CN110006969A - A kind of multi-parameter water environment integrated microsensor and preparation method thereof based on electrochemical measuring technique - Google Patents

A kind of multi-parameter water environment integrated microsensor and preparation method thereof based on electrochemical measuring technique Download PDF

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Publication number
CN110006969A
CN110006969A CN201910313726.3A CN201910313726A CN110006969A CN 110006969 A CN110006969 A CN 110006969A CN 201910313726 A CN201910313726 A CN 201910313726A CN 110006969 A CN110006969 A CN 110006969A
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China
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electrode
heater
water environment
measuring technique
parameter water
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王鑫
冯侨华
孙立宁
施云波
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Harbin University of Science and Technology
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Harbin University of Science and Technology
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    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28Electrolytic cell components
    • G01N27/30Electrodes, e.g. test electrodes; Half-cells
    • G01N27/302Electrodes, e.g. test electrodes; Half-cells pH sensitive, e.g. quinhydron, antimony or hydrogen electrodes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/28Electrolytic cell components
    • G01N27/30Electrodes, e.g. test electrodes; Half-cells
    • G01N27/307Disposable laminated or multilayered electrodes
    • GPHYSICS
    • G01MEASURING; TESTING
    • G01NINVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/26Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating electrochemical variables; by using electrolysis or electrophoresis
    • G01N27/416Systems

Abstract

A kind of multi-parameter water environment integrated microsensor and preparation method thereof based on electrochemical measuring technique, is related to electrochemical sensor technology field.The present invention is the electrochemical sensor device in order to solve to be currently used for water quality detection, and volume is big, clean and maintenance program is complicated, and required reagent is more, the problem of having an impact to test result.A kind of multi-parameter water environment integrated microsensor based on electrochemical measuring technique of the present invention, including substrate, No.1 insulating layer, heater layer, No. two insulating layers, microelectrode floor and the test chamber being cascading from bottom to up.PH sensor and temperature sensor are provided on Electrochemistry Micro-sensors, the temperature value that the pH value measured using PH sensor and temperature sensor are measured can be modified the water quality parameter that other two sensor measures, realize the precise measurement of water quality parameter.

Description

A kind of multi-parameter water environment integrated microsensor based on electrochemical measuring technique and its Preparation method
Technical field
The invention belongs to electrochemical sensor technology field more particularly to water environment electrochemical sensors.
Background technique
Monitoring water environment is the main foundation of water quality assessment and water prevention and cure of pollution, increasingly tight with water pollution problem Weight, water quality monitoring become the significant problem that Sustainable Socioeconomic Development must solve.And the water quality of rivers water body and state's people's livelihood It produces and people's lives is closely bound up, therefore, quick accurately water environment sensor is just particularly important.
Currently, the method for measurement water quality parameter mainly includes chemical analysis, segregation analysis, spectra methods, electrification Learn analytic approach and various detection means joint technology etc..Electrochemical methods are the electricity and electrochemical properties using test substance Measure the quantitative and qualitative analysis method of its property.This method and other subject have it is close contact, in terms of water quality detection, electricity Chemical analysis is a kind of generally acknowledged sensitive, fast and accurately micro and trace analysis methods, and its instrument is simple, cost It is low, it is suitable for miniaturization.
The electrochemical sensor device of water quality detection is currently used in traditional measurement, is mainly placed in measurement solution In laboratory, water quality measurement is realized with large electrode measuring device.Not only volume is larger but also clean and maintenance program for these devices Complexity, required reagent is more, needs to expend a large amount of manpower and material resources.Simultaneously as electrochemical solution system complex, many parameters The pH value of such as solution, temperature can all have an impact the test result of other parameters.
Summary of the invention
The present invention is the electrochemical sensor device in order to solve to be currently used for water quality detection, and volume is big, clean and maintenance journey Sequence is complicated, and required reagent is more, the problem of having an impact to test result, now provides a kind of based on Electrochemical Detection skill Multi-parameter water environment integrated microsensor of art and preparation method thereof.
A kind of multi-parameter water environment integrated microsensor based on electrochemical measuring technique, including stack gradually from bottom to up Substrate, No.1 insulating layer, heater layer, No. two insulating layers, microelectrode floor and the test chamber of setting;
Heater layer includes heater and two heater pads, and the heater is in square wave configuration, the both ends of heater Respectively with two heater pad solders;
Microelectrode layer includes temperature sensing electrode and three microelectrodes, and microelectrode includes working electrode, to electrode and reference Electrode, the rounded structure of working electrode, to electrode and the equal semicircular in shape structure of reference electrode and the two sides for being distributed in working electrode, To electrode and reference electrode mirror symmetry and it is open opposite;
No.1 insulating layer is in rectangle, and two heater pads are arranged along a line of No.1 insulating layer, on No.1 insulating layer 11 electrode pads are additionally provided with, wherein 2 electrode pads are located between two heater pads, the both ends point of temperature sensing electrode It is not welded with 2 electrode pads, remaining 9 electrode pads every three electrode groups of arranging and constitute in straight line, Three electrode groups are arranged along three sides of the residue of No.1 insulating layer respectively, and three microelectrodes are a pair of with three electrode groups one respectively It answers, working electrode, three electrode pads distinguished electrode and reference electrode in corresponding electrode group are electrically connected;
Test chamber is cavity body structure, and upper surface is provided with inlet and liquid outlet, and test chamber inside cavity sets that there are four micro- Reaction tank, four micro reaction pools are located at the surface of temperature sensing electrode and three microelectrodes, and inlet can be by micro- Channel injects test fluid to four micro reaction pools, and test fluid can be discharged by liquid outlet.
Above-mentioned substrate is silicon wafer, die size 20mm*20mm*1mm.
Above-mentioned No.1 insulating layer and No. two insulating layers are silicon dioxide insulating layer.
Above-mentioned heater and heater pad are Pt film.
Above three microelectrode is respectively PH sensing electrode, ammonium concentration sensing electrode, concentration of heavy metal ion sensing Electrode.
The working electrode surface of above-mentioned ammonium concentration sensing electrode is covered with polyaniline sensitive membrane, and concentration of heavy metal ion passes The working electrode surface of sense electrode is covered with nanogold particle film.
Above-mentioned working electrode is Au film or Pt film, is Pt film to electrode, and reference electrode is Ag or AgCl film.
Above-mentioned test chamber is PMMA material.
A kind of preparation method of above-mentioned multi-parameter water environment integrated microsensor based on electrochemical measuring technique, this method The following steps are included:
Step 1: growing No.1 insulating layer in substrate,
Step 2: defining the shape of heater, heater pad and electrode pad using positive photoresist photoetching process, after splash-proofing sputtering metal Positive photoresist removing is carried out, heater, heater pad and electrode pad are formed,
Step 3: preparing No. two insulating layers on the heaters,
Step 4: the shape of temperature sensing electrode and microelectrode is defined using positive photoresist photoetching process, is carried out just after splash-proofing sputtering metal Glue removing, formation temperature sensing electrode and microelectrode,
Step 5: preparing test chamber, then using stifling bonding method by test chamber be covered in temperature sensing electrode and On microelectrode, the preparation of multi-parameter water environment integrated microsensor is completed.
The above-mentioned test chamber of preparation method particularly includes:
Inlet, liquid outlet, micro reaction pool and micro- channel are processed on PMMA substrate using micro- accurate engraving machine.
Since parameters most in water environment will receive the influence of pH value and temperature, the present invention is set on Electrochemistry Micro-sensors PH sensor and temperature sensor are set, the temperature value that the pH value measured using PH sensor and temperature sensor are measured can be with The water quality parameter measured to other two sensor is modified, and realizes the precise measurement of water quality parameter;Centre is equipped with Pt film and adds Hot device, cooperation temperature sensor use, are convenient for real-time control, suitable operating temperature is provided for each sensor unit, improve The detection accuracy of sensor;Using MEMS technology, multiple microelectrode measuring units are integrated in (such as PH on the same sensor Value, temperature etc.), it can be achieved that water quality parameter precise measurement, and entire sensor bulk is small, and required sample is few.
Detailed description of the invention
Fig. 1 is the discrete schematic diagram of multi-parameter water environment integrated microsensor of the present invention;
Fig. 2 is the top view of heater layer;
Fig. 3 is the top view of No. two insulating layers;
Fig. 4 is the top view of microelectrode layer;
Fig. 5 is the structural schematic diagram of microelectrode;
Fig. 6 is the top view of multi-parameter water environment integrated microsensor of the present invention;
Fig. 7 is the perspective view of multi-parameter water environment integrated microsensor of the present invention;
Fig. 8 is the perspective view of test chamber;
Fig. 9 is the preparation flow schematic diagram of multi-parameter water environment integrated microsensor of the present invention.
Specific embodiment
With the development of MEMS technology, the micromation of sensor integrated has become current water quality parameter detection technique The inexorable trend of development.Microelectrode sensors and microfluidic sensor volume in the prior art reduces, and required sample is few, is not required to Deoxygenation and stirring, without adding supporting electrolyte, together by both sensor integrations, be electrochemical sensor development must Right trend.Therefore, the present invention realizes the integrated of two kinds of sensors by following implementation.
Specific embodiment 1: illustrating present embodiment referring to figs. 1 to 8, one kind described in present embodiment is based on The multi-parameter water environment integrated microsensor of electrochemical measuring technique, including be cascading from bottom to up silicon wafer substrate 1, No.1 silicon dioxide insulating layer 2, heater layer, No. two silicon dioxide insulating layers 6, microelectrode floor and test chamber 9.
Silicon wafer substrate 1 is having a size of 20mm*20mm*1mm.
Heater layer includes heater 4 and two heater pads 5, and the heater 4 is in square wave configuration, heater 4 It is welded respectively with two heater pads 5 at both ends;Heater 4 and heater pad 5 are all made of the temperature-coefficient of electrical resistance TCR linearity Extraordinary Pt metal material.
Microelectrode layer includes temperature sensing electrode 7 and three microelectrodes 8, temperature sensing electrode 7 in " several " character form structure and Should " several " character form structure top to lower recess;Temperature sensing electrode 7 is extraordinary using temperature-coefficient of electrical resistance (TCR) linearity The detection of Pt metal material realization water temperature.Microelectrode 8 is made of three electrode measurement systems, and the microelectrode 8 includes working electrode 8-1, to electrode 8-2 and reference electrode 8-3, the rounded structure of working electrode 8-1 is in half to electrode 8-2 and reference electrode 8-3 Circular configuration and the two sides for being distributed in working electrode 8-1 to electrode 8-2 and reference electrode 8-3 mirror symmetry and are open opposite;Work Making electrode 8-1 is Au film or Pt film, is Pt film to electrode 8-2, and reference electrode 8-3 is Ag or AgCl film.
Above three microelectrode 8 is respectively PH sensing electrode, ammonium concentration sensing electrode, concentration of heavy metal ion sensing Electrode, and it is respectively used to the pH value detection of aqueous solution, the ammonium concentration detection of aqueous solution, the heavy metal ion inspection of aqueous solution It surveys.When practical application, the working electrode surface of ammonium concentration sensing electrode and concentration of heavy metal ion sensing electrode is covered There is sensitive membrane, specifically, the working electrode surface of ammonium concentration sensing electrode is covered with polyaniline sensitive membrane, heavy metal ion is dense The working electrode surface of degree sensing electrode is covered with nanogold particle film.
No.1 silicon dioxide insulating layer 2 is in rectangle, one along No.1 silicon dioxide insulating layer 2 of two heater pads 5 Side is arranged, and is additionally provided with 11 electrode pads 3 on No.1 silicon dioxide insulating layer 2, wherein 2 electrode pads 3 are located at two heating Between device pad 5, with two heater pads 5 in straight line arrange, the both ends of temperature sensing electrode 7 respectively with above-mentioned 2 Electrode pad 3 welds;Remaining 9 electrode pads 3 every three are arranged in straight line and constitute an electrode group, three electrodes Group is arranged along three sides of the residue of No.1 silicon dioxide insulating layer 2 respectively;Three microelectrodes 8 are a pair of with three electrode groups one respectively It answers, working electrode 8-1, distinguishes electrode 8-2 and reference electrode 8-3 the electricity of three electrode pads 3 in corresponding electrode group Gas connection.
Test chamber 9 is the cavity body structure of PMMA material, and upper surface is provided with inlet 9-1 and liquid outlet 9-2, test chamber 9 Inside cavity is set there are four micro reaction pool 9-3, and four micro reaction pool 9-3 are located at temperature sensing electrode 7 and three microelectrodes 8 Surface, as shown in FIG. 7 and 8.
It is 1,2,3,4 that four micro reaction pool 9-3 are numbered respectively, and inlet 9-1 and number are three of 1,2,3 and micro- react Pond 9-3 is connected to by micro- channel 9-4, and three micro reaction pool 9-3 that liquid outlet 9-2 is 1,3,4 with number pass through micro- channel 9-4 and connect Logical, two micro reaction pool 9-3 of number 2,4 are interconnected by micro- channel 9-4, enable inlet 9-1 micro- to four Reaction tank 9-3 injects test fluid, and test fluid can be discharged by liquid outlet 9-2.
In practical application, heater pad 5 and electrode pad 3 are connected with external circuit, various water quality parameter signals are realized Detection.Heater 4 cooperates temperature sensing electrode 7 to use, and on the one hand realizes the measurement to water temperature, on the other hand to measurement environment Temperature accurately controlled.The temperature value that the pH value and temperature sensing electrode 7 measured using PH sensing electrode is measured, can be right The measured value of ammonium concentration sensing electrode and concentration of heavy metal ion sensing electrode is modified, and realizes the accurate of water quality parameter Measurement.
It is detected using pH value and temperature value of the above-mentioned multi-parameter water environment integrated microsensor to solution, specific steps It is as follows:
PH value detection uses three-electrode structure, is made of Pt working electrode, Pt to electrode, Ag/AgCl reference electrode;Detection Method uses timing potentiometric method, cooperates electrochemical workstation, and the connection corresponding with electrochemical workstation of each electrode works in Pt Electrode and to applying constant current between electrode, when electric current flows through Pt electrode, redox reaction, electrode occur for Pt electrode surface Potential changes, and the pH value of solution is measured by the potential difference of measurement Pt electrode and reference electrode, and the measurement of potential meets Nernst equation:E is measurement potential, E0For standard electrode EMF, R is gas constant (8.314JK-1mol-1), T is absolute temperature (K), and F is Faraday constant (96487.3415Cmol-1)。
By Nernst equation it is found that pH value precise measurement and temperature T-phase are closed, temperature sensor uses temperature-coefficient of electrical resistance (TCR) the extraordinary Pt metal material preparation of the linearity, to realize that water environment temperature measures, according to measuring, temperature value control is micro- Heater realizes that temperature accurately controls.
The ammonium concentration of solution is detected using above-mentioned multi-parameter water environment integrated microsensor, specific steps are such as Under:
Conventional cleaning is carried out to electrode first, heating air-dries, secondly by Pt piece working electrode, Pt piece to electrode and Ag/ The connection corresponding with electrochemical workstation of AgCl reference electrode deposits next using cyclic voltammetry in Pt piece working electrode surface Ammonium ion selective film (polyaniline), electrolyte be configured ammonium ion selective solution, voltage range be set as 0 to 0.45V, sweep speed 50mV/s, scanning circle number is 20 circles, places an electrode in drier and air-dries, and prepares ammonium ion selection Property film.
After ammonium ion selective electrode prepares, can be used for the detection of ammonium concentration in aqueous solution, detection method be from The quick potentiometric measurement of son, it is made of working electrode and reference electrode.Wherein, working electrode is to have modified ammonium ion sensitive membrane Ion selective electrode, reference electrode are Ag/AgCl electrode, and the electrode potential of reference electrode keeps stablizing, ammonium ion selective The open-circuit voltage of electrode can reflect the size of ammonium concentration in solution, this open-circuit voltage meets Nernst equation, therefore surveys It is related with the temperature value of the pH value of solution and solution to measure result.The pH value and temperature value measured with embodiment 2 can realize to ammonium from The amendment of sub- concentration value.
Above-mentioned experiment is able to demonstrate that multi-parameter water environment Electrochemistry Micro-sensors described in present embodiment, can be realized more The pH value and temperature value for measuring while kind water quality parameter, and measuring can be modified other water quality parameters, if in work Make the different sensitive thin film of electrode face finish, the function of sensor can be further expanded.
Specific embodiment 2: illustrating present embodiment referring to Fig. 9, present embodiment is one institute of specific embodiment A kind of preparation method for the multi-parameter water environment integrated microsensor based on electrochemical measuring technique stated, this method includes following Step:
Step 1: cleaning silicon chip substrate 1 simultaneously carries out thermal oxide to silicon wafer, and growth thickness is 10 μm in silicon wafer substrate 1 No.1 silicon dioxide insulating layer 2.
Step 2: the shape of heater 4, heater pad 5 and electrode pad 3 is defined using positive photoresist photoetching process, is then splashed The Pt metal with a thickness of 10 μm is penetrated, finally carries out positive photoresist removing (Lift-off), forms heater 4, heater pad 5 and electrode Pad 3 obtains heater layer.
Step 3: it prepares in 4 upper surface of heater with a thickness of 10 μm of No. two silicon dioxide insulating layers 6, described No. two two Insulating layer of silicon oxide 6 can cover 4 region of heater, then vacate the region of heater pad 5 and electrode pad 3.
Step 4: defining the shape of temperature sensing electrode 7 and microelectrode 8 using positive photoresist photoetching process, then sputter with a thickness of 10 μm of Au or Pt metal makes working electrode 8-1;The Pt metal with a thickness of 10 μm is sputtered, is made to electrode 8-2;Sputtering is thick The Ag metal that degree is 10 μm makes reference electrode 8-3;The Pt metal with a thickness of 10 μm is sputtered, makes temperature sensing electrode 7, so Carry out positive photoresist removing respectively afterwards;
Using Ag metal as anode, Pt metal is electrolysed in saturated potassium chloride solution as cathode, its surface is made to form sediment One layer of silver chlorate of product, is fabricated to silver-colored silver chloride reference electrode, obtains temperature sensing electrode 7 and microelectrode 8, forms microelectrode layer.
In above-mentioned steps, since silicon dioxide insulating layer 6 vacates the region of heater pad 5 and electrode pad 3, so that Heater pad 5 and electrode pad 3 can be realized with microelectrode layer electrode to be electrically connected.
Step 5: inlet 9- is processed on the PMMA substrate having a size of 17mm*17mm*2mm using micro- accurate engraving machine 1, liquid outlet 9-2, micro reaction pool 9-3 and micro- channel 9-4 obtain test chamber 9;The inlet 9-1 and liquid outlet 9-2 diameter are equal For 2mm, and PMMA substrate up and down, micro reaction pool 9-3 are the cylindrical structure of diameter 2mm, high 1mm, the cross of micro- channel 9-4 Section is the square of 0.5mm*0.5mm;
Then test chamber 9 is covered on temperature sensing electrode 7 and microelectrode 8 using stifling bonding method, is completed more The preparation of parameter water environment integrated microsensor.
Further, in the preparation for ammonium concentration sensing electrode, conventional cleaning is carried out to electrode first, heats wind Dry, secondly the working surface using cyclic voltammetry in Pt sheet metal deposits ammonium ion selective film (polyaniline), electrolyte For configured ammonium ion selective solution, Pt sheet metal is used as to electrode, and Ag/AgCl is set as reference electrode, voltage range It is set to 0 to 0.45V, sweep speed 50mV/s, scanning circle number is 20 circles, places an electrode in drier and air-dries.
In the preparation for concentration of heavy metal ion sensing electrode, concentration of heavy metal ion detection mostly uses cyclic voltammetry It realizes, modifies nanometer particle film in working electrode surface, can effectively increase electrode surface area, electrolysis bioaccumulation efficiency increases, So that the sensitivity of voltammetry detection is also improved.It is illustrated by taking modified nano gold particle film as an example: first to electrode Conventional cleaning is carried out, in the HAuCl of 2mmo1/L4(the H of bottom liquid 0.5mol/L2SO4) in using potentiostatic method under -0.3V voltage The electro-deposition of nanogold particle is carried out, after depositing 150s, one layer of nanogold particle film can be deposited in working electrode surface.

Claims (10)

1. a kind of multi-parameter water environment integrated microsensor based on electrochemical measuring technique, which is characterized in that including from down toward On the substrate (1), No.1 insulating layer (2), heater layer, No. two insulating layers (6), microelectrode floor and the test chamber that are cascading (9);
Heater layer includes heater (4) and two heater pads (5), and the heater (4) is in square wave configuration, heater (4) it is welded respectively with two heater pads (5) at both ends;
Microelectrode layer includes temperature sensing electrode (7) and three microelectrodes (8), and microelectrode (8) includes working electrode (8-1), right Electrode (8-2) and reference electrode (8-3), working electrode (8-1) rounded structure are equal to electrode (8-2) and reference electrode (8-3) Semicircular in shape structure and the two sides for being distributed in working electrode (8-1), to electrode (8-2) and reference electrode (8-3) mirror symmetry and Opening is opposite;
No.1 insulating layer (2) is in rectangle, and two heater pads (5) are arranged along a line of No.1 insulating layer (2), No.1 insulation 11 electrode pads (3) are additionally provided on layer (2), wherein 2 electrode pads (3) are located between two heater pads (5), temperature The both ends of sensing electrode (7) are welded with 2 electrode pads (3) respectively, and remaining 9 electrode pads (3) every three are in one Straight line arranges and constitutes an electrode group, and three electrode groups are arranged along three sides of the residue of No.1 insulating layer (2) respectively, and three micro- Electrode (8) is corresponded with three electrode groups respectively, and working electrode (8-1) distinguishes electrode (8-2) and reference electrode (8-3) Three electrode pads (3) electrical connection in corresponding electrode group;
Test chamber (9) is cavity body structure, and upper surface is provided with inlet (9-1) and liquid outlet (9-2), in test chamber (9) cavity Portion is set there are four micro reaction pool (9-3), and four micro reaction pools (9-3) are located at temperature sensing electrode (7) and three microelectrodes (8) surface, inlet (9-1) can inject test fluid to four micro reaction pools (9-3) by micro- channel, and test fluid can It is discharged by liquid outlet (9-2).
2. a kind of multi-parameter water environment integrated microsensor based on electrochemical measuring technique according to claim 1, It is characterized in that, substrate (1) is silicon wafer, die size 20mm*20mm*1mm.
3. a kind of multi-parameter water environment integrated microsensor based on electrochemical measuring technique according to claim 1, It is characterized in that, No.1 insulating layer (2) and No. two insulating layers (6) are silicon dioxide insulating layer.
4. a kind of multi-parameter water environment integrated microsensor based on electrochemical measuring technique according to claim 1, It is characterized in that, heater (4) and heater pad (5) are Pt film.
5. a kind of multi-parameter water environment integrated microsensor based on electrochemical measuring technique according to claim 1, It is characterized in that, three microelectrodes (8) are respectively PH sensing electrode, ammonium concentration sensing electrode, concentration of heavy metal ion sensing Electrode.
6. a kind of multi-parameter water environment integrated microsensor based on electrochemical measuring technique according to claim 1, It is characterized in that, the working electrode surface of ammonium concentration sensing electrode is covered with polyaniline sensitive membrane, concentration of heavy metal ion sensing The working electrode surface of electrode is covered with nanogold particle film.
7. a kind of multi-parameter water environment integrated microsensor based on electrochemical measuring technique according to claim 1, It is characterized in that, it is Pt film to electrode (8-2) that working electrode (8-1), which is Au film or Pt film, and reference electrode (8-3) is Ag or AgCl Film.
8. a kind of multi-parameter water environment integrated microsensor based on electrochemical measuring technique according to claim 1, It is characterized in that, test chamber (9) is PMMA material.
9. a kind of preparation side of multi-parameter water environment integrated microsensor based on electrochemical measuring technique described in claim 1 Method, which comprises the following steps:
Step 1: growing No.1 insulating layer (2) on substrate (1),
Step 2: defining the shape of heater (4), heater pad (5) and electrode pad (3) using positive photoresist photoetching process, sputtering Positive photoresist removing is carried out after metal, forms heater (4), heater pad (5) and electrode pad (3),
Step 3: preparing No. two insulating layers (6) on heater (4),
Step 4: the shape of temperature sensing electrode (7) and microelectrode (8) is defined using positive photoresist photoetching process, is carried out after splash-proofing sputtering metal Positive photoresist removing, formation temperature sensing electrode (7) and microelectrode (8),
Step 5: preparing test chamber (9), and test chamber (9) is then covered in temperature sensing electrode using stifling bonding method (7) and on microelectrode (8), the preparation of multi-parameter water environment integrated microsensor is completed.
10. preparation method as claimed in claim 9, which is characterized in that prepare test chamber (9) method particularly includes:
Inlet (9-1), liquid outlet (9-2), micro reaction pool (9-3) and micro- are processed on PMMA substrate using micro- accurate engraving machine Channel (9-4).
CN201910313726.3A 2019-04-18 2019-04-18 A kind of multi-parameter water environment integrated microsensor and preparation method thereof based on electrochemical measuring technique Pending CN110006969A (en)

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CN207338341U (en) * 2017-09-18 2018-05-08 北京北方华创微电子装备有限公司 Chuck and reaction chamber

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