11 | Surface treatment method for metal corrugated pipe |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
CN111041447A (en) * | 2019-12-30 | 2020-04-21 | 河海大学常州校区 | Preparation method of metal microstructure |
CN113774326A (en) * | 2021-08-26 | 2021-12-10 | 浙江交工新材料有限公司 | Surface treatment method for metal corrugated pipe |
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JP2004214370A (en) * | 2002-12-27 | 2004-07-29 | Nippon Itf Kk | Plasma resistant bellows |
CN1651507A (en) * | 2004-12-02 | 2005-08-10 | 同济大学 | Carbon nano-pipel poly vinyl imidazole nano-composite material and its preparation method |
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CN103341523A (en) * | 2013-07-16 | 2013-10-09 | 南京三邦金属复合材料有限公司 | Swelling pressure forming and manufacturing method of zirconium corrugated pipe |
CN105032979A (en) * | 2015-08-24 | 2015-11-11 | 北京星航机电装备有限公司 | Machining method and device for multi-layer membrane structure corrugated pipe |
CN204962117U (en) * | 2015-08-29 | 2016-01-13 | 杭州恒通金属软管有限公司 | Corrugated metal pipe is used to gas utensil |
CN106833275A (en) * | 2017-02-13 | 2017-06-13 | 江苏广通管业制造有限公司 | A kind of technique for making corrosion prevention film on metals ripples tube culver surface |
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Patent Citations (7)
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JP2004214370A (en) * | 2002-12-27 | 2004-07-29 | Nippon Itf Kk | Plasma resistant bellows |
CN1779929A (en) * | 2004-11-26 | 2006-05-31 | 中华映管股份有限公司 | Production of thin-film transistor |
CN1651507A (en) * | 2004-12-02 | 2005-08-10 | 同济大学 | Carbon nano-pipel poly vinyl imidazole nano-composite material and its preparation method |
CN103341523A (en) * | 2013-07-16 | 2013-10-09 | 南京三邦金属复合材料有限公司 | Swelling pressure forming and manufacturing method of zirconium corrugated pipe |
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CN204962117U (en) * | 2015-08-29 | 2016-01-13 | 杭州恒通金属软管有限公司 | Corrugated metal pipe is used to gas utensil |
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Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
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CN111041447A (en) * | 2019-12-30 | 2020-04-21 | 河海大学常州校区 | Preparation method of metal microstructure |
CN113774326A (en) * | 2021-08-26 | 2021-12-10 | 浙江交工新材料有限公司 | Surface treatment method for metal corrugated pipe |
CN113774326B (en) * | 2021-08-26 | 2024-02-27 | 浙江交工新材料有限公司 | Surface treatment method for metal corrugated pipe |
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